CN112611507A - Method for detecting internal vacuum degree of vacuum electronic device - Google Patents
Method for detecting internal vacuum degree of vacuum electronic device Download PDFInfo
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- CN112611507A CN112611507A CN202011386393.6A CN202011386393A CN112611507A CN 112611507 A CN112611507 A CN 112611507A CN 202011386393 A CN202011386393 A CN 202011386393A CN 112611507 A CN112611507 A CN 112611507A
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- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
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- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The invention discloses a method for detecting the internal vacuum degree of a vacuum electronic device, which comprises the following steps: determining a power-on mode and power-on parameters of the vacuum electronic device; connecting a standard sample tube of the vacuum electronic device with an ion flow measuring system; vacuumizing the standard sample tube to ensure that the standard sample tube reaches the required vacuum degree; measuring the anode ion current of the standard sample tube under the corresponding target vacuum degree; testing ion flows under different standard vacuum degrees, completing calibration work of the corresponding relation between the ion flows and the vacuum degrees, and obtaining an ion flow-vacuum degree calibration table or an ion flow-vacuum degree quantification model; connecting a sample tube to be measured of the vacuum electronic device with an ion flow measuring system; measuring the anode ion current of a sample tube to be measured; and (4) comparing the ion current-vacuum degree calibration table or substituting the measured anode ion current into the ion current-vacuum degree quantification model to obtain the vacuum degree of the sample tube to be measured. The invention can carry out nondestructive detection of high vacuum and high measurement precision on the internal vacuum degree of the vacuum electronic device.
Description
Technical Field
The invention belongs to the field of electronic device detection, and particularly relates to a method for detecting the internal vacuum degree of a vacuum electronic device.
Background
Vacuum electronic devices are active devices that amplify and convert signals by the transmission of electrons or ions between electrodes in a gaseous medium or vacuum. Various high-power, high-frequency, wide-band and high-reliability microwave vacuum electronic devices are widely applied to the development of national economy and informatization equipment.
The quality of the vacuum degree in the tube of the vacuum electronic device is related to the electron emission state of the cathode surface and the running state of electrons in the tube. The deterioration of the vacuum degree can cause phenomena such as spiral flow jumping, stray noise increase, abnormal shutdown and the like. The maintenance of vacuum levels also directly affects the lifetime of vacuum electronic devices.
The vacuum electronic device belongs to a high vacuum device, and the reduction of the vacuum degree in a tube is a main failure mechanism of the vacuum electronic device in a storage state. The gas in the tube comes from the gas leakage in the tube and the gas leakage and leakage of the tube shell. After the vacuum electronic device is stored for a long time, the vacuum degree in the tube is reduced due to the accumulation of residual gas in the tube, and cathode poisoning is caused, so that the emission capability of the cathode is reduced, the emission current is reduced, the output power is reduced, and the problem that the vacuum electronic device cannot work normally immediately after long-term storage is caused.
After the vacuum electronic device is sealed off, the vacuum degree in the tube cannot be tracked, so that the problem of neck clamping of how to evaluate the usability of the vacuum electronic device after long-term storage is solved by the vacuum degree detection technology in the vacuum electronic device tube, particularly, no practical detection method exists for high-vacuum state and nondestructive vacuum degree detection at present, and the engineering application of the vacuum electronic device after long-term storage is limited.
Disclosure of Invention
The invention provides a method for detecting the internal vacuum degree of a vacuum electronic device, which aims to solve the problem that the engineering application of the vacuum electronic device is limited because the vacuum degree in a tube cannot be measured after the vacuum electronic device is stored for a long time.
In order to achieve the above object, the present invention provides a method for detecting the vacuum degree inside a vacuum electronic device, which is characterized by comprising the following steps:
s1: determining the power-on mode and power-on parameters of the vacuum electronic device according to the structure of an electron gun of the vacuum electronic device;
s2: connecting a standard sample tube of a vacuum electronic device with the ion flow measuring system;
s3: vacuumizing the standard sample tube to enable the standard sample tube to reach the required standard vacuum degree;
s4: applying voltage to the electrode of the standard sample tube according to the power-on mode and the power-on parameters determined in the step S1, and measuring the anode ion current of the standard sample tube under the target vacuum degree through the ion current measuring system;
s5: repeating the steps S3 and S4, testing the ion current under different standard vacuum degrees, completing the calibration work of the corresponding relation between the ion current and the vacuum degrees, and obtaining an ion current-vacuum degree calibration table or an ion current-vacuum degree quantification model;
s6: connecting a sample tube to be measured of the vacuum electronic device with the ion flow measuring system;
s7: applying the same voltage as that in the step S4 to the electrode of the sample tube to be measured, and measuring the anode ion current of the sample tube to be measured through the ion current measuring system;
s8: and contrasting the ion current-vacuum degree calibration table or substituting the measured anode ion current into the ion current-vacuum degree quantization model to obtain the vacuum degree of the sample tube to be measured.
Preferably, the step S1 of determining the power-on mode of the vacuum electronic device includes:
modeling the electron gun structure of the standard sample tube by using electron trajectory simulation software;
respectively simulating the trajectory distribution diagram of electrons emitted by the electron gun in different power-on modes, and selecting the power-on mode with longer electron trajectory path and divergent electron trajectory.
Preferably, the power-up mode is a positive gate power-up mode, and the determining the power-up parameters of the vacuum electronic device in step S1 includes:
selecting a minimum grid voltage which can enable the cathode emission current to meet ion current detection accuracy;
and according to the selected grid voltage, respectively simulating the electron track distribution result under the application of different anode ion collecting voltages by adopting the electron beam track simulation software, and selecting the anode ion collecting voltage which can meet the ion flow detection precision.
Preferably, before the step S3, the method further includes: and (4) carrying out air exhaust and cathode baking treatment on the standard sample tube according to related air exhaust specifications.
Preferably, in the step S5, the ion current-vacuum quantitative model is obtained by performing data fitting on the ion current-vacuum calibration table.
Preferably, in step S5, when the vacuum degree in the reference sample tube reaches a predetermined vacuum degree, the calibration operation of the relationship between the ion current and the vacuum degree is finished.
Preferably, the predetermined degree of vacuum is 1.33X 10-7Pa。
Preferably, the step S7 further includes: and carrying out preheating treatment on the cathode of the sample tube to be detected to obtain stable cathode emission current.
Preferably, in step S7, a positive voltage is applied to the gate of the sample tube and a negative voltage is applied to the anode of the sample tube.
Preferably, the ion current measuring system is composed of more than four and a half picoampere meters.
The invention can carry out nondestructive detection of high vacuum and high measurement precision on the internal vacuum degree of the vacuum electronic device.
Drawings
Preferred embodiments of the present invention will now be described in further detail with reference to the accompanying drawings, in which:
FIG. 1 is a flow chart of a method for detecting the degree of vacuum in a vacuum electronic device according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the ion current vacuum calibration system according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a vacuum test system according to an embodiment of the present invention.
Detailed Description
In order to make the technical solutions of the present invention better understood, those skilled in the art will now describe the present invention in further detail with reference to the accompanying drawings.
Vacuum electronic devices refer to active devices that generate, amplify, and convert electromagnetic wave signals using various effects of electrons or ions in a gaseous medium or vacuum. The vacuum electronic device can comprise a traveling wave tube, a magnetron, a klystron, a vacuum switch tube, an X-ray tube and the like. In order to realize the high vacuum state and nondestructive vacuum degree detection of the vacuum electronic device, the invention adopts the following vacuum degree detection method: detecting ion flow generated by ionization of residual gas inside a sample tube to be detected of the vacuum electronic device, and then obtaining the vacuum degree in the sample tube to be detected by utilizing the corresponding relation (a calibration table or a quantization model) between the ion flow and the vacuum degree obtained by calibrating a standard sample tube, namely the vacuum degree detection method based on the ion flow. The vacuum degree detection method based on the ion flow combines a nondestructive detection method of high vacuum calibration and ion flow test, applies a certain voltage to excite the residual gas in the tube to ionize by utilizing the structure of the product, obtains the ion flow value through the test, and obtains the vacuum degree by utilizing an ion flow-vacuum degree calibration table or a quantitative model.
Fig. 1 is a flowchart of a method for detecting an internal vacuum degree of a vacuum electronic device according to an embodiment of the present invention, and as shown in fig. 1, the method for detecting an internal vacuum degree of a vacuum electronic device according to the present invention includes the following steps:
s1: determining the power-on mode and power-on parameters of the vacuum electronic device according to the structure of an electron gun of the vacuum electronic device;
s2: connecting a standard sample tube of a vacuum electronic device with the ion flow measuring system;
s3: vacuumizing the standard sample tube to enable the standard sample tube to reach the required standard vacuum degree;
s4: applying voltage to the electrode of the standard sample tube according to the power-on mode and the power-on parameters determined in the step S1, and measuring the anode ion current of the standard sample tube under the target vacuum degree through the ion current measuring system;
s5: repeating the steps S3 and S4, testing the ion current under different standard vacuum degrees, completing the calibration work of the corresponding relation between the ion current and the vacuum degrees, and obtaining an ion current-vacuum degree calibration table or an ion current-vacuum degree quantification model;
s6: connecting a sample tube to be measured of the vacuum electronic device with the ion flow measuring system;
s7: applying the same voltage as that in the step S4 to the electrode of the sample tube to be measured, and measuring the anode ion current of the sample tube to be measured through the ion current measuring system;
s8: and contrasting the ion current-vacuum degree calibration table or substituting the measured anode ion current into the ion current-vacuum degree quantization model to obtain the vacuum degree of the sample tube to be measured.
In the above steps, step S1 is an energization mode and an energization parameter determination process before calibration of the correspondence between the ion current and the vacuum degree, steps S2 to S5 are calibration processes of the correspondence between the ion current and the vacuum degree, and steps S6 to S8 are vacuum degree test processes based on the ion current. These processes are specifically described below.
Power-on mode and power-on parameter determination process
The vacuum electronic device mainly comprises an electron gun, a high-frequency system, an energy transmission device, a magnetic focusing system and a collector, and realizes the amplification function by exchanging the kinetic energy of electron beams with the energy of a high-frequency electromagnetic field. The electron gun is composed of a cathode assembly, an anode and a focusing electrode, and is used for generating electron beams with certain current intensity and shape, and in order to enable the electrons to exchange energy with an electromagnetic field sufficiently and realize amplification, the anode in the electron gun can accelerate the electrons to be slightly faster than the phase speed of the electromagnetic wave in a slow wave structure.
Before calibrating the relationship between the ion current and the vacuum degree, firstly, in step S1, determining the power-on mode and the power-on parameters of the vacuum electronic device according to the structure of the electron gun of the vacuum electronic device, specifically, the determining the power-on mode of the vacuum electronic device in step S1 may include:
step S11: modeling an electron gun structure of a standard sample tube to be calibrated by utilizing electron trajectory simulation software;
step S12: respectively simulating the trajectory distribution diagram of electrons emitted by the electron gun in different power-on modes, and selecting the power-on mode with longer electron trajectory path and divergent electron trajectory.
In step S12, a positive gate power-up mode in which a gate is applied with a positive voltage is generally selected. In the case where the positive gate power-up mode is selected, the determining of the power-up parameters of the vacuum electronic device in step S1 may include steps S13 and S14.
In step S13, a minimum gate voltage is selected to ensure that the cathode emission current satisfies ion flux detection accuracy, and specifically, to reduce the heating effect of the electron beam on the gate, the gate voltage should be within a certain range, and the minimum gate voltage is selected as much as possible while ensuring that the cathode emission current satisfies ion flux detection accuracy.
In step S14, electron trajectory distribution results under application of different anode ion collection voltages are simulated by electron beam trajectory simulation software based on the gate voltage selected in step S13, and an anode ion collection voltage that satisfies ion flux detection accuracy is selected. Specifically, in order to reduce the inhibition effect of the anode voltage on electrons, a smaller voltage value is selected as much as possible, and meanwhile, the electrons are prevented from being collected by the anode due to the fact that the anode voltage is too low, and the ion flow measurement accuracy is reduced. And (3) comprehensively considering the inhibition effect of the anode voltage on electrons, the influence of electron capture on ion flow measurement precision, the collection effect of the grid on the electrons and other factors, and then selecting the optimum anode ion collection voltage.
After the power-up mode and the power-up parameters of the vacuum electronic device are determined through the process, the power-up mode and the power-up parameters are used as the input conditions for subsequent calibration of the corresponding relation between the ion current and the vacuum degree, calibration work is carried out, and the ion current is measured according to the power-up mode and the power-up parameters in the vacuum electronic device tube during vacuum degree testing.
Second, calibrating the corresponding relation between ion flow and vacuum degree
The calibration of the corresponding relation between the ion flow and the vacuum degree can be carried out by an ion flow vacuum degree calibration system. Fig. 2 is a schematic configuration diagram of an ion current vacuum calibration system according to an embodiment of the present invention. As shown in fig. 2, the ion current vacuum degree calibration system mainly includes an exhaust stage vacuum system 1, an ultra-high vacuum valve 2, an ion pump 3, a high-sensitivity vacuum gauge (ionization gauge) 4, an ion current measurement system 5, and an ionization gauge 6. Wherein, the exhaust table vacuum system 1 can be composed of a vacuum pump, and the ion current measuring system 5 can comprise a linear power supply, a high-sensitivity pico ampere meter or an electrometer, etc. During calibration, a standard sample tube (such as a traveling wave tube sample tube) 7 and a high-sensitivity vacuum gauge 4 of a vacuum electronic device are connected to the exhaust table vacuum system 1 for vacuumizing, whether the vacuum degree required for calibration is achieved is measured through the ionization gauge 6, and meanwhile, an electrode of an electron gun of the standard sample tube 6 is connected with a corresponding electrode of the ion flow measuring system 5. The calibration process of the relationship between the ion flow and the vacuum degree is specifically described below with reference to the ion flow vacuum degree calibration system.
In the method for detecting the internal vacuum degree of the vacuum electronic device, after the power-on mode and the power-on parameters of the vacuum electronic device to be detected are determined in the step S1 as described above, the ion current and the vacuum degree corresponding relation is calibrated through the steps S2-S5 as follows.
In step S2, the reference sample tube 7 of the vacuum electronic device is connected to the ion current measuring system 5, specifically, the electrode of the electron gun of the reference sample tube 7 is connected to the corresponding electrode of the ion current measuring system 5.
In step S3, the master sample tube 7 is evacuated to a desired degree of vacuum in the master sample tube 7. In one embodiment, the vacuum pumping system 1 is used to evacuate the standard sample tube 7, and the vacuum valve 2 or the ion pump 3 is adjusted to make the vacuum degree displayed by the ionization gauge 6 reach the target vacuum degree (e.g. 1.00 × 10)-4Pa), the vacuum valve 2 is closed and the value of the vacuum degree indicated by the ionization gauge 6 is recorded.
In one embodiment, after step S2 and before step S3, the method may further include the step of performing an exhaust and cathode baking process on the reference sample tube 7 according to the relevant sample tube exhaust specification, specifically, connecting the reference sample tube 7 to the exhaust stage vacuum system 1, and performing the exhaust and cathode baking process on the reference sample tube 7 through the exhaust stage vacuum system 1.
In step S4, a voltage is applied to the electrode of the standard sample tube 7 according to the power-on mode and the power-on parameters determined in step S1, the ion current measuring system 5 measures the anode ion current corresponding to the standard sample tube 7 under the target vacuum degree, and the ion current size at this time is recorded in the ion current-vacuum degree calibration table.
In step S5, repeating steps S3 and S4, testing the ion current under different vacuum degrees, completing the calibration of the correspondence between the ion current and the vacuum degrees, and obtaining an ion current-vacuum degree calibration table or an ion current-vacuum degree quantification model. In one embodiment, the calibration table may be in the form of a list of ion currents and a list of vacuum degrees, and an ion current-vacuum degree quantization model, for example, a quantization model in the form of y ═ kx + b, may be obtained by fitting data to the calibration table.
In one embodiment, in step S5, when the vacuum degree in the master tube 7 reaches the predetermined vacuum degree, the calibration operation of the ion current-vacuum degree correspondence relationship is finished. Specifically, when the high-sensitivity vacuum gauge 7 indicates a degree of vacuum of 10- 7When the pressure is in Pa magnitude, the vacuum valve 2 or the ion pump 3 is adjusted to make the vacuum degree displayed by the ionization gauge 6 reach 1.33 multiplied by 10-7And when Pa, finishing the calibration work of the corresponding relation between the ion flow and the vacuum degree, and outputting an ion flow-vacuum degree calibration table.
Vacuum degree testing process based on ion flow
The vacuum test may be performed by a vacuum test system. The vacuum degree test system is built under a shielding environment, and fig. 3 is a schematic configuration diagram of the vacuum degree test system according to an embodiment of the present invention. As shown in fig. 3, the vacuum degree testing system mainly includes an ion current measuring system 5, a sample tube 8 to be tested of a vacuum electronic device, and a data collecting system 9. The sample tube 8 to be measured is, for example, a traveling wave tube, and depending on the structure of the traveling wave tube to be measured, the grid or the first anode of the traveling wave tube is an electron accelerating electrode, and the anode or the second anode of the traveling wave tube is an ion collecting electrode. And applying the same power-up mode and power-up parameters as those in the calibration process on the corresponding electrode to obtain the measured value of the ion current in the sample tube 8 to be measured, and finally obtaining the vacuum degree in the sample tube 8 to be measured according to the ion current-vacuum degree calibration table or the ion current-vacuum degree quantification model obtained in the calibration process.
That is, in the method for detecting the internal vacuum degree of the vacuum electronic device according to the present invention, after the calibration of the ion current and the vacuum degree corresponding relationship is completed in steps S2 to S5 as described above, the vacuum degree test of the sample tube for the vacuum electronic device is performed as follows.
In step S6, the sample tube 8 of the vacuum electronic device is connected to the ion flow measuring system 5, specifically, the gate (or the first anode) of the sample tube 8 may be connected to the electron accelerating electrode of the ion flow measuring system 5, and the anode (or the second anode) of the sample tube 8 may be connected to the ion collecting electrode of the ion flow measuring system 5. The ion current measuring system 5 is preferably composed of four and more than half picoampere meters.
In step S7, the same voltage as in step S4 is applied to the electrode of the sample tube 8, and the ion current measurement system 5 measures the value of the anode ion current of the sample tube 8. In one embodiment, step S7 further includes S71: and (3) carrying out preheating treatment on the cathode of the sample tube 8 to be detected to obtain stable cathode emission current, so that the cathode emission current is consistent with the cathode emission current in the calibration process.
Specifically, in step S7, a positive voltage is applied to the gate (or the first anode) of the sample tube 8 to be measured with respect to the cathode, while ensuring that the voltage value thereof coincides with the electron acceleration voltage at the time of calibration, for accelerating electrons; and applying negative voltage relative to the cathode to the anode (or the second anode) of the sample tube 8 to be detected, and simultaneously ensuring that the voltage value of the sample tube is consistent with the ion collection voltage during calibration so as to collect ion current after gas molecules are ionized.
In step S8, the vacuum degree of the sample tube 8 to be measured is obtained by referring to the ion current-vacuum degree calibration table or substituting the measured ion current value into the ion current-vacuum degree quantization model. In one embodiment, after the ion current numerical value displayed by the electrometer in the ion current testing system 5 is stable, the data acquisition system 9 is used for reading and recording the anode ion current numerical value, and then the vacuum degree corresponding to the measured ion current is obtained by comparing the ion current-vacuum degree calibration table or substituting the ion current numerical value into the ion current-vacuum degree quantification model.
As described above, according to the method for detecting the internal vacuum degree of a vacuum electronic device in one embodiment of the present invention, compared with the prior art, the following technical effects are provided:
1) the finished product of the vacuum electronic device can be subjected to nondestructive testing without damage, and any electrical property and use of the product are not influenced;
2) the test can be carried out in the actual working condition environment of the sample, the vacuum degree measurement in the storage period and the working period after the delivery of the product can be realized, the engineering application and the mass test can be realized, and the test efficiency is high;
3) the ion current measuring system formed by four and more than half picoampere meters is used, the testing accuracy is improved, and the ion current testing precision can reach 0.1nA level;
4) the ion flow and vacuum degree calibration technology is established, and the vacuum degree detection can realize 1.33 multiplied by 10-7High vacuum detection of Pa.
While certain exemplary embodiments of the present invention have been described above by way of illustration only, it will be apparent to those of ordinary skill in the art that the described embodiments may be modified in various different ways without departing from the spirit and scope of the invention. Accordingly, the drawings and description are illustrative in nature and should not be construed as limiting the scope of the invention.
Claims (10)
1. A method for detecting the internal vacuum degree of a vacuum electronic device is characterized by comprising the following steps:
s1: determining the power-on mode and power-on parameters of the vacuum electronic device according to the structure of an electron gun of the vacuum electronic device;
s2: connecting a standard sample tube of a vacuum electronic device with the ion flow measuring system;
s3: vacuumizing the standard sample tube to enable the standard sample tube to reach the required standard vacuum degree;
s4: applying voltage to the electrode of the standard sample tube according to the power-on mode and the power-on parameters determined in the step S1, and measuring the anode ion current of the standard sample tube under the target vacuum degree through the ion current measuring system;
s5: repeating the steps S3 and S4, testing the ion current under different standard vacuum degrees, completing the calibration work of the corresponding relation between the ion current and the vacuum degrees, and obtaining an ion current-vacuum degree calibration table or an ion current-vacuum degree quantification model;
s6: connecting a sample tube to be measured of the vacuum electronic device with the ion flow measuring system;
s7: applying the same voltage as that in the step S4 to the electrode of the sample tube to be measured, and measuring the anode ion current of the sample tube to be measured through the ion current measuring system;
s8: and contrasting the ion current-vacuum degree calibration table or substituting the measured anode ion current into the ion current-vacuum degree quantization model to obtain the vacuum degree of the sample tube to be measured.
2. The method for detecting the internal vacuum degree of a vacuum electronic device according to claim 1, wherein the step S1 for determining the power-on mode of the vacuum electronic device comprises:
modeling the electron gun structure of the standard sample tube by using electron trajectory simulation software;
respectively simulating the trajectory distribution diagram of electrons emitted by the electron gun in different power-on modes, and selecting the power-on mode with longer electron trajectory path and divergent electron trajectory.
3. The method for detecting the internal vacuum degree of a vacuum electronic device according to claim 2, wherein the power-up mode is a positive gate power-up mode, and the step S1 of determining the power-up parameters of the vacuum electronic device comprises:
selecting a minimum grid voltage which can enable the cathode emission current to meet ion current detection accuracy;
and according to the selected grid voltage, respectively simulating the electron track distribution result under the application of different anode ion collecting voltages by adopting the electron beam track simulation software, and selecting the anode ion collecting voltage which can meet the ion flow detection precision.
4. The method for detecting vacuum degree inside vacuum electronic device according to any of claims 1-3, characterized by further comprising, before said step S3: and (4) carrying out air exhaust and cathode baking treatment on the standard sample tube according to related air exhaust specifications.
5. The method for detecting vacuum degree inside vacuum electronic device according to any of claims 1-4, wherein in the step S5, the ion current-vacuum degree quantification model is obtained by data fitting to the ion current-vacuum degree calibration table.
6. The method for detecting the internal vacuum degree of the vacuum electronic device according to any one of claims 1 to 5, wherein in the step S5, when the vacuum degree in the reference sample tube reaches a predetermined vacuum degree, the ion current and vacuum degree correspondence calibration operation is finished.
7. The method for detecting the internal degree of vacuum of a vacuum electronic device according to claim 6, wherein the predetermined degree of vacuum is 1.33 x 10-7Pa。
8. The method for detecting vacuum degree inside vacuum electronic device according to any of claims 1-7, wherein said step S7 further comprises: and carrying out preheating treatment on the cathode of the sample tube to be detected to obtain stable cathode emission current.
9. The method for detecting the internal vacuum degree of a vacuum electronic device according to any of claims 1 to 8, wherein in step S7, a positive voltage is applied to the gate of the sample tube and a negative voltage is applied to the anode of the sample tube.
10. The method for detecting the internal vacuum degree of a vacuum electronic device according to any one of claims 1 to 9, wherein the ion current measuring system is composed of more than four and a half picoampere meters.
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