CN109656015A - A method of improving optical system wavefront distortion correction accuracy - Google Patents
A method of improving optical system wavefront distortion correction accuracy Download PDFInfo
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- CN109656015A CN109656015A CN201910073386.1A CN201910073386A CN109656015A CN 109656015 A CN109656015 A CN 109656015A CN 201910073386 A CN201910073386 A CN 201910073386A CN 109656015 A CN109656015 A CN 109656015A
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- driver group
- distorting lens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/06—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the phase of light
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Abstract
The present invention relates to a kind of methods for improving optical system wavefront distortion correction accuracy, belong to adaptive optical technique field, distorting lens drive array is divided into center driver group and edge driver group, the edge driver group is located at the periphery of center driver group, adjust the position of each optical element in optical system, guarantee that incident beam reflexes to Wavefront sensor through distorting lens, utilize the aberration of center driver group correction incident beam aperture center part, utilize the aberration of edge driver group correction incident beam bore marginal portion, the present invention is by being divided into center driver group and edge driver group for distorting lens drive array, first with the aberration of center driver group correction incident beam aperture center part, recycle the aberration of edge driver group correction incident beam bore marginal portion, it is final to realize to entire incident light The high-precision correction of beam bore aberration, it is convenient to operate.
Description
Technical field
The invention belongs to adaptive optical technique fields, relate in particular to a kind of raising optical system wavefront distortion correction
The method of precision.
Background technique
Wavefront distortion has seriously affected laser beam quality, and in order to eliminate wavefront distortion, adaptive optical technique is extensive
Using.Adaptive optics system is the system of a kind of real-time detection and correction random optical wave front aberration, it is mainly passed by wavefront
Sensor (Hartmann wave front sensor or curvature sensor etc.), wave-front corrector (tilting mirror, distorting lens etc.) and wavefront control
The part such as device forms.By Wavefront sensor real-time detection wavefront distortion information, and Wavefront sensor is detected by wavefront controller
Obtained signal is converted into the voltage control signal of each driver of wave-front corrector by control algolithm, and voltage control signal drives
Dynamic wave-front corrector changes mirror shape, to realize the real time correction of wavefront distortion.In order to improve adaptive optics system
Wavefront distortion calibration result, especially for the aberration of better calibration of laser beam size marginal portion, distorting lens needs swashing
Retain circle driver (one, Correction of low order aberrations using outside light beam size
Continuous deformable mirrors, " OPTICS EXPRESS ", Vol.16,2008,2859-2866. bis-,
Correction of ocular and atmospheric wavefronts:a comparison of the
performance of various deformable mirrors,《APPLIED OPTICS》,Vol.47,2008,6550-
6562.)。
Summary of the invention
For various deficiencies of the prior art, to solve the above-mentioned problems, it is proposed that a kind of raising optical system wavefront is abnormal
Become the method for correction accuracy.
To achieve the above object, the invention provides the following technical scheme:
A method of improving optical system wavefront distortion correction accuracy, comprising the following steps:
S1: distorting lens drive array is divided into center driver group and edge driver group, the edge driver
Group is located at the periphery of center driver group；
S2: the position of each optical element in adjustment optical system guarantees that incident beam reflexes to wavefront sensing through distorting lens
Device；
S3: the aberration of center driver group correction incident beam aperture center part is utilized；
S4: the aberration of edge driver group correction incident beam bore marginal portion is utilized.
Further, the optical system includes spectroscope, reflective mirror, Wavefront sensor, distorting lens and controller, and described point
Light microscopic is obliquely installed, and spectroscope and distorting lens are arranged with optical axis, and incident beam is transmitted through distorting lens after spectroscope, through deforming
The incident beam that mirror is reflected back is divided into sample beam and outgoing beam after spectroscope, and the reflective mirror and Wavefront sensor are shared the same light
Axis setting, and reflective mirror is correspondingly arranged with spectroscope, sample beam is successively incident to reflective mirror and Wavefront sensor, the control
Device is electrically connected with Wavefront sensor, distorting lens respectively.
Further, the angle of the spectroscope, reflective mirror and horizontal plane is 45 °.
Further, shrink beam component is additionally provided between the reflective mirror and Wavefront sensor, the shrink beam component includes confocal
The first lens and the second lens of point, and the optical axis coincidence of the optical axis of shrink beam component and Wavefront sensor.
Further, it is coated with Anti-reflective coating on the reflective mirror, is coated with anti-reflection film on first lens and the second lens.
Further, the center driver group is located at the centre of distorting lens drive array, the edge driver group position
In the edge of distorting lens drive array, the distorting lens drive array is N1×N2, center driver group is M1×M2, and
N1-M1>=2, N2-M2>=2, wherein N1Indicate the line number of deformation mirror driver permutation, N2Indicate the column of deformation mirror driver permutation
Number, M1Indicate the line number of center driver group, M2Indicate the columns of center driver group.
Further, the effective aperture of the distorting lens is matched with incident beam bore.
The beneficial effects of the present invention are:
By the way that distorting lens drive array is divided into center driver group and edge driver group, first with center driver
The aberration of group correction incident beam aperture center part recycles edge driver group correction incident beam bore marginal portion
Aberration, the final high-precision correction realized to entire incident beam bore aberration, it is convenient to operate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of optical system in the present invention；
Fig. 2 is the incident beam aberration schematic diagram before correction；
Fig. 3 is to utilize the incident beam aberration schematic diagram after the correction of center driver group；
Fig. 4 is to utilize the incident beam aberration schematic diagram after the correction of edge driver group.
In attached drawing: 1- incident beam, 2- spectroscope, 3- distorting lens, 4- reflective mirror, the first lens of 5-, the second lens of 6-, 7-
Wavefront sensor, 8- controller, 9- outgoing beam.
Specific embodiment
It is right below with reference to attached drawing of the invention in order to make those skilled in the art more fully understand technical solution of the present invention
Technical solution of the present invention carries out clear, complete description, and based on the embodiment in the application, those of ordinary skill in the art exist
Other similar embodiments obtained under the premise of creative work are not made, shall fall within the protection scope of the present application.
In addition, the direction word mentioned in following embodiment, such as "upper" "lower" " left side " " right side " etc. are only the directions with reference to attached drawing, because
This, the direction word used is for illustrative and not limiting the invention.
Embodiment one:
A method of improving optical system wavefront distortion correction accuracy, comprising the following steps:
Firstly, distorting lens drive array is divided into center driver group and edge driver group, the centre-drive
Device group is located at the centre of distorting lens drive array, and the edge driver group is located at the edge of distorting lens drive array,
That is edge driver group is located at the periphery of center driver group.Distorting lens drive array is set as N1×N2, center is driven
Dynamic device group is M1×M2, and N1-M1>=2, N2-M2>=2, wherein N1Indicate the line number of deformation mirror driver permutation, N2Indicate deformation
The columns of mirror driver permutation, M1Indicate the line number of center driver group, M2Indicate the columns of center driver group.
Secondly, adjusting the position of each optical element in optical system, guarantee that incident beam reflexes to wavefront through distorting lens and passes
Sensor, and the effective aperture of distorting lens is matched with incident beam bore.
Specifically, as shown in Figure 1, the optical system includes spectroscope 2, reflective mirror 4, Wavefront sensor 7, distorting lens 3
With controller 8, the spectroscope 2 is obliquely installed, and spectroscope 2 and distorting lens 3 are arranged with optical axis, and incident beam 1 is through spectroscope 2
After be transmitted through distorting lens 3, the incident beam being reflected back through distorting lens 3 is divided into sample beam and outgoing beam 9 after spectroscope 2,
The reflective mirror 4 and Wavefront sensor 7 are arranged with optical axis, and reflective mirror 4 is correspondingly arranged with spectroscope 2, and sample beam successively enters
It is incident upon reflective mirror 4 and Wavefront sensor 7, the controller 8 is electrically connected with Wavefront sensor 7, distorting lens 3 respectively.The present embodiment
In, the angle of the spectroscope 2, reflective mirror 4 and horizontal plane is 45 °.Meanwhile between the reflective mirror 4 and Wavefront sensor 7
It is additionally provided with shrink beam component, the shrink beam component includes confocal first lens 5 and the second lens 6, and the optical axis of shrink beam component
With the optical axis coincidence of Wavefront sensor 7.It is coated with Anti-reflective coating on the reflective mirror 4, on first lens 5 and the second lens 6
It is coated with anti-reflection film.
Finally, inventor has found in long-term practice: the wave front aberration of beam size central part and marginal portion has
Different space characteristics, and distorting lens leads to the driving of the center portion thereof point and marginal portion due to the mechanical structure feature of its own
Device array also has different roomage response features, and therefore, inventor corrects incident beam bore first with center driver group
The aberration of central part recycles the aberration of edge driver group correction incident beam bore marginal portion, to realize distorting lens
The matching of the space characteristics of drive array and light beam aberration, improves the control precision of adaptive optics system wavefront distortion.
Embodiment two:
The part that the present embodiment is the same as example 1 repeats no more, unlike:
In the present embodiment, the parameter difference of each optical element is as follows:
The bore of incident beam is 50 × 50mm, wavelength 1053nm；Spectroscopical bore is 100 × 100mm, and 45 ° put
It sets, is 1% to 1053nm laser reflectivity；The parameter of distorting lens is as shown in table 1；The bore of reflective mirror be 100 × 100mm, 45 °
It places, is 99.95% to 1053nm laser reflectivity；The bore of first lens is 100 × 100mm, focal length 500mm；Second
The bore of lens is 10 × 10mm, focal length 50mm；The parameter of Wavefront sensor is as shown in table 2；The bore of outgoing beam is 50
× 50mm, wavelength 1053nm.
Table 1: distorting lens the key technical indexes parameter
Table 2: Wavefront sensor the key technical indexes parameter
Specific adjustment process is as follows:
1, distorting lens drive array includes 7 × 7 drivers, and distorting lens drive array is divided into center driver
Group and edge driver group, wherein center driver group includes 5 × 5 drivers, and edge driver group includes being located at center to drive
24 drivers of dynamic device group periphery.Controller is first in 25 drivers correction incident beam bore of center driver group
The aberration of center portion point, the incident beam aberration difference before correction, after correction are as shown in Figures 2 and 3, wherein the incidence before correction
Light beam aberration PV value is 1.6 μm, and the incident beam aberration PV value after correction is 0.6 μm.
2, continue to carry out school to the aberration of incident beam bore marginal portion using 24 drivers of edge driver group
Just, the incident beam aberration after correction is as shown in Figure 4, wherein the incident beam aberration PV value after correction is 0.3 μm.
The above has been described in detail, described above, is only a preferred embodiment of the present invention, when cannot
It limit the scope of implementation of the present invention, i.e., it is all according to the made equivalent changes and modifications of the application range, it should still belong to covering scope of the present invention
It is interior.
Claims (7)
1. a kind of method for improving optical system wavefront distortion correction accuracy, which comprises the following steps:
S1: distorting lens drive array is divided into center driver group and edge driver group, the edge driver group position
In the periphery of center driver group；
S2: the position of each optical element in adjustment optical system guarantees that incident beam reflexes to Wavefront sensor through distorting lens；
S3: the aberration of center driver group correction incident beam aperture center part is utilized；
S4: the aberration of edge driver group correction incident beam bore marginal portion is utilized.
2. the method according to claim 1, wherein the optical system includes spectroscope, reflective mirror, wavefront biography
Sensor, distorting lens and controller, the spectroscope are obliquely installed, and spectroscope and distorting lens are arranged with optical axis, incident beam warp
Distorting lens is transmitted through after spectroscope, the incident beam being reflected back through distorting lens is divided into sample beam and emergent light after spectroscope
Beam, the reflective mirror and Wavefront sensor are arranged with optical axis, and reflective mirror is correspondingly arranged with spectroscope, and sample beam is successively incident
To reflective mirror and Wavefront sensor, the controller is electrically connected with Wavefront sensor, distorting lens respectively.
3. according to the method described in claim 2, it is characterized in that, the angle of the spectroscope, reflective mirror and horizontal plane is
45°。
4. according to the method described in claim 3, it is characterized in that, being additionally provided with shrink beam between the reflective mirror and Wavefront sensor
Component, the shrink beam component include confocal first lens and the second lens, and the optical axis and Wavefront sensor of shrink beam component
Optical axis coincidence.
5. according to the method described in claim 4, it is characterized in that, be coated with Anti-reflective coating on the reflective mirror, first lens
Anti-reflection film is coated with on the second lens.
6. according to the method described in claim 5, it is characterized in that, the center driver group is located at distorting lens drive array
Centre, the edge driver group is located at the edge of distorting lens drive array, and the distorting lens drive array is N1×
N2, center driver group is M1×M2, and N1-M1>=2, N2-M2>=2, wherein N1Indicate the line number of deformation mirror driver permutation, N2
Indicate the columns of deformation mirror driver permutation, M1Indicate the line number of center driver group, M2Indicate the columns of center driver group.
7. according to the method described in claim 6, it is characterized in that, the effective aperture of the distorting lens and incident beam bore
Match.
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| CN201910073386.1A CN109656015B (en) | 2019-01-25 | 2019-01-25 | Method for improving wavefront distortion correction precision of optical system |
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| CN201910073386.1A CN109656015B (en) | 2019-01-25 | 2019-01-25 | Method for improving wavefront distortion correction precision of optical system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579873A (en) * | 2019-09-06 | 2019-12-17 | 中国人民解放军国防科技大学 | array beam wavefront correction system and method based on integrated corrector |
| CN110718846A (en) * | 2019-10-28 | 2020-01-21 | 中国科学院上海光学精密机械研究所 | Device and method for compensating femtosecond laser pulse front edge and wavefront distortion |
| CN111175954A (en) * | 2020-02-21 | 2020-05-19 | 哈工大机器人(中山)无人装备与人工智能研究院 | Quick high-contrast image scanning microscopic imaging device based on Nipkow disk |
| CN116009242A (en) * | 2022-12-02 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Method and system for improving wavefront correction precision |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102021112271A1 (en) | 2021-05-11 | 2022-11-17 | Trumpf Laser- Und Systemtechnik Gmbh | Device and method for determining the beam quality |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579873A (en) * | 2019-09-06 | 2019-12-17 | 中国人民解放军国防科技大学 | array beam wavefront correction system and method based on integrated corrector |
| CN110579873B (en) * | 2019-09-06 | 2024-04-02 | 中国人民解放军国防科技大学 | Array beam wavefront correction system and method based on integrated corrector |
| CN110718846A (en) * | 2019-10-28 | 2020-01-21 | 中国科学院上海光学精密机械研究所 | Device and method for compensating femtosecond laser pulse front edge and wavefront distortion |
| CN111175954A (en) * | 2020-02-21 | 2020-05-19 | 哈工大机器人(中山)无人装备与人工智能研究院 | Quick high-contrast image scanning microscopic imaging device based on Nipkow disk |
| CN116009242A (en) * | 2022-12-02 | 2023-04-25 | 中国工程物理研究院激光聚变研究中心 | Method and system for improving wavefront correction precision |
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