CN109725415B - Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof - Google Patents
Piezoelectric driving deformable mirror for multi-beam incoherent space synthesis and assembly method thereof Download PDFInfo
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Abstract
本发明申请公开了一种多光束非相干空间合成用压电驱动变形镜，包括支撑架、半圈夹具、蜂窝镜体、压电驱动器和接电组件，所述半圈夹具紧固在所述支撑架上，所述蜂窝镜体和所述接电组件分别置于所述半圈夹具前后端圈口内，所述压电驱动器粘接于所述蜂窝镜体背面，所述压电驱动器与所述接电组件电连接，所述半圈夹具由两个半环闭合组成，所述半圈夹具的两个连接端，至少一端为调节端，用于调节对所述蜂窝镜体的夹持力。根据本申请实施例的多光束非相干空间合成用压电驱动变形镜具有结构紧凑、安装方便、形变范围大、形变精度高和形变稳定性好的特点，能提高对非相干空间合成激光系统改善光束质量的能力。
The application of the present invention discloses a piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis, which includes a support frame, a half-circle fixture, a honeycomb mirror body, a piezoelectric driver and an electrical connection assembly. The half-circle fixture is fastened to the On the support frame, the honeycomb mirror body and the electrical connection assembly are respectively placed in the front and rear ends of the half-circle fixture, the piezoelectric driver is bonded to the back of the honeycomb mirror body, and the piezoelectric driver and the The electrical connection component is electrically connected, the half-circle clamp is composed of two half-ring closures, and at least one of the two connection ends of the half-circle clamp is an adjustment end, which is used to adjust the clamping force on the honeycomb mirror body . The piezoelectric-driven deformable mirror for multi-beam incoherent spatial synthesis according to the embodiment of the present application has the characteristics of compact structure, convenient installation, large deformation range, high deformation accuracy and good deformation stability, and can improve the incoherent spatial synthesis laser system. beam quality capabilities.
Description
技术领域technical field
本申请涉及激光器及自适应光学器件技术领域，具体涉及一种多光束非相干空间合成用压电驱动变形镜及其装配方法。The present application relates to the technical field of lasers and adaptive optics devices, in particular to a piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis and an assembly method thereof.
背景技术Background technique
固体激光器的输出功率受到热效应、非线性效应、光学元件表面质量等多种因素的影响。将多台激光器的输出光束进行合成可以获得高功率激光输出。光束合成方法主要可以分为三类：相干合成、谱合成和非相干合成。而非相干空间合成是非相干合成的主要方法之一，非相干空间合成就是通过一系列光束整形和变换，将多台激光器发射的激光组合在一起输出。这种合成技术能提高激光输出总功率，但会影响输出的光束质量。应用中，通常会采用自适应光学系统对输出的光束进行修复以改善光束质量。The output power of solid-state lasers is affected by various factors such as thermal effects, nonlinear effects, and surface quality of optical components. Combining the output beams of multiple lasers can obtain high-power laser output. The beam combining methods can be mainly divided into three categories: coherent combining, spectral combining and non-coherent combining. Incoherent spatial combination is one of the main methods of incoherent combination. Incoherent spatial combination is to combine the lasers emitted by multiple lasers for output through a series of beam shaping and transformation. This combination technology can increase the total laser output power, but it will affect the output beam quality. In applications, an adaptive optics system is usually used to repair the output beam to improve the beam quality.
自适应光学系统的变形镜是非常重要的光学校正器件，其装配方式直接影响到变形镜的变形能力。一般的，用于多光束非相干空间合成的变形镜装配方式主要有镜体边缘紧支撑和局部点支撑。局部点支撑的变形镜结构松散、装配难度大，占用空间较大，且夹持力不可控导致镜体稳定性不高。镜体边缘紧支撑的变形镜有较大的刚度，但由于支撑紧，存在镜体形变受限以及夹持力大导致的镜体易变形等问题。The deformable mirror of the adaptive optics system is a very important optical correction device, and its assembly method directly affects the deformation ability of the deformable mirror. Generally, the assembly methods of deformable mirrors for multi-beam incoherent spatial synthesis mainly include compact support at the edge of the mirror body and local point support. The locally point-supported deformable mirror has a loose structure, is difficult to assemble, occupies a large space, and the clamping force is uncontrollable, resulting in low stability of the mirror body. The deformable mirror with tight support on the edge of the mirror body has relatively high rigidity, but due to tight support, there are problems such as limited deformation of the mirror body and easy deformation of the mirror body caused by large clamping force.
发明内容Contents of the invention
为了解决现有多光束非相干空间合成的变形镜在装配过程中夹持力不可控的问题，从而导致的变形镜形变不稳定，光束合成质量差的问题，本申请提供了一种多光束非相干空间合成用压电驱动变形镜，通过设计夹持力可调的蜂窝镜体夹具，从而解决该问题。In order to solve the problem of uncontrollable clamping force in the assembly process of existing multi-beam incoherent spatially synthesized deformable mirrors, resulting in unstable deformation of deformable mirrors and poor beam synthesis quality, this application provides a multi-beam non-coherent Coherent space synthesis uses piezoelectrically driven deformable mirrors to solve this problem by designing a honeycomb mirror body clamp with adjustable clamping force.
本申请提供的具体方案如下：The specific scheme provided by this application is as follows:
一种多光束非相干空间合成用压电驱动变形镜，包括支撑架、半圈夹具、蜂窝镜体、压电驱动器和接电组件，所述半圈夹具紧固在所述支撑架上，所述半圈夹具由紧固半环和调节半环闭合构成前端圈口和后端圈口，所述蜂窝镜体由所述半圈夹具夹紧固定在所述前端圈口内，所述接电组件置于所述半圈夹具的后端圈口内，所述半圈夹具的两个连接端，至少一端为调节端，用于调节对所述蜂窝镜体的夹持力；A piezoelectric-driven deformable mirror for multi-beam incoherent space synthesis, including a support frame, a half-circle clamp, a honeycomb mirror body, a piezoelectric driver, and an electrical connection assembly, the half-circle clamp is fastened on the support frame, and the The half-circle fixture is closed by the fastening half-ring and the adjusting half-ring to form a front-end ring mouth and a rear-end ring mouth. The honeycomb mirror body is clamped and fixed in the front-end ring mouth by the half-ring fixture. Placed in the rear end of the half-circle clamp, at least one of the two connecting ends of the half-circle clamp is an adjustment end, which is used to adjust the clamping force on the honeycomb mirror body;
所述蜂窝镜体形状与所述前端圈口贴合，所述蜂窝镜体背面开有多个蜂窝槽，所述蜂窝槽中部设置有凸台，用于粘接压电驱动器；The shape of the honeycomb mirror body fits with the front ring mouth, a plurality of honeycomb grooves are opened on the back of the honeycomb mirror body, and a boss is provided in the middle of the honeycomb groove for bonding the piezoelectric driver;
所述压电驱动器包括压电陶瓷板、驱动电极和接地电极，所述接地电极和所述驱动电极分别通过丝网印刷技术镀于所述压电陶瓷板两侧，且分别与所述接电组件电连接。The piezoelectric driver includes a piezoelectric ceramic plate, a driving electrode and a ground electrode, and the ground electrode and the driving electrode are respectively plated on both sides of the piezoelectric ceramic plate by screen printing technology, and are respectively connected to the The components are electrically connected.
优选地，所述半圈夹具的另一连接端为铰链连接。Preferably, the other connecting end of the half-circle clamp is hinged.
更进一步地，系统还包括连接组件，所述连接组件由调节螺钉以及套装在所述调节螺钉外的调节弹簧组成，所述半圈夹具调节端开有闭合通孔，所述闭合通孔一端为沉头孔，另一端为螺纹孔，所述调节螺钉的旋转端置于所述沉头孔内，另一端与所述螺纹孔螺纹扣接。Further, the system also includes a connection assembly, which is composed of an adjustment screw and an adjustment spring sleeved outside the adjustment screw. The adjustment end of the half-circle clamp has a closed through hole, and one end of the closed through hole is A countersunk hole, the other end of which is a threaded hole, the rotating end of the adjusting screw is placed in the countersunk hole, and the other end is threadedly engaged with the threaded hole.
具体地，所述支撑架包括底板、固定螺钉、弧形卡套和紧固螺栓，所述紧固螺栓位于所述弧形卡套顶部，所述弧形卡套通过所述固定螺钉固装在所述底板上，所述半圈夹具的紧固半环通过所述紧固螺栓紧固在所述弧形卡套内。Specifically, the support frame includes a bottom plate, fixing screws, arc-shaped ferrules and fastening bolts, the fastening bolts are located at the top of the arc-shaped ferrules, and the arc-shaped ferrules are fixed on the On the bottom plate, the fastening half-ring of the half-ring clamp is fastened in the arc ferrule by the fastening bolt.
具体地，所述弧形卡套由弹性材料制成，所述弧形卡套的开口设置在90度～180度之间。Specifically, the arc-shaped ferrule is made of elastic material, and the opening of the arc-shaped ferrule is set between 90 degrees and 180 degrees.
具体地，所述压电驱动器经接地电极粘接于所述凸台。Specifically, the piezoelectric driver is bonded to the boss via a ground electrode.
具体地，所述驱动电极包含1个中心区域电极和多个扇形区域电极，所述扇形区域电极均匀间隔分布在所述中心区域电极周围。Specifically, the driving electrodes include a central area electrode and a plurality of fan-shaped area electrodes, and the fan-shaped area electrodes are evenly spaced around the central area electrode.
具体地，所述接电组件包括电路板和插座，所述插座为直针牛角插座，其固定于所述电路板上。Specifically, the power connection assembly includes a circuit board and a socket, and the socket is a straight-pin socket, which is fixed on the circuit board.
具体地，所述半圈夹具的紧固半环背面开有至少两个背板螺孔，所述电路板在相应位置上开有U形槽，所述电路板由背板螺钉固定在紧固半环背面。Specifically, at least two backboard screw holes are opened on the back of the fastening half ring of the half-circle fixture, and the circuit board is provided with U-shaped grooves at corresponding positions, and the circuit board is fixed on the fastening part by backboard screws. Half ring back.
根据上述提供的一种多光束非相干空间合成用压电驱动变形镜，其装配方法包括以下步骤：According to the piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis provided above, its assembly method includes the following steps:
S1：将压电驱动器与接电组件建立电连接；S1: Establish an electrical connection between the piezoelectric driver and the electrical connection component;
S2：将压电驱动器粘接于蜂窝镜体背面的蜂窝槽内；S2: bonding the piezoelectric driver to the honeycomb groove on the back of the honeycomb mirror body;
S3：将蜂窝镜体紧固在半圈夹具的前端圈口内；S3: fasten the honeycomb mirror body in the front ring opening of the half-circle fixture;
S4：将接电组件螺钉固定在半圈夹具后端圈口内；S4: Fix the screw of the electrical connection component in the ring opening of the rear end of the half-circle fixture;
S5：将半圈夹具紧固于支撑架的弧形卡套内；S5: Fasten the half-circle fixture into the arc ferrule of the support frame;
S6：调节半圈夹具对蜂窝镜体的夹持力，将接电组件连通电源。S6: Adjust the clamping force of the half-circle fixture on the honeycomb mirror body, and connect the power connection component to the power supply.
本申请提供的技术方案相对现有技术其产生的有益效果如下：Compared with the prior art, the technical solution provided by the application has the following beneficial effects:
1、本申请的多光束非相干空间合成用压电驱动变形镜通过半圈夹具连接组件对蜂窝镜体的夹持力进行调节，使蜂窝镜体的形变约束力可控，能提高镜体形变稳定性，从而提高了非相干空间光束合成激光系统的改善光束质量的能力；1. The piezoelectrically driven deformable mirror for multi-beam incoherent space synthesis of the present application adjusts the clamping force of the honeycomb mirror body through the half-circle clamp connection assembly, so that the deformation constraint force of the honeycomb mirror body is controllable, and the deformation of the mirror body can be improved. Stability, thereby increasing the ability of incoherent spatial beam combining laser systems to improve beam quality;
2、本申请的多光束非相干空间合成用压电驱动变形镜中的连接组件包括调节螺钉和弹簧，半圈夹具的半环组件通过调节螺钉连接在一起，套于调节螺钉的弹簧使半环组件之间带有一定的背离弹性力，当调节螺钉拧紧时，背离弹性力增大，当调节螺钉拧松时，背离弹性力减少，有效防止蜂窝镜体受力过大造成的镜面变形；2. The connection assembly in the piezoelectrically driven deformable mirror for multi-beam incoherent space synthesis of the present application includes an adjustment screw and a spring, and the half-ring assemblies of the half-circle fixture are connected together by the adjustment screw, and the spring sleeved on the adjustment screw makes the half ring There is a certain elastic force of deviation between the components. When the adjustment screw is tightened, the elastic force of deviation increases, and when the adjustment screw is loosened, the elastic force of deviation decreases, which effectively prevents the deformation of the mirror surface caused by excessive force on the honeycomb mirror body;
3、本申请的多光束非相干空间合成用压电驱动变形镜的接电组件固定于半圈夹具的紧固半环上，使系统易于安装、便于调整，装配方法步骤简单，能提高装配效率。3. The electrical connection component of the piezoelectrically driven deformable mirror for multi-beam incoherent space synthesis of the present application is fixed on the fastening half ring of the half ring fixture, which makes the system easy to install and adjust, and the assembly method has simple steps and can improve assembly efficiency .
4、本申请的多光束非相干空间合成用压电驱动变形镜的蜂窝镜体、压电驱动器和接电组件均设计在夹具内部，使系统结构紧凑、稳定性好。4. The piezoelectric-driven deformable mirror for multi-beam incoherent space synthesis of the present application has a honeycomb mirror body, a piezoelectric driver and an electrical connection component all designed inside the fixture, which makes the system compact and stable.
附图说明Description of drawings
图1多光束非相干空间合成用压电驱动变形镜的立体结构示意图Fig.1 Schematic diagram of the three-dimensional structure of piezoelectrically driven deformable mirrors for multi-beam incoherent spatial synthesis
图2多光束非相干空间合成用压电驱动变形镜的剖视结构示意图Figure 2 Schematic diagram of the cross-sectional structure of piezoelectrically driven deformable mirrors for multi-beam incoherent spatial synthesis
图3多光束非相干空间合成用压电驱动变形镜的半圈夹具闭合状态的立体结构示意图Fig.3 Schematic diagram of the three-dimensional structure of the closed state of the half-circle clamp of the piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis
图4多光束非相干空间合成用压电驱动变形镜的半圈夹具闭合状态的剖视结构示意图Fig.4 Schematic diagram of the cross-sectional structure of the closed state of the half-circle clamp of the piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis
图5图4中A处的放大示意图Figure 5 The enlarged schematic diagram of A in Figure 4
图6多光束非相干空间合成用压电驱动变形镜的蜂窝镜体背面的结构示意图Figure 6 Schematic diagram of the structure of the back of the honeycomb mirror body of the piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis
图7多光束非相干空间合成用压电驱动变形镜背面立体结构示意图Figure 7. Schematic diagram of the three-dimensional structure on the back of the piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis
图8多光束非相干空间合成用压电驱动变形镜的压电驱动器的结构示意图。Fig. 8 is a schematic structural diagram of a piezoelectric driver for a piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis.
图中各标号表示：Each label in the figure means:
1、压电驱动器；11、压电陶瓷板；12、驱动电极；13、接地电极；121、中心区域电极；122、扇形区域电极；2、蜂窝镜体；21、蜂窝槽；22、凸台；3、半圈夹具；31、调节半环；32、紧固半环；33、铰链结构；311、沉头孔；321、螺纹孔；322、背板螺孔；323、背板螺钉；4、接电组件；41、电路板；42、插座；5、支撑架；51、底板；52、底板螺钉；53、弧形卡套；54、紧固螺栓；6、连接组件；61、调节螺钉；62、弹簧；1. Piezoelectric driver; 11. Piezoelectric ceramic plate; 12. Driving electrode; 13. Ground electrode; 121. Central region electrode; 122. Sector-shaped region electrode; 2. Honeycomb mirror body; 21. Honeycomb groove; 22. Boss ;3, half-circle fixture; 31, adjusting half-ring; 32, fastening half-ring; 33, hinge structure; 311, countersunk hole; 321, threaded hole; 322, backboard screw hole; , Electric connection assembly; 41, circuit board; 42, socket; 5, support frame; 51, bottom plate; 52, bottom plate screw; 53, arc ferrule; 54, fastening bolt; ; 62, spring;
具体实施方式Detailed ways
下面结合实施例，对本申请的具体实施方式作进一步详细描述。以下实施例用于说明本申请，但不用来限制本申请的范围。The specific implementation manners of the present application will be further described in detail below in conjunction with the embodiments. The following examples are used to illustrate the present application, but not to limit the scope of the present application.
如图1至图8所示，一种多光束非相干空间合成用压电驱动变形镜，包括支撑架5、半圈夹具3、蜂窝镜体2、压电驱动器1和接电组件4，半圈夹具3紧固在支撑架5上，半圈夹具3由紧固半环32和调节半环31闭合组成，构成前端圈口和后端圈口，蜂窝镜体2由半圈夹具3夹紧固定在前端圈口内，接电组件4螺钉固定在半圈家具3的后端圈口内。本实施例中，蜂窝镜体2形状与前端圈口贴合，蜂窝镜体2的反射面朝外设置，背面开有多个蜂窝槽21，每个蜂窝槽21中设置一个凸台22，每一个凸台22粘接一个压电驱动器1，所述压电驱动器1包括压电陶瓷板11、驱动电极12和接地电极13，所述接地电极13和所述驱动电极12分别贴合于所述压电陶瓷板11两侧，且分别与所述接电组件电4连接。蜂窝镜体2和接电组件4均设置在半圈夹具3的圈口内，使装置结构非常紧凑，且便于安装和调节。As shown in Figures 1 to 8, a piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis includes a support frame 5, a half-circle clamp 3, a honeycomb mirror body 2, a piezoelectric driver 1 and an electrical connection assembly 4, and a half The ring clamp 3 is fastened on the support frame 5, and the half ring clamp 3 is composed of the fastening half ring 32 and the adjusting half ring 31, which form the front ring opening and the rear end ring opening, and the honeycomb mirror body 2 is clamped by the half ring clamp 3 Be fixed in the front-end ring mouth, and the power connection assembly 4 screws are fixed in the rear end ring mouth of the half-circle furniture 3. In this embodiment, the shape of the honeycomb mirror body 2 fits with the front end ring mouth, the reflective surface of the honeycomb mirror body 2 is arranged outwardly, and a plurality of honeycomb grooves 21 are arranged on the back side, and a boss 22 is arranged in each honeycomb groove 21, each A boss 22 is bonded to a piezoelectric driver 1, and the piezoelectric driver 1 includes a piezoelectric ceramic plate 11, a driving electrode 12 and a ground electrode 13, and the ground electrode 13 and the driving electrode 12 are respectively bonded to the The two sides of the piezoelectric ceramic plate 11 are respectively connected to the electrical connection assembly 4 . Both the honeycomb mirror body 2 and the electrical connection assembly 4 are arranged in the ring opening of the half-circle fixture 3, so that the structure of the device is very compact, and it is convenient for installation and adjustment.
本实施例中，半圈夹具3的一端为调节端，由连接组件6连接，可用于调节对所述蜂窝镜体2的夹持力，另一端为铰链连接端。安装时，打开半圈夹具3，将蜂窝镜体2嵌入半圈夹具3的前端圈口内，通过调节连接组件6调整半圈夹具3对蜂窝镜体2的夹持力，然后将接电组件4通过背板螺钉323固定在半圈夹具3的后端圈口内；使用时，通过接电组件4连接外部电源，为压电驱动器1提供驱动用电，使压电驱动器1产生相应的变形，压电驱动器1带动蜂窝镜体2产生不同类型的面形，通过调整半圈夹具3对蜂窝镜体2的夹持力，能够有效改善蜂窝镜体2的装夹应力，以满足低应力装配的要求；采用这种方式使蜂窝镜体2变形更加稳定。该多光束非相干空间合成用压电驱动变形镜的结构紧凑、制作安装方便、变形稳定、装夹力可调，满足光束变形镜弱约束的要求。In this embodiment, one end of the half-circle clamp 3 is an adjustment end, which is connected by a connecting component 6 and can be used to adjust the clamping force on the honeycomb mirror body 2 , and the other end is a hinge connection end. During installation, open the half-circle fixture 3, insert the honeycomb mirror body 2 into the front-end ring mouth of the half-circle fixture 3, adjust the clamping force of the half-circle fixture 3 on the honeycomb mirror body 2 by adjusting the connecting component 6, and then connect the electrical connection assembly 4 The back plate screw 323 is fixed in the rear end ring opening of the half-circle fixture 3; when in use, connect the external power supply through the power connection assembly 4 to provide driving power for the piezoelectric driver 1, so that the piezoelectric driver 1 produces corresponding deformation, and the piezoelectric driver 1 is pressed. The electric driver 1 drives the honeycomb mirror body 2 to produce different types of surface shapes. By adjusting the clamping force of the half-circle fixture 3 on the honeycomb mirror body 2, the clamping stress of the honeycomb mirror body 2 can be effectively improved to meet the requirements of low-stress assembly. In this way, the deformation of the honeycomb mirror body 2 is more stable. The piezoelectrically driven deformable mirror for multi-beam incoherent space synthesis has the advantages of compact structure, convenient manufacture and installation, stable deformation, and adjustable clamping force, and meets the requirements of the weak constraint of the beam deformable mirror.
本实施例中，连接组件6包括调节螺钉61以及套装在调节螺钉61上的弹簧62，所述半圈夹具3调节端开有闭合通孔，所述闭合通孔一端为沉头孔311，另一端为螺纹孔32，所述连接组件6置于闭合通孔内。所述调节螺钉61的旋转端置于所述沉头孔311内，另一端与所述螺纹孔321螺纹连接。该结构中，半圈夹具3的两个半环结构之间具有一定的背离弹性力，当调节螺钉61拧紧时，弹簧62受到挤压增强，背离弹性力增大，有效防止蜂窝镜体2受力过大。In this embodiment, the connecting assembly 6 includes an adjusting screw 61 and a spring 62 set on the adjusting screw 61. The adjusting end of the half-circle clamp 3 has a closed through hole, and one end of the closed through hole is a countersunk hole 311. One end is a threaded hole 32, and the connection assembly 6 is placed in the closed through hole. The rotating end of the adjusting screw 61 is placed in the counterbore 311 , and the other end is screwed into the threaded hole 321 . In this structure, there is a certain elastic force of departure between the two half-ring structures of the half-circle clamp 3. When the adjustment screw 61 is tightened, the spring 62 is squeezed and strengthened, and the elastic force of departure increases, which effectively prevents the honeycomb mirror body 2 from being damaged. Excessive force.
本实施例中，支撑架5包括底板51、弧形卡套53、固定螺钉52和紧固螺栓54，弧形卡套53通过固定螺钉52固装在底板51上，半圈夹具3由紧固螺栓54卡固在弧形卡套53内。由于半圈夹具3由调节半环31和固定半环32构成，紧固螺栓54卡固的是固定半环32，调节半环31处于活动可调状态，弧形卡套53的开口设置使得在半圈夹具3固定的情况下，其对蜂窝镜体2的夹持力仍然可调，这样的结构使安装调节非常方便，使蜂窝镜体2的形变稳定。In this embodiment, the support frame 5 includes a bottom plate 51, an arc-shaped ferrule 53, a fixing screw 52 and a fastening bolt 54. The arc-shaped ferrule 53 is fixed on the bottom plate 51 through the fixing screw 52, and the half-circle clamp 3 is fixed by the fastening screw 52. The bolt 54 is fastened in the arc ferrule 53 . Because the half-circle clamp 3 is made of the adjusting half-ring 31 and the fixed half-ring 32, what the fastening bolt 54 clamps is the fixed half-ring 32, and the adjusting half-ring 31 is in a movable and adjustable state, and the opening of the arc ferrule 53 is set so that When the half-circle clamp 3 is fixed, its clamping force on the honeycomb mirror body 2 is still adjustable. Such a structure makes installation and adjustment very convenient and makes the deformation of the honeycomb mirror body 2 stable.
本实施例中，蜂窝镜体2的背面开设有均匀分布的7个蜂窝槽21，每个蜂窝槽21的中部设置有凸台22，用于粘接压电驱动器1。该结构中，蜂窝镜体2的中部设置一个蜂窝槽，其余6个蜂窝槽均匀环绕四周。该结构根据具体应用环境进行设置，用于对蜂窝镜体进行面形进行全面调节。In this embodiment, seven evenly distributed honeycomb grooves 21 are opened on the back of the honeycomb mirror body 2 , and a boss 22 is provided in the middle of each honeycomb groove 21 for bonding the piezoelectric actuator 1 . In this structure, a honeycomb groove is arranged in the middle of the honeycomb mirror body 2, and the remaining 6 honeycomb grooves evenly surround the periphery. The structure is set according to the specific application environment, and is used for comprehensively adjusting the surface shape of the honeycomb mirror body.
本实施例中，压电驱动器1包括压电陶瓷板11，压电陶瓷板11的一侧设有驱动电极12，其另一侧设有接地电极13，压电驱动器1经过接地电极13一侧粘接于凸台22，接地电极13和驱动电极12分别与接电组件4电连接。该结构中，驱动电极12通过丝网印刷在所述压电陶瓷板11朝向接电组件4的一面，所述接地电极13同样通过丝网印刷在所述压电陶瓷板11朝向所述蜂窝镜体2的一面，所述接地电极13的引线位置需靠近其边缘位置，以避免与蜂窝镜体2的凸台22影响，使变形镜结构紧凑，实现小型化。In this embodiment, the piezoelectric driver 1 includes a piezoelectric ceramic plate 11, one side of the piezoelectric ceramic plate 11 is provided with a driving electrode 12, and the other side is provided with a ground electrode 13, and the piezoelectric driver 1 passes through one side of the ground electrode 13. Adhered to the boss 22 , the ground electrode 13 and the drive electrode 12 are electrically connected to the electrical connection assembly 4 respectively. In this structure, the drive electrode 12 is screen printed on the side of the piezoelectric ceramic plate 11 facing the electrical connection component 4, and the ground electrode 13 is also screen printed on the piezoelectric ceramic plate 11 facing the honeycomb mirror. On one side of the body 2, the lead position of the ground electrode 13 needs to be close to its edge position to avoid interference with the boss 22 of the honeycomb mirror body 2, so that the deformable mirror has a compact structure and miniaturization.
本实施例中，驱动电极12由位于压电陶瓷板11中部的中心区域电极121和环绕中心区域电极121均匀间隔分布的八个扇形区域电极122组成，中心区域电极121和各扇形区域电极122分别与接电组件4电连接。该结构中，每个驱动器的驱动电极12由九块区域电极组成，其中，一块位于中部，称为中心区域电极121，另外八块环绕中心区域电极121均匀间隔分布，其形状是扇形的，称为扇形区域电极122。驱动电极12中各区域电极的不同组合可使蜂窝镜体2的镜面产生不同形状的曲面。In this embodiment, the driving electrode 12 is composed of a central area electrode 121 located in the middle of the piezoelectric ceramic plate 11 and eight fan-shaped area electrodes 122 evenly spaced around the central area electrode 121. The central area electrode 121 and each fan-shaped area electrode 122 are respectively It is electrically connected with the electrical connection assembly 4. In this structure, the driving electrode 12 of each driver is composed of nine regional electrodes, one of which is located in the middle, called the central regional electrode 121, and the other eight are evenly spaced around the central regional electrode 121, and its shape is fan-shaped, called is the fan-shaped area electrode 122 . Different combinations of regional electrodes in the driving electrodes 12 can make the mirror surface of the honeycomb mirror body 2 produce curved surfaces of different shapes.
本实施例中，接电组件4包括电路板41和插座42，插座42为直针牛角插座，插座42焊接固定在在电路板41上，电路板41通过螺钉固定在半圈夹具3的固定半环32上。该结构中，电路板41开有U形槽，可良好地调整固定位置。In this embodiment, the power connection assembly 4 includes a circuit board 41 and a socket 42. The socket 42 is a straight-pin socket. The socket 42 is welded and fixed on the circuit board 41. on ring 32. In this structure, the circuit board 41 is provided with a U-shaped groove, which can well adjust the fixing position.
一种上述的多光束非相干空间合成用压电驱动变形镜的装配方法，包括以下步骤：A method for assembling the above-mentioned piezoelectrically driven deformable mirror for multi-beam incoherent spatial synthesis, comprising the following steps:
S1：将压电驱动器1与接电组件4建立电连接；S1: establishing an electrical connection between the piezoelectric driver 1 and the electrical connection component 4;
S2：将压电驱动器1粘接于蜂窝镜体2背面的蜂窝槽21内；S2: bonding the piezoelectric driver 1 to the honeycomb groove 21 on the back of the honeycomb mirror body 2;
S3：将蜂窝镜体2紧固在半圈夹具3的前端圈口内；S3: fasten the honeycomb mirror body 2 in the front ring opening of the half-circle fixture 3;
S4：将接电组件4螺钉固定在半圈夹具3的后端圈口内；S4: Fix the screw of the electrical connection assembly 4 in the rear end of the half-circle fixture 3;
S5：将半圈夹具3紧固于支撑架5的弧形卡套53内；S5: Fasten the half-circle fixture 3 into the arc ferrule 53 of the support frame 5;
S6：调节半圈夹具3对蜂窝镜体2的夹持力，将接电组件4连通电源。S6: Adjust the clamping force of the half-circle clamp 3 on the honeycomb mirror body 2, and connect the power connection component 4 to the power supply.
该方法的步骤简单，安装快捷，使用方便，调节可控，有效改善多光束非相干空间合成用压电驱动变形镜合成的光束质量。The method has simple steps, fast installation, convenient use, and controllable adjustment, and effectively improves the beam quality of the multi-beam incoherent space synthesis with a piezoelectrically driven deformable mirror.
以上内容是结合具体的优选实施方式对本发明所作的进一步详细说明，不能认为本发明的具体实施仅局限于这些说明。对于本发明所属技术领域的普通技术人员来说，不脱离本发明构思的前提下，还可以作出若干简单推演或替换，都应当视为属于本发明的保护范围。The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and it cannot be considered that the specific implementation of the present invention is limited to these descriptions. For those of ordinary skill in the technical field of the present invention, without departing from the concept of the present invention, some simple deduction or replacement can be made, which should be regarded as belonging to the protection scope of the present invention.
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