CN110579873B - Array beam wavefront correction system and method based on integrated corrector - Google Patents
Array beam wavefront correction system and method based on integrated corrector Download PDFInfo
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- G—PHYSICS
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- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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Abstract
The invention discloses an array beam wavefront correction system based on an integrated corrector, which comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope, a computer and a high-voltage amplifier, wherein the spatial arrangement of all grooves of the integrated deformable mirror corresponds to the spatial arrangement of all sub-beams of an array beam one by one, the array beam is reflected to the integrated sensor through the integrated deformable mirror, the integrated sensor feeds back the wavefront distortion information of the array beam to the computer, and the computer controls the voltage of all channels of the high-voltage amplifier according to the wavefront distortion information and outputs the voltage to a driver in each groove of the integrated deformable mirror so as to realize independent correction of the wavefront of each sub-beam of the array beam. The system integrates a plurality of sets of independent wavefront correction devices corresponding to each sub-beam in the traditional array beam self-adaptive optical system, has simple structure, is easy to assemble and control, greatly improves the working efficiency of the system, and can be widely applied to the field of incoherent or coherent array beams.
Description
Technical Field
The invention relates to the field of adaptive optics, in particular to an adaptive optical system for array beams, which has a compact structure.
Background
The synthesis of multiple lower power lasers into one beam of output is an effective way to improve the far field energy concentration of the laser emission system. The actual beam combining process inevitably introduces aberrations, affecting the beam quality. Taking the output of a fiber laser matched collimator as an example, when an error exists in the assembly in the axial direction, the focal point of the light beam can generate axial deviation, defocusing aberration occurs, and the focal point position cannot be accurately positioned at the target; when there is an error in the assembly in the vertical axis direction, aberration such as astigmatism and coma is generated, so that a far-field spot of the light beam is dispersed, and the energy concentration is affected. Therefore, aberration correction of the array beam is critical to improving beam quality of the composite array beam system.
The self-adaptive optical system realizes the correction of the light beam aberration by utilizing the cooperation of the wavefront corrector and the sensor, and is an effective way for improving the light beam quality. There are two basic requirements for wavefront correction of an array beam. First, the array beam is an array set of multiple sub-beams, and its beam aperture is relatively large compared to a single beam, and the corresponding wavefront corrector and sensor also need to be made large. The caliber of a common wavefront corrector, such as a micro-electromechanical deformable mirror, a spatial light modulator, a double-piezoelectric deformable mirror and the like, is limited by a manufacturing process, and cannot meet the requirement of large caliber. Second, each sub-beam in the multiple beams is independent of the others, and each sub-beam needs to be independently corrected in order to achieve correct wavefront correction quickly. The electrode and the substrate of the traditional wavefront corrector are uniformly distributed, deformation of each region of the continuous mirror surface is crosslinked, and independent deformation of each region is difficult to realize. In this case, therefore, it is common practice to configure separate adaptive optics for each sub-beam for wavefront correction of the array beam. Thus, the conventional array beam wavefront correction system becomes huge and complex, each sub-beam is independently provided with a set of wavefront corrector and wavefront sensor, the optical path is complex, the adjustment, assembly and maintenance of the system are very time-consuming, and the control procedure is very complicated.
Disclosure of Invention
In order to solve the problems of bulkiness, complexity, difficult assembly and difficult control of the existing array beam wavefront regulation and control system, the invention provides an array beam wavefront correction system based on an integrated corrector.
The technical scheme adopted by the embodiment of the invention is as follows:
an array beam wavefront correction system based on an integrated corrector comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
the first spectroscope is used for reflecting the array light beams to the integrated deformable mirror so that the array light beams are normally incident to the integrated deformable mirror;
the integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array light beam incident on the reflecting layer;
the second beam splitter is configured to split the corrected array beam into at least two beams, including a first beam and a second beam, where the first beam is condensed by the beam-condensing telescope and is incident to the integrated sensor;
the integrated sensor is used for detecting the spot form of each sub-beam of the corrected array beam and acquiring the wavefront distortion information of each sub-beam;
the control unit is electrically connected with the integrated sensor, and is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
Further, the system also comprises a quality evaluation unit, which is arranged on the optical path of the second light beam and is used for acquiring the target spot image of the corrected incoherent array light beam.
Still further, the quality evaluation unit includes a lens and a CCD camera, and the second light beam is converged onto a CCD camera target surface through the lens.
Furthermore, the control unit is electrically connected with the CCD camera, and is further used for receiving the target spot image acquired by the quality evaluation unit and evaluating the spot quality according to the target spot image.
Preferably, the control unit includes a high-voltage amplifier and a computer, the number of channels of the high-voltage amplifier is not less than the number of grooves of the integrated deformable mirror, and a driver in each groove of the integrated deformable mirror is electrically connected with each channel of the high-voltage amplifier through the electrical connection assembly.
Preferably, the driver in each groove of the integrated deformable mirror comprises a dual piezoelectric sheet driver, a micro-electromechanical driver and a spatial light modulation driver.
Preferably, the spatial positions of the honeycomb mirror bodies of the integrated deformable mirror are in one-to-one correspondence with the spatial positions of the sub-beams of the incoherent array light beam.
The invention also provides a self-adaptive wave front regulating and controlling method of incoherent array light beam based on the integrated deformable mirror, which is applied to the self-adaptive wave front regulating and controlling system and comprises the following steps:
s1, adjusting a first spectroscope to enable an array light beam to normally enter an integrated deformable mirror;
s2, rotating the integrated deformable mirror to enable all sub-beams of the array beam to correspond to all honeycombs of the integrated deformable mirror one by one;
s3, adjusting a second beam splitter, splitting the corrected array light beam, enabling the first light beam to be converged to a CCD camera through a lens, and enabling the second light beam to be incident to a beam shrinking telescope;
s4, adjusting a beam shrinking telescope, and shrinking a second beam of the corrected array beam to the integrated sensor;
s5, invoking a computer program, receiving an image of a target spot of the CCD camera, and evaluating the spot quality of an array beam according to the image of the target spot;
s6, if the quality of the light spot does not reach the standard, executing a step S8, and if the quality of the light spot reaches the standard, executing a step S7;
s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;
s8, calling a computer program and receiving wavefront distortion information of the integrated sensor;
and S9, judging whether the wave-front distortion information meets the correction requirement, if so, converting the wave-front distortion information into voltage information by using a wave-front restoration algorithm, outputting the voltage information to each channel of the high-voltage amplifier, executing the step S8, and if not, executing the step S7.
The beneficial effects of the invention are as follows:
the invention overcomes the problem of the complexity of the traditional array beam wavefront regulation and control system by utilizing the partition isolation characteristic of the mirror surface deformation of the integrated deformable mirror, solves the contradiction between independent regulation and control of each sub-beam wavefront of the array beam and system simplification, and provides the array beam self-adaptive regulation and control system which has simple structure, is easy to implement and can independently control each sub-beam wavefront.
Drawings
FIG. 1 is a schematic diagram of an array beam adaptive wavefront control system based on an integrated deformable mirror in the present invention;
FIG. 2 is a schematic view of a spatial arrangement of array beams according to the present invention;
FIG. 3 is a schematic rear view of an integrated deformable mirror according to the present invention;
FIG. 4 is a schematic perspective view of an integrated deformable mirror according to the present invention;
fig. 5 is a schematic reference numeral illustration of a flow chart of an array beam adaptive wavefront control method based on an integrated deformable mirror in the present invention:
1. an integrated deformable mirror; 2. an integrated sensor; 3. a quality evaluation unit; 4. a control unit; 41. a computer; 42. a high voltage amplifier; 6. a first spectroscope; 7. a second beam splitter; 8. a beam shrinking telescope; 9. a first light beam; 10. a second light beam; 11. a central groove; 12. a central sub-beam; 13. a central axis; 22. a driver; 31. a lens; a ccd camera.
Detailed Description
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.
Example 1
As shown in fig. 1, in the present embodiment, the integrated corrector-based array beam wavefront correction system includes an integrated deformable mirror 1, an integrated sensor 2, a quality evaluation unit 3, a control unit 4, a first spectroscope 6, a second spectroscope 7, and a beam reduction telescope 8, wherein the control unit 4 includes a computer 41 and a high-voltage amplifier 42, the quality evaluation unit 3 includes a lens 31, and a CCD camera 32, the array beam is reflected by the first spectroscope 6, the second spectroscope 7 is transmitted to the integrated deformable mirror 1, the incident direction thereof is normal incidence, the integrated deformable mirror 1 is deformed under the control of voltages of channels of the high-voltage amplifier 5, wavefront phase correction is independently performed on each sub-beam of the array beam incident thereon, and the corrected array beam is reflected to the second spectroscope 7. The second beam splitter 7 splits the corrected array beam into two beams, including a reflected first beam 9 and a transmitted second beam 10, wherein the first beam 9 is focused by a lens 31 and focused to the target surface of a CCD camera 32 for imaging, and the CCD camera 32 sends the acquired target spot image to a computer 41. The second light beam 10 is transmitted through the first spectroscope 6, is condensed through the beam condensing telescope 8, and is incident to the integrated sensor 2. The integrated sensor 2 calculates the optical axis offset by detecting the spot form of each sub-beam of the array beam, acquires wavefront distortion information of each sub-beam, and transmits the information to the computer 41. The computer 41 performs beam quality assessment according to the target spot image sent by the CCD camera 32, judges whether to start a wavefront correction program according to the beam quality, if so, uses a restoration algorithm to convert the received wavefront distortion information from the integrated sensor 2 into voltage information and outputs the voltage information to the high-voltage amplifier 42, wherein each channel of the high-voltage amplifier 42 is electrically connected with the driver 22 in each groove of the integrated deformable mirror 1, and is used for providing driving voltage for each driver 22 so as to enable each driver 22 to generate different deformation under different voltage environments and to lead the substrate reflection layer at the position of each driver 22 to deform so as to correct the wavefront aberration of each corresponding sub-beam in the array beam; if not, the voltage of each channel of the high voltage amplifier 42 is kept unchanged. Compared with the traditional array beam self-adaptive optical system, the wavefront correction system provided by the embodiment of the invention is greatly simplified in structure, a plurality of sets of independent wavefront correction equipment originally used for wavefront correction of each sub-beam are integrated, and the integrated deformable mirror 1 and the integrated sensor 2 are used for replacing a plurality of deformable mirrors and a plurality of sensors, so that the space occupied by the system is greatly saved, the system debugging and assembly difficulty is reduced, the system is easy to control and maintain, and the system working efficiency is improved. In this embodiment, the system uses the CCD camera 32 to evaluate the beam quality of the image of the target spot, on the one hand, to monitor the beam quality, and on the other hand, to avoid the adaptive optics from being in operation all the time, and to improve the system efficiency.
The embodiment of the present invention provides a spatial arrangement of array beams, as shown in fig. 2, where the array beams are composed of seven sub-beams, a central sub-beam 12 is located at the center, and the remaining six sub-beams are uniformly arranged around the central sub-beam 12. In other embodiments, the number and arrangement of sub-beams may be designed as desired. In the embodiment of the invention, the synthesis of the array light beams selects optical fiber lasers as light sources, each optical fiber laser is used for outputting high-power laser sub-light beams, the sub-light beams are collimated by a collimation system, the optical axis directions are parallel to each other, and then the optical beams are spatially combined by a beam combining device and output to the first spectroscope 6 of the wavefront correction system in the embodiment of the invention.
Based on the spatial arrangement of the sub-beams of the array beam, the structure of the integrated deformable mirror specifically selected in this embodiment is shown in fig. 3 and 4. The specific structure of the deformable mirror 1 in this embodiment is the same as that of the patent application CN109725415a. As shown in a schematic rear view structure of the integrated deformable mirror 1 in fig. 3, the integrated deformable mirror 1 includes a substrate, the substrate is generally made of a ceramic material with a certain thickness, the substrate has an upper surface, a lower surface or a front surface and a rear surface, one surface of the substrate is coated with a reflective layer, the other surface is used as a deformable mirror surface, and at least one groove is formed on the other surface of the substrate, in this embodiment, the integrated deformable mirror 1 is used for performing wavefront correction on each sub-beam of an array beam incident on the reflective layer independently corresponding to seven beams in the groove.
Seven grooves are formed in the base material, the base material is in a regular hexagon shape with the same size, one groove is arranged in the center of the base, and the other six grooves are closely and uniformly distributed around the base material. Each groove bottom is provided with a circular boss for connecting each driver 22. The size of each notch is set to be larger than the size of each sub-beam of the array beam, and the spatial distribution of each hexagonal groove is consistent with the spatial distribution of the sub-beams of the array beam, namely, when the central sub-beam 12 of the array beam is normally incident to the mirror surface area corresponding to the central groove 11 of the integrated deformable mirror 1, each sub-beam can be in one-to-one correspondence with each honeycomb mirror body only by rotating the integrated deformable mirror 1 around the central axis 13 thereof by a proper angle.
The integrated deformable mirror 1 according to the embodiment of the present invention is not limited to a specific structure of a honeycomb groove, and may be circular, square, etc., and the number of honeycomb grooves is not limited, and may be randomly adjusted according to the spatial arrangement and the number of the composite beam arrays. In addition, the adaptive wavefront control system according to the embodiments of the present invention does not limit the spatial arrangement and coherence of the array beams, and is not limited to the spatial arrangement of the incoherent array beams in some of the above embodiments, and is not limited to the number of sub-beams in the above embodiments. Each driver 22 of the integrated deformable mirror 1 in the embodiment of the present invention is not limited to the dual piezoelectric sheet structure in the above embodiment, but may be in various manners such as micro-electromechanical, integrated, and the like.
The invention also relates to an array beam wavefront correction method based on an integrated corrector, referring to fig. 5, specifically, the method is operated in the array beam wavefront correction system based on the integrated corrector, and comprises the following steps:
s1, adjusting a first spectroscope 6 to enable an array light beam to normally enter an integrated deformable mirror 1;
s2, rotating the integrated deformable mirror 1 to enable all sub-beams of the array beam to correspond to all honeycombs of the integrated deformable mirror 1 one by one;
s3, adjusting a second beam splitter 7, splitting the corrected array light beam, enabling the first light beam 9 to be converged to a CCD camera 32 through a lens 31, and enabling the second light beam 10 to be incident to a beam shrinking telescope 8;
s4, adjusting the beam shrinking telescope 8, and shrinking the second light beam 10 of the corrected array light beam to the integrated sensor 2;
s5, calling a computer program, receiving an image of a target spot of the CCD camera 32, and evaluating the spot quality of an array beam according to the image of the target spot;
s6, if the quality of the light spot does not reach the standard, executing a step S8, and if the quality of the light spot reaches the standard, executing a step S7;
s7, keeping the voltage of each channel of the high-voltage amplifier 42 unchanged, and executing step S5;
s8, calling a computer program and receiving wavefront distortion information of the integrated sensor 2;
and S9, judging whether the wave-front distortion information meets the correction requirement, if so, converting the wave-front distortion information into voltage information by using a wave-front restoration algorithm, outputting the voltage information to each channel of the high-voltage amplifier 42, executing the step S8, and if not, executing the step S7.
The wavefront distortion of each sub-beam of the array beam in the embodiment of the invention can be generated by a fiber laser or other types of lasers, and is not limited to a high power range.
While the preferred embodiment of the present invention has been described in detail, the present invention is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are included in the scope of the present invention as defined in the appended claims.
Claims (7)
1. An array beam wavefront correction system based on an integrated corrector is characterized by comprising an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
the first spectroscope is used for reflecting the array light beams to the integrated deformable mirror so that the array light beams are normally incident to the integrated deformable mirror; the array beam comprises a plurality of incoherent sub-beams;
the integrated deformable mirror comprises a substrate, wherein the substrate comprises an upper surface and a lower surface, and a thickness is arranged between the upper surface and the lower surface; the upper surface is coated with a reflecting layer, and the lower surface is provided with a plurality of grooves; the number of the grooves is the number of the sub-beams of the array beam, and the spatial distribution of the grooves is consistent with the spatial distribution shape of the sub-beams of the array beam; a driver and an electric connection assembly are arranged in the groove and used for driving the groove bottom of the groove and the corresponding reflecting layer area to deform; each sub-beam of the array beam is respectively incident in a reflecting layer area corresponding to each groove, so that the integrated deformable mirror independently carries out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;
the second beam splitter is configured to split the corrected array beam into at least two beams, including a first beam and a second beam, where the first beam is condensed by the beam-condensing telescope and is incident to the integrated sensor;
the integrated sensor is used for detecting the spot form of each sub-beam of the corrected array beam and obtaining the wavefront distortion information of each sub-beam;
the control unit is electrically connected with the integrated sensor and the integrated deformable mirror, and is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
2. The array beam wavefront correction system of claim 1, further comprising a quality assessment unit disposed on the optical path of the second beam for acquiring a corrected array beam target spot image and transmitting to the control unit.
3. The array beam wavefront correction system of claim 2, wherein the quality assessment unit includes a lens and a CCD camera, the second beam converging onto the CCD camera target surface via the lens.
4. The array beam wavefront correction system of claim 3, wherein the control unit is electrically connected to the CCD camera, and the control unit is further configured to receive the target spot image acquired by the quality assessment unit and perform spot quality assessment according to the target spot image.
5. The array beam wavefront correction system of any one of claims 1-4, wherein said control unit includes a high voltage amplifier and a computer, the number of channels of said high voltage amplifier is not less than the number of grooves of said integrated deformable mirror, and a driver in each groove of said integrated deformable mirror is electrically connected to each channel of said high voltage amplifier through said electrical connection assembly, respectively.
6. The array beam wavefront correction system of claim 5, wherein the driver in each recess of the integrated deformable mirror comprises a bimorph driver, a microelectromechanical driver, a spatial light modulation driver.
7. An array beam wavefront correction method based on an integrated corrector, applied to the array beam wavefront correction system as claimed in any one of claims 1 to 6, comprising the steps of:
s1, adjusting a first spectroscope to enable an array light beam to normally enter an integrated deformable mirror;
s2, rotating the integrated deformable mirror to enable all sub-beams of the array beam to correspond to all honeycombs of the integrated deformable mirror one by one;
s3, adjusting a second beam splitter, splitting the corrected array light beam, enabling the first light beam to be converged to a CCD camera through a lens, and enabling the second light beam to be incident to a beam shrinking telescope;
s4, adjusting a beam shrinking telescope, and shrinking a second beam of the corrected array beam to the integrated sensor;
s5, invoking a computer program, receiving an image of a target spot of the CCD camera, and evaluating the spot quality of an array beam according to the image of the target spot;
s6, if the quality of the light spot does not reach the standard, executing a step S8, and if the quality of the light spot reaches the standard, executing a step S7;
s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;
s8, calling a computer program and receiving wavefront distortion information of the integrated sensor;
and S9, judging whether the wave-front distortion information meets the correction requirement, if so, converting the wave-front distortion information into voltage information by using a wave-front restoration algorithm, outputting the voltage information to each channel of the high-voltage amplifier, executing the step S8, and if not, executing the step S7.
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| CN113311580B (en) * | 2021-05-21 | 2022-12-30 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
| CN113256630B (en) * | 2021-07-06 | 2021-11-26 | 深圳中科飞测科技股份有限公司 | Light spot monitoring method and system, dark field defect detection equipment and storage medium |
| CN118534647B (en) * | 2024-07-26 | 2024-10-18 | 中国科学院合肥物质科学研究院 | Adaptive beam collimation and quality optimization system and method based on spot gridding |
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