JPWO2024252871A1 - - Google Patents

Info

Publication number
JPWO2024252871A1
JPWO2024252871A1 JP2025526022A JP2025526022A JPWO2024252871A1 JP WO2024252871 A1 JPWO2024252871 A1 JP WO2024252871A1 JP 2025526022 A JP2025526022 A JP 2025526022A JP 2025526022 A JP2025526022 A JP 2025526022A JP WO2024252871 A1 JPWO2024252871 A1 JP WO2024252871A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2025526022A
Other languages
Japanese (ja)
Other versions
JPWO2024252871A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2024252871A1 publication Critical patent/JPWO2024252871A1/ja
Publication of JPWO2024252871A5 publication Critical patent/JPWO2024252871A5/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/60Capacitors
    • H10D1/68Capacitors having no potential barriers
    • H10D1/692Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/33Thin- or thick-film capacitors (thin- or thick-film circuits; capacitors without a potential-jump or surface barrier specially adapted for integrated circuits, details thereof, multistep manufacturing processes therefor)
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00Resistors, capacitors or inductors
    • H10D1/01Manufacture or treatment
    • H10D1/041Manufacture or treatment of capacitors having no potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP2025526022A 2023-06-07 2024-05-15 Pending JPWO2024252871A1 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2023094200 2023-06-07
PCT/JP2024/017951 WO2024252871A1 (ja) 2023-06-07 2024-05-15 半導体装置

Publications (2)

Publication Number Publication Date
JPWO2024252871A1 true JPWO2024252871A1 (https=) 2024-12-12
JPWO2024252871A5 JPWO2024252871A5 (https=) 2026-03-05

Family

ID=93795300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2025526022A Pending JPWO2024252871A1 (https=) 2023-06-07 2024-05-15

Country Status (4)

Country Link
US (1) US20260113960A1 (https=)
JP (1) JPWO2024252871A1 (https=)
CN (1) CN121264190A (https=)
WO (1) WO2024252871A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4206293B2 (ja) * 2003-04-25 2009-01-07 京セラ株式会社 薄膜コンデンサおよびそれを用いたコンデンサ基板
JP2012151220A (ja) * 2011-01-18 2012-08-09 Asahi Kasei Electronics Co Ltd 容量素子及びその製造方法並びに半導体集積回路
JP6372640B2 (ja) * 2016-07-07 2018-08-15 株式会社村田製作所 キャパシタ
CN117242538A (zh) * 2021-05-10 2023-12-15 株式会社村田制作所 半导体装置、匹配电路以及滤波电路

Also Published As

Publication number Publication date
US20260113960A1 (en) 2026-04-23
WO2024252871A1 (ja) 2024-12-12
CN121264190A (zh) 2026-01-02

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Legal Events

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Effective date: 20251203

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