CN1274839A - Lens evaluation method and device, optical unit and lens-adjusting method and device thereof - Google Patents

Lens evaluation method and device, optical unit and lens-adjusting method and device thereof Download PDF

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Publication number
CN1274839A
CN1274839A CN00106255.7A CN00106255A CN1274839A CN 1274839 A CN1274839 A CN 1274839A CN 00106255 A CN00106255 A CN 00106255A CN 1274839 A CN1274839 A CN 1274839A
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mentioned
light
diffraction
lens
phase
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CN100390519C (en
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高田和政
中城正裕
西井完治
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Priority claimed from JP13858499A external-priority patent/JP3667149B2/en
Priority claimed from JP28786899A external-priority patent/JP3574765B2/en
Priority claimed from JP28786599A external-priority patent/JP3989656B2/en
Priority claimed from JP29818499A external-priority patent/JP3574767B2/en
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Lenses (AREA)

Abstract

A lens evaluation method includes diffracting light derived from a lens so that two diffracted rays of different orders (e.g., a 0th-order diffracted ray and a +1st-order diffracted ray) interfere with each other, thereby obtaining a shearing interference figure, and changing phases of the diffracted rays. The method also includes in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics (defocus amount, coma, astigmatism and a higher-order aberration) of the lens based on the phases.

Description

The method of adjustment of the evaluation method of lens and device thereof, optical unit and lens and device
The present invention relates to a kind of information storage medium that detects in the CD mode, go up the optical lens of reading writing information or imaging and form the method for characteristic of optical lens of hot spot and the device and method of device and the above-mentioned optical lens of adjustment thereof on laser machine and laser microscope etc. as DVD (DigitalVersatile Disk).The invention still further relates to the method for adjustment and method of adjustment and the device such as on the information storage medium of CD mode the optical unit of reading writing information relevant of optical unit with this method.
For the high-density information storage media from the CD mode read information or on this high-density information storage media canned data, must have can correctly be radiated at the target part to the light that penetrates from light source optical system completely.For this reason, especially optical system object lens completely not only require that to himself tight optical characteristics is arranged, and also must be fixed on the target location accurately.
So, as shown in Figure 1, can consider (the rocking method) such as inclinations of adjustment object lens 1 as method the inspection or the adjustment of object lens, make the light (for example laser) 2 that penetrates by object lens 1 be radiated on the basis of reference 3 (for example CD) of lens inspection usefulness, detect the reflected light of basis of reference 3 since then, compare with reference signal 5 detecting resulting regenerated signal 4 thus, make phasic difference 6 minimums between these regenerated signals 4 and the reference signal 5 or this phasic difference is controlled within the allowable value of regulation.
But, the characteristic of general object lens 1 is different separately, do not have certain relation between the tilt quantity of object lens 1 etc. and phasic difference 6, as shown in Figure 2, an object lens 1A might show significantly different characteristic (lens tilt angle one phasic difference characteristic) with another object lens 1B.Also have, must carry out repeatedly the tilt adjustments of object lens and the contrast of signal are difficult to judge objectively in which stage and finish adjustment.And, in regenerated signal 4, contain and be useful on the intrinsic characteristic of the circuit that obtains this regenerated signal etc., therefore, may not from fully hold at regenerated signal 4 object lens 1 inclination etc.
Also have, as shown in Figure 3, can consider that such method (light intensity determination method) rocks the method for method as replacement, light 12 optically focused of object lens 11 have been seen through on photography element (CCD) 14 by 13 of magnifying optics systems that comprise lens and catoptron etc., photography element 14 collected bundle spots (with reference to Fig. 4 (A), (B)) thus are presented on the signal processing apparatus 15 etc., observe the light intensity (strong and weak style) (with reference to Fig. 4 (A)) that is displayed on the bundle spot on this signal processing apparatus 15 and check or adjust the inclination etc. of object lens 11.In addition, Fig. 4 (A) expression is displayed on the bundle spot of adjusting on the preceding signal processing apparatus 15 16 and is formed at its strong and weak style 17 on every side, and Fig. 4 (B) expression is displayed on the bundle spot 18 of the strong and weak style of nothing on the adjusted signal processing apparatus 15.
But this light intensity determination method only is according to the inclination that detects object lens 11 etc. with the intensity information, therefore, can't carry out meticulous adjustment, such as the adjustment of the wavelength degree that can't carry out light 12.Also have, the sensory characteristic of photography element 14 is different because of the position, and therefore, photography element 14 is accepted light 12 at diverse location can cause producing different testing results.Also have, the displacement of the focus of bundle spot 18 produces very big influence to testing result.Also have, because of using magnifying optics system 13, when adjusting the pitch angle of object lens 11, bundle spot 18 can depart from photography element 14, might cause estimating the achievement of adjustment.Also have, therefore the light intensity that visually reads bundle spot 16 owing to the people, causes check result to vary with each individual easily.
So, the object of the present invention is to provide a kind of above-mentioned new evaluation method of method and light intensity determination method, the evaluating apparatus of lens, the adjusting gear of lens and method of adjustment of lens of rocking that replace to lens.
Another object of the present invention provides a kind of method of adjustment and device of optical unit of the adjustment that can carry out optical unit at short notice.
The present invention also aims to provide a kind of local deformation of lens that can not be subjected to influence correct mensuration spherical aberration or the lens evaluation method that defocuses and the evaluating apparatus of lens.
To achieve these goals, the evaluation method of a kind of lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make operation that 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, operation that (b) changes the position phase of above-mentioned diffraction light, (c) the position phase of a plurality of measuring points acquisition intensity variation on the mensuration line of the mid point of the line segment of the optical axis by above-mentioned 2 diffraction lights of connection above-mentioned shared interference resembles and (d) obtain the operation of the characteristic of said lens mutually according to last rheme.
The evaluation method of another kind of lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the characteristic of lens with the coefficient value of this function.
In the lens evaluation method of the invention described above, it is characterized in that making the shared interference of above-mentioned 2 diffraction lights to resemble and pass said lens.
The evaluation method of another lens of the present invention, it is characterized in that having (a) and on object lens, assemble the light that penetrates from light source, this light of having assembled is projected on the reflection-type diffraction grating, make from 2 diffraction lights of the different number of times of this reflection-type diffraction grating reflection and on above-mentioned object lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and changes the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the operation of the position phase of acquisition intensity variation and (d) obtain the operation of the characteristic of said lens mutually according to last rheme.
The evaluation method of another lens of the present invention is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the reflection-type diffraction grating, make from 2 diffraction lights of the different number of times of this reflection-type diffraction grating reflection and on above-mentioned object lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the optical characteristics of above-mentioned object lens with the coefficient value of this function.
The evaluation method of another lens of the present invention is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the transmission-type diffraction grating, make 2 diffraction lights of the different number of times that seen through this transmission-type diffraction grating on lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) operation and (d) that obtains the position phase of intensity variation in above-mentioned shared interference resembles on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights obtains the operation of the characteristic of above-mentioned object lens mutually according to last rheme.
The evaluation method of another lens of the present invention is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the transmission-type diffraction grating, make 2 diffraction lights of the different number of times that seen through this transmission-type diffraction grating on lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the optical characteristics of above-mentioned object lens with the coefficient value of this function.
In the lens evaluation method of the invention described above, it is characterized in that above-mentioned 2 diffraction lights are any in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light.
In the lens evaluation method of the invention described above, the optical characteristics that it is characterized in that above-mentioned evaluation is in the aberration outside defocus amount, comatic aberration, spherical aberration, astigmatism and these aberrations.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is rheme phase Y and estimate the operation of above-mentioned optical system defocus amount completely with 1 time coefficient value of this approximating function on the approximation of function more than 1 time with 1 function of the X that locates or number of times during mutually for Y.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the vertical halving line of the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is approached rheme phase Y with the quadratic function of the X that locates during mutually for Y and with the operation of the quadratic coefficients value evaluation comatic aberration of this quadratic function.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and with respect to this line segment on a plurality of measuring points on 2 oblique lines that become predetermined angular on positive dirction and the negative direction, obtain the operation of the position of the intensity variation on this measuring point phase with (d) suppose that said determination point position is X on 2 oblique lines separately above-mentioned, last rheme is approached rheme phase Y with the quadratic function of the X that locates or cubic function during mutually for Y and with the operation of the quadratic coefficients value evaluation comatic aberration of this quadratic function or cubic function.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the vertical bisecting line of the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and a plurality of measuring points on 2 oblique lines that become predetermined angular with respect to this line segment in positive direction with negative direction obtain the operation of position phase of the intensity variation on this measuring point and (d) be used in above-mentioned vertical bisecting line hypothesis said determination point position be X and upper rheme use during mutually for Y the quadratic function of the X that locates or quadratic coefficients value that cubic function approaches resulting this quadratic function of upper rheme phase Y or cubic function with suppose at above-mentioned separately 2 oblique lines said determination point position be X and on rheme use the operation of the difference evaluation comatic aberration of the locate quadratic function of X or the quadratic coefficients value that cubic function approaches resulting this quadratic function of rheme phase Y or cubic function during mutually for Y.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) make above-mentioned shared operation of interfering the shared direction rotation of elephant, (c) mobile diffraction grating and change the operation of the position phase of above-mentioned diffraction light, (d) in above-mentioned shared interference resembles, on a plurality of measuring points on the vertical halving line of the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (e) supposing that said determination point position is X, last rheme is rheme phase Y and estimate the operation of above-mentioned optical system astigmatism completely with 1 time coefficient value of this function on the approximation of function more than 1 time with 1 function of the X that locates or number of times during mutually for Y.
In above-mentioned lens evaluation method, it is characterized in that making the operation of above-mentioned shared direction rotation to comprise the operation of above-mentioned diffraction grating rotation predetermined angular.
In above-mentioned lens evaluation method, it is characterized in that making the operation of above-mentioned shared direction rotation to comprise the operation of said lens rotation predetermined angular.
In above-mentioned lens evaluation method, the operation that it is characterized in that making the operation of above-mentioned shared direction rotation to have being used in the 1st diffraction grating diffraction light that has formed the grating groove on the 1st direction be used in the direction different with above-mentioned the 1st direction on formed the operation of the 2nd diffraction grating diffraction light of grating groove.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is approached rheme phase Y with the cubic function of the X that locates or biquadratic function during mutually for Y and is estimated the operation of above-mentioned optical system spherical aberration completely with three times coefficient value of this cubic function or biquadratic function.
The evaluation method of another lens of the present invention, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light; (b) operation of the position phase of the above-mentioned diffraction light of change; (c) in above-mentioned shared interference resembles,
On a plurality of the 1st measuring points on the line segment of the optical axis that connects above-mentioned 2 diffraction lights, obtain the intensity variation on the 1st measuring point the 1st phase,
On a plurality of the 2nd measuring points on the vertical halving line of above-mentioned line segment, obtain the intensity variation on the 2nd measuring point the 2nd phase,
The mid point by above-mentioned line segment and with respect to this line segment on a plurality of the 3rd measuring points on the 3rd oblique line that becomes predetermined angular on the positive dirction, obtain the intensity variation on the 3rd measuring point the 3rd phase,
At the mid point by above-mentioned line segment and on a plurality of the 4th measuring points on the 4th oblique line that becomes predetermined angular on the negative direction, obtain the operation of the 4th phase of the intensity variation on the 4th measuring point with respect to this line segment; (d) be changed to X and above-mentioned the 1st in above-mentioned the 1st spotting of hypothesis and approach above-mentioned the 1st phase Y with the 1st the 1st function F that locates X during mutually for Y, be changed to X and above-mentioned the 2nd in above-mentioned the 2nd spotting of hypothesis and approach above-mentioned the 2nd phase Y with the 2nd the 2nd function F that locates X during mutually for Y, be changed to X and above-mentioned the 3rd in above-mentioned the 3rd spotting of hypothesis and approach above-mentioned the 3rd phase Y with the 3rd the 3rd function F that locates X during mutually for Y, be changed to X and above-mentioned the 4th in above-mentioned the 4th spotting of hypothesis and approach above-mentioned the 4th phase Y with the 4th the 4th function F that locates X during mutually for Y and according to above-mentioned the 1st function F and the 1st residual delta of Y mutually, above-mentioned the 2nd function F and the 2nd residual delta of Y mutually, above-mentioned the 3rd function F with the 3rd mutually the residual delta of Y and above-mentioned the 4th function F with the 4th mutually the residual delta of Y estimate the operation of above-mentioned optical system higher aberration completely.
The method of adjustment of a kind of lens of the present invention, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) on diffraction grating the diffraction transmission operation of shared interference light of 2 diffraction lights of the light of above-mentioned collector lens and the different number of times of outgoing, (b) operation of mobile above-mentioned diffraction grating, (c) resembled the operation of accepting above-mentioned shared interference light imaging on the body, (d) above-mentioned resembled the body shared interference interference of light obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the position mutually and according on rheme detect by behavior detector above-mentioned collector lens characteristic operation and (e) adjust the operation of the position of above-mentioned collector lens by behavior detector according to the testing result of above-mentioned behavior detector.
The method of adjustment of another kind of lens of the present invention, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) on diffraction grating the diffraction transmission operation of shared interference light of 2 diffraction lights of the light of above-mentioned collector lens and the different number of times of outgoing, (b) operation of mobile above-mentioned diffraction grating, (c) resembled the operation of accepting above-mentioned shared interference light imaging on the body, (d) above-mentioned resembled the body shared interference interference of light obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the position mutually and according on rheme detect the operation of the characteristic of above-mentioned collector lens by behavior detector, (e) resembled on the body operation of the reflected light of accepting above-mentioned collector lens or transmitted light and (f) according to the operation of adjusting the position of above-mentioned collector lens in the information of the above-mentioned the 2nd light that is resembled on the body to be accepted on by lens adjusting mechanism the 2nd.
In the lens method of adjustment of the invention described above, it is characterized in that above-mentioned collector lens has cover layer face around lens face, the above-mentioned the 2nd is resembled reflected light or the transmitted light that body is accepted above-mentioned cover layer face.
In the lens method of adjustment of the invention described above, it is characterized in that above-mentioned diffraction grating is a reflection-type diffraction grating.
In the lens method of adjustment of the invention described above, it is characterized in that above-mentioned diffraction grating is the transmission-type diffraction grating.
Another lens method of adjustment of the present invention, it is the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) makes wide the causing of penetrating from light source become directional light and incide operation on the above-mentioned collector lens, (b) in the time of the light assembled by above-mentioned collector lens with reflection-type diffraction grating reflection and diffraction, the shared interference light of 2 diffraction lights of different number of times is incided the operation of above-mentioned collector lens, (c) on imaging lens, make from the operation of the above-mentioned shared interference light imaging of above-mentioned collector lens outgoing, (d) resembled on the body accept above-mentioned imaging the operation of shared interference light and (e) above-mentioned resembled the body shared interference obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by being connected above-mentioned 2 diffraction lights the position mutually and on the basis rheme obtain the operation of the characteristic of above-mentioned collector lens by behavior detector.
Another lens method of adjustment of the present invention, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) and make wide the causing of penetrating from light source become directional light and incide operation on the above-mentioned collector lens, (b) in the time of the light assembled by above-mentioned collector lens with the transmission of transmission-type diffraction grating and diffraction the shared interference light of 2 diffraction lights of different number of times is incided operation on above-mentioned the 2nd collector lens, (c) make from the operation of the above-mentioned shared interference light imaging of above-mentioned the 2nd collector lens outgoing, (d) resembled on the body accept above-mentioned imaging the operation of shared interference light and (e) above-mentioned resembled the body shared interference obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by being connected above-mentioned 2 diffraction lights the position mutually and on the basis rheme obtain the operation of the characteristic of above-mentioned collector lens by behavior detector.
In above-mentioned lens method of adjustment, it is characterized in that above-mentioned behavior detector in above-mentioned shared interference resembles the position phase that obtains the intensity variation on this measuring point on a plurality of measuring points on the line of the optical axis by connecting above-mentioned diffraction light, hypothesis said determination point position be X and on rheme locate on 1 approximation of function of X rheme phase Y and estimate above-mentioned optical system defocus amount completely of usefulness during mutually for Y with 1 time coefficient value of this 1 function.
In above-mentioned lens method of adjustment, it is characterized in that above-mentioned behavior detector in above-mentioned shared interference resembles at the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and with respect to the position phase of this line segment acquisition intensity variation on this measuring point on a plurality of measuring points on 2 oblique lines that become predetermined angular on positive dirction and the negative direction, suppose that said determination point position is X on 2 oblique lines separately above-mentioned, last rheme is approached rheme phase Y with the quadratic function of the X that locates or cubic function during mutually for Y and with the quadratic coefficients value evaluation comatic aberration of this quadratic function or cubic function.
The method of adjustment of a kind of optical unit of the present invention, it is characterized in that possessing have (a) prepare to have by reflective material forms layer, separate predetermined distance and be formed with a plurality of parallel light inlet windows, cross from the optical axis of the light of above-mentioned optical unit outgoing set and when reflecting the above-mentioned light of institute's incident the diffraction transmission cross the light of above-mentioned a plurality of light inlet windows and make 2 diffraction lights of different number of times interfere the operation of the reflection and transmission type diffraction grating that obtains shared interference elephant, (b) above-mentioned diffraction grating is moved to have operation on the direction with the direction composition of grating orientation orthogonal directions, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from above-mentioned shared interference, (d) adjust the operation of above-mentioned optical unit according to the testing result of above-mentioned detecting device, (e) make above-mentioned reflection and transmission type diffraction grating move to operation on the above-mentioned optical axis direction, (f) with the operation of photo detector acceptance by the light that above-mentioned diffraction grating reflected, (g) adjust the operation of the position of above-mentioned photo detector according to the light intensity of accepting by above-mentioned photo detector.
The method of adjustment of another optical unit of the present invention, it is characterized in that possessing have (a) prepare on the surface of the plate of forming by translucent material, to separate predetermined distance be provided with a plurality of parallel grooves also with the semi-transparency material covered should the surface diffraction grating, cross from the optical axis of the light of above-mentioned optical unit outgoing set and when reflecting the above-mentioned light of institute's incident the diffraction transmission cross the light of above-mentioned a plurality of light inlet windows and make 2 diffraction lights of different number of times interfere the operation of the reflection and transmission type diffraction grating that obtains shared interference elephant, (b) above-mentioned diffraction grating is moved to have operation on the direction with the direction composition of grating orientation orthogonal directions, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from above-mentioned shared interference, (d) adjust the operation of above-mentioned optical unit according to the testing result of above-mentioned detecting device, (e) make above-mentioned reflection and transmission type diffraction grating move to operation on the above-mentioned optical axis direction, (f) with the operation of photo detector acceptance by the light that above-mentioned diffraction grating reflected, (g) adjust the operation of the position of above-mentioned photo detector according to the light intensity of accepting by above-mentioned photo detector.
The method of adjustment of another optical unit of the present invention, be the method for adjustment that has the optical unit of lens, it is characterized in that possessing and have (a) to prepare to have transparent panel and diffraction from the light of above-mentioned optical unit outgoing and form the operation of support of transmission-type diffraction grating of shared interference elephant of the diffraction light of different number of times, (b) make above-mentioned diffraction grating move to operation on the working position of the optical axis that crosses the light that has seen through said lens, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from the above-mentioned shared interference that has seen through the diffraction grating that is provided on the above-mentioned working position, (d) adjust the operation of above-mentioned optical unit according to the characteristic of above-mentioned detected optical unit, (e) make above-mentioned transparent panel move to operation on the working position of the optical axis that crosses the light that has seen through said lens, (f) from having seen through the center that resembling of the light that is provided in the transparent panel on the above-mentioned working position detect light intensity distributions and the operation of the position deviation between the said lens center, (g) adjust the operation of said lens according to above-mentioned detected position deviation.
Also have, the evaluation method of a kind of lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles at the mid point of the optical axis by connecting above-mentioned 2 diffraction lights not and with the vertical line segment of the line that connects above-mentioned 2 optical axises on a plurality of measuring points on obtain intensity variation the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 2 times of the Y that locates or 3 approximation of function and with the operation of the spherical aberration of 2 subsystem numerical Evaluation said lens of this function.
The evaluation method of another lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Z in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 3 times of the Z that locates or 4 approximation of function and with the operation of the spherical aberration of 3 subsystem numerical Evaluation said lens of this function.
The evaluation method of another lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Z in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 1 time of the Z that locates or 2 approximation of function and with the operation of the defocus amount of 1 subsystem numerical Evaluation said lens of this function.
In above-mentioned lens evaluation method, it is characterized in that above-mentioned 2 diffraction lights are any in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light.
Another lens evaluation method of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights not and with the vertical line segment of the straight line that connects above-mentioned 2 optical axises on a plurality of measuring points on obtain intensity variation the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 4 times of the Y that locates or 5 approximation of function and with the operation of 5 spherical aberrations of 4 subsystem numerical Evaluation said lens of this function.
Another lens evaluation method of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles not the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and clip the vertical halving line of the line segment that connects above-mentioned 2 optical axises in both sides and obtain with the vertical line segment of the straight line that connects above-mentioned 2 optical axises and the position that on a plurality of measuring points on each line segment, obtains intensity variation mutually operation and (d) supposing that said determination point position is Y 1, Y 2, to go up rheme be φ mutually 1, φ 2The time with the Y that locates 1, Y 24 times or 5 approximation of function on rheme phase φ 1, φ 2, suppose that 4 subsystem numerical value of these 2 functions are respectively a 4, b 4The time use a 4With b 4Difference estimate the operation of 5 spherical aberrations of said lens.
The evaluation method of another lens of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 6 times of the Y that locates or 7 approximation of function and with the operation of 7 spherical aberrations of 6 subsystem numerical Evaluation said lens of this function.
Another lens evaluation method of the present invention is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles not the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and clip the vertical halving line of the line segment that connects above-mentioned 2 optical axises in both sides and obtain with the vertical line segment of the straight line that connects above-mentioned 2 optical axises and the position that on a plurality of measuring points on each line segment, obtains intensity variation mutually operation and (d) supposing that said determination point position is Y 1, Y 2, to go up rheme be φ mutually 1, φ 2The time with the Y that locates 1, Y 26 times or 7 approximation of function on rheme phase φ 1, φ 2, suppose that 6 subsystem numerical value of these 2 functions are respectively a 6, b 6The time use a 6With b 6Difference estimate the operation of 7 spherical aberrations of said lens.
In above-mentioned lens evaluation method, it is characterized in that above-mentioned 2 diffraction lights are a certain side in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light.
In above-mentioned lens evaluation method, it is characterized in that the direction that above-mentioned diffraction grating is moved is the direction that has with the direction composition of grating orientation orthogonal directions.
In above-mentioned lens method of adjustment, it is characterized in that the direction that above-mentioned diffraction grating is moved is the direction that has with the direction composition of grating orientation orthogonal directions.
In above-mentioned lens method of adjustment, it is characterized in that above-mentioned diffraction grating is moved to and have on the direction with the direction composition of grating orientation orthogonal directions.
Below accompanying drawing is carried out simple declaration.
Fig. 1 is lens aberration detection method (rocking method) and the summary formation of device and the key diagram of principle thereof in the past.
Fig. 2 is the figure with device explanation aberration adjusting method shown in Figure 1.
Fig. 3 be in the past other lens aberration detection method (light intensity determination method) and the summary of device constitutes and the key diagram of principle.
Fig. 4 is the figure that is illustrated in the elephant that obtains in the lens aberration detection method shown in Figure 3, and (A) preceding for adjusting, (B) is adjusted the elephant.
Fig. 5 is the figure of the summary formation of expression lens aberration evaluating apparatus related to the present invention.
Fig. 6 is the figure of expression from the diffraction light of reflection-type diffraction grating generation.
Fig. 7 is the figure that is illustrated in the shared interference elephant that forms on the photography element.
Fig. 8 is for representing the figure of the measuring point that shared interference resembles.
Fig. 9 is the figure that is illustrated in the variation of the light intensity in the mensuration that shared interference shown in Figure 8 resembles.
Figure 10 is the figure of the wave front shape of expression aberration, (A) is that defocus amount, (B) are the wave front of spherical aberration for comatic aberration, (C) for astigmatism, (D).
Figure 11 is the figure that is illustrated in the interference fringe that is presented in the shared interference, (A) is that defocus amount, (B) are the interference fringe of spherical aberration for comatic aberration (broom shape T composition), (D) for astigmatism, (E) for comatic aberration (broom shape R composition), (C).
Figure 12 is the figure of evaluation method of explanation defocus amount, (A) for the measuring point in the shared interference, (B) for figure after the match is carried out as 1 function of measuring point coordinate in the position.
Figure 13 is the figure of the evaluation method of explanation broom shape R composition, (A) for the measuring point in the shared interference, (B) for figure after the match is carried out as the quadratic function of measuring point coordinate in the position.
Figure 14 is the figure of the evaluation method of explanation broom shape T composition, (A) for the measuring point in the shared interference, (B) for figure after the match is carried out as the quadratic function of measuring point coordinate in the position.
Figure 15 is the figure of evaluation method of explanation astigmatism, (A) for the measuring point in the shared interference, (B) for figure after the match is carried out as 1 function of measuring point coordinate in the position.
Figure 16 is the figure of evaluation method of explanation spherical aberration, (A) for the measuring point in the shared interference, (B) for figure after the match is carried out as the cubic function of measuring point coordinate in the position.
Figure 17 is the figure of evaluation method of explanation higher aberration, (A) for the measuring point in the shared interference, (B)～(E) for figure after the match is carried out as the function of measuring point coordinate in the position.
Figure 18 is the figure of the summary formation of the expression lens aberration evaluating apparatus relevant with other embodiment.
Figure 19 is the figure of the summary formation of the expression lens aberration evaluating apparatus relevant with other embodiment.
Figure 20 is the figure of the summary formation of the expression lens adjusting gear relevant with other embodiment.
Figure 21 is the figure of the summary formation of the expression lens adjusting gear relevant with other embodiment.
Figure 22 is the figure of the summary formation of the expression lens aberration evaluating apparatus relevant with other embodiment.
Figure 23 is the figure of the summary formation of the expression lens aberration evaluating apparatus relevant with other embodiment.
Figure 24 is the figure of the summary formation of the expression lens adjusting gear relevant with other embodiment.
Figure 25 is the figure of the summary formation of the expression lens adjusting gear relevant with other embodiment.
Figure 26 is the part amplification view of diffraction grating.
Figure 27 is the figure of 0 diffraction light of expression and the shared interference elephant that reaches-1 diffraction light for+1 time.
Figure 28 is the figure of expression+1 with the shared interference elephant that reaches-1 diffraction light.
Figure 29 represents to be illustrated in the diffraction grating that formed the grating groove on the specific direction and formed the figure of the diffraction grating of grating groove on the direction of the inclination at specific therewith direction angle at 45.
Figure 30 is the figure of the formation of the device of the aberration of the lens combination (object lens) of expression evaluation and correction optical unit.
Figure 31 is the optical system cut-open view completely that is contained in optical unit.
The appearance that Figure 32 changes with the optical axis direction of CD from the signal voltage difference that is subjected to picture dot spare output for expression.
Figure 33 is the figure of the formation of expression optical unit adjusting gear.
Figure 34 is the figure of the interference elephant of expression Transflective diffraction grating.
Figure 35 is shown in the figure of the diffraction interference of light elephant on the display device for expression.
Figure 36 is the figure of the situation of the mould of expression making lens.
Figure 37 is the cut-open view of the mould made.
Figure 38 is the figure of the state after expression 0 time and ± 1 diffraction light are interfered.
Figure 39 is the figure that is illustrated in the example of the measuring point of setting on the interference region.
Figure 40 for expression with the constitutional diagram after mutually of the position of linear function match light intensity.
Figure 41 for expression with the constitutional diagram after mutually of the position of cubic function match light intensity.
Figure 42 is the summary pie graph of expression lens evaluating apparatus of the present invention.
Figure 43 be expressed as ask spherical aberration and measuring point that interference region sets with fit within the constitutional diagram after mutually of position that each measuring point measures with quadratic function.
Figure 44 be expressed as ask defocus amount and measuring point that interference region sets with fit within the constitutional diagram after mutually of position that each measuring point measures with linear function.
Figure 45 is the other forms of figure of expression lens evaluating apparatus.
Figure 46 be expressed as ask spherical aberration and measuring point that interference region sets with fit within the constitutional diagram after mutually of position that each measuring point measures with cubic function.
Figure 47 is the summary pie graph of the device of 5 times, 7 times spherical aberrations of mensuration in the past.
Figure 48 is the figure of the detection method of expression 7 spherical aberrations related to the present invention.
Figure 49 is the summary pie graph of the embodiment of expression aberration detection device related to the present invention.
Figure 50 is used to illustrate the figure of wave front shape coordinate system for expression.
Figure 51 is the figure of expression by 5 times, the 7 times interference fringes that spherical aberration produced.
Figure 52 is the figure of the detection method of expression 5 spherical aberrations related to the present invention.
Figure 53 is the figure of the detection method of expression 5 spherical aberrations related to the present invention.
Figure 54 is the figure of the detection method of expression 5 spherical aberrations related to the present invention.
Figure 55 is the summary pie graph of the embodiment 2 of expression aberration detection device related to the present invention.
The present invention is further detailed explanation below in conjunction with accompanying drawing.Embodiment 1
Fig. 5 constitutes for the summary of expression lens evaluating apparatus (system) 20.In system 20, but as the laser of light source the laser (for example He-Ne Lasers) 22 that interference capabilities are launched in source 21 takes place.Institute's emitted laser 22 is adjusted to by lens 23 after the slightly parallel light 24, by object lens 25 imaging on reflection-type diffraction grating 26.By diffraction grating 26 laser light reflected 22, get back to slightly directional light 24 by object lens 25 once more, after half-reflecting mirror 27 reflections that are configured between these object lens 25 and the lens 23, project on the photography element (for example ccd sensor) 28.Photography element 28 is connected with signal processing apparatus 29, carries out signal Processing by resembling by signal processing apparatus 29 of catching of photography element 28, and result is presented on the display device 30.
In this system 20, as shown in Figure 6, from diffraction grating 26 can obtain 0 diffraction light 31, ± 1 diffraction light 31, ± 2 diffraction lights 32,33 ...Again, by groove interval (grating space), the groove depth (the grating degree of depth) of suitable design diffraction grating 26, diffraction light 31 can be formed interference shown in Figure 7 and be resembled on photography element 28.Suitable design conditions will be explained below.
Current, on 0 diffraction light (diffraction image) 31, ± 1 diffraction light (diffraction circle) 32,33 states that are in the phase non-overlapping copies and join.Below, the diffraction interference of light of this different number of times is called [shared] or [shared interference], be called [shared interference resembles] by resembling of forming of interference, the axle (X-axis shown in Figure 7) that connects the diffraction center is called [common axis], and the direction of common axis is called shared direction.
When object lens 25 do not comprise aberration fully, and 25 pairs of diffraction grating 26 of object lens are when correctly having aimed at focal length, for example, the interference region 34 of 0 diffraction light 31 and+1 diffraction light 32 is with the black form performance of no apperance, and the interference region 35 of 0 diffraction light 31 and-1 diffraction light 33 is not there to be the white form performance of shadow fully.But the lens of reality all comprise various aberrations, show in interference region 34,35 according to the interference fringe of aberration.
If observe 2 the light intensity of being separated by in interference region 34,35, this light intensity of 2 can demonstrate different values with the aberration of object lens 25 etc.Again, for example, if adopt the suitable travel mechanism (representing with symbol 36 among Fig. 5) that uses geared parts, mobile diffraction grating 26 on the direction vertical with the grating groove, then 2 light intensity in the interference region 34,35 is pressed the sinusoidal curve cyclical variation.The difference of aberration is with 2 sinusoidal phase differential performances simultaneously.
For example, as shown in Figure 8, if observe the interference region 34 of 0 diffraction light 31 and+1 diffraction light 32, in the diffraction circle center O of the diffraction circle center O that connects 0 diffraction light 31 and+1 diffraction light 32 1Common axis (X-axis) on, measure apart from this center O and O 12 P of the equidistant L in center 1, P nOn light intensity over time, as shown in Figure 9, an expression point P 1The sinusoidal curve T of intensity variation 1Phase (P 1) and expression point P nThe sinusoidal curve T of intensity variation nPhase (P n) between phase difference φ will show, this phase difference φ depends on the aberration of object lens 25.
The aberration that is taken place when incident light is monochrome is called monochromatic aberration, spherical aberration, commatic aberration, astigmatism is arranged, resemble the face bending, distorts aberration (5 aberrations of Saden) as monochromatic aberration.Monochromatic aberration is categorized into light aberration and wave-front aberration according to the method for the narrating difference of aberration again.This light aberration and wave-front aberration conversion mutually, usually, the wave-front aberration polar coordinate representation.
Below, for schematic illustration, in the present invention, wave-front aberration is divided into commatic aberration, astigmatism, spherical aberration, other higher order aberrations and focal length dislocation (defocusing) to be handled.
Shown in Figure 10 (A), the wave front 37 that defocuses when being benchmark with the plane wave, is that the center becomes the rotation symmetric figure with the optical axis, can use numerical expression (1) expression.
φ＝m·(ξ 2+η 2) (1)
M: constant
Therefore, when the ξ direction had 2 diffraction lights to interfere, perhaps when the η direction had 2 diffraction lights to interfere, the intensity difference of 2 interference lights on these directions (being phase differential) can be used numerical expression (2), numerical expression (3) expression on shared direction.
dφ/dξ＝2mξ (2)
dφ/dη＝2mη (3)
This can be understood as when lens do not have other aberrations, defocuses to resemble with the interference fringe shown in Figure 11 (A) in shared interference to show.Therefore, shown in Figure 12 (A), resemble on 39, in the diffraction circle center O of the diffraction circle center O that connects 0 diffraction light 31 and+1 diffraction light 32 in shared interference 1Common axis (X-axis) on, preferably about by center O, O 1And the halving line vertical with common axis (Y-axis) got a plurality of point (P symmetrically 1, P 2... P N-1, P n), allow diffraction grating 26 on the direction vertical, move with its grating groove, obtain each point (P 1, P 2... P N-1, P n) phase change, shown in Figure 12 (B), with these points (P 1, P 2... P N-1, P n) the X coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then can quantitatively be obtained defocus amount (numerical expression (1) arrives the constant m in the numerical expression (3)) with 1 approximation of function (match).
The specific procedure of estimating with the 24 pairs of defocus amount of signal processing apparatus as shown below.
(i) shown in Figure 12 (A), resemble on 39 in the shared interference that on display device 30, shows then that receives by photography element 28, determine center (optical axis O, the O of diffraction light (diffraction circle) 31,32 1) and common axis (X-axis).
(ii) go up and determine a plurality of measuring point (P at common axis (X-axis) 1, P 2... P N-1, P n), preferably these measuring points are about connecting optical axis O, O 1Halving line (Y-axis) left-right symmetric configuration.
(iii) drive travel mechanism 36, allow diffraction grating 26 on the direction vertical, move with the grating groove.
(iv) measure the measuring point (P that changes that moves with diffraction grating 26 1, P 2... P N-1, P n) light intensity.Again, light intensity obtains by the output signal corresponding to the photography element of the position of each measuring point.The light intensity of being measured is sinusoidal wave for each measuring point and changes.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).Corresponding to the light intensity sinusoidal waveform of each measuring point, for example as shown in Figure 9, has different phase places.
(vi) light intensity φ that will be corresponding with the X-axis coordinate of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 12 (B), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 1 function (φ=mx) match.
(viii) calculate 1 ordered coefficients m of 1 function of institute's match, estimate defocus amount.
Commatic aberration when being benchmark with the plane wave, is got the wave front shown in Figure 10 (B), can use numerical expression (4) expression.
φ＝m·η·(ξ 2+η 2) (4)
M: constant
Shown in numerical expression (4), commatic aberration has to the big direction of number of times (η direction: directivity intelligent shape direction).This intelligent shape direction and the shared direction unanimity of getting along well are necessary to obtain respectively the commatic aberration composition of shared direction and perpendicular commatic aberration composition, obtain intelligent shape direction by its big or small ratio then.
The intelligent formation branch of shared direction (promptly with the commatic aberration composition of grating groove vertical direction, hereinafter referred to as [commatic aberration R composition]) can be used numerical expression (5) expression.
dφ/dη＝m R·(ξ 2-3η 2) (5)
Again, when lens did not have other aberrations, intelligent shape R composition was in shared interference resembles, as 41 performances of the interference fringe shown in Figure 11 (B).Therefore, in Figure 13 (A), resemble on 42, on Y-axis, preferably get a plurality of point (P with respect to the X-axis symmetry in shared interference 1, P 2... P N-1, P n), obtain each point (P while allow diffraction grating 26 on the direction vertical, move with the grating groove 1, P 2... P N-1, P n) phase P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 13 (B), with the coordinate (Y coordinate) of these points and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then can quantitatively be obtained 2 ordered coefficients (m with these 2 functions with 2 approximation of function R) be intelligent shape R composition (the constant m in the numerical expression (4) on basis R).
On the other hand, the intelligent formation branch vertical with shared direction (promptly with the commatic aberration composition of grating groove parallel direction, hereinafter referred to as [intelligent shape T composition]) can be used numerical expression (6) expression.
dφ/dξ＝m T·(2ξη) (6)
Again, when lens do not have other aberrations, in shared interference resembles, as 41 performances of the interference fringe shown in Figure 11 (C).Therefore, in Figure 14 (A), resemble,, preferably get a plurality of point (Q with respect to the intersection point symmetry of X-axis and Y-axis becoming with negative direction on the Z, Z ' axle of given angle (for example 45 degree) with the positive dirction of X-axis and Y-axis in shared interference 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n), obtain each point (Q while allow diffraction grating 26 on the direction vertical, move with its grating 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n) phase place, shown in Figure 14 (B), with coordinate Z, the Z ' of these points and the phase of each point Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2φ R (n-1), φ Rn) on coordinate, draw, the point that will draw is then used function (φ=m respectively 2 times rX 2, φ '=m T' x 2) or 3 approximation of function, by obtaining 2 times coefficient (m of 2 functions and 3 functions T, m T') poor, can quantitatively obtain intelligent shape T composition.
Again, according to the Coefficient m of intelligent shape R composition RPoor (m with intelligent shape T composition T-m T'), can obtain the direction of commatic aberration.
The specific procedure of estimating intelligent shape R composition as shown below.
(i) shown in Figure 13 (A), shared interference resembles on 42, determines center (optical axis O, the O of diffraction light (diffraction circle) 31,32 1), common axis (X-axis) and connect optical axis O, O 1Vertical halving line (Y-axis).
(ii) go up and determine a plurality of measuring point (P in vertical halving line (X-axis) 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) allow diffraction grating 26 on the direction vertical, move with grating.
(iv) measure each measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) light intensity φ that will be corresponding with the X-axis coordinate of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 13 (B), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 2 function (φ=m RX 2) match.
(viii) calculate 2 ordered coefficients m of 2 functions of institute's match R, estimate intelligent shape R composition.
The specific procedure of estimating intelligent shape T composition as shown below.
(i) shown in Figure 14 (A), shared interference resembles on 44, determines center (optical axis O, the O of diffraction light (diffraction circle) 31,32 1), common axis (X-axis) and connect optical axis O, O 1Vertical halving line (Y-axis), the intersection point by X-axis and Y-axis and become Z, the Z ' axle of given angle (30 °≤θ≤60 °, preferred 45 °) with negative direction (clockwise direction) with positive dirction (counter-clockwise direction) with respect to X-axis.
(ii) on Z axle, Z ' axle, determine a plurality of measuring point (Q respectively 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n), preferably these measuring points are with respect to the intersection point balanced configuration of X-axis and Y-axis.
(iii) allow diffraction grating 26 on the direction vertical, move with grating.
(iv) measure each measuring point (Q 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn).
(vi) will with the Z axial coordinate and the corresponding light intensity φ of Z ' axial coordinate of each measuring point Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn), shown in Figure 14 (B), (C), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 2 function phi=m TX 2, φ '=m T' x 2Match.
(viii) calculate 2 ordered coefficients m of 2 functions of institute's match T, m T'.
(ix) the poor m of calculating 2 ordered coefficients T-m T', estimate intelligent shape T composition.
(x) according to intelligent shape R composition (m R) and the poor (m of intelligent shape T composition T-m T') ratio m R/ (m T-m T') estimate the direction of intelligent shape.
Astigmatism when being benchmark with the plane wave, is got the shape of the wave front 45 shown in Figure 10 (C).This astigmatism is with respect to the direction vertical with certain direction, and phase place is 2 functions and distributes.Again, the opposite in sign of 2 functions each other promptly has axle (the ξ axle of Figure 10 (C)) that downward protrusion distributes and the axle (the η axle of Figure 10 (C)) with distribution protruding upward.The interference fringe that can overlap this wave front 42 when shared, as dividing other 1 function, shows as the striped vertical with common axis on ξ, η direction.(with reference to Figure 10 (D)) still, with the different directions of ξ, η direction on when shared, as producing PHASE DISTRIBUTION, produce the interference fringe parallel with common axis about 1 function vertical with common axis.When on the direction that becomes the miter angle degree with ξ, η direction when shared, PHASE DISTRIBUTION only appears on the axle vertical with common axis, and interference fringe is called parallel with common axis (interference fringe shown in Figure 11 (D)).Therefore, by extracting 1 function of the PHASE DISTRIBUTION on the straight line vertical out, can quantitatively obtain the astigmatism of specific direction with common axis.
Specifically, shown in Figure 15 (A), resemble on 47, on Y-axis, preferably get a plurality of point (P with respect to the X-axis symmetry in shared interference 1, P 2... P N-1, P n), Yi Bian allow diffraction grating 26 on the direction vertical, move with grating orientation, Yi Bian obtain the phase of each point P(φ P1, φ P2φ P (n-1), φ Pn) change, shown in Figure 15 (B), with the coordinate (Y coordinate) of these points and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then can quantitatively be obtained astigmatism with 1 approximation of function.
In addition, in the time of detecting the astigmatism composition of specific direction, there is no need to change shared direction.But, in the time of detecting astigmatism direction and size, be necessary to realize above-mentioned trace routine with the other direction that becomes given angle (45 °) with this specific direction at specific direction.At this moment, as the method that changes shared direction, can consider diffraction grating is rotated, perhaps lens are rotated, perhaps as shown in figure 29, forming the 1st diffraction grating 301 of grating groove 300 and the method that on the direction that becomes given angle (45 °) with this specific direction, forms the 2nd diffraction grating 303 of grating groove 302 on the specific direction.
The specific procedure of evaluation astigmatism as shown below.
(i) shown in Figure 15 (A), resemble on 47, determine center (optical axis O, the O of diffraction light (diffraction circle) 31,32 in shared interference 1) (not drawing among the figure), common axis (X-axis) and connect optical axis O, O 1Vertical halving line (Y-axis).
(ii) on Y-axis, determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) allow diffraction grating 26 on the direction vertical, move with grating.
(iv) measure each measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) light intensity φ that will be corresponding with the X-axis coordinate of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 15 (B), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 1 function (φ=mx) match.
(viii) calculate 1 ordered coefficients m of 1 function of institute's match, estimate astigmatism.
Shown in Figure 10 (D), when being benchmark with the plane wave, the wave front of spherical aberration 44 is that the center becomes the rotation symmetric figure with the optical axis, can use numerical expression (7) to represent.
φ＝d·(ξ 2+η 2) 2 (7)
D: constant
Therefore, when the ξ direction was shared, perhaps when the η direction is shared, the intensity difference of 2 interference lights on these directions (being phase differential) can be used 3 function representations of numerical expression (8), numerical expression (9) on shared direction.
dφ/dξ＝2d(ξ 2+η 2)(2ξ) (8)
dφ/dη＝2d(ξ 2+η 2)(2η) (9)
This can be understood as when lens do not have other aberrations, and spherical aberration resembles with the interference fringe shown in Figure 11 (E) in shared interference and shows.Therefore, shown in Figure 16 (A), resemble on 50, on X-axis, preferably with respect to passing through center O, O in shared interference 1And the halving line vertical with common axis (Y-axis) got a plurality of point (P symmetrically 1, P 2... P N-1, P n), allow diffraction grating 26 on the direction vertical, move with its grating groove, obtain each point (P 1, P 2... P N-1, P n) phase change, shown in Figure 16 (B), with these points (P 1, P 2... P N-1, P n) the X coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then can quantitatively be obtained spherical aberration (numerical expression (7) arrives the constant d in the numerical expression (9)) with 3 approximation of function (match).
The specific procedure of evaluation spherical aberration as shown below.
(i) shown in Figure 16 (A), resemble on 50, determine center (optical axis O, the O of diffraction light (diffraction circle) 31,32 in interference 1) and common axis (X-axis).
(ii) on X-axis, determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to connecting optical axis O, O 1Halving line (Y-axis) the left-right symmetric configuration of (not drawing among the figure) line segment.
(iii) allow diffraction grating 26 on the direction vertical, move with grating.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) light intensity φ that will be corresponding with the X-axis coordinate of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 16 (B), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 3 function (φ=mx 3) or 4 function matches.
(viii) calculate 3 ordered coefficients m of the function of institute's match, estimate spherical aberration.
Higher order aberrations, comprise except that above-mentionedly defocus, aberration composition the commatic aberration, astigmatism, spherical aberration.Therefore, defocus by obtaining, the function (1 function, 2 functions and 3 functions) of match when commatic aberration, astigmatism, spherical aberration and the residual error of phase place, can quantitatively hold in evaluation.
Specifically, shown in Figure 17 (A), resemble on 51, become in X-axis, Y-axis and X-axis positive dirction and negative direction on the Z, Z ' axle of given angle, get a plurality of point (P of intersection point (common center point) symmetry with respect to X-axis and Y-axis in shared interference 1, P 2... P N-1, P n), (Q 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n), (S 1, S 2... S N-1, S n), while allowing diffraction grating 26 on the direction vertical, move phase change and the phase differential of obtaining each point with grating, shown in Figure 17 (B), (C), (D), (E), the coordinate of these points and the phase differential of each point are drawn on coordinate, point P, R, the S that will draw then use 2 function matches respectively, to put Q simultaneously with 3 function matches, by the residual error between the phase value of obtaining 2 functions and 3 functions and drawing, can the quantitative evaluation higher order aberrations.
The specific procedure of evaluation higher order aberrations as shown below.
(i) shown in Figure 17 (A), shared interference resembles on 51, determines to connect optical axis O, O 1Common axis (X-axis), connect optical axis O, O 1Line segment vertical halving line (Y-axis), the intersection point by X-axis and Y-axis and become Z, the Z ' axle of given angle (30 °≤θ≤60 °, preferred 45 °) with negative direction (clockwise direction) with positive dirction (counter-clockwise direction) with respect to X-axis.
(ii) on Y-axis, Z, Z ' axle, X-axis, determine a plurality of measuring point P (P respectively 1, P 2... P N-1, P n), Q (Q 1, Q 2... Q N-1, Q n), R (R 1, R 2... R N-1, R n), S (S 1, S 2... S N-1, S n), preferably these measuring points are with respect to the intersection point balanced configuration of X-axis and Y-axis.
(iii) allow diffraction grating 26 on the direction vertical, move with grating.
(iv) measure the light intensity of each measuring point P, Q, R, S.
(v) obtain the sine-shaped phase place of light intensity of each measuring point.
(vi) with the phase of the light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn), φ S(φ S1, φ S2... φ S (n-1), φ Sn), shown in Figure 17 (B), (C), (D), (E), be plotted in rectangular coordinate and fasten.
(vii) with the point (φ that is drawn P, φ Q, φ R) with 2 function phi P=mx 2, φ Q=m TX 2, φ R=m RX 2Match.Same with the point (φ that is drawn S) with 3 function phi P=mx 3Perhaps 4 function matches.
(viii) calculate phase place (φ in the function of institute's match and each measuring point P, φ Q, φ R, φ S) between residual error (Δ φ P, Δ φ Q, Δ φ R, Δ φ S).
(ix) according to residual error (Δ φ P, Δ φ Q, Δ φ R, Δ φ S) the evaluation higher order aberrations.When estimating higher order aberrations, also can adopt the mean square deviation of this residual error.
Figure 18 is another lens evaluation system 60 of expression.In the lens evaluation system 60 shown in this figure, but as the laser of light source the laser 62 that interference capabilities are launched in source 61 takes place.But this laser has interference capability, for example can utilize He-Ne Lasers.In this, also be same in following embodiment.Institute's emitted laser 62 is adjusted to after the slightly parallel light 64 by lens 63, shines on the reflection-type diffraction grating 66 by object lens 65.Diffraction light 67 from diffraction grating 66 incides object lens 65 once more.Diffraction grating 66 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face 68 of object lens 65.This shared interference light is got back to slightly directional light by object lens 65, change into about 90 ° of directions by the half-reflecting mirror 69 that is configured between these object lens 65 and the lens 63, by imaging lens 70 imaging on photography element 71 (for example ccd sensor).Photography element 71 is connected with signal processing apparatus 72, and the shared interference of being caught by photography element 71 resembles by signal processing apparatus 72 row signal Processing, and result is presented on the display device 73.Then, the travel mechanism 74 of geared parts moves along the direction vertical with the grating groove diffraction grating 66 by for example having, and estimates the various aberrations of above-mentioned defocus amount and object lens 65 with signal processing apparatus 72 and display device 73.In addition, for the correct shared interference of imaging on photography element 71 resembles, also can be provided with can (left and right directions of Figure 18 moves the travel mechanism 75 of diffraction grating 66 at optical axis direction.Again, travel mechanism 75 is preferred adopt the framework that supports diffraction grating 66 and support this framework base station between adopt a plurality of screws to connect, can carry out the formation that the position is adjusted by turning this screw.In addition, (for example in the embodiment of following explanation, move, rotate, tilt various parts, lens, light source, diffraction grating, photography element etc. and the optical system that comprises these are completely) mechanism both can adopt same formation, also can adopt geared parts to constitute.
Figure 19 is another lens evaluation system 80 of expression.In the lens evaluation system 80 shown in this figure, as the laser generation source 81 emission laser 82 of light source.Institute's emitted laser 82 is adjusted to after the slightly parallel light 84 by lens 83, shines on the reflection-type diffraction grating 86 by object lens 85.Diffraction light 87 from diffraction grating 86 incides lens 88.Diffraction grating 86 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face 89 of object lens 85.This shared interference light is got back to slightly directional light by lens 88, by imaging lens 90 imaging on photography element 91.Photography element 91 is connected with signal processing apparatus 92, and the shared interference of being caught by photography element 91 resembles by signal processing apparatus 92 row signal Processing, and result is presented on the display device 93.Then, the travel mechanism 94 of geared parts moves along the direction (above-below direction of Figure 19) vertical with the grating groove diffraction grating 86 by for example having, and estimates the various aberrations of above-mentioned defocus amount and object lens 88 with signal processing apparatus 92 and display device 93.In addition, for the correct shared interference of imaging on photography element 91 resembles, also can be provided with can be in the travel mechanism 95 of the mobile diffraction grating 86 of optical axis direction (left and right directions of Figure 19).For defocusing after the cancellation evaluation, another travel mechanism 96 that moves diffraction grating 86 with lens 88 together along optical axis can be set also again.
Figure 20 is another lens evaluation system 100 of expression.In the lens Adjustment System 100 shown in this figure, as the laser generation source 101 emission laser 102 of light source.Institute's emitted laser 102 is adjusted to by lens 103 after the slightly parallel light 104, by 106 reflections of half-reflecting mirror 105, catoptron, by object lens 107 imaging to reflection-type diffraction grating 108.Diffraction light 109 from diffraction grating 108 incides object lens 107.Diffraction grating 108 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of object lens 107.This shared interference light is got back to slightly directional light by object lens 107, through catoptron 106, half-reflecting mirror 105, by imaging lens 110 imaging on photography element 111.Photography element 111 is connected with signal processing apparatus 112, and the shared interference of being caught by photography element 111 resembles by signal processing apparatus 112 row signal Processing, and result is presented on the display device 113.Then, the travel mechanism 114 of geared parts moves along the direction (left and right directions of Figure 20) vertical with the grating groove diffraction grating 108 by for example having, and estimates the various aberrations of above-mentioned defocus amount and object lens 107 with signal processing apparatus 112 and display device 113.In addition, for the correct shared interference of imaging on photography element 111 resembles, also can be provided with can be in the travel mechanism 116 of the mobile diffraction grating 108 of optical axis direction (above-below direction of Figure 20).Again, for defocusing after the cancellation evaluation, to comprise source 101, lens 103, light collecting lens 107 take place laser optical system 117 as a whole, it is independent perhaps only to comprise laser generation source 101, also can be provided with along optical axis direction or transportable another travel mechanism 117 of perpendicular direction (X, Y direction).In addition, lens Adjustment System 100 has allows the X of object lens, Y direction tilt, and can adjust another adjusting mechanism 118 of the direction (i.e. rotation) with optical axis center, can adjust the aberration (for example commatic aberration) of the object lens of being estimated by signal processing apparatus 112 grades 107.
Figure 21 is another lens evaluation system 120 of expression.In the lens Adjustment System 120 shown in this figure, as the laser generation source 121 emission laser 122 of light source.Institute's emitted laser 122 is adjusted to after the slightly parallel light 124 by lens 123, shines transmission-type diffraction grating 126 by object lens 125.Diffraction light 127 from diffraction grating 126 incides lens 128.Diffraction grating 126 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of lens 128.This shared interference light is got back to slightly directional light by lens 128, by imaging lens 129 imaging on photography element 130.Photography element 130 is connected with signal processing apparatus 131, and the shared interference of being caught by photography element 130 resembles by signal processing apparatus 131 carries out signal Processing, and result is presented on the display device 132.Then, the travel mechanism 133 of geared parts moves along the direction (left and right directions of Figure 21) vertical with the grating groove diffraction grating 126 by for example having, and estimates the various aberrations of above-mentioned defocus amount and object lens 125 with signal processing apparatus 131 and display device 132.In addition, for the correct shared interference of imaging on photography element 130 resembles, also can be provided with can be in the travel mechanism 134 of the mobile diffraction grating 126 of optical axis direction (above-below direction of Figure 21).Again, for defocusing after the cancellation evaluation, to comprise source 121, lens 123, object lens 125 take place laser optical system 135 as a whole, it is independent perhaps only to comprise laser generation source 121, also can be provided with along optical axis direction or transportable another travel mechanism 136 of perpendicular direction (X, Y direction).In addition, lens Adjustment System 120 has allows the X of object lens 125, Y direction tilt, another adjusting mechanism 137 of the direction (i.e. rotation) with optical axis center can be adjusted, the aberration (for example commatic aberration) of the object lens of estimating by signal processing apparatus 131 grades 125 can be adjusted.
Figure 22 is expression lens Adjustment System 140.In the lens Adjustment System 140 shown in this figure, as the laser generation source 141 emission laser 142 of light source.Institute's emitted laser 142 is zoomed into slightly by optical beam expander 143 after the directional light, by half-reflecting mirror 144 reflections, incides on the object lens 146 that brace table 145 supported.Object lens 146 have smooth cove plane 148 around lens sphere 147, light incident is also arranged not only on lens sphere 147, and on cove plane 148.
The light that incides cove plane 148 reflects on this cove plane 148, after seeing through half-reflecting mirror 144, in second half catoptron 149 places reflection, by imaging lens 150 imaging on photography element (the 2nd is resembled body) 151.The signal of the elephant of being accepted corresponding to photography element 151 sends display device 152 to, and 152 pairs of signals from photography element 151 of display device are handled, and demonstrate resembling of cove plane 148.Therefore, observe shown resembling on the display device 152, can judge whether object lens 146 correctly dispose with respect to optical axis 153.When object lens 146 do not have on the tram with respect to optical axis 153, with brace table travel mechanism 154, mobile brace table 145 on the direction of optical axis 153 and/or perpendicular direction is simultaneously if necessary around optical axis 153 rotation brace tables 145 and/or carry out tilt adjustments with respect to optical axis 153.
The light imaging of lens sphere 147 of inciding object lens 146 is on reflection-type diffraction grating 155.Diffraction light from diffraction grating 155 incides object lens 146.Identical with the foregoing description, diffraction grating 155 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of object lens 146.This shared interference light is got back to slightly directional light 156 by object lens 146, by half-reflecting mirror 144,149, by imaging lens 157 imaging on photography element 158.Signal corresponding to photography element 158 elephant of accepting sends signal processing apparatus 159 to, and 159 pairs of signals from photography element 158 of signal processing apparatus are handled, and shows that on display device 160 shared interference resembles.Then, adopt this signal processing apparatus 159 and display device 160, as described above the various aberrations of object lens 146 are estimated.Can minimized aberration in these aberrations by mobile object lens 146, minimize or cancellation by adopting brace table travel mechanism 154 to move, tilt, rotate object lens 146.
In addition, identical with the foregoing description, for diffraction grating 155, except the mechanism 161 that moves this diffraction grating 155 on the direction vertical with grating, the direction that also can be arranged on optical axis 153 move the mechanism 161 of diffraction grating 155, rotation diffraction grating 155 mechanism 162, adjust the mechanism 163 of the inclination of diffraction grating.
Again, also wish the lens beyond the object lens 146, light source etc. are provided with travel mechanism, adjust as required.
Figure 23 is another lens Adjustment System 170 of expression.In the lens Adjustment System 170 shown in this figure, as the laser generation source 171 emission laser 172 of light source.Institute's emitted laser 172 is expanded into slightly by optical beam expander 173 after the directional light, by half-reflecting mirror 174 reflections, incides on the object lens 176 that brace table 175 supported.Object lens 176 have smooth cove plane 178 around lens sphere 177, light incident is also arranged not only on lens sphere 177, and on cove plane 178.
The light that incides cove plane 178 reflects on this cove plane 178, after seeing through half-reflecting mirror 174, by imaging lens 175 imaging on photography element (the 2nd is resembled body) 179.The signal of the elephant of being accepted corresponding to photography element 179 sends display device 180 to, and 180 pairs of signals from photography element 179 of display device are handled, and demonstrate resembling of cove plane 178.Therefore, observe shown resembling on the display device 180, can judge whether object lens 176 correctly dispose with respect to optical axis 181.When object lens 176 do not have on the tram with respect to optical axis 181, with brace table travel mechanism 182, mobile brace table 175 on the direction of optical axis 181 and/or perpendicular direction is simultaneously if necessary around optical axis 181 rotation brace tables 175 and/or carry out tilt adjustments with respect to optical axis 181.
The light imaging of lens sphere 177 of inciding object lens 176 is on infiltration type diffraction grating 183.The diffraction light that sees through diffraction grating 183 incides lens 184.Identical with the foregoing description, diffraction grating 183 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of lens 184.This shared interference light is got back to slightly directional light by lens 184, by imaging lens 185 imaging on photography element 186.Signal corresponding to photography element 186 elephant of accepting sends signal processing apparatus 187 to, and 187 pairs of signals from photography element 186 of signal processing apparatus are handled, and shows that on display device 188 shared interference resembles.Then, adopt this signal processing apparatus 187 and display device 188, as described above the various aberrations of object lens 176 are estimated.Can minimized aberration in these aberrations by mobile object lens 176, minimize or cancellation by adopting brace table travel mechanism 182 to move, tilt, rotate object lens 176.
In addition, identical with the foregoing description, for diffraction grating 183, except the mechanism 189 of mobile this diffraction grating 183 on the direction vertical, also can be arranged on mechanism's (not drawing among the figure) of the inclination of the direction of optical axis 181 and the mechanism 190 of lens 184 common mobile diffraction grating 183, the mechanism 191 of rotating diffraction grating 183, adjustment diffraction grating with grating.
Again, also wish other lenses, light source etc. is provided with travel mechanism, adjust as required.
Figure 24 is another lens Adjustment System 200 of expression.In the lens Adjustment System 200 shown in this figure, laser 201 incide with the slightly parallel object lens 203 of optical axis 202 on.The light imaging that sees through object lens 203 is on infiltration type diffraction grating 204.The diffraction light that diffraction grating 204 produces incides lens 205.Identical with the foregoing description, diffraction grating 204 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of lens 205.This shared interference light is got back to slightly directional light by lens 205, and a part is by half-reflecting mirror 206 reflections, by imaging lens 207 imaging on photography element 208.Signal corresponding to photography element 208 elephant of accepting sends display device 209 to, and 209 pairs of signals from photography element 208 of display device are handled, and show to see through the resembling of light of lens 205.Therefore, by observing shown resembling on the display device 209, can judge whether the optical axis of object lens 203 is correct consistent with optical axis 202.For example, when object lens 203 did not have on the tram with respect to optical axis 202, the lens moving mechanism 210 of mobile object lens 203 made the optical axis of object lens 203 consistent with optical axis 202 on usefulness and optical axis 202 vertical direction.
See through the light of half-reflecting mirror 206, by imaging lens 211 imaging on photography element 212.Signal corresponding to photography element 212 elephant of accepting sends signal processing apparatus 213 to, and 213 pairs of signals from photography element 212 of signal processing apparatus are handled, and shows that on display device 214 shared interference resembles.Then, adopt this signal processing apparatus 213 and display device 214, as described above the various aberrations of object lens 203 are estimated.Can minimized aberration in these aberrations by mobile object lens 203, mechanism 215 by adopting mobile object lens 203 on optical axis direction, object lens 203 are carried out the mechanism 216 of tilt adjustments, adopt 210 pairs of object lens 203 of lens moving mechanism to move, tilt, rotate if necessary, minimize or cancellation.
In addition, identical with the foregoing description, for diffraction grating 204, except the mechanism 217 of mobile this diffraction grating 204 on the direction vertical, also can be arranged on direction and mechanism 218, the rotation diffraction grating 204 of lens 205 common mobile diffraction grating 204 and the mechanism's (not drawing among the figure) that adjusts the inclination of diffraction grating of optical axis 202 with grating.
Again, also wish other lenses, light source etc. is provided with travel mechanism, adjust as required.
Figure 25 is another lens Adjustment System 220 of expression.In the lens Adjustment System 220 shown in this figure, laser 221 incide with the slightly parallel object lens 223 of optical axis 222 on.The light imaging that sees through object lens 223 is on infiltration type diffraction grating 224.The diffraction light that diffraction grating 224 produces incides lens 225.Identical with the foregoing description, diffraction grating 224 is designed to 0 diffraction light and+1 diffraction light and-1 diffraction light and produces shared interference on the pupil face of lens 225.This shared interference light is got back to slightly directional light by lens 225, by imaging lens 226 imaging on photography element 227.Signal corresponding to photography element 227 elephant of accepting sends signal processing apparatus 228 to.228 pairs of signals from photography element 227 of signal processing apparatus are handled, and show that on display device 229 shared interference resembles.Then, adopt this signal processing apparatus 228 and display device 229, as described above the various aberrations of object lens 223 are estimated.Can minimized aberration in these aberrations by mobile object lens 223, by adopt in the mechanism 230 of mobile object lens 223 on the optical axis direction, the mechanism 231, mechanism 232, the object lens 223 that object lens 223 are carried out tilt adjustments of mobile object lens 223 moves, tilts on the direction vertical with optical axis, minimize or cancellation.
By observing shown resembling on the display device 229, can judge on the image spaces of imaging lens 226 whether correctly configuration of photography element 227 again.When photography element 227 is not configured on the image spaces, adopt travel mechanism 228 mobile photography element 227 on optical axis direction to adjust to the tram.Again, identical with the foregoing description, for diffraction grating 224, except the mechanism 229 of mobile this diffraction grating 224 on the direction vertical, also can be arranged on mechanism 230, the rotation diffraction grating 224 of optical axis direction and lens 225 common mobile diffraction grating 224 and the mechanism's (not drawing among the figure) that adjusts the inclination of diffraction grating with grating.Further, also wish other lenses, light source etc. is provided with travel mechanism, adjust as required.
Diffraction grating of the present invention has reflection-type diffraction grating and infiltration type diffraction grating.Such diffraction grating, as shown in figure 26, be on the surface of the formed substrate 241 of the material with given refractive index (nk) (for example polycarbonate), (grating space: Pk), formation has given depth (the grating the degree of depth: (raster amplitude: grating groove 242 Pm) of given amplitude dk) on assigned direction with given interval.Again, for reflection-type diffraction grating, reflective material such as AM aluminum metallization forms very thin one deck reflectance coating (not drawing among the figure) on the surface that forms grating groove 242.In addition, though in Figure 26, do not draw, on the surface of diffraction grating formation grating, wish to cover the diaphragm that constitutes by suitable material (for example polycarbonate).Again, near the grating face of diffraction grating, front cover glass is set, also can protects diffraction grating with this.Further, as reflection-type diffraction grating, also can utilize CD or its part.
The spacing Pk of this grating etc. to 0 diffraction light and ± contrast between 1 diffraction light, the size of shared interference elephant, shared diffraction light give big influence.Specifically, grating space Pk influences angle of diffraction, and along with reducing of grating space Pk, the angle of diffraction of diffraction light is big more.Its result, shared interference resembles and diminishes.Opposite grating space Pk is big more, and the angle of diffraction of diffraction light is more little, and shared interference resembles just big more.Again, the opening number A (=sin θ s, θ s: from the incident angle of light collecting lens to the light of diffraction grating incident) of size of shared interference elephant and light wavelength λ, light collecting lens (object lens) is relevant.
The diffraction light intensity, the contrast of further shared interference elephant and the grating depth d k of diffraction grating, grid dutycycle: Pm/Pk, and the refractive index n k of light wavelength λ, diffraction grating is relevant.
According to above situation, as shown in figure 27, when allowing 0 diffraction light and+1 diffraction light or-1 diffraction light interfere the shared interference of acquisition to resemble, the design diffraction grating preferably meets the following conditions.
0.8≤Pk·(A/λ)≤1.2
0.5≤dk·(nk-1)·(8/λ)≤2
0.2≤du≤0.8
Pk: grating space
Dk: the grating degree of depth
Du: grid dutycycle (width/grating space of=grating groove)
A: the opening number A of diffraction grating (=sin θ s, θ s: from light collecting lens to
The incident angle of the light of diffraction grating incident)
Nk: the refractive index of diffraction grating
λ: light wavelength
Best condition is:
Pk·(A/λ)＝1
dk·(nk-1)·(8/λ)＝1
du＝0.5
As shown in figure 28, when allow+1 diffraction light and-1 diffraction light interfere when obtaining shared interference and resembling, and is necessary to design diffraction grating under the condition that 0 diffraction light does not take place, condition at this moment is as follows.
0.8≤Pk·sin(θs/2)/λ≤1.2
0.8≤dk·(nk-1)·(4/λ)≤1.2
0.4≤du≤0.6
Best condition is:
Pk·sin(θs/2)/λ＝1
dk·(nk-1)·(4/λ)＝1
du＝0.5
Yet diffraction grating might not require to satisfy above-mentioned condition, for example also can be by following condition design.
Design conditions
0.8≤Pk·(A/λ)≤1.2
0.5≤dk·(nk-1)·(4/λ)≤2
0.2≤du≤0.8
Design conditions
0.8≤Pk·sin(θs/2)/λ≤1.2
0.8≤dk·(nk-1)·(4/λ)≤1.2
0.4≤du≤0.6
Again, in the above description, in an embodiment of the present invention, though be to move diffraction grating along the direction vertical with grating orientation (grating groove), along having the direction of the composition vertical with grating orientation, be that tilted direction moves promptly with respect to grating orientation, also can obtain same effect.
More than explanation shows, lens evaluation method according to relevant present embodiment, evaluating apparatus, method of adjustment, adjusting gear, the straightforward procedure of the phase place of intensity variation is obtained in employing on a plurality of points of shared interference elephant, do not need to obtain the wave front shape, just can obtain the characteristic (defocus amount, commatic aberration, astigmatism, spherical aberration, higher order aberrations) of lens.Again, calculate the counting of phase place of intensity variation, minimum 2 just can be satisfied, and can estimate the characteristic of lens at short notice, perhaps adjust.Embodiment 2
Figure 30 adjusts the device of the object lens of optical unit (shaven head) for expression utilizes the diffraction interference method.In this adjusting gear, the light source of optical unit 400 (for example semiconductor laser) 402 light that produced penetrate by object lens 404.Configuration infiltration type diffraction grating 406 on the image spaces of object lens 404 incides the light of infiltration type diffraction grating 406, resolve into for example 0 time, ± 1 time, ± 2 times ... the diffraction light of number of times.In illustrated adjusting gear, in the open area of calibration lens 408, allow 0 diffraction light and+1 diffraction light, perhaps 0 diffraction light and-1 diffraction light generation interference fringe of overlapping designs infiltration type diffraction grating and other optical parameters.
The light that sees through calibration lens 408 by imaging lens 410 imaging at photography element 412.What become on photography element 412 resembles, the interference fringe (with reference to Figure 11 (E)) that the interference region of 0 diffraction light and ± 1 diffraction light comprises the interference fringe (with reference to Figure 11 (D)) that forms by the interference fringe (with reference to Figure 11 (B), (C)) that defocuses the interference fringe (with reference to Figure 11 (A)) that forms, formed by commatic aberration, by astigmatism, formed by spherical aberration.Generally, the compound generation of these aberrations, in fact the interference fringe of Huo Deing is the overlapping apperances of these interference fringes.But, when object lens 404 have correctly been aimed at focal length with diffraction grating 406, at interference region any apperance (with reference to Figure 11 (F)) will not appear
Each point in the interference fringe has intrinsic phase place.Therefore, in above-mentioned diffraction interference method, move diffraction grating 406 with the certain speed edge with optical axis 401 vertical directions, get a plurality of points at the interference region of diffraction light, obtain the phase differential of variation of the light intensity of the variation of certain any light intensity and another point, by resolving this phase differential, can estimate each aberration, adjust optical parameters such as imaging lens.
Simple declaration is adjusted by the position of picture dot spare.As shown in figure 31, in optical unit 400, the light that light source 402 generates is adjusted to slightly directional light by calibration lens 420, after transmitted beam bifurcated device 422, incides destination locations (for example CD) by object lens 424.Incide the light of CD 426, become the reflected light direction opposite that comprises these CD 426 contained information and advance, be adjusted to once more slightly after the directional light by object lens 424, in the reflection of beam bifurcation device 422 places, by sensitive lens 428 boundlings with incident light.The light of institute's boundling incides the 2nd beam bifurcation device 430, is divided into the 1st light beam 432 of advancing with the direction of incident direction approximate vertical and the 2nd light beam 434 that sees through the 2nd beam bifurcation device 430.Again, the 2nd light beam 434 is by catoptron 436 reflections, the direction of edge and the 1st light beam 432 almost parallels.Then, the 1st and the 2nd light beam 432,434 incides the 1st and the 2nd respectively and is subjected on the picture dot spare 438,440.
At this because the 2nd light beam 434 is in the downside of the 2nd beam bifurcation device 430 deflection, the image spaces 442 of the 1st light beam 432 and the image spaces 444 of the 2nd light beam 434 with the direction of these parallel beams on misplace.Again, the 1st is subjected to picture dot spare 438 to be configured in the side at the moment of the image spaces 442 of the 1st light beam 432, and the 2nd is subjected to picture dot spare 440 to be configured in the distant place of the image spaces 444 of the 2nd light beam 434.
Therefore, if CD 426 is towards near moving on the direction of imaging lens 424, the image spaces 442 and the 1st of the 1st light beam 432 is increased by the distance between the picture dot spare 438, and the image spaces 444 and the 2nd of the 2nd light beam 434 is dwindled by the distance between the picture dot spare 440.On the contrary, if CD 426 courts are away from moving on the direction of imaging lens 424, the image spaces 442 and the 1st of the 1st light beam 432 is dwindled by the distance between the picture dot spare 438, and the image spaces 444 and the 2nd of the 2nd light beam 434 is increased by the distance between the picture dot spare 440.Again, when the imaging position with increased by distance between the picture dot spare to be subjected to the light intensity of the elephant that picture dot spare accepts to reduce, on the contrary, when the imaging position with dwindled by distance between the picture dot spare to be subjected to the light intensity of the elephant that picture dot spare accepts to strengthen.Be subjected to the intensity variation of the output voltage of picture dot spare according to acceptance elephant again.For this reason, the 1st and the 2nd the output voltage difference V that is subjected to picture dot spare 438,440 is according to the distance between object lens 424 and the CD 426, by variation shown in Figure 32.
Then, in optical unit 400, the the 1st and the 2nd is subjected to the output potential difference V of picture dot spare 438,440 to set big as far as possible, although, adjust the 1st and the 2nd position that is subjected to picture dot spare 438,440 in shaven head rotation because the change of the optical axis direction of the shaven head that produces moves also correctly also correct recorded information of the information of reproducing recorded or shaven head.Specifically, in reality is adjusted, shaven head or suitable therewith parts vibrate on optical axis direction, at this moment measure the 1st and the 2nd voltage that is subjected to 438,440 output signals of picture dot spare, allow the difference of these two voltages become maximum and adjust the 1st and the 2nd position that is subjected to picture dot spare 438,440.
Then, the center of object lens and see through the adjustment of the location dislocation between the center of light intensity distributions in the resembling that these object lens became is described.In this is adjusted, the light that penetrates from optical unit 400 incides photography element 412 by imaging lens, this photography element 412 is accepted resemble handle by handling part 414 after, show at visual display part 416, detect center of this elephant and the location dislocation between this center (maximum light intensity position) that resembles middle light intensity distributions, according to testing result, mobile object lens 404 on the plane vertical with optical axis 401 are eliminated this location dislocation.
Like this, above-mentioned 3 adjustment are necessary it is different formations.That is, the aberration adjustment (correction) of lens system needs diffraction grating, is subjected to the position adjustment of picture dot spare to need reflection part, and the location dislocation adjustment of object lens does not need these parts.
For this reason, optical unit must at first be adjusted position correction lens aberration directly the 1st, adjusts the position that the position adjustment is subjected to picture dot spare the 2nd then, adjusts the location dislocation that object lens are adjusted in the position the 3rd then.Its result owing to the mobile optical unit, position that is necessary the 1st to the 3rd, only is that the time of conveyance just makes that adjusting required time becomes the big new problem that just becomes.Below Shuo Ming a plurality of embodiment are just in order to address the above problem.
As shown in figure 33, the device 450 of the optical characteristics of evaluation optical unit 400 is that object lens 424 1 sides from this optical unit 400 begin to dispose successively diffraction grating unit 452, calibration lens unit 454, imaging lens 456, the photography element (components of photo-electric conversion: CCD) 458 on the optical axis 401 of optical unit 400.Photography element 458 is connected with image treatment part 460, and image treatment part 460 is connected with display part 462 (for example CRT), and the signal that photography element 458 is exported is handled by image treatment part 460, and result can be shown by display part 462.
Diffraction grating unit 452 comprises crosscut optical axis 401 configuration diffraction grating 454.Again, diffraction grating unit 452 also comprise edge and optical axis 401 vertical direction (horizontal direction of drawing) with certain speed move diffraction grating 454 horizontal mobile mechanism 464, allow the vertical movement mechanism 466 of diffraction grating 454 vibrations in the direction (above-below direction of drawing) parallel with optical axis 401.In addition, this horizontal mobile mechanism 464, the vertical movement mechanism 466 preferred micromotion mechanisms that utilize geared parts that adopt.
Diffraction grating 454 be see through, reflection-type diffraction grating, be on the surface that translucent material constitutes, to cover the layer (not drawing among the figure) that the material of reflectivity, opaqueness constitutes, the oscillating mode diffraction grating of a plurality of optics grooves of the formation window of printing opacity (can) 468 side by side at regular intervals on this layer simultaneously.The phase type diffraction grating that covers by the overlay film of semi-transparency material on the above-mentioned surface of the phase type diffraction grating that should see through, reflection-type diffraction grating can be used in many parallel slots that are provided with at regular intervals on the surface that translucent material constitutes.Therefore, incide the light of diffraction grating 454, its part is transmitted into the direction opposite with incident direction, and a remaining part sees through by optics groove 468.Then, optics groove 468 form 0 time of incident lights, ± 1 time, ± 2 times ... the diffraction light of number of times, in the open area of calibration lens 454, allow 0 diffraction light and+1 diffraction light, perhaps 0 diffraction light and-1 diffraction light generation interference fringe of overlapping designs.
Below the assessment process of the above optical unit 450 that constitutes is adopted in explanation.In this assessment process, the light source of optical unit 450 (for example semiconductor laser) 402 light that produced penetrate by object lens 424, incide diffraction grating 454.Incide the part of the light of diffraction grating 454, at optics groove 468 place's diffraction, form 0 time, ± 1 time, ± 2 times ... the diffraction light of number of times.0 diffraction light and ± 1 diffraction light in this diffraction light in the open area overlapped (interference) of calibration lens 454, produce interference fringe (shared interference resembles) at these interference regions (common area).Light after being calibrated by calibration lens 454 then is by object lens 458 imaging, and photography element 458 is resembled.Photography element 458 makes corresponding to one of the light of the elephant of being accepted and connects electric signal, and this electric signal is exported to image treatment part 460.Image treatment part 460 is handled the signal of being accepted, and resembling on display part 462 of being accepted of photography element 458 shown.
When estimating the aberration of lens system, drive horizontal mobile mechanism 464, move in the horizontal direction diffraction grating 454.Thus, the phase change of the light intensity of each point during the shared interference that shows on display part 462 resembles.Therefore, adopt above-mentioned diffraction interference method, set a plurality of points that shared interference resembles, obtain the phase differential of the light intensity on these aspects, estimate various aberrations ((defocus amount, spherical aberration, commatic aberration, astigmatism etc.).According to the aberration evaluation result, adjust the lens system of optical unit 400 again.When for example adjusting object lens 424 according to the aberration evaluation result, the 1st adjusting mechanism 470 of these object lens 424 is supported in operation, adjusts the set angle with respect to the object lens 424 of optical axis 401.
When adjustment is subjected to the position of picture dot spare 438,440, drive vertical movement mechanism 466, on optical axis direction, come and go mobile diffraction grating 454.Thus, such as already explained, allow two to be subjected to light intensity of picture dot spare 438,440 elephants that receive and the change in voltage of exporting corresponding to this light intensity.Then, with two signal processing parts 472 that be connected by picture dot spare 438,440 is to be subjected on the basis of picture dot spare 438,440 voltage differences of being exported at these, drive drive division 474, mobile support is subjected to the support portion of picture dot spare 438,440, allows the amplitude of fluctuation of the output voltage difference that is subjected to picture dot spare 438,440 arrive the maximum position that is subjected to picture dot spare 438,440 of adjusting.
Figure 34 is another embodiment of expression.In the present embodiment, diffraction grating unit 480 comprises the framework 482 that is configured between object lens 424 and the calibration lens 454.In framework 482 upper supports above-mentionedly see through, reflection-type diffraction grating 470 and have the transparent panel 484 of given thickness.As see through, reflection-type diffraction grating 470 can adopt above-mentioned two kinds see through, in the reflection-type diffraction grating any.Again, diffraction grating 470 is by horizontal mobile mechanism 486 connecting frames 482, and diffraction grating 470 can move with certain speed in the horizontal direction relative to framework 482.On the other hand, framework 482 is by manual or dynamo-electric driving mechanism 488, and transparent panel 484 can be in the position of crosscut optical axis 401 (with reference to Figure 34), and moves between the position (not drawing among the figure) of diffraction grating 470 crosscut optical axises 401.
When calculating the aberration of lens system in the present embodiment, diffraction grating 470 is at the set positions framework 482 of crosscut optical axis 401, identical with the foregoing description, move diffraction grating 470 with horizontal mobile mechanism 486 on one side, utilize in display part 462 shown shared interference on one side and resemble the aberration of obtaining lens system, for example adjust the angle with respect to optical axis 401 of object lens 424.
In the location dislocation of object lens 424 is adjusted, at first adopt in display part 462 shown resembling, whether the center of center of the elephant that judgement photography element 458 is received and the light intensity distributions of this elephant is consistent.Then, when two centers were inconsistent, the adjusting mechanism 490 of object lens 424 was supported in operation, moves in the horizontal direction object lens 424, allowed two center unanimities.
Specifically, as shown in figure 35, from obtain the centre coordinate O (0,0) of object lens 424 at the profile of the shown circular image of display part 462, then, obtain resemble in each pixel (after the light intensity Is of coordinate (Xs, Ys)), each pixel is calculated Xs * Is, Ys * Is.Xs * Is that each pixel is obtained, Ys * Is add up respectively then, calculate ∑ (Xs * Is), ∑ (Ys * Is), judge then ((whether Ys * Is) is 0 to ∑ for Xs * Is), ∑, when this aggregate-value is not 0 or does not enter given range near 0, according to this aggregate-value,, carry out same processing or calculating by parallel mobile object lens 424 on object lens 424 surface levels, allow aggregate-value become 0 or enter into specialized range, adjust the position of object lens 424 near 0.
In addition, in the above-described embodiments, the aberration adjustment of optical unit 400 and the location dislocation of object lens 424 are adjusted at same place to carry out, can be arranged on also that the diffraction grating on the travelling frame 482 454 is arranged on vertical movement mechanism (with reference to Figure 33) on the optical axis direction, comprise 3 of the position adjustment that is subjected to picture dot spare 438,440 and be adjusted at same place and can carry out.
Such as described above, optical unit adjusting gear according to relevant embodiment 2, can allow in a plurality of adjustment operations that existing each device and place carry out (position of the aberration adjustment of optical unit, the location dislocation adjustment of imaging lens, photo detector is adjusted) at least 2 to be adjusted at same place and to carry out, the whole adjustment time that can the cripetura optical unit.Embodiment 3
Whether can correctly measure to defocus and to be subjected in the object lens manufacture process about recess or protuberance institute that the central part at these object lens produces with spherical aberration.
Specifically, in the process of making object lens, comprising at first is the operation of making the mould of the profile of determining object lens, secondly is the operation of injecting lens material in mould.In the manufacture process of mould, as shown in figure 36, allow mould 500 rotate, Yi Bian use the operation of precision cutting cutter 502 corresponding to the shape cut mould 500 of object lens profile Yi Bian comprise again.At this moment, because mould rotates with certain speed, more also fast away from rotation center, slow more near the center of mould 500 more with respect to the translational speed (cutting speed) of the bite 502 of mould 500., as shown in figure 37, produce than the different position 504 of machining state on every side in the centre of mould 500, this position shows as recess or protuberance on the profile of lens for this reason.
Then, local mould shape error like this, partially overlap when obtaining shared interference and resembling at 0 diffraction light that obtains from diffraction grating and ± 1 diffraction light, as shown in figure 38, will near the interference apperance in the zone the center of each diffraction light 506,508,510 512,514,516 be exerted an influence.For this reason, shown in Figure 39,40,41,, for example, get the measuring point P on the line segment at centers in the shared interference region 516, by+1 light and-1 light according to above-mentioned diffraction interference method 1, P 2... P nThe phase place of the intensity variation when each point is measured phase shift, approach if adopt corresponding to 1 function of the X that locates of phase place Y or the function of the number of times more than 1 rank, with 1 subsystem numerical value of this approximating function as the evaluation that defocuses, again, approach if adopt,, then in evaluation result, comprise above-mentioned shape error with the evaluation of 3 subsystem numerical value of this approximating function as spherical aberration corresponding to 3 functions of the X that locates of phase place Y or the function of the number of times more than 3 rank.
For the summary of the lens evaluating apparatus of removing such problem constitutes as shown in figure 42.In this lens evaluating apparatus 520, on one side the light that penetrates from shaven head 522 object lens 524 on one side light harvesting incide infiltration type diffraction grating 526, be adjusted to slightly after the directional light by detecting lens 528, incide photography element 532 by imaging lens 530.Photography element 532 is connected with signal Processing, display device 534, is shown by resembling on signal Processing, display device 534 of being received of photography element 532.
This device, from infiltration type diffraction grating 526 obtain 0 time, ± 1 time, ± 2 times ... diffraction light, in the open area of detecting lens 528, allow 0 diffraction light and+1 diffraction light, perhaps 0 diffraction light and-1 diffraction light etc. partially overlap to produce to interfere and design.Then, resemble,, obtain to interfere to resemble by imaging lens 530 imaging on photography element 532 in the interference that detects acquisition on the lens 528.
Formed interference resembles as shown in figure 11 on photography element 532.
[spherical aberration]
Therefore, when being benchmark with the plane wave, the wave front of spherical aberration is that the center becomes the rotation symmetric figure with the optical axis, can use numerical expression (10) expression.
φ＝d·(ξ 2+η 2) 2 (10)
D: constant
Therefore, when the ξ direction was shared, perhaps when the η direction is shared, the intensity difference of 2 interference lights on these directions (being phase differential) can be used 3 function representations of numerical expression (11), numerical expression (12) on shared direction.
dφ/dξ＝2d(ξ 2+η 2)(2ξ) (11)
dφ/dη＝2d(ξ 2+η 2)(2η) (12)
Therefore, shown in Figure 43 (a), resemble on 540, not by connecting O, the O of 0 diffraction light 542 and+1 diffraction light 544 in shared interference 1The center, but by connecting from the center O to O 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point, on the line segment vertical, get a plurality of point (P with common axis 1, P 2... P N-2, P n), allow diffraction grating 526 on the direction vertical, move with travel mechanism 536, with each point (P with the grating groove 1, P 2... P N-1, P n) the Y coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then is with 2 approximation of function (match), can quantitatively obtain the constant d of spherical aberration numerical expression (10) in the numerical expression (12).
The specific procedure of evaluation spherical aberration as shown below.
(i) shown in Figure 43 (a), on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1) and common axis (X-axis).
(ii) not by O and O 1The center, determine connecting center O to OO 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point on the vertical line vertical with X-axis, on this vertical line, determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) allow diffraction grating on the direction vertical, move with grating.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) will with the phase of the Y-axis coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 43 (b), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 2 function (φ=a pY 2+ b pY+c p) or 3 function matches.
(viii) calculate 2 ordered coefficients (a of institute's match p), estimate spherical aberration.
The wave front of focus dislocation (defocusing) when being benchmark with the plane wave, is that the center becomes the rotation symmetric figure with the optical axis, can use numerical expression (13) expression.
φ＝m·(ξ 2+η 2) (13)
M: constant
Therefore, when the ξ direction had 2 diffraction lights to interfere, perhaps when the η direction has 2 diffraction lights to interfere, the intensity difference of 2 interference lights on these directions (being phase differential) can be used 1 function representation of numerical expression (14), numerical expression (15) on shared direction.
dφ/dξ＝2mξ (14)
dφ/dη＝2mη (15)
Therefore, shown in Figure 44 (a), resemble, become with Y-axis in X-axis on the Z axle of given angle (for example 45 °), preferably get a plurality of point (P with respect to the intersection point symmetry of X-axis and Y-axis in shared interference 1, P 2... P N-1, P n), Yi Bian allow diffraction grating on the direction vertical, move with grating, Yi Bian obtain each point (P 1, P 2... P N-1, P n) phase place, with the Z coordinate of each point and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then is with 1 function (φ=a pZ+b p) or 2 approximation of function (match), further, by obtaining the coefficient a of this 1 function or 2 functions p, can quantitatively obtain and defocus.
The specific procedure that evaluation defocuses composition as shown below.
(i) shown in Figure 44 (a), on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1), common axis (X-axis) and connect optical axis O, O 1Line segment vertical halving line (Y-axis), become the Z axle of given angle θ (30 °≤θ≤60 °, preferred 45 °) by the intersection point of X-axis and Y-axis and with X-axis.
(ii) on the Z axle, determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the intersection point balanced configuration of X-axis and Y-axis.
(iii) allow diffraction grating on the direction vertical, move with grating.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) will with the phase of the Z axial coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 1 function phi=a pZ+b pMatch.
(viii) calculate 1 ordered coefficients a of 1 function of institute's match p, evaluation defocuses.
In addition, as will illustrating later on, the detection of spherical aberration can be adopted the spherical aberration detection method shown in the embodiment 2.
Figure 45 is another embodiment of expression.In the lens evaluation system shown in this figure, as the laser generation source 550 emission laser of light source, but this light has interference capability, for example can utilize He-Ne Lasers.Institute's emitted laser directly becomes to omit after the directional light by optical beam expander 552 expanded light beam, changes over 90 directions of spending with half-reflecting mirror 554, is shone on the reflection-type diffraction grating 558 by detected lens 556.Diffraction light from diffraction grating 558 incides lens 556 once more.Diffraction grating 558 is designed to allow 0 diffraction light and+1 diffraction light, and perhaps 0 diffraction light and-1 diffraction light produce shared interference on the pupil face of lens 556.This shared interference light is got back to slightly directional light by lens 556, sees through half-reflecting mirror 554, incides photography element 562 (for example ccd sensor) by imaging lens 560.Imaging lens 560 is with pupil face imaging on photography element 562 of detected lens 560.Photography element 562 is connected with signal Processing, display device 564, shows by resembling that photography element 562 is received.
The specific procedure of evaluation spherical aberration as shown below.
(i) shown in Figure 46 (a), resemble center (optical axis O, the O that determines diffraction light (diffraction circle) 542,544 on 540 in shared interference 1), common axis (X-axis) and connect optical axis O, O 1Line segment vertical halving line (Y-axis), become the Z axle of given angle θ (30 °≤θ≤60 °, preferred 45 °) by the intersection point of X-axis and Y-axis and with X-axis.
(ii) on the Z axle, determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the intersection point balanced configuration of X-axis and Y-axis.
(iii) allow diffraction grating 558 on the direction vertical, move with grating with travel mechanism 566.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) will with the phase of the Z axial coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 44 (b), be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 3 function phi=a pZ 3+ b pZ 2+ c pZ+d pMatch.
(viii) calculate 3 ordered coefficients a of 3 functions of institute's match p, estimate spherical aberration.
In addition, spherical aberration also can adopt method shown in the embodiment 1 with the detection that defocuses.
As mentioned above,, can not be subjected to because the error that in the process of making lens die, produces and the influence of the jog that produces in the part of lens, can correctly detect spherical aberration and defocus according to evaluation method, the evaluating apparatus of the lens of relevant present embodiment.Embodiment 4
Method as detecting 5 rank spherical aberrations and 7 rank spherical aberrations for example has in formation shown in Figure 47, allows it produce interference fringe of reference wave front and mensuration wave front, calculates the method for the aberration of measuring wave front according to the overall data of this interference fringe.In the method, but from have interference capability for example the light launched of light source 570 such as He-Ne Lasers be expanded into slightly directional light by optical beam expander 572, be divided into 2 light beams by half-reflecting mirror 574 then.A light beam (reference wave front) of being cut apart by catoptron 576 reflections, sees through half-reflecting mirror 574, incides photography element 578.On the other hand, another light beam of being cut apart (mensuration wave front) incides detected lens 580, after imaging on the reference spherical reflector 582, be referenced spherical reflector 582 reflections, by detected lens 580, by half-reflecting mirror 574 reflections, incide photography element 578.At this moment, 2 bundle light overlap and produce interference fringe on half-reflecting mirror 574, and this interference fringe is resembled by photography element (for example ccd sensor), utilize the interference fringe of suffered elephant to calculate aberration at signal processing apparatus 584.In calculating, use the data of interference fringe integral body, handle with the coordinate system of axle with radius and angle.But in the method, owing to be necessary to use the data of interference fringe integral body, computing need spend the suitable time.
In aberration evaluation system 600 shown in Figure 48, as the laser generation source 602 emission laser of light source, but this light has interference capability, for example can utilize He-Ne Lasers.Institute's emitted laser directly becomes to omit after the directional light by optical beam expander 604 expanded light beam, changes over 90 directions of spending with half-reflecting mirror 606, is shone on the reflection-type diffraction grating 610 by detected lens 608.Diffraction light from diffraction grating 610 incides lens 608 once more.Diffraction grating 610 is designed to allow 0 diffraction light and+1 diffraction light, and perhaps 0 diffraction light and-1 diffraction light produce shared interference on the pupil face of lens 608.This shared interference light is got back to slightly directional light by lens 608, sees through half-reflecting mirror 606, incides photography element (being resembled body) 614 (for example ccd sensor) by imaging lens 612.Imaging lens 612 is with pupil face imaging on photography element 614 of detected lens 608.Photography element 614 is connected with signal Processing and display device 616, shows by resembling that photography element 614 is received.
When being benchmark with the plane wave, the wave front of 5 rank spherical aberrations adopts constant A can use numerical expression (16) expression in coordinate system as shown in figure 49.
φ＝A[20(ξ 2+η 2) 3-30(ξ 2+η 2) 2+12(ξ 2+η 2)-1] (16)
A: constant
Therefore, when the ξ direction was shared, perhaps when the η direction is shared, the intensity difference of 2 interference lights on these directions (being phase differential) can be used the function representation of numerical expression (17), numerical expression (18) on shared direction.
dφ/dξ＝A[120ξ(ξ 2+η 2) 2-120ξ(ξ 2+η 2)+24ξ] (17)
dφ/dη＝A[120η(ξ 2+η 2) 2-120η(ξ 2+η 2)+24η] (18)
This is appreciated that not when lens do not have other aberrations, 5 rank spherical aberrations resemble as interference fringe in shared interference and show.
Therefore, shown in Figure 51, resemble, not by center O, O in shared interference 1The center, but at the line segment L vertical with common axis 1On get a plurality of point (P 1, P 2... P N-1, P n), allow diffraction grating on the direction vertical, move, with each point (P with the grating groove 1, P 2... P N-1, P n) the Y coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then can quantitatively be obtained 5 rank spherical aberrations (numerical expression (16) arrives the constant A in the numerical expression (18)) with 4 approximation of function (match).
The specific procedure of estimating 5 rank spherical aberrations as shown below.
(i) shown in Figure 51, on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1) and common axis (X-axis).
(ii) on interference resembles, do not pass through center O, the O of 0 diffraction light and+1 diffraction light 1The center, by connecting center O to OO 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point, on the line segment vertical, determine a plurality of measuring point (P with common axis 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) allow diffraction grating 610 on the direction vertical, move with grating with mobile device 618.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn).
(vi) will with the phase of the Y-axis coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 51, be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 4 function (φ=a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0) or 5 function matches.
(viii) calculate 4 ordered coefficients (a of the function of institute's match 4), estimate 5 rank spherical aberrations.
Again, also can adopt following method to calculate 5 rank spherical aberrations, shown in Figure 52, resemble, not by center O, O in shared interference 1The center, at the line segment L vertical with common axis 1On, get a plurality of point (P 1, P 2... P N-1, P n).Again, with line segment L 1Opposition side and clamping O, O 1Vertical halving line, at the line segment L vertical with common axis 2On, get a plurality of point (Q 1, Q 2... Q N-1, Q n).Allow diffraction grating on the direction vertical, move, with each point (P with the grating groove 1, P 2... P N-1, P n) the Y coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then is with 4 function (φ P=a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0) or 5 function matches.Equally, with each point (Q 1, Q 2... Q N-1, Q n) the Y coordinate and the phase of each point Q(φ Q1, φ Q2... φ Q (n-1), φ Qn) on coordinate, draw, the point that will draw then is with 4 function (φ Q=b 4Y 4+ b 3Y 3+ b 2Y 2+ b 1Y+b 0) or 5 function matches.Poor (a by these coefficients 4-b 4) can quantitatively obtain 5 rank spherical aberrations (numerical expression (16) arrives the constant A in the numerical expression (18)).Like this, compare, can more correctly obtain 5 rank spherical aberrations with said method.
The specific procedure of estimating above-mentioned 5 rank spherical aberrations as shown below.
(i) shown in Figure 52, on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1) and common axis (X-axis).
(ii) on interference resembles, do not pass through center O, the O of 0 diffraction light and+1 diffraction light 1The center, by connecting center O to OO 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point, at the line segment L vertical with X-axis 1Go up and determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) in interference region, set be clamped and connected O and O 1Vertical halving line, at L 1Opposition side, the line segment L vertical with common axis 2On, at L 2On get a plurality of point (Q 1, Q 2... Q N-1, Q n).Preferred these measuring points are with respect to the X-axis balanced configuration.
(iv) allow diffraction grating on the direction vertical, move with grating.
(v) measure measuring point (P 1, P 2... P N-1, P n), (Q 1, Q 2... Q N-1, Q n) light intensity.
(vi) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn).
(vii) will with the phase of the Y-axis coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn) and φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), shown in Figure 52, be plotted in rectangular coordinate and fasten.
(viii) with the point drawn with 4 function (φ P=a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0, φ Q=b 4Y 4+ b 3Y 3+ b 2Y 2+ b 1Y+b 0) or 5 function matches.
(ix) 4 ordered coefficients (a of the function of calculating institute match 4, b 4), according to (a 4-b 4) evaluation 5 rank spherical aberrations.
Further, also can adopt following method to calculate 5 rank spherical aberrations, shown in Figure 53, resemble in the shared interference of 0 diffraction light and+1 diffraction light, by center O, O 1The center, at the line segment L vertical with common axis 1On, get a plurality of point (P 1, P 2... P N-1, P n).Again, with line segment L 1Opposition side and clamping O, O 1Vertical halving line, at the line segment L vertical with common axis 2On, get a plurality of point (Q 1, Q 2... Q N-1, Q n).Equally, the shared interference at 0 diffraction light and-1 diffraction light resembles definite L 3, L 4, get a plurality of point (R 1, R 2... R N-1, R n), (S 1, S 2... S N-1, S n).Allow diffraction grating on the direction vertical, move, with each point (P with the grating groove 1, P 2... P N-1, P n), (Q 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n), (S 1, S 2... S N-1, S n) the Y coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn), φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn), φ S(φ S1, φ S2... φ S (n-1), φ Sn) on coordinate, draw, the point that will draw then is with 4 function (φ P=a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0), (φ Q=b 4Y 4+ b 3Y 3+ b 2Y 2+ b 1Y+b 0), (φ R=c 4Y 4+ c 3Y 3+ c 2Y 2+ c 1Y+c 0), (φ S=d 4Y 4+ d 3Y 3+ d 2Y 2+ d 1Y+d 0) or 5 function matches.By these coefficients and with poor (a 4-b 4+ c 4-d 4) can quantitatively obtain 5 rank spherical aberrations (numerical expression (16) arrives the constant A in the numerical expression (18)).Like this, compare, can more correctly obtain 5 rank spherical aberrations with above-mentioned two kinds of methods.
The specific procedure of estimating above-mentioned 5 rank spherical aberrations as shown below.
(i) shown in Figure 53, on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1) and common axis (X-axis).
(ii) not by O and O 1The center, at the line L vertical with X-axis 1Go up and determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) in interference region, set be clamped and connected O and O 1Vertical halving line, at L 1Symmetry, the line segment L vertical with common axis 2On, at L 2On get a plurality of point (Q 1, Q 2... Q N-1, Q n).Preferred these measuring points are with respect to the X-axis balanced configuration.
(iv) not by O and O 2The center, at the line L vertical with X-axis 3Go up and determine a plurality of measuring point (R 1, R 2... R N-1, R n), preferably these measuring points are with respect to the X-axis balanced configuration.
(v) in interference region, set be clamped and connected O and O 2Vertical halving line, at L 3Symmetry, the line segment L vertical with common axis 4On, at L 4On get a plurality of point (S 1, S 2... S N-1, S n).Preferred these measuring points are with respect to the X-axis balanced configuration.
(vi) allow diffraction grating on the direction vertical, move with grating.
(vii) measure measuring point (P 1, P 2... P N-1, P n), (Q 1, Q 2... Q N-1, Q n), (R 1, R 2... R N-1, R n), (S 1, S 2... S N-1, S n) light intensity.
(viii) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2... φ P (n-1), φ Pn), φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn), φ S(φ S1, φ S2... φ S (n-1), φ Sn).
(ix) will with the phase of the Y-axis coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), φ Q(φ Q1, φ Q2... φ Q (n-1), φ Qn), φ R(φ R1, φ R2... φ R (n-1), φ Rn), φ S(φ S1, φ S2... φ S (n-1), φ Sn), as shown in figure 10, be plotted in rectangular coordinate and fasten.
(x) with the point drawn with 4 function (φ P=a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0, φ Q=b 4Y 4+ b 3Y 3+ b 2Y 2+ b 1Y+b 0, φ R=c 4Y 4+ c 3Y 3+ c 2Y 2+ c 1Y+c 0, φ S=d 4Y 4+ d 3Y 3+ d 2Y 2+ d 1Y+d 0) or 5 function matches.
(xi) 4 ordered coefficients (a of the function of calculating institute match 4, b 4, c 4, d 4), according to (a 4-b 4+ c 4-d 4) evaluation 5 rank spherical aberrations.
In addition, with the formation shown in the embodiment 2 in also can obtain identical shared interference apperance, estimate 5 rank spherical aberrations according to above-mentioned processing.
Figure 54 is another embodiment of expression.In the aberration evaluation system shown in this figure, as the laser generation source 620 emission laser of light source, but this light has interference capability, for example can utilize He-Ne Lasers.Institute's emitted laser directly becomes to omit after the directional light by optical beam expander 622 expanded light beam, is shone on the infiltration type diffraction grating 626 by detected lens 624.The diffraction light that sees through from diffraction grating 626 incides detection lens 628.Diffraction grating 626 is designed to allow 0 diffraction light and+1 diffraction light or-1 diffraction light produce shared interference on the pupil face of lens 628.This shared interference light is got back to slightly directional light by lens 628, incides photography element 632 (for example ccd sensor) by imaging lens 630.Imaging lens 630 is with pupil face imaging on photography element 632 of detected lens 628.Photography element 632 is connected with signal Processing and display device 634, shows by resembling that photography element 632 is received.
When being benchmark with the plane wave, the wave front of 7 rank spherical aberrations adopts constant B can use numerical expression (19) expression in coordinate system as shown in figure 49.
φ＝B[70(ξ 2+η 2) 4-140(ξ 2+η 2) 3+90(ξ 2+η 2) 2-20(ξ 2+η 2)+1](19)
B: constant
Therefore, when the ξ direction was shared, perhaps when the η direction is shared, the intensity difference of 2 interference lights on these directions (being phase differential) can be used the function representation of numerical expression (20), numerical expression (21) on shared direction.
dφ/dξ＝B[560ξ(ξ 2+η 2) 3-840ξ(ξ 2+n 2) 2+360ξ(ξ 2+η 2)-40ξ] (20)
dφ/dη＝B[560η(ξ 2+η 2) 3-840η(ξ 2+η 2) 2+360η(ξ 2+η 2)-40η] (21)
This is appreciated that not when lens do not have other aberrations, 7 rank spherical aberrations resemble as interference fringe in shared interference and show.
Therefore, shown in Figure 55, resemble, do not pass through center O, the O of O diffraction light and+1 diffraction light in shared interference 1The center, for example, by connecting center O to OO 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point, at the line segment L vertical with common axis 1Go up and determine a plurality of measuring point (P 1, P 2... P N-1, P n), allow diffraction grating on the direction vertical, move, with each point (P with the grating groove 1, P 2... P N-1, P n) the Y coordinate and the phase of each point P(φ P1, φ P2... φ P (n-1), φ Pn) on coordinate, draw, the point that will draw then is with 6 approximation of function (match), can quantitatively obtain 7 rank spherical aberrations (the constant B of numerical expression (19) in the numerical expression (21).
The specific procedure of estimating 7 rank spherical aberrations as shown below.
(i) shown in Figure 55, on resembling, interference determines center (optical axis O, the O of diffraction light (diffraction circle) 1) and common axis (X-axis).
(ii) do not pass through center O, the O of 0 diffraction light and+1 diffraction light 1The center, for example by connecting center O to OO 11/4th distance of line segment (perhaps from the center O to OO 11/4th distance) on point, at the line segment L vertical with common axis 1Go up and determine a plurality of measuring point (P 1, P 2... P N-1, P n), preferably these measuring points are with respect to the X-axis balanced configuration.
(iii) allow diffraction grating 626 on the direction vertical, move with grating with mobile device 636.
(iv) measure measuring point (P 1, P 2... P N-1, P n) light intensity.
(v) obtain the sine-shaped phase of light intensity of each measuring point P(φ P1, φ P2φ P (n-1), φ Pn).
(vi) will with the phase of the Y-axis coordinate of each measuring point and corresponding light intensity P(φ P1, φ P2... φ P (n-1), φ Pn), shown in Figure 55, be plotted in rectangular coordinate and fasten.
(vii) with the point drawn with 6 function (φ=a 6Y 6+ a 5Y 5+ a 4Y 4+ a 3Y 3+ a 2Y 2+ a 1Y+a 0) or 7 function matches.
(viii) calculate 6 ordered coefficients (a of the function of institute's match 6), estimate 7 rank spherical aberrations.
In addition and shown in the embodiment 1 like that, not only at line segment L 1On, be equivalent to L 2Line segment, or be equivalent to L 2, L 3, L 4Line segment on and above-mentioned same treatment, with the difference evaluation 7 rank spherical aberrations of a plurality of 6 ordered coefficients.At this moment, can more correctly estimate 7 rank spherical aberrations.Again,, and also carry out same processing, on average also can obtain 7 rank spherical aberrations according to it at the interference region of 0 time and-1 time not only at the interference region of 0 time and+1 time.
As described above, according to aberration evaluation method, the evaluating apparatus of present embodiment, can high speed detection go out 5 rank spherical aberrations, 7 rank spherical aberrations.

Claims (43)

1. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make operation that 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, operation that (b) changes the position phase of above-mentioned diffraction light, (c) the position phase of a plurality of measuring points acquisition intensity variation on the mensuration line of the mid point of the line segment of the optical axis by above-mentioned 2 diffraction lights of connection above-mentioned shared interference resembles and (d) obtain the operation of the characteristic of said lens mutually according to last rheme.
2. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the characteristic of lens with the coefficient value of this function.
3. lens evaluation method according to claim 1 and 2 is characterized in that making the shared interference of above-mentioned 2 diffraction lights to resemble and passes said lens.
4. the evaluation method of lens, it is characterized in that having (a) and on object lens, assemble the light that penetrates from light source, this light of having assembled is projected on the reflection-type diffraction grating, make from 2 diffraction lights of the different number of times of this reflection-type diffraction grating reflection and on above-mentioned object lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and changes the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the operation of the position phase of acquisition intensity variation and (d) obtain the operation of the characteristic of said lens mutually according to last rheme.
5. the evaluation method of lens is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the reflection-type diffraction grating, make from 2 diffraction lights of the different number of times of this reflection-type diffraction grating reflection and on above-mentioned object lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the optical characteristics of above-mentioned object lens with the coefficient value of this function.
6. the evaluation method of lens is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the transmission-type diffraction grating, make 2 diffraction lights of the different number of times that seen through this transmission-type diffraction grating on lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) operation and (d) that obtains the position phase of intensity variation in above-mentioned shared interference resembles on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights obtains the operation of the characteristic of above-mentioned object lens mutually according to last rheme.
7. the evaluation method of lens is characterized in that having (a) and assemble the light that penetrates from light source on object lens, this light of having assembled is projected on the transmission-type diffraction grating, make 2 diffraction lights of the different number of times that seen through this transmission-type diffraction grating on lens, roughly become directional light, this is roughly become light optically focused on collector lens of directional light, make this light of having assembled obtain the operation of the shared interference elephant of above-mentioned 2 diffraction lights in imaging on the imaging surface and on this imaging surface, (b) above-mentioned diffraction grating is moved to have on the direction with the direction composition of the direction of above-mentioned grating orientation quadrature and change the position operation mutually of above-mentioned diffraction light, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the mensuration line of the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights, obtain intensity variation position phase operation and (d) supposing that said determination point position is X, last rheme during mutually for Y with rheme phase Y on the approximation of function of the X that locates and estimate the operation of the optical characteristics of above-mentioned object lens with the coefficient value of this function.
8. according to each described lens evaluation method of claim 1 to 7, it is characterized in that above-mentioned 2 diffraction lights are any in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light.
9. according to each described lens evaluation method of claim 1 to 7, the optical characteristics that it is characterized in that above-mentioned evaluation is in the aberration outside defocus amount, comatic aberration, spherical aberration, astigmatism and these aberrations.
10. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is rheme phase Y and estimate the operation of above-mentioned optical system defocus amount completely with 1 time coefficient value of this approximating function on the approximation of function more than 1 time with 1 function of the X that locates or number of times during mutually for Y.
11. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the vertical halving line of the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is approached rheme phase Y with the quadratic function of the X that locates during mutually for Y and with the operation of the quadratic coefficients value evaluation comatic aberration of this quadratic function.
12. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and with respect to this line segment on a plurality of measuring points on 2 oblique lines that become predetermined angular on positive dirction and the negative direction, obtain the operation of the position of the intensity variation on this measuring point phase with (d) suppose that said determination point position is X on 2 oblique lines separately above-mentioned, last rheme is approached rheme phase Y with the quadratic function of the X that locates or cubic function during mutually for Y and with the operation of the quadratic coefficients value evaluation comatic aberration of this quadratic function or cubic function.
13. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the vertical bisecting line of the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and a plurality of measuring points on 2 oblique lines that become predetermined angular with respect to this line segment in positive direction with negative direction obtain the operation of position phase of the intensity variation on this measuring point and (d) be used in above-mentioned vertical bisecting line hypothesis said determination point position be X and upper rheme use during mutually for Y the quadratic function of the X that locates or quadratic coefficients value that cubic function approaches resulting this quadratic function of upper rheme phase Y or cubic function with suppose at above-mentioned separately 2 oblique lines said determination point position be X and on rheme use the operation of the difference evaluation comatic aberration of the locate quadratic function of X or the quadratic coefficients value that cubic function approaches resulting this quadratic function of rheme phase Y or cubic function during mutually for Y.
14. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of the shared interference elephant of 1 diffraction light and-1 diffraction light, (b) make above-mentioned shared operation of interfering the shared direction rotation of elephant, (c) mobile diffraction grating and change the operation of the position phase of above-mentioned diffraction light, (d) in above-mentioned shared interference resembles, on a plurality of measuring points on the vertical halving line of the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (e) supposing that said determination point position is X, last rheme is rheme phase Y and estimate the operation of above-mentioned optical system astigmatism completely with 1 time coefficient value of this function on the approximation of function more than 1 time with 1 function of the X that locates or number of times during mutually for Y.
15. lens evaluation method according to claim 14 is characterized in that making the operation of above-mentioned shared direction rotation to comprise the operation of above-mentioned diffraction grating rotation predetermined angular.
16. lens evaluation method according to claim 14 is characterized in that making the operation of above-mentioned shared direction rotation to comprise the operation of said lens rotation predetermined angular.
17. lens evaluation method according to claim 14, the operation that it is characterized in that making the operation of above-mentioned shared direction rotation to have being used in the 1st diffraction grating diffraction light that has formed the grating groove on the 1st direction be used in the direction different with above-mentioned the 1st direction on formed the operation of the 2nd diffraction grating diffraction light of grating groove.
18. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles, on a plurality of measuring points on the line segment of the optical axis that connects above-mentioned diffraction light, obtain the intensity variation on this measuring point position phase operation and (d) supposing that said determination point position is X, last rheme is approached rheme phase Y with the cubic function of the X that locates or biquadratic function during mutually for Y and is estimated the operation of above-mentioned optical system spherical aberration completely with three times coefficient value of this cubic function or biquadratic function.
19. the evaluation method of lens, it is characterized in that having (a) diffraction from the light of lens outgoing and imaging surface obtain 0 diffraction light and ± 1 diffraction light any or+operation of shared interference elephant between 1 diffraction light and-1 diffraction light; (b) operation of the position phase of the above-mentioned diffraction light of change; (c) in above-mentioned shared interference resembles,
On a plurality of the 1st measuring points on the line segment of the optical axis that connects above-mentioned 2 diffraction lights, obtain the intensity variation on the 1st measuring point the 1st phase,
On a plurality of the 2nd measuring points on the vertical halving line of above-mentioned line segment, obtain the intensity variation on the 2nd measuring point the 2nd phase,
The mid point by above-mentioned line segment and with respect to this line segment on a plurality of the 3rd measuring points on the 3rd oblique line that becomes predetermined angular on the positive dirction, obtain the intensity variation on the 3rd measuring point the 3rd phase,
At the mid point by above-mentioned line segment and on a plurality of the 4th measuring points on the 4th oblique line that becomes predetermined angular on the negative direction, obtain the operation of the 4th phase of the intensity variation on the 4th measuring point with respect to this line segment; (d) be changed to X and above-mentioned the 1st in above-mentioned the 1st spotting of hypothesis and approach above-mentioned the 1st phase Y with the 1st the 1st function F that locates X during mutually for Y, be changed to X and above-mentioned the 2nd in above-mentioned the 2nd spotting of hypothesis and approach above-mentioned the 2nd phase Y with the 2nd the 2nd function F that locates X during mutually for Y, be changed to X and above-mentioned the 3rd in above-mentioned the 3rd spotting of hypothesis and approach above-mentioned the 3rd phase Y with the 3rd the 3rd function F that locates X during mutually for Y, be changed to X and above-mentioned the 4th in above-mentioned the 4th spotting of hypothesis and approach above-mentioned the 4th phase Y with the 4th the 4th function F that locates X during mutually for Y and according to above-mentioned the 1st function F and the 1st residual delta of Y mutually, above-mentioned the 2nd function F and the 2nd residual delta of Y mutually, above-mentioned the 3rd function F with the 3rd mutually the residual delta of Y and above-mentioned the 4th function F with the 4th mutually the residual delta of Y estimate the operation of above-mentioned optical system higher aberration completely.
20. the method for adjustment of lens, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) on diffraction grating the diffraction transmission operation of shared interference light of 2 diffraction lights of the light of above-mentioned collector lens and the different number of times of outgoing, the operation of grating when (b) moving above-mentioned spreading out, (c) resembled the operation of accepting above-mentioned shared interference light imaging on the body, (d) above-mentioned resembled the body shared interference interference of light obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the position mutually and according on rheme detect by behavior detector above-mentioned collector lens characteristic operation and (e) adjust the operation of the position of above-mentioned collector lens by behavior detector according to the testing result of above-mentioned behavior detector.
21. the method for adjustment of lens, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) on diffraction grating the diffraction transmission operation of shared interference light of 2 diffraction lights of the light of above-mentioned collector lens and the different number of times of outgoing, (b) operation of mobile above-mentioned diffraction grating, (c) resembled the operation of accepting above-mentioned shared interference light imaging on the body, (d) above-mentioned resembled the body shared interference interference of light obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by connecting above-mentioned 2 diffraction lights the position mutually and according on rheme detect the operation of the characteristic of above-mentioned collector lens by behavior detector, (e) resembled on the body operation of the reflected light of accepting above-mentioned collector lens or transmitted light and (f) according to the operation of adjusting the position of above-mentioned collector lens in the information of the above-mentioned the 2nd light that is resembled on the body to be accepted on by lens adjusting mechanism the 2nd.
22. according to claim 20 or 21 described lens methods of adjustment, it is characterized in that above-mentioned collector lens has cover layer face around lens face, the above-mentioned the 2nd is resembled reflected light or the transmitted light that body is accepted above-mentioned cover layer face.
23., it is characterized in that above-mentioned diffraction grating is a reflection-type diffraction grating according to each described lens method of adjustment of claim 20 to 22.
24., it is characterized in that above-mentioned diffraction grating is the transmission-type diffraction grating according to each described lens method of adjustment of claim 20 to 22.
25. lens method of adjustment, it is the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) makes wide the causing of penetrating from light source become directional light and incide operation on the above-mentioned collector lens, (b) in the time of the light assembled by above-mentioned collector lens with reflection-type diffraction grating reflection and diffraction, the shared interference light of 2 diffraction lights of different number of times is incided the operation of above-mentioned collector lens, (c) on imaging lens, make from the operation of the above-mentioned shared interference light imaging of above-mentioned collector lens outgoing, (d) resembled on the body accept above-mentioned imaging the operation of shared interference light and (e) above-mentioned resembled the body shared interference obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by being connected above-mentioned 2 diffraction lights the position mutually and on the basis rheme obtain the operation of the characteristic of above-mentioned collector lens by behavior detector.
26. lens method of adjustment, be the method for adjustment of the collector lens that comprised in completely in optical system, it is characterized in that having (a) and make wide the causing of penetrating from light source become directional light and incide operation on the above-mentioned collector lens, (b) in the time of the light assembled by above-mentioned collector lens with the transmission of transmission-type diffraction grating and diffraction the shared interference light of 2 diffraction lights of different number of times is incided operation on above-mentioned the 2nd collector lens, (c) make from the operation of the above-mentioned shared interference light imaging of above-mentioned the 2nd collector lens outgoing, (d) resembled on the body accept above-mentioned imaging the operation of shared interference light and (e) above-mentioned resembled the body shared interference obtain intensity variation in resembling on a plurality of measuring points on the mensuration line at the mid point of the line segment of the optical axis by being connected above-mentioned 2 diffraction lights the position mutually and on the basis rheme obtain the operation of the characteristic of above-mentioned collector lens by behavior detector.
27. according to each described lens method of adjustment of claim 20 to 24, it is characterized in that above-mentioned behavior detector in above-mentioned shared interference resembles the position phase that obtains the intensity variation on this measuring point on a plurality of measuring points on the line of the optical axis by connecting above-mentioned diffraction light, hypothesis said determination point position be X and on rheme locate on 1 approximation of function of X rheme phase Y and estimate above-mentioned optical system defocus amount completely of usefulness during mutually for Y with 1 time coefficient value of this 1 function.
28. according to each described lens method of adjustment of claim 20 to 24, it is characterized in that above-mentioned behavior detector in above-mentioned shared interference resembles at the mid point of the line segment of the optical axis by connecting above-mentioned diffraction light and with respect to the position phase of this line segment acquisition intensity variation on this measuring point on a plurality of measuring points on 2 oblique lines that become predetermined angular on positive dirction and the negative direction, suppose that said determination point position is X on 2 oblique lines separately above-mentioned, last rheme is approached rheme phase Y with the quadratic function of the X that locates or cubic function during mutually for Y and with the quadratic coefficients value evaluation comatic aberration of this quadratic function or cubic function.
29. the method for adjustment of an optical unit, it is characterized in that possessing have (a) prepare to have by reflective material forms layer, separate predetermined distance and be formed with a plurality of parallel light inlet windows, cross from the optical axis of the light of above-mentioned optical unit outgoing set and when reflecting the above-mentioned light of institute's incident the diffraction transmission cross the light of above-mentioned a plurality of light inlet windows and make 2 diffraction lights of different number of times interfere the operation of the reflection and transmission type diffraction grating that obtains shared interference elephant, (b) above-mentioned diffraction grating is moved to have operation on the direction with the direction composition of grating orientation orthogonal directions, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from above-mentioned shared interference, (d) adjust the operation of above-mentioned optical unit according to the testing result of above-mentioned detecting device, (e) make above-mentioned reflection and transmission type diffraction grating move to operation on the above-mentioned optical axis direction, (f) with the operation of photo detector acceptance by the light that above-mentioned diffraction grating reflected, (g) adjust the operation of the position of above-mentioned photo detector according to the light intensity of accepting by above-mentioned photo detector.
30. the method for adjustment of an optical unit, it is characterized in that possessing have (a) prepare on the surface of the plate of forming by translucent material, to separate predetermined distance be provided with a plurality of parallel grooves also with the semi-transparency material covered should the surface diffraction grating, cross from the optical axis of the light of above-mentioned optical unit outgoing set and when reflecting the above-mentioned light of institute's incident the diffraction transmission cross the light of above-mentioned a plurality of light inlet windows and make 2 diffraction lights of different number of times interfere the operation of the reflection and transmission type diffraction grating that obtains shared interference elephant, (b) above-mentioned diffraction grating is moved to have operation on the direction with the direction composition of grating orientation orthogonal directions, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from above-mentioned shared interference, (d) adjust the operation of above-mentioned optical unit according to the testing result of above-mentioned detecting device, (e) make above-mentioned reflection and transmission type diffraction grating move to operation on the above-mentioned optical axis direction, (f) with the operation of photo detector acceptance by the light that above-mentioned diffraction grating reflected, (g) adjust the operation of the position of above-mentioned photo detector according to the light intensity of accepting by above-mentioned photo detector.
31. the method for adjustment of an optical unit, be the method for adjustment that has the optical unit of lens, it is characterized in that possessing and have (a) to prepare to have transparent panel and diffraction from the light of above-mentioned optical unit outgoing and form the operation of support of transmission-type diffraction grating of shared interference elephant of the diffraction light of different number of times, (b) make above-mentioned diffraction grating move to operation on the working position of the optical axis that crosses the light that has seen through said lens, (c) resemble the operation of the characteristic that detects above-mentioned optical unit from the above-mentioned shared interference that has seen through the diffraction grating that is provided on the above-mentioned working position, (d) adjust the operation of above-mentioned optical unit according to the characteristic of above-mentioned detected optical unit, (e) make above-mentioned transparent panel move to operation on the working position of the optical axis that crosses the light that has seen through said lens, (f) from having seen through the center that resembling of the light that is provided in the transparent panel on the above-mentioned working position detect light intensity distributions and the operation of the position deviation between the said lens center, (g) adjust the operation of said lens according to above-mentioned detected position deviation.
32. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles at the mid point of the optical axis by connecting above-mentioned 2 diffraction lights not and with the vertical line segment of the line that connects above-mentioned 2 optical axises on a plurality of measuring points on obtain intensity variation the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 2 times of the Y that locates or 3 approximation of function and with the operation of the spherical aberration of 2 subsystem numerical Evaluation said lens of this function.
33. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Z in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 3 times of the Z that locates or 4 approximation of function and with the operation of the spherical aberration of 3 subsystem numerical Evaluation said lens of this function.
34. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Z in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 1 time of the Z that locates or 2 approximation of function and with the operation of the defocus amount of 1 subsystem numerical Evaluation said lens of this function.
35., it is characterized in that above-mentioned 2 diffraction lights are any in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light according to each described lens evaluation method of claim 32 to 34.
36. a lens evaluation method is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights not and with the vertical line segment of the straight line that connects above-mentioned 2 optical axises on a plurality of measuring points on obtain intensity variation the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 4 times of the Y that locates or 5 approximation of function and with the operation of 5 spherical aberrations of 4 subsystem numerical Evaluation said lens of this function.
37. a lens evaluation method is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles not the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and clip the vertical halving line of the line segment that connects above-mentioned 2 optical axises in both sides and obtain with the vertical line segment of the straight line that connects above-mentioned 2 optical axises and the position that on a plurality of measuring points on each line segment, obtains intensity variation mutually operation and (d) supposing that said determination point position is Y 1, Y 2, to go up rheme be φ mutually 1, φ 2The time with the Y that locates 1, Y 24 times or 5 approximation of function on rheme phase φ 1, φ 2, suppose that 4 subsystem numerical value of these 2 functions are respectively a 4, b 4The time use a 4With b 4Difference estimate the operation of 5 spherical aberrations of said lens.
38. the evaluation method of lens is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and with the straight line that connects above-mentioned 2 optical axises become obtain intensity variation on a plurality of measuring points on the line segment of predetermined angular the position mutually operation and (d) be Y in hypothesis said determination point position, last rheme during mutually for φ with rheme phase φ on 6 times of the Y that locates or 7 approximation of function and with the operation of 7 spherical aberrations of 6 subsystem numerical Evaluation said lens of this function.
39. a lens evaluation method is characterized in that having (a) diffraction from the light of lens outgoing and make 2 diffraction lights of different number of times interfere and obtain the operation of shared interference elephant, (b) operation of the position phase of the above-mentioned diffraction light of change, (c) in above-mentioned shared interference resembles not the mid point of the optical axis by connecting above-mentioned 2 diffraction lights and clip the vertical halving line of the line segment that connects above-mentioned 2 optical axises in both sides and obtain with the vertical line segment of the straight line that connects above-mentioned 2 optical axises and the position that on a plurality of measuring points on each line segment, obtains intensity variation mutually operation and (d) supposing that said determination point position is Y 1, Y 2, to go up rheme be φ mutually 1, φ 2The time with the Y that locates 1, Y 26 times or 7 approximation of function on rheme phase φ 1, φ 2, suppose that 6 subsystem numerical value of these 2 functions are respectively a 6, b 6The time use a 6With b 6Difference estimate the operation of 7 spherical aberrations of said lens.
40., it is characterized in that above-mentioned 2 diffraction lights are a certain side in 0 diffraction light and ± 1 diffraction light or are+1 diffraction light and-1 diffraction light according to each described lens evaluation method of claim 36 to 39.
41. lens evaluation method according to claim 14 is characterized in that the direction that above-mentioned diffraction grating is moved is the direction that has with the direction composition of grating orientation orthogonal directions.
42., it is characterized in that the direction that above-mentioned diffraction grating is moved is the direction that has with the direction composition of grating orientation orthogonal directions according to claim 20 or 21 described lens methods of adjustment.
43., it is characterized in that above-mentioned diffraction grating is moved to and have on the direction with the direction composition of grating orientation orthogonal directions according to each described lens method of adjustment of claim 25 to 28.
CNB001062557A 1999-05-19 2000-05-19 Lens evaluation method and device, optical unit and lens-adjusting method and device thereof Expired - Lifetime CN100390519C (en)

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JP138584/1999 1999-05-19
JP13858499A JP3667149B2 (en) 1999-05-19 1999-05-19 Lens evaluation method, lens evaluation device, and lens adjustment device
JP28786899A JP3574765B2 (en) 1999-10-08 1999-10-08 Lens evaluation method and lens evaluation device
JP287865/1999 1999-10-08
JP28786599A JP3989656B2 (en) 1999-10-08 1999-10-08 Optical unit adjustment method and optical unit adjustment device
JP287868/1999 1999-10-08
JP298184/1999 1999-10-20
JP29818499A JP3574767B2 (en) 1999-10-20 1999-10-20 Lens evaluation method and lens evaluation device

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