CN219861095U - Double-hot-zone graphite resistance furnace - Google Patents
Double-hot-zone graphite resistance furnace Download PDFInfo
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- CN219861095U CN219861095U CN202320260022.6U CN202320260022U CN219861095U CN 219861095 U CN219861095 U CN 219861095U CN 202320260022 U CN202320260022 U CN 202320260022U CN 219861095 U CN219861095 U CN 219861095U
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- gas
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- pump
- furnace body
- hot zone
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 34
- 239000010439 graphite Substances 0.000 title claims abstract description 34
- 238000010438 heat treatment Methods 0.000 claims abstract description 61
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000009977 dual effect Effects 0.000 claims 6
- 239000007789 gas Substances 0.000 description 34
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 238000000151 deposition Methods 0.000 description 14
- 230000008021 deposition Effects 0.000 description 11
- 235000012239 silicon dioxide Nutrition 0.000 description 10
- 239000010410 layer Substances 0.000 description 8
- 239000010453 quartz Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005253 cladding Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910003910 SiCl4 Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000003723 Smelting Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000012792 core layer Substances 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910006113 GeCl4 Inorganic materials 0.000 description 1
- 241000668842 Lepidosaphes gloverii Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 1
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Abstract
The utility model provides a graphite resistance furnace with double hot areas, which comprises a furnace body capable of reciprocating and linearly moving, wherein a gas-end heating body and a pump-end heating body which are coaxially arranged are arranged in the furnace body, the gas-end heating body and the pump-end heating body are of hollow structures, the gas-end heating body is provided with a gas-end positive electrode and a gas-end negative electrode, the pump-end heating body is provided with a pump-end positive electrode and a pump-end negative electrode, and the gas-end positive electrode, the gas-end negative electrode, the pump-end positive electrode and the pump-end negative electrode are respectively connected with the furnace body, so that the problem of uniformity of a prefabricated rod caused by the width of a hot area is solved.
Description
Technical Field
The utility model relates to the field of manufacturing of optical fiber preforms, in particular to a double-hot-zone graphite resistance furnace.
Background
At present, in the field of special optical fiber manufacturing, the main optical fiber preform manufacturing processes are MCVD and FCVD, and the working principles of the MCVD and the FCVD are basically the same, wherein the main difference is that the MCVD uses oxyhydrogen flame as a heat source, and the FCVD uses a graphite resistance furnace as a heat source. The working flow of the method is that silicon dioxide films doped with elements such as germanium, fluorine, phosphorus, boron and the like are deposited on the inner surface of a high-purity quartz liner tube for multiple times, and after the silicon dioxide films are deposited to a certain thickness, solid core prefabricated bars with specific refractive indexes are obtained through fusion shrinkage and sintering at high temperature.
Because the oxyhydrogen flame has a relatively narrow hot zone width, typically about 20 cm, MCVD suffers from two significant drawbacks: 1. the conversion efficiency of each reaction gas is low during deposition, so that a prefabricated rod with a larger size can not be manufactured; 2. the efficiency of the shrinkage and burning is lower and the time is longer.
The FCVD is characterized in that a heat source is improved on the basis of MCVD, oxyhydrogen flame is changed into a graphite resistance furnace, the length of a hot zone can be prolonged to about 100 cm, and the conversion efficiency and the melting, shrinking and burning efficiency of the improved deposition are greatly improved.
Because the conversion efficiency is greatly improved, the thickness of each layer of deposition is increased, the number of layers is correspondingly reduced, the uniformity of single-layer deposition substances on a long scale is difficult to ensure, and the uniformity of the whole preform is poor.
Disclosure of Invention
The utility model provides a double-hot-zone graphite resistance furnace, which solves the problem of uniformity of a preform caused by the width of a hot zone.
In order to solve the technical problems, the utility model adopts the following technical scheme: the utility model provides a two hot area graphite resistance furnaces, but including reciprocating rectilinear movement's furnace body, be equipped with coaxial arrangement's gas end heat-generating body and pump end heat-generating body in the furnace body, gas end heat-generating body and pump end heat-generating body are hollow structure, and gas end heat-generating body is equipped with gas end positive electrode and gas end negative electrode, and pump end heat-generating body is equipped with pump end positive electrode and pump end negative electrode, and gas end positive electrode, gas end negative electrode, pump end positive electrode and pump end negative electrode are connected with the furnace body respectively.
In the preferred scheme, the furnace body both ends are equipped with left flange and right flange respectively, have cup jointed graphite air guide ring in left flange and the right flange.
In the preferred scheme, the left flange is provided with a long air seal, and the right flange is provided with a short air seal.
In the preferred scheme, one side of the graphite air guide ring is provided with an infrared thermometer, and the infrared thermometer is used for monitoring the temperature of the hot zone.
In the preferred scheme, the furnace is also provided with a sliding table base, a sliding table capable of sliding is arranged on the sliding table base, one side of the furnace body is provided with a furnace body supporting seat, the furnace body supporting seat is connected with the sliding table, and the sliding direction of the sliding table is parallel to the axes of the air end heating body and the pump end heating body.
In the preferred scheme, the furnace body is equipped with a plurality of through-holes along circumference, and left flange terminal surface is equipped with a plurality of first counter bores along circumference, and the interval is equipped with first spread groove between the first counter bore, and right flange terminal surface is equipped with a plurality of second counter bores along circumference, and the interval is equipped with the second spread groove between the second counter bore, and first counter bore and second counter bore are connected with the through-hole both ends respectively, and first spread groove staggers the angle in circumference with the second spread groove.
In the preferred proposal, the middle part of the side wall of the furnace body is provided with a through air hole.
The beneficial effects of the utility model are as follows: combining the advantages of MCVD and FCVD, a double-hot-zone graphite resistance furnace is provided, one of the short hot zones is utilized for deposition to ensure the uniformity of deposition, and two hot zones are started in the stage of smelting shrinkage and burning to improve the smelting shrinkage and burning efficiency; in the preferred scheme, the inside of the furnace body is provided with a waterway and a gas circuit, the waterway cools the furnace body, and the gas circuit is used for introducing helium and argon into the graphite furnace chamber to prevent air from entering the chamber to oxidize the graphite heating body.
Drawings
The utility model is further described below with reference to the drawings and examples.
Fig. 1 is a schematic diagram of the present utility model.
Fig. 2 is a top view of the present utility model.
Fig. 3 is a diagram showing a structure of a furnace body according to the present utility model.
FIG. 4 is a simplified schematic diagram of the side wall of the furnace of the present utility model.
Fig. 5 is a simplified schematic diagram of the left flange of the present utility model.
Fig. 6 is a simplified schematic diagram of the right flange of the present utility model.
In the figure: a furnace body 1; a through hole 101; a seal groove 102; a through air hole 103; a gas-end positive electrode 2; a gas-side negative electrode 3; a pump end positive electrode 4; a pump end negative electrode 5; an infrared thermometer 6; a gas-end heating element 7; a pump end heating element 8; a left flange 9; a first counterbore 901; a first connecting slot 902; a right flange 10; a second counterbore 1001; a second connection groove 1002; a graphite gas ring 11; a long gas seal 12; a short air seal 13; a furnace body support base 14; a slide table 15; a slide table base 16; a drive motor 17; a screw device 18; a rail means 19.
Detailed Description
Example 1:
in fig. 1-6, a graphite resistance furnace with double hot areas comprises a furnace body 1 capable of reciprocating rectilinear movement, wherein a gas-end heating body 7 and a pump-end heating body 8 which are coaxially arranged are arranged in the furnace body 1, the gas-end heating body 7 and the pump-end heating body 8 are of hollow structures, the gas-end heating body 7 is provided with a gas-end positive electrode 2 and a gas-end negative electrode 3, the pump-end heating body 8 is provided with a pump-end positive electrode 4 and a pump-end negative electrode 5, and the gas-end positive electrode 2, the gas-end negative electrode 3, the pump-end positive electrode 4 and the pump-end negative electrode 5 are respectively connected with the furnace body 1.
The gas end heating body 7 and the pump end heating body 8 are arranged in the center of the inside of the furnace body 1, the quartz lining tube is inserted into the hollow structures of the gas end heating body 7 and the pump end heating body 8 and rotates at a constant speed under the drive of an external mechanism, and as the positive electrode and the negative electrode of the gas end heating body 7 and the pump end heating body 8 independently exist, the gas end heating body 7 and the pump end heating body 8 can be independently controlled, only one of the gas end heating body 7 or the pump end heating body 8 is started during deposition, the width of a hot zone is reduced, the number of deposition layers is increased to improve uniformity, and the gas end heating body 7 and the pump end heating body 8 are simultaneously started in real time during melting shrinkage and burning, so that the efficiency is improved.
In the preferred scheme, the furnace body 1 both ends are equipped with left flange 9 and right flange 10 respectively, have cup jointed graphite air guide ring 11 in left flange 9 and the right flange 10.
In a preferred embodiment, the left flange 9 is provided with a long gas seal 12 and the right flange 10 is provided with a short gas seal 13.
In the preferred scheme, one side of the graphite air guide ring 11 is provided with an infrared thermometer 6, and the infrared thermometer 6 is used for monitoring the temperature of a hot zone.
In the preferred scheme, a sliding table base 16 is further arranged, a sliding table 15 capable of sliding is arranged on the sliding table base 16, a furnace body supporting seat 14 is arranged on one side of the furnace body 1, the furnace body supporting seat 14 is connected with the sliding table 15, and the sliding direction of the sliding table 15 is parallel to the axes of the air end heating body 7 and the pump end heating body 8.
A screw device 18 and a guide rail device 19 are arranged between the sliding table 15 and the sliding table base 16, and a driving motor 17 is arranged at the end part of the screw device 18.
In the preferred scheme, furnace body 1 is equipped with a plurality of through-holes 101 along the circumference, and left flange 9 terminal surface is equipped with a plurality of first counter bores 901 along the circumference, and the interval is equipped with first spread groove 902 between the first counter bores 901, and right flange 10 terminal surface is equipped with a plurality of second counter bores 1001 along the circumference, and the interval is equipped with second spread groove 1002 between the second counter bores 1001, and first counter bore 901 and second counter bore 1001 are connected with through-hole 101 both ends respectively, and first spread groove 902 staggers the angle in the circumference with second spread groove 1002.
The plurality of through holes 101 form a ring shape, and sealing grooves 102 are arranged on two sides of the ring shape, and sealing rings are arranged in the ring shape to prevent leakage.
After the left flange 9, the furnace body 1 and the right flange 10 are installed, the through hole 101, the first counter bore 901 and the second counter bore 1001 form a circumferentially arranged broken-line waterway, and the furnace body 1 is provided with a water inlet hole and a water outlet hole which are communicated with two ends of the waterway.
In a preferred scheme, a through air hole 103 is arranged in the middle of the side wall of the furnace body 1.
After the quartz lining tube is inserted, the protective gas can be introduced through the through air holes 103, and as the end parts of the gas end heating body 7 and the pump end heating body 8 are provided with cutting grooves and gaps are reserved between the gas end heating body 7 and the pump end heating body 8, the protective gas fills the outer sides of the gas end heating body 7 and the pump end heating body 8 and enters the clamping cavity of the inner walls of the gas end heating body 7 and the pump end heating body 8 from the gaps, and finally is discharged from the two ends from the gaps of the graphite gas guide ring 11 and the quartz lining tube.
Example 2:
the furnace body is made of aluminum alloy, and a waterway is arranged in the furnace body;
two graphite heating elements with the length of a hot zone of about 40 cm are arranged in the furnace body, the two heating elements are independently connected with electrodes, the temperature of the heating elements is controlled by controlling input power through two independent power supplies, only the gas-end heating element is started during deposition, and the two heating elements are simultaneously started after entering a smelting-shrinking-burning stage;
the outside of the gas end heating body is provided with a high-precision infrared thermometer, temperature data are transmitted to the controller in real time, and the controller ensures the constant temperature in the furnace according to the actually measured temperature, the set temperature and the real adjustment of the input power of the heating body;
the two sides of the furnace body are respectively provided with a flange plate, the flange plates are respectively provided with a water channel and an air channel, the water channel is used for introducing cooling water into the furnace body to cool the furnace body when the furnace is in operation, and the air channel is used for introducing helium and argon into the graphite furnace cavity to prevent air from entering the cavity to oxidize the graphite heating body;
a graphite air guide ring is arranged in the graphite heating body and is used for leading the protective gas into the cavity according to the design flow direction so as to prevent the air flow in the cavity from being disturbed;
and a metal gas seal is arranged outside the flange plate and used for fixing the graphite gas guide ring.
The technical scheme is that a gas-end heating element is used as a heat source to respectively deposit a cladding layer and a core layer in a high-purity quartz liner tube, and the gas-end heating element and a pump-end heating element are simultaneously started after the deposition is finished so as to increase the length of a heating area and gradually melt the liner tube into a solid rod under the action of high temperature and surface tension of the liner tube. The method comprises the following specific steps:
1. using a high-purity quartz tube as a liner tube, starting an air end heating body, controlling the temperature of the heating body at 1700 ℃, introducing SF6 gas into the liner tube, etching the liner tube, and removing impurities on the inner wall of the liner tube;
2. depositing a cladding: siCl4 is introduced into the liner tube, the temperature of the gas-end heating body is controlled to be more than 1730 ℃, siO2 generated by the reaction of SiCl4 and O2 is deposited on the inner wall of the liner tube, and the thickness of the cladding layer is controlled by the deposition layer number;
3. depositing a core layer: introducing mixed gas of SiCl4 and GeCl4 into the liner tube, controlling the temperature of a gas end heating body to be above 1600 ℃, enabling SiCl4, geCl4 and O2 to react to generate SiO2 and Ge O2, depositing the SiO2 and the Ge O2 on the inner wall of the liner tube, and controlling the thickness of the cladding layer through the number of deposited layers;
4. and (5) shrinking and burning: simultaneously, the gas end heating element and the pump end heating element are started, the temperature of the two heating elements is controlled to be more than 1900 ℃, and the liner tube is gradually collapsed by controlling the moving speed of the graphite resistance furnace and the pressure in the liner tube until a solid rod is finally burned.
The single-mode core rod, the boron-doped stress rod and the pure silicon core large-core-diameter prefabricated rod can be manufactured into large-size prefabricated rods by adopting the method.
The above embodiments are only preferred embodiments of the present utility model, and should not be construed as limiting the present utility model, and the scope of the present utility model should be defined by the claims, including the equivalents of the technical features in the claims. I.e., equivalent replacement modifications within the scope of this utility model are also within the scope of the utility model.
Claims (7)
1. A double hot zone graphite resistance furnace is characterized in that: including but reciprocating rectilinear movement's furnace body (1), be equipped with coaxial arrangement's gas end heat-generating body (7) and pump end heat-generating body (8) in furnace body (1), gas end heat-generating body (7) and pump end heat-generating body (8) are hollow structure, gas end heat-generating body (7) are equipped with gas end positive electrode (2) and gas end negative electrode (3), pump end heat-generating body (8) are equipped with pump end positive electrode (4) and pump end negative electrode (5), gas end positive electrode (2), gas end negative electrode (3), pump end positive electrode (4) and pump end negative electrode (5) are connected with furnace body (1) respectively.
2. The dual hot zone graphite resistance furnace of claim 1, wherein: the two ends of the furnace body (1) are respectively provided with a left flange (9) and a right flange (10), and graphite air guide rings (11) are sleeved in the left flange (9) and the right flange (10).
3. The dual hot zone graphite resistance furnace of claim 2, wherein: the left flange (9) is provided with a long air seal (12), and the right flange (10) is provided with a short air seal (13).
4. The dual hot zone graphite resistance furnace of claim 1, wherein: one side of the graphite air guide ring (11) is provided with an infrared thermometer (6), and the infrared thermometer (6) is used for monitoring the temperature of the hot zone.
5. The dual hot zone graphite resistance furnace of claim 1, wherein: the furnace body is further provided with a sliding table base (16), a sliding table (15) capable of sliding is arranged on the sliding table base (16), a furnace body supporting seat (14) is arranged on one side of the furnace body (1), the furnace body supporting seat (14) is connected with the sliding table (15), and the sliding direction of the sliding table (15) is parallel to the axes of the air end heating body (7) and the pump end heating body (8).
6. The dual hot zone graphite resistance furnace of claim 1, wherein: furnace body (1) are equipped with a plurality of through-holes (101) along the circumference, and left flange (9) terminal surface is equipped with a plurality of first counter bores (901) along the circumference, and the interval is equipped with first spread groove (902) between first counter bores (901), and right flange (10) terminal surface is equipped with a plurality of second counter bores (1001) along the circumference, and the interval is equipped with second spread groove (1002) between second counter bores (1001), and first counter bore (901) and second counter bores (1001) are connected with through-hole (101) both ends respectively, and first spread groove (902) stagger the angle in the circumference with second spread groove (1002).
7. The dual hot zone graphite resistance furnace of any one of claims 2-4, wherein: the middle part of the side wall of the furnace body (1) is provided with a through air hole (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320260022.6U CN219861095U (en) | 2023-02-20 | 2023-02-20 | Double-hot-zone graphite resistance furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320260022.6U CN219861095U (en) | 2023-02-20 | 2023-02-20 | Double-hot-zone graphite resistance furnace |
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| Publication Number | Publication Date |
|---|---|
| CN219861095U true CN219861095U (en) | 2023-10-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320260022.6U Active CN219861095U (en) | 2023-02-20 | 2023-02-20 | Double-hot-zone graphite resistance furnace |
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| Country | Link |
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| CN (1) | CN219861095U (en) |
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- 2023-02-20 CN CN202320260022.6U patent/CN219861095U/en active Active
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