CN118129516A - Vapor chamber and vapor chamber preparation method - Google Patents

Vapor chamber and vapor chamber preparation method Download PDF

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Publication number
CN118129516A
CN118129516A CN202410546955.0A CN202410546955A CN118129516A CN 118129516 A CN118129516 A CN 118129516A CN 202410546955 A CN202410546955 A CN 202410546955A CN 118129516 A CN118129516 A CN 118129516A
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China
Prior art keywords
corrugated structure
housing
shell
vapor chamber
equal
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CN202410546955.0A
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Inventor
于全耀
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Goertek Inc
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Goertek Inc
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Priority to CN202410546955.0A priority Critical patent/CN118129516A/en
Publication of CN118129516A publication Critical patent/CN118129516A/en
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Abstract

The embodiment of the application provides a soaking plate and a preparation method of the soaking plate. The soaking plate comprises a first shell and a second shell, wherein the first shell is provided with a first corrugated structure, the second shell is provided with a second corrugated structure corresponding to the first corrugated structure, and the first shell is connected with the second shell; the ratio of the wave distance to the wave height of the first corrugated structure and/or the second corrugated structure is less than or equal to 3, and the ratio of the wave distance to the wave thickness is less than or equal to 2; through the first ripple structure and the arrangement of the second ripple structure corresponding to the first ripple structure, the bending performance of the soaking plate is effectively improved.

Description

Vapor chamber and vapor chamber preparation method
Technical Field
The invention relates to the technical field of heat sinks, in particular to a soaking plate and a preparation method of the soaking plate.
Background
The vapor chamber is a heat dissipation device which can rapidly transfer and diffuse heat flow gathered on the surface of a heat source to a large-area condensation surface, thereby promoting heat dissipation and reducing the heat flow density on the surface of a component. However, the vapor chamber in the prior art is often in a three-stage structure composed of an evaporation plate, a condensation plate and an insulation plate between the evaporation plate and the condensation plate, which results in poor bending performance of the vapor chamber.
Therefore, a new technical solution is needed to solve the above technical problems.
Disclosure of Invention
The invention aims to provide a soaking plate and a new technical scheme of a preparation method of the soaking plate.
According to a first aspect of the present invention, there is provided a soaking plate, wherein the soaking plate comprises:
The device comprises a first shell and a second shell, wherein the first shell is provided with a first corrugated structure, the second shell is provided with a second corrugated structure corresponding to the first corrugated structure, and the first shell is connected with the second shell;
The ratio of the wave distance to the wave height of the first corrugated structure and/or the second corrugated structure is less than or equal to 3, and the ratio of the wave distance to the wave thickness is less than or equal to 2.
Optionally, a wave pitch of the first corrugated structure and/or the second corrugated structure is less than or equal to 1mm.
Optionally, the wave height of the first and/or second corrugation structures is less than or equal to 0.5mm.
Optionally, the wave thickness of the first and/or second corrugation structures is less than or equal to 0.5mm.
Optionally, the bending radius of the soaking plate is r, and the ripple length of the first ripple structure and/or the second ripple structure is greater than (pi r)/2.
Optionally, the material of the first shell and/or the second shell is stainless steel.
Optionally, the thickness of the first housing and/or the second housing is less than or equal to 0.05mm.
Optionally, the first shell is connected with the second shell to form a containing cavity, and a liquid suction core and working medium are contained in the containing cavity.
Optionally, the wick is a wire structure.
According to a second aspect of the present invention, there is provided a method of manufacturing a soaking plate, wherein the method of manufacturing comprises:
machining a first corrugated structure on the first shell and machining a second corrugated structure on the second shell;
And connecting the first shell and the second shell.
Optionally, a stamping process is used to machine the first corrugation on the first housing and the second corrugation on the second housing.
Optionally, the first housing is welded to the second housing using a diffusion welding process.
Optionally, after the first shell and the second shell are welded by a diffusion welding process, the first shell and the second shell are subjected to surface treatment by a steam process.
According to the soaking plate provided by the embodiment of the invention, the soaking plate comprises a first shell and a second shell, the first shell is provided with a first corrugated structure, the second shell is provided with a second corrugated structure corresponding to the first corrugated structure, and the first shell is connected with the second shell; the ratio of the wave distance to the wave height of the first corrugated structure and/or the second corrugated structure is less than or equal to 3, and the ratio of the wave distance to the wave thickness is less than or equal to 2; through the first ripple structure and the arrangement of the second ripple structure corresponding to the first ripple structure, the bending performance of the soaking plate is effectively improved.
Other features of the present invention and its advantages will become apparent from the following detailed description of exemplary implementations of the invention with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is an exploded view of a soaking plate in one embodiment of the present invention.
Fig. 2 is a partial cross-sectional view taken along the direction A-A in fig. 1.
Figure 3 is a bottom view of the vapor chamber in one embodiment of the invention.
Fig. 4 is a front view of a soaking plate in an embodiment of the present invention.
Fig. 5 is a flow chart of a method of fabricating a vapor chamber in accordance with one embodiment of the invention.
Reference numerals illustrate:
1. A first housing; 11. a first corrugated structure; 12. a first welding area; 2. a second housing; 21. a second corrugated structure; 22. a second welding area; 3. a wick.
Detailed Description
Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that: the relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is specifically stated otherwise.
Reference will now be made in detail to embodiments of the present application, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.
According to an embodiment of the present application, there is provided a soaking plate, as shown in fig. 1 to 4, comprising a first casing 1 and a second casing 2, the first casing 1 being provided with a first corrugated structure 11, the second casing 2 being provided with a second corrugated structure 21 corresponding to the first corrugated structure 11, the first casing 1 being connected to the second casing 2; the ratio of the wave pitch to the wave height of the first corrugation 11 and/or the second corrugation 21 is smaller than or equal to 3, and the ratio of the wave pitch to the wave thickness is smaller than or equal to 2.
Specifically, as shown in fig. 1 and 3, in the embodiment of the present application, at least a portion of the first casing 1 is stamped into the first corrugated structure 11 through a stamping process, and at least a portion of the second casing 2 is stamped into the second corrugated structure 21 corresponding to the first corrugated structure 11, and then the first casing 1 is connected to the second casing 2, so that when the soaking plate is bent, the corresponding first corrugated structure 11 and the corresponding second corrugated structure 21 can be simultaneously bent and deformed, thereby effectively ensuring the bending performance of the soaking plate. Of course, the first corrugated structure 11 and the second corrugated structure 21 according to the embodiment of the present application may also be manufactured by a mechanical expansion process or a roll forming process, etc., and those skilled in the art may select according to actual needs, and the present application is not limited herein.
In addition, since the first corrugated structure 11 corresponds to the second corrugated structure 21, compared with a vapor chamber of a three-stage structure comprising an evaporation plate, a condensation plate and an insulation plate between the evaporation plate and the condensation plate in the prior art, the vapor chamber of the embodiment of the application has the advantages of better bending performance, better flexibility and less damage after bending deformation. Meanwhile, since the first corrugated structure 11 and the second corrugated structure 21 are directly formed on the first casing 1 and the second casing 2 according to the embodiment of the present application, the overall structure and the manufacturing process of the vapor chamber can be further simplified.
As shown in fig. 2, in the embodiment of the present application, the wave distance between the first corrugated structure 11 and the second corrugated structure 21 is q, the wave height is h, and the wave thickness is a. Since the first corrugated structure 11 corresponds to the second corrugated structure 21 and the first housing 1 is connected to the second housing 2, in order to better bend the soaking plate, in the embodiment of the present application, the ratio of the wave pitch q to the wave height h of the first corrugated structure 11 and the second corrugated structure 21 is less than or equal to 3, and the ratio of the wave pitch q to the wave thickness a is less than or equal to 2, so that the strain concentration of the first corrugated structure 11 on the first housing 1 and the second corrugated structure 21 on the second housing 2 is lower, the bending performance is better, and the volumes of the first corrugated structure 11 and the second corrugated structure 21 can better meet the requirements of a miniaturized, flexible, ultrathin soaking plate.
Furthermore, in the embodiment of the present application, the first casing 1 may be entirely manufactured into the first corrugated structure 11, or the second casing 2 may be entirely manufactured into the second corrugated structure 21, so that the soaking plate has better bending performance and usability, and the structural complexity and manufacturing difficulty of the soaking plate are not increased.
In addition, in the case where the soaking plate is bent toward the first housing 1, the embodiment of the present application may also only set the ratio of the wave pitch q to the wave height h of the first corrugated structure 11 to be less than or equal to 3, and the ratio of the wave pitch q to the wave thickness a to be less than or equal to 2, or only set the ratio of the wave pitch q to the wave height h of the second corrugated structure 21 to be less than or equal to 3, and the ratio of the wave pitch q to the wave thickness a to be less than or equal to 2, so that the manufacturing difficulty of the soaking plate can be further reduced on the basis of satisfying the bending performance of the soaking plate.
Optionally, the pitch of the first corrugation 11 and/or the second corrugation 21 is less than or equal to 1mm.
Specifically, as shown in fig. 1 to 3, since the first corrugated structure 11 corresponds to the second corrugated structure 21 and the first casing 1 is connected to the second casing 2 in the embodiment of the present application, in order to further improve the bending effect of the vapor chamber and avoid the wave pitch q from being too large to increase the volumes of the first corrugated structure 11 on the first casing 1 and the second corrugated structure 21 on the second casing 2, so that the volumes of the first corrugated structure 11 and the second corrugated structure 21 can better conform to the requirements of the miniaturized, flexible, and ultra-thin vapor chamber, it is preferable that the wave pitch q of the first corrugated structure 11 and the second corrugated structure 21 be less than or equal to 1mm.
Of course, since the strain concentration of the corrugated structure with a larger wave pitch q is smaller, on the basis of satisfying the bending performance of the vapor chamber, the embodiment of the present application may also set only the wave pitch q of the first corrugated structure 11 to be less than or equal to 1mm, or set only the wave pitch q of the second corrugated structure 21 to be less than or equal to 1mm, so as to further extend the service life of the vapor chamber.
Optionally, the wave height of the first corrugation 11 and/or the second corrugation 21 is less than or equal to 0.5mm.
Specifically, as shown in fig. 1 to 3, since the first corrugated structure 11 corresponds to the second corrugated structure 21 and the first casing 1 is connected to the second casing 2 in the embodiment of the present application, in order to be able to further improve the bending effect of the soaking plate and to avoid the wave height h from being excessively large to increase the structural complexity and the manufacturing difficulty of the first corrugated structure 11 on the first casing 1 and the second corrugated structure 21 on the second casing 2, it is preferable that the wave height h of the first corrugated structure 11 and the second corrugated structure 21 is less than or equal to 0.5mm.
Of course, since the corrugated structure with larger wave height h has high sensitivity and large allowable displacement, on the basis of not increasing the manufacturing difficulty of the soaking plate, the embodiment of the application may also only set the wave height h of the first corrugated structure 11 to be less than or equal to 0.5mm, or only set the wave height h of the second corrugated structure 21 to be less than or equal to 0.5mm, so as to further improve the bending performance of the soaking plate.
Optionally, the wave thickness of the first corrugation 11 and/or the second corrugation 21 is less than or equal to 0.5mm.
Specifically, as shown in fig. 1 to 3, since the first corrugated structure 11 corresponds to the second corrugated structure 21 and the first casing 1 is connected to the second casing 2 in the embodiment of the present application, in order to further improve the bending effect of the soaking plate, and avoid the wave thickness a from being too large to reduce the flexibility of the first corrugated structure 11 on the first casing 1 and the second corrugated structure 21 on the second casing 2, and avoid the wave thickness a from being too large to increase the damage degree of the soaking plate after bending deformation, it is preferable that the wave thickness a of the first corrugated structure 11 and the second corrugated structure 21 is less than or equal to 0.5mm.
Of course, since the corrugated structure with larger wave thickness a has high bearing capacity, on the basis of meeting the bending performance of the soaking plate, the embodiment of the application can also only set the wave thickness a of the first corrugated structure 11 to be less than or equal to 0.5mm, or only set the wave thickness a of the second corrugated structure 21 to be less than or equal to 0.5mm, so as to further improve the stability and reliability of the soaking plate.
Optionally, the bending radius of the soaking plate is r, and the corrugated length of the first corrugated structure 11 and/or the second corrugated structure 21 is greater than (pi r)/2.
Specifically, as shown in fig. 1 to 3, the embodiment of the present application makes the corrugated lengths of the first corrugated structure 11 and the second corrugated structure 21 greater than (pi r)/2 through the bending radius r of the soaking plate, so as to effectively meet different bending requirements of various different electronic devices, and further improve the applicability of the soaking plate. Further, since the first corrugated structure 11 and the second corrugated structure 21 are provided according to the bending radius r of the soaking plate, the manufacturing cost of the soaking plate can be further reduced, and the overall structure of the soaking plate can be simplified.
Optionally, the material of the first housing 1 and/or the second housing 2 is stainless steel.
Specifically, the vapor chamber prepared from stainless steel has lighter weight than the conventional vapor chamber prepared from copper, and has better reliability and temperature resistance than the conventional vapor chamber prepared from composite materials, so that the vapor chamber can better meet the requirements of miniaturization, flexibility and ultra-thin vapor chamber.
Of course, in the case of meeting the requirements of the electronic device, the first housing 1 and the second housing 2 according to the embodiments of the present application may also be made of conventional copper materials or composite materials; or only the first shell 1 is made of stainless steel; or only the second housing 2 is made of stainless steel, and a person skilled in the art can select the material according to actual needs, which is not particularly limited herein.
Optionally, the thickness of the first housing 1 and/or the second housing 2 is less than or equal to 0.05mm.
Specifically, since the first corrugated structure 11 and the second corrugated structure 21 according to the embodiment of the present application are directly manufactured from the first casing 1 and the second casing 2, in order to further secure the bending property of the soaking plate and to make the soaking plate have better flexibility, it is preferable that the thicknesses of the first casing 1 and the second casing 2 be less than or equal to 0.05mm.
Of course, on the basis of meeting the use requirement of the vapor chamber, the embodiment of the application may also only set the thickness of the first housing 1 to be less than or equal to 0.05mm, or only set the thickness of the second housing 2 to be less than or equal to 0.05mm, so as to further reduce the manufacturing cost of the vapor chamber.
Optionally, the first housing 1 and the second housing 2 are connected to form a containing cavity, and the containing cavity contains the liquid suction core 3 and the working medium.
In particular, as shown in fig. 1 and 4, the wick 3 according to the embodiment of the present application is a porous capillary structure material for providing a capillary driving force to promote the reflux of the working fluid from the condensing end to the evaporating end, so as to realize a heat transfer cycle.
The material of the liquid absorbing core 3 may be metal, fiber, cloth, etc., and the structure of the liquid absorbing core 3 may be a woven net, a woven wire, etc. For example, when the wick 3 is copper, the copper has better heat conduction property, and has fast heat conduction, good flexibility and strong ductility, so that the flexibility requirement of the soaking plate can be better met.
In addition, the working medium can be one of deionized water, absolute ethyl alcohol or fluorocarbon, so that the service performance of the vapor chamber is further improved, and the service life of the vapor chamber is prolonged.
Optionally, the wick 3 is a wire structure.
Specifically, the metal wire structure is a braided net or braided wire structure made of metal, and the metal wire structure has better tensile property, so that the metal wire structure can better adapt to bending deformation of the soaking plate and better adapt to the situation that the lengths of the soaking plate after the bending deformation of the soaking plate is recovered are different, and the bending property of the soaking plate is further improved.
Wherein the metal may be copper or stainless steel, etc., and may be selected according to actual needs by those skilled in the art, and the present application is not particularly limited herein.
According to another embodiment of the present application, a method for manufacturing a soaking plate is provided, as shown in fig. 5, including the following steps S101 to S102:
s101, machining a first corrugated structure 11 on the first shell 1 and machining a second corrugated structure 21 on the second shell 2;
s102, connecting the first shell 1 and the second shell 2.
Specifically, compared with a soaking plate with a three-section structure formed by an evaporation plate, a condensation plate and an insulation plate between the evaporation plate and the condensation plate in the prior art, the soaking plate prepared by the soaking plate preparation method has the advantages of better bending performance, better flexibility and less possibility of damage after bending deformation. Meanwhile, since the first corrugated structure 11 and the second corrugated structure 21 are directly formed on the first casing 1 and the second casing 2 according to the embodiment of the present application, the manufacturing process of the soaking plate can be further simplified.
Alternatively, the first corrugation 11 is machined on the first housing 1 and the second corrugation 21 is machined on the second housing 2 using a stamping process.
Specifically, the stamping process has the characteristics of stable part quality, good consistency, high material utilization rate, high efficiency, low production cost and the like, so that the preparation quality of the soaking plate can be further improved, and the preparation cost of the soaking plate is reduced. Of course, on the basis of satisfying the bending performance of the soaking plate, the first corrugated structure 11 and the second corrugated structure 21 may be prepared by mechanical bulging or roll forming, and the like, and those skilled in the art may select according to actual needs, and the present application is not limited herein.
In the embodiment of the application, the first casing 1 and the second casing 2 may be formed by one or more steps of stamping, so as to directly obtain an integral structure with a groove structure and a corrugated structure, thereby further improving the manufacturing efficiency of the soaking plate. And, since the first casing 1 and the second casing 2 further have a groove structure, after the first casing 1 and the second casing 2 are welded by using a diffusion welding process, a receiving cavity may be further formed between the first casing 1 and the second casing 2, and the receiving cavity is used for receiving the wick 3 and the working medium.
Optionally, the first corrugated structure 11 is machined on the first housing 1, and after the second corrugated structure 21 is machined on the second housing 2, before the first housing 1 is connected with the second housing 2, the method further comprises the following steps:
A1, a wick 3 is assembled between the first housing 1 and the second housing 2.
Specifically, the material of the liquid absorbing core 3 in the embodiment of the present application may be metal, fiber, cloth, etc., and the structure of the liquid absorbing core 3 may be a woven mesh, a braided wire, etc. For example, when the wick 3 is copper, the copper has better heat conduction property, and has fast heat conduction, good flexibility and strong ductility, so that the flexibility requirement of the soaking plate can be better met.
Wherein the wick 3 is preferably of wire construction. Because the metal wire structure has better tensile property, the bending deformation of the soaking plate can be better adapted, the situation that the lengths of the soaking plate after bending deformation recovery are different can be better adapted, and therefore the bending property of the soaking plate can be further improved.
Further, since the wick 3 is assembled between the first housing 1 and the second housing 2, the wick 3 can be directly located in a receiving chamber formed between the first housing 1 and the second housing 2 after the first housing 1 and the second housing 2 are connected.
Optionally, before connecting the first housing 1 and the second housing 2, the method further includes the following steps:
b1, the first housing 1 and the second housing 2 are pretreated.
Specifically, the pretreatment according to the embodiment of the present application is at least one of mechanical treatment or chemical treatment. Wherein the mechanical treatment comprises polishing, wiping, soaking, spraying, steam, ultrasonic wave and the like, and the chemical treatment comprises chemical degreasing, chemical alkaline washing, chemical acid washing, neutralization rust removal, sludge stripping and the like.
Alternatively, the first housing 1 and the second housing 2 are welded using a diffusion welding process.
In particular, as the diffusion welding process can lead the components of the position of the bulk phase and the welding seam and the metallography to be the same, the service life of the vapor chamber can be further prolonged.
When the material of the first casing 1 and/or the second casing 2 in the embodiment of the present application is stainless steel, the stainless steel is pure metal, so that a high-temperature diffusion welding process may be used for welding, and a low-temperature diffusion welding process is not required to be used as in the conventional welding manner, thereby further improving the manufacturing efficiency of the vapor chamber.
In addition, when the first casing 1 and the second casing 2 are welded by a high-temperature diffusion welding process, it is preferable that the diffusion welding temperature is 850 ℃ or higher, the welding pressure is 15MPa or higher, and the vacuum degree is less than or equal toThe width of the first welding area 12 on the first shell 1 and the second welding area 22 on the second shell 2 is less than or equal to 2mm, so as to further improve the preparation quality of the soaking plate.
Optionally, after the first casing 1 and the second casing 2 are welded by using a diffusion welding process, the method further includes the following steps:
and C1, carrying out surface treatment on the first shell 1 and the second shell 2 by adopting a steam process.
Specifically, the application effectively solves the problem that the first shell 1 and the second shell 2 which are made of stainless steel materials are easy to react with water and generate hydrogen by adopting a steam process to carry out surface treatment on the first shell 1 and the second shell 2, and further ensures the reliability and the stability of the soaking plate.
When the surface treatment is performed on the first shell 1 and the second shell 2 by adopting a steam process, the temperature of the high-temperature steam is preferably greater than or equal to 100 ℃ and the treatment time is preferably greater than or equal to 10 minutes, so as to further improve the preparation quality of the soaking plate.
Optionally, after the surface treatment of the first casing 1 and the second casing 2 by using a steam process, the method further comprises the following steps:
D1, pouring working medium into a containing cavity formed between the first shell 1 and the second shell 2.
Specifically, the working medium in the embodiment of the application can be one of deionized water, absolute ethyl alcohol or fluorocarbon, so that the service performance of the vapor chamber can be obviously improved, and the service life of the vapor chamber can be prolonged.
Optionally, after the working medium is poured between the first casing 1 and the second casing 2, the method further comprises the following steps:
And E1, sealing the pouring hole for pouring the working medium.
Specifically, in the embodiment of the application, working medium is poured into the accommodating cavity through the pouring hole, and then the liquid pouring port is sealed after the sealed cavity is vacuumized through the pouring hole, so that the accommodating cavity is in a complete sealing state, and the vapor chamber is obtained.
The foregoing embodiments mainly describe differences between the embodiments, and as long as there is no contradiction between different optimization features of the embodiments, the embodiments may be combined to form a better embodiment, and in consideration of brevity of line text, no further description is given here.
While certain specific embodiments of the invention have been described in detail by way of example, it will be appreciated by those skilled in the art that the above examples are for illustration only and are not intended to limit the scope of the invention. It will be appreciated by those skilled in the art that modifications may be made to the above embodiments without departing from the scope and spirit of the invention. The scope of the invention is defined by the appended claims.

Claims (13)

1. A soaking plate, comprising:
The device comprises a first shell and a second shell, wherein the first shell is provided with a first corrugated structure, the second shell is provided with a second corrugated structure corresponding to the first corrugated structure, and the first shell is connected with the second shell;
The ratio of the wave distance to the wave height of the first corrugated structure and/or the second corrugated structure is less than or equal to 3, and the ratio of the wave distance to the wave thickness is less than or equal to 2.
2. A vapor chamber according to claim 1, wherein the pitch of the first and/or second corrugation is less than or equal to 1mm.
3. A vapor chamber as claimed in claim 1, characterized in that the wave height of the first and/or second corrugation is less than or equal to 0.5mm.
4. A vapor chamber as claimed in claim 1, characterized in that the wave thickness of the first and/or the second corrugation is less than or equal to 0.5mm.
5. The vapor chamber of claim 1, wherein the vapor chamber has a bend radius r and the first and/or second corrugation has a corrugation length greater than (pi r)/2.
6. The vapor chamber of claim 1, wherein the material of the first housing and/or the second housing is stainless steel.
7. The vapor chamber of claim 6, wherein the thickness of the first housing and/or the second housing is less than or equal to 0.05mm.
8. The vapor chamber of claim 1, wherein the first housing is coupled to the second housing to form a receiving chamber, the receiving chamber containing a wick and a working fluid.
9. The vapor chamber of claim 8, wherein the wick is a wire structure.
10. A method of producing a vapor chamber according to any one of claims 1 to 9, comprising:
machining a first corrugated structure on the first shell and machining a second corrugated structure on the second shell;
And connecting the first shell and the second shell.
11. The method of manufacturing according to claim 10, wherein the first corrugation is machined in the first housing and the second corrugation is machined in the second housing using a stamping process.
12. The method of manufacturing according to claim 11, wherein the first housing is welded to the second housing using a diffusion welding process.
13. The method of manufacturing according to claim 12, wherein after the first housing and the second housing are welded by a diffusion welding process, the first housing and the second housing are surface-treated by a steam process.
CN202410546955.0A 2024-05-06 2024-05-06 Vapor chamber and vapor chamber preparation method Pending CN118129516A (en)

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