CN1195216C - Detection method of optical instrument internal optical component state and device - Google Patents

Detection method of optical instrument internal optical component state and device Download PDF

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Publication number
CN1195216C
CN1195216C CN 02133994 CN02133994A CN1195216C CN 1195216 C CN1195216 C CN 1195216C CN 02133994 CN02133994 CN 02133994 CN 02133994 A CN02133994 A CN 02133994A CN 1195216 C CN1195216 C CN 1195216C
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laser
optical
light
instrument
detection method
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CN1493868A (en
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叶玉堂
范超
吴云峰
张雪琴
余学才
杨先明
方勇文
郑华
李莹波
秦宇伟
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University of Electronic Science and Technology of China
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University of Electronic Science and Technology of China
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Abstract

The present invention provides a method for detecting elements in an optical instrument, which adopts a laser light source and utilizes good convergence of laser to decrease the mutual interference of signals among mirror surfaces. The damage can be easily detected by observing the reflected light of laser on the detected optical surface and utilizing high contrast degree which is displayed when the damage exists. The method of the present invention mainly detects the damage of lenses (comprising stains and gaps on the mirror surfaces), which is particularly suitable for detecting the damage of stains and gaps on the surfaces of optical elements in a complicated optical path. When the method of the present invention is adopted, observers do not need special skills, and ordinary personnel can conveniently carry out detection.

Description

A kind of detection method of optical instrument internal optical component state
Technical field
The invention belongs to optical instrument field, it is particularly related to the detection method that inside has the optical instrument internal optical component situation of complex optical path.
Background technology
For abominable relatively optical instruments of frequency of utilization height, service condition such as periscope, telescopes, with the passage of time, the rough sledding that its optical element takes place unavoidably that host glass breakage, plated film come off, unglazed scale etc. has a strong impact on the optical instrument result of use, optical element for optical instrument incident, outgoing two ends, above-mentioned stained state is easy to detect, and also just handles easily naturally.How is the state of optical instrument internal optical component? are there there not damaged, defective, stain? people usually wish definitely to understand the situation of optical instrument internal optical component under the condition of not dismantling optical instrument, to guarantee the normal operation of optical instrument.Therefore, how the situation of optical instrument internal optical component being carried out convenience, rapid, effectively detection, is a problem demanding prompt solution.As far as we know, the method for existing detection of complex optical instrument internal optical component state allows light that ordinary light source sends from an end incident of optical instrument as shown in Figure 1, utilizes transmitted light to detect at the other end.The characteristics of this detection mode are:
What (1) utilize is strong transmitted light (light source 1), therefore is difficult to detect the situation (reason sees that " principle of work of the present invention " part is described) of inner member, only has the profuse operating personnel of experience just can detect the actual conditions of inner member usually; In addition, accept the injury that strong transmitted light also causes operating personnel's eyes easily for a long time, more serious even may cause polyp to generate.
(2) adopt ordinary light source, beam divergence angle is big, and beam cross-section is long-pending restive, and this also is unfavorable for the detection of inner member situation.
(3) for optical instrument than relatively large periscope one class, light incident side and exit end apart from each other, the testing staff can't adjust light source voluntarily.Therefore, light incident side and test side also require two people's cooperatings, and this just greatly reduces the speed and the efficient of detection.
Summary of the invention
The purpose of this invention is to provide and a kind of optical instrument internal optical component is carried out safe, effective, easy, practical detection method and equipment, as long as general operating personnel just can grasp easily, tester's eyes can also be avoided the high light injury, and must other people not cooperate, thereby improve detection efficiency greatly.
The present invention is made up of laser instrument 6, laser instrument objective table 7, laser instrument protection power supply 8, end cap thing 9, and task of the present invention is (as shown in Figure 2) of adopting following steps to realize:
Step 1. covers in the non-test side of end cap 9 with optical system 2, prevents the incident of external interference light;
Step 2. adopts LASER Light Source 6, laser is gone into by the optical system detection end-fire, wherein laser instrument is installed on five dimension (x, y, z, position angle and the angle of pitch) the adjusting objective tables 7, and the laser beam that makes laser instrument send can be carried out the scanning of whole audience ground to the optical element surface in the optical system; Laser instrument provides power supply by power supply 8;
Step 3. tester detects at the same end of laser incident, adjust laser incidence point and incident directions by objective table 7, allow the different piece of laser scanning minute surface in the optical instrument, simultaneously, the detection position is also done correspondingly and is adjusted, and just can detect the situation of the whole components and parts of detection.Here, the tester is actually that reflected light by detected element or scattered light detect.
Characteristics of the present invention are: (1) utilizes reflected light or scattered light to detect; (2) use laser as light source; (3) utilize five dimensions to regulate incidence point and incident direction that objective table 7 is adjusted LASER Light Source, the optical element in the optical system is scanned.
Principle of work of the present invention is:
1. utilize reflected light or scattered light rather than transmitted light, be more convenient for observing, detecting, its main cause is:
(1) detects observation very little " secretly " pattern (damage) in bright background with transmitted light, detect with reflected light or scattered light and then in dark background, observe very little " bright " pattern.And the bright pattern in the observation dark background is more much easier than the dark pattern of observing in the bright background.
For simplifying meter, laser beam incident is approximately parallel plane light, normal incidence, and do not consider scattering and absorption, as shown in Figure 3, photometric is learned the refractive index n of glass 2=1.5, air refraction n 0=1, even do not plate anti-reflection film, according to formula (seeing document " physical optics " 1987 beams spokeless wheel court of a feudal ruler China Machine Press)
R＝((n 2-n 0)/(n 2+n 0)) 2 (1)
And T+R=1 (2)
Its transmissivity is also up to T 0=96% (3)
Reflectivity is R only 0=4% (4)
If plate anti-reflection film n 1, transmissivity can be higher, and reflected light can be more weak.Estimate that conservatively transmissivity also should be higher than 98, i.e. T 1〉=98% (5)
Reflectivity can not be higher than 2%, promptly
R 1＜2％。(6)
Therefore, when detecting with transmitted light, bias light is very strong, is difficult to tiny stained on the viewing optics element.The present invention detects traditional transmission and changes the reflection detection into, detects in very weak reflected light background, even very small stained also being not difficult found.In fact, people equally manage to detect tiny bright pattern as far as possible in development, when using other optical instrument in dark background.For example, when people used traditional Fabry-Bai Luo (F-P) interferometer, the interference pattern that always utilizes its transmitted light to form was observed very narrow bright line in dark background, and can not use the interference pattern that its reflected light forms, in bright background, remove to observe very narrow concealed wire.
(2) for reflected light, stained position and non-stained position have bigger contrast.Coming off with the district of A shown in Fig. 3 plated film below is that example is analyzed.
For the A district that plated film comes off, just be equivalent to the not optical glass of plated film, get A district reflectivity and projection ratio by (3), (4) formula, be respectively R A=4% (7)
T A＝96％； (8)
Around A, the zone that plated film is intact is got the reflectivity and the projection ratio in plated film district by (5), (6) formula
R f≤2％， (9)
T f≥98％ (10)
Be not difficult to find out that for transmitted light, the plated film place that comes off with the power density ratio at intact place is
K T＝T A/T f＝96％/98％≈1 (11)
(11) formula shows that both are of slight difference, and contrast is minimum, thereby detects very difficulty.And for reflected light, the plated film place that comes off with the power density ratio at intact place is
K R＝R A/R f＝4％/2％＝2 (12)
(12) formula shows that contrast improves greatly; If anti-reflection film makes T 2More approach 1, K RAlso can further improve, mean that catoptrical contrast can be bigger, more helps damage check.
Adhere to situations such as (stains) for optical glass rhegma, surperficial dust, also can analyze and obtain similar result, do not give unnecessary details one by one here.
2. light source changes laser into by ordinary light source, and the characteristics that utilize the laser beam cross section to be easy to control, the angle of divergence are little are equipped with suitable light path, and making easily on other optical elements between tester and detecting element corresponding to the bin that detects the visual angle (is ∑ among Fig. 5 3, ∑ 4) presenting details in a play not acted out on stage, but told through dialogues, its reflected light or scattered light are very weak, and the reflected light of inner detection faces or scattered light are strengthened relatively, thereby the detection of inner components and parts situation in the complicated optical system of being more convenient for.(seeing all bright a kind of jades of document " Principles of Laser " 2000 National Defense Industry Press)
As use ordinary light source, promptly use reflected light or scattered light to detect the components and parts situation that also is difficult to observe complicated optical devices inside.This mainly is the reason owing to two aspects.The one, the angle of divergence of normal optical is big, is difficult to the confine optical beam cross section, and it two is as shown in Figure 4, inner member L 2Reflection and/or scattering are again through L 1The light of transmission far is weaker than L 1The directly reflection and/or the light intensity of scattering.This just makes no matter people from which orientation go to detect L 1Reflection and/or scattered light all far be better than L 2Reflection and/or scattered light.Thereby to see through L 1Remove to detect L 2The damage difficulty that just seems quite.Above-mentioned first reason is conspicuous, for second reason, is that example illustrates slightly below with the reflected light.
When adopting ordinary light source, there is following factor to make L among Fig. 4, Fig. 5 2Intensity of reflected light be weaker than L 1Intensity of reflected light.
The firstth, because of dispersing of corrugated.For simplifying meter, put aside absorption, scattering, L 1Reflection equal loss mechanism and L 1To the influence of optical propagation direction, the light field of A, B among Fig. 4 is considered as the spherical wave (common light source or line source radiation field can be considered the line integral or the area branch of pointolite radiation field) that pointolite O sends, and L 1, L 2The ratio of incident intensity is
I 1/I 2＝OB 2/OA 2 (13)
Because OB＞OA, obviously, I 1＞I 2(14)
Following formula shows, do not loose, penetrates the equal loss even do not consider the absorption of light in propagating the way, only since light wave disperse L 2Incident intensity also be lower than L 1Incident intensity, reasonably suppose L again 1, L 2Close reflectivity is arranged, i.e. R 1=R 2, can draw L 2Reflected light is weaker than L 1Catoptrical conclusion, i.e. I 1R 1＞I 2R 2
The second, be that light is at L 1The loss that the reflection at forward and backward interface is introduced.If L 2Reflectivity, the transmissivity at forward and backward interface are respectively R 1, T 1, R 1', T 1', L 2The reflectivity of front interface is R 2, L 1Incident intensity is I 0For making problem reduction, do not consider that still light propagates absorption and scattering equal loss in the way to C again from A to B, as shown in Figure 4, if do not consider dispersing of light, L 1The intensity of reflected light of front interface is
I 1R＝I 0·R 1 (15)
L 1Transmitted light through L 2Reflection is again through L 1The light intensity of transmission
I 2R＝I 0(T 1·T 1′) 2?R 2 (16)
By (15), (16), still reasonably suppose R 1=R, then
I 2R/I 1R＝(T 1·T 1′) 2 (17)
Because T 1, T 1' all less than 1, I is arranged obviously 2R＜I 1R(18)
Do not consider absorption, the scattering loss of light in A propagates on the way to B to C even following formula shows, also do not consider dispersing of light wave, L 2Intensity of reflected light also be weaker than L 1Intensity of reflected light.
If consider dispersing and L of light wave simultaneously 1These two factors of the reflection at forward and backward interface are added absorption, the scattering equal loss of light when A propagates in the way to B to C, and incident light sees through L 1Again through L 2Reflection and/or scattering, and see through L once more 1Light intensity, just than directly through L 1The light intensity of reflection and/or scattering is much weak.This makes inner member L naturally 2Detection very the difficulty.
Make detection light source with laser, situation has just been made a world of difference, and key is that the angle of divergence of laser beam is little here, as shown in Figure 5.Long-pending being easy to of beam cross-section limited.At L 1, by ∑ 1The light of incident projects L 2∑ 2, people can pass through L 1Last ∑ 3By ∑ 2Reflected light detect, also can get other orientation.Pass through L 1Go up other bin, as ∑ 4By ∑ 2Scattered light detect, select suitable direction of observation according to laser incidence point and incident direction, be not difficult to make ∑ 3, ∑ 4All away from ∑ 1So., though ∑ 2Reflected light still be weaker than ∑ 1Reflected light, but the ∑ in people detect the visual angle 3Or ∑ 4All at the incoming laser beam ∑ 1Outside, thereby ∑ 3, ∑ 4All show details in a play not acted out on stage, but told through dialogues, promptly incident intensity is bordering on 0, certainly, and at ∑ 3Or ∑ 4Reflected light, scattered light also just all be bordering on zero, make L naturally 2Last ∑ 2Detection seem very easy.
By laser beam flying, change the incoming position and the incident direction of laser beam, can be to whole L 2Scan detection.
Need to prove that only analyzed three minute surfaces here, the principle analysis of a plurality of minute surfaces is identical.
3. the transmitted light of being brought in by non-detection should be considered as ground unrest in essence, therefore will add upper end cover in the non-test side of optical system, prevents that the incident of transmitted light from disturbing.
Indulge the above, the present invention has following advantage:
1) equipment required for the present invention is simple and easy to operate, does not need special operation skill, and general personnel can both detect the situation of complicated optical instrument internal components and parts;
2) intensity of reflected light is very little, can avoid the injury to tester's eyes;
3) tester can adjust the incidence point and the incident direction of incident light voluntarily, does not need other people to cooperate, thereby can save manpower and time in a large number, improves detection efficiency greatly.
Therefore, the present invention a kind ofly carries out safe, effective, easy, practical detection method to the optical instrument internal components and parts, can allow general staff grasp easily and the tester is not caused any harm.The detection of the sub-complex optical path internal optical component state of its particularly suitable.
Accompanying drawing and description of drawings
Fig. 1 is the existing detection method schematic diagram of using of optical element,
Among the figure, the 1st, area source, the 2nd, optical system, the 3rd, optical element L 1, the 4th, optical element L 2, the 5th, optical element L 3
Fig. 2 is a schematic diagram of device of the present invention,
Among the figure, the 6th, laser instrument, the 7th, laser objective table, the 8th, laser instrument protection power supply, the 9th, end cap thing;
Fig. 3 is the plated film principle analysis figure that comes off
Among the figure, the 10th, anti-reflection film, the 11st, optical element, A are the plated film zones that comes off;
Fig. 4 is the detection (general light source) of inner member;
Fig. 5 is the detection (LASER Light Source) of inner member.

Claims (2)

1, a kind of detection method of optical instrument internal optical component state, it is characterized in that the following step of its employing: step 1. covers in the non-test side of overcover (9) with optical system (2);
Step 2. adopts LASER Light Source (6), and laser is injected by the tested side of optical system, and wherein laser instrument (6) is installed on the laser instrument objective table (7), and laser instrument provides power supply by protection power supply (8);
Step 3. observer is in the same end observation of laser incident, adjust the laser incident angle by laser instrument objective table (7), allow the different piece of laser scanning minute surface in the optical instrument, simultaneously, the human eye observation position is also done correspondingly and is adjusted, and just can detect the whole minute surface situation that will detect.
2, the detection method of a kind of optical instrument internal optical component state according to claim 1 is characterized in that described laser instrument objective table (7) is can be according to the objective table of x, y, z, position angle and the angle of pitch five dimension adjustings.
CN 02133994 2002-10-31 2002-10-31 Detection method of optical instrument internal optical component state and device Expired - Fee Related CN1195216C (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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CN1195216C true CN1195216C (en) 2005-03-30

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445458B (en) * 2011-10-18 2013-07-31 中国科学院合肥物质科学研究院 Method for measuring stain on optical lens
CN102944564A (en) * 2012-11-26 2013-02-27 中国科学院长春光学精密机械与物理研究所 Portable stray light detection device of double far center inclined lighting structure
CN105004697A (en) * 2015-07-21 2015-10-28 中国科学院国家空间科学中心 Optical measurement method for semiconductor device material reflectivity
CN105510354B (en) * 2015-12-08 2018-06-29 中国工程物理研究院激光聚变研究中心 A kind of method of on-line checking multi-way amplification laser system optic element damage
CN105699396A (en) * 2016-03-29 2016-06-22 同高先进制造科技（太仓）有限公司 Pollution detection device and method of welding laser head protective glasses based on light scanning
CN108614383A (en) * 2018-04-03 2018-10-02 Oppo广东移动通信有限公司 The detection method and electronic device that floodlight component, floodlight damage
CN109030495A (en) * 2018-06-26 2018-12-18 大连鉴影光学科技有限公司 A kind of optical element defect inspection method based on machine vision technique
CN112730333A (en) * 2020-12-21 2021-04-30 歌尔光学科技有限公司 Detection method and detection equipment for coated optical lens

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