CN119469692A - Off-axis concave parabolic reflector detection system and method based on aberration-free point method - Google Patents
Off-axis concave parabolic reflector detection system and method based on aberration-free point method Download PDFInfo
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- CN119469692A CN119469692A CN202510073292.XA CN202510073292A CN119469692A CN 119469692 A CN119469692 A CN 119469692A CN 202510073292 A CN202510073292 A CN 202510073292A CN 119469692 A CN119469692 A CN 119469692A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention relates to the technical field of reflector detection, and particularly discloses a system and a method for detecting an off-axis concave parabolic reflector based on an aberration-free point method, wherein in the detection system, laser light on one side of a laser level irradiates a reference wall surface to acquire reference rays serving as reference references; the laser on the other side of the laser level meter is reflected to the reference wall surface through the plane reflecting mirror arranged on the interferometer, the auxiliary plane reflecting mirror component and the off-axis concave parabolic reflecting mirror component respectively, and the relative positions of all the components are adjusted to enable the light reflected to the reference wall surface to coincide with the reference light. The method for measuring the space reference can be used for quickly establishing the measuring method of the space reference, improving the detection efficiency and the detection precision, is easy to establish the reference after the laser level meter is introduced to be used for collimating laser, and can intuitively reflect the reference relation among all components through ingenious arrangement of the plane reflecting mirror so as to correct.
Description
Technical Field
The invention relates to the technical field of reflector detection, in particular to a system and a method for detecting an off-axis concave parabolic reflector based on an aberration-free point method.
Background
In optical design, spherical elements have aberration correction capability and are easy to manufacture, and are commonly used in optical systems such as lenses, telescopes, lasers, and the like. With the continuous improvement of the imaging quality requirement of the optical system, although the correction of the aberration of the system can be completed by increasing the number of lenses, the method can increase the volume and the quality of the system, so that the method is not suitable for the development trend of light weight and miniaturization.
The aspheric optical element can effectively correct aberration due to the change of curvature, improves imaging quality, meets the requirement of light development of an optical system, and has wider application fields in aerospace, medical treatment and high-power laser fields. In addition to the advantages described above, the off-axis aspheric surface provides more freedom of aberration correction for the design of the optical system due to misalignment of its geometric axis with the optical axis. While off-axis aspheres help to solve the problem of reduced imaging quality due to the obscuration of the element center, misalignment of the geometric axis with the optical axis increases the difficulty of detecting the element profile. For off-axis aspheric detection, the most common methods are interferometry and profilometry. The interference detection has the advantages of high resolution, high precision and high sensitivity, and along with the development of the technology of the calculation holographic compensator, the measurement precision and efficiency of the off-axis aspheric surface are high, but the detection precision is easily affected by the environment, the requirement on the detection environment is high, and the detection cost is increased. However, in the case of a profiler, although a compensation device is not required when measuring an off-axis aspheric surface, the measurement speed is slow, the measurement accuracy is affected by a motion mechanism, so that it is difficult to obtain a high-accuracy detection result, and the contact between a probe and the surface of a measured element damages the surface of the element. In recent years, manufacturing technology has been rapidly developed, but the corresponding measurement capability cannot keep pace with the manufacturing capability, so that the existing measurement means have a certain limitation on the manufacturing of off-axis aspheric surfaces.
In the process of setting up the light path, because a good spatial position relation is not easy to establish between the interferometer and the measured reflecting mirror, an image point is not easy to find in the measuring process, and even if the image point is found, in order to measure a more ideal surface shape value, a lot of time is required to be spent for fine adjustment of inclination and eccentricity between various components. Therefore, a measurement method capable of quickly establishing a spatial reference is urgently needed by those skilled in the art to improve the detection efficiency and the detection precision.
Disclosure of Invention
Accordingly, the present invention is directed to overcoming the above-mentioned drawbacks of the prior art and providing a system and method for off-axis concave parabolic reflector detection based on aberration-free spot method.
The off-axis concave parabolic reflector detection system based on the aberration-free method comprises an interferometer reference component, an auxiliary plane reflector reference component and an off-axis concave parabolic reflector reference component;
The reference standard of the detection system is a reference ray formed by laser of one side of the laser level to the reference wall surface;
The interferometer reference component is formed by connecting a pair of orthogonally arranged plane reflectors and a reference wall surface in sequence in the direction of a lens of the interferometer with laser on the other side of the laser level, so that light rays reflected to the reference wall surface by the plane reflectors coincide with the reference light rays;
The auxiliary plane reflector reference component is formed by sequentially connecting a reflecting surface of an auxiliary plane reflector of the laser level meter other side laser and auxiliary plane reflector assembly with a reference wall surface in an optical path manner, so that light rays reflected to the reference wall surface by the auxiliary plane reflector coincide with reference light rays;
the off-axis concave parabolic reflector reference component is formed by sequentially connecting a pair of orthogonally arranged plane reflectors and a reference wall surface on a tool frame of the off-axis concave parabolic reflector component with laser at the other side of the laser level so as to enable light rays reflected to the reference wall surface by the plane reflectors to coincide with the reference light rays;
the relative positions of the off-axis concave parabolic reflector assembly and the reference wall surface are all parallel;
Adjusting the focus of the off-axis concave parabolic reflector to coincide with the focus of the interferometer, enabling a detection light beam emitted by the interferometer to be incident on the reflecting surface of the off-axis concave parabolic reflector, reflecting the detection light beam to an auxiliary plane reflector, and finally returning the primary path to the interferometer to form interference fringes;
The interferometer, the auxiliary plane reflecting mirror assembly, the off-axis concave parabolic reflecting mirror assembly and the laser level meter are respectively arranged on the air floatation optical platform through a six-dimensional adjusting device.
Preferably, the auxiliary plane mirror assembly is composed of an auxiliary plane mirror and an adaptive plane mirror mounting frame;
The auxiliary plane mirror is arranged on the corresponding six-dimensional adjusting device through the plane mirror mounting frame.
Preferably, the off-axis concave parabolic reflector assembly is composed of a tool rack, a reflector room and an off-axis concave parabolic reflector;
The off-axis concave parabolic reflector is arranged in a reflector chamber, the reflector chamber is arranged on a tool frame, and the tool frame is arranged on a corresponding six-dimensional adjusting device.
Preferably:
A round hole is formed in the middle of the auxiliary plane reflecting mirror;
The reflecting surface of the auxiliary plane reflecting mirror faces away from the direction of the lens of the interferometer;
The reflecting surface of the auxiliary plane reflecting mirror is close to the intersection position of the focus of the off-axis concave parabolic reflecting mirror and the focus of the interferometer;
The optical axis of the auxiliary plane mirror coincides with the interferometer optical axis.
Preferably, the pair of orthogonally disposed planar mirrors on the interferometer comprises a first mirror and a second mirror;
the interferometer is provided with a first reflecting mirror and a second reflecting mirror in a direction parallel to the lens of the interferometer, and the first reflecting mirror and the second reflecting mirror are orthogonally arranged.
Preferably:
the center of the off-axis concave parabolic reflector is aligned with the position of the optical axis of the interferometer;
The reflecting surface of the off-axis concave parabolic reflecting mirror faces to one side of the lens of the interferometer;
The reflecting surfaces of a pair of orthogonally arranged plane reflecting mirrors on the tool frame face away from the direction of the interferometer lens.
Preferably, the pair of orthogonally arranged planar mirrors on the tooling frame comprises a third mirror and a fourth mirror;
the tool frame is provided with grooves for placing the third reflecting mirror and the fourth reflecting mirror, and the grooves for placing the third reflecting mirror and the grooves for placing the fourth reflecting mirror are orthogonally arranged;
and the circumference of each groove is provided with glue injection grooves which are uniformly distributed in the axial direction.
The off-axis concave parabolic reflector detection method based on the aberration-free point method is realized by using an off-axis concave parabolic reflector detection system and comprises the following steps of:
s1, establishing a detection reference, namely installing a laser level meter on an air-floating optical platform and installing a reference wall surface on one side of the air-floating optical platform;
S2, performing reference indication on the interferometer arranged on the air-floating optical platform, namely performing reference adjustment on the interferometer by utilizing laser at the other side of the laser level meter, so that first reflected light rays reflected to a reference wall surface by a pair of orthogonally arranged plane reflecting mirrors in the direction of a lens of the interferometer are overlapped with the reference light rays, and completing initial reference adjustment on the interferometer;
s3, performing reference indication on the auxiliary plane reflecting mirror arranged on the air-floating optical platform, namely performing reference adjustment on the auxiliary plane reflecting mirror by utilizing laser at the other side of the laser level so as to enable second reflected light rays reflected by the auxiliary plane reflecting mirror to the reference wall surface to coincide with the reference light rays, and completing initial reference adjustment on the auxiliary plane reflecting mirror;
S4, performing reference indication on the off-axis concave parabolic reflector arranged on the air-float optical platform, namely performing reference adjustment on the off-axis concave parabolic reflector by utilizing laser at the other side of the laser level meter so as to enable a pair of orthogonally arranged plane reflectors on the tool frame to reflect third reflected light rays to a reference wall surface to coincide with the reference light rays, and completing initial reference adjustment on the off-axis concave parabolic reflector;
S5, according to the optical design result of the off-axis concave parabolic reflector, the focal point of the off-axis concave parabolic reflector and the focal point of the interferometer are adjusted to coincide according to the off-axis quantity and the displacement in the optical axis direction by adjusting the displacement of the corresponding six-dimensional adjusting device, so that the measuring light beam emitted by the interferometer is incident on the reflecting surface of the off-axis concave parabolic reflector and is reflected to the auxiliary plane reflector, and finally, the original path is returned to the interferometer to form interference fringes to finish detection.
Preferably, the method further comprises step S6:
And adjusting the defocusing and coma items of the Zernike coefficients to be less than 0.003 wavelength by adjusting a six-dimensional adjusting device corresponding to the off-axis concave parabolic reflector.
The technical scheme of the invention has the following advantages:
1. the off-axis concave parabolic reflector detection system and the off-axis concave parabolic reflector detection method based on the aberration-free point method provided by the invention have the advantages that the detection efficiency and the detection precision are improved, and the detection method is simple and easy to operate.
2. According to the off-axis concave parabolic reflector detection system based on the aberration-free point method, the laser level is introduced to serve as the collimation laser, after the primary reference is established with the interferometer, the laser level is not required to be adjusted, the stability of reference transmission is improved, and the reference standard of each component is easy to establish.
3. According to the invention, through the ingenious arrangement of the two pairs of orthogonally arranged plane reflectors, the reference of each component is transmitted to the plane reflectors, so that the reference relation among the components can be intuitively reflected, and correction is performed.
4. According to the off-axis concave parabolic reflector detection method based on the aberration-free point method, the state of the existing component can be intuitively observed after the collimated laser is reflected to the reference wall surface through the small plane reflector, and the position of the component is adjusted to enable the component to coincide with the reference light, so that the detection rate and the detection accuracy are greatly improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
FIG. 1 is a top view of an off-axis concave parabolic mirror detection system of the present invention;
FIG. 2 is a front view of an off-axis concave parabolic mirror detection system of the present invention;
FIG. 3 is a schematic diagram of the components of the interferometer of the present invention when the interferometer is set up to be reference;
FIG. 4 is a schematic view of the light on a reference wall surface of an interferometer of the present invention;
FIG. 5 is a schematic diagram of the components of the auxiliary planar mirror of the present invention when a reference is established;
FIG. 6 is a schematic view of light on a reference wall surface of an auxiliary plane mirror of the present invention;
FIG. 7 is a schematic view of an off-axis concave parabolic mirror assembly of the present invention;
FIG. 8 is a schematic diagram of the components of the off-axis concave parabolic reflector of the present invention when it is referenced;
FIG. 9 is a schematic view of light rays on a reference wall surface of an off-axis concave parabolic reflector of the present invention establishing a reference.
Reference numerals illustrate:
1-an air floatation optical platform, 201-a first six-dimensional adjusting table, 202-a second six-dimensional adjusting table, 203-a third six-dimensional adjusting table, 204-a fourth six-dimensional adjusting table, 3-interferometers, 4-auxiliary plane mirrors, 5-plane mirror mounting frames, 6-tool frames, 7-mirror chambers, 8-off-axis concave parabolic mirrors, 9-laser level gauges and 10-reference wall surfaces;
301-first mirror, 302-second mirror, 601-third mirror, 602-fourth mirror;
1001-reference ray, 1002-first reflected ray, 1003-second reflected ray, 1004-third reflected ray.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless explicitly stated or limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected, mechanically connected, electrically connected, directly connected, indirectly connected via an intervening medium, or in communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
1-9, This embodiment discloses an off-axis concave parabolic mirror detection system based on an aberration-free method, comprising an interferometer reference component, an auxiliary planar mirror reference component, and an off-axis concave parabolic mirror reference component;
The reference standard of the detection system is a reference light 1001 formed by laser beams on one side of the laser level 9 to the reference wall surface 10;
the interferometer reference component is formed by connecting a pair of orthogonally arranged plane mirrors and a reference wall surface 10 in the lens direction of the interferometer 3 with the laser at the other side of the laser level meter 9 in a sequential optical path manner, so that the light reflected by the plane mirrors to the reference wall surface 10 is overlapped with the reference light 1001;
The auxiliary plane reflector reference component is formed by sequentially connecting a reflecting surface of an auxiliary plane reflector 4 of the laser level meter 9 and an auxiliary plane reflector assembly with a reference wall surface 10 in an optical path so that light reflected by the auxiliary plane reflector 4 to the reference wall surface 10 coincides with reference light 1001;
The off-axis concave parabolic reflector reference component is formed by sequentially connecting a pair of orthogonally arranged plane reflectors and a reference wall surface 10 on a tool frame 6 of the off-axis concave parabolic reflector component with laser on the other side of a laser level meter 9, so that light rays reflected to the reference wall surface 10 by the plane reflectors coincide with reference light rays 1001;
The relative positions of the interferometer 3, the auxiliary plane reflector 4 and the off-axis concave parabolic reflector 8 of the off-axis concave parabolic reflector assembly under the reference state and the reference wall surface 10 are all parallel;
The focus of the off-axis concave parabolic reflector 8 is adjusted to coincide with the focus of the interferometer 3, detection light beams emitted by the interferometer 3 are incident on the reflecting surface of the off-axis concave parabolic reflector 8 and reflected to the auxiliary plane reflector 4, and finally, the primary path returns to the interferometer 3 to form interference fringes;
wherein, interferometer 3, auxiliary plane reflecting mirror assembly, off-axis concave parabolic reflecting mirror assembly and laser level 9 are respectively installed on air-float optical platform 1 through a six-dimensional adjusting device.
Specifically:
the six-dimensional adjustment device as shown in fig. 1, 2,3, 5 and 8 includes:
The first six-dimensional adjusting table 201 is correspondingly connected with the interferometer 3 so that the interferometer 3 is arranged on the air-floating optical platform;
the second six-dimensional adjusting table 202 is correspondingly connected with the auxiliary plane mirror assembly, so that the auxiliary plane mirror assembly is arranged on the air-floating optical platform;
the third six-dimensional adjustment table 203 is correspondingly connected with the off-axis concave parabolic mirror assembly, so that the off-axis concave parabolic mirror assembly is arranged on the air-floating optical platform;
the fourth six-dimensional adjusting table 205 is correspondingly connected with the laser level 9 so that the laser level 9 is arranged on the air-floating optical platform;
the auxiliary flat mirror assembly in this embodiment is composed of an auxiliary flat mirror 4 and an adapted flat mirror mount 5 as shown in fig. 1, 2,5 and 8;
The auxiliary plane mirror 4 is mounted on the corresponding second six-dimensional adjustment stage 202 by means of the plane mirror mounting 5.
The off-axis concave parabolic reflector assembly in this embodiment is composed of a tooling frame 6, a reflector housing 7 and an off-axis concave parabolic reflector 8 as shown in fig. 1-2 and 7-8;
the off-axis concave parabolic mirror 8 is mounted in a mirror housing 7, the mirror housing 7 is mounted on a tooling frame 6, and the tooling frame 6 is mounted on a corresponding third six-dimensional adjustment table 203.
The reference part of the auxiliary plane mirror 4, which is based on the reference part of the interferometer 3 in the present embodiment as shown in fig. 1,2 and 5, further comprises:
A round hole is formed in the middle of the auxiliary plane reflector 4;
The reflecting surface of the auxiliary plane reflecting mirror 4 faces away from the direction of the lens of the interferometer 3;
the reflecting surface of the auxiliary plane reflecting mirror 4 is close to the intersection position of the focus of the off-axis concave parabolic reflecting mirror 8 and the focus of the interferometer 3;
the optical axis of the auxiliary plane mirror 4 coincides with the optical axis of the interferometer 3.
A pair of orthogonally arranged planar mirrors on interferometer 3 in the present embodiment as in fig. 2 comprises a first mirror 301 and a second mirror 302, in particular:
A first mirror 301 and a second mirror 302 are provided in the interferometer 3 in parallel to the interferometer lens direction, the first mirror 301 being disposed orthogonal to the second mirror 302. The first mirror 301 and the second mirror 302 are identical in size and parts and are adapted to the size of the interferometer 3.
The off-axis concave parabolic mirror 8 reference component in this embodiment is based on the reference component where the interferometer 3 and the auxiliary planar mirror 4 are both located, further comprising:
the center of the off-axis concave parabolic reflector 8 is aligned with the position of the optical axis of the interferometer 3;
The reflecting surface of the off-axis concave parabolic reflector 8 faces to the lens side of the interferometer 3;
The reflecting surfaces of a pair of orthogonally arranged planar mirrors on the tool holder 6 face away from the lens direction of the interferometer 3.
A pair of orthogonally disposed planar mirrors on the tool holder 6 in this embodiment as shown in fig. 7 includes a third mirror 601 and a fourth mirror 602;
The tool frame 6 is provided with grooves for placing the third reflecting mirror 601 and the fourth reflecting mirror 602, and the grooves for placing the third reflecting mirror 601 and the grooves for placing the fourth reflecting mirror 602 are orthogonally arranged;
and each groove is circumferentially provided with glue injection grooves uniformly distributed in the axial direction, and the third reflecting mirror 601 and the fourth reflecting mirror 602 are installed in the groove of the tool frame 6 and then are injected into the glue injection grooves through glue injection holes.
The off-axis concave parabolic reflector detection system sequentially comprises an interferometer 3, an auxiliary plane reflector assembly, an off-axis concave parabolic reflector assembly, a laser level 9 and a reference wall surface 10 from side to side.
Example 2
The embodiment further discloses a method for detecting the off-axis concave parabolic reflector based on the aberration-free point method on the basis of the embodiment 1, which is realized by applying the off-axis concave parabolic reflector detection system of the embodiment 1 and comprises the following steps:
S1, establishing a detection reference, namely installing a laser level 9 on the air-floating optical platform 1 and installing a reference wall surface on one side of the air-floating optical platform 1, acquiring reference light 1001 serving as the reference based on laser on one side of the laser level 9 and the reference wall surface 10, and specifically, adjusting a fourth six-dimensional adjusting table 204 corresponding to the laser level 9 to align orthogonal laser light emitted by the laser level 9 to an optical axis of the interferometer 3. The laser level 9 side laser is presented on the reference wall surface 10 as a reference standard.
S2, performing reference adjustment on the interferometer 3 mounted on the air-bearing optical platform 1, namely performing reference indication on the interferometer 3 by utilizing laser on the other side of the laser level meter 9 as shown in FIG. 3, so that a pair of orthogonally arranged plane reflectors in the lens direction of the interferometer 3 reflect first reflected light 1002 and reference light 1001 of the reference wall 10 to overlap as shown in FIG. 4, and completing initial reference adjustment on the interferometer 3, specifically, displaying the laser on the other side of the laser level meter 9 on the first reflector 301 and the second reflector 302 arranged on the interferometer 3, reflecting the laser to the reference wall 10 through the first reflector 301 and the second reflector 302, comparing with the original reference light 1001, and adjusting the reflected first reflected light 1002 to overlap with the original reference light 1001 by adjusting the azimuth and pitching direction of the first six-dimensional adjustment table 201 below the interferometer 3, thus completing initial adjustment. The relative position of the lens of the interferometer 3 and the reference wall surface 10 is in a parallel state.
S3, performing reference adjustment on the auxiliary plane mirror 4 mounted on the air-floating optical platform 1, namely performing reference indication on the auxiliary plane mirror 4 by utilizing laser on the other side of the laser level meter 9 as shown in FIG. 5, so that second reflected light 1003 reflected by the auxiliary plane mirror 4 to a reference wall surface 10 is overlapped with reference light 1001 as shown in FIG. 6, and completing initial reference adjustment on the auxiliary plane mirror 4, and particularly, adjusting an auxiliary plane mirror assembly after the interferometer 3 is adjusted. The placement position of the reflecting surface of the auxiliary plane reflecting mirror 4 is close to the intersection position of the focal point of the concave parabolic reflecting mirror 8 and the focal point of the interferometer 3, and the optical axis of the auxiliary plane reflecting mirror 4 is consistent with the optical axis of the interferometer 3 by the reflecting surface of the auxiliary plane reflecting mirror 4 back to the direction of the lens of the interferometer 3. As shown in fig. 6, the laser on one side of the laser level 9 is shown on the reference wall 10 as a reference, the laser on the other side is shown on the reflecting surface of the auxiliary plane mirror 4, the laser is reflected to the reference wall 10 by the reflecting surface, and is compared with the original reference light 1001, and the initial adjustment is completed by adjusting the azimuth and the pitching direction of the second six-dimensional adjustment table 202 under the auxiliary plane mirror assembly, and overlapping the reflected second reflected light 1003 with the original reference light 1001. The relative positions of the auxiliary plane mirror 4 and the reference wall surface 10 are parallel.
S4, performing reference adjustment on the off-axis concave parabolic reflector 8 mounted on the air-floating optical platform 1, wherein reference indication is performed on the off-axis concave parabolic reflector 8 by utilizing laser on the other side of the laser level meter 9 as shown in FIG. 8, so that third reflection light rays 1004, which are reflected to a reference wall surface 10 by a pair of orthogonally arranged plane reflectors on the tool frame 6, coincide with the reference light rays 1001, and initial reference adjustment on the off-axis concave parabolic reflector 8 is completed, and specifically, after the auxiliary plane reflectors 4 are adjusted, the off-axis concave parabolic reflector assembly is adjusted. The off-axis concave parabolic mirror 8 is centered on the interferometer 3 optical axis position by adjusting the corresponding third six-dimensional adjustment stage 203. The laser on one side of the laser level 9 is presented on the reference wall surface 10 as a reference standard, the laser on the other side is presented on a third reflecting mirror 601 and a fourth reflecting mirror 602 which are arranged on the tool frame 6, the laser is reflected to the reference wall surface 10 through the reflecting surfaces of the third reflecting mirror 601 and the fourth reflecting mirror 602, and the laser is formed into a pair with the original reference light 1001, for example, as shown in fig. 9, and the reflected third reflecting light 1004 is overlapped with the original reference light 1001 to finish initial adjustment by adjusting the azimuth and the pitching direction of a third six-dimensional adjusting table 203 under an off-axis concave parabolic reflecting mirror 8 assembly. The back surface of the off-axis concave parabolic reflector 8 is parallel to the reference wall surface 10.
S5, the adjusted interferometer 3, the auxiliary plane reflector 4 assembly, the off-axis concave parabolic reflector 8 assembly and the reference wall surface 10 are all kept in a relatively parallel relation. According to the optical design result of the off-axis concave parabolic reflector 8, the focal point of the off-axis concave parabolic reflector 8 and the focal point of the interferometer 3 are adjusted to coincide according to the off-axis amount and the displacement in the optical axis direction by adjusting the displacement of the corresponding six-dimensional adjusting device, so that the measuring light beam emitted by the interferometer 3 is incident on the reflecting surface of the off-axis concave parabolic reflector 8 and reflected to the auxiliary plane reflector 4, and finally the original path returns to the interferometer 3 to form interference fringes to finish detection.
The present embodiment further includes step S6:
the defocus and coma terms of the Zernike coefficients are adjusted to <0.003 wavelengths by adjusting the third six-dimensional adjusting table 203 corresponding to the off-axis concave parabolic reflector 8, so that the measurement accuracy is improved.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (9)
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| CN110686869A (en) * | 2019-09-06 | 2020-01-14 | 中国科学院上海光学精密机械研究所 | High-precision measurement method for characteristic parameters of equal-thickness off-axis parabolic reflector |
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| CN112254938A (en) * | 2020-10-29 | 2021-01-22 | 中国航空工业集团公司洛阳电光设备研究所 | Off-axis parabolic mirror optical axis detection device and detection method |
| CN115683565A (en) * | 2022-10-12 | 2023-02-03 | 中国航空工业集团公司洛阳电光设备研究所 | Method for searching and monitoring zero-degree view field optical axis of off-axis two-mirror product |
| CN118168473A (en) * | 2024-03-20 | 2024-06-11 | 上海镭望光学科技有限公司 | Quick correction method for surface shape projection distortion of off-axis parabolic reflector interferometry |
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