CN1225660C - Method for producing miniature solid immersion lens - Google Patents
Method for producing miniature solid immersion lens Download PDFInfo
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- CN1225660C CN1225660C CNB031145590A CN03114559A CN1225660C CN 1225660 C CN1225660 C CN 1225660C CN B031145590 A CNB031145590 A CN B031145590A CN 03114559 A CN03114559 A CN 03114559A CN 1225660 C CN1225660 C CN 1225660C
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- solid immersion
- immersion lens
- suspender
- softening point
- temperature
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Abstract
The present invention relates to a method for producing a miniature solid immersion lens, which comprises the following procedures: 1) an adhesion suspension device is prepared, the adhesion suspension device is provided with a protruding end part, and the end part can form a rod shape or a taper; the device selects a material, wherein the temperature of a softening point of the material is higher than the temperature of the softening point of a raw material to be processed, and the material and the raw material to be processed are not intermiscible; 2) a raw material thread is prepared, the raw material is drawn into a thin thread with uniform diameter, and the thin thread is cut into small sections; 3) a ball lens is melted, the temperature of a heating furnace is adjusted near to the temperature of the softening point of the material, and the small section thin thread which is prepared in the procedure 2) is clamped into a furnace mouth to be baked; the small section thin thread is stuck to the end part of the suspension device after initially softened, and is conveyed into the heating furnace to be uniformly heated by the suspension device; the small section thin thread is taken out after adequately softened and converted into a spherical shape, and the spherical material is taken off from the end part of the suspension device after cooled; 4) the spherical material is measured and polished, the melted ball lens is removed by less half or semi-sphere face by an optical cold-working method to produce the qualified hemisphere or super hemisphere solid immersion lens. The present invention has the advantages of simple technology, high production speed, simple equipment, low cost and high production rate of finished products.
Description
One, technical field
The present invention relates to a kind of method of making the miniature solid immersion lens, especially a kind of method of utilizing hot fusion method to make the miniature solid immersion lens.
Two, background technology
Solid immersion lens (Solid Immersion Lens) is that hemisphere or hyper-hemispherical lens are a kind of basic optical elements, in a lot of optical systems crucial application is arranged.Particularly in HIGH-DENSITY OPTICAL STORAGE technology and optical microscopy, solid immersion lens is to be used for obtaining high-resolution Primary Component.But the making of solid immersion lens is difficulty relatively.For the solid immersion lens of diameter big (greater than 1mm), can make the globe lens of required size with existing conventional optics job operation earlier, remove the processing of hemisphere or not a half ball again and obtain.Wherein the processing of globe lens is very difficult, no matter be to adopt manual or machining, require high to the technology of processing and workman's operative skill and skill level, and add the face type of sphere in man-hour, local aperture and surface smoothness and all be difficult for to guarantee, and along with the degree of difficulty that dwindles processing of processing dimension becomes big rapidly, to such an extent as to just can't process less than the globe lens of 1mm at all to diameter.Simultaneously, the consumption rate of conventional optics cold working process material is bigger, at first shows to make the grinding tool that globe lens will be processed corresponding size before earlier, and the machining precision of grinding tool is also had the higher requirement of ratio.Secondly, bulk material (glass, plastics) is wanted just can process after corase grind becomes almost spherical earlier, and the utilization factor of this process optical material is lower.The 3rd, because the difficulty of processing causes final yield rate low greatly.The feasible conventional optics cold working method cost of manufacture height of these shortcomings, the process-cycle is long, and can't process the solid immersion lens of small size (diameter is less than 1mm).
In order to process the solid immersion lens of diameter, developed following several job operations abroad at present less than 1mm:
1, die methods.This method is at first made half spherical mould, more softening optical plastic is utilized this mould die forming, and reverse mould can obtain hemisphere or hyper-hemispherical lens after cooling.The process that this method is produced is fairly simple, but the manufacturing of its mould is very complicated.Can run into the same difficulty of cold working making globe lens because make small size concave spherical surface mould with traditional cold machining process, therefore they use the semiconductor wet etching technics to make the mould of diameter 0.25mm on the Si sheet in this technology.Because the characteristics of semiconductor wet etching technics make this method that complex manufacturing technology at first be arranged, need have that tens procedures, equipment needed thereby are many, consumption noble metal and single-crystal semiconductor material, cycle grow up to this high inherent defect.Secondly, it is poor that the directed etching on semiconductor material is made the concave spherical surface process controllability, etch sphere, requires the strict coupling of etching atmosphere and etching time.The variation of environment temperature and etching liquid concentration all will produce bigger influence to etching speed, thereby cause the concave spherical surface face type variation of etching.The 3rd, the template surface smooth finish that inherent defects such as the undercutting of wet etching make this lithographic method make is poor.The 4th, because Si mould (more than 300 ℃) under higher temperature is understood oxidation, burst, this mould only can be used for suppressing the low optical plastic of softening point, can't make the glass material packaged lens of (softening point generally all is higher than 500 ℃).
2, semiconductor microactuator job operation.This method adopts semiconductor etching process that mask graph is copied on the Si wafer fully, and the mask etching process by repeatedly finally makes solid immersion lens about diameter 100 μ m with the Si monocrystal material.The complicacy of semiconductor etching process and degree of difficulty are from needless to say, and the sterad of the hemisphere of single its making just is difficult to guarantee.Because this method is used the figure transfer method, promptly at first make a hemisphere with photoresist in upper wafer surface, dry etching finally forms hemisphere at upper surface through etching under the bridging effect of photoresist figure again.At first, it is very big to make the hemisphere difficulty with photoresist, though softening photoresist can be punctured into sphere under surface tension effects, its latter half contacts with silicon chip, because the two has good wellability, the therefore final sphere face type that forms affirms and hemisphere face falls far short.Secondly, this method is made on single-crystal semiconductor material only, and semiconductor material is very big in the visible light wave range absorption, so the lens luminous energy that this method is made is low through filter.
3, freely falling body method.By spraying into the freely falling body pipeline in the nozzle, droplet becomes spherical under surface tension effects and cooling in dropping process with fully softening glass state material, and reprocessing can make packaged lens.This method need be built the free-falling pipeline, the height of pipeline is not less than 10 meters, diameter is not less than 0.5 meter, and in order to prevent that drop from can not fully become sphere because of cooling off fast after ejection, the first half at pipeline will be built high-temperature heating equipment, for the influence that prevents air resistance also needs large-scale vaccum-pumping equipment.Therefore its equipment is huge, the cost of manufacture height, and the globe lens diameter of making differs, and strict sorting.Simultaneously, because drop possibility high speed rotating when ejection, action of centrifugal force makes its shape may be elliposoidal.
Three, summary of the invention
The present invention is for solving the above-mentioned technical matters that exists in the background technology, and a kind of method of utilizing hot fusion method to make the miniature solid immersion lens is provided, utilize this method can produce the small size solid immersion lens that existing optics cold working method can't be made at low cost.
Technical solution of the present invention is: the present invention is a kind of method of making the miniature solid immersion lens, and its special character is: this method comprises the following steps:
1) suspender is sticked in preparation.This sticks suspender and has an outstanding end, and the shape of end can be bar-shaped or taper.This device will be chosen softening point temperature than starting material softening point temperature height to be processed and mutual insoluble material.
2) preparation starting material silk.Starting material are drawn into the uniform filament of diameter, and this filament is cut into segment.
3) melt the system globe lens.The temperature of heating furnace is transferred near the softening point temperature of material, with step 2) in ready segment filament clip to fire door baking, treat to be bonded at behind its preliminarily softened the end of suspender, with suspender it is sent into the inside thermally equivalent of heating furnace, treat that it is fully softening and become the taking-up of spherical back, treat that sphere material cools off the back and takes off from the end of suspender.
4) measure, polish.Melt the globe lens that makes and remove not a half or hemisphere face, make qualified hemisphere or super hemisphere solid immersion lens by the cold worked method of optics.
Above-mentioned steps 1) material that sticks suspender in adopts quartz pushrod, with the softening wire drawing of quartz pushrod, and forms a tip-like tip endways.
Above-mentioned steps 1) material that sticks suspender in adopts steel wire, and the one end is polished polishing.
Above-mentioned steps 2) starting material in adopt optical glass or optical plastic.
Above-mentioned steps 3) and also include annealing steps between step 4), carry out fine annealing to melting the globe lens that makes.
The present invention has the following advantages:
1, hot fusion method making immersion lens technology is simple, and manufacturing speed is fast.
Owing to utilized the capillary effect of material under the soft state, softening droplets of materials can be condensed to sphere naturally, and sphere just need not polish and can reach optical grade.To compare manufacturing speed fast, effective with traditional cold processing for this.
2, make the yield rate height, cost is low.
Do not need base because hot fusion method is made solid immersion lens, need not corase grind, and technology is simple, can be easy to produce qualified sphere, so its making utilization rate of raw materials is very high.
3, equipment is simple.
The distinctive equipment of hot fusion method is small-sized softening heating arrangement, and the equipment of this and other method for makings is compared very simple.
Four, embodiment
Idiographic flow of the present invention is as follows:
1, suspender is sticked in preparation.
This device is made an outstanding end, and the shape of end can be bar-shaped, taper or other suitable shapes.Softening droplets of materials is by this end of contact, because the adhesion of softener material makes drop be suspended in this end.The material of this device will be chosen softening point temperature than material softening point temperature height to be processed and mutual insoluble material.The size of the surface of contact that it is terminal will have suitable ratio with respect to the diameter of softening back ball, does not have enough adhesive forces to cause dropping of drop to prevent that contact point is excessive to the influence of sphere face type or because of too small.
2, prepare to want material processed.
Want material processed to be subjected under capillary effect, to become sphere after the thermal softening, the weight of this change procedure material can not change, shape before softening is not required yet, therefore want the preparation of rapidoprint very simple yet, as long as it is divided into the fritter of estimating quality.
3, melt the system globe lens.
The temperature of heating furnace is transferred near the softening point temperature of material, and the ready material fritter in front is clipped to fire door baking, treats to be bonded at behind its preliminarily softened the end of suspender.With its inside thermally equivalent of sending into heating furnace, treat that it is fully softening and become the taking-up of spherical back with suspender, treat that sphere material cools off the back and takes off from the end of suspender.
4, measure, polish.
Melting the globe lens that makes removes not a half by the cold worked method of optics or hemisphere face can finally make qualified hemisphere or super hemisphere solid immersion lens.When note removing should from contacted position, the end of suspender.
Can between step 3 and 4, increase by a step " annealing process " if improve the optical quality of the globe lens that finally makes., the processing mode of this softening cooling again causes the decline of picture element because introducing internal stress easily in workpiece.
Specific embodiments of the invention one are as follows:
1, quartz pushrod forms a tip-like tip endways through softening wire drawing.
2, optical glass is drawn into the uniform filament of diameter after softening, and again the optical glass silk is cut into isometric segment, and the length of segment should be determined by the weight of the globe lens that will process.
3, the temperature of heating furnace is transferred near the softening point temperature of optical glass, and the ready glass fiber segment in front is clipped to the baking of heating fire door, treats to be bonded at after front end softens the tip of quartz fibre.With quartz fibre glass fiber is sent into thermally equivalent in the heating furnace, treat that it is fully softening and become the taking-up of spherical back, treat that glass bead cools off the back and takes off from the tip of quartz fibre.
4, fine annealing.The glass bead that melts is carried out fine annealing.
5, the glass bead after will annealing is selected the qualified measurement diameter of face type through amplification detection, determines the rubbing down removal amount, goes up the dish rubbing down again and can make qualified solid immersion lens.
Specific implementation example of the present invention two is as follows:
1, gets one section steel wire about diameter 0.5mm, the one end is polished polishing.
2, to be drawn into diameter after softening be filament about 0.3mm to optical plastic, the long segment of 5mm such as the plastics silk is cut into again.
3, the temperature of heating furnace is transferred near the glass temperature of optical plastic, and front ready plastics silk segment is clipped to the baking of heating fire door, treats to be bonded at after front end softens the tip of steel wire.With steel wire the plastics silk is sent into thermally equivalent in the heating furnace, treat that it is fully softening and become the taking-up of spherical back, treat that baton round cools off the back and takes off from the tip of steel wire.
4, with baton round through amplification detection, select the qualified measurement diameter of face type, determine the rubbing down removal amount, go up the dish rubbing down again and can make qualified plastic solidification immersion lens.
Claims (5)
1, a kind of method of making the miniature solid immersion lens, it is characterized in that: this method comprises the following steps:
1) suspender is sticked in preparation, and this sticks suspender and has an outstanding end, and the shape of end can be bar-shaped or taper, and this device will be chosen softening point temperature than starting material softening point temperature height to be processed and mutual insoluble material;
2) preparation starting material silk is drawn into the uniform filament of diameter with starting material, and this filament is cut into segment;
3) melt the system globe lens, the temperature of heating furnace is transferred near the softening point temperature of material, with step 2) in ready segment filament clip to fire door baking, treat to be bonded at behind its preliminarily softened the end of suspender, with suspender it is sent into the inside thermally equivalent of heating furnace, treat that it is fully softening and become the taking-up of spherical back, treat that sphere material cools off the back and takes off from the end of suspender;
4) measure, polish, melt the globe lens that makes and remove not a half or hemisphere face, make hemisphere or super hemisphere solid immersion lens by the cold worked method of optics.
2, the method for manufacturing miniature solid immersion lens according to claim 1 is characterized in that: the material that sticks suspender in the described step 1) adopts quartz pushrod, with the softening wire drawing of quartz pushrod, and forms a tip-like tip endways.
3, the method for manufacturing miniature solid immersion lens according to claim 1 is characterized in that: the material that sticks suspender in the described step 1) adopts steel wire, and the one end is polished polishing.
4, the method for manufacturing miniature solid immersion lens according to claim 1 is characterized in that: the starting material described step 2) adopt optical glass or optical plastic.
5, the method for manufacturing miniature solid immersion lens according to claim 1 is characterized in that: also include annealing steps between described step 3) and step 4), carry out fine annealing to melting the globe lens that makes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031145590A CN1225660C (en) | 2003-03-21 | 2003-03-21 | Method for producing miniature solid immersion lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031145590A CN1225660C (en) | 2003-03-21 | 2003-03-21 | Method for producing miniature solid immersion lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1532564A CN1532564A (en) | 2004-09-29 |
| CN1225660C true CN1225660C (en) | 2005-11-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB031145590A Expired - Fee Related CN1225660C (en) | 2003-03-21 | 2003-03-21 | Method for producing miniature solid immersion lens |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111694077B (en) * | 2020-06-24 | 2021-08-17 | 电子科技大学 | Hemispherical microlens and preparation method thereof |
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| CN1532564A (en) | 2004-09-29 |
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