CN102175892B - Multidimensional acceleration sensor with cored piezoelectric rods and acceleration measurement method - Google Patents

Multidimensional acceleration sensor with cored piezoelectric rods and acceleration measurement method Download PDF

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CN102175892B
CN102175892B CN 201110027576 CN201110027576A CN102175892B CN 102175892 B CN102175892 B CN 102175892B CN 201110027576 CN201110027576 CN 201110027576 CN 201110027576 A CN201110027576 A CN 201110027576A CN 102175892 B CN102175892 B CN 102175892B
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piezoelectric
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rod
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acceleration
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CN102175892A (en
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边义祥
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边义祥
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Abstract

本发明公开一种含芯压电棒多维加速度传感器及加速度测量方法,涉及多维压电加速度传感器。 The present invention discloses a bar comprising a core piezoelectric acceleration sensor and a multidimensional acceleration measurement method involves multi-dimensional piezoelectric accelerometer. 将四根相同的含芯压电棒对称安装于基座四周并共处于同一平面,整体成十字形布局;含芯压电棒的一端固定于基座上,另一端自由;含芯压电棒由电材料环绕芯棒组成,或由压电元件粘贴在芯棒上组成。 The same core containing four piezoelectric rod mounted symmetrically around the base in the same plane and are co-located, the entire layout in a cross; the rod end of the piezoelectric containing core fixed to the base, the other end free; core containing piezoelectric rod a dielectric material surrounding the core rod composed of a piezoelectric element or paste composition on the mandrel. 当传感器受到直线加速度作用时,根据不同含芯压电棒的各个电极上的电荷数值,可以判断出加速度的方向和大小。 When the sensor is subjected to linear accelerations acting, according to the charge electrodes of different value in each piezoelectric rod including a core, we can determine the direction and magnitude of the acceleration.

Description

含芯压电棒多维加速度传感器及加速度测量方法 Piezoelectric rod core containing multidimensional acceleration sensor and acceleration measurements

技术领域 FIELD

[0001] 本发明涉及压电传感器,具体涉及到一种多维压电加速度传感器及其测量方法。 [0001] The present invention relates to a piezoelectric sensor, particularly relates to a piezoelectric acceleration sensor and a multi-dimensional measuring method. 背景技术 Background technique

[0002] 常用的压电加速度传感器的结构主要有压缩型、剪切型和弯曲型3种。 [0002] The conventional structure of the piezoelectric acceleration sensor main compression type, shear and bending type 3.. 其中弯曲型压电加速度传感器的敏感元件是压电材料制作的悬臂梁,或粘贴有压电材料的悬臂梁,其固有频率低、灵敏度高,适用于低频测量,缺点是体积大,机械强度较差。 Wherein the sensing element is bent piezoelectric accelerometer is a piezoelectric material of the cantilever beam, or a cantilever piezoelectric material is attached, its natural frequency is low, high sensitivity for measuring low frequency, the disadvantage is bulky, mechanical strength than difference.

[0003]目前市场上的压电加速度计多为单轴和二轴加速度计,三轴加速度计一般由一个双轴加速度计和一个单轴加速度计组合而成,体积大。 [0003] Currently on the market piezoelectric accelerometer counted mostly single and two-axis accelerometer, generally consists of a triaxial accelerometer dual axis accelerometer and a combination of single-axis accelerometers, bulky. 中国专利(申请号:200810222531.X)公开了一种正交环型压电加速度计,用于测量三轴加速度,但是结构复杂,体积较大。 Chinese Patent (application number: 200810222531.X) discloses a ring type piezoelectric orthogonal accelerometers for measuring three-axis acceleration, but the complex structure, larger.

[0004] 中国发明专利(申请号:200810124088.2)公开了一种表面部分涂布电极的含有金属芯的压电陶瓷纤维,在含金属芯压电陶瓷纤维表面,沿着长度延伸方向部分地覆盖电极,可以实现弯曲振动功能,也可以用于测量特定角度的加速度大小,无法测量2维和多维的加速度方向和大小。 [0004] Chinese Patent (application number: 200810124088.2) discloses a piezoelectric ceramic fiber comprising a metal core coated with a surface portion of the electrode, the surface of the metal-containing piezoelectric ceramic fiber core, along a longitudinal extending direction of the electrodes partly covering , bending vibration function can be realized, can be used to measure the magnitude of the acceleration a certain angle, the measurement can not be two-dimensional and multi-dimensional acceleration direction and magnitude.

发明内容 SUMMARY

[0005] 本发明的目的在于克服常规加速度计一般只能测量一维的直线加速度,且结构复杂的缺点,提供一种能测量三轴加速度,灵敏度高的压电加速度传感器及其测量方法。 [0005] The object of the present invention is to overcome the conventional accelerometers measure linear accelerations typically only one-dimensional, complex structure and disadvantages, to provide a three-axis acceleration measurement, high sensitivity of the piezoelectric acceleration sensor and its measurement.

[0006] 一种压电加速度传感器,其特征在于:包括底座、安装于底座上的基座、对称安装于基座四周并共处于同一平面整体成十字形布局的四根相同的含芯压电棒,分别为第一含芯压电棒、第二含芯压电棒、第三含芯压电棒、第四含芯压电棒;含芯压电棒一端固定于基座上,另一端自由;还包括安装于底座上的外壳;上述含芯压电棒由压电材料包裹芯棒组成,或由压电元件对称的粘贴在芯棒周围并且压电元件之间的空余部分用环氧树脂填满而组成,在压电材料或压电元件表面还沿轴向按上、下、左、右对称分布着四个表面电极。 [0006] A piezoelectric acceleration sensor comprising: a base mounted to the base on the base, mounted symmetrically around the base and are co-located in the same plane to the same overall core containing a cruciform arrangement of four piezoelectric rods, respectively comprising a first piezoelectric rod core, a second core containing piezoelectric rods, piezoelectric core rod containing a third, a fourth piezoelectric rod containing the core; core containing piezoelectric rod having one end fixed to the base, the other end freedom; further comprising a housing mounted on the base; and said core containing piezoelectric rod of a piezoelectric material wrapped rod composition, or a piezoelectric element attached symmetrically around the mandrel and the vacant portion between the piezoelectric element with an epoxy and a resin composition filled in the piezoelectric material or the surface of the piezoelectric element in the axial direction by the further, lower, left and right symmetrical distribution of four surface electrodes.

[0007] 利用上述压电加速度传感器的加速度测量方法,其特征在于包括以下过程:(I)、将整个加速度传感器置于笛卡尔坐标系中,含芯压电棒所处的平面作为XOY平面,四根芯压电棒与基座安装处的中心位置为O点,其中第一含芯压电棒与X轴正方向重合,第二含芯压电棒与Y轴正方向重合、第三含芯压电棒与X轴负方向重合、第四含芯压电棒与Y轴负方向重合,过O点垂直XOY平面且方向向上为Z轴正方向;(2)、将第一含芯压电棒的上表面电极、右表面电极、下表面电极、左表面电极所带电荷值分别依次计作:Qn、Q12、Qu、QM ;将第二含芯压电棒的上表面电极、右表面电极、下表面电极、左表面电极所带电荷值分别依次计作:Q21、Q22、Q23、Q24 ; (3)、加速度a作用于含芯压电棒多维加速度传感器时,设加速度a和坐标轴X、Y、Z的正方向的夹角分别为为α、β、Y ; (4)、根据 [0007] The acceleration measurement method using the above piezoelectric acceleration sensor, comprising the following procedures: (I), the whole acceleration sensor is placed in a Cartesian coordinate system, in which the plane containing the core rod as the piezoelectric XOY plane, four piezo center position of the core rod and the mounting base is at the point O, wherein a core containing a first piezoelectric rod coincides with the positive direction of the X-axis, a second piezoelectric rod containing the core coincides with the positive direction of the Y-axis, a third containing piezoelectric core rod coincides with the X-axis negative direction, the negative direction of the fourth superposed piezoelectric rod containing the core and the Y-axis, and the direction perpendicular to the XOY plane through the point O as the positive Z axis direction; (2), the first pressure-containing core flashlight upper surface of the electrode, the right surface of the electrode, lower surface electrode, the electric charge left surface electrode respectively successively counted as: Qn, Q12, Qu, QM; a second electrode on the surface of the piezoelectric rod having a core, a right surface electrode, lower surface electrode, the electric charge left surface electrode respectively successively counted as: Q21, Q22, Q23, Q24; (3), the acceleration acting on the core containing a piezoelectric rod multidimensional acceleration sensor, and setting a coordinate axis acceleration the positive angle direction X, Y, Z respectively as α, β, Y; (4), according to 下公式求解加速度a的大小和方向[0008] Solving the equation of the acceleration magnitude and direction of a [0008]

Figure CN102175892BD00041

其中K是传感器的灵敏度,大小为当加速度和含芯压电棒的轴线垂直,且位于表面电极的中心垂直平分平面时,表面电极产生的电荷值和加速度大小的比值; Wherein K is the sensitivity of the sensor, and the vertical axis when the acceleration of the piezoelectric rod having a core and at the surface of the electrode central vertical bisecting plane, the ratio of charge generated by the electrode surface and the magnitude of the acceleration value of the size;

Figure CN102175892BD00042

[0012] 在本发明中,当整个装置受到直线加速度或旋转加速度作用时,在单个由压电材料包裹芯棒组成的含芯压电棒上,由于电极位置的不同,电极上产生的电荷或电压是不同的,其具体数值(包括正负和大小)和加速度与压电棒轴向夹角有关。 [0012] In the present invention, when the entire device is subjected to linear acceleration or rotational acceleration acting on a single core containing a piezoelectric rod of a piezoelectric material wrapped rod composition, since different positions of the electrodes, the electrode or charge generated voltages are different, the specific value (including the sign and magnitude), and the angle between the axial bar and the piezoelectric acceleration related. 这样,用一根压电棒可以判断二维直线加速度的大小和方向,用二根呈一定角度分布的压电棒,可以判断三维直线加速度的方向和大小。 Thus, with a two-dimensional piezoelectric bar may Analyzing the acceleration magnitude and direction of a straight line, with two piezoelectric bars as a certain angular distribution, based on the three-dimensional direction and magnitude of linear accelerations.

[0013] 由求解过程可以看出,在第一含芯压电棒和第二含芯压电棒的8个电极电荷中,只用到3个电极电荷的数值,其它电极电荷作为参考电荷。 [0013] As can be seen from the solution process, the charges of the first electrode 8 containing the core and a second core containing a piezoelectric rod of piezoelectric rods, only use the value of the charge electrode 3, as the other electrode of the charge reference charge. 第三含芯压电棒和第四含芯压电棒起的作用有2个: The third and fourth core containing piezoelectric rod having a core role of the piezoelectric rods 2 has:

[0014] 一是结构平衡;二是把相应的电极串联后,电极上产生的电荷成倍增加,提高了传感器的灵敏度。 [0014] First, the structure of the balance; second after the respective electrodes connected in series, the charge-generating electrode doubled, increasing the sensitivity of the sensor.

[0015] 用由压电元件粘贴在芯棒上组成的含芯压电棒,可以收到同样的效果。 [0015] with a piezoelectric element attached on the mandrel core composition containing a piezoelectric rod, you can receive the same effect.

[0016] 本发明中的含芯压电棒由压电材料包裹芯棒组成时,可以将含芯压电棒做成纤维形状,整个加速度传感器可以做成MEMS,用于便携式终端设备。 [0016] When the present invention comprising a piezoelectric rod core wrapping mandrel composed of a piezoelectric material, the piezoelectric rods can be made of a fiber-containing core shape, it can be made throughout the MEMS acceleration sensor, a portable terminal device.

附图说明 BRIEF DESCRIPTION

[0017] 图1为本发明的系统结构示意图主视图剖面图。 FIG sectional front view diagram of a system configuration [0017] FIG. 1 of the present invention.

[0018] 图2为本发明的系统结构示意图俯视图剖面图。 [0018] FIG. 2 is a schematic system configuration of the present invention, a cross-sectional plan view of FIG.

[0019] 图3为本发明的由压电材料环绕芯棒组成的含芯压电棒结构示意图。 Mandrel surrounded schematic structural diagram of a piezoelectric material containing a piezoelectric rod core [0019] FIG. 3 of the present invention.

[0020] 图4为本发明的由压电元件粘贴在芯棒上组成的含芯压电棒结构示意图。 Schematic structural diagram of a piezoelectric element attached on the mandrel core composition containing a piezoelectric rod [0020] FIG. 4 of the present invention.

[0021] 图5为本发明的压电元件结构示意图截面图。 [0021] FIG. 5 schematic cross-sectional view showing the structure of the piezoelectric element of the present invention.

[0022] 图6为本发明的加速度测量方法原理图。 [0022] FIG. 6 is a schematic diagram of an acceleration measuring method of the invention.

[0023] 图7为本发明的含芯压电棒10的电极分布图。 The piezoelectric bar electrodes comprising a core profile 10 of the [0023] present invention. FIG. 7.

[0024] 图8为本发明的含芯压电棒20的电极分布图。 [0024] core electrode comprising a piezoelectric profile bar 20 of FIG. 8 of the present invention.

[0025] 图9为本发明的加速度测量方法原理图。 [0025] FIG. 9 acceleration measuring principle of the method of the present invention. FIG.

[0026] 图10为本发明的含芯压电棒50的压电兀件分布图。 Piezoelectric rod containing the core member profile piezoelectric Wu [0026] FIG. 10 of the present invention 50.

[0027] 图11为本发明的含芯压电棒60的压电元件分布图。 [0027] FIG. 11 of the piezoelectric element of the piezoelectric profile bar 60 having a core of the present invention.

[0028] 图12为本发明的传感器灵敏度K值计算图。 [0028] K value calculating sensitivity sensor 12 of the present invention FIG. [0029] 图中标号名称:1、含芯压电棒,101、芯棒,102、压电材料,103、表面电极,111、芯棒,112、压电元件,113、填充物,11201、第一电极,11202、压电材料,11203,第二电极,2、基座,3、外壳,4、底座,10、含芯压电棒,20、含芯压电棒,30、含芯压电棒,40、含芯压电棒,,50、含芯压电棒,60、含芯压电棒,70、含芯压电棒,80、含芯压电棒,11、含芯压电棒10的上表面电极,12、含芯压电棒10的右表面电极,13、含芯压电棒10的下表面电极,14、含芯压电棒10的左表面电极,21、含芯压电棒20的上表面电极,22、含芯压电棒20的右表面电极,23、含芯压电棒20的下表面电极,24、含芯压电棒20的左表面电极,51、含芯压电棒50的上表面电极,52、含芯压电棒50的右表面电极,53、含芯压电棒50的下表面电极,54、含芯压电棒50的左表面电极,61、含芯压电棒60的上表面电极,62、 [0029] FIG label name: 1, the piezoelectric rod having a core, 101, mandrel 102, a piezoelectric material 103, the surface electrode 111, the mandrel 112, the piezoelectric element 113, a filler, 11201, a first electrode 11202, a piezoelectric material, 11203, the second electrode, 2, a base 3, a housing 4, the base 10, the piezoelectric rod having a core, 20, the piezoelectric rod having a core, 30, comprising a core pressure flashlight, 40, 50 ,, core containing piezoelectric rods, piezoelectric rod having a core, 60, the piezoelectric rod having a core, 70, comprising a core piezoelectric rod, 80, the piezoelectric rod having a core, 11, comprising a piezoelectric core the upper surface of the electrode rod 10, 12, the right surface of the core containing the electrodes of the piezoelectric rod 10, 13, the lower surface electrode of the piezoelectric rod having a core 10, 14, the left surface of the core containing the piezoelectric rod electrode 10, 21, the core containing an upper surface electrode of the piezoelectric rod 20, 22, the right surface of the core containing the electrodes of the piezoelectric rod 20, 23, the lower surface electrode of the piezoelectric rod having a core 20, 24, the left surface of the core containing the piezoelectric rod electrode 20, 51, a core containing surface electrode 50 of the piezoelectric rod, 52, the right surface of the electrode bar 50 of the core containing piezoelectric, 53, the lower surface electrode of the piezoelectric rod having a core 50, 54, the left surface of the core containing the piezoelectric rod electrode 50, 61, the upper surface electrode of the piezoelectric rod having a core 60, 62, 芯压电棒60的右表面电极,63、含芯压电棒60的下表面电极,64、含芯压电棒60的左表面电极。 A right surface of the piezoelectric electrode core bar 60, 63, the lower surface electrode of the piezoelectric rod having a core 60, 64, the left surface of the core containing the electrode of a piezoelectric rod 60.

具体实施方式 Detailed ways

[0030] 下面结合实例例及附图对本发明作进一步详细的描述,但本发明的实施方式不限于此。 [0030] The following examples in conjunction with the accompanying drawings and the embodiments of the present invention will be described in further detail, but the embodiment of the present invention is not limited thereto.

[0031] 实施例1 [0031] Example 1

[0032] 图1〜2不出了本实施例的系统结构,本含芯压电棒加速度传感,包括若干个含芯压电棒1、基座2、底座4和外壳3 ;含芯压电棒I对称地分布在基座2四周,并处于同一平面上;含芯压电棒I的一端固定于基座2上,另一端自由;基座2安装于底座4上;整个装置包含在外壳3中;外壳3也安装在底座4上。 [0032] FIG 1~2 not the system configuration of the present embodiment, the rod core containing piezoelectric acceleration sensor, comprising a core comprising a plurality of piezoelectric rods 1, base 2, base housing 3, and 4; containing cores of I flashlight symmetrically distributed in the base 2 four weeks, and in the same plane; end of the piezoelectric rod containing the core I is fixed to the base 2, the other end free; base 2 is mounted on the base 4; the entire apparatus comprising 3 in the housing; the housing 3 is also mounted on the base 4.

[0033] 图3描述了由压电材料环绕芯棒组成的含芯压电棒结构,含芯压电棒和芯棒的横截面为圆形,压电材料102环绕在芯棒101四周,为压电陶瓷;压电材料102的表面对称地覆盖着金属电极103 ;芯棒101由金属材料制成,一方面起支撑压电材料的作用,另一方面,也用作一个电极。 [0033] Figure 3 depicts a core containing a piezoelectric structure surrounding mandrel rod of a piezoelectric material, having a core cross section of the piezoelectric rod and the mandrel is circular, surround the piezoelectric material 102 around the mandrel 101, as piezoelectric ceramics; surface of the piezoelectric material 102 is covered with a metal electrode 103 are symmetrically; rod 101 is made of a metallic material, on the one hand serves to support the piezoelectric material, on the other hand, it is also used as one electrode.

[0034] 图6描述了3维直线加速度的测量方法,把整个加速度传感器置于笛卡尔坐标系中,含芯压电棒所处的平面作为XOY平面,沿着坐标原点对称布置10、20、30、40四根含芯压电棒,含芯压电棒的轴心线和坐标轴X、Y重合,传感器所受的加速度为a,与坐标轴X、Y、Z的正方向的夹角为α、β、γ。 [0034] Figure 6 depicts a three-dimensional measurement of linear accelerations, the whole acceleration sensor is placed in a Cartesian coordinate system, in which the plane containing the core rod as the piezoelectric XOY plane, 10 and 20 are arranged symmetrically along a coordinate origin, 30 and 40 are four core containing piezoelectric rods, piezoelectric rod containing the core axis of the coordinate axes X, Y coincide acceleration sensor suffered a, and the coordinate axes X, Y, Z positive direction of angle as α, β, γ.

[0035] 图7描述了含芯压电棒10的电极分布,表面电极11、12、13、14沿轴心对称地分布,电极11和13的中心线位于XOZ平面上,电极12和14的中心线位于XOY平面上。 [0035] Figure 7 depicts a distribution of the electrode of the piezoelectric containing core rod 10, the surface electrodes 11, 12 are symmetrically distributed along the axis, the electrodes 11 and 13 located on the centerline plane XOZ, the electrodes 12 and 14 located on the center line XOY plane.

[0036] 图8描述了含芯压电棒20的电极分布,表面电极21、22、23、24沿轴心对称地分布,电极21和23的中心线位于YOZ平面上,电极22和24的中心线位于XOY平面上。 [0036] Figure 8 depicts a distribution of the core containing the piezoelectric electrode rod 20, the surface electrodes 21, 22 symmetrically distributed along the axis, the electrodes 21 and 23 located on the centerline plane YOZ, the electrodes 22 and 24 located on the center line XOY plane.

[0037] 图12描述了传感器灵敏度K值的确定方法,含芯压电棒表面电极103对称地分布在平面B的两边,平面B通过含芯压电棒的轴线0-0,加速度a位于平面B上,且和轴线垂直。 [0037] FIG. 12 depicts a method for determining the sensitivity of a sensor value K, 103 symmetrically distributed on both sides of the axis 0-0, by the plane B B plane containing the core rod containing the core of the piezoelectric rod surface electrode of the piezoelectric acceleration a in a plane the B, and is perpendicular to the axis. 当传感器受到加速度a作用时,电极103上产生的电荷值Qltl3,加速度的大小为%,则K值为:K = Q1(l3/a。。 When the sensor is subjected to acceleration a role Qltl3 charge value generated at electrodes 103, the magnitude of the acceleration is%, the value of K: K = Q1 (l3 / a ..

[0038] 具体测量方法为:设装置所受到的加速度为a,则含芯压电棒上所产生的电荷Q总的公式为: [0038] A specific measurement method is as follows: acceleration provided by means of a, containing the total charge Q on the piezoelectric core rod is produced by the formula:

[0039] Q = Ka [0039] Q = Ka

[0040] 其中K为传感器的灵敏度,与含芯压电棒的材料、结构和尺寸有关。 [0040] wherein K is the sensitivity of the sensor, and the material, structure and size of the piezoelectric rod containing the core concerned. 设加速度a与X、Y、Z轴正方向的夹角分别为α、β、Y。 A setting acceleration and the angle X, Y, Z-axis positive direction are respectively α, β, Y. 则在含芯压电棒10上,电极11、12、13、14上产生的电荷分别为: The core containing the piezoelectric rod 10, an electric charge generated on the electrodes 11, 12 respectively:

[0041] Q11 = Kacos Y (I) [0041] Q11 = Kacos Y (I)

[0042] Q13 = -Kacos Y (2) [0042] Q13 = -Kacos Y (2)

[0043] Q12 = Ka cos β (3) [0043] Q12 = Ka cos β (3)

[0044] Q14 = -Ka cos β (4) [0044] Q14 = -Ka cos β (4)

[0045] 则在含芯压电棒20上,电极21、22、23、24上产生的电荷分别为: [0045] The charge generated in the upper 20, the electrode bars 21, 22 are piezoelectric core containing:

[0046] Q21 = Kacos Y (5) [0046] Q21 = Kacos Y (5)

[0047] Q22 = -Kacos α (6) [0047] Q22 = -Kacos α (6)

[0048] Q23 = -Kacos Y (7) [0048] Q23 = -Kacos Y (7)

[0049] Q24 = Kacos α (8) [0049] Q24 = Kacos α (8)

[0050] cos2 a +cos2 β +cos2 Y = 1 (9) [0050] cos2 a + cos2 β + cos2 Y = 1 (9)

[0051] 把公式(1)、(3)、⑶代入公式(9)中,得到 [0051] The formula (1), (3), ⑶ into the formula (9), to give

[0052] [0052]

Figure CN102175892BD00061

[0053] 再把a代入到公式(I)、(3)、⑶中,得到a和X、Y、Z坐标轴正向之间的夹角α、β > Y , [0053] then substituted into a formula (I), (3), ⑶ give a and X, Y, Z axis between the forward angle α, β> Y,

Figure CN102175892BD00062

[0057] 由求解过程可以看出,在含芯压电棒10和20的8个电极电荷中,只用到3个电极电荷的数值,其它电极电荷作为参考电荷。 [0057] As can be seen from the solution process, the charge in the electrodes 8 of the piezoelectric rod having a core 10 and 20, three electrodes only use the value of the charge, the other electrode of the charge as a reference charge. 含芯压电棒30和40起的作用有2个: The piezoelectric bar 30 containing a core 40 and play the role are two:

[0058] 一是结构平衡;二是把相应的电极串联后,电极上产生的电荷成倍增加,提高了传感器的灵敏度。 [0058] First, the structure of the balance; second after the respective electrodes connected in series, the charge-generating electrode doubled, increasing the sensitivity of the sensor.

[0059] 实施例2 [0059] Example 2

[0060] 实施例2中含芯压电棒由压电元件粘贴在芯棒上组成,其他部分结构和实施例1相同。 [0060] Example 2 containing the core rod of the piezoelectric element of a piezoelectric paste composition on the mandrel, the other part of the same structure as in Example 1.

[0061] 图4描述了由压电元件粘贴在芯棒上组成的含芯压电棒结构,若干个压电元件112对称地粘贴在芯棒111四周;压电元件112之间用环氧树脂113填满,使整个含芯压电棒的表面完整;芯棒的材料为金属或复合材料制成。 [0061] Figure 4 depicts the core-containing structure for attaching the piezoelectric rods on the mandrel by a piezoelectric element composed of a plurality of piezoelectric elements 112 attached symmetrically around the mandrel 111; epoxy resin between the piezoelectric element 112 113 to fill the entire surface of the core containing the complete piezoelectric rod; rod material is a metal or composite material.

[0062] 图5描述了压电兀件的结构,压电兀件包括压电材料11202、第一电极11201和第二电极11203。 [0062] Figure 5 depicts the structure of the piezoelectric member Wu, Wu piezoelectric member comprises a piezoelectric material 11202, a first electrode 11201 and the second electrode 11203. 其中的第一电极11201和第二电极11203涂覆在压电材料11202的两面,压电材料11202位于2个电极的中间,类似三明治结构;压电元件的横截面呈现圆弧形状;压电材料的极化方向平行于圆弧直径方向。 Wherein the first electrode 11201 and the second electrode is coated on both surfaces of the piezoelectric material 11203 11202, 11202 piezoelectric material in the middle of two electrodes, a sandwich-like structure; cross section of the piezoelectric element exhibits a circular arc shape; piezoelectric material polarization direction parallel to the diameter direction of the arc. 由于正压电效应,当压电元件受到应力应变时,将在电极上产生电荷和电压。 Since the piezoelectric effect when subjected to stress and strain of the piezoelectric element, the generated charge and voltage on the electrodes.

[0063] 图9描述了3维直线加速度的测量方法,把整个加速度传感器置于笛卡尔坐标系中,含芯压电棒所处的平面作为XOY平面,沿着坐标原点对称布置50、60、70、80四根含芯压电棒,含芯压电棒的轴心线和坐标轴X、Y重合,传感器所受的加速度为a,与坐标轴X、Y、Z的正方向的夹角为α、β、γ。 [0063] Figure 9 depicts a three-dimensional measurement of linear accelerations, the whole acceleration sensor is placed in a Cartesian coordinate system, in which the plane containing the core rod as the piezoelectric XOY plane, 50 and 60 are arranged symmetrically along a coordinate origin, 70, 80, four piezo-containing core rod containing the core axis of the piezoelectric rod and the coordinate axes X, Y coincide acceleration sensor suffered a, and the coordinate axes X, Y, Z positive direction of angle as α, β, γ.

[0064] 图10描述了含芯压电棒50的压电兀件分布,压电兀件51、52、53、54沿轴心对称地分布,压电元件51和53的中心线位于XOZ平面上,压电元件52和54的中心线位于XOY [0064] Figure 10 depicts the piezoelectric rod having a core member 50 of the piezoelectric distribution Wu, Wu piezoelectric element symmetrically distributed along the axis 51, 52, the piezoelectric element 51 and the center plane 53 is located XOZ on the center line 52 and the piezoelectric element 54 is positioned XOY

平面上。 on flat surface.

[0065] 图11描述了含芯压电棒60的压电兀件分布,压电兀件61、62、63、64沿轴心对称地分布,压电元件61和63的中心线位于YOZ平面上,压电元件62和64的中心线位于XOY [0065] Figure 11 depicts a core bar 60 of the piezoelectric element distribution Piezoelectric Wu, Wu piezoelectric element symmetrically distributed along the axis 61, 62, the piezoelectric element 61 and the center plane 63 located YOZ on the center line 62 and the piezoelectric element 64 is located XOY

平面上。 on flat surface.

[0066] 具体测量方法为:设装置所受到的加速度为a,与X、Y、Z轴正方向的夹角分别为α、β、γ。 [0066] A specific measurement method: acceleration provided by the apparatus is a, the angle between Y and X,, Z-axis positive direction are α, β, γ. 则在含芯压电棒50上,压电元件51、52、53、54上产生的电荷分别为Q51、Q52、Q53、Q54,在含芯压电棒60上,压电元件61、62、63、64上产生的电荷分别为Q61、Q62、Q63、Q64,则加速度的大小为 The core containing the piezoelectric rods 50, charges generated on the piezoelectric element 51, 52 respectively, Q51, Q52, Q53, Q54, the core containing the piezoelectric rods 60, piezoelectric elements 61, 62, 63 and 64 are generated in the charge of Q61, Q62, Q63, Q64, the magnitude of the acceleration is

Figure CN102175892BD00071

[0068] a和X、Y、Z坐标轴正向之间的夹角α、β、γ, [0068] a and X, Y, Z axes angle α, β, γ between the forward,

Figure CN102175892BD00072

[0072] 本发明中的含芯压电棒由压电材料包裹芯棒组成时,可以将含芯压电棒做成纤维形状,整个加速度传感器可以做成MEMS,用于便携式终端设备。 [0072] When the present invention comprising a piezoelectric rod core wrapping mandrel composed of a piezoelectric material, the piezoelectric rods can be made of a fiber-containing core shape, it can be made throughout the MEMS acceleration sensor, a portable terminal device.

[0073] 虽然以上文字已参照特定的实施例和本发明的例子描述了本发明,但本发明不限于以上描述的实施例。 [0073] While the above text and examples of specific embodiments of the present invention has been described with reference to the embodiment of the present invention, but the present invention is not limited to the above described embodiments. 按照本发明的技术原理,本领域普通技术人员参照上述技术原理实施例进行修改和变形均属于本发明的保护范围。 According to the technical principles of the present invention, those of ordinary skill in the art that modifications and variations belong to the protection scope of the present invention with reference to the above-described embodiment of the technical principles.

Claims (3)

1.一种压电加速度传感器,其特征在于:包括底座(4)、安装于底座(4)上的基座(2)、对称安装于基座(2)四周并共处于同一平面整体成十字形布局的四根相同的含芯压电棒,分别为第一含芯压电棒(10)、第二含芯压电棒(20)、第三含芯压电棒(30)、第四含芯压电棒(40);含芯压电棒一端固定于基座上,另一端自由;还包括安装于底座(4)上的外壳(3); 上述含芯压电棒由压电材料包裹芯棒组成,在压电材料表面还沿轴向按上、下、左、右对称分布着四个表面电极。 A piezoelectric acceleration sensor comprising: a base (4), attached to the chassis base (2) on (4), symmetrically mounted on the base (2) and a total of four weeks in the same plane as a whole into ten four identical rod-shaped core containing a piezoelectric layout, respectively, a first piezo-containing core bar (10), a second core containing a piezoelectric rod (20), a third core having a piezoelectric rod (30), a fourth piezoelectric rod containing the core (40); piezo-containing core rod having one end fixed to the base, the other end free; further comprising a base attached to the housing (3) (4); and the piezoelectric rod having a core made of a piezoelectric material, wrapping mandrel composition, the surface of the piezoelectric material in the axial direction by the further, lower, left and right symmetrical distribution of four surface electrodes.
2.根据权利要求1所述的压电加速度传感器,其特征在于:上述含芯压电棒中压电材料或压电元件中压电材料为压电单晶、压电陶瓷、聚偏氟乙烯之一或其种几种组合制成。 The piezoelectric acceleration sensor according to claim 1, wherein: the piezoelectric material above the bar or a piezoelectric element containing a core of piezoelectric material is a piezoelectric single crystal piezoelectric, piezoceramic, polyvinylidene fluoride made of one or a combination of several kinds.
3.利用权利要求1所述压电加速度传感器的加速度测量方法,其特征在于包括以下过程: (1)、将整个加速度传感器置于笛卡尔坐标系中,含芯压电棒所处的平面作为XOY平面,四根芯压电棒与基座安装处的中心位置为O点,其中第一含芯压电棒(10)与X轴正方向重合,第二含芯压电棒(20)与Y轴正方向重合、第三含芯压电棒(30)与X轴负方向重合、第四含芯压电棒(40)与Y轴负方向重合,过O点垂直XOY平面且方向向上为Z轴正方向; (2)、将第一含芯压电棒(10)的上表面电极、右表面电极、下表面电极、左表面电极所带电荷值分别依次计作:Qn、Q12、Q13、Q14 ;将第二含芯压电棒(20)的上表面电极、右表面电极、下表面电极、左表面电极所带电荷值分别依次计作:Q21、Qm知、; (3)、加速度a作用于含芯压电棒多维加速度传感器时,设加速度a和坐标轴X、Y、Z的正方向的夹角分别为为α 3. The method of measuring the acceleration of the right to use piezoelectric acceleration sensor in claim 1, characterized by comprising the following procedures: (1) the whole acceleration sensor is placed in a Cartesian coordinate system, in which a plane containing the core rod as a piezoelectric XOY plane, the center position of the four core piezoelectric rod mounted at the base of the point O, wherein the first piezo-containing core bar (10) coincides with the positive direction of the X-axis, a second piezoelectric having a core rod (20) and Y-axis positive direction coincides third core containing a piezoelectric rod (30) coincides with the negative direction of the X-axis, a fourth piezoelectric containing core bar (40) coincides with the negative direction of the Y-axis, a direction perpendicular to the XOY plane through the point O and up to Z-axis positive direction; (2), the first upper surface electrode of the piezoelectric rod having a core (10), the right surface of the electrode, lower surface electrode, the electric charge left surface electrode respectively successively counted as: Qn, Q12, Q13 , Q14; the second upper surface electrode of the piezoelectric rod having a core (20), the right surface of the electrode, lower surface electrode, the electric charge left surface electrode respectively successively counted as: Q21, Qm known,; (3), the acceleration acting on the angle of a rod containing the core piezoelectric multidimensional acceleration sensor, an acceleration rate axis X, Y, and a positive direction Z coordinates respectively for the α β、Y ; (4)、根据以下公式求解加速度a的大小和方向 β, Y; (4), to solve a magnitude and direction of acceleration according to the following formula
Figure CN102175892BC00021
其中K是传感器的灵敏度,大小为当加速度和含芯压电棒的轴线垂直,且位于表面电极的中心垂直平分平面时,表面电极产生的电荷值和加速度大小的比值; Wherein K is the sensitivity of the sensor, and the vertical axis when the acceleration of the piezoelectric rod having a core and at the surface of the electrode central vertical bisecting plane, the ratio of charge generated by the electrode surface and the magnitude of the acceleration value of the size;
Figure CN102175892BC00022
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