CN1195637A - Article storage device and automatic conveyer vehicle and device for manufacturing liquid crystal display - Google Patents

Article storage device and automatic conveyer vehicle and device for manufacturing liquid crystal display Download PDF

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Publication number
CN1195637A
CN1195637A CN98105686A CN98105686A CN1195637A CN 1195637 A CN1195637 A CN 1195637A CN 98105686 A CN98105686 A CN 98105686A CN 98105686 A CN98105686 A CN 98105686A CN 1195637 A CN1195637 A CN 1195637A
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CN
China
Prior art keywords
lid
liquid crystal
crystal display
glass substrate
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN98105686A
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Chinese (zh)
Other versions
CN1118431C (en
Inventor
铃木信博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
ADVANCED DISPLAY Co Ltd
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Filing date
Publication date
Application filed by ADVANCED DISPLAY Co Ltd filed Critical ADVANCED DISPLAY Co Ltd
Publication of CN1195637A publication Critical patent/CN1195637A/en
Application granted granted Critical
Publication of CN1118431C publication Critical patent/CN1118431C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

This invention is constituted of a clean stocker 7 for hermetically sealed glass substrate cassette having openable and closable lids, at least one set of a processing part 2 for applying a processing for producing a liquid crystal display device with respect to the glass substrate and automatic carriers 3 for carrying cassettes in between the clean stocker 7 and processing parts 2 and is constituted so that the clean stocker 7 is provided with lid opening and closing mechanism 6 for opening and closing the lids of the cassettes. This invention is capable of realizing the saving of the space of a processing device group, the reducing of costs of processing devices and the suppressing of foreign matter with respect to the glass substrates with a small cost and space.

Description

Accumulator and automatic delivery vehicle and liquid crystal display device manufacturing installation
The present invention relates to be used for the accumulator and the automatic delivery vehicle of closed type glass substrate box, and the liquid crystal display device manufacturing installation that has used these equipment, these equipment and device can realize that saving is used to make the processing equipment group's of liquid crystal display device space with low-cost and little space, and the cost that reduces processing equipment, and can suppress impurity adhering to for glass substrate.
In the past, when making liquid crystal display device, in order to do one's utmost to avoid impurity as adhering on the raw-material glass substrate, but be glass substrate to be accommodated take care of in the closed type glass substrate box with open-close lid or carry out transmission to the processing equipment group.
The closed type glass substrate box that uses used sliding type box body shown in Figure 3 etc. in the past.The sliding type box body 28 of Fig. 3 is to be used to accommodate glass substrate, the box body of graticule substrates such as (reticule), and by the accepting box 22 of accommodating glass substrate 21, lid 23, framework 26 constitutes.In addition, the 24th, be used for the elastic plate of inner top cover 23, the 25th, make and cover the 23 open and close controlling bars that move up and down.27 is that an end is fixed on the belt on the open and close controlling bar 25, prevents to cause that by open and close controlling bar 25 covering 23 floats under sealing state.Also show the single part of the accepting box 22 of pulling out from sliding frame among Fig. 4.
The box body of having accommodated glass substrate 28 of Fig. 3, for example in the situation of liquid crystal display device manufacturing installation shown in Figure 6, under the state that lid 23 has been closed, accommodate in the accumulator 37, can be as required from outbound mouth 34,35 take out, and transmit with automatic delivery vehicle 33 (hereinafter referred to as AGV).
Before having arrived predetermined processing equipment 32, the available lid switching mechanism 36 that is separately positioned near the inlet P (perhaps the gangway) of each processing equipment 32 is opened the lid 23 of box body, takes out the processing that box body in-to-in glass substrate 21 is scheduled to.
As lid switching mechanism 36, used for example to have the sort of horizontal mobile mechanism of pulling out parts 41 and control lever 41a shown in Figure 5.
When using lid switching mechanism 36 shown in Figure 5 to carry out the switching of box body 28 among Fig. 3, at first, will include sidepiece left side in figure that the lid switching mechanism 36 of pulling out parts 41 is attached to accepting box 22 and move.
At this moment, the above-mentioned open and close controlling bar 25 of control lever 41a butt rotates open and close controlling bar 25 along clockwise direction, makes thus to cover 26 integral body and float upward.
Then, control lever 41a crosses the open and close controlling bar 25 that is shown in an open position under elastic reaction, and then makes and cover switching mechanism 36 and move to the left, by the not shown stop component stop that is arranged in the accepting box 22.
Lid switching mechanism 36 is after the position of this stop component stops, and only the top in figure is mobile slightly.So the not shown parts that are arranged on accepting box 22 sides are pushed swing roller 41b downwards, be that anticlockwise direction ground, center rotates swing roller 41b and control lever 41a with rotating fulcrum 41c.
Thus, control lever 41a and open and close controlling bar 25 in height become the relation of mutually noninterfere.
Pull out the accepting box 22 that includes glass substrate 21 by pulling out parts 41 subsequently, right direction transmits in figure.
Because control lever 41a and open and close controlling bar 25 mutually noninterfere as described above so when control lever 41a is mobile to the right, open and close controlling bar 25 is changed, are held in open state and cover 26.
Like this, horizontal mobile mechanism 40 just turns back to the reference position of horizontal direction under the state that rises slightly to vertical direction.
Under the situation of the glass substrate 21 after handling being accommodated in the box body 28, then can carry out the operation opposite with said process.
Yet, under the situation of such in the past liquid crystal display device manufacturing installation,, therefore exist the problem that processing equipment maximizes inevitably on processing equipment because the lid switching mechanism is being set respectively.Particularly in recent years, have the tendency of big pictureization, accompany therewith, lid switching mechanism and have the also more and more large-scale change of the processing equipment that covers switching mechanism for liquid crystal display device.
Be accompanied by such maximization, the manufacturing cost of each processing equipment also will increase.
On the other hand, if do not adopt box body with cover and lid switching mechanism, then have the problem that glass substrate is adhered to impurity in a large number again.Particularly the glass substrate of using for the large image of seeing in recent years will be adhered to more a large amount of impurity.Adhering to of impurity becomes the reason that causes yield rate to reduce.
The present invention proposes for solving above-mentioned this class problem, purpose is to be provided for the accumulator and the AGV of closed type glass substrate box body, and the liquid crystal display device manufacturing installation that has used these equipment, these equipment and device can realize saving processing equipment group's space with low-cost and little space, and the cost that reduces processing equipment, and can suppress impurity adhering to for glass substrate.
But accumulator of the present invention is the accumulator that is used to have the closed type glass substrate box of open-close lid, is characterised in that, it has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
But AGV of the present invention is the AGV that is used to have the closed type glass substrate box of open-close lid, is characterised in that, it has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
But the liquid crystal display device manufacturing installation of the present invention's the 1st scheme is by the accumulator of the closed type glass substrate box that is used to have open-close lid, is used for the AGV that glass substrate is embodied as at least 1 processing equipment of the processing of making liquid crystal display device and is used for transmitting box body between above-mentioned accumulator and processing equipment is constituted, be characterised in that above-mentioned accumulator has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
The outbound mouth of 2 above-mentioned accumulators preferably is set, and on each outbound mouth, above-mentioned lid switching mechanism is set.
Many above-mentioned AGV preferably are set.
But the liquid crystal display device manufacturing installation of the present invention's the 2nd scheme is by the accumulator of the closed type glass substrate box that is used to have open-close lid, is used for the AGV that glass substrate is embodied as at least 1 processing equipment of the processing of making liquid crystal display device and is used for transmitting box body between above-mentioned accumulator and processing equipment is constituted, be characterised in that above-mentioned AGV has the lid switching mechanism of the lid that is used to open and close above-mentioned accumulator.
According to the present invention, then will have following principal character, promptly managed the lid switching mechanism that being used to of being provided with on the device opens and closes the lid of closed type glass substrate box respectively throughout, to reach the universalization of covering switching mechanism by on any of accumulator or AGV, being provided with in the past.According to this feature, can in each processing equipment, remove and cover switching mechanism, the result just can realize saving processing equipment group's the space and the cost and inhibition impurity the adhering to for glass substrate of reduction processing equipment with low-cost and little space.
Fig. 1 is the instruction diagram of an embodiment that shows the liquid crystal display device manufacturing installation of bright the 1st scheme.
Fig. 2 is the instruction diagram of an embodiment that shows the liquid crystal display device manufacturing installation of bright the 2nd scheme.
Fig. 3 is the oblique drawing of cassette of substrates.
Fig. 4 is the oblique drawing of accepting box among Fig. 3.
Fig. 5 is the oblique drawing that covers switching mechanism.
Fig. 6 is the planar view of liquid crystal display device manufacturing installation in the past.
Fig. 7 is the oblique drawing of gate-type box body.
Inventive embodiments
Below, with reference to accompanying drawing, describe accumulator and the AGV that is used for closed type glass substrate box of the present invention in detail, and the liquid crystal display device manufacturing installation that has used these equipment.Fig. 1 is the instruction diagram of an embodiment that shows the liquid crystal display device manufacturing installation of bright the 3rd scheme, and Fig. 2 is the instruction diagram of an embodiment that shows the liquid crystal display device manufacturing installation of bright the 6th scheme.
But liquid crystal display device manufacturing installation shown in Figure 1 by the cleaning accumulator 7 of having accommodated closed type glass substrate box (sliding type box body in the past for example shown in Figure 3) with open-close lid, be used for the AGV3 that glass substrate is embodied as a plurality of processing equipment 2 of the processing of making liquid crystal display device and is used for transmitting box body between above-mentioned cleaning accumulator 7 and processing equipment 2 is constituted.
In addition, cleaning accumulator 7 has the lid switching mechanism 6 of the lid that is used to open and close above-mentioned box body.Lid switching mechanism 6 for example can be got lid switching mechanism that the sort of sliding type box body shown in Figure 5 uses or the sort of lid switching mechanism (not shown) applicable to the gate-type box body shown in Figure 7 etc.
The gate-type box body of Fig. 7 is being fixed mandrel rod 39 in the upper end of door 37, and mandrel rod 39 can be supported on the upper end of box body 40 with rotating freely, on the opposite face of door 37 and box body 40 magnet 38 is being set.The magnetic force of door 37 usefulness magnet 38 is closed.The lid switching mechanism can be opened door by supplying to the rotational force of opening direction on mandrel rod 39 and the door 37.On the other hand, if remove rotational force under half-open state, then door 37 can be closed naturally by the magnetic force of magnet 38.
But the present invention does not specify concrete structure for being used to open and close the closed type glass substrate box with open-close lid and the lid switching mechanism of lid, can adopt well-known in the past all forms.
In addition, manufacturing installation of the present invention has and is used for sending move instruction to AGV, and the transfer control 1 that carries out piece control between each AGV.
As mentioned above, cover switching mechanism 6, at accumulator of the present invention and used in the liquid crystal display device manufacturing installation of this accumulator, just can remove the lid switching mechanism on each processing equipment 2 according to being provided with on the accumulator 7 in cleaning.The result can make processing equipment 2 realize saving significantly the space.Accompany therewith, when making processing equipment 2, can also reduce manufacturing cost significantly.And then can realize suppressing impurity adhering to low-cost and little space for glass substrate.
In addition, liquid crystal display device manufacturing installation shown in Figure 1 is provided with two outbound mouths on above-mentioned cleaning accumulator 7, is provided with above-mentioned lid switching mechanism 6 on each outbound mouth 4,5.Thereby, by a side outbound mouth 4 or 5 lid switching mechanism 6, just can during the lid of closed box, open the lid of box body, thereby the wait time of AGV3 is reduced by the lid switching mechanism 6 of the opposing party's outbound mouth, enhance productivity.
Owing to be provided with many above-mentioned AGV, therefore can side by side transmit box body or pass back to many processing equipment from accumulator, thereby can improve transmission efficiency significantly.
In liquid crystal display device manufacturing installation shown in Figure 1, working condition of manufacturing installation (position situation) and AGV transmit owing to having used transfer control 1 centralized control, therefore can improve the ability of manufacturing installation, the transfer capability of AGV to greatest extent.
In addition, as above-mentioned processing equipment 2, can enumerate well-known in the past processing equipment, for example CVD device, photo plate-making device, etching device etc.
Liquid crystal display device manufacturing installation shown in Figure 2, but by the cleaning accumulator 7 of having accommodated closed type glass substrate box (sliding type box body in the past for example shown in Figure 3) with open-close lid, the AGV3 that is used for being embodied as a plurality of processing equipment 2 of the processing of making liquid crystal display device for glass substrate and is used for transmitting box body between above-mentioned cleaning accumulator 7 and processing equipment 2 constitutes this point, and is identical with the manufacturing installation of above-mentioned Fig. 1.But, different with cleaning accumulator 7, AGV3 has the lid switching mechanism 6 of the lid that is used to open and close above-mentioned box body.Other the primary member of indicating by the identical symbol of symbol among Fig. 1 then with the manufacturing installation of Fig. 1 in identical.
As mentioned above, according on AGV3, being provided with the structure of covering switching mechanism 6, at the accumulator of present embodiment and used in the liquid crystal display device manufacturing installation of this accumulator, can on each processing equipment 2, removing and cover switching mechanism.The result just can realize that processing equipment 2 saves the space significantly.Accompany therewith, under the situation of making processing equipment 2, can also realize reducing significantly manufacturing cost.And then can realize suppressing impurity adhering to low-cost and little space for glass substrate.
According to the present invention, cover switching mechanism owing to can from processing equipment, remove, the result can realize that the processing equipment group saves the space significantly.Accompany therewith, when making processing equipment, can also realize reducing significantly manufacturing cost.And then can realize suppressing impurity adhering to low-cost and little space for glass substrate.

Claims (6)

1. accumulator, but it is the accumulator that is used to have the closed type glass substrate box of open-close lid, is characterised in that
It has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
2. automatic delivery vehicle, but it is the automatic delivery vehicle that is used to have the closed type glass substrate box of open-close lid, is characterised in that
It has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
3. liquid crystal display device manufacturing installation, but this liquid crystal display device manufacturing installation by the accumulator of the closed type glass substrate box that is used to have open-close lid, be used for glass substrate is made at least one the processing equipment that liquid crystal display device handles and the automatic delivery vehicle that transmits box body between above-mentioned accumulator and processing equipment constitutes, be characterised in that
Above-mentioned accumulator has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
4. the liquid crystal display device manufacturing installation of claim 3 record is characterised in that
Above-mentioned accumulator is provided with 2 outbound mouths, and above-mentioned lid switching mechanism is being set on each outbound mouth.
5. the liquid crystal display device manufacturing installation of claim 4 record is characterised in that
It is provided with many above-mentioned automatic delivery vehicles.
6. liquid crystal display device manufacturing installation, but this liquid crystal display device manufacturing installation by the accumulator of the closed type glass substrate box that is used to have open-close lid, be used for the automatic delivery vehicle that glass substrate is made at least one the processing equipment that liquid crystal display device handles and be used for transmitting box body between above-mentioned accumulator and processing equipment is constituted, be characterised in that
Above-mentioned automatic delivery vehicle has the lid switching mechanism of the lid that is used to open and close above-mentioned box body.
CN98105686A 1997-03-24 1998-03-23 Article storage device and automatic conveyer vehicle and device for manufacturing liquid crystal display Expired - Fee Related CN1118431C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP69560/97 1997-03-24
JP9069560A JPH10268274A (en) 1997-03-24 1997-03-24 Stocker and automatic carrier hermetically sealed glass substrate cassette and liquid crystal display device production device using them
JP69560/1997 1997-03-24

Publications (2)

Publication Number Publication Date
CN1195637A true CN1195637A (en) 1998-10-14
CN1118431C CN1118431C (en) 2003-08-20

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN98105686A Expired - Fee Related CN1118431C (en) 1997-03-24 1998-03-23 Article storage device and automatic conveyer vehicle and device for manufacturing liquid crystal display

Country Status (4)

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JP (1) JPH10268274A (en)
KR (1) KR100344752B1 (en)
CN (1) CN1118431C (en)
TW (1) TW391947B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100430233B1 (en) * 2001-07-27 2004-05-04 엘지.필립스 엘시디 주식회사 Clean room system of stocker for liquid crystal display

Also Published As

Publication number Publication date
TW391947B (en) 2000-06-01
CN1118431C (en) 2003-08-20
JPH10268274A (en) 1998-10-09
KR19980079659A (en) 1998-11-25
KR100344752B1 (en) 2002-11-11

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