CN120359411A - 金属氧化物半导体气体传感器 - Google Patents

金属氧化物半导体气体传感器

Info

Publication number
CN120359411A
CN120359411A CN202380085650.8A CN202380085650A CN120359411A CN 120359411 A CN120359411 A CN 120359411A CN 202380085650 A CN202380085650 A CN 202380085650A CN 120359411 A CN120359411 A CN 120359411A
Authority
CN
China
Prior art keywords
electrode
sensor
metal oxide
gas
sensing layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380085650.8A
Other languages
English (en)
Chinese (zh)
Inventor
石仓友和
藤田一孝
政冈雷太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Publication of CN120359411A publication Critical patent/CN120359411A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/004—CO or CO2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN202380085650.8A 2023-01-30 2023-11-01 金属氧化物半导体气体传感器 Pending CN120359411A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202363441971P 2023-01-30 2023-01-30
US63/441,971 2023-01-30
PCT/JP2023/039455 WO2024161739A1 (ja) 2023-01-30 2023-11-01 金属酸化物半導体ガスセンサ

Publications (1)

Publication Number Publication Date
CN120359411A true CN120359411A (zh) 2025-07-22

Family

ID=92146102

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380085650.8A Pending CN120359411A (zh) 2023-01-30 2023-11-01 金属氧化物半导体气体传感器

Country Status (4)

Country Link
EP (1) EP4660621A1 (https=)
JP (1) JPWO2024161739A1 (https=)
CN (1) CN120359411A (https=)
WO (1) WO2024161739A1 (https=)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5698646A (en) * 1980-01-09 1981-08-08 Matsushita Electric Works Ltd Flamable-gas detecting element
JP4807561B2 (ja) * 2005-11-22 2011-11-02 国立大学法人九州大学 ガスセンサ用金属酸化物半導体材料の製造方法
CN102645454A (zh) * 2012-03-30 2012-08-22 长春理工大学 具有纳米纤维敏感层的平面式乙炔气体传感器
JP6586694B2 (ja) 2015-07-07 2019-10-09 国立大学法人九州工業大学 ガスセンサ用材料及びその製造方法、並びにこれを用いたガスセンサの製造方法
US11686697B2 (en) * 2020-09-24 2023-06-27 International Business Machines Corporation Multifunctional heterojunction metal oxide gas sensor

Also Published As

Publication number Publication date
EP4660621A1 (en) 2025-12-10
JPWO2024161739A1 (https=) 2024-08-08
WO2024161739A1 (ja) 2024-08-08

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