CN115509002A - Adaptive optical monitoring device and method for array light beam - Google Patents
Adaptive optical monitoring device and method for array light beam Download PDFInfo
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- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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Abstract
The invention discloses a self-adaptive optical monitoring device and a method for array beams, wherein the device comprises the following steps: the laser system comprises a plurality of laser beam output modules, a plurality of laser beam output modules and a plurality of laser beam control modules, wherein each laser beam output module is used for outputting a single laser beam; the beam combining module comprises a beam combining mechanism and electric adjusting mirrors which correspond to the laser single beams one by one; the beam splitting module is positioned on a path for transmitting the combined beam; the beam-shrinking module is positioned on a transmission path of the monitoring light beam and is used for shrinking and collimating each laser single light beam in the monitoring light beam; each micro lens in the micro lens array is used for transmitting one laser single beam in the collimated contracted beam; the photosensitive element is positioned on a focal plane on one side of the micro lens array, which is far away from the beam-shrinking module, and is used for imaging the laser single beam penetrating through each micro lens to form a monitoring image; and the processing module is connected with the photosensitive element and each electric adjusting mirror. To adaptively adjust the pointing direction of the laser beam.
Description
Technical Field
The invention relates to the technical field of laser, in particular to an adaptive optical monitoring device and method for array beams.
Background
The large-scale array light beams are applied to systems such as high-energy laser and composite parametric laser, however, the pointing of each light beam is difficult to stabilize for a long time due to the influence of factors such as thermal distortion, vibration and interference, and the pointing of each light beam even needs to be accurately adjusted in real time in certain application scenes, such as long-distance transmission in the atmosphere.
The prior art is generally well adjusted once before use, and the structural stability ensures that the direction of each light beam is unchanged, so that the prior art cannot be applied to large-array light beams working in complex environments. Even in the applicable scene, the process is complicated, the maintenance is not easy, and the error effect which is continuously increased along with the working time has to be solved by regularly detaching and recalibrating. And meanwhile, the cable is bulky, messy and difficult to integrate.
The other schemes can detect the pointing direction of each light beam through a discrete detector, can be only used in a small number of light beam synthesizing devices, can bear a small number of light beams, generally does not exceed 7 paths, and can hardly realize the accurate one-to-one correspondence of the deformable mirror of the actuating mechanism and the deformation unit with the light beam array, so that the problems of real-time performance and consistency can not be solved.
Disclosure of Invention
The invention provides an adaptive optical monitoring device and method of an array beam, which aim to solve the problem of adaptive adjustment of a large-scale array beam. The present invention may be equivalent to a simple anamorphic mirror system for array beams.
According to an aspect of the present invention, there is provided an adaptive optical monitoring apparatus for an array beam, comprising:
the laser system comprises a plurality of laser beam output modules, a plurality of laser beam output modules and a plurality of laser beam control modules, wherein each laser beam output module is used for outputting a single laser beam;
the beam combining module comprises a beam combining mechanism and electric adjusting mirrors which correspond to the laser single beams one by one, each electric adjusting mirror is used for reflecting the laser single beams which enter the electric adjusting mirrors to enter the beam combining mechanism, and the beam combining mechanism is used for combining a plurality of laser single beams to form combined beams with the same transmission direction;
the beam splitting module is positioned on a transmission path of the combined beam and used for splitting the combined beam into a use beam and a monitoring beam, and the power of the use beam is greater than that of the monitoring beam;
the beam-shrinking module is positioned on a transmission path of the monitoring light beam and is used for shrinking and collimating each laser single light beam in the monitoring light beam to form a shrunk collimated light beam;
the micro lens array is positioned on a transmission path of the collimated contracted beam, and each micro lens in the micro lens array is used for transmitting one laser single beam in the collimated contracted beam;
the photosensitive element is positioned on a focal plane on one side of the micro lens array, which is far away from the beam-shrinking module, and is used for imaging the laser single beam penetrating through each micro lens to form a monitoring image;
and the processing module is connected with the photosensitive element and each electric adjusting mirror and used for calculating the current position of the center of each laser single beam based on the monitoring image, calculating the difference between the current position of the center of each laser single beam and the standard position based on the center of the micro lens in the micro lens array or a standard image, and adjusting the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference.
Optionally, the combined light beams are arranged in an array or a honeycomb.
Optionally, the beam combining mechanism includes mirrors corresponding to the electric adjusting mirrors one to one, and a mirror surface of each mirror is arranged opposite to a mirror surface of the electric adjusting mirror, and is configured to reflect the laser single beam reflected by the electric adjusting mirror to form a combined beam;
the mirror surfaces of the plurality of reflectors form a frustum pyramid shape in a surrounding manner; the central axis of the frustum-shaped beam combining mechanism is the transmission direction of the combined beam;
or the mirror surfaces of the plurality of reflecting mirrors form an array arrangement shape, and the central axis of the beam combining mechanism in the array arrangement shape is the transmission direction of the combined beam.
Optionally, a reflection film layer with a reflectivity of more than 99% and less than 100% is disposed on the light splitting module.
Optionally, the beam reduction module includes a telephoto focusing lens group and a collimating lens group sequentially arranged along the transmission direction of the combined beam, and a ratio of a focal length of the telephoto focusing lens group to a focal length of the collimating lens group is a beam reduction ratio.
Optionally, the optical distances from the electric adjusting mirrors to the light splitting module are equal.
Optionally, the adaptive optics monitoring apparatus for the array beam further includes: the compensation plane reflecting mirrors are arranged corresponding to the electric adjusting mirrors one by one, are positioned on the transmission paths of the laser single beams and are used for compensating and adjusting the emergent coordinate parameters of the laser single beams and reflecting the laser single beams to the mirror surfaces of the electric adjusting mirrors.
According to another aspect of the present invention, there is provided an adaptive optical monitoring method for an array beam, which is implemented based on the adaptive optical monitoring apparatus for an array beam according to any one of the first aspect of the present invention, including:
acquiring a monitoring image of the monitoring light beam;
calculating the current position of the center of each laser single beam based on the monitoring image;
calculating the difference value between the current position of the center of each laser single beam and the standard position based on the center of the micro lens in the micro lens array or a standard image;
and adjusting the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference.
Optionally, the adjusting the reflection angle of the electric adjustment mirror corresponding to the laser single beam according to the difference includes:
adjusting the driving voltage corresponding to the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference and a calibration operator so as to adjust the reflection angle;
wherein the difference value is theThe driving voltage and the calibration operator satisfy the following formula:
wherein the driving voltage is
，
The difference is Deltax, deltay, and the calibration operator is
。
Optionally, the calibration operator is obtained by the following calibration method:
for each of the motorized adjustment mirrors:
applying a driving voltage to a first driving shaft for driving the electric adjustment mirror to deflect in a first direction
A second driving shaft deflected in a second direction applies no driving voltage, and the center of mass of the image of the single laser beam obtained from the adjustment of the motorized adjustment mirror is shifted
；
Applying a driving voltage to a second driving shaft for driving the electric adjustment mirror to deflect in a second direction
The first driving shaft deflected along the first direction does not apply driving voltage, and the center of mass of the image of the laser single light beam obtained from the adjustment of the electric adjusting mirror is shifted
The first direction is an x direction, and the second direction is a y direction;
establishing an equation:
，
solution according to the equation
。
The device comprises a plurality of laser beam output modules, a beam combining module, a beam splitting module, a beam shrinking module, a micro-lens array module, a photosensitive element and a processing module, wherein the processing module correspondingly adjusts an electric adjusting mirror according to position information of a monitored image, so that equivalent wavefront detection of a large array beam can be realized, output data can be used for real-time closed-loop global control of the pointing direction of each beam through independent adjusting mechanisms of each optical path, the device is equivalent to a set of adaptive optical system, the technical result of the system is seamlessly butted, meanwhile, the existing control mechanism of the beam combining laser system is fully utilized, and adaptive correction is realized without increasing extra cost.
It should be understood that the statements in this section do not necessarily identify key or critical features of the embodiments of the present invention, nor do they necessarily limit the scope of the invention. Other features of the present invention will become apparent from the following description.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic structural diagram of an adaptive optical monitoring apparatus for array beams according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a process of acquiring a monitoring image by a microlens array and a photosensitive element in an adaptive optical monitoring device for array beams according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an independent monitoring area of a microlens sub-aperture according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a microlens array arrangement according to an embodiment of the present invention;
FIG. 5 is an enlarged schematic view of portion A of FIG. 4;
FIG. 6 is a composite beam transmission cross-section according to one embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a plurality of mirrors of a beam combining mechanism according to an embodiment of the present invention;
fig. 8 is a schematic perspective view of a beam combining mechanism according to an embodiment of the present invention;
FIG. 9 is a top view of a beam combining mechanism provided in accordance with an embodiment of the present invention;
FIG. 10 is a schematic diagram of an adaptive optics monitoring apparatus for an array beam according to an embodiment of the present invention;
FIG. 11 is a schematic structural diagram of an adaptive optical monitoring apparatus for array beams according to an embodiment of the present invention;
fig. 12 is a flowchart of an adaptive optical monitoring method for an array beam according to a second embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in other sequences than those illustrated or described herein. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Example one
Fig. 1 is a schematic structural diagram of an adaptive optical monitoring apparatus for array beams according to an embodiment of the present invention, as shown in fig. 1, the apparatus includes:
a plurality of laser beam output modules 10, each laser beam output module 10 being configured to output a single laser beam; the beam combining module 20 comprises a beam combining mechanism 21 and electric adjusting mirrors 22 which are in one-to-one correspondence with the laser single beams, each electric adjusting mirror 22 is used for reflecting the laser single beams which are incident to the electric adjusting mirror 22 to enter the beam combining mechanism 21, and the beam combining mechanism 21 is used for combining the laser single beams to form combined beams with the same transmission direction; the beam splitting module 30 is positioned on a path for transmitting the combined beam and is used for splitting the combined beam to form a use beam S1 and a monitoring beam S2, and the power of the use beam S1 is greater than that of the monitoring beam S2; the beam-shrinking module 40 is positioned on a transmission path of the monitoring light beam S2 and is used for shrinking and collimating each laser single light beam in the monitoring light beam S2 to form a shrunk collimated light beam S3; the micro lens array 50 is positioned on a transmission path of the collimated light beam S3, and each micro lens in the micro lens array 50 is used for transmitting one laser single light beam in the collimated light beam S3; the arrangement mode of the micro lenses in the micro lens array 50 corresponds to the arrangement mode of each laser single beam in the combined beam; the photosensitive element 60 is positioned on the focal plane of one side of the micro-lens array 50, which is far away from the beam-shrinking module 40, and is used for imaging the laser single beam penetrating through each micro-lens to form a monitoring image; and the processing module 70 is connected with the photosensitive element 60 and each electric adjusting mirror 22 and is used for calculating the current position of the center of each laser single beam based on the monitoring image and calculating the difference value between the current position of the center of each laser single beam and the standard position based on the center of the micro lens in the micro lens array 50 or the standard image so as to adjust the reflection angle of the electric adjusting mirror 22 corresponding to the laser single beam according to the difference value.
The use of the beam S1 may be understood as a beam for carrying out machining or other work; the monitoring beam S2 can be understood as a beam that continues to propagate within the optical monitoring device for fine adjustment of the pointing direction of the respective beam. The monitor image can be understood as an image formed by the propagation of the monitor beam S2 for controlling the angle adjustment of the motorized adjustment mirror 22 in contrast to the microlens arrangement pattern. The standard image can be understood as an image formed by the laser single light beam propagating to the photosensitive element 60 without any interference, wherein the microlens arrangement image is an image formed by each microlens in the microlens array 50, and the standard image is an image of the monitoring light beam S2 obtained in advance under a standard environment.
Specifically, after the multiple laser single beams output by the multiple laser beam output modules 10 are transmitted to the beam combining module 20 located on the optical path thereof, the multiple laser single beams are reflected by the electric adjusting mirror 22, and are incident to the beam combining mechanism 21, and are combined to form a combined beam with the same transmission direction. The combined beam is emitted from the combined beam module 20 and then enters the light splitting module 30 located on a transmission path of the combined beam, the light splitting module 30 separates the combined beam to form a used beam S1 and a monitoring beam S2, and the power of the used beam S1 is greater than that of the monitoring beam S2, so that most of laser can be subjected to other processing operations, and the utilization rate of the laser is guaranteed. Meanwhile, the low-power monitoring light beam S2 has low energy, and the optical monitoring device can be prevented from being damaged.
After the monitoring beam S2 exits from the light splitting module 30, the monitoring beam S2 enters the beam shrinking module 40 on the transmission path, and since the monitoring beam S2 is a laser beam with a large diameter, in order to be detected by the photosensitive element 60, the beam shrinking module 40 shrinks and collimates each laser single beam in the monitoring beam S2 to form a collimated beam S3. The collimated beam S3 is incident on the microlens array 50 located on the propagation path, and each laser single beam is transmitted through the microlens located on the propagation path. The individual laser single beams of the collimated beam S3 penetrate through each microlens, and propagate to the photosensitive element 60 on the focal plane of the side of the microlens array 50 away from the beam-shrinking module 40, and the photosensitive element 60 acquires information of the individual laser beams and forms a monitoring image. The processing module 70 connected to the photosensitive element 60 acquires the monitoring image formed on the photosensitive element 60, calculates the current position of the center of each laser single beam based on the monitoring image, and calculates the difference between the current position of the center of each laser single beam and the standard position based on the center of the microlens in the microlens array 50 or the standard image, so as to apply a driving voltage to the electric adjustment mirror 22 according to the difference, and further adjust the reflection angle of the electric adjustment mirror 22 corresponding to the laser single beam, so that the current position information of the center of each laser single beam in the monitoring image formed by the laser single beam after being reflected by the electric adjustment mirror 22 after being adjusted corresponds to the position information of the center of the microlens in the microlens array or the position information of the center of each laser single beam in the standard image. Therefore, the pointing direction of each laser single beam can be adjusted in real time, and the direction of each laser single beam is always adjusted to be a straight direction. The beam-shrinking module 40 simultaneously performs imaging of the exit surface of the beam-combining module onto the front surface of the microlens array 50, so as to ensure that the dynamic range of the single light beam on the photosensitive element 60 does not exceed the sub-regions of the microlens array 50.
For example, fig. 2 is a schematic diagram of a process of acquiring a monitoring image by a microlens array and a photosensitive element in an adaptive optical monitoring device for an array beam provided by an embodiment of the present invention, fig. 3 is a schematic diagram of an independent monitoring area of a microlens sub-aperture provided by an embodiment of the present invention, referring to fig. 2 and fig. 3, f is a focal length of a microlens in a microlens array 50, a point is a current position of a center of each laser single beam and has coordinates of (X2, Y2), o point is a center of a microlens in the microlens array 50 or a center of each laser single beam in a standard image and has coordinates of (X1, Y1), and a coordinate difference is a coordinate difference of (X1, Y1)
Wherein the driving voltage applied across the electromotive adjustment mirror 22 is
，
Coordinate difference is Deltax, deltay, calibration operator is
The difference, the driving voltage and the calibration operator satisfy the following formula:
the processing module 70 calculates the driving voltages in the x direction and the y direction of the electric adjustment mirror 22 according to the formula and applies the driving voltages to correspondingly adjust the electric adjustment mirror 22, so that the coordinates of the point a of the subsequent laser single beam are the same as the point o, that is, the current position information of the center of each laser single beam in the monitored image formed by the laser single beam after being reflected by the adjusted electric adjustment mirror 22 and then transmitted corresponds to the position information of the center of the microlens in the microlens array or the position information of the center of each laser single beam in the standard image. Wherein the obtaining of the scaling operator is detailed below.
Therefore, the adaptive optics monitoring device for the array beams provided by the embodiment of the invention comprises a plurality of laser beam output modules, a beam combination module, a beam splitting module, a beam shrinking module, a micro-lens array module, a photosensitive element and a processing module, wherein the processing module correspondingly adjusts the electric adjusting mirror according to the position information of a monitored image, so that equivalent wavefront detection of large array beams can be realized, the output data can be used for real-time closed-loop global control of the pointing direction of each beam through the independent adjusting mechanism of each optical path, the device is equivalent to a set of adaptive optical system, the technical result is seamlessly butted, the existing control mechanism of the beam combination laser system is fully utilized, and adaptive correction is realized without increasing extra cost.
Alternatively, fig. 4 is a schematic diagram of a microlens array arrangement provided in an embodiment of the present invention, and fig. 5 is an enlarged schematic diagram of a portion a of fig. 4; FIG. 6 is a transmission cross-section of a composite beam of one embodiment of the present invention. Optionally, the combined light beams are arranged in an array or honeycomb.
Specifically, when the combined light beams are arranged in an array, the combined light beams propagate along the light path and are emitted to the microlens array 50, at this time, the arrangement manner of the microlenses in the microlens array 50 is shown in fig. 4, and the combined light beams are arranged in a honeycomb shape as shown in fig. 6, and the combined light beams propagate along the light path and are emitted to the microlens array 50. Therefore, the combined light beams can correspond to corresponding positions on the micro lens array through different arrangement modes, so that each laser single light beam can pass through the micro lens in the micro lens array.
The beam combination beams are array beams, the array beams can be arranged in a matrix or honeycomb mode on the cross section, the arrangement accuracy error is not more than 50%, the operation can be carried out, the integral distribution symmetry is not required, and the beam combination beams can be randomly deleted on grid points of the array. For example, a generally annular 90-way honeycomb beam array is shown. Remain substantially parallel in the exit direction. The parameters of each laser beam have great freedom, and the wavelength, the repetition frequency and the divergence angle can be different from each other except that the wavelength difference cannot exceed the response range of the detector. Wherein the camera as the photosensitive element 60 is located on the focal plane of the microlens array 50, and each discrete light beam corresponds to one microlens unit, and each discrete light beam occupies an independent imaging area on the target surface of the camera, so that the pointing direction change can be independently measured, and the consistency and uniformity of the measurement can be ensured.
Optionally, fig. 7 is a schematic structural diagram of a plurality of reflection mirrors of a beam combining mechanism according to an embodiment of the present invention, as shown in fig. 1 and 7, the beam combining mechanism 21 includes reflection mirrors 23 corresponding to the electric adjustment mirrors 22 one by one, and a mirror surface of each reflection mirror 23 is disposed opposite to a mirror surface of the electric adjustment mirror 22, and is configured to reflect the laser single beam reflected by the electric adjustment mirror 22 to form a combined beam.
Specifically, referring to fig. 1, after a plurality of laser single beams are emitted from the laser beam output module 10, the laser single beams are transmitted to the beam combining module 20 located on the transmission path thereof, reflected to the reflectors 23 in the beam combining mechanism 21 corresponding to the laser single beams one by one through the electric adjusting mirrors 22, and reflected by the reflectors 23 to form a combined beam. Referring to fig. 7, the mirror surfaces of the plurality of mirrors 23 form a frustum shape around; the central axis of the frustum-shaped beam combining mechanism 21 is the transmission direction of the combined light beam. Alternatively, the mirror surfaces of the plurality of reflecting mirrors 23 form an array arrangement shape, and the central axis of the beam combining mechanism 21 in the array arrangement shape is the transmission direction of the combined beam.
In fig. 7, the reflecting mirrors have 6 blocks, and the 6 blocks of reflecting mirrors surround a frustum with a hole in the middle at certain inclined angles, so that after each single laser beam is incident on the reflecting mirror 23, the single laser beam is reflected by the reflecting mirror 23 to form a reflected beam which propagates along the central axis of the frustum.
If the laser single beams are arranged in an array, the number of the reflectors 23 can be four, nine, etc., and the reflectors are arranged in a checkerboard manner, so that the laser single beams are finally reflected and spread in the direction of the central axis of the checkerboard.
In the above embodiment, the number of the reflecting mirrors 23 can be determined according to the number of the single laser beams. Fig. 8 is a schematic perspective structure diagram of a beam combining mechanism according to an embodiment of the present invention, and fig. 9 is a top view of the beam combining mechanism according to the embodiment of the present invention, and the honeycomb-shaped reflecting mirror 23 may be further arranged according to the manners of fig. 8 and fig. 9 if the honeycomb-shaped reflecting mirror 23 is a plurality of layers. In fig. 8, 23A, 23B, and 23C are different types of surface types of the reflecting mirrors.
Optionally, a reflection film layer with a reflectivity greater than 99% and less than 100% is disposed on the light splitting module 30.
Specifically, the combined beam is incident to the light splitting module 30, more than 99% and less than 100% of the laser power is reflected by the reflective film layer, and other processing operations are performed, and only less than 1% of the laser power is used for monitoring collimation, so that the utilization rate of the laser is ensured. The light splitting module 30 may be a beam splitter. Firstly, the system can be ensured to work normally without influencing the light path, and online monitoring is carried out; secondly, the functions of attenuation and filtering are realized.
Optionally, fig. 10 is a schematic structural view of an adaptive optical monitoring device for array beams according to an embodiment of the present invention, and as shown in fig. 10, the beam reduction module 40 includes a telephoto focusing lens group 41 and a collimating lens group 42 sequentially arranged along a transmission direction of a combined beam, and a ratio of a focal length of the telephoto focusing lens group 41 to a focal length of the collimating lens group 42 is a beam reduction ratio.
Specifically, referring to fig. 1 and 10, after exiting from the light splitting module 30, the monitoring light beam enters the beam shrinking module 40, which scales the arrangement pitch of the monitoring light beam array to be equal to the pitch of the microlens array. Wherein, the entrance pupil of the beam-shrinking module 40 is designed at the position of the electric adjusting mirror 22, and the exit pupil is designed at the front surface of the micro-lens array 50. The beam-reduction module 40 generally comprises two parts, a telephoto focusing lens group 41, which also serves as a large field-of-view far-field monitor, and a collimating lens group 42, which is used to match the zoom and exit pupil positions. Wherein, the beam reduction ratio can be calculated according to the size of the entrance pupil and the size of the exit pupil, and finally, the parameters of the telephoto focusing lens group 41 and the collimating lens group 42 are adjusted to adjust the focal lengths of the telephoto focusing lens group 41 and the collimating lens group 42, and finally adjusted to the appropriate beam reduction ratio. Exemplarily, if the entrance pupil distance is 20 and the exit pupil distance is 1, then the beam reduction ratio needs to be 20. That is to say, the pointing measurement precision of each light beam depends on the pixel size of the camera, the focal length of the micro lens and the zoom ratio of the matching optical system, and can be designed according to actual situations.
Fig. 11 is a schematic structural diagram of an adaptive optics monitoring apparatus for array beams according to an embodiment of the present invention, and as shown in fig. 11, the apparatus further includes: the compensation plane reflecting mirrors 24 are arranged corresponding to the electric adjusting mirrors 22 one by one, the single laser beams are transmitted to the compensation plane reflecting mirrors 24 positioned on the transmission paths after being emitted by the laser beam output module 10, the compensation plane reflecting mirrors 24 compensate and adjust the emission coordinate parameters of the single laser beams, and the single laser beams are reflected to the mirror surfaces of the electric adjusting mirrors 22. The compensating plane mirror 24 is used to counteract assembly errors.
Specifically, when the adaptive optical monitoring device for the array light beam is suitable for different large array light beams, the output laser coordinate parameters and divergence angles are different, only the compensating plane reflecting mirror 24 needs to be adjusted at the moment, correspondingly, the compensating plane reflecting mirror 24 compensates and adjusts the emergent coordinate parameters of the laser single light beam, other structures of the adaptive optical monitoring device for the array light beam do not need to be correspondingly adjusted, calibration is not needed again, and the universality of the device is improved.
Optionally, the optical distances from the electric adjusting mirrors 22 to the light splitting module 30 are equal.
Specifically, referring to fig. 1 and 11, the combined light beam is transmitted from the electric adjustment mirror 22 to the light splitting module 30, so that the optical paths from the electric adjustment mirrors 22 to the light splitting module 30 are equal, accordingly, in the subsequent transmission process, each light beam simultaneously reaches the photosensitive element 60, the condition of uneven brightness of the monitored image due to inconsistent arrival time is avoided, and the imaging quality is improved.
Therefore, the self-adaptive adjusting device solves the self-adaptive adjusting problem of the large-scale array light beams, and can be used for purifying the internal light beams and compensating the turbulence of external atmosphere transmission. The existing control mechanism of the beam combining laser system is fully utilized, and self-adaptive correction is realized under the condition of not increasing extra cost. The seamless butt joint of the adaptive optical technical result can expand more application modes. The input light beams have large degree of freedom, can have different wavelengths, different weight frequencies, different powers and different divergence angles, and can also have the same partial light beams for power superposition. The expansibility is good, the number of light beams can be conveniently increased to dozens of paths, and the requirement of symmetry is not met.
Example two
FIG. 12 is a flowchart of a method for adaptive optical monitoring of an array beam according to a second embodiment of the present invention. This embodiment is applicable to the case of large-scale array beam adaptive adjustment, and the method can be executed by an adaptive optical monitoring device for array beams, as shown in fig. 12, and includes:
and S210, acquiring a monitoring image of the monitoring light beam.
Specifically, referring to fig. 1 and 12, after a plurality of laser single beams output by a plurality of laser beam output modules 10 are transmitted to a beam combining module 20 located on an optical path thereof, the laser single beams are reflected by an electric adjusting mirror 22, and are incident to a beam combining mechanism 21, and are combined to form a combined beam with the same transmission direction; the combined beam is emitted from the beam combining module 20 and enters the beam splitting module 30 on the transmission path of the combined beam, and the beam splitting module 30 separates the combined beam to form a use beam S1 and a monitoring beam S2; the monitoring beam S2 is emitted from the light splitting module 30 and enters the beam shrinking module 40 on the transmission path, and since the monitoring beam S2 is a laser beam with a large diameter, in order to be detected by the photosensitive element 60, the beam shrinking module 40 shrinks and collimates each laser single beam in the monitoring beam S2 to form a collimated beam S3; the collimated beam S3 of the condensed beam is incident to the micro lens array 50 on the propagation path, each single laser beam is transmitted to the photosensitive element 60 on the focal plane on one side of the micro lens array 50 far away from the beam-condensing module 40 through the center of the micro lens on the propagation path, and the photosensitive element 60 acquires the information of the single laser beam and forms a monitoring image; the processing module 70 connected to the photosensitive element 60 acquires image information of the monitor image.
And S220, calculating the current position of the center of each laser single beam based on the monitoring image.
Specifically, after the photosensitive element 60 acquires the monitored image of the monitoring beam, the processing module 70 connected thereto correspondingly acquires the image information of the monitored image, and calculates the current position of the center of each laser single beam based on the monitored image.
And S230, calculating the difference value between the current position of the center of each laser single beam and the standard position based on the center of the micro lens in the micro lens array or the standard image.
Specifically, after acquiring the current position information of the center of each laser single beam, the processing module 70 compares the current position information with the position information of the center of the microlens or the standard image in the microlens array 50 prestored in the processor, and calculates the difference between the current position of the center of each laser single beam and the standard position.
And S240, adjusting the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference.
Specifically, after calculating the difference between the current position of the center of each laser single beam and the standard position, the processing module 70 adjusts the reflection angle of the electric adjustment mirror 22 corresponding to the laser single beam according to the difference, so that the laser single beam is reflected by the adjusted electric adjustment mirror 22 and then propagates, and the current position information of the center of each laser single beam in the formed monitored image corresponds to the position information of the center of the microlens in the microlens array 50 or the position information of the center of each laser single beam in the standard image.
According to the adaptive optical monitoring method for the array light beam, provided by the embodiment of the invention, the monitoring image of the monitoring light beam is obtained, the current position of the center of each laser single light beam is calculated based on the monitoring image, the difference value between the current position of the center of each laser single light beam and the standard position is calculated based on the center of a micro lens in a micro lens array or a standard image, and the reflection angle of an electric adjusting mirror corresponding to the laser single light beam is adjusted according to the difference value. The system can realize equivalent wavefront detection of large-array beams, the output data can be used for real-time closed-loop global control of the pointing direction of each beam through the independent adjusting mechanism of each light path, the system is equivalent to a set of adaptive optical system, the technical result is seamlessly butted, meanwhile, the existing control mechanism of the beam combination laser system is fully utilized, and adaptive correction is realized under the condition of not increasing extra cost.
Optionally, in the step S240, adjusting the reflection angle of the electric adjustment mirror corresponding to the laser single beam according to the difference includes: and adjusting the driving voltage corresponding to the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference and the calibration operator so as to adjust the reflection angle.
Wherein the difference, the driving voltage and the calibration operator satisfy the following formula:
wherein the driving voltage is
，
The difference is Deltax, deltay, and the calibration operator is
。
Optionally, the calibration operator is obtained by the following calibration method:
for each motorized adjustment mirror:
applying a driving voltage to a first driving shaft for driving the electric adjustment mirror to deflect in a first direction
The second driving shaft deflected in the second direction does not apply the driving voltage, and the centroid shift of the image of the laser single beam obtained from the adjustment of the electric adjustment mirror is obtained
；
Applying a driving voltage to a second driving shaft for driving the electrically-operated adjustment mirror to deflect in a second direction
A first drive shaft deflected in a first direction applies no drive voltage, and the centroid shift of the image acquired from the laser single beam adjusted by the electric adjustment mirror is obtained
The first direction is an x direction, and the second direction is a y direction;
establishing an equation:
，
solution according to the equation
The scaling operator is then determined.
For example, referring to fig. 2 and 3, point a is the current position of the center of each laser single beam and has coordinates (X2, Y2), point o is the center of the microlens in the microlens array 50 or the center of each laser single beam in the standard image and has coordinates (X1, Y1), and the coordinate difference is
Wherein the driving voltage is
，
The difference is Deltax, deltay, and the scaling operator is
The difference, the driving voltage and the calibration operator satisfy the following formula:
for each electric adjusting mirror, the processor calculates driving voltages in the first direction and the second direction of the electric adjusting mirror 22 according to the formula and applies the driving voltages to correspondingly adjust the electric adjusting mirror 22, so that the coordinates of the point a of the subsequent laser single beam are the same as the point o, that is, the current position information of the center of each laser single beam in the monitoring image formed by the transmission of the laser single beam after being reflected by the adjusted electric adjusting mirror 22 corresponds to the position information of the center of the micro lens in the micro lens array or the position information of the center of each laser single beam in the standard image. K in the calibration operator is a control coefficient, and the dimension is pixel/voltage (pix/V).
It should be understood that various forms of the flows shown above may be used, with steps reordered, added, or deleted. For example, the steps described in the present invention may be executed in parallel, sequentially, or in different orders, and are not limited herein as long as the desired result of the technical solution of the present invention can be achieved.
The above-described embodiments should not be construed as limiting the scope of the invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions may be made in accordance with design requirements and other factors. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An adaptive optical monitoring apparatus for an array beam, comprising:
the laser system comprises a plurality of laser beam output modules, a plurality of laser beam output modules and a plurality of laser beam control modules, wherein each laser beam output module is used for outputting a single laser beam;
the beam combining module comprises a beam combining mechanism and electric adjusting mirrors which correspond to the laser single beams one by one, each electric adjusting mirror is used for reflecting the laser single beams which enter the electric adjusting mirrors to enter the beam combining mechanism, and the beam combining mechanism is used for combining a plurality of laser single beams to form combined beams with the same transmission direction;
the beam splitting module is positioned on a transmission path of the combined beam and used for splitting the combined beam into a use beam and a monitoring beam, and the power of the use beam is greater than that of the monitoring beam;
the beam-shrinking module is positioned on the transmission path of the monitoring beam and is used for shrinking and collimating each laser single beam in the monitoring beam to form a shrunk collimated beam;
the micro lens array is positioned on a transmission path of the collimated contracted beam, and the micro lens in the micro lens array is used for transmitting one laser single beam in the collimated contracted beam;
the photosensitive element is positioned on a focal plane on one side of the micro lens array, which is far away from the beam-shrinking module, and is used for imaging the laser single beam penetrating through each micro lens to form a monitoring image;
and the processing module is connected with the photosensitive element and each electric adjusting mirror and is used for calculating the current position of the center of each laser single light beam based on the monitoring image, calculating the difference between the current position of the center of each laser single light beam and the standard position based on the center of a micro lens in the micro lens array or a standard image, and adjusting the reflection angle of the electric adjusting mirror corresponding to the laser single light beam according to the difference.
2. The apparatus for adaptive optical monitoring of arrayed beams of claim 1, wherein the combined beam is arranged in an array or honeycomb arrangement.
3. The adaptive optical monitoring device for arrayed beams according to claim 2, wherein the beam combining mechanism comprises mirrors corresponding to the motorized adjustment mirrors one to one, and a mirror surface of each of the mirrors is arranged opposite to a mirror surface of the motorized adjustment mirror, and is used for reflecting the laser single beam reflected by the motorized adjustment mirror to form a combined beam;
the mirror surfaces of the plurality of reflectors form a frustum pyramid shape in a surrounding manner; the central axis of the frustum-shaped beam combining mechanism is the transmission direction of the combined beam;
or the mirror surfaces of the plurality of reflecting mirrors form an array arrangement shape, and the central axis of the beam combining mechanism in the array arrangement shape is the transmission direction of the combined beam.
4. The device for adaptive optical monitoring of an array beam of claim 1, wherein the beam splitting module is provided with a reflective film layer having a reflectivity of more than 99% and less than 100%.
5. The adaptive optical monitoring device of claim 1, wherein the beam reduction module comprises a telephoto focusing lens group and a collimating lens group which are sequentially arranged along the transmission direction of the combined beam, and the ratio of the focal length of the telephoto focusing lens group to the focal length of the collimating lens group is a beam reduction ratio.
6. The apparatus of claim 1, wherein the optical path length from each of the motorized mirrors to the spectroscopy module is equal.
7. The apparatus for adaptive optical monitoring of an array beam of claim 1, further comprising: and the compensation plane reflecting mirrors are arranged corresponding to the electric adjusting mirrors one by one, are positioned on the transmission path of the laser single beam, are used for compensating and adjusting the emergent coordinate parameters of the laser single beam, and reflect the laser single beam to the mirror surface of the electric adjusting mirror.
8. An adaptive optical monitoring method for an array beam, which is implemented based on the adaptive optical monitoring apparatus for an array beam according to any one of claims 1 to 7, comprising:
acquiring a monitoring image of the monitoring light beam;
calculating the current position of the center of each laser single beam based on the monitoring image;
calculating the difference value between the current position of the center of each laser single beam and the standard position based on the center of the micro lens in the micro lens array or a standard image;
and adjusting the reflection angle of the electric adjusting mirror corresponding to the laser single light beam according to the difference value.
9. The method for adaptive optics monitoring of an array beam of claim 8, wherein said adjusting the reflection angle of the motorized adjustment mirror corresponding to the single laser beam based on the difference comprises:
adjusting the driving voltage corresponding to the reflection angle of the electric adjusting mirror corresponding to the laser single beam according to the difference and a calibration operator so as to adjust the reflection angle;
wherein the difference, the driving voltage and the calibration operator satisfy the following formula:
10. The method of adaptive optical monitoring of an array beam of claim 9, wherein the calibration operators are obtained by the following calibration method:
for each of the motorized adjustment mirrors:
applying a driving voltage to a first driving shaft that drives the motorized adjustment mirror to deflect in a first direction
A second driving shaft deflected in a second direction applies no driving voltage, and the center of mass of the image of the single laser beam obtained from the adjustment of the motorized adjustment mirror is shifted
；
Applying a driving voltage to a second driving shaft for driving the electric adjustment mirror to deflect in a second direction
The first driving shaft deflected along the first direction does not apply driving voltage, and the center of mass of the image of the laser single light beam obtained from the adjustment of the electric adjusting mirror is shifted
The first direction is an x direction, and the second direction is a y direction;
establishing an equation:
，
solution according to said equation
。
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Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2243133Y (en) * | 1996-01-23 | 1996-12-18 | 北京市梅曼电子有限公司 | Combined laser generator |
| CN101788714A (en) * | 2010-02-05 | 2010-07-28 | 周迅 | Laser power synthesizer and high-power laser adopting the same |
| CN102608764A (en) * | 2012-03-31 | 2012-07-25 | 中国科学院光电技术研究所 | Multi-beam-hole splicing and synthesizing system based on stable control of light beam directing |
| CN102830492A (en) * | 2012-09-13 | 2012-12-19 | 电子科技大学 | Conical device for increasing duty ratio of light beam |
| CN103293694A (en) * | 2013-04-22 | 2013-09-11 | 中国科学院半导体研究所 | Multiple semiconductor laser beam combining system |
| CN105652452A (en) * | 2016-01-26 | 2016-06-08 | 北京凯普林光电科技股份有限公司 | Space beam combination device and system |
| CN105977771A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Laser beam combining apparatus |
| CN106410608A (en) * | 2016-11-18 | 2017-02-15 | 上海高意激光技术有限公司 | Laser array and laser beam combining device |
| CN205982851U (en) * | 2016-08-26 | 2017-02-22 | 成都理想境界科技有限公司 | Multiple beam closes restraints structure |
| CN108429129A (en) * | 2018-05-08 | 2018-08-21 | 中国科学院半导体研究所 | The conjunction beam system and method for multi-thread array semiconductor laser grating external-cavity spectrum |
| CN114859566A (en) * | 2022-04-18 | 2022-08-05 | 中国科学院光电技术研究所 | Multi-path laser splicing and synthesizing system based on automatic light path alignment and pointing accurate control |
| CN115113411A (en) * | 2022-08-31 | 2022-09-27 | 长春理工大学 | Multi-beam combining device and method |
-
2022
- 2022-11-24 CN CN202211478724.8A patent/CN115509002A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2243133Y (en) * | 1996-01-23 | 1996-12-18 | 北京市梅曼电子有限公司 | Combined laser generator |
| CN101788714A (en) * | 2010-02-05 | 2010-07-28 | 周迅 | Laser power synthesizer and high-power laser adopting the same |
| CN102608764A (en) * | 2012-03-31 | 2012-07-25 | 中国科学院光电技术研究所 | Multi-beam-hole splicing and synthesizing system based on stable control of light beam directing |
| CN102830492A (en) * | 2012-09-13 | 2012-12-19 | 电子科技大学 | Conical device for increasing duty ratio of light beam |
| CN103293694A (en) * | 2013-04-22 | 2013-09-11 | 中国科学院半导体研究所 | Multiple semiconductor laser beam combining system |
| CN105652452A (en) * | 2016-01-26 | 2016-06-08 | 北京凯普林光电科技股份有限公司 | Space beam combination device and system |
| CN105977771A (en) * | 2016-07-14 | 2016-09-28 | 北京凯普林光电科技股份有限公司 | Laser beam combining apparatus |
| CN205982851U (en) * | 2016-08-26 | 2017-02-22 | 成都理想境界科技有限公司 | Multiple beam closes restraints structure |
| CN106410608A (en) * | 2016-11-18 | 2017-02-15 | 上海高意激光技术有限公司 | Laser array and laser beam combining device |
| CN108429129A (en) * | 2018-05-08 | 2018-08-21 | 中国科学院半导体研究所 | The conjunction beam system and method for multi-thread array semiconductor laser grating external-cavity spectrum |
| CN114859566A (en) * | 2022-04-18 | 2022-08-05 | 中国科学院光电技术研究所 | Multi-path laser splicing and synthesizing system based on automatic light path alignment and pointing accurate control |
| CN115113411A (en) * | 2022-08-31 | 2022-09-27 | 长春理工大学 | Multi-beam combining device and method |
Non-Patent Citations (1)
| Title |
|---|
| 宋俐等: "《工程应用数学》", 31 July 1988, 济南：山东科学技术出版社 * |
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