CN109725415B - Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof - Google Patents
Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof Download PDFInfo
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- CN109725415B CN109725415B CN201910181468.8A CN201910181468A CN109725415B CN 109725415 B CN109725415 B CN 109725415B CN 201910181468 A CN201910181468 A CN 201910181468A CN 109725415 B CN109725415 B CN 109725415B
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Abstract
The invention discloses a piezoelectric driving deformation mirror for multi-beam incoherent space synthesis, which comprises a support frame, a half-circle clamp, a honeycomb mirror body, a piezoelectric driver and an electric connection assembly, wherein the half-circle clamp is fastened on the support frame, the honeycomb mirror body and the electric connection assembly are respectively arranged in front and rear end circle openings of the half-circle clamp, the piezoelectric driver is adhered to the back of the honeycomb mirror body, the piezoelectric driver is electrically connected with the electric connection assembly, the half-circle clamp is formed by closing two semi-rings, and two connecting ends of the half-circle clamp are at least one adjusting end and are used for adjusting clamping force on the honeycomb mirror body. The piezoelectric driving deformable mirror for multi-beam incoherent space synthesis has the characteristics of compact structure, convenience in installation, large deformation range, high deformation precision and good deformation stability, and can improve the capacity of improving the beam quality of an incoherent space synthesis laser system.
Description
Technical Field
The application relates to the technical field of lasers and self-adaptive optical devices, in particular to a piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and an assembly method thereof.
Background
The output power of a solid state laser is affected by various factors such as thermal effects, nonlinear effects, optical element surface quality, etc. The output beams of the lasers are combined to obtain high-power laser output. The beam combining methods can be mainly classified into three types: coherent synthesis, spectral synthesis, and incoherent synthesis. Incoherent spatial synthesis is one of the main methods of incoherent synthesis, which is to combine and output laser light emitted by multiple lasers through a series of beam shaping and transformation. This combining technique can increase the total power of the laser output, but can affect the quality of the output beam. In applications, an adaptive optics system is typically used to repair the output beam to improve beam quality.
The deformable mirror of the adaptive optics is a very important optical correction device, the way of assembly of which directly influences the deformability of the deformable mirror. In general, the deformable mirror assembly mode for multi-beam incoherent spatial synthesis mainly comprises a mirror body edge tight support and a local point support. The deformed mirror with the local point support is loose in structure, large in assembly difficulty, large in occupied space and low in stability due to uncontrollable clamping force. The deformed mirror tightly supported by the edge of the mirror body has larger rigidity, but the mirror body is easy to deform due to limited deformation of the mirror body and large clamping force due to the tight support.
Disclosure of Invention
In order to solve the problem that clamping force of an existing deformable mirror for multi-beam incoherent space synthesis is uncontrollable in the assembly process, so that the deformation of the deformable mirror is unstable, and the quality of beam synthesis is poor, the application provides a piezoelectric driving deformable mirror for multi-beam incoherent space synthesis, and the problem is solved by designing a honeycomb mirror clamp with adjustable clamping force.
The specific scheme provided by the application is as follows:
the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis comprises a support frame, a half-circle clamp, a honeycomb mirror body, a piezoelectric driver and an electric connection assembly, wherein the half-circle clamp is fastened on the support frame, the half-circle clamp is formed by closing a fastening half ring and a regulating half ring to form a front end ring opening and a rear end ring opening, the honeycomb mirror body is clamped and fixed in the front end ring opening by the half-circle clamp, the electric connection assembly is arranged in the rear end ring opening of the half-circle clamp, and two connecting ends of the half-circle clamp are at least one regulating end and are used for regulating the clamping force of the honeycomb mirror body;
the honeycomb mirror body is attached to the front end ring opening, a plurality of honeycomb grooves are formed in the back face of the honeycomb mirror body, and a boss is arranged in the middle of each honeycomb groove and used for being bonded with a piezoelectric driver;
the piezoelectric driver comprises a piezoelectric ceramic plate, a driving electrode and a grounding electrode, wherein the grounding electrode and the driving electrode are plated on two sides of the piezoelectric ceramic plate respectively through a screen printing technology and are electrically connected with the grounding assembly respectively.
Preferably, the other connecting end of the half circle clamp is hinged.
Still further, the system still includes coupling assembling, coupling assembling is by adjusting screw and suit be in adjusting spring outside the adjusting screw constitutes, half circle anchor clamps regulation end is opened has closed through-hole, closed through-hole one end is the counter bore, and the other end is the screw hole, adjusting screw's rotation end is arranged in the counter bore, the other end with the screw hole screw thread lock joint.
Specifically, the support frame includes bottom plate, set screw, arc cutting ferrule and fastening bolt, fastening bolt is located arc cutting ferrule top, the arc cutting ferrule passes through set screw solid-fixation is in on the bottom plate, the fastening semi-ring of half circle anchor clamps passes through fastening bolt fastens in the arc cutting ferrule.
Specifically, the arc-shaped cutting ferrule is made of elastic materials, and the opening of the arc-shaped cutting ferrule is arranged between 90 degrees and 180 degrees.
Specifically, the piezoelectric actuator is bonded to the boss via a ground electrode.
Specifically, the driving electrode comprises 1 central region electrode and a plurality of sector region electrodes, wherein the sector region electrodes are uniformly distributed around the central region electrode at intervals.
Specifically, the power receiving assembly comprises a circuit board and a socket, wherein the socket is a straight-pin ox horn socket and is fixed on the circuit board.
Specifically, at least two back plate screw holes are formed in the back surface of the fastening half ring of the half ring clamp, a U-shaped groove is formed in the corresponding position of the circuit board, and the circuit board is fixed to the back surface of the fastening half ring through back plate screws.
According to the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis provided by the above, the assembly method comprises the following steps:
s1: establishing electrical connection between the piezoelectric driver and the electrical connection assembly;
s2: bonding the piezoelectric driver in a honeycomb groove on the back surface of the honeycomb mirror body;
s3: fastening the honeycomb mirror body in the front end ring opening of the half-ring clamp;
s4: the electric connection assembly screw is fixed in the ring opening at the rear end of the half-ring clamp;
s5: fastening the half-circle clamp in an arc-shaped clamping sleeve of the support frame;
s6: and adjusting the clamping force of the half-circle clamp to the honeycomb mirror body, and connecting the power receiving assembly with a power supply.
Compared with the prior art, the technical scheme provided by the application has the following beneficial effects:
1. according to the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis, the clamping force of the honeycomb mirror body is adjusted through the half-circle clamp connecting assembly, so that the deformation constraint force of the honeycomb mirror body is controllable, the shape stability of the mirror body can be improved, and the capacity of improving the beam quality of an incoherent space beam synthesis laser system is improved;
2. the connecting component in the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis comprises the adjusting screw and the spring, the semi-ring components of the semi-ring clamp are connected together through the adjusting screw, the spring sleeved on the adjusting screw enables certain deviating elastic force to be arranged between the semi-ring components, when the adjusting screw is screwed down, the deviating elastic force is increased, when the adjusting screw is unscrewed, the deviating elastic force is reduced, and mirror surface deformation caused by overlarge stress of the honeycomb mirror body is effectively prevented;
3. the power-on assembly of the piezoelectric driving deformation mirror for multi-beam incoherent space synthesis is fixed on the fastening half ring of the half ring clamp, so that the system is easy to install and convenient to adjust, the assembly method is simple in steps, and the assembly efficiency can be improved.
4. The honeycomb mirror body, the piezoelectric driver and the power-on assembly of the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis are designed inside the clamp, so that the system is compact in structure and good in stability.
Drawings
FIG. 1 is a schematic perspective view of a piezo-electric deformable mirror for multi-beam incoherent spatial synthesis
FIG. 2 is a schematic diagram showing a cross-sectional structure of a piezo-driven deformable mirror for multi-beam incoherent spatial synthesis
FIG. 3 is a schematic perspective view showing the closed state of a half-turn clamp of a piezo-electric driven deformable mirror for multi-beam incoherent spatial synthesis
FIG. 4 is a schematic cross-sectional view of the closed state of a half-turn clamp of a piezo-driven deformable mirror for multi-beam incoherent spatial synthesis
FIG. 5 an enlarged schematic view at A in FIG. 4
FIG. 6 is a schematic view of the structure of the back surface of a honeycomb mirror body of a piezo-electric driven deformable mirror for multi-beam incoherent spatial synthesis
FIG. 7 is a schematic diagram of a rear perspective view of a piezo-actuated deformable mirror for multi-beam incoherent spatial synthesis
FIG. 8 is a schematic diagram of the structure of a piezoelectric actuator for a piezo-driven deformable mirror for multi-beam incoherent spatial synthesis.
The reference numerals in the drawings denote:
1. a piezoelectric driver; 11. a piezoelectric ceramic plate; 12. a driving electrode; 13. a ground electrode; 121. a center region electrode; 122. a sector electrode; 2. a honeycomb mirror body; 21. a honeycomb groove; 22. a boss; 3. a half circle of clamp; 31. a regulating semi-ring; 32. a fastener half ring; 33. a hinge structure; 311. a countersunk hole; 321. a threaded hole; 322. a backboard screw hole; 323. a back plate screw; 4. a power receiving assembly; 41. a circuit board; 42. a socket; 5. a support frame; 51. a bottom plate; 52. a base plate screw; 53. arc-shaped cutting ferrule; 54. a fastening bolt; 6. a connection assembly; 61. an adjusting screw; 62. a spring;
Detailed Description
The following describes the embodiments of the present application in further detail with reference to examples. The following examples are illustrative of the present application, but are not intended to limit the scope of the present application.
As shown in fig. 1 to 8, a piezoelectric driving deformable mirror for multi-beam incoherent space synthesis comprises a support frame 5, a half-ring clamp 3, a honeycomb mirror body 2, a piezoelectric driver 1 and an electric connection assembly 4, wherein the half-ring clamp 3 is fastened on the support frame 5 and is formed by closing a fastening half ring 32 and a regulating half ring 31 to form a front end ring opening and a rear end ring opening, the honeycomb mirror body 2 is clamped and fixed in the front end ring opening by the half-ring clamp 3, and the electric connection assembly 4 is fixed in the rear end ring opening of the half-ring furniture 3 by screws. In this embodiment, the shape of the honeycomb mirror body 2 is attached to the front end ring opening, the reflecting surface of the honeycomb mirror body 2 is arranged outwards, a plurality of honeycomb grooves 21 are formed in the back surface, a boss 22 is arranged in each honeycomb groove 21, each boss 22 is adhered to one piezoelectric driver 1, each piezoelectric driver 1 comprises a piezoelectric ceramic plate 11, a driving electrode 12 and a grounding electrode 13, the grounding electrode 13 and the driving electrode 12 are attached to two sides of the piezoelectric ceramic plate 11 respectively, and are connected with the grounding assembly electricity 4 respectively. The honeycomb mirror body 2 and the power receiving component 4 are arranged in the ring opening of the half-ring clamp 3, so that the device is very compact in structure and convenient to install and adjust.
In this embodiment, one end of the half-circle clamp 3 is an adjusting end, and is connected by a connecting component 6, so as to be used for adjusting the clamping force of the honeycomb mirror body 2, and the other end is a hinge connecting end. During installation, the half-circle clamp 3 is opened, the honeycomb mirror body 2 is embedded into the front end circle opening of the half-circle clamp 3, the clamping force of the half-circle clamp 3 on the honeycomb mirror body 2 is adjusted through the adjusting connecting component 6, and then the power receiving component 4 is fixed into the rear end circle opening of the half-circle clamp 3 through the back plate screw 323; when the piezoelectric mirror is used, the piezoelectric driver 1 is correspondingly deformed by connecting the power connection assembly 4 with an external power supply to provide driving power for the piezoelectric driver 1, the piezoelectric driver 1 drives the honeycomb mirror body 2 to generate different types of surface shapes, and the clamping stress of the honeycomb mirror body 2 can be effectively improved by adjusting the clamping force of the half-circle clamp 3 on the honeycomb mirror body 2 so as to meet the requirement of low-stress assembly; in this way, the deformation of the honeycomb mirror body 2 is made more stable. The piezoelectric driving deformable mirror for multi-beam incoherent space synthesis has the advantages of compact structure, convenient manufacture and installation, stable deformation and adjustable clamping force, and meets the requirement of weak constraint of the beam deformable mirror.
In this embodiment, the connecting component 6 includes an adjusting screw 61 and a spring 62 sleeved on the adjusting screw 61, the adjusting end of the half circle of clamp 3 is provided with a closed through hole, one end of the closed through hole is a countersunk hole 311, the other end is a threaded hole 32, and the connecting component 6 is arranged in the closed through hole. The rotating end of the adjusting screw 61 is placed in the counter bore 311, and the other end is in threaded connection with the threaded bore 321. In this structure, have certain deviating from elastic force between the two semi-ring structure of half circle anchor clamps 3, when adjusting screw 61 screwed up, spring 62 receives the extrusion reinforcing, deviates from elastic force increase, effectively prevents that honeycomb mirror body 2 atress is too big.
In this embodiment, the support 5 includes a bottom plate 51, an arc-shaped clamping sleeve 53, a fixing screw 52 and a fastening bolt 54, the arc-shaped clamping sleeve 53 is fixedly mounted on the bottom plate 51 through the fixing screw 52, and the half-circle clamp 3 is fixedly clamped in the arc-shaped clamping sleeve 53 through the fastening bolt 54. Because half circle anchor clamps 3 comprise regulation semi-ring 31 and fixed semi-ring 32, the fastening bolt 54 block is fixed the fixed semi-ring 32, and regulation semi-ring 31 is in the activity adjustable state, and the opening setting of arc cutting ferrule 53 makes under half circle anchor clamps 3 fixed the condition, and it still can adjust the clamping force of honeycomb mirror body 2, and this kind of structure makes the installation adjust very conveniently, makes the deformation of honeycomb mirror body 2 stable.
In this embodiment, 7 uniformly distributed honeycomb grooves 21 are formed in the back surface of the honeycomb mirror body 2, and a boss 22 is disposed in the middle of each honeycomb groove 21 for bonding the piezoelectric driver 1. In the structure, a honeycomb groove is arranged in the middle of the honeycomb mirror body 2, and the rest 6 honeycomb grooves evenly encircle the periphery. The structure is arranged according to a specific application environment and is used for comprehensively adjusting the surface shape of the honeycomb mirror body.
In this embodiment, the piezoelectric actuator 1 includes a piezoelectric ceramic plate 11, a driving electrode 12 is disposed on one side of the piezoelectric ceramic plate 11, a ground electrode 13 is disposed on the other side of the piezoelectric ceramic plate 11, the piezoelectric actuator 1 is bonded to a boss 22 through one side of the ground electrode 13, and the ground electrode 13 and the driving electrode 12 are electrically connected to the ground assembly 4, respectively. In this structure, the driving electrode 12 is screen-printed on the surface of the piezoelectric ceramic plate 11 facing the power receiving component 4, the grounding electrode 13 is also screen-printed on the surface of the piezoelectric ceramic plate 11 facing the honeycomb mirror body 2, and the lead position of the grounding electrode 13 needs to be close to the edge position thereof so as to avoid the influence of the boss 22 of the honeycomb mirror body 2, so that the deformed mirror has a compact structure and is miniaturized.
In this embodiment, the driving electrode 12 is composed of a center region electrode 121 located in the middle of the piezoelectric ceramic plate 11 and eight sector region electrodes 122 uniformly spaced around the center region electrode 121, and the center region electrode 121 and each sector region electrode 122 are electrically connected to the power receiving member 4, respectively. In this structure, the driving electrode 12 of each driver is composed of nine area electrodes, one of which is located in the middle, called a center area electrode 121, and the other eight of which are uniformly spaced around the center area electrode 121 and have a fan-like shape, called a fan-like area electrode 122. Different combinations of the area electrodes in the drive electrode 12 can produce different shaped curved surfaces for the mirror surface of the honeycomb mirror body 2.
In this embodiment, the power receiving assembly 4 includes a circuit board 41 and a socket 42, the socket 42 is a straight-pin ox horn socket, the socket 42 is welded and fixed on the circuit board 41, and the circuit board 41 is fixed on the fixed half ring 32 of the half-ring clamp 3 by screws. In this structure, the circuit board 41 is provided with a U-shaped groove, and the fixing position can be well adjusted.
The assembly method of the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis comprises the following steps:
s1: establishing an electrical connection between the piezoelectric driver 1 and the electrical connection assembly 4;
s2: bonding the piezoelectric actuator 1 into the honeycomb groove 21 on the back surface of the honeycomb mirror body 2;
s3: the honeycomb mirror body 2 is fastened in the front end ring opening of the half-ring clamp 3;
s4: the power receiving assembly 4 is fixed in the rear end ring opening of the half-ring clamp 3 through screws;
s5: the half circle of clamp 3 is fastened in an arc-shaped clamping sleeve 53 of the supporting frame 5;
s6: and the clamping force of the half-circle clamp 3 on the honeycomb mirror body 2 is adjusted, and the power receiving assembly 4 is communicated with a power supply.
The method has the advantages of simple steps, quick installation, convenient use and controllable adjustment, and effectively improves the quality of the light beam synthesized by the piezoelectric driving deformable mirror for multi-beam incoherent space synthesis.
The foregoing is a further detailed description of the invention in connection with specific preferred embodiments, and is not to be construed as limiting the practice of the invention. It should be understood by those skilled in the art that several simple deductions or substitutions may be made without departing from the spirit of the present invention, and the present invention is not limited to the above-described embodiments.
Claims (8)
1. A piezoelectric driving deformable mirror for multi-beam incoherent space synthesis is characterized in that: the device comprises a support frame (5), a half-circle clamp (3), a honeycomb mirror body (2), a piezoelectric driver (1) and an electricity receiving component (4), wherein the half-circle clamp (3) is fastened on the support frame (5), the half-circle clamp (3) is formed by closing an adjusting semi-ring (31) and a fastening semi-ring (32) and is provided with a front end circle opening and a rear end circle opening, the honeycomb mirror body (2) is clamped and fixed in the front end circle opening by the half-circle clamp (3), the electricity receiving component (4) is arranged in the rear end circle opening of the half-circle clamp (3), and two connecting ends of the half-circle clamp (3) are adjusting ends for adjusting the clamping force of the honeycomb mirror body (2);
the shape of the honeycomb mirror body (2) is attached to the front end ring opening, a plurality of honeycomb grooves (21) are formed in the back surface of the honeycomb mirror body (2), and a boss (22) is arranged in the middle of each honeycomb groove (21) and used for being adhered to the piezoelectric driver (1);
the piezoelectric driver (1) comprises a piezoelectric ceramic plate (11), a driving electrode (12) and a grounding electrode (13), wherein the grounding electrode (13) and the driving electrode (12) are respectively printed on two sides of the piezoelectric ceramic plate (11) through silk screens and are respectively electrically connected with the grounding assembly (4);
the connecting assembly (6) is composed of an adjusting screw (61) and a spring (62) sleeved outside the adjusting screw (61), a closed through hole is formed in the adjusting end of the half-circle clamp (3), a countersunk hole (311) is formed in one end of the adjusting semi-ring (31), a threaded hole (321) is formed in one end of the fastening semi-ring (32), the rotating end of the adjusting screw (61) is arranged in the countersunk hole (311), and the other end of the adjusting screw (61) is in threaded connection with the threaded hole (321);
the support frame (5) comprises a bottom plate (51), fixing screws (52), an arc clamping sleeve (53) and a fastening bolt (54), wherein the fastening bolt (54) is located at the top of the arc clamping sleeve (53), the arc clamping sleeve (53) is fixedly arranged on the bottom plate (51) through the fixing screws (52), and the half-circle clamp (3) is fastened in the arc clamping sleeve (53) through the fastening bolt (54).
2. The piezo-driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 1, wherein: the other connecting end of the half-circle clamp (3) is hinged.
3. The piezo-driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 1, wherein: the arc-shaped cutting ferrule (53) is made of elastic materials, and an opening of the arc-shaped cutting ferrule (53) is arranged between 90 degrees and 180 degrees.
4. The piezoelectric driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 1 or 2, wherein: the piezoelectric actuator (1) is bonded to the boss (22) via a ground electrode (13).
5. The piezoelectric driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 1 or 2, wherein: the driving electrode (12) comprises 1 central area electrode (121) and a plurality of sector area electrodes (122), and the sector area electrodes (122) are uniformly distributed around the central area electrode (121) at intervals.
6. The piezoelectric driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 1 or 2, wherein: the power connection assembly (4) comprises a circuit board (41) and a socket (42), wherein the socket (42) is a straight-needle ox horn socket, and is welded and fixed on the circuit board (41) and used for being connected with an external power supply.
7. The piezo-driven deformable mirror for multi-beam incoherent spatial synthesis according to claim 6, wherein: at least two back plate screw holes (322) are formed in the back of the fastening semi-ring (32) of the half-ring clamp (3), a U-shaped groove is formed in the circuit board (41), and the circuit board (41) is fixed to the back of the fastening semi-ring (32) through back plate screws (323).
8. A method of assembling a piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis according to any one of claims 1 to 7, comprising the steps of:
s1: establishing electrical connection between the piezoelectric driver (1) and the power connection component (4);
s2: bonding the piezoelectric actuator (1) in a honeycomb groove (21) on the back surface of the honeycomb mirror body (2);
s3: the honeycomb mirror body (2) is fastened in the front end ring opening of the half-ring clamp (3);
s4: the power receiving assembly (4) is fixed in the rear end ring opening of the half-ring clamp (3) through screws;
s5: the half circle of clamp (3) is fastened in an arc-shaped clamping sleeve (53) of the supporting frame (5);
s6: and adjusting the clamping force of the half-circle clamp (3) on the honeycomb mirror body (2) to connect the power receiving assembly (4) with a power supply.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910181468.8A CN109725415B (en) | 2019-03-11 | 2019-03-11 | Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof |
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| CN110579873B (en) * | 2019-09-06 | 2024-04-02 | 中国人民解放军国防科技大学 | Array beam wavefront correction system and method based on integrated corrector |
| CN113311580B (en) * | 2021-05-21 | 2022-12-30 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
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