CN1119638C - 6D force sensor based on ceramic-thick film technique - Google Patents
6D force sensor based on ceramic-thick film technique Download PDFInfo
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- CN1119638C CN1119638C CN 00119096 CN00119096A CN1119638C CN 1119638 C CN1119638 C CN 1119638C CN 00119096 CN00119096 CN 00119096 CN 00119096 A CN00119096 A CN 00119096A CN 1119638 C CN1119638 C CN 1119638C
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Abstract
The present invention discloses a narrow-range small-scale six-dimensional force sensor used for simultaneously acquiring full strength information, which is mainly applied to robotics correlation studies and situations where full strength information acquisition is needed. The sensor uses thick film technology, makes a ceramic cross beam connected with double E-shaped membranes to form the elastomer structure of the sensor, sinters a thick film force sensitive resistor on a ceramic matrix, and simultaneously measures three-dimensional force and three-dimensional force moment by a special bridging mode and decoupling. The present invention can also be used for the design and the realization of the six-dimensional force sensor of other elastic materials or devices.
Description
Technical field: the present invention relates to the multi-finger clever hand in the robotics, little driving operating system Based Intelligent Control and technical fields such as virtual reality or telepresenc, be particularly related to a kind of sensor that sextuple force information is obtained can realized simultaneously, and realize technology that three-dimensional force and three-dimensional moment information are independently obtained by decoupling zero simultaneously.
Background technology: begin robot wrist power or title six-dimension force sensor are conducted a research from the early eighties various countries, in recent years, U.S. Assurance Tec. company produces miniaturization six-dimension force sensor: Nano and Mini type, the former external diameter 17mm, and the latter is 40mm.But its range is all bigger, and does not have report about little range to the product of counting newton's level and research.From a structural point, what extensively adopt at present is rood beam and floating beam synthesized form, forms complex mechanical construction and pastes the foil gauge mode, and processing realizes complicated, can't realize small scale structures, and have the situation of strong coupling between all directions.
The power sense sensor is one of most important sensor of robot, and six-dimension force sensor then is to obtain the most representative power sense sensor of information with all strength.And for the six-dimension force sensor that presses for small size and little range in the researchs such as little driving operative technique, multi-finger clever hand and telepresenc technology active day by day in the robotics.
Summary of the invention: the object of the present invention is to provide a kind of new structure, can effectively obtain the power sense sensor of information with all strength, satisfying the application need of above-mentioned research field.
Technical scheme of the present invention is: a kind of rood beam connects the six-dimension force sensor of two E type diaphragm structures, comprise base (1), down E type circular iris (2), rood beam (3), go up E type circular iris (4), load web (5), go up metal disk (6), metal disk (7) down, their common six-dimension force sensors that constitutes of the present invention pair of E type film rood beam structure is characterized in that:
Rood beam (3) is docked in the cross recess of metal disk (6) and following metal disk (7) and fixes in the middle of it, top and the last E type circular iris (4) of last metal disk (6) is connected, on last E type circular iris (4), be equipped with and load joint cover (5), link together with plus load by loading web (5);
Following and the following E type circular iris (2) of following metal disk (7) is connected, connection base (1) below following E type circular iris (2);
The material of described following E type circular iris (2), rood beam (3), last E type circular iris (4) is 97% Al
2O
3The sintered body pottery.
In up and down E type circular iris (4), (2) and the precalculated position above the rood beam (3), fixedly sinter force sensing resistance slurry and electrocondution slurry into 24 thick film force sensitive resistance with screen printing technique, constitute 6 groups of bridge circuits that obtain sextuple force information respectively, the position distribution that is thick film force sensitive resistance is 6 groups, every group of 4 resistance, E type circular iris (4), (2) and rood beam (3) is textural about being separately fixed at:
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to moment Mx on last E type circular iris (4) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to moment My on last E type circular iris (4) sensitive area;
Resistance R1, R2, R3, R4 are used for realizing the measurement to moment Mz on rood beam (3) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to power Fx on following E type circular iris (2) sensitive area;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to power Fy on following E type circular iris (2) sensitive area;
Resistance R1z, R2z, R3z, R4z are used for realizing the measurement to power Fz on following E type circular iris (2) sensitive area.
In order to realize little range and highly sensitive measurement, the thickness of E type circular iris and rood beam all adopts 0.2～0.4mm.
This spatial structure can be measured power Fx, Fy with moment Mx, My measurement and place respectively on two E type diaphragms, and base (1) and loading web joint (5) are convenient to the mechanical connection between pedestal and the load.
The present invention also provides a kind of sextuple power method that is used for obtaining simultaneously three-dimensional force and three-dimensional moment information, it is characterized in that: it is thick film force sensitive resistance that following E type circular iris (2), rood beam (3), the last sintering of last E type circular iris (4) have ruthenium.Thick film force sensitive resistance in the sensitive area of E type circular iris 2,4 and rood beam 3 is all with symmetrical arrangement up and down.Thick film force sensitive resistance in above-mentioned each unit realizes the obtaining of sextuple force information by different responsive bridge circuit arrangements, and eliminates each other coupling by decoupling zero, realizes that simultaneously all one's effort information of three-dimensional force and three-dimensional moment is obtained;
X, Y yawning moment information are obtained responsive bridge circuit and are adopted orthogonal layout in last E type circular iris (4) plane, and its thick film force sensitive resistance position direction is identical with following E type circular iris (2), wherein:
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to moment Mx on last E type circular iris (4) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to moment My on last E type circular iris (4) sensitive area;
Four thick-film resistors on the rood beam (3) are arranged in the face of same Liangping, and adopt along about, the left-right symmetric rotational symmetry arranges, is used for obtaining the information of moment Mz;
Two sensitive directions of following E type circular iris (2) and last E type circular iris (4) require to be consistent, X, Y direction force information obtain responsive bridge resistance, R1x, R2x, R3x, R4x and R1y, R2y, R3y, R4y orthogonal layout in following E type circular iris (2) plane, Z direction force information obtains sensitive resistance R1z, R2z, R3z, R4z are arranged in down E type circular iris (2) upper edge X, the crossing 45 degree directions of Y sensitive direction, wherein:
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to power Fx on following E type circular iris (2) sensitive area;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to power Fy on following E type circular iris (2) sensitive area;
Resistance R1z, R2z, R3z, R4z are used for realizing the measurement to power Fz on following E type circular iris (2) sensitive area;
Resistance R 1z, R2z, R3z, R4z on last E type circular iris (2) sensitive area can also provide one tunnel redundant information to power Fz;
Described six-dimension force sensor structure and responsive bridge circuit arrangement, by changing sensitive element position or elastomer structure size, adjustment of all directions output sensitivity and the range of realizing sensor change, and can satisfy the actual needs of the sextuple power apparatus of different ranges and different sensitivity requirement;
By two E type diaphragm structures of selecting the materials processing of metallic elastic body to become rood beam to connect, sensor or device that the strain-type 6 DOF force information that produces the present invention equally and explained obtains;
The integral structure of whole form processing is adopted in described rood beam (3) and two E type diaphragms (2), (4), by changing height, width and the thickness of rood beam (3), and E type diaphragm (2), (4) different physical dimension realize the sensitivity of six force components of sensor is independently regulated and control up and down, do not influencing under the accuracy of detection prerequisite, making sensor satisfy the range requirement of different application occasion.
The invention has the beneficial effects as follows:
By adopting thick-film technique is being that the sintering sensitive element is realized obtaining 6 DOF all one's effort information on two E type diaphragms of elastomeric material and the rood beam with the pottery.The method that this structure, technology and signal obtain, realize the design of six-dimension force sensor easily from the microminaturization size to large-sized various different ranges, and structural parameters such as the thickness by changing diaphragm and beam, size realize the sensitivity adjustment to the sensor all directions, to satisfy the robot requirement of sensory perceptual system with all strength under the different occasions.
Two E type membrane structures that the rood beam that the present invention adopts connects, obtain when can realize three-dimensional force and three-dimensional force information, solved with the moment form obtain force information and and moment information between contradiction, overcome the strong coupling problem of present six-dimension force sensor.
The present invention adopts the rood beam that connects two E type films, and the rigidity on its level and the vertical direction is much larger than its torsional rigidity around the Z axle.Therefore, be the connection and the force transmitting member of of the present invention pair of E type film, be again the responsive elastic body that obtains Mz information simultaneously.This independently rood beam structure has overcome the mutual interference problem between Mz moment and other direction power and the moment, and realize the adjustment of sensitivity easily by the physical dimension that changes rood beam, the unbalanced problem that has overcome the rigidity of Mz in more present patents and other direction rigidity mutual restriction and produced, therefore this has bigger design to adjust space and dirigibility clearly.
The present invention has crucial meaning to the six-dimension force sensor that presses for small size and little range in little driving operative technique, multi-finger clever hand and the telepresenc technical research active day by day in the present robot research especially.The change of the adjustment of its physical dimension and sensing unit position, and elastomeric change can realize the six-dimension force sensor of different sensitivity and different ranges or the needs of sextuple power apparatus.
Description of drawings: the present invention is described in further detail below in conjunction with drawings and Examples.
Fig. 1 is a contour structures diagrammatic cross-section of the present invention.
Fig. 2 is a perspective view of the present invention.
Fig. 3 is a metal disk physical dimension sectional view.
Fig. 4 is a sensitive resistance position synoptic diagram on the E type circular iris up and down.
Fig. 5 is a sensitive resistance position synoptic diagram on the middle rood beam pottery.
Fig. 6 is subjected to power Fx, Fy, Fz effect E type circular iris strain figure down for sensor.
Fig. 7 is subjected to E type circular iris strain figure under moment Mx, My, the effect for sensor.
Fig. 8 is subjected to strain schematic perspective view and sensitive plane strain figure under the moment Mz effect for sensor.
Fig. 1 is a contour structures diagrammatic cross-section of the present invention.Two E type circular irises 2,4 are fixed together by the ceramic rood beam 3 in centre, connect by the cross recess that is fixed on the metal disk 6,7 on two circular irises between rood beam and the E type circular iris.
The coordinate of whole six-dimension force sensor is that the centre of surface O of above E type circular iris 4 is a benchmark, the fixing of metal disk 6,7 is to be the center of circle with O equally, and the cross recessed width equals the thickness of rood beam 3, and direction is consistent with sensitive resistance direction on following E type circular iris 2 and the last E type circular iris 4.Wherein E type circular iris external diameter with load web 5, pedestal 1 external diameter is identical, for example external diameter can be selected φ 18mm, loads web 5 and pedestal 1 is selected aluminum alloy materials or other metal materials.
Fig. 2 is the profile schematic perspective view of sensor, and it represents this sensor volume coordinate and to three-dimensional force and three-dimensional moment definition, O is the volume coordinate center, and its position is at the center of last E type circular iris 4.
Going up between E type circular iris 4 and the metal disk 6 among Fig. 1,2 is to be fixed together by resene glue, up and down E type circular iris planform symmetry.For the relatively large journey six-dimension force sensor that adopts this form of metallic elastic body structure, upper and lower metal disk 6,7 and rood beam 3, circular iris can be processed into overall structure form up and down.
Fig. 4 and Fig. 5 are that upper and lower E type circular iris 2,4 and rood beam 3 potteries are gone up sintering resistance position view.Fig. 4 represents the resistance location drawing on the upper and lower E type diaphragm sensitive area, wherein:
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to power Fx on following E type circular iris 2 sensitive areas;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to power Fy on following E type circular iris 2 sensitive areas;
Resistance R1z, R2z, R3z, R4z are used for realizing the measurement to power Fz on following E type circular iris 2 sensitive areas;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to moment Mx on last E type circular iris 4 sensitive areas;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to moment My on last E type circular iris 4 sensitive areas.
Resistance R 1z, R2z, R3z, R4z on last E type circular iris 2 sensitive areas can provide one tunnel redundant information to power Fz.
24 resistance in E type circular iris 2,4 sensitive areas are according to position shown in Figure 5 symmetric arrangement up and down, and it is φ 6 that 6 resistance in the centre of each diaphragm are positioned at relative center of circle diameter, and each resistance from distance of center circle from equating.
Fig. 5 represents thick-film resistor sintered location synoptic diagram in the sensitive area on the ceramic rood beam 3, and the resistance R 1 among the figure, R2, R3, R4 are used for realizing the measurement to moment Mz, and four resistance are according to position symmetric arrangement among the figure.Feature is: force sensing resistance is as far as possible away from axis of symmetry, and the direction of resistance is consistent with the diagonal line of rood beam rectangle plane.
Fig. 6 is the strained situation cut-open view of sensor under three kinds of different stressing conditions.A represents that sensor is subjected to the effect of power Fx in plane as shown in the figure among Fig. 6, because power effect plane is on last E type circular iris 4, resistance R 1x, R2x, R3x, R4x on the last E type circular iris 4 do not change, the distortion that following E type circular iris 2 produces as shown in the figure, the bridge circuit that resistance R 1x, R2x on the following E type circular iris 2, R3x, R4x form has output, output signal satisfies funtcional relationship with afterburning Fx, value by output obtains the afterburning size of institute, and other resistances on the diaphragm do not change, and also just do not produce output.
For the Y direction, input and output and sensor stress deformation are identical with directions X.
Fig. 6 B represents the sensor diaphragm distortion situation along the afterburning Fy of Y direction.
What represent among Fig. 6 C is that the power F that sensor is subjected to as shown in the figure does the time spent distortion, and its direction is consistent with the Z direction.Because R1z, R2z, the R3z on the E type diaphragm 2,4 up and down,, R4z changes, the electric bridge output of its composition is satisfied certain funtcional relationship with afterburning size, can obtain the size of power Fz by the value of output, realization to Z to force measurement, adopt sensitive area electric bridge output down in actual the use, last sensitive area electric bridge output is as redundant information.
Fig. 7 is subjected to E type circular iris strain figure under moment Mx, the My effect for sensor.
Fig. 7 A is the distortion cut-open view of sensor when being subjected to Mx moment, and power Fy action plane departs from reference plane one segment distance, makes the distortion that E type diaphragm 4,2 up and down produces as shown in the figure.
Resistance R 1y on the sensor on the sensitive area, R2y, R3y, R4y change, two groups of bridge circuits all can produce output, wherein descend the size of the output reflection power Fy on E type circular iris Bridge 2 road, the moment Mx size that the output reflection of last E type circular iris 4 bridge circuits produces owing to Fy, the big or small actual value of moment Mx is power Fy and the product that departs from the reference plane distance.
Fig. 7 B represents distortion situation when sensor is subjected to the My moment loading, and the effect that is produced is identical with Mx moment situation.Shown in Fig. 7 B, power Fx acts on as shown in the figure in the plane, will produce a moment My and a Fx, and its size changes the output that produces with sensor resistance and satisfies fixing funtcional relationship.In both cases, other not variation of road and bridge road resistance in theory.
Fig. 8 is subjected to strain schematic perspective view and sensitive plane strain figure under the moment Mz effect for sensor.
Fig. 8 represents that sensor is subjected to the distortion situation of middle rood beam 3 under the moment loading, the sensitive area strained situation of 8 (A) expression rood beam among the figure, and Fig. 8 (B) expression is subjected to strain stereographic map under the same moment situation of figure (A).Under moment loading as shown in the figure, resistance R 1, R4 are subjected to tension, R2, R3 are subjected to compressive stress, by specific electric bridge promptly export one with add the output signal that moment Mz has functional relation, thereby can realize measurement to moment Mz, and in this case, other bridge circuit does not have signal output.
Embodiment:
Embodiment: the present invention adopts thick-film technique, with screen printing technique force sensing resistance slurry and electric conductor slurry are printed on the ceramic matrix ad-hoc location of E type circular iris and rood beam, form 24 thick-film strain resistors through sintering, constitute six groups of bridge circuits that obtain sextuple force information respectively.In order to realize little range and highly sensitive measurement, E type circular iris thickness adopts 0.2～0.4mm, and the thickness of rood beam adopts 0.2～0.4mm.When adopting metal as elastic body, E type and middle rood beam can be processed into integral structure up and down, realize obtaining according to foregoing sensing unit arrangement by the mode of pasting foil gauge resistance to the three-dimensional force three-dimensional moment information, the adjustment of this mode all directions range and sensitivity can realize by the physical dimension of E type film about changing or middle rood beam part, the present invention need not only can be applied to little range like this, in highly sensitive six-dimension force sensor or the sextuple power apparatus, also can be applied in the six-dimension force sensor or sextuple force test device of wide range.
In order to realize above-mentioned structure, machining manufacture of the present invention comprises following several steps: process two round ceramic diaphragms 2,4 and ceramic rood beam 3 at first respectively, the precalculated position sinters thick film force sensitive resistance in the above; Next processes two diameter phi 6mm, thickness is the metal disk 6,7 of 2mm, cross groove of processing in the middle of side of alloy disk, again metal disk 6,7 no grooved surfaces are sticked on the center of non-sensitive of ceramic circular iris, guarantee that simultaneously the cross groove of metal disk 6,7 is consistent with the sensitive direction of E type diaphragm; At last ceramic rood beam 3 is docked in the cross groove of two metal disks 6,7 and fixing.
The input of electric bridge power supply for convenience is connected with the signal output lead, sintering silver wire solder joint on the edge of each E type circular iris, lead-in wire arranges according to predetermined responsive bridge circuit and signal acquisition behavior links together thick-film resistor, before each E type circular iris and rood beam are fixed together, at first respectively with the silver soldering point inward flange of the input and output wire bonds on each diaphragm at E type circular iris.Being welded on down after outer lead E type circular iris about sensor is fixing, the outward flange of E type circular iris offers external transmitter.
By adopting thick-film technique is being that the sintering sensitive element is realized obtaining 6 DOF all one's effort information on two E type diaphragms of elastomeric material and the rood beam with the pottery.The method that adopts this structure of the present invention, technology and signal to obtain can realize the design and the realization of the six-dimension force sensor from the microminaturization size to large-sized various different ranges easily, to satisfy the robot requirement of sensory perceptual system with all strength under the different occasions.
After adopting rood beam of the present invention to connect two E type membrane structures, to not exist patent EP 0 381187 A2 (G01L 1/20) that power Fx, Fy and moment Mx, My are difficult to realize simultaneously-measured contradiction, and the present invention can realize range and sensitivity adjustment to sensor Fx, Fy, Fz, Mx, My easily by changing the physical dimension and the sensing unit position of two up and down E type films.
In the described in front structure, rigidity on its level of rood beam (3) and the vertical direction is much larger than its torsional rigidity around the Z axle, therefore, the connected body and the force transmitting member of two up and down E type films had both been can be used as, it is again the responsive elastic body that obtains Mz information, and linear good between actual output signal and the load of input power, other force component is to its not influence in theory, and the coupled interference in the actual measurement is minimum.Variation by the rood beam size also can be adjusted Fx easily, range and sensitivity that Fy and Mz force information obtain have overcome present other rigidity and other direction stiffness differences about Mz direction in the six-dimension force sensor patent (as EP 0 381 187A2) and have caused the problem that differs greatly between each force component sensitivity greatly.
The sextuple sensor with all strength of two E type membrane structures that above-described rood beam connects and the sensing unit described in the signal acquisition behavior thereof are to realize by thick-film technique, and various parameter adjustments and technology realize very convenient.
The structure of this sensor and responsive bridge circuit arrangement are applicable to the strain-type six-dimension force sensor of metallic elastic body or obtain the device of sextuple force information, and the six-dimension force sensor or the device that require applicable to different size and range.
Claims (3)
1. the six-dimension force sensor based on the ceramic thick film technology comprises E type circular iris (2) under the base (1), rood beam (3), last E type circular iris (4), loads web (5), goes up metal disk (6), descends metal disk (7), it is characterized in that:
Six-dimension force sensor is two E type diaphragm structures that rood beam connects, wherein rood beam (3) is docked in the cross recess of metal disk (6) and following metal disk (7) and is fixed in the middle of it, top and the last E type circular iris (4) of last metal disk (6) is connected, on last E type circular iris (4), be equipped with and load joint cover (5), link together with plus load by loading web (5);
Following and the following E type circular iris (2) of following metal disk (7) is connected, connection sensor base (1) below following E type circular iris (2);
The material of described following E type circular iris (2), rood beam (3), last E type circular iris (4) is 97% AL
2O
3The sintered body pottery;
In up and down E type circular iris (4), (2) and the precalculated position above the rood beam (3), fixedly sinter force sensing resistance slurry and electrocondution slurry into 24 thick film force sensitive resistance with screen printing technique, constitute 6 groups of bridge circuits that obtain sextuple force information respectively, the position distribution that is thick film force sensitive resistance is 6 groups, every group of 4 resistance, E type circular iris (4), (2) and rood beam (3) is textural about being separately fixed at:
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to moment Mx on last E type circular iris (4) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to moment My on last E type circular iris (4) sensitive area;
Resistance R1, R2, R3, R4 are used for realizing the measurement to moment Mz on rood beam (3) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to power Fx on following E type circular iris (2) sensitive area;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to power Fy on following E type circular iris (2) sensitive area;
Resistance R1z, R2z, R3z, R4z are used for realizing the measurement to power Fz on following E type circular iris (2) sensitive area;
In order to realize little range and highly sensitive measurement, the thickness of E type circular iris and rood beam all adopts 0.2～0.4mm.
2. one kind is used for the method that six-dimension force sensor is measured three-dimensional force and the sextuple force information of three-dimensional moment simultaneously, it is characterized in that:
It is thick film force sensitive resistance that following E type circular iris (2), rood beam (3), the last sintering of last E type circular iris (4) have ruthenium, thick film force sensitive resistance in two up and down E type circular irises (4), (2) sensitive area is realized obtaining sextuple force information by different responsive bridge circuit arrangements, and obtain coupled relation between dimension by demarcation, when being handled all one's effort information of same that realizes three-dimensional force and three-dimensional moment, obtain six groups of bridge circuit output decouplings;
The responsive bridge circuit that X, Y yawning moment information are obtained adopts orthogonal layout in last E type circular iris (4) plane, and its thick film force sensitive resistance arranged direction is identical with following E type circular iris (2), wherein:
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to moment Mx on last E type circular iris (4) sensitive area;
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to moment My on last E type circular iris (4) sensitive area;
Four thick-film resistors on the rood beam (3) are arranged in the face of same Liangping, and adopt along about, the left-right symmetric rotational symmetry arranges, is used for obtaining the information of moment Mz;
Two sensitive directions of following E type circular iris (2) and last E type circular iris (4) require to be consistent, X, Y direction force information obtain responsive bridge resistance, R1x, R2x, R3x, R4x and R1y, R2y, R3y, R4y adopt orthogonal layout in following E type circular iris (2) plane, Z direction force information obtains sensitive resistance R1z, R2z, R3z, R4z are arranged in down E type circular iris (2) upper edge X, the crossing 45 degree directions of Y sensitive direction, wherein:
Resistance R1x, R2x, R3x, R4x are used for realizing the measurement to power Fx on following E type circular iris (2) sensitive area;
Resistance R1y, R2y, R3y, R4y are used for realizing the measurement to power Fy on following E type circular iris (2) sensitive area;
Resistance R1z, R2z, R3z, R4z are used for realizing the measurement to power Fz on following E type circular iris (2) sensitive area;
Resistance R 1z, R2z, R3z, R4z on last E type circular iris (2) sensitive area also provide one tunnel redundant information to power Fz;
3. according to claims 1 described six-dimension force sensor, it is characterized in that:
A. described six-dimension force sensor structure and responsive bridge circuit arrangement, by changing sensitive element position or elastomer structure size, adjustment of all directions output sensitivity and the range of realizing sensor change, and can satisfy the six-dimension force sensor of different ranges and different sensitivity requirement and the actual needs of sextuple power apparatus;
By two E type diaphragm structures of selecting the materials processing of metallic elastic body to become rood beam to connect, sensor or device that the strain-type 6 DOF force information that produces the present invention equally and explained obtains;
B. the integral structure of whole form processing is adopted in described rood beam (3) and two E type diaphragms (2), (4), by changing height, width and the thickness of rood beam (3), and E type diaphragm (2), (4) different physical dimension realize the sensitivity of six force components of sensor is independently regulated and control up and down, do not influencing under the accuracy of detection prerequisite, making sensor satisfy the range requirement of different application occasion.
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| CN100549645C (en) * | 2008-05-21 | 2009-10-14 | 中国科学院合肥物质科学研究院 | Underwater robot four dimensional fingertip force sensor and information getting method thereof |
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| JP5676100B2 (en) * | 2006-04-25 | 2015-02-25 | ローズマウント インコーポレイテッド | Pressure sensor using near net shape sintered ceramic |
| CN107036754B (en) * | 2017-05-22 | 2022-12-02 | 华中科技大学 | Six-dimensional force sensor capable of sensing contact force and traction force |
| CN113092270A (en) * | 2021-04-02 | 2021-07-09 | 浙江辰鑫机械设备有限公司 | High-precision electro-hydraulic servo universal testing machine |
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| CN100549645C (en) * | 2008-05-21 | 2009-10-14 | 中国科学院合肥物质科学研究院 | Underwater robot four dimensional fingertip force sensor and information getting method thereof |
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