CN1247839A - 低辐射膜及其制造方法 - Google Patents

低辐射膜及其制造方法 Download PDF

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Publication number
CN1247839A
CN1247839A CN 98112627 CN98112627A CN1247839A CN 1247839 A CN1247839 A CN 1247839A CN 98112627 CN98112627 CN 98112627 CN 98112627 A CN98112627 A CN 98112627A CN 1247839 A CN1247839 A CN 1247839A
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layer
ito
low
radiation film
metal oxide
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彭传才
黄广连
胡云慧
魏敏
余圣发
曹志刚
李京增
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Bada Film Electronic Technology Inst Changsha National Defence Science & Techn
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Bada Film Electronic Technology Inst Changsha National Defence Science & Techn
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Priority to CN 98112627 priority Critical patent/CN1247839A/zh
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3613Coatings of type glass/inorganic compound/metal/inorganic compound/metal/other
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3642Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/366Low-emissivity or solar control coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948Layers comprising indium tin oxide [ITO]

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

本发明涉及低辐射膜及其镀膜方法。该低辐射膜是由三层组成,从靠基材的一层开始依次是金属氧化物层,金属反射层和ITO层。除第三层TTO镀膜时,以ITO为靶材,采用非反应溅射成膜外,各层的镀膜方法和设备与现有技术相同。本发明由于选用ITO为第三层,大大简化了镀膜工艺。所得到的低辐射膜具有优良的性能。

Description

低辐射膜及其制造方法
本发明涉及一种低辐射膜。同时本发明也涉及了低辐射膜的制造方法。
低辐射膜广泛应用于建筑门窗,汽车挡风玻璃等领域。对低辐射膜的要求主要有两方面:一是既要使可见光透过率高,同时又反射红外光,二是膜系具有较好的抗划痕和抗侵蚀性能。在膜系的各层中有一金属层作为红外光反射层,金属选自Ag,Cu,Au,Al。其中又以Ag最常用。在低辐射膜系的制造过程中,容易出现的一个问题是金属层的氧化。这是在金属层之上镀另一金属氧化物层时,由于该金属氧化物层是通过金属在氧气氛围中通过反应溅射形成的,其中的氧气可对金属层产生氧化。为解决这一问题,美国专利公告日1994年3月22日公告号US5,296,302提出了一个解决办法:即在金属层与金属氧化物层之间,增加一层。首先将Ti镀在金属层之上,该Ti层在镀金属氧化物层时,起到保护金属层的目的。此种方法的弊端是要增加工序,同时对可见光的透过产生不良影响。另一方面,传统的金属氧化物层是通过金属靶通过直流反应溅射形成的,这样的方法在形成第一层金属氧化物时,由于对该层厚度要求不严格,靶的毒化对膜的光学性能影响不大。但是,现有技术中,对金属反射层上面的金属氧化物层的厚度要求很严格,在完成该层的镀膜过程中,往往造成金属靶的毒化。从而使得金属氧化物的膜层厚度达不到光学性能要求。
本发明的目的是提供一种制造工艺较简单,性能良好的低辐射膜。
本发明的另一目的是提供制造上述低辐射膜的制造方法。
本发明提供的低辐射膜,从靠基材的一层开始,共有三层,依次是:金属氧化物层,金属反射层和ITO层,其中的金属氧化物层是选自Ti,Zn,Sn,Bi,In的金属氧化物中的一种或一种以上;金属反射层选自Ag,Au,Cu,Al中的一种;ITO是铟锡氧化物。
在本发明提供的低辐射膜的制造工艺中,其每一层的镀膜方法和设备与现有技术基本相同,只是第三层ITO层的镀膜方法与现有技术中采用反应溅射不同,它是以ITO为靶材,采用真空非反应溅射的方式形成的。用这种方法使得在镀ITO膜层时,避免了金属反射层的氧化,也就免除了现有技术中需要在金属反射层外镀金属型防护层的步骤。同时,由于采用了非反应溅射,避免了靶的毒化,确保了工艺和膜层光学性能的稳定。
关于膜层的厚度,本领域普通技术人员能够通过各层的材质推算出来,以达到良好的效果。
本发明实施例以Ag为金属反射层,提供的低辐射膜具有好的可见光透过率,在550nm下透过率为80--88%;红外光反射率(2.5μm--15μm)为80--96%;辐射率为0.1--0.12。实施例1
1.基材玻璃,厚度5mm,可见光透过率90%
2.各膜层及其厚度:
第1层TiO2 50--200A
第2层Ag   120--130A
第3层ITO  360--450A
3.性能
可见光透过率(550nm)84.9%
红外光反射率(2.5μm--15μm)88%--96%
辐射率0.1--0.12实施例2
1.基材PET膜,厚度50μm,可见光透过率(550nm)90%
2.各膜层及其厚度:
第1层TiO2 50--200A
第2层Ag   120--130A
第3层ITO  360--450A
3.性能
可见光透过率(550nm)84.9%
红外光反射率(2.5μm--15μm)88%--96%
辐射率0.1--0.12

Claims (2)

1.低辐射膜,从靠基材的一层开始,共有三层,依次是:金属氧化物层,金属反射层和ITO层,其中的金属氧化物层是选自Ti,Zn,Sn,Bi,In的金属氧化物中的一种或一种以上;金属反射层选自Ag,Au,Cu,Al中的一种;ITO是铟锡氧化物。
2.制造权利要求1所述的低辐射膜的镀膜方法,其特征在于第三层ITO层是以ITO为靶材,采用真空非反应溅射的方式形成的。
CN 98112627 1998-09-14 1998-09-14 低辐射膜及其制造方法 Pending CN1247839A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 98112627 CN1247839A (zh) 1998-09-14 1998-09-14 低辐射膜及其制造方法

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CN1247839A true CN1247839A (zh) 2000-03-22

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101415652B (zh) * 2006-03-29 2013-03-13 法国圣戈班玻璃厂 用于透明基材的高度耐热的具有低发射性多层体系
CN110183113A (zh) * 2019-05-22 2019-08-30 湖南天羿领航科技有限公司 防眩光玻璃的制备方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101415652B (zh) * 2006-03-29 2013-03-13 法国圣戈班玻璃厂 用于透明基材的高度耐热的具有低发射性多层体系
CN110183113A (zh) * 2019-05-22 2019-08-30 湖南天羿领航科技有限公司 防眩光玻璃的制备方法
CN110183113B (zh) * 2019-05-22 2022-03-22 湖南天羿领航科技有限公司 防眩光玻璃的制备方法

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