CN1227535C - Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure - Google Patents
Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure Download PDFInfo
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- CN1227535C CN1227535C CN 02137897 CN02137897A CN1227535C CN 1227535 C CN1227535 C CN 1227535C CN 02137897 CN02137897 CN 02137897 CN 02137897 A CN02137897 A CN 02137897A CN 1227535 C CN1227535 C CN 1227535C
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Abstract
The invention discloses a six-dimensional acceleration sensor for simultaneously acquiring full acceleration information, namely a six-axis acceleration sensor with a double E-shaped circular diaphragm cross beam structure, which can simultaneously realize the measurement of three-axial linear acceleration and angular acceleration in a three-dimensional space coordinate. The sensor utilizes a thick film technology, takes a circular diaphragm and a cross beam made of ceramic materials as sensitive elastic matrixes, adopts a structure consisting of double E-shaped circular diaphragms and the cross beam, sinters a thick film force sensitive resistor on the ceramic matrixes, realizes simultaneous measurement of three-dimensional linear acceleration and three-dimensional angular acceleration through a special bridge combination mode and decoupling, and is mainly applied to the dynamic compensation, the dynamic decoupling, the acceleration feedback control-based and other occasions of various robot dexterous hand multi-axis finger force and wrist force sensors.
Description
Technical field
The present invention relates to robot sensor fields such as anthropomorphic robot, multi-finger clever hand, the submissive control of robot and virtual reality technology, be particularly related to a kind of integrated transducer structure that can realize simultaneously, and realize six-axle acceleration sensor a kind of pair of E type circular iris rood beam structure of three axial line acceleration and three axial angle acceleration information independence acquisition methods to six axial acceleration information sensings.
Background technology
Along with the development of Robotics, begin robot is conducted a research with various sensors from the early eighties various countries, do not report for the product and the research of small-sized integrated six axial acceleration sensors.From a structural point, U.S. AD in recent years, JR3 company produces the miniaturization three dimension acceleration sensor, and generally these sensors adopt piezoelectricity, pressure drag or modes such as photoelectricity, optical fiber, the general parts that adopt gyroscope as Navigation Control in the aviation field.
Adopt at present extensively micro-electronic mechanical skill proposed and produced is that single shaft is to arriving three-axis acceleration sensor basically, and angular acceleration transducer be based on single shaft to, no matter be based on piezoelectricity, the isostructural acceleration transducer of pressure drag, it is that sensor internal all has inertial mass that a common characteristic is arranged;
It is that independently single shaft is integrated to the method for linear acceleration transducer employing quadrature in three of employings that a kind of three-axis acceleration sensor is arranged in addition, it is that the inertial mass barycenter is inconsistent that there is an important problem in this method, is not measured in same space coordinates reflection.In fact in robot research, the Be Controlled motion of objects is generally carried out in three dimensions, and measurand exists three-dimensional linear acceleration and three-dimensional angular acceleration in motion process.
Acceleration transducer is one of most important internal sensor of robot, because in robot motion's process, position/the attitude of load and the variation of motion, will bring additional dynamic loading, and the motion of intelligent robot mechanical arm is to carry out in the three dimensions, moving simultaneously in each joint of mechanical arm or mechanical arm, therefore in the course of the work, loads on and have three-dimensional line acceleration and three dimensional angular acceleration in the three dimensions.
For for the manipulation type intelligent robot of the submissive control of force feedback, be to realize the force measurement in the control procedure by the six-axis force sensor that is contained in mechanical wrist part, because the position/attitude of load and the influence of additional load that motion change produces can't obtain needed contact force information is controlled in force feedback from the output of force transducer.If carrying out to obtain mechanical arm each variation of joint position attitude and acceleration information when power is measured, then can directly utilize these information to carry out the compensation of position/attitude and inertial force, obtain the sextuple contact force and the load force information of real motive decoupling zero.
Summary of the invention
The objective of the invention is: the six-axle acceleration sensor of a kind of pair of E type circular iris rood beam structure that a kind of six-dimension acceleration information of can obtaining of new structure is provided, comprise the method for realization, to satisfy the application need of above-mentioned research field to three-dimensional line acceleration and the measurement of three dimensional angular acceleration information.
Technical scheme of the present invention is: the six-axle acceleration sensor of a kind of pair of E type circular iris rood beam structure, comprise ring flange firm banking (1), down E type circular iris (2), inertial mass (3), go up that E type circular iris (4), upper diaphragm connect disk (5), rood beam (6), shell (7), O-ring seal (8), bottom plate (9), diaphragm connects disk (10) down, their common six-axle acceleration sensors that constitutes two E type circular iris rood beam structures is characterized in that:
When adopting metal as elastic body, last E type circular iris (4), following E type circular iris (2) and middle rood beam (6) are integrated, be that rood beam (6) is docked at upper diaphragm and connects in disk (5) is connected disk (10) with following diaphragm the cross recess and be fixed in the middle of it, the upper surface that upper diaphragm connects disk (5) is connected with last E type circular iris (4), the periphery of last E type circular iris (4) is uniform inertial mass (3), mass (3) thus keep inertia to produce inertial force and act on elastic body at three dimensions;
The lower surface that following diaphragm connects disk (10) is connected with following E type circular iris (2), and following E type circular iris (2) is fixed together with sensor base (1).
Shell (7) and base (1) pass through spiral marking connection together, and the cavity between them has been full of oily medium, and O-ring seal (8) is installed in the coupling part between shell (7) and the base (1), are used to prevent that the medium in the cavity from overflowing.The oily medium of filling in the cavity is used to realize suitable damping control, to improve the sensor output signal characteristic.
The material of described following E type circular iris (2), rood beam (6), last E type circular iris (4) is 97% AL
2O
3The sintered body pottery.
This spatial structure can be with linear acceleration a
x, a
yMeasure and angular acceleration
x, α
yMeasure and place respectively on two E type circular irises, mechanical connection between the convenient and measurand of mounting seat (1), inertial mass (3) in the measurand motion process, move bring inertial force when changing and act on about on the elastic body of E type circular iris (4), (2) and rood beam (6).
It is thick film force sensitive resistance that following E type circular iris (2), rood beam (6), the last sintering of last E type circular iris (4) have ruthenium, and its position as shown in Figure 3, Figure 4.Resistance symmetric arrangement in the E type circular iris (4), (2) sensitive area up and down, each resistance from distance of center circle from equating, this thick film force sensitive resistance is realized obtaining six-dimension acceleration information by different responsive bridge circuit arrangements, and, realize that simultaneously the full acceleration information of three-dimensional line acceleration and three dimensional angular acceleration independently obtains by decoupling zero elimination coupling each other;
X, Y deflection acceleration information obtain responsive bridge circuit and adopt orthogonal layout in last E type circular iris (4) plane, and its thick film force sensitive resistance position direction is identical with following E type circular iris (2), wherein:
Resistance R1y, R2y, R3y, R4y are used for realizing angular acceleration α on last E type circular iris (4) sensitive area
xMeasurement;
Resistance R1x, R2x, R3x, R4x are used for realizing angular acceleration α on last E type circular iris (4) sensitive area
yMeasurement;
Four thick-film resistors on the rood beam (6) are arranged in the face of same Liangping, and adopt along about, the left-right symmetric rotational symmetry arranges, is used for obtaining moment α
zInformation;
Two sensitive directions of following E type circular iris (2) and last E type circular iris (4) require to be consistent, X, Y direction force information obtain responsive bridge resistance, R1x, R2x, R3x, R4x and R1y, R2y, R3y, R4y, adopt orthogonal layout in following E type circular iris (2) plane.Z directional ray acceleration information obtains sensitive resistance R1z, R2z, R3z, R4z are arranged in down E type circular iris (2) upper edge X, the crossing 45 degree directions of Y sensitive direction, wherein:
Resistance R1x, R2x, R3x, R4x are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
xMeasurement;
Resistance R1y, R2y, R3y, R4y are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
yMeasurement;
Resistance R1z, R2z, R3z, R4z are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
zMeasurement;
Resistance R 1z, R2z, R3z, R4z on last E type circular iris (4) sensitive area provide one the tunnel to linear acceleration a
zRedundant information;
Adopting rood beam of the present invention to connect two E type diaphragm structures realizes three-dimensional line acceleration in the same space coordinate system and three dimensional angular acceleration are measured simultaneously, and the present invention can realize sensor a by changing the physical dimension and the sensing unit position of two up and down E type films (4), (2)
x, a
y, a
z, α
x, α
yRange and sensitivity adjustment.
In the described in front structure, rood beam (6) is the connected body and the force transmitting member of two up and down E type diaphragms, is again to obtain Z deflection acceleration alpha
zThe responsive elastic body of information, and linear good between actual output signal and the load of input power, other force component is to its not influence in theory, and the coupled interference in the actual measurement is minimum.Variation by the rood beam size can be adjusted range and the sensitivity that Z deflection acceleration information obtains easily, and the rigidity and other direction stiffness differences that have overcome the Z direction cause the problem that differs greatly between the sensitivity of all directions component of acceleration greatly.
The six-dimension acceleration sensor of two E type diaphragm structures that above-described rood beam connects and the sensing unit described in the signal acquisition behavior thereof are to realize by thick-film technique, make mask plate according to the design attitude of sensing unit by the method for photoetching.The thick film ink that method by serigraphy will have the quick characteristic of power is printed on corresponding position on the sensor elastomer, again sintering at a certain temperature.Various parameter adjustments in the sensor production process, technology realize very convenient.
The structure of this sensor and responsive bridge circuit arrangement are applicable to the strain-type six-dimension acceleration sensor of metallic elastic body or obtain the device of six-dimension acceleration information, and the six-dimension acceleration sensor or the device that require applicable to different size and range.
The invention has the beneficial effects as follows: the present invention has crucial meaning to the six-dimension acceleration sensor that presses for small size and little range in little driving operative technique, multi-finger clever hand and the telepresenc technical research active day by day in the present robotics research.
By adopting thick-film technique with the pottery being sintering sensitive element realization obtaining on two E type circular irises of elastomeric material and the rood beam to six-dimension acceleration information, this structure, technology and signal acquiring method are realized the design from the microminaturization size to large-sized various different range six-dimension acceleration sensors easily, and structural parameters such as thickness that can be by changing diaphragm and beam, size realize the sensitivity adjustment to the sensor all directions, to satisfy the robot request for utilization of sensory perceptual system with all strength under the different occasions.
Two E type diaphragm structures that the rood beam that the present invention adopts connects, obtain when can realize three-dimensional line acceleration and three dimensional angular acceleration information, solved with the moment form and obtained linear acceleration information and obtain contradiction between the angular acceleration information, overcome the strong coupling problem of at present general multi-axis accelerometer;
The rood beam form structure that the present invention adopts, be the connection and the force transmitting member of of the present invention pair of E type diaphragm, be again the responsive elastic body that obtains Mz moment simultaneously, this independently rood beam structure has overcome the mutual interference problem between Z deflection acceleration and other directional ray acceleration and the angular acceleration, and realize the adjustment of sensitivity easily by the physical dimension that changes rood beam, overcome Z in more present patents to rigidity and the inconsistent problem of other direction rigidity, bigger adjustment space and dirigibility are arranged.
The present invention is described in further detail below in conjunction with drawings and Examples:
Description of drawings
Fig. 1 is a contour structures diagrammatic cross-section of the present invention.
Fig. 2 is a round metal diaphragm structure size sectional view.
Fig. 3 is a sensitive resistance position synoptic diagram on the E type circular iris up and down.
Fig. 4 is a sensitive resistance position synoptic diagram on the middle rood beam pottery.
Fig. 5 is subjected to power a for sensor
x, a
y, a
zEffect is E type circular iris strain figure down.
Fig. 6 is subjected to moment α for sensor
x, α
yE type circular iris strain figure under the effect.
Fig. 7 is subjected to moment α for sensor
zStrain schematic perspective view and sensitive plane strain figure under the effect.
Fig. 1 is a contour structures diagrammatic cross-section of the present invention.Two E type circular irises 2,4 are fixed together by the ceramic rood beam 6 in centre, are connected with cross recess on the disk 5,10 by the diaphragm that is fixed on two circular irises between rood beam 6 and the E type circular iris 2,4.
The coordinate of whole six-dimension force sensor is that the centre of surface O of above E type circular iris 4 is a benchmark, the fixing of metal disk is to be the center of circle with O equally, and the cross recessed width equals the thickness of rood beam 6, and direction is consistent with sensitive resistance direction on following E type circular iris 2 and the last E type circular iris 4.
Wherein go up E type circular iris 4 outsides and be connected with inertial mass 3, the external diameter of mounting base 1 is greater than the inertial mass external diameter, and for example inertial mass 3 external diameters can be chosen as φ 18mm, and mounting base 1 external diameter is chosen as φ 20mm.Inertial mass 3, mounting base 1 should be selected different materials, it is fixed that the material of inertial mass 3 and the selection of size require sensitivity and range according to designed sensor, mounting base 1 can be selected aluminum alloy materials or other metal materials, and the two also can select identical metal material according to inertial mass.
It is φ 5mm that the aluminium alloy diaphragm of E type circular iris 2,4 and rood beam 6 is connected disk 5,10 external diameters, working width is the cross groove of 0.2mm on the face of ceramic diaphragm stickup relatively, the width of groove equates with the thickness of rood beam 6, the width of groove is identical with ceramic rood beam 6 width, to guarantee that not having the gap each other cooperates, the width of pottery rood beam 6 is 5mm, and the external diameter that connects disk 5,10 with circular iris is identical, highly is chosen as 12mm.
Be fixed together by 703 glue between last E type circular iris 4 and the metal disk 6 among Fig. 1,2, up and down E type circular iris planform symmetry.For the six-dimension acceleration sensor of this form that adopts the metallic elastic body structure, upper and lower E type circular iris connects disk 5,10 and rood beam 6, and circular iris can be made overall structure form up and down.
The planform that upper and lower E type circular iris 4,2 connects upper and lower disks 5 and 10 as shown in Figure 3.Wherein with to be processed with width be that the cross recess of 0.2mm is with being connected between convenient and the rood beam 6 in the middle of the affixed one side of rood beam 6.
Fig. 3 and Fig. 4 are that upper and lower E type circular iris 4,2 and rood beam 6 potteries are gone up sintering resistance position view.Fig. 3 represents the resistance location drawing on upper and lower E type circular iris 4,2 sensitive areas, and wherein: resistance R1x, R2x, R3x, R4x are used for realizing linear acceleration a on following E type circular iris 2 sensitive areas
xMeasurement;
Resistance R1y, R2y, R3y, R4y are used for realizing linear acceleration a on following E type circular iris 2 sensitive areas
yMeasurement;
Resistance R1z, R2z, R3z, R4z are used for realizing linear acceleration a on following E type circular iris 2 sensitive areas
zMeasurement;
Resistance R1y, R2y, R3y, R4y are used for realizing angular acceleration α on last E type circular iris 4 sensitive areas
xMeasurement;
Resistance R1x, R2x, R3x, R4x are used for realizing angular acceleration α on last E type circular iris 4 sensitive areas
yMeasurement.
Resistance R 1z, R2z, R3z, R4z on last E type circular iris 2 sensitive areas can provide one the tunnel to linear acceleration a
zRedundant information.
24 resistance in E type circular iris 4,2 sensitive areas are according to position shown in Figure 5 symmetric arrangement up and down, and it is φ 6 that 6 resistance in the centre of each diaphragm are positioned at relative center of circle diameter, and each resistance from distance of center circle from equating.
Fig. 4 represents the interior thick-film resistor sintered location synoptic diagram of a sensitive area on the ceramic rood beam 6, and the resistance R 1 among the figure, R2, R3, R4 are used for realizing Z to angular acceleration
zMeasurement, four resistance are according to position symmetric arrangement among the figure, and as far as possible away from axis of symmetry, the direction of resistance and axis of symmetry intersect an angle, for example 30 among the figure spends direction.
Fig. 5 is the strained situation cut-open view of sensor diaphragm under three kinds of different inertial force effects.Wherein A represents that sensor is subjected to the effect of directions X inertial force Fx in plane as shown in the figure, because power effect plane is on last E type circular iris 4, resistance R 1x, R2x, R3x, R4x on the last E type circular iris 4 do not change, the distortion that following E type circular iris 2 produces as shown in the figure, the bridge circuit that resistance R 1x, R2x on the following E type circular iris 2, R3x, R4x form has output, output signal satisfies funtcional relationship with afterburning Fx, value by output obtains the afterburning size of institute, and other resistances on the circular iris do not change, and also just do not produce output.The inertial force size of directions X is proportional with its linear acceleration.
For the Y direction, input and output and sensor stress deformation are identical with directions X, and its measuring principle is also identical, and the inertial force size of Y direction is proportional with its linear acceleration.
Fig. 5 B represents the sensor circular iris distortion situation along Y direction inertial force Fy.
What represent among Fig. 5 C is that the inertial force F that sensor is subjected to as shown in the figure does the time spent distortion, and its direction is consistent with the Z direction.Because R1z, R2z, the R3z on the E type diaphragm 4,2 up and down,, R4z changes, the electric bridge output of its composition is satisfied certain funtcional relationship with afterburning size, can obtain the size of inertial force Fz by the value of output, realization is to the measurement of inertial force Fz, adopt sensitive area electric bridge output down in actual the use, the sensitive area electric bridge is exported as redundant information.
Fig. 6 has angular acceleration for measurand
x, α
yThe time, sensor is subjected to the E type circular iris strain figure under corresponding moment of inertia Mx, the My effect.
Fig. 6 A is the distortion cut-open view of sensor when being subjected to moment of inertia Mx, makes the distortion that E type circular iris 4,2 up and down produces as shown in the figure.
Resistance R 1y on the sensor on the sensitive area, R2y, R3y, R4y change, and two groups of bridge circuits all can produce output, and the angular acceleration change size changes the output that produces with sensor resistance and satisfies fixing funtcional relationship.
Fig. 6 B represents to make time spent distortion situation when sensor is subjected to moment of inertia My, and the effect that is produced is identical with Mx moment.Shown in Fig. 6 B.
Fig. 7 has acceleration alpha for the sensor measurand
zThe time strain schematic perspective view and sensitive plane strain figure under the moment of inertia Mz effect that produces.
Fig. 7 represents that sensor is subjected to the distortion situation of middle rood beam 6 under the moment of inertia effect, the sensitive area strained situation of 7 (A) expression rood beam among the figure, and Fig. 7 (B) expression is subjected to strain stereographic map under the same moment of inertia situation of figure (A).Under moment of inertia effect as shown in the figure, resistance R 1, R4 are subjected to tension, R2, R3 are subjected to compressive stress, by specific electric bridge promptly export one with add the output signal that moment of inertia Mz has functional relation, thereby can realize measurement to moment of inertia Mz, and in this case, other bridge circuit does not have signal output.The size of moment of inertia and tested angular acceleration are proportional.
Embodiment: the present invention adopts thick-film technique, with screen printing technique force sensing resistance slurry and electric conductor slurry are printed on the ceramic matrix ad-hoc location of E type circular iris and rood beam, form 24 thick-film strain resistors through sintering, constitute six groups of bridge circuits that obtain six-dimension acceleration information respectively.
In order to realize little range and highly sensitive measurement, E type circular iris thickness adopts 0.2～0.4mm, and the thickness of rood beam adopts 0.2～0.4mm.When adopting metal as elastic body, E type diaphragm and middle rood beam can be processed into integral structure up and down, realize obtaining according to foregoing sensing unit arrangement by the mode of pasting foil gauge resistance to three-dimensional line acceleration three dimensional angular acceleration information, the all directions range of this mode and sensitivity adjustment can realize that by the physical dimension of E type diaphragm about changing or middle rood beam part the present invention need can be applied to little range, highly sensitive six-dimension acceleration sensor and use six-dimension acceleration sensor device like this.
In order to realize above-mentioned structure, machining manufacture of the present invention comprises following several steps: process two round ceramic diaphragms 2,4 and ceramic rood beam 6 at first respectively, the precalculated position sinters thick film force sensitive resistance in the above;
Next processes two diameter phi 5mm, thickness is the E type circular iris connection disk 5,10 of 2mm, cross groove of processing in the middle of side of alloy disk, again E type circular iris is connected the center that disk 5,10 no grooved surfaces stick on non-sensitive of ceramic circular iris, guarantee that simultaneously the cross groove of metal disk is consistent with the sensitive direction of E type circular iris;
At last ceramic rood beam 6 is docked in the cross groove that two E type diaphragms connect disks 5,10 and fixing.
The input of electric bridge power supply for convenience is connected with the signal output lead, sintering silver wire solder joint on the edge of each E type circular iris, lead-in wire arranges according to predetermined responsive bridge circuit and signal acquisition behavior links together thick-film resistor, before each E type circular iris and rood beam are fixed together, at first respectively with the silver soldering point inward flange of the input and output wire bonds on each diaphragm at E type circular iris.Being welded on down after outer lead E type circular iris about sensor is fixing, the outward flange of E type circular iris offers external transmitter.
Claims (1)
1. the six-axle acceleration sensor of two E type circular iris rood beam structures, comprise ring flange firm banking (1), down E type circular iris (2), inertial mass (3), go up that E type circular iris (4), upper diaphragm connect disk (5), rood beam (6), shell (7), O-ring seal (8) bottom plate (9), diaphragm connects disk (10) down, it is characterized in that:
When adopting metal as elastic body, last E type circular iris (4), following E type circular iris (2) and middle rood beam (6) are integrated, be that rood beam (6) is docked at upper diaphragm and connects in disk (5) is connected disk (10) with following diaphragm the cross recess and be fixed in the middle of it, the upper surface that upper diaphragm connects disk (5) is connected with last E type circular iris (4), periphery at last E type circular iris (4) is uniform inertial mass (3), mass (3) thus keep inertia to produce inertial force and act on elastic body at three dimensions, the lower surface that following diaphragm connects disk (10) is connected with following E type circular iris (2), and following E type circular iris (2) is fixed together with sensor base (1);
Shell (7) and base (1) pass through spiral marking connection together, and the cavity between them has been full of oily medium, and O-ring seal (8) is installed in the coupling part between shell (7) and the base (1), are used to prevent that the medium in the cavity from overflowing;
The material of described following E type circular iris (2), rood beam (6), last E type circular iris (4) is 97% AL
2O
3The sintered body pottery, uniform inertial mass (3) is the metallic copper alloy material, upper diaphragm connection disk (5) is connected disk (10) with following diaphragm metal disk is an aluminum alloy materials; Following E type circular iris (2), rood beam (6), go up E type circular iris (4) and go up sintering ruthenium is arranged is thick film force sensitive resistance, the force sensing resistance position be two up and down E type circular irises (4), the interior thick film force sensitive of (2) sensitive area
Resistance realizes the obtaining of six axial acceleration information by different responsive bridge circuit arrangements, and obtains coupled relation between dimension by demarcation, six groups of bridge circuit output decouplings handled realized that three axial line acceleration and three axial angle acceleration informations independently obtain;
All three axial line acceleration and angular acceleration define above E type circular iris (4) sensitive area center definition, wherein the circular iris axis be Z to, corresponding X, Y direction meet Ka Disheng coordinate dextrorotation direction and define;
X, Y deflection acceleration information obtain responsive bridge circuit and adopt orthogonal layout in last E type circular iris (4) plane, and its thick film force sensitive resistance arranged direction is identical with following E type circular iris (2), wherein:
Resistance R1y, R2y, R3y, R4y are used for realizing angular acceleration α on last E type circular iris (4) sensitive area
xMeasurement;
Resistance R1x, R2x, R3x, R4x are used for realizing angular acceleration α on last E type circular iris (4) sensitive area
yMeasurement;
Four thick-film resistors on the rood beam (6) are arranged in the rood beam plane, and adopt along about, the left-right symmetric rotational symmetry arranges, is used for obtaining angular acceleration
zInformation;
Two sensitive directions of following E type circular iris (2) and last E type circular iris (4) require to be consistent, X, Y directional ray acceleration information obtain responsive bridge resistance, R1x, R2x, R3x, R4x and R1y, R2y, R3y, R4y, employing is orthogonal layout in following E type circular iris (2) plane, Z directional ray acceleration information obtains sensitive resistance R1z, R2z, R3z, R4z are arranged in down E type circular iris (2) upper edge X, the crossing 45 degree directions of Y sensitive direction, wherein:
Resistance R1x, R2x, R3x, R4x are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
xMeasurement;
Resistance R1y, R2y, R3y, R4y are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
yMeasurement;
Resistance R1z, R2z, R3z, R4z are used for realizing linear acceleration a on following E type circular iris (2) sensitive area
zMeasurement;
Resistance R 1z, the R2z, R3z, the R4z that wherein go up on E type circular iris (2) sensitive area provide one the tunnel to linear acceleration a
zRedundant information, be used for pick up calibration;
Structural four sensitive areas of middle rood beam (6) are all arranged resistance according to aforementioned manner, and redundant angular acceleration is provided
zInformation is used for angular acceleration α
zCalibration and compensation, rood beam (6) can provide 3 tunnel redundant informations at most simultaneously.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137897 CN1227535C (en) | 2002-07-02 | 2002-07-02 | Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137897 CN1227535C (en) | 2002-07-02 | 2002-07-02 | Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1396458A CN1396458A (en) | 2003-02-12 |
| CN1227535C true CN1227535C (en) | 2005-11-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 02137897 Expired - Fee Related CN1227535C (en) | 2002-07-02 | 2002-07-02 | Six-axis acceleration sensor with double E-shaped circular diaphragm cross beam structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100478662C (en) * | 2005-12-16 | 2009-04-15 | 中国科学院合肥物质科学研究院 | Three-dimensional finger force sensor and information acquisition method thereof |
| CN101501505B (en) * | 2006-08-21 | 2011-07-20 | 松下电器产业株式会社 | Combined sensor |
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| JP2005106679A (en) * | 2003-09-30 | 2005-04-21 | Nitta Ind Corp | Multiaxial sensor unit and multiaxial sensor using the same |
| NO20041830A (en) * | 2004-05-04 | 2005-10-17 | Fm Equipment As | Measuring instrument |
| JP4585900B2 (en) * | 2005-03-28 | 2010-11-24 | ファナック株式会社 | 6-axis force sensor |
| CN100449316C (en) * | 2006-08-13 | 2009-01-07 | 重庆大学 | Arrangement structure of sensing elements of six-axle acceleration transducer |
| CN101430237B (en) * | 2007-11-05 | 2010-08-18 | 中国科学院合肥物质科学研究院 | Multidimensional force test system in vibration experiment |
| CN102183676B (en) * | 2010-12-20 | 2013-03-06 | 昆明理工大学 | Low-frequency/ultralow-frequency acceleration transducer with polyvinylidene fluoride piezoelectric films |
| CN102175892B (en) * | 2011-01-26 | 2013-05-01 | 边义祥 | Multidimensional acceleration sensor with cored piezoelectric rods and acceleration measurement method |
| CN102680739B (en) * | 2012-05-08 | 2013-08-21 | 南京航空航天大学 | Calibration platform and calibration method for six-dimensional acceleration sensor |
| CN105115685B (en) * | 2015-08-28 | 2019-01-11 | 中车青岛四方机车车辆股份有限公司 | Car body mass center test macro and method based on vehicle vibration test platform |
| JP6342971B2 (en) * | 2016-11-14 | 2018-06-13 | ファナック株式会社 | Force detection device and robot |
| DE102018125078A1 (en) * | 2018-10-10 | 2020-04-16 | Schaeffler Technologies AG & Co. KG | Tension shaft gear and elastic transmission element therefor, as well as a robot arm and method for arranging a strain gauge |
| CN114624468B (en) * | 2022-05-17 | 2022-09-02 | 山东利恩斯智能科技有限公司 | Waterproof six-dimensional vibration sensor and measuring method thereof |
| CN116519977B (en) * | 2023-07-05 | 2023-10-17 | 河北科昕电子科技有限公司 | Inertial sensor of miniature six-axis integrated accelerometer gyroscope |
-
2002
- 2002-07-02 CN CN 02137897 patent/CN1227535C/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100478662C (en) * | 2005-12-16 | 2009-04-15 | 中国科学院合肥物质科学研究院 | Three-dimensional finger force sensor and information acquisition method thereof |
| CN101501505B (en) * | 2006-08-21 | 2011-07-20 | 松下电器产业株式会社 | Combined sensor |
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| Publication number | Publication date |
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| CN1396458A (en) | 2003-02-12 |
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