CN118032099A - Flow detector linear interval testing instrument and method - Google Patents
Flow detector linear interval testing instrument and method Download PDFInfo
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- CN118032099A CN118032099A CN202410447966.3A CN202410447966A CN118032099A CN 118032099 A CN118032099 A CN 118032099A CN 202410447966 A CN202410447966 A CN 202410447966A CN 118032099 A CN118032099 A CN 118032099A
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- 238000012360 testing method Methods 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title claims abstract description 7
- 238000001514 detection method Methods 0.000 claims abstract description 57
- 238000000605 extraction Methods 0.000 claims description 21
- 238000005259 measurement Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
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- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
The invention relates to the technical field of vacuum, in particular to a flow detector linear interval testing instrument and a flow detector linear interval testing method. The testing instrument for the linear interval of the flow detector comprises a gas flowmeter, a first valve, a flow detector, a detection cavity, a second valve and an air exhaust system. The method for testing the linear interval of the flow detector sequentially measures the standard flow value of the gas flowmeter and the corresponding ion flow indication value by adopting the flow detector to obtain the ratio of the flow to the ion flow indication value, further obtains the deviation value deviating from the linearity and determines whether the detected flow is in the linear interval of the flow detector. According to the invention, through directly detecting the relation between the flow and the ion flow indication value and through fast comparison and judgment, whether the detection value is positioned in the linear interval or not, the influence of various factors on the linear interval of the flow detector is avoided, and the detection accuracy is improved.
Description
Technical Field
The invention relates to the technical field of vacuum, in particular to a flow detector linear interval testing instrument and a flow detector linear interval testing method.
Background
In the field of vacuum technology, a flow detector is generally used for measuring the flow value of the detected flow, and the detected flow is obtained mainly by utilizing the linear relation between the ion flow indication value and the flow in a linear interval of the flow detector, so that the flow detection is realized. The current method for detecting flow by using the flow detector adopts the method that the indication value of the flow detector is directly given, and the indication value is corrected by combining a gas flowmeter as a standard. In order to determine the reliable operating state of the flow detector, it is necessary to confirm whether the detection value thereof is within a reasonable linear interval before use.
Disclosure of Invention
In order to effectively confirm that the flow detector is used in a linear section and reduce uncertainty of linear measurement of the flow detector, the invention provides a testing instrument and a testing method for the linear section of the flow detector.
The testing instrument for the linear interval of the flow detector comprises a gas flowmeter, a first valve, a flow detector, a detection cavity, a second valve and an air exhaust system.
Wherein the detection cavity is connected with the gas flowmeter; the flow detector is connected with the detection cavity, and the air extraction system is connected with the detection cavity.
A first valve is arranged on a pipeline between the detection cavity and the gas flowmeter.
And a second valve is arranged on a pipeline between the air extraction system and the detection cavity.
The air extraction system is used for extracting air from the test instrument, and the air extraction rate is not limited.
All valve initial states are closed states.
Preferably, the valves are all metal ultrahigh vacuum valves.
The invention relates to a testing method of a testing instrument for a linear interval of a flow detector, which comprises the following steps:
Starting an air extraction system, opening a second valve, extracting air from the detection cavity, and starting the flow detector after the detection cavity reaches the vacuum degree of normal operation of the flow detector; after the air extraction system is used for extracting air to enable the detection cavity to reach the background pressure, measuring an ion flow background indication value I o1 in the detection cavity through the flow detector, opening a first valve, measuring a standard flow Q 1 provided by the gas flowmeter through the flow detector, flowing into the detection cavity through the first valve, and measuring an ion flow I 1 in the detection cavity through the flow detector after the pressure in the detection cavity is stable; closing a first valve, exhausting by an air exhausting system to enable the detection cavity to reach the background pressure, measuring an ion flow background indication value I o2 in the detection cavity by a flow detector, opening the first valve, measuring a standard flow Q 2 provided by a gas flowmeter by the flow detector, flowing into the detection cavity through the first valve, and measuring an ion flow I 2 in the detection cavity by the flow detector after the pressure in the detection cavity is stable; according to Q 1、I1、Q2、I2、Io1、Io2, using the formula Calculating deviation D of the flow detector from linearity; the absolute value of D satisfies the linear interval conditionIt was confirmed whether Q 1 and Q 2 were within the linear range of the flow detector.
In summary, the invention can simply and effectively test whether the flow measured by the flow detector is in the linear section thereof by directly detecting the relation between the flow and the ion flow indication value, determine the linear section of the flow detector, avoid the influence of various factors on the linear section of the flow detector, and reduce the uncertainty of the linear measurement of the flow detector. By adopting the testing device, the gas flowmeter and the flow detector are symmetrically arranged relative to the detection cavity, so that measurement errors caused by inconsistent pipelines can be avoided, the testing precision is improved, and the testing method is simple, flexible and changeable.
Drawings
FIG. 1 is a schematic diagram of a flow detector linear section test instrument according to the present invention.
Icon: 1-gas flowmeter, 2-first valve, 3-flow detector, 4-detection chamber, 5-second valve, 6-pumping system.
It should be understood that the above-described figures are merely schematic and are not drawn to scale.
Detailed Description
Fig. 1 is a schematic diagram of a testing apparatus for a linear section of a flow meter according to the present embodiment.
The flow detector linear interval testing instrument comprises a gas flowmeter 1, a first valve 2, a flow detector 3, a detection cavity 4, a second valve 5 and an air extraction system 6.
Wherein the detection cavity 4 is connected with the gas flowmeter 1; the flow detector 3 is connected with the detection cavity 4, and the air extraction system 6 is connected with the detection cavity 4.
A first valve 2 is arranged on the pipeline between the detection cavity 4 and the gas flowmeter 1. The first valve 2 is used to control the flow of gas between the detection chamber 4 and the gas flow meter 1.
A second valve 5 is arranged on the pipeline between the air extraction system 6 and the detection cavity 4. The second valve 5 is used to control the flow of gas between the pumping system 6 and the detection chamber 4.
The air extraction system 6 is used for extracting air from the test instrument, and the air extraction rate is not limited.
All valve initial states are closed states.
In addition, the application also provides a method for testing the linear interval of the flow detector, which comprises the following steps: starting an air extraction system 6, opening a second valve 5, extracting air from the detection cavity 4, and starting the flow detector 3 after the detection cavity 4 reaches the vacuum degree of normal operation of the flow detector 3; after the stable operation is carried out for more than 4 hours, the air extraction system 6 carries out air extraction to enable the detection cavity 4 to reach the background pressure (10 -4 Pa), the flow detector 3 detects the ion flow background indication value I o1=2.25×10-11 A in the detection cavity 4, the first valve 2 is opened, the flow detector measures the standard flow Q 1=7.38×10-9Pa·m3/s provided by the gas flowmeter and flows into the detection cavity 4 through the first valve 2, and after the pressure in the detection cavity 4 is stable, the flow detector 3 detects the ion flow I 1=1.95×10-10 A in the detection cavity 4; closing the first valve 2, exhausting by the air exhausting system 6 to enable the detection cavity to reach the background pressure (10 -4 Pa), measuring the ion flow background indication value I o2=2.20×10-11 A in the detection cavity 4 by the flow detector 3, opening the first valve 2, measuring the standard flow Q 2=7.96×10-9Pa·m3/s provided by the gas flowmeter by the flow detector, flowing into the detection cavity 4 through the first valve 2, and measuring the ion flow I 2=2.06×10-10 A in the detection cavity 4 by the flow detector 3 after the pressure in the detection cavity 4 is stable; using the formulaCalculating the deviation d=0.478 of the flow detector 3 from the linearity, the absolute value of D satisfying the linear interval conditionQ 1 and Q 2 were confirmed to be within the linear range of the flow detector.
Claims (2)
1. The utility model provides a linear interval's of flow detector test instrument which characterized in that, includes gas flowmeter, first valve, flow detector, detection chamber, second valve and air extraction system, wherein:
the detection cavity is connected with the gas flowmeter;
A first valve is arranged on a pipeline between the detection cavity and the gas flowmeter;
the flow detector is connected with the detection cavity;
the air extraction system is connected with the detection cavity;
A second valve is arranged on a pipeline between the air extraction system and the detection cavity;
the air extraction system is used for extracting air from the test instrument.
2. The method for testing the linear interval of the flow detector is characterized by adopting the instrument as claimed in claim 1, and comprises the steps of adopting an air extraction system to carry out air extraction so that the pressure in a detection cavity reaches the background pressure, measuring the background indication value I o1 of the ion flow in the detection cavity by using the flow detector, and measuring the standard flow Q 1 and the ion flow I 1 in the detection cavity provided by a gas flowmeter by using the flow detector; after the pressure in the detection cavity reaches the background pressure by using the air extraction system again, measuring the background indication value I o2 of the ion flow in the detection cavity by using the flow detector, and measuring the standard flow Q 2 and the ion flow I 2 in the detection cavity provided by the gas flowmeter by using the flow detector; using the formulaCalculating deviation D of the flow detector from linearity, wherein the absolute value of D meets the condition of a linear interval/>It was confirmed whether Q 1 and Q 2 were in the linear section of the flow detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410447966.3A CN118032099A (en) | 2024-04-15 | 2024-04-15 | Flow detector linear interval testing instrument and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410447966.3A CN118032099A (en) | 2024-04-15 | 2024-04-15 | Flow detector linear interval testing instrument and method |
Publications (1)
| Publication Number | Publication Date |
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| CN118032099A true CN118032099A (en) | 2024-05-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202410447966.3A Pending CN118032099A (en) | 2024-04-15 | 2024-04-15 | Flow detector linear interval testing instrument and method |
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| CN105181269A (en) * | 2015-07-16 | 2015-12-23 | 兰州空间技术物理研究所 | Multi-channel fast calibration device of leakage detection device and method |
| CN107830914A (en) * | 2017-09-19 | 2018-03-23 | 兰州空间技术物理研究所 | The micrometeor calibrating installation and method of a kind of binary channels symmetrical structure |
| CN112611507A (en) * | 2020-12-01 | 2021-04-06 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for detecting internal vacuum degree of vacuum electronic device |
| CN216871896U (en) * | 2021-12-28 | 2022-07-01 | 奕瑞影像科技成都有限公司 | Mass spectrometer partial pressure calibration system |
| CN115230056A (en) * | 2022-07-07 | 2022-10-25 | 成都工业学院 | Mold cavity core cooling device of micro-foaming deep-cavity injection mold |
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2024
- 2024-04-15 CN CN202410447966.3A patent/CN118032099A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538916A (en) * | 2012-02-06 | 2012-07-04 | 江苏东方航天校准检测有限公司 | Portable gas micro-flow calibration system and method thereof |
| CN104280199A (en) * | 2014-09-12 | 2015-01-14 | 兰州空间技术物理研究所 | Mass spectrograph linear section testing method |
| CN105092187A (en) * | 2015-07-13 | 2015-11-25 | 兰州空间技术物理研究所 | Measurement apparatus and method for minimum vacuum leak rate |
| CN105181269A (en) * | 2015-07-16 | 2015-12-23 | 兰州空间技术物理研究所 | Multi-channel fast calibration device of leakage detection device and method |
| CN107830914A (en) * | 2017-09-19 | 2018-03-23 | 兰州空间技术物理研究所 | The micrometeor calibrating installation and method of a kind of binary channels symmetrical structure |
| CN112611507A (en) * | 2020-12-01 | 2021-04-06 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Method for detecting internal vacuum degree of vacuum electronic device |
| CN216871896U (en) * | 2021-12-28 | 2022-07-01 | 奕瑞影像科技成都有限公司 | Mass spectrometer partial pressure calibration system |
| CN115230056A (en) * | 2022-07-07 | 2022-10-25 | 成都工业学院 | Mold cavity core cooling device of micro-foaming deep-cavity injection mold |
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