CN1206512C - Non-spheric eccentricity measuring method and device - Google Patents

Abstract

The present invention provides a method for measuring easily and with high accuracy the amount and the direction of decentering of an aspherical surface of an aspherical lens and a device for measuring them. The measuring device comprises: a lens receiving part; a rotating lens supporting member; a paraxial decentering measuring part, detecting the amount and direction of the decentering of a paraxial focus of both faces of the lens to be detected, relative to an axis of rotation of the member for supporting the rotating lens; a shape measuring part for a surface to be detected, detects the shape of the surface to be detected; a rotational angle measuring part, detecting the rotational angle of the lens to be detected; and an arithmetic part. In the arithmetic part, data, which is obtained by the part for measuring the shape of the surface to be detected by rotating the lens to be detected, is compared with design formulas of the surface to be detected, and the amount of relative shift and tilt, which make difference of them to be the smallest, are calculated. A position of the top of the surface relative to the axis of the rotation is calculated from the amount of the shift and tilt. The amount of the tilt and the direction of an aspherical axis relative to an optical axis of the lens to be detected, are calculated from the position of the top of the surface and the amount and direction of the decentering of the paraxial focus of the both faces of the lens to be detected, measured by the parts for measuring the paraxial decentering.

Description

Eccentric assay method of aspheric surface and eccentric determinator

Technical field

The present invention relates to be used to measure the eccentric determinator of non-spherical lens and the eccentric assay method of aspheric surface of degree of tilt of the aspheric surface axle of non-spherical lens, wherein non-spherical lens comprises double surface non-spherical lens and single face non-spherical lens.

Background technology

As the determination techniques of the off-centre that is used to check that non-spherical lens has, in recent years, for example open and disclose eccentric determinator and eccentric assay method thereof that non-spherical lens is used in the flat 7-159288 communique the spy.With Fig. 8 (a) to (e) the eccentric assay method of described existing non-spherical lens is described, the relevant summary that is used to realize the eccentric determinator of existing non-spherical lens of this method is described according to Fig. 9.

At first in Fig. 8 (a), be illustrated in the example that has aspheric lens on two-sided.Be used as double-sized non-spherical 1b, 1a that the solid line of the described non-spherical lens of detected lens represents and be use imaginary line 1a ', the paraxial sphere that 1b ' represents is as the face of reference design.Connect paraxial sphere 1a ', the line h of the center of curvature 1ob of 1b ', 1oa becomes the optical axis of non-spherical lens 1.And, as illustrative two-sided be in the non-spherical lens, the aspheric surface axle ib of pre-point (face top) 1tb of existence connection aspheric surface 1b and the center of curvature 1ob of paraxial sphere 1b ', and 2 aspheric surface axles of aspheric surface axle ia of the center of curvature 1oa of summit (face the is pre-) 1ta of connection aspheric surface 1a and paraxial sphere 1a '.If described non-spherical lens is according to designing and producing, these 3 axles are in full accord so, still, in fact are difficult to make such lens.

Under 2 aspheric surface axle ia, the ib and the inconsistent state of optical axis h shown in Fig. 8 (a), aspheric surface 1b, 1a tilt from perfect condition, and optical axis h and aspheric surface axle ia, ib be angled ε a and ε b and intersect respectively.This angle ε b is the aspheric surface offset of aspheric surface 1b, and angle ε a is the aspheric surface offset of aspheric surface 1a.And shown in the figure of Fig. 8 (c), (d), with the optical axis is benchmark, from the direction of initial point to aspheric surface face top (aspheric surface summit) is aspheric surface eccentric direction (that is, the aspheric surface eccentric direction of bearing plane 1a is θ ε a, and the aspheric surface eccentric direction of the reverse side 1b of bearing plane is θ ε b).Under the situation of making non-spherical lens, for ready-made lens are estimated, must at first measure described aspheric surface offset and direction, carry out product evaluation, model tuning etc. then.

On the other hand, in Fig. 8 (b), illustration only single face is a non-spherical lens under the aspheric surface situation.Aspheric surface 1b is the face of the paraxial sphere of using imaginary line 1b ' expression as reference design.The line h that connects paraxial center of curvature 1ob of aspheric surface 1b and sphere 1a center of curvature 1oa becomes the optical axis of non-spherical lens 1.Under the situation of this non-spherical lens, define the aspheric surface axle ib of the center of curvature 1ob of a summit 1tb who connects aspheric surface 1b and paraxial sphere 1b '.If described non-spherical lens is by designing and producing, optical axis h and aspheric surface axle ib are in full accord so, still, in fact are difficult to make such lens.Shown in Fig. 8 (b), aspheric surface 1b tilts from perfect condition, and optical axis h and aspheric surface ib intersect with angle ε b.The aspheric surface offset that described angle ε b is aspheric surface 1b shown in the figure of Fig. 8 (e), is a benchmark with the optical axis, is the direction θ ε b of aspheric surface off-centre from the direction of initial point to aspheric surface face top.Therefore, only single face is under the situation of aspheric surface, must carry out evaluation, model tuning of lens etc. according to described aspheric surface offset ε b and direction θ ε b.

In Fig. 9, show the spy and open the non-spherical lens put down in writing in the flat 7-159283 communique with eccentric determinator 100.The feature of described eccentric determinator 100 is to have: holding device 102, and keeping two-sided all is the detected lens 101 of aspheric surface; Drive unit 103 is around rotating described holding device 102 with the rotating shaft that the optical axis of detected lens roughly overlaps; Pick-up unit 104 detects the rotation origin position of described detected lens; Light source 105, from rotor shaft direction to detected lens lighting light; Optical system 107 makes from the light of described detected reflection from lens to become the some picture; Pick-up unit 108, the position of the some picture that detection is provided with on the image space of described optical system; 2 displacement measurement apparatus 109,110 are measured the displacement of the two-sided optical axis direction of described detected lens; Arithmetic unit 112 receives from described some image position pick-up unit 108, rotation origin point position detecting unit 104, and the data of each displacement measurement apparatus 109,110, calculates the eccentric direction and the offset of aspheric surface axle.And hint is preferred to be constituted and is, actuator 111 is set, and is used for the indication according to described arithmetic unit 112, is moving described detected lens on the direction of quadrature substantially with the optical axis k of described detected lens.

And the existing assay method that described prior art discloses by following first, second, third carries out the eccentric content of measuring of aspheric surface.Promptly, the formation of being implemented in the first existing assay method is, described maintaining part 102 has the maintaining part of the hollow cylinder shape that has the axle parallel with described rotating shaft k cardinal principle, it is big unlike the diameter of the near axis area of the cardinal principle sphere of regarding described non-spherical lens as to make described drum diameter, or, the maintaining part of described hollow cylinder shape is made up of thin cylinder, and has the contact edge that contacts with described detected lens 101 of blade-like.

The feature of the described first existing assay method is: keeping two-sided with bearing plane 101a all is the detected lens 101 of aspheric surface, and the aspheric surface axle that centers on bearing plane 101a rotates described detected lens 101.Then, from rotor shaft direction to detected lens lighting light, reflected light from the reverse side 101b of the bearing plane of these detected lens 101 is become some picture on the imaging surface of optical system, position by this some picture and when detected lens 101 rotations, describe the size of the circle of this some picture, obtain the aspheric surface axle of bearing plane 101a and the eccentric direction and the offset of lens axis, according to this offset, based on the reverse side 101b of this eccentric bearing plane in the displacement of rotor shaft direction as the value of calculating, the displacement of the rotor shaft direction of the reverse side 101b of actual measurement bearing plane.Then, deduct the above-mentioned value of calculating from described measured value, the aspheric surface axle of reverse side 101b of obtaining relevant bearing plane is with respect to the degree of tilt of lens axis, that is, and and aspheric surface offset and eccentric direction.

As the second existing assay method, its formation is: measure the described displacement that be rotated in rotor shaft direction on of detected lens 101 along with bearing plane 101a, in order to make described displacement is 0, substantially moving detected lens 101 on the direction of quadrature, make the aspheric surface axle of this bearing plane 101a consistent with rotating shaft with rotating shaft; Or, be provided with and make described detected lens 101 at the actuator 111 that moves on the direction of quadrature substantially with described rotating shaft k, for the displacement of this bearing plane 101a, drive actuator 111 according to the displacement feedback.

As the 3rd existing assay method, its formation is: keeping two-sided with bearing plane 101a all is the detected lens 101 of aspheric surface, is the center with the axle of the paraxial center of curvature of the reverse side 101b by described bearing plane, and detected lens 101 are rotated.Then, from rotor shaft direction irradiates light on described detected lens 101, make reflected light on the imaging surface of optical system, be imaged as a picture from the bearing plane 101a of detected lens 101.Describe the size of the circle of this some picture according to the position of this some picture with when detected lens 101 rotations, obtain eccentric direction and the offset of the optical axis k of rotating shaft and detected lens 101; Or, offset according to the optical axis of rotating shaft and detected lens 101, calculate displacement according to the two-sided rotor shaft direction of the detected lens 101 of this off-centre, survey the displacement of the two-sided rotor shaft direction of detected lens, from each measured value that obtains, deduct the value of calculating, obtain offset and eccentric direction, this is described method and constitutes showing of all being subjected to.

According to such prior art, can measure aspheric surface offset and eccentric direction that detected lens have.

Yet, in above-mentioned prior art, from following reason as can be known more high-precision measuring be difficult.Promptly in the above-mentioned first prior art assay method, although its prerequisite is: when bearing the aspheric surface of detected lens, little by the diameter of the part that keeps is done, bear this face near axis area, even make that deviation does not take place the described detected lens tilt center of curvature yet, but, do not have clear and definite aspheric surface in what scope, can regard near axis area as with respect to the difference of paraxial sphere.In fact, can consider by making detected lens tilt make the situation of center of curvature deviation rotating shaft, and this deviation is big more, the error of the eccentric measurement result of aspheric surface is also big more.

And, though for the deviation that makes the center of curvature that takes place when the detected lens tilt little, must process with the high precision corresponding, still, bear more little inaccessible more this precision of bore of the part of detected lens with the precision of the circularity of the face of wanting to measure that bears detected lens.

In the above-mentioned second existing assay method, measure displacement along with the rotor shaft direction of the rotation of bearing plane, be 0 in order to make described displacement, with rotating shaft roughly the direction of quadrature move described detected lens, make the aspheric surface axle of bearing plane consistent with rotating shaft.Under actual conditions, because the influence to displacement such as concavo-convex of measuring the noise of system and detected etc., displacement is not 0, and coherency operation is difficulty very.Here, although, can think that the aspheric surface axle is consistent with rotating shaft by carrying out doing 0 processing taking temperature less than the regulation displacement, if make this amount greatly adjust simple, but the error at measurment change greatly.On the contrary, if make this amount little,, adjust difficulty although error at measurment is little.

And, in the above-mentioned the 3rd existing assay method, axle with the paraxial center of curvature of the reverse side 101b by bearing plane is that the center makes detected lens 101 rotations, the size of the circle that looks like to describe according to the catoptrical point from bearing plane 101a is obtained eccentric direction and the offset of this rotating shaft and detected lens 101 optical axis k.Yet, although do not speak frankly,, under described situation, the paraxial center of curvature and the rotating shaft that must operate the reverse side 101b that makes detected lens bearing plane are in full accord.But, because the paraxial center of curvature is measured the influence of the resolution of the resolution of system and Adjustment System, make very difficulty in full accord, stay the poor of 0.5 μ m roughly.Although by carrying out doing 0 processing taking temperature less than the regulation displacement, can think that the aspheric surface axle is consistent with rotating shaft, if make this amount big, though adjust simply, it is big that error at measurment becomes.On the contrary, if make this amount little,, adjust difficulty though error at measurment is little.In above-mentioned existing method, handle owing to ignore the adjustment error, so, error appears when calculating the paraxial The curvature center of bearing plane side, cause measuring precise decreasing.

This existing assay method is in supposition state to be set to be: under the aspheric surface axle of the non-spherical lens of the detected lens prerequisite consistent with rotating shaft, the assay method of the mode that begins to measure under the state is set at these lens.And, ask owing to as the aspheric surface axle ib of the optical axis h of non-spherical lens and this non-spherical lens not quite identical produce with respect to the offset of aspheric surface axle lens axis and eccentric direction the time, do not carry out the calculating of position, face top (computing of calculating according to tilt quantity, displacement) of relevant this non-spherical lens specially, do not require confirming again by spool (the aspheric surface axle) on this face top.So owing to do not carry out suitable adjustment, its result, the raising of measuring precision naturally is restricted.

Therefore, in view of existing the problems referred to above that the present invention exists, the object of the present invention is to provide simple and easy and measure the method for the aspheric surface offset of non-spherical lens and direction thereof accurately and be used to realize the determinator of this method.

Summary of the invention

In order to address the above problem, adopt as lower device in the present invention.Promptly according to the 1st technical scheme, the eccentric determinator of the aspheric surface of proposition is provided with: lens bear portion, are used to keep detected lens; The relay lens support member, rotation constitutes described lens freely and bears portion; Paraxial eccentric determinator is used to detect offset and the direction of the two-sided paraxial center of curvature of described detected lens with respect to the rotating shaft of described relay lens support member; Detected shape measuring apparatus is used to detect detected shape; The corner determinator is used to detect the corner of described detected lens; Arithmetic unit, make described detected lens rotation, the data using described detected shape measuring apparatus to measure to obtain and detected design formula are contrasted, obtain minimum relative shift and the tilt quantity of both differences, detected the face that calculates with respect to described rotating shaft by described displacement and tilt quantity pushes up the position, according to described position, top with offset and the direction of the two-sided paraxial center of curvature of the described detected lens of described paraxial eccentric determinator mensuration, calculate tilt quantity and the direction of aspheric surface axle with respect to described detected lens axis with respect to described rotating shaft.

According to the 2nd technical scheme, the eccentric assay method of a kind of aspheric surface is proposed, this method is the eccentric assay method of aspheric surface in the eccentric determinator of following aspheric surface, the eccentric determinator of this aspheric surface is provided with: lens bear portion, are used to keep detected lens; The relay lens support member, rotation constitutes described lens freely and bears portion; Paraxial eccentric determinator detects the offset of the two-sided paraxial center of curvature of detected lens; Detected shape measuring apparatus detects detected shape of described detected lens; The corner determinator detects the corner of described detected lens; The feature of described method is to have following operation: the paraxial center of curvature detects operation, utilizes described paraxial eccentric determinator, detects offset and the direction of the two-sided paraxial center of curvature of detected lens with respect to the rotating shaft of relay lens support member; The measuring shape operation makes detected lens rotation, utilizes described detected shape measuring apparatus to measure described detected shape; First operational process contrasts detected the shape of mensuration and the design formula of regulation, obtains to make minimum relative shift and the tilt quantity of both differences, calculates position, face top with respect to detected shape of described rotating shaft according to described displacement and tilt quantity; Second operational process, according to offset and direction and described the top position of the two-sided paraxial center of curvature of described detected lens, calculate tilt quantity and the direction of the aspheric surface axle of the joint face position, top and the aspheric paraxial center of curvature that comprises described top with respect to the optical axis that is connected the two-sided paraxial center of curvature of described detected lens with respect to described rotating shaft.

In addition, non-spherical lens described here comprises double surface non-spherical lens and single face non-spherical lens.

Description of drawings

Fig. 1 is the schematic diagram that the eccentric determinator of aspheric surface of expression the present invention the 1st embodiment constitutes;

Fig. 2 (a) to (g) is the conceptual scheme of expression when obtaining the aspheric surface eccentricity value,

(a) be the key diagram on the two-sided paraxial center of curvature of usefulness x, y, z three dimensional representation lens and aspheric surface face top,

(b) be the key diagram of representing the paraxial center of curvature that lens are two-sided and aspheric surface face top with the xz plane,

(c) be the key diagram of representing the paraxial center of curvature that lens are two-sided and aspheric surface face top with the yz plane,

(d) be the key diagram of representing the paraxial The curvature center of bearing plane with the xy plane,

(e) be to represent that with the xy plane aspheric surface face of the reverse side of bearing plane pushes up the key diagram of position,

(f) be the key diagram of representing the position, aspheric surface face top of bearing plane with the xy plane,

(g) be the key diagram of paraxial The curvature center of representing the reverse side of bearing plane with the xy plane;

Fig. 3 (a) and (b) are key diagrams of the scheme of diagram when obtaining the aspheric surface eccentricity value;

Fig. 4 is the process flow diagram of the operation program of the eccentric assay method of the relevant aspheric surface of expression;

Fig. 5 is the pie graph that schematically shows the eccentric determinator of aspheric surface of the 1st embodiment variation;

Fig. 6 (a) and (b) are the displacement 1tax on expression aspheric surface face top and the key diagram of 1tay;

Fig. 7 represents the schematic diagram that the eccentric determinator of aspheric surface of another variation of the 1st embodiment constitutes;

Fig. 8 (a) to (e) expression has the figure of aspheric non-spherical lens,

(a) be 2 the aspheric surface axles under the situation of expression double-sized non-spherical and the key diagram of the deviation between the optical axis,

(b) be just the aspheric surface axle under the single face aspheric surface situation and the key diagram of the deviation between the optical axis of expression,

(c) to (e) be the figure of expression aspheric surface eccentric direction (direction on top) from initial point to the aspheric surface face;

Fig. 9 is the schematic diagram of the eccentric determinator of the existing aspheric surface of expression.

Embodiment

1 to 4 the embodiment that the present invention exemplified is described with reference to the accompanying drawings below.

The 1st embodiment

Fig. 1 represents that Fig. 2 and Fig. 3 are illustrated in the detailed diagram of the scheme when asking the aspheric surface eccentricity value as the eccentric determinator of the aspheric surface of the present invention the 1st embodiment.Fig. 4 operation program of the eccentric assay method of the relevant aspheric surface of flowcharting.In Fig. 1, the eccentric determinator 2 of non-spherical lens is constructed as follows: detected lens bear portion 3, and rotation keeps the detected lens 1 of determination object freely; Relay lens support member 4 is used to make detected lens to bear portion's 3 rotations; Paraxial eccentric determination part 5 is used to detect the offset of the paraxial center of curvature of two detected the 1a of detected lens 1 and 1b with respect to the rotating shaft 9 of relay lens support member 4; Detected measuring shape portion (displacement transducer portion) 6, the aspheric surface axle of reverse side 1b that is used to detect the lens bearing plane is with respect to the pitch angle of rotating shaft 9; Corner determination part 7, the corner of detection rotating shaft 9; Operational part 8, each measured value of the paraxial eccentric determination part 5 of computing, detected (displacement transducer portion) 6 of measuring shape portion and corner determination part 7.

Here the detected lens with the vertical cross-section diagram bear the detected lens 1 of placement in the portion 3 and bear contact site (internal diameter, external diameter edge) 3a, the 3b of portion as it, be processed into roughly concentric with respect to the rotating shaft 9 of relay lens support member 4, on described relay lens support member 4 detected lens are set and bear portion 3, detected lens bear the internal diameter edge 3a of internal side diameter of upper surface of portion 3 or the external diameter edge 3b of outside diameter bears detected lens 1 with being positioned at.Because it is concentric with respect to rotating shaft 9 that internal diameter edge 3a and external diameter edge 3b are processed into, so being centered close in the rotating shaft 9 of each edge 3a, the 3b of interior external diameter.

In addition, here, as the detected lens 1 of determination object be two-sided be the non-spherical lens of aspheric surface.And are detection axles of non-spherical axis with 10 lines of representing, the point of representing with 1oa is the paraxial center of curvature of the bearing plane side of detected lens 1, the point of representing with 1ob is the paraxial center of curvature of reverse side of the bearing plane of detected lens 1.

And paraxial eccentric determination part 5 is set at above the detected lens 1, and its optical axis is coaxial with the rotating shaft of relay lens support member 4.

Although in Fig. 1, at length do not illustrate, but, have light source and optical system and imaging apparatus in paraxial eccentric determination part 5 inside, also be provided with the light path switching device of forming by mirror that the light beam along optical axis is divided into light source and imaging apparatus both direction or prism etc.The light beam that utilizes irradiation optical system to focus on from the light beam of light source irradiation such as lamp in detected the paraxial center of curvature of detected lens 1.Constituting of the optical system that is provided with in the inside of paraxial eccentric determination part 5: removable and switching constitutes the lens combination of the part of this optical system, makes to change the focus point of illumination beam according to detected curvature of these detected lens 1.

From returning along same light path of paraxial eccentric determination part 5 irradiations by detected beam reflected, incide on the paraxial eccentric determination part 5, by the light path switching device refraction that exists on light path, imaging on imaging apparatus is focused to punctiform image.When under the complete uninfluenced situation of detected the paraxial center of curvature, even while make the reflected light of detected lens 1 rotation with imaging apparatus observation light beam of irradiation on this detected, point does not produce " swing (り that shakes returns り) " yet.

In fact, have with respect to rotating shaft under the eccentric situation detected the paraxial center of curvature, if make on one side detected lens 1 rotation observe this reflected light, then by paraxial eccentric determination part 5 interior imaging apparatuss can be observed a little be rotated in the offset radius corresponding in " swing ".

Therefore, according to the direction that the rotation center of this radius and the point under the former dotted state of detected lens begins, can detect the offset and the eccentric direction of detected the paraxial center of curvature.

Specifically, by the output signal from paraxial eccentric determination part 5 and corner determination part 7 is imported operational part 6, the change in location that angle when detected the paraxial center of curvature rotated with respect to detected lens 1 changes on imaging apparatus is measured, and can calculate and detect the offset and the eccentric direction (with reference to the S10 of Fig. 4) of this paraxial center of curvature of detected.

Reverse side 1b along with the rotation bearing plane of detected lens 1 detects at the displacement that detects axle 10 directions in detected measuring shape portion (displacement transducer portion) 6.Although be not shown specifically its formation among Fig. 1, but, detected measuring shape portion is made up of LASER Light Source and interference optics and optical fiber, the light beam that is radiated on detected from optical fiber ejaculation end face is incident in detected the measuring shape portion (displacement transducer portion) 6 once more, because the change in displacement interference fringe changes.Detect displacement with being subjected to optical sensor to obtain this change of interference fringes.

And, in the rotating shaft 9 of relay lens support member 4, has the fulcrum that the rotation of detected measuring shape portion (displacement transducer portion) 6 is moved, with it is that the center can be adjusted to and makes that to detect axle consistent with the normal of the reverse side 1b measuring point of the bearing plane of detected lens 1, and the height of position of the fulcrum can be mobile in rotating shaft 9 with detected lens 1.And detected measuring shape portion (displacement transducer portion) 6 itself also can change height with detected lens 1 on the direction that detects axle 10.

By being input to operational part 8 from the output signal of detected detection faces measuring shape (displacement transducer portion) 6 of portion and corner determination part 7, the height change of detection axle 10 directions that the angle to respect to detected lens 1 rotation the time changes is measured.

Also have, in described the 1st embodiment of the present invention, although to being illustrated by the two-sided detected lens of forming by the convex aspherical shape 1 of relevant lens, but, beyond any doubt, even lens are two-sided or single face is the aspheric surface of concavity or the detected lens of sphere, can be suitable for too.

Be described more specifically the eccentric assay method of relevant above-mentioned aspheric surface.

In the eccentric determinator of the aspheric surface of above-mentioned formation, bearing the detected lens 1 of portion's 3 supports with detected lens when, while use the detected lens 1 of relay lens support member 4 rotations to feel relieved.When the bearing plane 1a of the curvature 1oa of the bearing plane 1a of detected lens 1 be sphere situation under, in theory always be centered on the axis of rotating shaft 9.But, bearing plane 1a be under the aspheric situation as shown in Figure 1, though the internal diameter edge 3a that bears portion 3 at lens is under the equidistant situation on the face top of bearing plane 1a, paraxial Qu Zhongxin 1oa is present in the rotating shaft 9, but, concern that at this under invalid situation, paraxial center of curvature 1oa is not present on the axis of rotating shaft 9.

Therefore, when detected lens 1 being rotated with relay lens support member 4, the paraxial center of curvature 1ob of reverse side 1b that detects bearing plane by paraxial eccentric determination part 5 is with respect to the offset of rotating shaft 9, adjust the position (centering is adjusted) of detected lens 1, make the offset of the described paraxial center of curvature be approximately 0.During the centering is here adjusted, needn't make paraxial curvature 1ob consistent strictly speaking with rotating shaft 9, but, owing to when the offset of the paraxial center of curvature 1oa that measures bearing plane 1a, calculate, so the more little accuracy of detection of offset of the paraxial center of curvature of the reverse side 1b of described bearing plane 1a is high more near axis area.On relay lens support member 4, connect corner determination part 7, set the benchmark of the sense of rotation of detected lens 1, measure the eccentric direction of the paraxial center of curvature according to the angle value of its mensuration.

After the reverse side 1b of the bearing plane of detected lens 1 roughly feels relieved and adjusts end, paraxial center of curvature 1oa to the bearing plane 1a of detected lens 1 detects offset and the eccentric direction of the paraxial center of curvature with respect to rotating shaft 9 as before by paraxial eccentric determination part 5.But under described situation, the reverse side 1b by bearing plane observes the paraxial curvature 1oa center of bearing plane 1a, therefore, must consider that the offset of the paraxial center of curvature of the face between paraxial eccentric determination part 5 and detected and the influence of direction calculate.Relevant these computing method are disclosed in the special public clear 51-9620 communique, if the offset of the paraxial center of curvature of the face more forward than the face of the offset of measuring the paraxial center of curvature is if known, so, can use the design data of described detected lens such as two-sided paraxial curvature, wall thickness, refractive index to calculate, utilize described computing method, can calculate the offset δ a and the direction θ a of the paraxial center of curvature of bearing plane 1a.

As mentioned above, if use the output result of paraxial eccentric determination part 5 and corner determination part 7, so by operational part 8, can calculate offset δ a, δ b, and eccentric direction θ a, the θ b (back detailed description) of the paraxial center of curvature of the reverse side 1b of bearing plane 1a and bearing plane.

Then, with reference to Fig. 2 (a) method of asking the aspheric surface eccentricity value is described to (g).Fig. 2 (a) represents aforesaid two-sided paraxial center of curvature 1oa, 1ob and the position of aspheric surface face top 1ta, 1tb with the xyz three-dimensional relationship, Fig. 2 (b), (c) represent with xz, yz plane, Fig. 2 (d) reaches the position of (g) representing paraxial center of curvature 1oa, 1ob with the xy plane, and Fig. 2 (e), (f) represent the position of aspheric surface face top 1tb, 1ta with the xy plane.

As Fig. 2 (d) and (g), utilize offset and the eccentric direction of paraxial center of curvature 1oa, 1ob, can be positioned at the value that paraxial curvature sphere center position when rotating origin position is converted into the xy plane when detected lens 1.That is, the position of the paraxial center of curvature 1oa of bearing plane 1a is represented with following formula shown in Fig. 2 (d):

X direction: 1oax=δ a * cos θ a ... (1)

Y direction: 1oay=δ a * sin θ a ... (2)

The position of the paraxial center of curvature of the reverse side 1b of described bearing plane 1a is shown in Fig. 2 (g)

X direction: 1obx=δ b * cos θ b ... (3)

Y direction: 1oby=δ b * sin θ b ... (4)

Obtain in operational part 8 with above-mentioned conversion formula.

Then,, make the angle of detection axle 10 of displacement transducer portion 6 consistent, adjust the height of detection axle 10 directions of displacement transducer portion 6 according to detected 1b of detected lens 1 with the normal of detected 1b according to detected 1b of detected lens 1.Under described state, utilize relay lens support member 4 to make detected lens 1 rotation, output detects the height change of axle 10 directions and utilizes the angle of the detected lens 1 of corner determination part 7 outputs to change, and both are imported operational part 8.

In operational part 8, the detected value of detected measuring shape portion (displacement transducer portion) 6 is transformed into the direction of the rotating shaft 9 of relay lens support member 4.

According to the position relation of the angle position of the fulcrum and the detected lens 1 of the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6, calculate mensuration radius r shown in Figure 1.Decompose the information of rotating shaft 9 directions by the information of described mensuration radius r and corner determination part 7 with detected measuring shape portion (displacement transducer portion) 6 output, be converted into the three-dimensional coordinate data of x, y, z coordinate.Contrast is based on the formula (design formula) (with reference to the S20 of Fig. 4) in the design of the described three-dimensional coordinate data of the output signal of determination part and described detected 1b.

At this moment, because the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6 tilts with respect to rotating shaft 9, so, must convert the displacement of rotor shaft direction in order to carry out the comparison with the design formula.

If setting the determination data obtained by aspheric surface axle determination part 6 is ASPb (i), so, with the elevation information of design formula comparison be that following formula calculates:

ASPb(i)×cosθ …(5)

Situation that aspheric surface repacking surveys was carried out in distance rotating shaft 9 for the point of r under, formula was separated into x, y and the comparison of design formula below the information utilization of the short transverse that will represent with (5) formula.Here, suppose that 7 pairs of each measuring points of corner determination part are output as θ rot (i).

x(i)＝r×cosθrot(i) …(6)

y(i)＝r×sinθrot(i)

In addition, though figure 1 illustrates the situation that axle 10 phase countershafts 9 tilt that detects,, even at described tiltangle is 0 degree, that is, phase countershaft 9 is under the parallel state, constitute the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6, also set up with above-mentioned same calculating.

The concrete grammar of above-mentioned as a comparison three-dimensional coordinate data and design formula for example, makes on the design formula of detected 1b and measures three-dimensional data displacement or degree of tilt, and is minimum as long as adjust in order to make both differences.That is, as displacement, the amount of distributing with (1), (2) formula is substitution x, y respectively, and the fixedly displacement of x direction and y direction is the center with the sphere center position tilts and in the displacement of z direction, detect the state of both difference minimums in x direction y direction.

Thereafter, utilize mensuration three-dimensional data tilt quantity and displacement to carry out inverse, the aspheric surface face that can obtain the reverse side 1b of bearing plane pushes up with respect to the amount of movement 1cb (with reference to the S30 of Fig. 4) of rotating shaft 9 in the xy plane.

With reference to Fig. 3 (a) and (b), relevant above-mentioned tilt quantity and displacement are described, as illustrated in Fig. 3 (a) and (b), are Aby if the tilt quantity of the x direction that the regulation aforementioned calculation is obtained is the tilt quantity of Abx, y direction, so, the displacement 1tbx and the 1tby on aspheric surface face top obtain with following formula:

1tbx＝1oax+rb×sinAbx …(7)

1tby＝1oay+rb×sinAby

Also have, operational part 8 is calculated aspheric surface offset ε b and the direction θ ε b (with reference to the S40 of Fig. 4) thereof of detected 1b according to the data of the position, face top of the two-sided paraxial The curvature center of detected lens 1 and detected 1b.

Describe described calculation method program in detail with Fig. 2 (a) to (g).

As the 1st step, the paraxial center of curvature value of the reverse side 1ob of the paraxial The curvature center 1oa of bearing plane 1a and bearing plane is resolved into x, y value respectively as Fig. 2 (d) and (g).The formula acquisition same of each numerical value with (1) to (4).

As the 2nd step, consider two-sided paraxial center of curvature amount, calculate height zo from the 1oa on the z axle of Fig. 2 (a) to 1ob.Described height zo calculates according to following formula:

$\mathrm{Zo}=\sqrt{{(\mathrm{rb}-\mathrm{ra}+d)}^2-{(1\mathrm{obx}-1\mathrm{oax})}^2+{(1\mathrm{oby}-1\mathrm{oay})}^2}---...\left(8\right)$

Wherein ra is the paraxial radius-of-curvature of bearing plane 1a, and rb is the paraxial radius-of-curvature of bearing plane 1b, and d represents the lens wall thickness.

As the 3rd step, consider face top displacement and the paraxial center of curvature offset of the reverse side 1b of bearing plane, calculate height zb from the 1ob on the z axle of Fig. 2 (a) to 1tb.Described height zb calculates according to following formula:

$\mathrm{Zb}=\sqrt{r{b}^2-{(1\mathrm{obx}-1\mathrm{tbx})}^2-{(1\mathrm{oby}-1\mathrm{tby})}^2}---...\left(9\right)$

In the step afterwards, be divided into the xz plane and the yz plane is calculated.Although, carry out the calculating on the xz plane earlier here as an example, carry out the calculating on yz plane then, this both can calculate the yz plane earlier just for convenience of description, also can alternately calculate xz plane and yz plane in each step.

As the 4th step,, calculate the eccentric x composition of aspheric surface by aspheric surface axle rbx and optical axis 1oax-1obx degree of tilt with respect to the z axle in the xz plane.Shown in Fig. 3 (a), x composition ε bx calculates according to following formula:

$\mathrm{\ϵbx}={\tan }^{-1}\left(\frac{1\mathrm{tbx}-1\mathrm{oby}}{\mathrm{Zb}}\right)-{\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{oby}}{\mathrm{Zo}}\right)---...\left(10\right)$

As the 5th step, on the xz plane, make vertical line to optical axis 1oax-1obx from aspheric surface face top 1tbx, calculate its length L bx.Shown in Fig. 3 (a), Lbx calculates according to following formula:

Lbx＝rbx×sinεbx …(11)

On the yz plane, also can use the above-mentioned the 4th and the 5th step, on the yz plane, make vertical line to optical axis 1oay-1oby, calculate its length L by from aspheric surface face top 1tby.Shown in Fig. 3 (b), Lby calculates according to following formula:

Lby＝rby×sinεby …(12)

As the 6th step, calculate degree of tilt, i.e. aspheric surface offset ε b to the aspheric surface axle rb of optical axis 1oa-1ob.ε b calculates according to following formula shown in Fig. 3 (a) and (b):

$\mathrm{\&epsiv;b}={\sin }^{-1}\left(\frac{\sqrt{\mathrm{Lb}{x}^2+\mathrm{<figure-callout\; id="2"\; label="Lb\; y"\; filenames="C0214907600451.png"\; state="\{\{state\}\}">Lb</figure-callout>}{y}^{}{}^2}}{\mathrm{rb}}\right)---...\left(13\right)$

Here, the branch subrepresentation on the right of following formula pushes up the distance (displacement) of 1tb from optical axis 1oa-1ob to the aspheric surface face.

As the 7th step, calculate the eccentric direction θ b of aspheric surface axle rb with respect to optical axis 1oa-1ob.With respect to optical axis, the aspheric surface face pushes up shown in Fig. 3 (a) and (b), and at a distance of Lbx, at a distance of Lby, θ b calculates according to following formula in the y direction in the x direction:

$\mathrm{\&theta;b}={\tan }^{-1}\left(\frac{\mathrm{Lby}}{\mathrm{Lbx}}\right)---...\left(14\right)$

By above-mentioned steps, can correctly obtain aspheric surface offset and the direction of the reverse side 1b of bearing plane with respect to optical axis 1oa-1ob.

Do not change the position of rotation of lens in the portion 3 and, carry out similar detection and computing if bear, so, can correctly obtain the aspheric surface offset ε a and the direction θ a thereof of the reverse side of the above-mentioned face of obtaining detected lens 1 turned upside down at detected lens.But, because 1 inversion of detected lens, so owing to direction is inverted, and making the x direction or the positive and negative inversion of y direction of eccentric direction, the short transverse of design formula also is inverted.

(effect A)

In the 1st such embodiment, for example the two-sided of lens is under the aspheric situation, owing to utilize paraxial eccentric determination part 5 to carry out the mensuration of paraxial The curvature center of the reverse side 1b of the bearing plane 1a of detected lens 1 and bearing plane, so, bearing plane 1a is an aspheric surface, when the centering of the reverse side 1b of bearing plane is adjusted, even the paraxial center of curvature deviation rotating shaft 9 of bearing plane 1a, also can redefine the optical axis of detected lens 1 according to measured value, can correctly measure.

Also have, the bearing plane that the detected lens that bear detected lens 1 bear portion 3 also needs not to be near axis area, thus its size so long as the diameter that machining precision is guaranteed easily get final product.

And, because the paraxial center of curvature 1oa of bearing plane 1a needn't correctly be consistent with rotating shaft 9, thus not strict even bear the concentricity of rotating shaft 9 of portion 3 with respect to detected lens, also can carry out high-precision measuring.

Utilize paraxial eccentric determination part 5 to detect the reverse side 1b of above-mentioned bearing plane 1a and the paraxial center of curvature of bearing plane 1a, owing to detect the position, aspheric top of detected of its lens, can carry out high-precision measuring according to the eccentric definition of aspheric surface by aspheric surface axle test section 6.

Even if ask under the situation of double-sized non-spherical offset in that detected lens 1 are inverted, because metewand is the optical axis that connects the paraxial center of curvature, so, state changes even detected lens 1 are inverted, because the two-sided paraxial center of curvature and the position of lens relation are determined with 1 pair 1, so can correctly carry out the unified high-precision measuring of metewand.

And, even with other positions such as external diameter with detected lens and fixing " the inversion evaluation of measuring " estimated as benchmark with the reference field of anchor clamps of detected lens are compared, its advantage is can carry out the evaluation of measuring of minimum position, and benchmark needn't be set beyond lens.

In addition, so far, although understand relevant lens two-sided be aspheric detected lens, still,, equally also can obtain its aspheric surface offset and direction even be under the aspheric situation as the single face that illustrates below.

Under described situation, in the illustrated formation of Fig. 1, at first, being arranged in detected lens, to bear the sphere that makes detected lens 1 in the portion 3 be bearing plane 1a side.

If bearing with detected lens when portion 3 supports to have only single face to be aspheric described detection lens 1, make described detection lens 1 rotation with relay lens support member 4 on one side, do centering adjustment on one side and make that paraxial curvature of reverse side 1b and the rotating shaft 9 of bearing plane 1a are unanimous on the whole, so, as the center of curvature 1oa of the bearing plane 1a of the sphere of detected lens 1 in theory always by aligning on the axis of rotating shaft 9, but, because it is not enough that the surface accuracy of bearing plane 1a and detected lens bear the right alignment of the circularity of the contact site 3b that portion 3 contacts with detected lens 1 and rotating shaft 9, and generation center of curvature 1oa and rotating shaft 9 inconsistent situations.

Make detected lens 1 rotation by relay lens support member 4 on one side, on one side by paraxial eccentric determination part 5, the paraxial curvature center of curvature 1ob of the reverse side 1b of detection bearing plane carries out the position adjustment with respect to the offset of rotating shaft 9 to detected lens 1, makes described offset be approximately 0.During the centering is here adjusted, though paraxial 1ob and rotating shaft 9 strictly are consistent, but because when measuring the offset of center of curvature 1oa of bearing plane 1a, the more little accuracy of detection of offset of the paraxial center of curvature of the reverse side 1b of bearing plane is high more, so carry out consistent the adjustment here.

On relay lens support member 4, connect corner determination part 7, utilize its value to set the sense of rotation benchmark of detected lens 1, measure the eccentric direction of the paraxial center of curvature.

The reverse side 1b of the bearing plane of detected lens 1 feel relieved substantially adjust finish after, to the center of curvature 1oa of the bearing plane 1a of detected lens 1, detect offset and eccentric direction as before with respect to rotating shaft 9 by paraxial eccentric determination part 5.But, under described situation, owing to observe the center of curvature 1oa of bearing plane 1a by the reverse side 1b of bearing plane, though so must consider the offset of the paraxial center of curvature of the face between paraxial eccentric determination part 5 and detected and the influence of direction, but, relevant these computing method are as putting down in writing in the public clear 51-9560 communique of spy, if the offset of the paraxial center of curvature of the face more forward than the face of the offset that detects the paraxial center of curvature is known, so, can use two-sided paraxial curvature, wall thickness, the design data of the detected lens of refractive index is calculated, and utilizes this method can calculate the offset δ a and the direction θ a of the paraxial center of curvature of bearing plane 1a.

Like this, use the output result of paraxial eccentric determination part 5 and corner determination part 7, utilize operational part 8 can calculate the offset δ a of the center of curvature of bearing plane 1a, and the offset δ b and the eccentric direction θ b of the paraxial center of curvature of the reverse side 1b of eccentric direction θ a, bearing plane.

As Fig. 2 (d) and (g), utilize the offset and the eccentric direction of the paraxial center of curvature or the center of curvature, paraxial curvature sphere center position in the time of detected lens 1 can being positioned at the rotation origin position or The curvature center are converted into the value on the xy plane, shown in Fig. 2 (d), represent the The curvature center of bearing plane 1a with following formula.

X direction: 1oax=δ a * cos θ a ... (1)

Y direction: 1oay=δ a * sin θ a ... (2)

The paraxial The curvature center of reverse side 1b of bearing plane is obtained in operational part 8 with following conversion formula shown in Fig. 2 (g).

X direction: 1obx=δ b * cos θ b ... (3)

Y direction: 1oby=δ b * sin θ b ... (4)

Then,, make the angle of detection axle 10 of displacement transducer portion 6 consistent, adjust the height of detection axle 10 directions of displacement transducer portion 6 according to detected 1b of detected lens 1 with the normal of detected 1b according to detected 1b of detected lens 1.Under this state, utilize relay lens support member 4 to make detected lens 1 rotation, export the height change of detected axle 10, the angle of exporting detected lens 1 by corner determination part 7 changes, and both are input to operational part 8.

In operational part 8, the detected value of detected measuring shape portion (sensor part) 6 is transformed into the direction of the rotating shaft 9 of relay lens support member 4.

According to the position relation of the angle position of the fulcrum and the detected lens 1 of the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6, calculate illustrated mensuration radius r.By the information of described mensuration radius r and corner determination part 7 with the information that the output of detected shape portion determination part (displacement transducer portion) 6 decomposes the direction of rotating shaft 9 is converted into the three-dimensional coordinate data of x, y, z coordinate.Contrast the design formula of described mensuration three-dimensional coordinate data and detected 1b.At this moment, because the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6 is with respect to rotating shaft 9 inclinations, so in order to compare with the design formula, must convert the displacement of rotor shaft direction to.

If the determination data that hypothesis is obtained by aspheric surface axle determination part 6 is ASPb (i), be as shown in the formula calculating then with design formula elevation information relatively:

ASPb(i)×cosθ …(5)

Carry out for the point of r in distance rotating shaft 9 under the situation of aspheric surface repacking survey,, compare with the design formula utilizing following formula to be separated into x, y with the short transverse information of formula (5) expression.Here, the output with 7 pairs of each measuring points of corner determination part is expressed as θ rot (i).

x(i)＝r×cosθrot(i) …(6)

y(i)＝r×sinθrot(i)

In Fig. 1, though detecting axle 10, hypothesis tilts with respect to rotating shaft 9,, even described degree of tilt θ is 0 degree, that is, under the parallel state of rotating shaft 9, constituting the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6, same calculating is also set up.

As making three-dimensional coordinate data and design formula method relatively, for example,, make and measure three-dimensional data displacement, inclination as long as on the design formula of detected 1b, make both difference minimums just.As the amount that the displacement substitution provides with (1), (2) formula, the fixedly displacement of x direction and y direction is that the center is in the x direction with the y direction tilts and in the displacement of z direction, detect the minimum state of both differences with the sphere center position.

If carry out inverse with measuring three-dimensional data tilt quantity and displacement, the aspheric surface face that then can obtain the reverse side 1b of bearing plane pushes up with respect to the amount of movement 1tb of rotating shaft 9 on the xy plane.Shown in Fig. 3 (a) and (b), be that the tilt quantity of Abx, y direction is Aby if hypothesis is calculated the x direction tilt quantity obtain, then the displacement 1tbx and the 1tby on aspheric surface face top obtain with following formula:

1tbx＝1oax+rb×sinAbx …(7)

1tby＝1oay+rb×sinAby

Then, utilize operational part 8, calculate aspheric surface offset ε b and the direction θ ε b thereof of detected 1b according to the paraxial The curvature center of detected lens 1 and the position, face top of The curvature center and detected 1b.

With Fig. 2 (a) to (g) this calculation method is described.

Here and since be the reverse side 1b of the bearing plane of detected lens 1 be aspheric surface, so the aspheric surface face top 1ta of Fig. 2 (a) and (b), (c) the bearing plane 1a side shown in (f) does not exist.

As the 1st step,, the paraxial center of curvature value 1ob of the reverse side 1b of the The curvature center 1oa of bearing plane 1a and bearing plane is resolved into x, y value respectively as Fig. 2 (d) and (g).Each numerical value is used with (1) and is obtained to the same formula of (4) formula.

As the 2nd step, consider paraxial center of curvature offset and center of curvature offset, calculate the height zo from 1oa to 1ob on the z axle of Fig. 2 (a).Described height zo calculates according to following formula:

$\mathrm{Zo}=\sqrt{{(\mathrm{rb}-\mathrm{ra}+d)}^2-{(1\mathrm{obx}-1\mathrm{oax})}^2+{(1\mathrm{oby}-1\mathrm{oay})}^2}---...\left(8\right)$

Wherein, ra represents the paraxial radius-of-curvature of bearing plane 1a; Rb represents the paraxial radius-of-curvature of bearing plane 1b; D represents the lens wall thickness.

As the 3rd step, consider face top displacement and the paraxial center of curvature offset of the reverse side 1b of bearing plane, calculate the height zb from 1ob to 1tb on the z axle of Fig. 2 (a).Described height zb calculates according to 8 following formulas:

$\mathrm{Zb}=\sqrt{r{b}^2-{(1\mathrm{obx}-1\mathrm{tbx})}^2-{(1\mathrm{oby}-1\mathrm{tby})}^2}---...\left(9\right)$

In the step afterwards, be divided into the xz plane and the yz plane is calculated.Although, carry out the calculating on the xz plane earlier here as an example, carry out the calculating on yz plane then, this both can calculate the yz plane earlier just for convenience of description, also can alternately calculate xz plane and yz plane in each step.

As the 4th step, according to aspheric surface axle rbx and optical axis 1oax-1obx degree of tilt, the x composition of calculating aspheric surface off-centre with respect to the z axle on the xz plane.Shown in Fig. 3 (a), ε bx calculates according to following formula:

$\mathrm{\&epsiv;bx}={\tan }^{-1}\left(\frac{1\mathrm{tbx}-1\mathrm{obx}}{\mathrm{Zb}}\right)-{\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{obx}}{\mathrm{Zo}}\right)---...\left(10\right)$

As the 5th step,, calculate its length L bx on the xz plane, making vertical line to optical axis 1oax-1obx from aspheric surface face top 1tbx.Shown in Fig. 3 (a), Lbx calculates according to following formula:

Lbx＝rbx×sinεbx …(11)

Each step of the above-mentioned the 4th and the 5th also is applicable to the yz plane, makes vertical line from aspheric surface face top 1tby to optical axis 1oay-1oby on the yz plane, calculates its length L by, and shown in Fig. 3 (b), Lby calculates according to following formula:

Lby＝rby×sinεby …(12)

As the 6th step, calculate the degree of tilt of aspheric surface axle rb with respect to optical axis 1oa-1ob, i.e. aspheric surface offset ε b, ε b calculates according to following formula shown in Fig. 3 (a) and (b):

$\mathrm{\&epsiv;b}={\sin }^{-1}\left(\frac{\sqrt{\mathrm{Lb}{x}^2+\mathrm{<figure-callout\; id="2"\; label="Lb\; y"\; filenames="C0214907600451.png"\; state="\{\{state\}\}">Lb</figure-callout>}{y}^{}{}^2}}{\mathrm{rb}}\right)---...\left(13\right)$

Here, the branch subrepresentation on the following formula the right distance (amount of movement) of pushing up 1tb from optical axis 1oa-1ob to the aspheric surface face.

As the 7th step, calculate the eccentric direction θ b of aspheric surface axle rb with respect to optical axis 1oa-1ob.Shown in Fig. 3 (a) and (b), at a distance of Lby, at a distance of Lby, θ b calculates according to following formula in the y direction in the x direction with respect to optical axis aspheric surface face top:

$\mathrm{\&theta;b}={\tan }^{-1}\left(\frac{\mathrm{Lby}}{\mathrm{Lbx}}\right)---...\left(14\right)$

(effect B)

According to the foregoing description, even detected lens 1 single face aspheric surface also can correctly be obtained aspheric surface offset and the direction of the reverse side 1b of bearing plane with respect to optical axis 1oa-1ob.

More than Shuo Ming embodiment can implement according to following a plurality of variation, all can obtain and the same or more effect of the foregoing description.

(variation 1)

In Fig. 5, the schematic diagram of the eccentric determinator of aspheric surface of expression one variation.As shown in the figure, if detected measuring shape portion (displacement transducer portion) 6 be separately positioned on detected lens 1 about, so, needn't be inverted, can detect the tilt quantity and the direction of the aspheric surface axle of bearing plane 1a, aspheric surface offset that can the high-precision measuring top and bottom.

More particularly, in Fig. 5, the formation of the eccentric determinator 2 of aspheric surface comprises: detected lens bear portion 3, and rotation keeps detected lens 1 freely; Relay lens support member 4 is used to make detected lens to bear 3 rotations; Paraxial eccentric determination part 5 is used to detect the offset of the paraxial center of curvature of detected lens 1 two-sided 1a and 1b with respect to the rotating shaft 9 of relay lens support member 4; The 6a of detected measuring shape portion (displacement transducer portion), the aspheric surface axle of reverse side 1b that is used to detect the lens bearing plane is with respect to the pitch angle of rotating shaft 9; The 6b of detected measuring shape portion (displacement transducer portion), the aspheric surface axle of reverse side 1a that is used to detect the lens bearing plane is with respect to the pitch angle of rotating shaft 9; Corner determination part 7 is used to detect the corner of rotating shaft 9; Operational part 8, each measured value of the paraxial eccentric determination part 5 of computing, detected (displacement transducer portion) 6b of measuring shape portion and corner determination part 7.

Promptly, in variation 1, pitch angle for the two-sided aspheric surface axle of relevant detected lens of special detection respectively 1, by 2 determination parts of detected shape, that is: detected (displacement transducer portion) 6a of measuring shape portion and the 6b of detected measuring shape portion (displacement transducer portion) constitute, they be set at respectively detected lens 1 about.

In addition, detected lens bear contact site 3a, the 3b that portion 3 contacts with detected lens 1, with aforementioned the same, are processed to concentric substantially with respect to the rotating shaft 9 of relay lens support member 4.

Detected lens are set on relay lens support member 4 bear portion 3, lens bear the edge 3a of internal side diameter of upper surface of portion or the edge 3b of outside diameter bears detected lens 1 with being positioned at.Because it is concentric with respect to rotating shaft 9 that internal diameter edge 3a and external diameter edge 3b are processed to, so each edge 3a, 3b are centered close in the rotating shaft 9.

In addition, the line of representing with 10a is the detection axle of aspheric surface axle of the reverse side 1b of bearing plane; The line of representing with 10b is the detection axle of the aspheric surface axle of bearing plane 1a; The point of representing with 1oa is the paraxial center of curvature of the bearing plane side of detected lens 1; The point of representing with 10b is the paraxial center of curvature of reverse side of the bearing plane of detected lens 1.

Paraxial eccentric determination part 5 is provided in the top of detected lens 1 and its optical axis is coaxial with the rotating shaft of relay lens support member 4.

Although not shown in Fig. 5, with aforementioned the same, be provided with light source and optical system and imaging apparatus, and be used for light beam is divided into the light path switching device of light source and 2 directions of imaging apparatus in the inside of nearly eccentric determination part 5.The light beam that focuses in detected the paraxial center of curvature of detected lens 1 by optical system from the light beam irradiates of light source irradiation.Constituting of the optical system of paraxial eccentric determination part 5 inside: constitute the removable and switching of lens combination of an optical system part, the feasible beams focusing point that can shine according to detected curature variation.

From paraxial eccentric determination part 5 irradiations, return same light path by detected beam reflected, incide on the paraxial eccentric determination part 5, utilize the light path switching device refraction that is present in the light path, imaging on imaging apparatus is focused into punctiform image.Do not having fully on detected the paraxial center of curvature under the eccentric situation, making detected lens 1 rotate the reflected light of the light beam of irradiation on detected, can not produce swing a little yet while promptly use imaging apparatus to observe.

Exist with respect to rotating shaft under the eccentric situation detected the paraxial center of curvature, if observe this reflected light while rotate detected lens 1, so, available imaging apparatus observe a little be rotated in the offset radius corresponding in " swing ".

According to the direction that the rotation center of the radius of turn of described point and the point under the former dotted state of detected lens begins, can detect the offset and the eccentric direction of detected the paraxial center of curvature.Specifically, utilize signal input operational part 8 from paraxial eccentric determination part 5 and corner determination part 7, change in location on the imaging apparatus of angle variation in paraxial eccentric determination part 5 when detected the paraxial center of curvature is rotated with respect to detected lens 1 is measured, and detects the offset and the eccentric direction of detected the paraxial center of curvature.

Detected measuring shape portion (displacement transducer portion) 6a and 6b, detect along with detected 1b of the rotation of detected lens 1 or 1a at the displacement that detects axle 10b or 10a direction.In Fig. 5, though do not illustrate its formation, but, form by LASER Light Source and interference optics and optical fiber, light beam from the optical fiber exit end towards detected irradiation once more from optical fiber input on (displacement transducer portion) 6a of detected measuring shape portion or 6b, because change in displacement changes interference fringe.Obtain this change of interference fringes with photosensitive sensor, detect this displacement.

And, the mobile fulcrum of rotation that in the rotating shaft 9 of relay lens support member 4, has (displacement transducer portion) 6a of detected measuring shape portion and 6b, with it is the center, can be adjusted to make detect axle 10a or 10b consistent with the normal of detected measuring point of detected lens 1, the height of position of the fulcrum is along with detected lens 1 are mobile in rotating shaft 9.And detected (displacement transducer portion) 6a of measuring shape portion and 6b detect on axle 10 directions at it, also can be along with the alteration of form height of detected lens 1.

By from the signal of (displacement transducer portion) 6a, 6b of detected measuring shape portion and corner determination part 7 an input operational part 8, the detection axle 10a that the angle to respect to detected lens 1 rotation the time changes and the height change of 10b direction are measured.

Also have, in described variation 1, be illustrated although understand the relevant detected lens of forming by biconvex aspherical shape 1, still beyond any doubt, applicable too even if two-sided or single face is the detected lens of recessed aspheric surface or sphere.

In the eccentric determinator of deformation construction as mentioned above, if bearing the detected lens 1 of portion's 3 supports with detected lens when, feel relieved while using the detected lens 1 of relay lens support member 4 rotations, so, though the center of curvature 1oa at the bearing plane 1a of detected lens 1 is under the situation of sphere at bearing plane 1a, aligning is always on the axis of rotating shaft 9 in theory, but, at bearing plane 1a is under the aspheric situation, as shown in Figure 5, though the internal diameter edge 3a that bears portion 3 at lens is under the equidistant situation on face top, paraxial center of curvature 1oa is positioned in the rotating shaft 9, but under the invalid situation of this relation, paraxial center of curvature 1oa not necessarily is positioned on the axis of rotating shaft 9.

Make detected lens 1 rotation with relay lens support member 4 on one side, on one side the paraxial center of curvature 1ob of the reverse side 1b by paraxial eccentric determination part 5 detection bearing plane is with respect to the offset of rotating shaft 9, adjust the position (centering is adjusted) of detected lens 1, make the offset of the described paraxial center of curvature be roughly 0.During the centering is here adjusted, although needn't make nearly center of curvature 1ob consistent with rotating shaft 9, because when the offset of the paraxial center of curvature 1oa that measures bearing plane 1a, the more little accuracy of detection of offset of the paraxial center of curvature of the reverse side 1b of bearing plane is high more, so carry out consistent the adjustment.

On relay lens support member 4, connect corner determination part 7, utilize its value to set the sense of rotation benchmark of detected lens 1, measure the eccentric direction of the paraxial center of curvature.

After the roughly centering adjustment of the reverse side 1b of the bearing plane of detected lens 1 finishes, utilize the paraxial center of curvature 1oa of 5 couples of detected bearing plane 1a of paraxial eccentric determination part, as before, detection is with respect to the offset and the eccentric direction of the paraxial center of curvature of rotating shaft 9.But, under described situation, owing to observe the paraxial center of curvature 1oa of bearing plane 1a by the reverse side 1b of bearing plane, so must consider the offset of the paraxial center of curvature of face between paraxial eccentric determination part 5 and detected and the influence of direction, disclosed in the public clear 51-9620 communique of relevant its computing method such as spy, if the paraxial center of curvature offset at the face more forward than the face of the offset of measuring the paraxial center of curvature is known, can use two-sided paraxial curvature so, wall thickness, the design data of the detected lens of refractive index is calculated, and utilizes described method can calculate paraxial center of curvature offset δ a and the direction θ a of bearing plane 1a.

As mentioned above, use the output result of paraxial eccentric determination part 5 and corner determination part 7, be beneficial to offset δ a, δ b and eccentric direction θ a, the θ b of the paraxial center of curvature that operational part 8 can be calculated the reverse side 1b of bearing plane 1a and bearing plane.

As Fig. 2 (d) and (g),, can be converted into value on the xy plane be positioned at paraxial curvature sphere center position when rotating origin position when detected lens 1 according to the offset and the eccentric direction of the paraxial center of curvature.

The paraxial The curvature center of bearing plane 1a is represented with following formula shown in Fig. 2 (d):

X direction: 1oax=δ a * cos θ a ... (1)

Y direction: 1oay=δ a * sin θ a ... (2)

The paraxial The curvature center of the reverse side 1b of bearing plane is shown in Fig. 2 (g), and the conversion formula below using is obtained in operational part 8:

X direction: 1obx=δ b * cos θ b ... (3)

Y direction: 1oby=δ b * sin θ b ... (4)

Then, reverse side 1b according to the bearing plane of detected lens 1, make the angle of detection axle 10 of the 6a of displacement transducer portion consistent with the normal of detection faces 1b, the height of the direction of the detection axle 10 of the 6a of displacement transducer portion is also adjusted according to detected 1b of detected lens 1.Under described state, utilize relay lens support member 4 to make detected lens 1 rotation, output detects the height change of axle 10a direction, and the angle of utilizing 7 outputs of corner determination part to detect lens 1 changes, and both are input to operational part 8.

And, according to the bearing plane 1a of detected lens 1, make the angle of detection axle 10 of the 6b of displacement transducer portion consistent equally with the normal of detected 1a, also adjust the height of detection axle 10 directions of displacement transducer portion 6 according to the detected 1a of detected lens 1.Under described state, utilize the detected lens 1 of relay lens support member 4 rotations, output detects the variation of the direction height of axle 10b, utilizes the angle of the detected lens 1 of corner determination part 7 outputs to change, and both are input in the operational part 8.

In operational part 8, the detected value of (displacement transducer portion) 6a of detected measuring shape portion and 6b is transformed into the direction of the rotating shaft 9 of relay lens support member 4.

According to the shape and the position relation of angle position of the fulcrum and the detected lens 1 of the detection axle 10a of the 6a of detected measuring shape portion (displacement transducer portion), calculate ra ' as shown in Figure 5.Decompose the information of rotating shaft 9 directions by the information of described mensuration radius r a ' and corner determination part 7 with detected measuring shape portion (displacement transducer portion) 6 output, be converted into x, y, z coordinate three-dimensional coordinate data.The design formula of more described mensuration three-dimensional coordinate data and detected 1b.

Because at this moment detection axle 10 property of the 6a of detected measuring shape portion (displacement transducer portion) are for rotating shaft 9 cant angle theta a, so in order to compare with the design formula, must convert the displacement of rotor shaft direction to.

Suppose that by the determination data that aspheric surface axle determination part 6a obtains be ASPb (i), then the height with the comparison of design formula is that following formula calculates:

ASPb(i)×cosθa …(5)

Carry out for the point of ra ' in distance rotating shaft 9 under the situation of aspheric surface detection, the short transverse information that (5) formula of use is represented is separated into x, y with following formula and the design formula compares.Here, suppose that 7 pairs of each measuring points of corner determination part are output as θ rot (i).

x(i)＝ra′×cosθrot(i) …(6)

y(i)＝ra′×sinθrot(i)

Though the structure in Fig. 5 tilts for rotating shaft 9 for detecting axle 10a, but, even be 0 degree, promptly with respect under the parallel state of rotating shaft 9 at described degree of tilt θ a, constitute the detection axle 10a of detected measuring shape portion (displacement transducer portion) 6, same calculating is also set up.

The method of three-dimensional coordinate data and design formula is measured design formula top offset, the inclination of three-dimensional data at detected 1b as long as for example make as a comparison, and both are got final product at the difference minimum.The amount that provides with formula (1), (2) as the displacement substitution is the displacement of x direction and y direction fixedly, is the center with the sphere center position, makes in x direction and y direction, and in the displacement of z direction, detects the minimum state of both differences.

Make inverse if utilize to measure three-dimensional data tilt quantity and displacement, the aspheric surface face with respect to the reverse side 1b of the bearing plane of rotating shaft 9 then can obtained withstands on the amount of movement 1tb on the xy plane.As shown in Fig. 3 (a) and (b), suppose with the tilt quantity of calculating the x direction of obtaining to be that the tilt quantity of Abx, y direction is Aby; Then obtain aspheric surface face top displacement 1tby with following formula.

1tbx＝1oax+rb×sin?Abx …(7)

1tby＝1oay+rb×sin?Aby

Also have,, the reverse side 1b of bearing plane be described although here for the convenience on illustrating,, to detected measuring shape portion (displacement transducer portion) if the output of 6b also handle equally.

That is, suppose that with the determination data that aspheric surface axle determination part 6b obtains be ASPa (i), then the elevation information with the comparison of design formula becomes as follows:

ASPa(i)×cosθb …(5)’

Situation that aspheric surface repacking surveys is carried out in distance rotating shaft 9 for the point of rb ' under, with (5) ' the short transverse information separated represented of formula becomes x, y, with the comparison of design formula.

And if 7 pairs of each measuring points of hypothesis corner determination part are output as θ rot, then following formula is set up:

x(i)＝rb′×cosθrot(i) …(6)’

y(i)＝rb′×sinθrot(i)

The same with the reverse side 1b of bearing plane, relatively use (6) ' formula three-dimensional data and the design formula represented, obtain tilt quantity Aax, the Aay of x direction and y direction.

Shown in Fig. 6 (a) and (b), the displacement 1tax and the 1tay on aspheric surface face top obtain with following formula:

1tax＝1oax+ra×sin?Aax …(7)’

1tay＝1oay+ra×sin?Aay

Then, utilize operational part 8 to push up aspheric surface offset ε b and the direction θ ε b thereof that detected 1b calculated in the position according to the two-sided paraxial The curvature center of detected lens 1 and the face of detected 1b.

With figure (a) to (g) this calculation method is elaborated.

As the 1st step,, the paraxial center of curvature value 1ob of the reverse side 1b of the paraxial The curvature center 1oa of bearing plane 1a and bearing plane is resolved into x, y value respectively as Fig. 2 (d) and (g).Each numerical value is by obtaining to the same relational expression of (4) formula with (1).

As the 2nd step, consider two-sided paraxial center of curvature offset, calculate the height zo from 1oa to 1ob on the z axle of Fig. 2 (a).Height zo calculates according to following formula:

$\mathrm{Zo}=\sqrt{{(\mathrm{rb}-\mathrm{ra}+d)}^2-{(1\mathrm{obx}-1\mathrm{oax})}^2+{(1\mathrm{oby}-1\mathrm{oay})}^2}---...\left(8\right)$

Here, ra represents the paraxial radius-of-curvature of bearing plane 1a; Rb represents the paraxial radius-of-curvature of bearing plane 1b; D represents the lens wall thickness.

As the 3rd step, consider face top displacement and the paraxial center of curvature offset of the reverse side 1b of bearing plane, calculate the height zb from 1ob to 1tb on the z axle of Fig. 2 (a).Described height zb calculates according to following formula:

$\mathrm{Zb}=\sqrt{r{b}^2-{(1\mathrm{obx}-1\mathrm{tbx})}^2-{(1\mathrm{oby}-1\mathrm{tby})}^2}---...\left(9\right)$

In the step afterwards, be divided into the xz plane and the yz plane is calculated.Although, carry out the calculating on the xz plane earlier here as an example, carry out the calculating on yz plane then, this both can calculate the yz plane earlier just for convenience of description, also can alternately calculate xz plane and yz plane in each step.

As the 4th step,, calculate the x composition ε bx of aspheric surface eccentric shaft according to aspheric surface axle rbx and optical axis 1oax-1obx degree of tilt with respect to the z axle on the xz plane.Shown in Fig. 3 (a), ε bx calculates according to following formula:

$\mathrm{\&epsiv;bx}={\tan }^{-1}\left(\frac{1\mathrm{tbx}-1\mathrm{obx}}{\mathrm{Zb}}\right)-{\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{obx}}{\mathrm{Zo}}\right)---...\left(10\right)$

As the 5th step, on the xz plane, make vertical line to optical axis 1oax-1obx from aspheric surface face top 1tbx, calculate its length L bx.Shown in Fig. 3 (a), Lbx calculates according to following formula:

Lbx＝rbx×sinεbx …(11)

The the 4th and the 5th step also is applicable to the yz plane, makes vertical line from aspheric surface face top 1tby to optical axis 1oay-1oby on the yz plane, calculates its length L by.Shown in Fig. 3 (b), Lby calculates according to following formula:

Lby＝rby×sinεby …(12)

As step 6, calculate the degree of tilt of aspheric surface axle rb, i.e. aspheric surface offset ε b with respect to optical axis 1oa-1ob.ε b calculates according to following formula shown in Fig. 3 (a) and (b):

$\mathrm{\&epsiv;b}={\sin }^{-1}\left(\frac{\sqrt{\mathrm{Lb}{x}^2+\mathrm{<figure-callout\; id="2"\; label="Lb\; y"\; filenames="C0214907600451.png"\; state="\{\{state\}\}">Lb</figure-callout>}{y}^{}{}^2}}{\mathrm{rb}}\right)---...\left(13\right)$

Here, the branch subrepresentation on the following formula the right distance (displacement) of pushing up 1tb from optical axis 1oa-1ob to the aspheric surface face.

As the 7th step, calculate the eccentric direction θ b of aspheric surface axle rb with respect to optical axis 1oa-1ob.With respect to optical axis, the aspheric surface face pushes up shown in Fig. 3 (a) and (b), and at a distance of Lbx, the y direction is at a distance of Lby in the x direction, and θ b obtains with following formula:

$\mathrm{\&theta;b}={\tan }^{-1}\left(\frac{\mathrm{Lby}}{\mathrm{Lbx}}\right)---...\left(14\right)$

Utilize operational part 8 equally,, calculate aspheric surface offset ε a and the direction θ ε a thereof of bearing plane 1a according to the two-sided paraxial The curvature center of detected lens 1 and the position, face top of bearing plane 1a.With Fig. 2 (a) to (g) its calculation method is described.

As the 1st step,, the paraxial center of curvature value 1ob of the reverse side 1b of the paraxial curve rate center 1oa of bearing plane 1a and bearing plane is resolved into x, y value respectively as Fig. 2 (d) and (g).Each numerical value is by obtaining to the same formula of (4) formula with (1).

As the 2nd step, consider two-sided paraxial center of curvature offset, calculate height zo from the 1oa on the z axle of Fig. 2 (a) to 1ob.Described height zo calculates according to following formula:

$\mathrm{Zo}=\sqrt{{(\mathrm{rb}-\mathrm{ra}+d)}^2-{(1\mathrm{obx}-1\mathrm{oax})}^2+{(1\mathrm{oby}-1\mathrm{oay})}^2}---...{\left(8\right)}^{\&prime;}$

Here, ra represents the paraxial radius of bearing plane 1a; Rb represents the paraxial radius-of-curvature of bearing plane 1b; D represents the lens wall thickness.

(8) ' result of formula is because the zo of (8) when obtaining the aspheric surface offset of reverse side 1b of bearing plane with the front is identical, so be omitted.

As the 3rd step, consider the face top displacement of bearing plane 1a and the offset of the paraxial center of curvature, calculate the height za from 1oa to 1ta on the z axle of Fig. 2 (a).Described height za calculates according to following formula:

$\mathrm{Zb}=\sqrt{r{a}^2-{(1\mathrm{oax}-1\mathrm{tax})}^2-{(1\mathrm{oay}-1\mathrm{tay})}^2}---...{\left(9\right)}^{\&prime;}$

In the step afterwards, be divided into the zx plane and the yz plane is calculated.Although, carry out the calculating on the xz plane earlier here as an example, carry out the calculating on yz plane then, this both can calculate the yz plane earlier just for convenience of description, also can alternately calculate xz plane and yz plane in each step.

As the 4th step, according to aspheric surface axle rax and optical axis 1oax-1obx degree of tilt, the x composition ε ax that calculates aspheric surface off-centre with respect to the z axle on the xz plane.Shown in Fig. 6 (a), ε ax calculates according to following formula:

$\mathrm{\&epsiv;ax}={\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{oax}}{\mathrm{Za}}\right)-{\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{obx}}{\mathrm{Zo}}\right)---...{\left(10\right)}^{\&prime;}$

As the 5th step, on the xz plane, make vertical line to optical axis 1oax-1obx from aspheric surface face top 1tax, calculate its length L ax.Shown in figure (a), Lax calculates according to following formula:

Lax＝rax×sinεax …(11)’

The the 4th and the 5th step also is applicable to plane yz, makes vertical line from aspheric surface face top 1tay to optical axis 1oay-1oby on the yz plane, calculates its length L ay.Shown in Fig. 6 (b), Lay calculates according to following formula:

Lay＝ray×sinεay …(12)’

As the 6th step, calculate the degree of tilt of aspheric surface axle ra, i.e. aspheric surface offset ε a with respect to optical axis 1oa-1ob.ε a calculates according to following formula shown in Fig. 6 (a) and (b):

$\mathrm{\&epsiv;a}={\sin }^{-1}\left(\frac{\sqrt{\mathrm{La}{x}^2+\mathrm{<figure-callout\; id="2"\; label="La\; y"\; filenames="C0214907600451.png"\; state="\{\{state\}\}">La</figure-callout>}{y}^{}{}^2}}{\mathrm{ra}}\right)---...{\left(13\right)}^{\&prime;}$

Here, the branch subrepresentation on the following formula the right distance (displacement) of pushing up 1tb from optical axis 1oa-1ob to the aspheric surface face.

As the 7th step, calculate the eccentric direction θ a of aspheric surface axle ra with respect to optical axis 1oa-1ob.With respect to optical axis, the aspheric surface face pushes up shown in Fig. 6 (a) and (b), and at a distance of Lay, at a distance of Lay, θ a obtains with following formula in the y direction in the x direction:

$\mathrm{\&theta;a}={\tan }^{-1}\left(\frac{\mathrm{Lay}}{\mathrm{Lax}}\right)---...{\left(14\right)}^{\&prime;}$

Utilize above-mentioned steps, can correctly obtain aspheric surface offset and the direction of the aspheric surface 1ad of bearing plane 1a with respect to optical axis 1oa-1ob.

Like this according to variation 1, since with (displacement transducer portion) 6a of detected measuring shape portion and the 6b of detected measuring shape portion (displacement transducer portion) be separately positioned on detected lens 1 about, but the aspheric surface axle pitch angle difference that special detection is two-sided, so being inverted, detected lens can detect top and bottom aspheric surface offset separately, and, needn't end measurement operation in order to be inverted detected lens.

(variation 2)

The 1st embodiment also can carry out following distortion to be implemented, and obtain with its 1st embodiment mutually or better effect.

Fig. 7 is the schematic pie graph of the eccentric determinator of aspheric surface of the described variation of expression.

The formation of the eccentric determinator 2 of described aspheric surface comprises as shown in the figure: detected lens bearing plane 3, and rotation keeps detected lens 1 freely; Relay lens support member 4, the detected lens that are used to rotate with shown in the vertical cross-section bear portion 3; Paraxial eccentric determination part 5a, the paraxial center of curvature of reverse side 1b of bearing plane that is used to detect detected lens 1 is with respect to the offset with the rotating shaft 9 of the relay lens support member 4 of vertical cross-section diagram; Paraxial eccentric determination part 5b, the paraxial center of curvature of bearing plane 1a that is used to detect detected lens 1 is with respect to the offset of the rotating shaft 9 of relay lens support member 4; Detected measuring shape portion (displacement transducer portion) 6, the aspheric surface axle of reverse side 1b that is used to detect the lens bearing plane is with respect to the pitch angle of rotating shaft 9; Corner determination part 7 is used to detect the corner of rotating shaft 9; Operational part 8, each measured value of paraxial eccentric determination part 5a that computing is above-mentioned and 5b, detected (displacement transducer portion) 6 of measuring shape portion and corner determination part 7.

That is, in variation 2,, constitute paraxial eccentric determination part 5a and paraxial eccentric determination part 5b specially respectively for the offset of the two-sided paraxial center of curvature that detects detected lens 1, they be separately positioned on detected lens 1 about.

In addition, with aforementioned the same, detected lens bear portion 3 and contact site 3a, 3b that detected lens 1 contact, are processed to roughly concentric with respect to the rotating shaft 9 of relay lens support member 4.Relay lens support member 4 also is processed to roughly concentric with respect to rotating shaft 9

Detected lens are set on relay lens support member 4 bear portion 3, lens bear the edge 3a of internal side diameter of portion upper surface or the edge 3b of outside diameter bears detected lens 1 with being positioned at.Internal diameter edge 3a and external diameter edge 3b are processed to concentric with respect to rotating shaft 9, so the center of each edge 3a, 3b is present in the rotating shaft 9.

In addition, with the axis shown in the 10a be the detection axle of aspheric surface axle of the reverse side 1b of bearing plane; With the axis shown in the 10b is the detection axle of the aspheric surface axle of bearing plane 1a.With the point shown in the 1oa is the paraxial center of curvature of the bearing plane side of detected lens 1; The point of representing with 1ob is the paraxial center of curvature of reverse side of the bearing plane of detected lens 1.

Paraxial eccentric determination part 5a is arranged on above the detected lens 1, and its optical axis is coaxial with the rotating shaft 9 of relay lens support member 4, equally, paraxial eccentric determination part 5b be arranged on detected lens 1 below, and its optical axis is coaxial with the rotating shaft 9 of relay lens support member 4.

Illustrated in vertical cross-section, relay lens support member 4 also forms to hollow near the central portion the rotating shaft, the feasible mensuration light beam that does not block paraxial eccentric determination part 5b as shown in the figure.

Corner determination part 7 is configured to not block the mensuration light beam of paraxial eccentric determination part 5b, although not shown, by utilizing belt and power wheel the corner of relay lens support member 4 is passed to corner determination part 7, detects the corner of relay lens support member 4.

Although not shown in Fig. 7, be provided with light source and optical system and imaging apparatus in the inside of paraxial eccentric determination part 5a and 5b, and light beam be divided into the light path switching device of light source and two directions of imaging apparatus.The light beam that focuses in detected the paraxial center of curvature of detected lens 1 by optical system from the light beam irradiates of light source irradiation.The internal optics system of paraxial eccentric determination part 5a and 5b can constitute: move and switch lens combination as the part of optical system, make according to the beams focusing point of detected curvature irradiation variable.

From paraxial eccentric determination part 5a and 5b irradiation, turn back to same light path with each detected beam reflected, incide paraxial eccentric determination part 5a and 5b, utilize the light path switching device refraction that in light path, exists, imaging on imaging apparatus is focused into punctiform image.Under detected situation fully without acceptance of persons, even while rotate the reflected light that detected lens 1 usefulness imaging apparatus is observed the light beam that is radiated at detected, point does not produce swing yet.

Have under the eccentric situation at detected paraxial center of curvature phase countershaft, observe this reflected light if detected lens 1 are rotated on one side, then available imaging apparatus observe a little be rotated in the offset radius corresponding in " swing ".

According to the direction that the rotation center of the radius of described some rotation and the point under the former dotted state of detected lens begins, can detect the offset and the eccentric direction of detected the paraxial center of curvature.

Specifically, by the signal input operational part 8 of handle from the corner determination part 7 of paraxial eccentric determination part 5a and 5b, change in location on the imaging apparatus of angle variation in paraxial eccentric determination part 5a and 5b when detected the paraxial center of curvature is rotated with respect to detected lens 1 is measured, and detects the offset and the eccentric direction of each paraxial center of curvature of detected.Detected measuring shape (displacement transducer) 6 detects the displacement in the direction that detects axle 10a along with detected 1b of the rotation of detected lens 1.

And, not shown its formation in Fig. 7, but paraxial eccentric determination part is made up of LASER Light Source and interference optics and optical fiber, from optical fiber penetrate end face be radiated on detected light beam once more from optical fiber input to detected measuring shape portion (displacement transducer portion) 6, variation interference fringe according to displacement changes, and detects displacement with being subjected to optical sensor to obtain this change of interference fringes.

And, the mobile fulcrum of rotation that in the rotating shaft 9 of relay lens support member 4, has detected measuring shape portion (displacement transducer portion) 6, can it adjust for the center, make detection axle 10 consistent with the normal of detected measuring point of detected lens 1, the height of position of the fulcrum is along with detected lens 1 move in rotating shaft 9.And detected measuring shape portion (displacement transducer portion) 6 also can be along with the alteration of form height of detected lens 1 on the direction that detects axle 10.

By from the signal of (displacement transducer portion) 6 of detection faces measuring shape portion and corner determination part 7 an input operational part 8, the height change of the direction of the detection axle 10 that can the angle to respect to detected lens 1 rotation the time changes is measured.

In addition, in described variation 2, though just relevantly be illustrated by the two-sided tested lens 1 that constitute for the aspherical shape of convex surface, even it is two-sided or single face is recessed aspheric surface or the detected lens of sphere, applicable too.

As mentioned above, in the eccentric determinator of the aspheric surface of deformation construction, if bearing the detected lens 1 of portion's 3 supports with detected lens when, while using the detected lens 1 of the relay lens support member 4 rotation aligning of feeling relieved, so, the center of curvature 1oa of the bearing plane 1a of detected lens 1 is under the situation of sphere at bearing plane 1a, always be centered on the axis of rotating shaft 9 in theory, but, at bearing plane 1a is under the aspheric situation, as shown in Figure 1, though at the support point 3b of the portion of bearing 3 under the equidistant situation on the face top of bearing plane 1a, paraxial center of curvature 1oa in rotating shaft 9,, concern that at this under invalid situation, paraxial center of curvature 1oa not necessarily is positioned on the axis of rotating shaft 9.

Make detected lens 1 rotation with relay lens support member 4 on one side, on one side the nearly center of curvature 1ob of the reverse side 1b by paraxial eccentric determination part 5a detection bearing plane is with respect to the offset of rotating shaft 9, adjust the position of (centering is adjusted) detected lens 1, make the offset of the described paraxial center of curvature be approximately 0.During the centering is here adjusted, though needn't strictly make paraxial center of curvature 1ob consistent with rotating shaft 9, but, because the more little accuracy of detection of offset of the paraxial center of curvature of the reverse side 1b of bearing plane is high more when the offset of the nearly center of curvature 1oa that measures bearing plane 1a, therefore carries out consistent the adjustment.

On relay lens support member 4, connect corner determination part 7,, measure the eccentric direction of the paraxial center of curvature utilizing its value to set the sense of rotation benchmark of detected lens 1.After the adjustment of centering substantially of the reverse side 1b of the bearing plane of detected lens 1, the paraxial center of curvature 1oa to the bearing plane 1a of detected lens 1 detects its offset and eccentric direction with respect to rotating shaft 9 as before by paraxial eccentric determination part 5b.

As mentioned above, use the output result of paraxial eccentric determination part 5a and 5b and corner determination part 7, can calculate offset δ a, δ b and eccentric direction θ a, the θ b of the paraxial center of curvature of the reverse side 1b of bearing plane 1a and bearing plane with operational part 8.

As Fig. 2 (d), (g), the paraxial curvature sphere center position in the time of detected lens 1 can being positioned at the rotation origin position according to the offset of the paraxial center of curvature and eccentric direction is converted into the value on the xy plane.

The paraxial The curvature center of bearing plane 1a is represented with following formula shown in Fig. 2 (d):

X direction: 1oax=δ a * cos θ a ... (1)

Y direction: 1oay=δ a * sin θ b ... (2)

The paraxial The curvature center of the reverse side 1b of bearing plane is shown in Fig. 2 (g), and the conversion formula below using is obtained in operational part 8:

X direction: 1obx=δ b * cos θ b ... (3)

Y direction: 1oby=δ b * sin θ b ... (4)

Then, reverse side 1b according to the bearing plane of detected lens 1, make the angle of detection axle 10 of displacement transducer 6 consistent with the normal of detected 1b, also adjust the height of detection axle 10 directions of displacement transducer portion 6 according to detected 1b of detected lens 1, under this state, utilize the detected lens 1 of relay lens support member 4 rotations, output detects the direction height change of axle 10a, and the angle variation by the detected lens 1 of corner determination part 7 outputs is input to operational part 8 with both.

In operational part 8, the detected value of detected measuring shape portion (displacement transducer portion) 6 is converted to the direction of the rotating shaft 9 of relay lens support member 4.

According to the angle position of the fulcrum of the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6 with detect the shape and the position relation of lens 1, calculate mensuration radius r as shown in Figure 7.Decompose the information of rotating shaft 9 directions by the information of described mensuration radius r and corner determination part 7 with detected measuring shape portion (displacement transducer portion) 6 output, be converted into the three-dimensional data of x, y, z coordinate.The design formula of more described mensuration three-dimensional coordinate data and detected 1b.

At this moment, because the detection axle 10 of detected measuring shape portion (displacement transducer portion) 6 is with respect to rotating shaft 9 cant angle theta a, so, must convert the displacement of rotor shaft direction in order to carry out the comparison with the design formula.

If hypothesis is ASPb (i) according to the determination data that aspheric surface axle determination part 6 obtains, then the elevation information with the comparison of design formula is that following formula calculates:

ASPb(i)×cosθ …(5)

Carry out for the point of r in distance rotating shaft 9 under the situation of aspheric surface repacking survey, be separated into x, y, z and design formula relatively the short transverse information of representing with (5) formula and by following formula.Here, suppose that 7 pairs of each measuring points of corner determination part are output as θ rot (i), then:

x(i)＝r×cosθrot(i) …(6)

y(i)＝r×sinθrot(i)

Though in Fig. 7, detect axle 10 and tilt with respect to rotating shaft 9,, even be 0 degree, that is, under the parallel state of rotating shaft 9, constitute the detection axle 10 of portion of detected measuring shape portion (displacement transducer) 6 at described degree of tilt θ, same calculating is also set up.

As three-dimensional coordinate data and design formula method relatively, for example, on the design formula of detection faces 1b, make and measure three-dimensional data displacement, inclination, make both difference minimums measure three-dimensional data and get final product.As the amount that the displacement substitution provides with formula (1), (2), the fixedly displacement of x direction and y direction is the center with the sphere center position, tilts in x direction and y direction, and at z direction top offset, detects the minimum state of both differences.

If carry out inverse according to measuring three-dimensional data tilt quantity and displacement, the aspheric surface face that then can obtain the reverse side 1b of bearing plane pushes up with respect to the amount of movement 1tb of rotating shaft 9 on the xy plane.Shown in Fig. 2 (e), the x side vector of supposing amount of movement 1tb is that the amount of 1tbx, y direction is 1tby.The tilt quantity of supposing the x direction is that the tilt quantity of Abx, y direction is Aby, then can obtain the displacement 1tbx and the 1tby on aspheric surface face top with following formula:

1tbx＝1oax+rb×sin?Abx …(7)

1tby＝1oay+rb×sin?Aby

Then, utilize operational part 8, push up aspheric surface offset ε b and the direction θ ε b thereof that detected 1b calculated in the position by the two-sided paraxial The curvature center of detected lens 1 and the face of detected 1b.

With Fig. 2 (a) to (g) this operational method is described.

As the 1st step,, the paraxial center of curvature value 1ob of the reverse side 1b of the paraxial The curvature center 1oa of bearing plane 1a and bearing plane is resolved into x, y value as Fig. 2 (d) and (g).Each numerical value is by obtaining with the same formula of (1) to (4) formula.

As the 2nd step, consider two-sided paraxial center of curvature offset, calculate the height zo from 1oa to 1ob on the z axle of Fig. 2 (a).Height zo calculates according to following formula:

$\mathrm{Zo}=\sqrt{{(\mathrm{rb}-\mathrm{ra}+d)}^2-{(1\mathrm{obx}-1\mathrm{oax})}^2+{(1\mathrm{oby}-1\mathrm{oay})}^2}---...\left(8\right)$

Here, ra is the paraxial radius-of-curvature of bearing plane 1a; Rb is the paraxial radius-of-curvature of bearing plane 1b; D is the lens wall thickness.

As the 3rd step, the face top displacement of the reverse side 1b of consideration bearing plane and the offset of the paraxial center of curvature are calculated the height zb from the 1ob on the z axle of Fig. 2 (a) to 1ob.Described height zb calculates according to following formula:

$\mathrm{Zb}=\sqrt{r{b}^2-{(1\mathrm{obx}-1\mathrm{tbx})}^2-{(1\mathrm{oby}-1\mathrm{tby})}^2}---...\left(9\right)$

In the step afterwards, can be divided into the xz plane and the yz plane is calculated.Although, carry out the calculating on the xz plane earlier here as an example, carry out the calculating on yz plane then, this both can calculate the yz plane earlier just for convenience of description, also can alternately calculate xz plane and yz plane in each step.

As the 4th step,, calculate the x composition ε bx of aspheric surface eccentric shaft according to aspheric surface axle rbx and optical axis 1oax-1obx degree of tilt with respect to the z axle on the xz plane.Shown in Fig. 3 (a), ε bx calculates according to following formula:

$\mathrm{\&epsiv;bx}={\tan }^{-1}\left(\frac{1\mathrm{tbx}-1\mathrm{obx}}{\mathrm{Zb}}\right)-{\tan }^{-1}\left(\frac{1\mathrm{tax}-1\mathrm{obx}}{\mathrm{Zo}}\right)---...\left(10\right)$

As the 5th step, on the xz plane, make vertical line to optical axis 1oax-1obx from aspheric surface face top 1tbx, calculate its length L by.Shown in Fig. 3 (a), Lby calculates according to following formula:

Lbx＝rbx×sinεbx …(11)

The the 4th and the 5th step also is applicable to the yz plane, makes vertical line from aspheric surface face top 1tby to optical axis 1oay-1oby on the yz plane, calculates its length L by.Shown in Fig. 3 (b), Lby calculates according to following formula:

Lby＝rby×sinεby …(12)

As the 6th step, calculate the degree of tilt of aspheric surface axle rb with respect to optical axis 1oa-1ob, that is, and aspheric surface offset ε b.ε b calculates according to following formula shown in Fig. 3 (a) and (b):

$\mathrm{\&epsiv;b}={\sin }^{-1}\left(\frac{\sqrt{\mathrm{Lb}{x}^2+\mathrm{<figure-callout\; id="2"\; label="Lb\; y"\; filenames="C0214907600451.png"\; state="\{\{state\}\}">Lb</figure-callout>}{y}^{}{}^2}}{\mathrm{rb}}\right)---...\left(13\right)$

Here, the branch subrepresentation on the following formula the right distance (displacement) of pushing up 1tb from optical axis 1oa-1ob to the aspheric surface face.

As the 7th step, calculate the eccentric direction θ b of aspheric surface axle rb with respect to optical axis 1oa-1ob.With respect to optical axis, the aspheric surface face pushes up shown in Fig. 3 (a) and (b), and at a distance of Lbx, at a distance of Lby, θ b obtains with following formula in the y direction in the x direction:

$\mathrm{\&theta;b}={\tan }^{-1}\left(\frac{\mathrm{Lby}}{\mathrm{Lbx}}\right)---...\left(14\right)$

Utilize above-mentioned steps can correctly obtain aspheric surface offset and the direction of the reverse side 1b of bearing plane with respect to optical axis 1oa-1ob.

Carry out similar detection and computing if make detected lens 1 bear portion's 3 turned upside down settings, can correctly obtain the aspheric surface offset ε a and the direction θ a thereof of the reverse side of the above-mentioned face of obtaining so at detected lens.

Like this according to variation 2, owing to paraxial eccentric determination part 5a and paraxial eccentric determination part 5b exclusively be set up and down respectively at detected lens 1, so can not make the reverse side 1b of the light of mensuration usefulness by the bearing plane 1a of detected lens 1, owing to can detect the offset and the direction of the paraxial center of curvature of this bearing plane 1a, so, the paraxial center of curvature can be obtained accurately, the aspheric surface offset can be measured accurately.

In addition, can carry out various distortion without departing from the spirit and scope of the present invention implements.

More than, although illustrate according to embodiment and variation thereof,, comprise following invention in this manual:

(1) can provide the eccentric determinator of aspheric surface of claim 1, it is characterized in that not only two-sided at described detected lens is under the aspheric situation, and be under the situation of aspheric surface or sphere, can measure too at two-sided or single face.

(2) can provide the eccentric determinator of aspheric surface of claim 1, it is characterized in that not only two-sided at described detected lens is under the aspheric situation of convex, and be under the situation of concavity aspheric surface or sphere, can measure too at two-sided or single face.

As mentioned above, according to the present invention, can provide easily a kind of and measure the aspheric surface offset of non-spherical lens accurately and the assay method and the determinator of direction.

Claims (7)

1. the eccentric determinator of an aspheric surface, be provided with: lens bear portion, are used to keep detected lens; The relay lens support member, rotation constitutes described lens freely and bears portion; Paraxial eccentric determinator detects the offset and the direction of the paraxial center of curvature of detected lens; Detected shape measuring apparatus detects detected shape of described detected lens; The corner determinator detects the corner of described detected lens; It is characterized in that the eccentric determinator of aspheric surface has:

Paraxial eccentric determinator is used to detect offset and the direction of the two-sided paraxial center of curvature of described detected lens with respect to the rotating shaft of described relay lens support member;

Arithmetic unit, make described detected lens rotation, compare measure the data that obtain and detected design formula with described detected shape measuring apparatus, obtain minimum relative shift and the tilt quantity of both differences, calculate position according to described displacement and tilt quantity with respect to detected face top of described rotating shaft, according to described position, top with offset and the direction of the two-sided paraxial center of curvature of the described detected lens of described paraxial eccentric determinator mensuration, calculate tilt quantity and the direction of aspheric surface axle with respect to described detected lens axis with respect to described rotating shaft.

2. the eccentric determinator of aspheric surface according to claim 1 is characterized in that, described detected shape measuring apparatus be by constituting near 2 detected measuring shape portions that are provided with respectively described detected lens two-sided,

They detect detected the two-sided shape of described non-spherical lens respectively independently.

3. the eccentric determinator of aspheric surface according to claim 1 and 2, it is characterized in that, described paraxial eccentric determinator is made up of the paraxial eccentric determination part of 2 special uses that the vertical direction up and down at described detected lens is provided with respectively, simultaneously, it constitutes the reverse side that makes mensuration not see through the bearing plane of described detected lens with light.

4. the eccentric determinator of aspheric surface according to claim 3 is characterized in that described relay lens support member is processed to described rotating shaft concentric.

5. the eccentric assay method of the aspheric surface of the non-spherical lens of the eccentric determinator of an aspheric surface, wherein the eccentric determinator of this aspheric surface is provided with: lens bear portion, are used to keep detected lens; The relay lens support member, rotation constitutes described lens freely and bears portion; Paraxial eccentric determinator detects the offset and the direction of the paraxial center of curvature of detected lens; Detected shape measuring apparatus detects detected shape of described detected lens; The corner determinator detects the corner of described detected lens; It is characterized in that the eccentric assay method of this aspheric surface has following operation:

The paraxial center of curvature detects operation, utilizes described paraxial eccentric determinator to detect offset and the direction of the two-sided paraxial center of curvature of detected lens with respect to the rotating shaft of relay lens support member;

The measuring shape operation makes detected lens rotation, utilizes described detected shape measuring apparatus to measure described detected shape;

First operational process compares detected the shape measuring and the design formula of regulation, obtains and makes minimum relative shift and the tilt quantity of both differences, calculates position, face top with respect to detected shape of described rotating shaft according to described displacement and tilt quantity; And

Second operational process, according to offset and direction and described the top position of the two-sided paraxial center of curvature of described detected lens, calculate tilt quantity and the direction of the aspheric surface axle of the joint face position, top and the aspheric paraxial center of curvature that comprises described top with respect to the optical axis that is connected the two-sided paraxial center of curvature of described detected lens with respect to described rotating shaft.

6. aspheric surface eccentric detection method according to claim 5, it is characterized in that, after in second operational process, calculating first aspheric surface offset of described detected lens, described detected lens are inverted, are repeated all process steps to calculate second aspheric surface offset of described detected lens.

7. aspheric surface eccentric detection method according to claim 5, it is characterized in that, after in second operational process, calculating the tilt quantity and direction of optical axis of first aspheric surface axle of the described detected lens paraxial center of curvature two-sided with being connected described detected lens, described detected lens are inverted, are repeated tilt quantity and the direction of all process steps with the optical axis of second the aspheric surface axle that the calculates described detected lens paraxial center of curvature two-sided with being connected described detected lens.

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