CN120152947A - 氮化硅烧结体 - Google Patents

氮化硅烧结体 Download PDF

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Publication number
CN120152947A
CN120152947A CN202380076350.3A CN202380076350A CN120152947A CN 120152947 A CN120152947 A CN 120152947A CN 202380076350 A CN202380076350 A CN 202380076350A CN 120152947 A CN120152947 A CN 120152947A
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CN
China
Prior art keywords
silicon nitride
sintered body
nitride sintered
mass
powder
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Pending
Application number
CN202380076350.3A
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English (en)
Chinese (zh)
Inventor
石本龙二
草野大
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Tokuyama Corp
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Tokuyama Corp
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Publication of CN120152947A publication Critical patent/CN120152947A/zh
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
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    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0687—After-treatment, e.g. grinding, purification
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    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
CN202380076350.3A 2022-11-02 2023-10-24 氮化硅烧结体 Pending CN120152947A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-176363 2022-11-02
JP2022176363 2022-11-02
PCT/JP2023/038378 WO2024095834A1 (ja) 2022-11-02 2023-10-24 窒化ケイ素焼結体

Publications (1)

Publication Number Publication Date
CN120152947A true CN120152947A (zh) 2025-06-13

Family

ID=90930283

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380076350.3A Pending CN120152947A (zh) 2022-11-02 2023-10-24 氮化硅烧结体

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Country Link
EP (1) EP4613725A1 (https=)
JP (1) JPWO2024095834A1 (https=)
CN (1) CN120152947A (https=)
TW (1) TW202434540A (https=)
WO (1) WO2024095834A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57179077A (en) * 1981-04-27 1982-11-04 Sumitomo Electric Industries Silicon nitride sintered body
JPH11100273A (ja) * 1997-09-26 1999-04-13 Denki Kagaku Kogyo Kk 窒化珪素質焼結体、その製造方法及びそれを用いた回路基板
JPH11139813A (ja) * 1997-11-06 1999-05-25 Sumitomo Electric Ind Ltd 非晶質窒化ケイ素粉末及びその製造方法
JP4256012B2 (ja) 1999-03-23 2009-04-22 修 山田 燃焼合成反応によるＢＮ、ＡｌＮ又はＳｉ３Ｎ４の製造方法
KR102643831B1 (ko) 2018-02-28 2024-03-07 가부시끼가이샤 도꾸야마 질화규소 분말의 제조 방법
WO2021210507A1 (ja) * 2020-04-13 2021-10-21 株式会社トクヤマ 焼結用窒化ケイ素粉末

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EP4613725A1 (en) 2025-09-10
WO2024095834A1 (ja) 2024-05-10
JPWO2024095834A1 (https=) 2024-05-10
TW202434540A (zh) 2024-09-01

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