CN110579873A - array beam wavefront correction system and method based on integrated corrector - Google Patents
array beam wavefront correction system and method based on integrated corrector Download PDFInfo
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- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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Abstract
The invention discloses an array beam wavefront correction system based on an integrated corrector, which comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam-shrinking telescope, a computer and a high-voltage amplifier, wherein the spatial arrangement of each groove of the integrated deformable mirror corresponds to the spatial arrangement of each sub-beam of an array beam one by one, the array beam is reflected to the integrated sensor through the integrated deformable mirror, the integrated sensor feeds back the wavefront distortion information of the array beam to the computer, and the computer controls the voltage of each channel of the high-voltage amplifier according to the wavefront distortion information and outputs the voltage to a driver in each groove of the integrated deformable mirror, so that the independent correction of the wavefront of each sub-beam of the array beam is realized. The system integrates a plurality of sets of independent wavefront correction devices corresponding to all sub-beams in the traditional array beam self-adaptive optical system, has a simple structure, is easy to assemble and control, greatly improves the working efficiency of the system, and can be widely applied to the field of incoherent or coherent array beams.
Description
Technical Field
The invention relates to the field of adaptive optics, in particular to an adaptive optical system for array beams, which is compact in structure.
background
the laser with multiple paths of lower power is synthesized into one beam for output, and the method is an effective way for improving far-field energy concentration of a laser emission system. In the actual beam combining process, aberration is inevitably introduced, and the beam quality is affected. Taking the output of the fiber laser matched collimator as an example, when the assembly in the axial direction has errors, the beam focus can generate axial offset, defocusing aberration occurs, and the focus position cannot be accurately positioned at a target; when there is an error in the assembly in the vertical axis direction, aberrations such as astigmatism and coma will be generated, so that the far field light spot of the light beam is dispersed, and the energy concentration is affected. Therefore, aberration correction of the array beam is the key to improving beam quality of the composite array beam system.
the self-adaptive optical system realizes beam aberration correction by utilizing the cooperation of the wavefront corrector and the sensor, and is an effective way for improving the beam quality. There are two basic requirements for wavefront correction of array beams. First, the array beam is an array set of multiple sub-beams, and the aperture of the beam is larger than that of a single beam, and the corresponding wavefront corrector and sensor also need to be made into a large aperture. The aperture of a common wavefront corrector, such as a micro-electromechanical deformable mirror, a spatial light modulator, a double piezoelectric plate deformable mirror, etc., is limited by the manufacturing process, and cannot meet the requirement of large aperture. Second, each sub-beam of the multi-beam is independent, and each sub-beam needs to be corrected independently in order to realize correct wavefront correction quickly. In the traditional wave-front corrector, the electrodes and the substrate are uniformly distributed, and the deformation of each area of the continuous mirror surface is connected, so that the independent deformation of each area is difficult to realize. Therefore, in this case, it is common practice to provide an independent adaptive optical device for each sub-beam for wavefront correction of the array beam. Therefore, the traditional array beam wavefront correction system becomes very large and complex, each beam of sub-beam is independently provided with a set of wavefront corrector and a wavefront sensor, the optical path is complex, the adjustment, assembly and maintenance of the system are very time-consuming, and the control procedure is very complicated.
disclosure of Invention
in order to solve the problems of bulkiness, complexity, difficulty in assembly and difficulty in control of the conventional array beam wavefront regulation and control system, the invention provides an array beam wavefront correction system based on an integrated corrector.
The technical scheme adopted by the embodiment of the invention is as follows:
An array beam wavefront correction system based on an integrated corrector comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
The first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;
The integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;
the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;
the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;
The control unit is electrically connected with the integrated deformable mirror and is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
further, the system also comprises a quality evaluation unit which is arranged on the light path of the second light beam and is used for acquiring the target spot image of the corrected incoherent array light beam.
still further, the quality evaluation unit includes a lens and a CCD camera, and the second light beam is converged onto the CCD camera target surface through the lens.
furthermore, the control unit is electrically connected with the CCD camera and is also used for receiving the target light spot image acquired by the quality evaluation unit and evaluating the light spot quality according to the target light spot image.
preferably, the control unit comprises a high-voltage amplifier and a computer, the number of channels of the high-voltage amplifier is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high-voltage amplifier through the electric connection assembly.
Preferably, the drivers in the grooves of the integrated deformable mirror comprise a bimorph driver, a microelectromechanical driver and a spatial light modulation driver.
Preferably, the spatial position of each honeycomb mirror body of the integrated deformable mirror corresponds to the spatial position of each sub-beam of the incoherent array beam in a one-to-one manner.
The invention also provides a self-adaptive wavefront regulation and control method of the incoherent array light beam based on the integrated deformable mirror, which is applied to the self-adaptive wavefront regulation and control system and comprises the following steps:
s1, adjusting the first beam splitter to make the array beam normally incident on the integrated deformable mirror;
s2, rotating the integrated deformable mirror to enable the sub-beams of the array beam to correspond to the cells of the integrated deformable mirror one by one;
S3, adjusting a second beam splitter to split the corrected array beam, so that the first beam is converged to the CCD camera through a lens, and the second beam is incident to a beam-shrinking telescope;
S4, adjusting the beam shrinking telescope to shrink the second beam of the corrected array beam to the integrated sensor;
s5, calling a computer program, receiving the target light spot image of the CCD camera, and evaluating the light spot quality of the array light beam according to the target light spot image;
S6, if the quality of the facula does not reach the standard, executing the step S8, if the quality of the facula reaches the standard, executing the step S7;
s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;
S8, calling a computer program to receive wavefront distortion information of the integrated sensor;
and S9, judging whether the wavefront distortion information meets the correction requirement, if so, converting the wavefront distortion information into voltage information by using a wavefront recovery algorithm, outputting the voltage information to each channel of the high-voltage amplifier, and executing a step S8, otherwise, executing a step S7.
The invention has the beneficial effects that:
The invention utilizes the partition isolation characteristic of the mirror surface deformation of the integrated deformable mirror, overcomes the complexity problem of the traditional array beam wavefront regulation system, solves the contradiction between the independent regulation and the system simplification of each sub-beam wavefront of the array beam, and provides the array beam self-adaptive control system which has a simple structure, is easy to implement and can independently control each sub-beam wavefront.
Drawings
FIG. 1 is a schematic diagram of an array beam adaptive wavefront control system based on an integrated deformable mirror according to the present invention;
FIG. 2 is a schematic diagram of the spatial arrangement of an array beam according to the present invention;
FIG. 3 is a rear view of an integrated deformable mirror according to the present invention;
FIG. 4 is a schematic perspective view of an integrated deformable mirror according to the present invention;
FIG. 5 is a schematic flow chart of an array beam adaptive wavefront control method based on an integrated deformable mirror according to the present invention
Description of reference numerals:
1. an integrated deformable mirror; 2. an integral sensor; 3. a quality evaluation unit; 4. a control unit; 41. a computer; 42. a high voltage amplifier; 6. a first beam splitter; 7. a second beam splitter; 8. a beam-shrinking telescope; 9. a first light beam; 10. a second light beam; 11. a central recess; 12. a central sub-beam; 13. a central shaft of the integrated deformable mirror; 22. a driver; 31. a lens; a CCD camera.
Detailed Description
it should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.
Example 1
As shown in fig. 1, in this embodiment, the array beam wavefront correction system based on the integrated corrector includes an integrated deformable mirror 1, an integrated sensor 2, a quality evaluation unit 3, a control unit 4, a first spectroscope 6, a second spectroscope 7, and a beam reduction telescope 8, where the control unit 4 includes a computer 4 and a high-voltage amplifier 5, the quality evaluation unit 3 includes a lens 31 and a CCD camera 32, the array beam is reflected by the first spectroscope 6, the second spectroscope 7 is transmitted to the integrated deformable mirror 1, the incident direction is normal incidence, the integrated deformable mirror 1 is controlled by each channel voltage of the high-voltage amplifier 5 to deform, the wavefront phase correction is independently performed on each sub beam of the array beam incident thereon, and the corrected array beam is reflected to the second spectroscope 7. The second beam splitter 7 splits the corrected array light beam into two light beams, including a reflected first light beam 9 and a transmitted second light beam 10, wherein the first light beam 9 is focused by the lens 31 and converged to a target surface of the CCD camera 32 for imaging, and the CCD camera 32 sends the acquired target light spot image to the computer 4. The second light beam 10 is transmitted through the first beam splitter 6, then is condensed by the beam condensing telescope 8, and enters the integrated sensor 2. The integrated sensor 2 detects the spot form of each sub-beam of the array beam, calculates the optical axis offset, acquires the wavefront distortion information of each sub-beam, and sends the wavefront distortion information to the computer 4. The computer 4 carries out light beam quality evaluation according to the image of the target light spot sent by the CCD camera 32, judges whether to start a wavefront correction program according to the light beam quality, if so, converts received wavefront distortion information from the integrated sensor 2 into voltage information by using a recovery algorithm and outputs the voltage information to the high-voltage amplifier 5, and each channel of the high-voltage amplifier 5 is respectively and electrically connected with the driver 22 in each groove of the integrated deformable mirror 1 and is used for providing driving voltage for each driver 22 so that each driver 22 generates different deformation amounts under different voltage environments and dragging the substrate reflecting layer at the position of each driver 22 to generate deformation so as to correct the wavefront aberration of each corresponding sub-light beam in the array light beam; if not, the voltage of each channel of the high-voltage amplifier 5 is kept unchanged. Compared with the traditional array beam self-adaptive optical system, the wavefront correction system provided by the embodiment of the invention has the advantages that the structure is greatly simplified, a plurality of sets of independent wavefront correction equipment originally used for wavefront correction of each sub-beam are integrated, and the integrated deformable mirror and the integrated sensor are used for replacing a plurality of deformable mirrors and a plurality of sensors, so that the space occupied by the system is greatly saved, the debugging and assembling difficulty of the system is reduced, the system is easy to control and maintain, and the working efficiency of the system is improved. In this embodiment, the system uses the CCD camera 32 to perform beam quality evaluation on the target spot image, so as to monitor the beam quality and prevent the adaptive optical device from being in a working state all the time, thereby improving the system efficiency.
The embodiment of the present invention provides a spatial arrangement of array beams, as shown in fig. 2, the array beams are composed of seven sub-beams, the sub-beam 12 is located at the center, and the remaining six sub-beams are uniformly arranged around the center sub-beam 12. In other embodiments, the number and arrangement of the sub-beams may be designed as desired. In the embodiment of the invention, optical fiber lasers are selected as light sources for synthesizing the array beams, each optical fiber laser is used for outputting high-power laser sub-beams, the sub-beams are collimated by the collimation system to enable the directions of optical axes to be parallel to each other, and then spatial beam combination is carried out by the beam combination device to be output to the first beam splitter 6 of the wavefront correction system in the embodiment of the invention.
based on the spatial arrangement of the sub-beams of the array beam, the structure schematic diagram of the integrated deformable mirror specifically selected in this embodiment is shown in fig. 3 and 4. The specific structure of the integrated deformable mirror 1 in the present embodiment is the same as that of the patent application CN 109725415A. As shown in fig. 3, a schematic rear view structure of an integrated deformable mirror 1 is shown, where the integrated deformable mirror 1 includes a substrate, the substrate is generally made of a ceramic material with a certain thickness, the substrate has an upper surface, a lower surface, or a front surface and a rear surface, one surface of the substrate is coated with a reflective layer as a deformable mirror surface, and the other surface is provided with at least one groove;
Seven grooves are formed in a base material, regular hexagonal shapes with the same size are adopted, one groove is arranged in the center of the base, and the other six grooves are closely and uniformly distributed around the base. And a round boss is arranged at the bottom of each groove and used for connecting each piezoelectric driver. The size of each notch is set to be larger than that of each sub-beam of the array beam, the spatial distribution of each hexagonal groove is consistent with that of the sub-beams of the array beam, namely when the sub-beams 12 of the array beam are normally incident to the mirror surface area corresponding to the honeycomb groove 11 in the center of the integrated deformable mirror, the sub-beams can be in one-to-one correspondence with the honeycomb mirror bodies only by rotating the integrated deformable mirror by a proper angle around the central axis 13.
the integrated deformable mirror provided by the embodiment of the invention has the advantages that the specific structure of the honeycomb grooves is not limited, the honeycomb grooves can be round, square and the like, the number of the honeycomb grooves is not limited, and the honeycomb grooves can be randomly adjusted according to the spatial arrangement and the number of the composite light beam array. In addition, the adaptive wavefront control system according to the embodiment of the present invention does not limit the spatial arrangement and coherence of the array beams, and is not limited to the spatial arrangement of the incoherent array beams in some embodiments described above, nor to the number of sub-beams in the embodiments described above. Each honeycomb groove driver of the integrated deformable mirror in the embodiment of the invention is not limited to the bimorph structure in the above embodiment, and can also be in various modes such as micro-electro-mechanical mode, integrated mode and the like.
the invention also relates to an array beam wavefront correction method based on an integrated corrector, which is specifically operated in the array beam wavefront correction system based on the integrated corrector with reference to fig. 5, and comprises the following steps:
S1, adjusting the first beam splitter to make the array beam normally incident on the integrated deformable mirror;
S2, rotating the integrated deformable mirror to enable the sub-beams of the array beam to correspond to the cells of the integrated deformable mirror one by one;
s3, adjusting a second beam splitter to split the corrected array beam, so that the first beam is converged to the CCD camera through a lens, and the second beam is incident to a beam-shrinking telescope;
s4, adjusting the beam shrinking telescope to shrink the second beam of the corrected array beam to the integrated sensor;
S5, calling a computer program, receiving the target light spot image of the CCD camera, and evaluating the light spot quality of the array light beam according to the target light spot image;
s6, if the quality of the facula does not reach the standard, executing the step S8, if the quality of the facula reaches the standard, executing the step S7;
S7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;
S8, calling a computer program to receive wavefront distortion information of the integrated sensor;
and S9, judging whether the wavefront distortion information meets the correction requirement, if so, converting the wavefront distortion information into voltage information by using a wavefront recovery algorithm, outputting the voltage information to each channel of the high-voltage amplifier, and executing a step S8, otherwise, executing a step S7.
The wavefront distortion of each sub-beam of the array beam in the embodiment of the invention can be generated by a fiber laser or other lasers, and is not limited to a high-power range.
while the preferred embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (8)
1. an array beam wavefront correction system based on an integrated corrector is characterized by comprising an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;
the first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;
The integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;
the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;
the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;
The control unit is electrically connected with the integrated sensor, the control unit is electrically connected with the integrated deformable mirror, and the control unit is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.
2. the array beam wavefront correction system of claim 1, further comprising a quality evaluation unit disposed on the optical path of the second beam for acquiring the corrected array beam to-target spot image and sending to the control unit.
3. The array beam wavefront correction system of claim 2, wherein the quality assessment unit comprises a lens and a CCD camera, the second beam being converged onto the CCD camera target surface via the lens.
4. The array beam wavefront correction system of claim 3, wherein the control unit is electrically connected to the CCD camera, and the control unit is further configured to receive the target spot image obtained by the quality evaluation unit and perform spot quality evaluation according to the target spot image.
5. The array beam wavefront correction system of any one of claims 1-4, wherein the control unit comprises high voltage amplifiers and a computer, the number of channels of the high voltage amplifiers is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high voltage amplifiers through the electrical connection components.
6. the array beam wavefront correction system of claim 5, wherein the actuators in the grooves of the integral deformable mirror comprise bimorph actuators, microelectromechanical actuators, spatial light modulation actuators.
7. the array beam wavefront correction system of claim 5, wherein the number of the integrated deformable mirror grooves is equal to the number of the array beam sub-beams, and the spatial positions of the grooves of the integrated deformable mirror correspond to the spatial positions of the sub-beams of the array beam one to one.
8. An array beam wavefront correction method based on an integrated corrector, which is applied to the array beam wavefront correction system of any one of claims 1 to 7, and is characterized by comprising the following steps:
S1, adjusting the first beam splitter to make the array beam normally incident on the integrated deformable mirror;
s2, rotating the integrated deformable mirror to enable the sub-beams of the array beam to correspond to the cells of the integrated deformable mirror one by one;
s3, adjusting a second beam splitter to split the corrected array beam, so that the first beam is converged to the CCD camera through a lens, and the second beam is incident to a beam-shrinking telescope;
s4, adjusting the beam shrinking telescope to shrink the second beam of the corrected array beam to the integrated sensor;
s5, calling a computer program, receiving the target light spot image of the CCD camera, and evaluating the light spot quality of the array light beam according to the target light spot image;
S6, if the quality of the facula does not reach the standard, executing the step S8, if the quality of the facula reaches the standard, executing the step S7;
s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;
s8, calling a computer program to receive wavefront distortion information of the integrated sensor;
And S9, judging whether the wavefront distortion information meets the correction requirement, if so, converting the wavefront distortion information into voltage information by using a wavefront recovery algorithm, outputting the voltage information to each channel of the high-voltage amplifier, and executing a step S8, otherwise, executing a step S7.
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| CN113256630A (en) * | 2021-07-06 | 2021-08-13 | 深圳中科飞测科技股份有限公司 | Light spot monitoring method and system, dark field defect detection equipment and storage medium |
| CN113311580A (en) * | 2021-05-21 | 2021-08-27 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113311580A (en) * | 2021-05-21 | 2021-08-27 | 中国人民解放军国防科技大学 | Method for preparing differential array beam wavefront corrector based on aberration measurement |
| CN113256630A (en) * | 2021-07-06 | 2021-08-13 | 深圳中科飞测科技股份有限公司 | Light spot monitoring method and system, dark field defect detection equipment and storage medium |
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