CN117912916A - Direct heating lanthanum hexaboride hot cathode structure and manufacturing method thereof - Google Patents
Direct heating lanthanum hexaboride hot cathode structure and manufacturing method thereof Download PDFInfo
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- CN117912916A CN117912916A CN202410084068.6A CN202410084068A CN117912916A CN 117912916 A CN117912916 A CN 117912916A CN 202410084068 A CN202410084068 A CN 202410084068A CN 117912916 A CN117912916 A CN 117912916A
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- Prior art keywords
- lanthanum hexaboride
- hot cathode
- cubic
- molybdenum
- cathode structure
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- 229910052746 lanthanum Inorganic materials 0.000 title claims abstract description 75
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 238000010438 heat treatment Methods 0.000 title claims abstract description 24
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 49
- 239000011733 molybdenum Substances 0.000 claims abstract description 49
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 15
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 15
- 239000010439 graphite Substances 0.000 claims abstract description 15
- 229910052582 BN Inorganic materials 0.000 claims abstract description 10
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 10
- 238000005192 partition Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 2
- 230000004927 fusion Effects 0.000 description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Solid Thermionic Cathode (AREA)
Abstract
The invention relates to a direct heating lanthanum hexaboride hot cathode structure and a manufacturing method thereof, the direct heating lanthanum hexaboride hot cathode structure comprises a plurality of cubic lanthanum hexaboride long blocks, the cubic lanthanum hexaboride long blocks are sequentially connected in series through molybdenum electrodes, the cubic lanthanum hexaboride long blocks are even blocks and are distributed in a parallel plane, graphite sheets are filled between the cubic lanthanum hexaboride long blocks and the molybdenum electrodes, the cubic lanthanum hexaboride long blocks are separated by a boron nitride insulating piece, and current flows through a first lanthanum hexaboride block, passes through the graphite sheets to a molybdenum electrode and then flows to a second lanthanum hexaboride block, and the like, and the current flows through all the lanthanum hexaboride blocks in a series mode. The structure body has compact space structure and high electron generation rate in unit space, and effectively improves electron density. The lanthanum hexaboride block achieves 180-degree turning through the molybdenum electrode, and the problem that lanthanum hexaboride breaks at the turning is avoided.
Description
Technical Field
The invention belongs to the technical field of hot cathode linear plasma heating, and particularly relates to a direct heating lanthanum hexaboride hot cathode structure and a manufacturing method thereof.
Background
Linear plasma devices are widely used to study plasma-material interactions (PMI) in fusion reactor applications. The device can generate low-energy high-flux deuterium/helium plasma in a laboratory, simulate the plasma environment of a divertor part in the fusion reactor, and is helpful for deeply researching the PMI process in the fusion reactor. In a hot cathode plasma source linear plasma device, lanthanum hexaboride is often used as a hot cathode, and joule heat is generated by electrifying a tungsten wire behind the lanthanum hexaboride, so that the lanthanum hexaboride is indirectly heated. When lanthanum hexaboride reaches a certain temperature, a large amount of electrons are released, and under the action of an external strong electric field, gas is ionized and introduced to generate plasma. At present, most of the traditional heating modes are indirect heating modes, namely lanthanum hexaboride is indirectly heated through heat radiation of tungsten wires, and the problems of low energy efficiency, easy deformation of the tungsten wires in the heating process, uneven heating and the like exist.
Disclosure of Invention
In summary, the invention aims to provide a direct heating lanthanum hexaboride hot cathode structure and a manufacturing method thereof, which simplify the processing difficulty of lanthanum hexaboride, connect corners by molybdenum electrodes and solve the problem that the corners of lanthanum hexaboride are easy to break. In addition, the novel structure meets the requirement of directly heating lanthanum hexaboride, solves the problems of uneven heating and low energy efficiency, can stably and efficiently generate plasma, and provides important contribution to researches on fusion device design, semiconductor device plasma etching treatment and the like.
In order to achieve the above purpose, the present invention provides the following technical solutions: the direct heating lanthanum hexaboride hot cathode structure comprises a plurality of cubic lanthanum hexaboride long blocks, wherein the cubic lanthanum hexaboride long blocks are sequentially connected in series through molybdenum electrodes, the cubic lanthanum hexaboride long blocks are even blocks, and are distributed in a parallel mode to form a plane.
Further, the outer ends of the long cubic lanthanum hexaboride blocks at the head and the tail are also connected with molybdenum electrodes.
Further, graphite sheets are filled between the cubic lanthanum hexaboride long block and the molybdenum electrode.
Further, the cubic lanthanum hexaboride long blocks are separated by a boron nitride insulator.
Furthermore, the molybdenum electrode is hollow and is of a half-opening block structure, and the molybdenum electrode is provided with a hole 1 penetrating up and down.
Further, the boron nitride insulator comprises a partition portion and a connecting portion, a penetrating hole 2 is formed in the connecting portion corresponding to the molybdenum electrode hole 1, and the partition portion is of an insulating sheet-shaped structure fixed on the connecting portion.
The preparation method of the lanthanum hexaboride hot cathode structure comprises the following steps:
S1, manufacturing a molybdenum electrode according to the structure;
S2, manufacturing a graphite sheet and placing the graphite sheet between the cubic lanthanum hexaboride long block and the molybdenum electrode; the graphite flake has the functions of conductivity and limit.
S3, assembling: the molybdenum screw passes through the molybdenum electrode to fix the positions of the graphite sheet, lanthanum hexaboride and the insulating piece. The insulating sheet has the functions of isolation and insulation and also has the limiting function, so that the displacement of two connected long cubic lanthanum hexaboride blocks caused by mechanical vibration is avoided.
Further, the fixing operation in the step S3 is specifically to fix the lanthanum hexaboride hot cathode structure through the hole 1 on the molybdenum electrode and the hole 2 on the connecting part by using a molybdenum screw, and the partition part is positioned between the lanthanum hexaboride long blocks.
The invention has the beneficial effects that:
1. According to the direct heating lanthanum hexaboride hot cathode structure, current passes through the first lanthanum hexaboride block, passes through the graphite sheet to the electrode of molybdenum, and passes through the second lanthanum hexaboride block, so on, and the current passes through all the lanthanum hexaboride blocks in a series connection mode, so that the structure has high resistance, and the thermal efficiency is remarkably improved. The structure body has compact space structure and high electron generation rate in unit space, and effectively improves electron density.
2. The lanthanum hexaboride block achieves 180-degree turning through the molybdenum electrode, the problem that lanthanum hexaboride breaks at the turning is avoided, and the device is stable in structure and good in conducting effect.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a schematic diagram of the hollow structure assembly of the molybdenum electrode of the present invention;
fig. 3 is an exploded view of the structure of the assembly mode 2 of the present invention.
In the figure: 1 molybdenum electrode, 2 graphite sheet, 3 boron nitride insulating sheet, 4 lanthanum hexaboride, 5 molybdenum screw, 6 molybdenum nut.
Detailed Description
The present application is further illustrated below in conjunction with specific embodiments, it being understood that these embodiments are meant to be illustrative of the application only and not limiting the scope of the application, as modifications of various equivalents of the application will occur to persons skilled in the art upon reading the application, which is defined by the appended claims.
As shown in fig. 1-2, four cubic lanthanum hexaboride long blocks with the length of 55mm, the width of 4mm and the thickness of 1.5mm are taken and are connected in series through molybdenum electrodes, the outer ends of the cubic lanthanum hexaboride long blocks at the head and the tail are also connected with molybdenum electrodes, the molybdenum electrodes are hollow and have a half-opening block structure, and holes 1 penetrating up and down are formed in the molybdenum electrodes.
The assembly method comprises the following steps:
The boron nitride insulating sheet is provided with a penetrating hole 2 at a position corresponding to the molybdenum electrode hole 1. The method comprises the steps that graphite sheets are placed in a molybdenum electrode hollow structure, a boron nitride insulating piece comprises a partition part and a connecting part, a penetrating hole 2 is formed in the connecting part corresponding to a molybdenum electrode hole 1, the partition part is of an insulating sheet-shaped structure fixed on the connecting part, 4 cubic lanthanum hexaboride long blocks are inserted into the molybdenum electrode hollow structure, the partition part just separates the cubic lanthanum hexaboride long blocks from each other, a molybdenum screw is used for fixing the lanthanum hexaboride hot cathode structure through the hole 1 on the molybdenum electrode and the hole 2 on the connecting part, namely, except for the end face of the molybdenum electrode and the cubic lanthanum hexaboride long blocks, the end face of the molybdenum electrode is separated by the connecting part of the boron nitride insulating piece, and the other molybdenum electrodes and the cubic lanthanum hexaboride long blocks are separated by the graphite sheets. The exploded view of the part is shown in figure 3.
Four cubic lanthanum hexaboride electrodes are connected in series through molybdenum electrodes, so that the effect of increasing structural resistance is achieved, and experiments show that the heating power is 875w when the heating current is 125A and the heating voltage is 7V, and the temperature of 1500 ℃ required by generating plasma can be reached. The existing hot cathode structure of the device is disc-shaped lanthanum hexaboride, and the experiment shows that the heating current of the tungsten filament is 180A, the heating voltage is 10V, namely the power is 1800w, so that the lanthanum hexaboride can reach the target temperature of 1500 ℃. Direct current heating required by the direct heating lanthanum hexaboride hot cathode is beneficial to reducing the power consumption of the direct heating lanthanum hexaboride hot cathode and prolonging the service life of equipment. The technical scheme of the invention can also be applied to the situation that 2 lanthanum hexaboride long blocks with even numbers, 6 lanthanum hexaboride long blocks and the like are arranged side by side.
Finally, it is noted that the above-mentioned preferred embodiments are only intended to illustrate rather than limit the invention, and that, although the invention has been described in detail by means of the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention as defined by the appended claims.
Claims (8)
1. The direct heating lanthanum hexaboride hot cathode structure is characterized by comprising a plurality of cubic lanthanum hexaboride long blocks, wherein the cubic lanthanum hexaboride long blocks are sequentially connected in series through molybdenum electrodes, the cubic lanthanum hexaboride long blocks are even blocks, and are distributed in a parallel mode in a plane.
2. The lanthanum hexaboride hot cathode structure of claim 1, wherein the outer ends of the end-to-end cubic lanthanum hexaboride long blocks are also connected with molybdenum electrodes.
3. The lanthanum hexaboride hot cathode structure of claim 1, wherein a graphite sheet is filled between the cubic lanthanum hexaboride long block and a molybdenum electrode.
4. The lanthanum hexaboride hot cathode structure of claim 1, wherein the elongated cubic lanthanum hexaboride blocks are separated by a boron nitride insulator.
5. The lanthanum hexaboride hot cathode structure according to claim 1, wherein the molybdenum electrode is hollow and has a semi-open block structure, and the molybdenum electrode is provided with holes 1 penetrating from top to bottom.
6. The lanthanum hexaboride hot cathode structure according to claim 1, wherein the boron nitride insulator comprises a partition portion and a connecting portion, the connecting portion is provided with a through hole 2 corresponding to the molybdenum electrode hole 1, and the partition portion is an insulating sheet structure fixed on the connecting portion.
7. The preparation method of the lanthanum hexaboride hot cathode structure is characterized by comprising the following steps of:
S1, manufacturing a molybdenum electrode according to the structure;
s2, manufacturing a graphite sheet and placing the graphite sheet between the cubic lanthanum hexaboride long block and the molybdenum electrode;
s3, assembling: the molybdenum screw passes through the molybdenum electrode to fix the positions of the graphite sheet, the lanthanum hexaboride long block and the boron nitride insulating piece.
8. The method of manufacturing a lanthanum hexaboride hot cathode structure according to claim 7, wherein the fixing in step S3 is performed by fixing the lanthanum hexaboride hot cathode structure through the hole 1 on the molybdenum electrode and the hole 2 on the connecting portion with a molybdenum screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410084068.6A CN117912916A (en) | 2024-01-19 | 2024-01-19 | Direct heating lanthanum hexaboride hot cathode structure and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410084068.6A CN117912916A (en) | 2024-01-19 | 2024-01-19 | Direct heating lanthanum hexaboride hot cathode structure and manufacturing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117912916A true CN117912916A (en) | 2024-04-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410084068.6A Pending CN117912916A (en) | 2024-01-19 | 2024-01-19 | Direct heating lanthanum hexaboride hot cathode structure and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117912916A (en) |
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- 2024-01-19 CN CN202410084068.6A patent/CN117912916A/en active Pending
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