CN121264190A - 半导体装置 - Google Patents

半导体装置

Info

Publication number
CN121264190A
CN121264190A CN202480033619.4A CN202480033619A CN121264190A CN 121264190 A CN121264190 A CN 121264190A CN 202480033619 A CN202480033619 A CN 202480033619A CN 121264190 A CN121264190 A CN 121264190A
Authority
CN
China
Prior art keywords
layer
electrode
upper electrode
sectional
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480033619.4A
Other languages
English (en)
Chinese (zh)
Inventor
香川武史
伊藤是清
原田真臣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of CN121264190A publication Critical patent/CN121264190A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
    • H10D1/692Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/33Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/01Manufacture or treatment
    • H10D1/041Manufacture or treatment of capacitors having no potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN202480033619.4A 2023-06-07 2024-05-15 半导体装置 Pending CN121264190A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023094200 2023-06-07
JP2023-094200 2023-06-07
PCT/JP2024/017951 WO2024252871A1 (ja) 2023-06-07 2024-05-15 半導体装置

Publications (1)

Publication Number Publication Date
CN121264190A true CN121264190A (zh) 2026-01-02

Family

ID=93795300

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480033619.4A Pending CN121264190A (zh) 2023-06-07 2024-05-15 半导体装置

Country Status (4)

Country Link
US (1) US20260113960A1 (https=)
JP (1) JPWO2024252871A1 (https=)
CN (1) CN121264190A (https=)
WO (1) WO2024252871A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4206293B2 (ja) * 2003-04-25 2009-01-07 京セラ株式会社 薄膜コンデンサおよびそれを用いたコンデンサ基板
JP2012151220A (ja) * 2011-01-18 2012-08-09 Asahi Kasei Electronics Co Ltd 容量素子及びその製造方法並びに半導体集積回路
JP6372640B2 (ja) * 2016-07-07 2018-08-15 株式会社村田製作所 キャパシタ
CN117242538A (zh) * 2021-05-10 2023-12-15 株式会社村田制作所 半导体装置、匹配电路以及滤波电路

Also Published As

Publication number Publication date
US20260113960A1 (en) 2026-04-23
WO2024252871A1 (ja) 2024-12-12
JPWO2024252871A1 (https=) 2024-12-12

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