CN1202282C - High temp. -resisting plasma cavity resonator - Google Patents
High temp. -resisting plasma cavity resonator Download PDFInfo
- Publication number
- CN1202282C CN1202282C CNB021390800A CN02139080A CN1202282C CN 1202282 C CN1202282 C CN 1202282C CN B021390800 A CNB021390800 A CN B021390800A CN 02139080 A CN02139080 A CN 02139080A CN 1202282 C CN1202282 C CN 1202282C
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- resonant cavity
- cooling water
- resonant
- water channel
- resonator cavity
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Abstract
The present invention relates to a high temperature resistance plasma cavity resonator for a PCVD optical fiber preformrod machine tool, which comprises a barrel-shaped resonant cavity casing and a heat-insulating layer which is coated at the outside of the resonant cavity casing. An annular resonant cavity body is arranged in the resonant cavity casing, and the difference is the resonant cavity casing is surrounded at the periphery of the resonant cavity body, and both ends of the resonant cavity body are provided with cooling water channels. The present invention has the advantages that: 1. an integral cooling zone is formed by the periphery of the resonant cavity body and the cooling water channels arranged at both sides, and thus, the cooling quantity is enlarged, and the cooling distribution is uniform; the plasma resonant cavity can continuously work for a long time under the condition of low temperature, and meanwhile, the service life of the present invention is prolonged; 2. the present invention is favorable to further raising the processing power of the plasma resonant cavity; 3. a thin quartz glass cover is adopted to sheath at the outside of the heat-insulating layer, and thus, the phenomenon of falling dregs is avoided, the heat-insulating layer can be used for a long time without damage, and the stable, reliable and clean heat-insulating properties can be kept.
Description
Technical field
The present invention relates to a kind of high temperature resistant plasma resonant of the PCVD of being used for preform machining tool, is the further improvement to existing plasma resonant.
Background technology
PCVD is that PCVD technology is one of main technique of preform processing, the processing mechanism of PCVD technology is by the direct effect of high frequency microwave to reactant gas, make its rapid generation physical-chemical reaction and form pure silicon dioxide or doped silica, directly deposit with vitreous state at the silica tube inwall.Plasma resonant is the key core parts that emission high frequency microwave energy is finished above-mentioned processes.Silica tube need deposit in about 1200 ℃ temperature in PCVD technology, plasma resonant also must carry out work in the hot environment of sd so, therefore, need cooling water channel and outer thermofin be set at plasma resonant, just can make its works better under the situation of maintenance lesser temps.Existing plasma resonant usually only is provided with cooling water channel at the two ends of resonator cavity, and not only amount of cooling water is little for this, and the cooling maldistribution, so stream time is short, is easy to produce the undesirable deformation of resonant cavity and influences its work-ing life; On the other hand, thermofin is that directly to be coated on the resonator cavity housing by refractory materials outer and form, and easily splits behind rapid heat cycle, frangible, can produce the problem of slag polluted product, and need the frequent maintenance maintenance.Along with the increasing of preform specification, the increasing of plasma resonant delivered power, and the prolongation of process period continuously, the problems referred to above are particularly outstanding.
Summary of the invention
Technical problem to be solved by this invention be to provide that a kind of resistance to elevated temperatures is good, long service life, the long plasma resonant of stream time, to overcome the deficiency that prior art exists.
The present invention the technical problem that will further solve provide that a kind of its thermofin is can life-time service harmless, stable performance and the plasma resonant of polluted product not.
The present invention for the technical scheme that problem adopted of the above-mentioned proposition of solution is: include the resonator cavity housing 4 of a tubular and be coated on the outer thermofin of resonator cavity housing, be provided with annular resonant cavity 7 in the resonator cavity housing, its difference is that periphery and the two ends around resonant cavity are provided with cooling water channel 8 in the resonator cavity housing.
Press such scheme, in the resonator cavity housing, be provided with a reciprocating type cooling water channel, the joining with entery and delivery port 11,9 respectively end to end of reciprocating type cooling water channel around the periphery and the two ends of resonant cavity.
Press such scheme, further improvement of the present invention is that described thermofin is made of the thin silica glass cover 1 of refractory fiber floor 3, refractory materials sheath 2 and outer cover.
The invention has the advantages that: 1, cooling water channel is set by periphery and two ends at resonant cavity, form the cooling zone of a whole shape, this has not only increased amount of cooling water, and it is more even that cooling is distributed, can make plasma resonant non-stop run for a long time at a lower temperature, its resistance to elevated temperatures is further improved, has also prolonged its work-ing life simultaneously; 2, help the further raising of plasma resonant working power; 3, adopt thin silica glass cover to cover on the outside of thermofin, both can strengthen protection, can avoid the generation of slag phenomenon again, can make the thermofin life-time service and do not have damage, keep the heat-proof quality of reliable and stable cleaning refractory materials.
Description of drawings
Fig. 1 is the positive sectional structure chart of one embodiment of the invention.
Fig. 2 is the expansion sectional view of cooling water channel in the resonator cavity housing among Fig. 1, and arrow is represented water (flow) direction among the figure.
Embodiment
Further specify embodiments of the invention below in conjunction with accompanying drawing, include a columnar resonator cavity housing 4, the resonator cavity housing is made by metallic substance, comprise out cylinder face and inner cylinder face, the middle part is provided with axially extending bore, in the resonator cavity housing, be provided with annular resonant cavity 7, the inner cylinder face of resonant cavity offers power delivery port 6, the out cylinder face and the power input hole 10 of resonant cavity join, the power delivery outlet roughly is positioned at the middle part of resonator cavity housing, periphery and two ends around resonant cavity in the resonator cavity housing are provided with an axially reciprocal patrolling cooling water channel 8, the cooling water channel of turning point, the two ends segment distance that extends internally wherein, cooling water channel end to end respectively with advance, water outlet 11,9 join.The water-in and water-out aperture is positioned at the both sides of power input aperture.Be coated with thermofin at the resonator cavity housing, thermofin is made of the thin silica glass cover 1 of refractory fiber floor 3, refractory materials sheath 2, refractory fiber floor 3 and outer cover, through hole is offered in the centre, with the axially extending bore phase configuration at resonator cavity housing middle part, walks for processed sedimentary silica tube 5.Present embodiment is 1150～1200 ℃ at operating ambient temperature, and the continuous type time was above 10 hours.
Claims (5)
1, a kind of high temperature resistant plasma resonant, include the resonator cavity housing (4) of a tubular and be coated on the outer thermofin of resonator cavity housing, be provided with annular resonant cavity (7) in the resonator cavity housing, it is characterized in that periphery and the two ends around resonant cavity are provided with cooling water channel (8) in the resonator cavity housing.
2, by the described high temperature resistant plasma resonant of claim 1, it is characterized in that in the resonator cavity housing being provided with a reciprocating type cooling water channel the joining with entery and delivery port (11), (9) respectively end to end of reciprocating type cooling water channel around the periphery and the two ends of resonant cavity.
3,, it is characterized in that described thermofin is made of the thin silica glass cover (1) of refractory fiber floor (3), refractory materials sheath (2) and outer cover by claim 1 or 2 described high temperature resistant plasma resonants.
4, by the described high temperature resistant plasma resonant of claim 2, it is characterized in that in the resonator cavity housing being provided with an axially reciprocal patrolling cooling water channel, wherein the cooling water channel of turning point, the two ends segment distance that extends internally around the periphery of resonant cavity and two ends.
5, by claim 1 or 2 described high temperature resistant plasma resonants, it is characterized in that thermofin is made of the thin silica glass cover of refractory fiber floor, refractory materials sheath, refractory fiber floor and outer cover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021390800A CN1202282C (en) | 2002-09-20 | 2002-09-20 | High temp. -resisting plasma cavity resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021390800A CN1202282C (en) | 2002-09-20 | 2002-09-20 | High temp. -resisting plasma cavity resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1483855A CN1483855A (en) | 2004-03-24 |
| CN1202282C true CN1202282C (en) | 2005-05-18 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021390800A Expired - Lifetime CN1202282C (en) | 2002-09-20 | 2002-09-20 | High temp. -resisting plasma cavity resonator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1202282C (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1977476B1 (en) * | 2005-12-23 | 2011-04-27 | Alcatel Lucent | Attachment of deep drawn resonator shell |
| KR101125086B1 (en) * | 2007-04-17 | 2012-03-21 | 가부시키가이샤 알박 | Film forming apparatus |
| CN106455287B (en) * | 2016-07-29 | 2018-12-28 | 中国原子能科学研究院 | A kind of uneven double interior bar spiral shape high-frequency resonant cavities of superconducting cyclotron |
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2002
- 2002-09-20 CN CNB021390800A patent/CN1202282C/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| CN1483855A (en) | 2004-03-24 |
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| C14 | Grant of patent or utility model | ||
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Granted publication date: 20050518 |