CN118324400A - Laser glass cutting system based on 3D beam shaping - Google Patents

Abstract

The invention relates to the technical field of laser cutting, in particular to a laser glass cutting system based on 3D beam shaping, which is used for cutting and processing a workpiece and comprises a laser, a dynamic beam expanding and collimating system, a 3D beam shaping system and a processing system; the laser is used for providing a light beam required by glass cutting; the dynamic beam expansion collimation system comprises a dynamic adjustment lens group consisting of a first biconcave lens, a second biconvex lens, a third biconcave lens and a fourth biconvex lens, and the light beam passes through the dynamic adjustment lens group to generate collimation change. Compared with the traditional method, the technical scheme combines the multi-focus and beam splitting actions of the light beams through the mutual coordination among the dynamic beam expanding and collimating system, the 3D beam shaping system and the processing system, adjusts the number, the position and the focal depth of the focuses, and can form various shapes or curved surfaces by the focal profile, so that the adjustment of a plurality of surfaces of a workpiece in one-time laser processing is achieved.

Description

Laser glass cutting system based on 3D beam shaping

Technical Field

The invention relates to the technical field of laser cutting, in particular to a laser glass cutting system based on 3D beam shaping.

Background

In the glass laser cutting field, conventional two-dimensional laser cutting techniques (such as arrayed gaussian beams and arrayed bessel beams) cannot be formed in one step when processing curved surfaces in transparent materials. Although these laser cutting techniques can perform processing in two dimensions, they are disadvantageous in processing curved surfaces that require one-step molding. During machining, the workpiece is often required to be moved by matching with galvanometer scanning or using a high-precision translation table, so that the curved surface can be machined, but the steps are numerous and the efficiency is low, and meanwhile, accumulated errors are increased, so that the machining precision is reduced. Particularly, in the processing of semiconductor wafer ultrathin glass, the requirement on one-time forming is extremely high, but the current technical scheme cannot effectively solve the problem.

Disclosure of Invention

In order to overcome the technical problems, the invention aims to provide a laser glass cutting system based on 3D beam shaping, which solves the problems of low efficiency and limited machining precision of the traditional laser cutting technology when processing complex geometric bodies and multi-surface materials.

The aim of the invention can be achieved by the following technical scheme:

A laser glass cutting system based on 3D beam shaping is used for cutting and processing a workpiece and comprises a laser, a dynamic beam expanding and collimating system, a 3D beam shaping system and a processing system;

the laser is used for providing a light beam required by glass cutting;

The dynamic beam expansion collimation system comprises a dynamic adjustment lens group consisting of a first biconcave lens, a second biconvex lens, a third biconcave lens and a fourth biconvex lens, and the collimation changes in the process that light beams pass through the dynamic adjustment lens group;

The 3D beam shaping system comprises a beam splitting system, a collimating lens and a tunable multi-focus generator which are sequentially arranged along the incidence direction of a beam; the beam splitting system is used for splitting the collimated light beams output by the dynamic beam expanding and collimating system; the collimating lens is used for collimating the plurality of light beams output by the beam splitting system again; the tunable multi-focus generator is used for controlling the focus shape and the intensity distribution of the collimated light beam;

The processing system comprises a control system, a processing platform and a high-precision distance measuring system, wherein the control system is electrically connected with the laser, the dynamic beam expanding and collimating system, the beam splitting system, the tunable multi-focus generator and the processing platform; the 3D beam shaping system takes a processing platform as an assembly basis, and the processing platform can perform linear displacement along X, Y, Z directions; the high-precision ranging system is used for monitoring the position information of the workpiece in real time.

Further, the light beam provided by the laser is picosecond laser.

Further, the dynamic beam expansion collimation system comprises an electric moving module, wherein the electric moving module is used for adjusting positions and angles among a plurality of lenses in the dynamic adjusting lens group.

Further, the beam splitting system includes a polarization independent quartz DOE, a polymer sheet DOE, a spatial light modulator, a fiber optic beam splitter, and a miniature spatial beam splitting system.

Further, the collimating lens is a micro lens array, a collimating lens array or an objective lens.

The tunable multi-focus generator further comprises a tunable programmable spatial light modulator and a micro lens array, wherein the tunable programmable spatial light modulator is used for carrying out tunable on a plurality of quasi-light beams and generating single or a plurality of focuses by matching with the micro lens array, the micro lens array can carry out linear displacement along X, Y, Z directions, and the micro lens array and the tunable programmable spatial light modulator are matched to realize accurate control and focusing on the light beams.

Further, the tunable programmable spatial light modulator employs a liquid crystal spatial light modulator, and is not limited to reflective or transmissive.

The control system is further used for controlling the laser to change the power and repetition frequency parameters of the output light beam according to different materials and thicknesses of the workpiece to be processed and different curved surface types to be processed;

The control system controls the dynamic beam expansion collimation system to change the light spot size of the collimated light beam;

The control system controls linkage between the tunable multi-focus generator and the processing platform to modulate an input light beam, including diffraction and phase modulation;

and meanwhile, the control system controls the tunable multi-focus generator to tune parameters of focus position, focus size and focus depth generated by each beam according to processing requirements.

The processing platform is further characterized by comprising high-precision translation stage hardware and an electric control assembly;

The high-precision translation stage hardware is used for executing moving actions, and the electric control assembly is used for receiving external signals and carrying out positioning and distance measurement on the processing platform.

The high-precision ranging system is further characterized by adopting a laser confocal, spectrum confocal, OCT or triangulation altimetry system.

The invention has the beneficial effects that:

Compared with the traditional method, the technical scheme combines the multi-focus and beam splitting actions of the light beam through the mutual coordination among the dynamic beam expanding and collimating system, the 3D beam shaping system and the processing system, adjusts the number, the position and the focal depth of the focuses, and can form various shapes or curved surfaces by the focal profile so as to realize that a plurality of surfaces of a workpiece can be simultaneously adjusted in one-time laser processing; the multi-surface simultaneous processing of the workpiece is completed by utilizing the light beams in the three-dimensional space, the processing such as one-time hidden cutting, chamfering, internal engraving and the like with different sizes and different processing requirements is realized by utilizing the multi-focus light beams, the processing time is saved, the processing steps are reduced, and the laser cutting efficiency is greatly improved.

Drawings

The invention is further described below with reference to the accompanying drawings.

FIG. 1 is a frame construction diagram of the present invention;

Fig. 2 is a frame structure diagram of the present invention outputting a single C-shaped processing spot during its implementation.

In the figure: 1. a laser; 2. a dynamic beam expanding and collimating system; 201. a first biconcave lens; 202. a second double convex lens; 203. a third biconcave lens; 204. a fourth biconvex lens; 3. a 3D beam shaping system; 301. a beam splitting system; 302. a collimating lens; 303. a tunable multi-focus generator; 30301. a tunable programmable spatial light modulator; 30302. a microlens array; 4. a processing system; 401. a control system; 402. a processing platform; 403. a high-precision ranging system.

Detailed Description

The technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

As shown in fig. 1 and 2, a laser glass cutting system based on 3D beam shaping is used for cutting a workpiece, and comprises a laser 1, a dynamic beam expansion collimation system 2, a 3D beam shaping system 3 and a processing system 4, wherein the laser 1 is used for providing a beam required by glass cutting.

As an example, the laser 1 preferably provides a picosecond laser beam with wavelengths of 450nm, 532nm, 806 nm,880nm, 940nm, 1030nm, 1064nm, 1080nm, 1550nm, etc. as is commonly used for processing.

The dynamic beam expansion collimation system 2 is used for dynamically tuning the light beam to carry out collimation and changing the spot size of the light beam. The dynamic beam expansion collimation system 2 comprises a dynamic adjustment lens group consisting of a first biconcave lens 201, a second biconvex lens 202, a third biconcave lens 203 and a fourth biconvex lens 204, and the collimation changes in the process that light beams pass through the dynamic adjustment lens group;

The 3D beam shaping system 3 is configured to output a plurality of processing focuses in a three-dimensional space at a time, and can output a plurality of processing focuses in a three-dimensional space at a time, thereby completing curved surface processing at a time. The 3D beam shaping system 3 includes a beam splitting system 301, a collimator lens 302, and a tunable multifocal generator 303, which are sequentially disposed along the incident direction of the light beam; the beam splitting system 301 is configured to split the collimated beam output by the dynamic beam expansion collimation system 2; the collimating lens 302 is used for collimating the plurality of light beams output by the beam splitting system 301 again; the tunable multi-focal generator 303 is used to control the focal shape and intensity distribution of the collimated beam;

Processing system 4 comprises a control system 401, a processing platform 402 and a high-precision distance measuring system 403, wherein control system 401 is electrically connected with laser 1, dynamic beam expanding and collimating system 2, beam splitting system 301, tunable multi-focus generator 303 and processing platform 402; the 3D beam shaping system 3 takes the processing platform 402 as an assembly base, and the processing platform 402 can perform linear displacement along X, Y, Z three directions; the high-precision ranging system 403 is used to monitor the position information of the workpiece in real time.

According to the technical scheme, through the mutual matching among the dynamic beam expanding and collimating system 2, the 3D beam shaping system 3 and the processing system 4, the multi-focus and beam splitting effect of the light beam are combined, the number, the position and the focal depth of the focuses are adjusted, the focal profile can form various shapes or curved surfaces, and then the adjustment of a plurality of surfaces of a workpiece in one-time laser processing is achieved; the multi-surface simultaneous processing of the workpiece is completed by utilizing the light beams in the three-dimensional space, the processing such as one-time hidden cutting, chamfering, internal engraving and the like with different sizes and different processing requirements is realized by utilizing the multi-focus light beams, the processing time is saved, the processing steps are reduced, and the laser cutting efficiency is greatly improved.

As an example, the first biconcave lens 201, the second biconvex lens 202, the third biconcave lens 203, and the fourth biconvex lens 204 in the dynamic adjustment lens group are sequentially arranged according to the light incident direction.

As a further refinement of the above technical solution, the dynamic beam expansion collimation system 2 includes an electric moving module, which is used for adjusting positions and angles among a plurality of lenses in the dynamic adjustment lens group; the electric moving module is combined with the dynamic adjusting lens group to form an electric variable-magnification collimation system, the size of the collimated light beam is dynamically adjusted and output in a certain range according to the light spot energy input by the laser 1 and the characteristics of the output light beam, and the variable-magnification range is set as follows: the specific adjustment multiplying power time is 0.8X-5X, and the control system 401 in the processing system 4 adjusts the multiplying power.

As an example, the beam splitting system 301 is configured to split the collimated beam output by the dynamic beam expansion and collimation system 2 into N sub-laser beams, where the divergence angle of each sub-laser beam after splitting varies between 0.2 milliradians and 3 milliradians, and preferably between 0.2 milliradians and 0.5 milliradians, relative to the laser beam before splitting.

As a further refinement of the foregoing solution, beam splitting system 301 includes a polarization independent quartz DOE, a polymer sheet DOE, a spatial light modulator, an optical fiber beam splitter, and a micro-space beam splitting system:

The quartz DOE irrelevant to polarization can uniformly distribute an incident light beam into a plurality of emergent light beams, and the beam diameter, the divergence angle and the wave front of the emergent light beams are completely the same as those of the incident laser, but the propagation direction is changed;

the polymer sheet DOE is similar to a quartz-like DOE, and can divide one laser beam into a plurality of sub-laser beams and keep the beam characteristics of each sub-laser beam unchanged;

The spatial light modulator can modulate a certain parameter of the light field, such as amplitude, phase or polarization state, through liquid crystal molecules, so that complex light field control is realized; the spatial light modulator can conveniently load information into a one-dimensional or two-dimensional light field, and is suitable for generating a plurality of processing focuses;

The optical fiber beam splitter is a passive device, and can redistribute the characteristics of wavelength, energy, polarization and the like in one optical fiber into different optical fibers; the device is mainly used in the fields of optical communication, optical sensing, photoelectric detection and the like;

micro-space spectroscopic systems typically comprise a plurality of small optical elements, such as prisms, mirrors, diffraction gratings, etc., for separating and recombining incident light to achieve high precision beam splitting.

The beam splitting system 301 is adjusted or replaced by a control system 401 in the processing system 4, and the output light beam can be a one-dimensional lattice light spot or a two-dimensional lattice light spot, so that a plurality of processing focuses in a three-dimensional space can be output at one time, and curved surface processing is completed at one time.

As an example, the collimator lens 302 is configured to collimate the N sub-laser beams output by the beam splitting system 301, so that the N sub-laser beams are parallel to each other, and the divergence angle of the collimated beam varies by no more than 5 milliradians from the divergence angle of the beam before collimation;

As a further refinement of the above-described technical solution, the collimator lens 302 is a microlens array 30302, a collimator lens array, or an objective lens.

As one example, tunable multi-focal generator 303 includes a tunable programmable spatial light modulator 30301 and a microlens array 30302, as well as auxiliary elements such as window protection mirrors. The tunable programmable spatial light modulator 30301 is used for tuning a plurality of quasi-light beams, and generating a single focus or a plurality of focuses by matching with the micro lens array 30302, wherein the micro lens array 30302 can perform linear displacement along X, Y, Z three directions, and the micro lens array 30302 and the tunable programmable spatial light modulator 30301 cooperate to realize precise control and focusing of the light beams.

As a further refinement of the above technical solution, the tunable programmable spatial light modulator 30301 adopts a liquid crystal spatial light modulator, and is not limited to a reflective type or a projection type; or the electronic control tunable super-structure optical component is not limited to polarization correlation, but is not limited to materials for constructing the super-structure component, and all components can meet the functions of tunable multi-beam and single or multi-focus generation by matching with an array lens.

In this embodiment, the tunable multi-focus generator 303 may generate N parallel sub-laser beams simultaneously on the z-axis of the beam propagation direction, where the multi-focus is greater than or equal to two focuses, that is, each beam may generate one or more focuses through the tunable multi-focus generator 303. The tunable characteristics of tunable multi-focus generator 303 are: the position, focal depth and focal position of the generated focal point after each beam passes through the system can be independently tuned, so that the focal points generated by N beams simultaneously can form different 3D outline shapes, and the number, the position and the 3D relative distribution of the focal points of the output multiple laser beams can be flexibly and simultaneously adjusted.

As an example, the control system 401 simultaneously controls the laser 1, the dynamic beam expanding and collimating system 2, the beam splitting system 301, the tunable multi-focus generator 303 and the processing platform 402, can automatically match optimal processing parameters according to different materials, thicknesses, curved surface types to be processed of a workpiece to be processed, laser time, processing depth and the like, and then automatically matches the processing parameters according to special items such as refractive index, laser absorption coefficient and the like of material characteristics, and corrects the modulation parameters of the tunable multi-focus generator 303 and the position parameters of the processing platform 402 by means of an internal algorithm, so that one-time forming of high-precision invisible cutting of transparent materials with different sizes can be realized, and edge R angle processing, C angle processing, internal carving of the transparent materials and the like can be performed, wherein the transparent materials are glass or crystals.

As a further refinement of the above technical solution, the control system 401 may control the laser 1 to change the power and the repetition frequency parameters of the output beam; the control system 401 may control the dynamic beam expansion collimation system 2 to change the spot size of the collimated light beam; the control system 401 can control linkage between the tunable multi-focus generator 303 and the processing platform 402 to modulate an input light beam, including diffraction and phase modulation; meanwhile, the control system 401 can also control the tunable multi-focus generator 303 to tune parameters of focus position, focus size and focus depth generated by each beam according to processing requirements, so as to output 3D focus contours with different shapes and different spatial positions.

As one example, the processing platform 402 is comprised of high precision translation stage hardware, electronic control components; the high-precision translation stage hardware is used for executing a moving action, and the electric control assembly is used for receiving external signals and positioning and measuring the distance of the processing platform 402;

In the cutting processing process, the control system 401 collects the distance between the workpiece to be processed and the tunable multi-focus generator 303 in real time in a positioning data mode, and according to the height change and the material characteristics of the workpiece at different positions, the control system 401 adjusts the modulation parameters loaded on the tunable multi-focus generator 303 in real time, adjusts the focal position of the light beam output to enable the focal position to accurately reach the expected position, and achieves accurate and flexible transparent material processing.

As an example, the high-precision ranging system 403 adopts a laser confocal, spectrum confocal, OCT or triangulation altimetry system, so that the ranging system with the height measurement precision smaller than 100um can be satisfied, namely, the range change smaller than 100um can be identified; the distance between the 3D beam shaping system 3 and the high precision ranging system 403 is fixed in this scheme.

As one example, the tooling platform 402 may achieve a positioning with a linear displacement error of less than 50um in three directions along the X, Y, Z axes.

As an example, as shown in fig. 2, a laser glass cutting system based on 3D beam shaping may output a plurality of C-shaped curved surfaces with a certain interval according to processing requirements, or may output a single or a plurality of curved surface light spots with other shapes; when the beam splitting system 301 splits into a one-dimensional lattice, the output is a single curved surface, and when the beam splitting system 301 splits into an area array, the output is a plurality of curved surface light spots to form a larger curved surface.

As further refinement of the technical scheme, the laser 1 selects laser beams with the wavelength of 1064nm, the pulse width of 10ps, the repetition frequency of 0-20MHz and the maximum power of 80W; the beam power can be modulated externally, here controlled by the control system 401, with an output spot diameter of 2.5mm, M2 less than 1.3; the thickness of the processed glass is 2mm, and the C-shaped chamfering processing can be carried out on the glass.

As a further refinement of the above technical solution, the dynamic beam expansion collimation system 2 is composed of two independent moving mirrors and two fixed mirrors, the first biconcave fixed mirror 201 is a fixed mirror along the light incidence direction, and the focal length is-13 mm; the second double-convex lens 202 and the third double-concave lens 203 are moving lenses, and are respectively driven by an electric voice coil motor and are controlled by a control system 401; the focal length of the second biconvex lens 202 is 22mm, and the focal length of the third biconcave lens 203 is-20 mm; the fourth biconvex lens fixed mirror 204 is a fixed mirror with a focal length of 60mm; the first biconcave lens 201 is 110mm from the fourth biconvex lens 204, the first biconcave lens 201 is 10mm shortest from the second biconvex lens 202, and the third biconcave lens 203 is 18mm shortest from the fourth biconvex lens 204.

As a further refinement of the above technical solution, the beam splitting system 301 is a tunable polarization independent polymer DOE device, and outputs a one-dimensional lattice light spot, and in other embodiments, a two-dimensional lattice light spot may also be output; wherein the number of lattice light spots depends on the effective area of spatial modulation, the area after the collimation of a single light spot, and the beam splitting system 301 outputs 1*5 lattice light spots in this embodiment.

As a further refinement of the above-described technical solution, the collimating lens 302 can collimate the above-described 5 laser beams into mutually parallel beams. In this embodiment, the tunable programmable spatial light modulator 30301 in the tunable multi-focus generator 303 adopts a programmable LCOS-SLM, and the control system 401 performs partition programming on the LCOS-SLM to change the phase distribution so as to realize parameters such as the number, the position, the spacing and the like of fast dynamic tuning focuses, and meanwhile, the light beam is aligned to a corresponding area; in this embodiment, the effective liquid crystal area output by the tunable multifocal generator 303 is 15.6x12.8mm, which is disposed at 45 ° to the beam output by the collimating lens 302.

As a further refinement of the above technical solution, the specifications of the microlens array 30302 are 8×8, the focal length is 8mm, and the aperture of a single lens is 1mm; the micro lens array 30302 is regulated electrically in the X, Y, Z-axis direction to achieve +/-5 mm and 0.1mm precision.

As a further refinement of the above technical solution, the control system 401 controls the dynamic beam expanding and collimating system 2, the beam splitting system 301, the tunable multifocal generator 303 and the processing platform 402 simultaneously according to parameters such as the requirement of processing the C-shaped chamfer, the glass thickness of 2mm, the refractive index of soda lime glass of 1.51, tuning indexes of the micro lens array 30302, and the like, outputs 3D light spots required by processing, and dynamically adjusts the processing platform 402 according to the height information provided by the high-precision ranging system 403; the cutting process adopts a splinter mode, invisible cutting is carried out, and punching is carried out below the surface of the glass.

As a further refinement of the above technical solution, as shown in fig. 2, the 3D light spots generated by the tunable multi-focus generator 303 controlled by the control system 401 form a C-shaped 3D space light spot from the left to the right, and the foci formed by the five light beams are symmetrically distributed; only one focus of the fifth beam is positioned on a symmetry axis, the symmetry axis is a glass thickness center line, namely, the distance from the surface is 1mm, each beam is 1.2mm, the first beam is two focuses, the distance from the first beam to the second beam is 1.8mm, and the distance from the second beam to the first beam is 1.5mm; the third beam is two focuses, the distance between the third beam and the fourth beam is 1.1mm, the distance between the fourth beam and the fourth beam is 0.5mm; the fifth beam is a focus point and is on the middle line of the thickness of the workpiece; the number and position of the focuses in each beam can be changed according to the processing requirements.

The high-precision ranging system 403 equipped on the processing platform 402 is a spectrum confocal ranging system, the ranging precision is 80um, and before processing starts, the control system 401 collects the height information of the high-precision ranging system 403 to adjust the processing platform 402, the processing platform 402 is a multi-stage control three-dimensional platform, and the precision is 0.05mm. The machining platform 402 performs machining of the C-shaped chamfer on the edge of the whole workpiece through translation and rotation in the machining process, and machining of the whole workpiece is completed in a split mode after machining.

According to the scheme, multiple focuses are combined with beam splitting, and single or multiple focuses are generated for each beam in the x-y plane along the focus direction, so that a set of focuses in the y-z plane is located on a straight line, the number, the position and the depth of focuses can be adjusted, the contour of the focuses form a trapezoid, a C-shaped mode or other curved surface shapes, and the like, and the main cutting surface, the top inclined surface and the bottom inclined surface are adjusted simultaneously in one-time laser processing; by shaping the laser focus into a C-shaped or trapezoidal pattern or other curved surface, etc., the laser can be used to cut transparent materials such as glass, crystals, etc., while forming bottom and top slopes.

In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely illustrative and explanatory of the invention, as various modifications and additions may be made to the particular embodiments described, or in a similar manner, by those skilled in the art, without departing from the scope of the invention or exceeding the scope of the invention as defined in the claims.

Claims (10)

1. The laser glass cutting system based on the 3D beam shaping is used for cutting and processing a workpiece and is characterized by comprising a laser, a dynamic beam expanding and collimating system, a 3D beam shaping system and a processing system;

the laser is used for providing a light beam required by glass cutting;

The dynamic beam expansion collimation system comprises a dynamic adjustment lens group consisting of a first biconcave lens, a second biconvex lens, a third biconcave lens and a fourth biconvex lens, and the collimation changes in the process that light beams pass through the dynamic adjustment lens group;

The 3D beam shaping system comprises a beam splitting system, a collimating lens and a tunable multi-focus generator which are sequentially arranged along the incidence direction of a beam; the beam splitting system is used for splitting the collimated light beams output by the dynamic beam expanding and collimating system; the collimating lens is used for collimating the plurality of light beams output by the beam splitting system again; the tunable multi-focus generator is used for controlling the focus shape and the intensity distribution of the collimated light beam;

The processing system comprises a control system, a processing platform and a high-precision distance measuring system, wherein the control system is electrically connected with the laser, the dynamic beam expanding and collimating system, the beam splitting system, the tunable multi-focus generator and the processing platform; the 3D beam shaping system takes a processing platform as an assembly basis, and the processing platform can perform linear displacement along X, Y, Z directions; the high-precision ranging system is used for monitoring the position information of the workpiece in real time.

2. The laser glass cutting system based on 3D beam shaping of claim 1, wherein the beam provided by the laser is a picosecond laser.

3. The 3D beam shaping based laser glass cutting system of claim 1, wherein the dynamic beam expansion collimation system comprises an electrically powered movement module for adjusting the position and angle between the plurality of lenses in the dynamic adjustment lens group.

4. The 3D beam shaping based laser glass cutting system of claim 1, wherein the beam splitting system comprises a polarization independent quartz DOE, a polymer sheet DOE, a spatial light modulator, a fiber optic beam splitter, and a micro-space beam splitting system.

5. The laser glass cutting system based on 3D beam shaping of claim 1, wherein the collimating lens is a micro lens array, a collimating lens array or an objective lens.

6. The 3D beam shaping based laser glass cutting system of claim 1, wherein the tunable multifocal generator comprises a tunable programmable spatial light modulator and a microlens array, the tunable programmable spatial light modulator is used for tuning a plurality of collimated light beams and generating single or multiple focuses by matching with the microlens array, the microlens array can perform linear displacement along X, Y, Z directions, and the microlens array and the tunable programmable spatial light modulator cooperate to realize precise control and focusing of the light beams.

7. The 3D beam shaping based laser glass cutting system of claim 6, wherein the tunable programmable spatial light modulator is a liquid crystal spatial light modulator and is not limited to reflective or transmissive.

8. The laser glass cutting system based on 3D beam shaping according to claim 1, wherein the control system controls the laser to change the power and the repetition frequency parameters of the output beam according to the material and the thickness of the workpiece to be processed and the curved surface shape to be processed;

The control system controls the dynamic beam expansion collimation system to change the light spot size of the collimated light beam;

The control system controls linkage between the tunable multi-focus generator and the processing platform to modulate an input light beam, including diffraction and phase modulation;

and meanwhile, the control system controls the tunable multi-focus generator to tune parameters of focus position, focus size and focus depth generated by each beam according to processing requirements.

9. The laser glass cutting system based on 3D beam shaping of claim 1, wherein the processing platform consists of high-precision translation stage hardware and an electric control assembly;

The high-precision translation stage hardware is used for executing moving actions, and the electric control assembly is used for receiving external signals and carrying out positioning and distance measurement on the processing platform.

10. The 3D beam shaping based laser glass cutting system of claim 1, wherein the high precision ranging system employs a laser confocal, spectral confocal, OCT or triangulation altimetry system.