CN119856045A - 检查条件决定系统 - Google Patents

检查条件决定系统 Download PDF

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Publication number
CN119856045A
CN119856045A CN202380065239.4A CN202380065239A CN119856045A CN 119856045 A CN119856045 A CN 119856045A CN 202380065239 A CN202380065239 A CN 202380065239A CN 119856045 A CN119856045 A CN 119856045A
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CN
China
Prior art keywords
inspection
conditions
processor
condition
evaluation index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380065239.4A
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English (en)
Chinese (zh)
Inventor
笠井启晃
宫本敦
大崎真由香
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of CN119856045A publication Critical patent/CN119856045A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Analysis (AREA)
CN202380065239.4A 2022-10-11 2023-09-20 检查条件决定系统 Pending CN119856045A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022-163558 2022-10-11
JP2022163558A JP2024056561A (ja) 2022-10-11 2022-10-11 検査条件決定システム
PCT/JP2023/034056 WO2024080087A1 (ja) 2022-10-11 2023-09-20 検査条件決定システム

Publications (1)

Publication Number Publication Date
CN119856045A true CN119856045A (zh) 2025-04-18

Family

ID=90669118

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380065239.4A Pending CN119856045A (zh) 2022-10-11 2023-09-20 检查条件决定系统

Country Status (3)

Country Link
JP (1) JP2024056561A (https=)
CN (1) CN119856045A (https=)
WO (1) WO2024080087A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7811246B1 (ja) * 2024-09-10 2026-02-04 株式会社ソミックマネージメントホールディングス 検出性能評価プログラム、検出性能評価方法、及び、検出性能評価装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4014379B2 (ja) * 2001-02-21 2007-11-28 株式会社日立製作所 欠陥レビュー装置及び方法
JP4935109B2 (ja) * 2005-03-17 2012-05-23 オムロン株式会社 基板検査装置並びにその検査ロジック設定方法および検査ロジック設定装置
JP2009014447A (ja) * 2007-07-03 2009-01-22 Fuji Electric Systems Co Ltd 欠陥検査装置及び欠陥検査プログラム
JPWO2018225406A1 (ja) * 2017-06-08 2020-04-09 コニカミノルタ株式会社 表面欠陥検査装置の配置決定方法、該装置、該プログラムおよび記録媒体
JP6923794B2 (ja) * 2017-08-04 2021-08-25 富士通株式会社 検査装置、検査プログラム、及び検査方法
JP2019090643A (ja) * 2017-11-13 2019-06-13 三菱電機株式会社 検査方法、および検査装置
WO2019171121A1 (en) * 2018-03-05 2019-09-12 Omron Corporation Method, device, system and program for setting lighting condition and storage medium
JP7167453B2 (ja) * 2018-03-12 2022-11-09 オムロン株式会社 外観検査システム、設定装置、画像処理装置、設定方法およびプログラム
JP7234812B2 (ja) * 2019-06-10 2023-03-08 コニカミノルタ株式会社 画像検査装置、及び、画像形成システム
JP2021086432A (ja) * 2019-11-28 2021-06-03 キヤノン株式会社 情報処理装置、情報処理方法、コンピュータプログラム、計測装置、システムおよび物品の製造方法

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Publication number Publication date
WO2024080087A1 (ja) 2024-04-18
JP2024056561A (ja) 2024-04-23

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