CN119907915A - 氢检测元件及其制造方法 - Google Patents

氢检测元件及其制造方法 Download PDF

Info

Publication number
CN119907915A
CN119907915A CN202380063346.3A CN202380063346A CN119907915A CN 119907915 A CN119907915 A CN 119907915A CN 202380063346 A CN202380063346 A CN 202380063346A CN 119907915 A CN119907915 A CN 119907915A
Authority
CN
China
Prior art keywords
terminal
electrode
hydrogen
exposed portions
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380063346.3A
Other languages
English (en)
Chinese (zh)
Inventor
南川智宏
伊藤理
河合贤
本间运也
片山幸治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuvoton Technology Corp Japan
Original Assignee
Nuvoton Technology Corp Japan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuvoton Technology Corp Japan filed Critical Nuvoton Technology Corp Japan
Publication of CN119907915A publication Critical patent/CN119907915A/zh
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128Microapparatus
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005H2

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Molecular Biology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CN202380063346.3A 2022-09-06 2023-08-31 氢检测元件及其制造方法 Pending CN119907915A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202263404049P 2022-09-06 2022-09-06
US63/404,049 2022-09-06
PCT/JP2023/031689 WO2024053537A1 (ja) 2022-09-06 2023-08-31 水素検知素子及びその製造方法

Publications (1)

Publication Number Publication Date
CN119907915A true CN119907915A (zh) 2025-04-29

Family

ID=90190932

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380063346.3A Pending CN119907915A (zh) 2022-09-06 2023-08-31 氢检测元件及其制造方法

Country Status (4)

Country Link
US (1) US20250208080A1 (https=)
JP (1) JPWO2024053537A1 (https=)
CN (1) CN119907915A (https=)
WO (1) WO2024053537A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3343212B1 (en) * 2015-08-28 2019-11-06 Panasonic Intellectual Property Management Co., Ltd. Gas sensor and fuel cell vehicle
CN107102032B (zh) * 2016-02-22 2021-08-06 新唐科技日本株式会社 气体传感器及氢浓度判定方法
CN107315033B (zh) * 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN107436313B (zh) * 2016-05-25 2021-08-27 新唐科技日本株式会社 气体传感器装置、气体传感器模块及气体检测方法
JP6886304B2 (ja) * 2017-01-31 2021-06-16 ヌヴォトンテクノロジージャパン株式会社 気体センサ
JP7433286B2 (ja) * 2019-03-07 2024-02-19 ヌヴォトンテクノロジージャパン株式会社 気体センサとその製造方法、および燃料電池自動車
WO2021210453A1 (ja) * 2020-04-16 2021-10-21 ヌヴォトンテクノロジージャパン株式会社 水素センサ、水素検知方法および水素検知装置

Also Published As

Publication number Publication date
JPWO2024053537A1 (https=) 2024-03-14
US20250208080A1 (en) 2025-06-26
WO2024053537A1 (ja) 2024-03-14

Similar Documents

Publication Publication Date Title
US11997851B2 (en) Staircase formation in three-dimensional memory device
US10861789B2 (en) Manufacturing method of stacked multilayer structure
US8907446B2 (en) Integrated circuit structure with capacitor and resistor and method for forming
CN107591479B (zh) 电阻式随机存取存储器
WO2007102341A1 (ja) 抵抗変化型素子、半導体装置、およびその製造方法
JP2013055136A (ja) 不揮発性半導体記憶装置及びその製造方法
CN114388523A (zh) 具有凹入导电结构的电子装置及相关方法和系统
US7872353B2 (en) Semiconductor device
KR100954548B1 (ko) 반도체 장치
CN119907915A (zh) 氢检测元件及其制造方法
CN110797326B (zh) 电阻元件及其制造方法
CN114613804B (zh) 具有互连的高密度ReRAM集成
CN116744779A (zh) 半导体器件
CN114141641A (zh) 半导体器件及其制作方法
US7498625B2 (en) Semiconductor device and manufacturing method thereof
CN1763954B (zh) 半导体器件
CN113424318B (zh) 非易失性存储单元、非易失性存储单元阵列及其制造方法
US9030018B2 (en) Test vehicles for evaluating resistance of thin layers
US12362096B2 (en) Chip parts
US7170122B2 (en) Ferroelectric polymer memory with a thick interface layer
CN118540943A (zh) 半导体器件及其制造方法
JP2003100888A (ja) 半導体装置及びその製造方法
KR20000048659A (ko) 적층된 커패시터를 갖춘 반도체 저장 장치 및 그 제조 방법

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination