CN114727467B - Combined direct-heating lanthanum hexaboride plasma source - Google Patents
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- CN114727467B CN114727467B CN202210385801.9A CN202210385801A CN114727467B CN 114727467 B CN114727467 B CN 114727467B CN 202210385801 A CN202210385801 A CN 202210385801A CN 114727467 B CN114727467 B CN 114727467B
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- H05H1/00—Generating plasma; Handling plasma
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Abstract
The invention discloses a combined direct-heating lanthanum hexaboride plasma source, which comprises a lanthanum hexaboride emitter formed by modularization, wherein the lanthanum hexaboride emitter is connected end to end by a conductive electrode; a heat reflection and heat insulation backboard formed by a multi-layer composite structure is arranged below the emitter, and the periphery of the heat reflection and heat insulation backboard is surrounded by heat reflection and heat insulation side boards; the flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; and the heat insulation support frame is arranged below the back plate and is used for integrally mounting the plasma source. The invention has the advantages of simple structure, easy processing, high heating efficiency, long service life and capability of generating a large-range plasma environment.
Description
Technical Field
The invention relates to the technical field of hot cathodes, in particular to a combined direct-heating lanthanum hexaboride plasma source.
Background
The hot cathode plasma source can relatively stably emit electrons to generate uniform plasma, and is widely used in various fields.
At the end of the nineteenth century, edison found that the metal, when heated to a sufficient temperature, emitted electrons, the earliest hot cathode. Early hot cathodes used metals such as thorium, and later it was found that some alkaline earth oxides also emitted electrons and had higher electron emissivity. Oxide cathode sources, most typically barium oxide cathode sources, have been developed. However, such oxide plasma sources are susceptible to poisoning and have a short electron emission lifetime. In the fifties of the last century, the american scholars Lafferty found that compounds of some metals also had the ability to emit electrons, such as lanthanum hexaboride. The metal compound has a stable crystal structure, is not easy to carry out poisoning reaction with air, and has extremely high electron emissivity. This makes it an ideal choice at high current densities. Such materials are commonly used as hollow cathodes for the investigation of plasma surface interactions.
The large area of the plasma source can create a large-scale plasma environment, which is a necessary condition for many plasma experiments. However, the sizes of the common lanthanum hexaboride plasma sources are smaller and generally smaller than 1cm so far, and large-area lanthanum hexaboride cathode sources are not realized in China. Only very few foreign institutions, such as the university of california in the united states, los angeles division, developed relatively large lanthanum hexaboride plasma sources, which can reach 10cm in size. However, the lanthanum hexaboride cathode source is indirectly heated and requires a relatively high thermal power to reach the operating temperature of lanthanum hexaboride.
In order to achieve relatively high heating efficiency, a combined direct heating lanthanum hexaboride plasma source is designed. The invention has simple structure and easy realization, and can be used for generating plasmas with large range and high ionization.
Disclosure of Invention
In order to overcome the defects of small size, serious heat loss and low heating efficiency of the conventional lanthanum hexaboride cathode source, and realize a long-service-life large-size plasma environment with a relatively simple modularized structure and relatively low cost, the invention provides a large-area separation heating type lanthanum hexaboride plasma source.
In order to solve the problems, the invention realizes the design target and adopts the following scheme:
a combined direct heating lanthanum hexaboride plasma source, comprising a lanthanum hexaboride emitter; the lanthanum hexaboride emitter comprises a plurality of lanthanum hexaboride modules which are connected end to end by conductive electrodes; a heat reflection and heat insulation backboard formed by a multi-layer composite structure is arranged below the emitter, and the periphery of the emitter is surrounded by a heat reflection side board and a heat insulation side board; the flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; and a heat insulation support column is arranged below the backboard.
Preferably, the thermally insulated support columns are for integral installation of the plasma source.
In one embodiment of the invention, a combined direct heating lanthanum hexaboride plasma source comprises five major parts of a lanthanum hexaboride emitter, a conductive electrode, a side plate, a back plate and a support frame. The lanthanum hexaboride emitter is formed by parallelly placing a plurality of cylindrical lanthanum hexaboride modules with diameters of 5-10 mm in the same plane; the conductive electrode consists of an electrode pressing block, an electrode pressing block terminal and an electrode insulation base, wherein the base and the pressing block are provided with semicircular grooves with diameters larger than those of the lanthanum hexaboride module, the lanthanum hexaboride module is pressed up and down, clamped and fixed, the direct current power supply is connected through the electrode pressing block terminal, and a large current is supplied to the lanthanum hexaboride emitter, so that the lanthanum hexaboride emitter is heated by utilizing Joule heat; the side plates and the back plate both comprise a heat reflection layer and a heat insulation layer, so that heat loss is reduced, heating efficiency is improved, and the working temperature of the lanthanum hexaboride emitter is reached with smaller heating power; the support frame is formed by connecting an additional insulating cushion block between the heat-insulating support column and the backboard through bolts.
The combined direct-heating lanthanum hexaboride plasma source is characterized in that cylindrical lanthanum hexaboride modules are placed in an electrode insulation base in parallel, electrode press blocks or electrode press block terminals are connected at two ends of the cylindrical lanthanum hexaboride modules respectively, each electrode press block is connected with two lanthanum hexaboride modules, each electrode press block terminal is connected with one lanthanum hexaboride module, the lanthanum hexaboride modules are connected end to form an S-shaped structure, and the two ends of each lanthanum hexaboride module are led out from the electrode press block terminals.
The electrode insulation base and the connecting bolt of the electrode insulation base and the backboard are made of alumina ceramics.
The electrode pressing block and the electrode pressing block terminal are made of high-purity graphite, and are provided with through holes for being connected and fixed with the electrode insulation base.
The combined direct-heating lanthanum hexaboride plasma is characterized in that graphite paper is filled between a lanthanum hexaboride emitter and a conductive electrode to ensure good electrical connection of the lanthanum hexaboride emitter and the conductive electrode and reduce contact resistance; the graphite paper has good conductivity which is the same as that of the electrode material, and can avoid the pollution of the emitter by adopting the metal filler such as tantalum to react with lanthanum hexaboride at high temperature.
The side plate is of an L-shaped structure, the heat-insulating side plate is made of graphite, the heat conduction coefficient is low at high temperature, the heat-insulating effect is good, the lower opening is fixed with the back plate, the heat-reflecting side plate is of a rectangular sheet-shaped structure, the heat-reflecting side plate is made of metal molybdenum, the heat-reflecting side plate has high heat reflectivity at high temperature, and the four-corner opening is fixed on the outer side of the heat-reflecting side plate.
The back plate is five layers in total, the first layer is an emitter support back plate and is made of graphite, and the back plate is used for insulating heat and fixing the lanthanum hexaboride emitter, the conductive electrode and the side plate; the second layer is a reflective backboard, and the material is molybdenum; the third layer and the fourth layer are heat-insulating backboard, and the material is graphite; the fifth layer is a connecting backboard, is made of 304 stainless steel, and is used for heat reflection and is connected with the supporting frame.
Five layers of the back plate are square sheet structures, four corners of the back plate are provided with through holes, bolts are used for penetrating and fixing, aluminum oxide ceramic flat gaskets are additionally arranged between the layers to separate the layers, and heat loss caused by heat conduction is reduced.
The emitter supports the backplate, and two rows of through holes for fixing the insulating base of electrode are offered at the middle part, and one is the round hole, and one is the waist type hole. When the cylindrical lanthanum hexaboride module works at high temperature, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, so that damage to the lanthanum hexaboride emitter caused by high-temperature heated expansion is avoided.
The heat insulation support column is made of 304 stainless steel and is provided with a large number of small holes so as to reduce heat loss caused by heat conduction.
The insulating cushion block is alumina ceramic, so that the electric insulation between the insulating support column and the backboard is ensured.
In order to realize modular design, each lanthanum hexaboride module and each conductive electrode have the same structure, the size and the number of emitters can be adjusted according to the requirements of a cathode source, and the combined direct-heating lanthanum hexaboride plasma source is expanded to a larger area.
The innovation points and advantages of the invention are as follows:
(1) The invention uses the direct heating type as the heating mode of the large-size lanthanum hexaboride plasma source, and greatly improves the heating efficiency by matching with the heat reflection and heat insulation means.
(2) The lanthanum hexaboride emitter used in the invention is of modularized combinable design, and the size of the cathode source can be adjusted according to the use requirement.
(3) The invention can generate initial electrons with large area and high current density, and realize a large-size and high-ionization plasma environment.
Drawings
Fig. 1 is a top view of the device of the present invention.
Fig. 2 is a side view of the device of the present invention.
Fig. 3 is a cross-sectional view of the device of the present invention.
Fig. 4 is a plot of lanthanum hexaboride emitter temperature as a function of heating power.
In the figure, a lanthanum hexaboride module 111, an electrode press block 121, an electrode press block terminal 122, an electrode insulation base 123, a long heat insulation side plate 131, a long heat reflection side plate 132, a short heat insulation side plate 133, a short heat reflection side plate 134, a 141 emitter support back plate 142, a reflection back plate 143, a heat insulation back plate 144, a back plate 151, a heat insulation support column 151 and a 152 insulation cushion block are connected.
Detailed Description
For further clarity in describing the objects, technical solutions and advantages of the present invention, the present invention will be described in further detail with reference to the accompanying drawings. The exemplary embodiments of the present invention and the descriptions thereof are only for explaining the present invention and are not limiting the present invention.
As shown in fig. 1-3, a combined direct heating lanthanum hexaboride plasma source comprises five major parts of a lanthanum hexaboride emitter, a conductive electrode, a side plate, a back plate and a support frame. The lanthanum hexaboride emitter includes a lanthanum hexaboride module 111. The conductive electrode includes an electrode press 121, an electrode press terminal 122, and an electrode insulation base 123. The side panels include a long thermally insulating side panel 131, a long thermally reflective side panel 132, a short thermally insulating side panel 133 and a short thermally reflective side panel 134. The back plate includes an emitter support back plate 141, a reflective back plate 142, a thermally insulating back plate 143 and a connection back plate 144. The support frame includes insulating support columns 151 and insulating spacers 152.
The lanthanum hexaboride emitter adopted by the invention is of modularized combinable design and is formed by arranging 10 cylindrical lanthanum hexaboride modules 111 with the diameter of 0.5cm and the length of 10cm in parallel. The electrode press block 121, the electrode press block terminal 122 and the electrode insulation base 123 are each provided with a semicircular groove with a diameter of 0.55 cm. The electrode insulation base 123 made of ceramics is fixed on the emitter support back plate 141 by adopting ceramic bolts, and two rows of through holes for fixing the electrode insulation base are formed in the middle of the emitter support back plate 141, one row is a round hole, and the other row is a waist-shaped hole. When the cylindrical lanthanum hexaboride module works at high temperature, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, so that damage to the lanthanum hexaboride emitter caused by high-temperature heated expansion is avoided. The lanthanum hexaboride module 111 is placed in a groove of the electrode insulation base 123, an electrode press block 121 and an electrode press block terminal 122 are covered above the lanthanum hexaboride module 111, gaps in the groove are filled with graphite paper, the electrode press block 121 and the electrode press block terminal 122 are fixedly pressed with the electrode insulation base 123 by bolts, and good electrical connection between the lanthanum hexaboride module and the electrode press block 121 and the electrode press block terminal 122 made of graphite is ensured. Each electrode press block is connected with two lanthanum hexaboride modules, the lanthanum hexaboride modules are connected end to form an S-shaped structure, and two ends of the S-shaped structure are led out from the electrode press block terminals 122. The lanthanum hexaboride module 111 is connected end to end through the conductive electrode to form an S-shaped conductive path, and the end to end ends of the S-shaped conductive path are connected out through two electrode press block terminals 122 and are used for connecting a direct current power supply, and the lanthanum hexaboride emitter is directly connected and heated by high current.
The invention adopts a reflection and heat insulation mode to reduce the heat loss of the part except the lanthanum hexaboride emitter and reduce the required heating power. The long heat-insulating side plate 131 and the short heat-insulating side plate 133 are made of graphite, are L-shaped, are fixed around the lanthanum hexaboride emitter by bolts, the short heat-insulating side plate 133 is fixed on one side of the electrode press block terminal 122, and the long heat-insulating side plate 131 is arranged on the other three sides. The heat reflection side plate is made of metal molybdenum, the long heat reflection side plate 132 is installed on the periphery of the long heat insulation side plate 131 through four corners of bolt fixing, and the short heat reflection side plate 134 is installed on the short heat insulation side plate 133 through four corners of bolt fixing. The back of the emitter has a larger radiation area and occupies a higher specific gravity of heat loss, and the device is provided with five layers of back plates which have higher efficient heat reflection and heat insulation effects. Five layers of back plates are arranged below the emitter. A first layer of emitter support back plate 141, a second layer of reflective back plate 142, third and fourth layers of insulating back plates 143, and a fifth layer of connection back plate 144 are provided in this order from the back of the lanthanum hexaboride emitter. The five-layer backboard comprises a first layer of emitter support backboard 141 which is made of graphite and plays a role in heat insulation; a reflective back plate 142 of a second layer, made of metallic molybdenum, having a high thermal reflectivity at high temperatures; third and fourth layers of insulating back plates 143 made of graphite; the fifth connecting backboard 144 is a stainless steel plate, mainly plays a role in supporting and fixing and has a certain heat reflection effect; the five layers of plates are provided with through holes at the same positions of four corners and are fixed by bolts, and aluminum oxide ceramic gaskets with the thickness of 1mm are filled between the layers, so that the spacing between the layers is ensured, and the heat loss caused by heat conduction is reduced. The heat insulation support column 151 is made of 304 stainless steel, is connected with the connecting backboard 144 by bolts through an insulating cushion block 152 made of alumina ceramic, and is provided with 10 rows and 23 columns, and 230 small holes with the diameter of 2mm are formed, so that heat conduction is reduced.
In this embodiment, the total size of the array of lanthanum hexaboride emitters is about 10cm×10cm, and the lanthanum hexaboride modules 111 are arranged on the same plane at equal intervals in parallel to ensure uniformity of plasma generated by emitted electrons, and meanwhile, to ensure heating efficiency, the distance between the lanthanum hexaboride modules 111 is the same as the module diameter. According to the working requirement of the lanthanum hexaboride plasma source, the combined direct-heating lanthanum hexaboride plasma source is arranged in a vacuum chamber through a heat insulation support column 151 by bolts, and background vacuum is pumped to 1 multiplied by 10 -4 Pa, the positive electrode and the negative electrode of a direct current power supply are respectively connected to two electrode press block terminals 122 by copper braiding through a vacuum electrode, and are fixed by bolts, and a large current is introduced to heat the lanthanum hexaboride emitter to more than 1600K, so that thermionic emission is realized; by introducing working gas, helium, argon, etc. at a suitable pressure, this example employs 5X 10 -2 Pa argon; the external additional field coil produces a background magnetic field perpendicular to the lanthanum hexaboride emitter surface, this example background magnetic field of 30Gauss; an anode parallel to the lanthanum hexaboride emitter is installed in the vacuum chamber and is a metal grid, and the embodiment adopts a stainless steel gridThe vacuum electrode is connected with one electrode press block terminal 122 through copper braided wire, the positive electrode is connected with the vacuum wall, an electric field is generated between the lanthanum hexaboride emitter and the positive electrode, electrons are pulled out, gas is ionized, and plasma is generated.
As shown in the relation between the temperature and the heating power in FIG. 4, the invention uses the direct heating type as the heating mode of the large-size lanthanum hexaboride plasma source, and the heating efficiency is greatly improved by combining the heat reflection and the heat insulation means, when the power is 3000W, the temperature of the lanthanum hexaboride reaches 1600K, namely the temperature required by the lanthanum hexaboride to emit electrons is reached, and the heating power per unit area is only 60W/cm < 2 >; at the moment, a discharge power supply can be started, 50V bias voltage is added, and the lanthanum hexaboride emitter is electrically activated; the heating power is continuously increased, the temperature is rapidly increased under the auxiliary heating effect of the discharge current, the power reaches 1800K when 4000W, the discharge current reaches 100A, the electron emission capacity per unit area is 2A/cm < 2 >, the initial electrons with large area and high current density can be generated, and the large-size and high-ionization plasma environment is realized.
Furthermore, the above embodiments can be modeled using lanthanum hexaboride emitters that are modular and combinable, with the cathode source being sized according to the needs of the application. For example, 10 lanthanum hexaboride modules having a diameter of 1cm and a length of 20cm were fabricated, and a lanthanum hexaboride plasma source having a size of 20cm×20cm was constructed.
The foregoing embodiments have been provided for the purpose of illustrating the invention in further detail, and are to be understood that the foregoing embodiments are merely illustrative of the invention and are not to be construed as limiting the scope of the invention, and the invention is intended to be covered by the following claims, by way of example only, and by way of example only, and not limitation.
Claims (8)
1. A combination direct heating lanthanum hexaboride plasma source, characterized by: comprising a lanthanum hexaboride emitter; the lanthanum hexaboride emitter comprises a plurality of lanthanum hexaboride modules which are connected end to end by conductive electrodes; a heat reflection and heat insulation backboard formed by a multi-layer composite structure is arranged below the lanthanum hexaboride emitter, and the periphery of the emitter is surrounded by a heat reflection side board and a heat insulation side board; the flexible graphite paper is filled between the conductive electrode and the lanthanum hexaboride module for conduction, and lanthanum hexaboride is directly heated; a heat-insulating support column is arranged below the heat reflection and heat-insulating backboard; the conductive electrode consists of an electrode pressing block, an electrode pressing block terminal and an electrode insulation base, wherein the electrode insulation base and the electrode pressing block are provided with semicircular grooves with diameters larger than that of the lanthanum hexaboride module, and the semicircular grooves are pressed up and down to clamp and fix the lanthanum hexaboride module.
2. The plasma source of claim 1, wherein: the lanthanum hexaboride emitter is formed by parallelly placing a plurality of lanthanum hexaboride modules in the same plane.
3. The plasma source of claim 2, wherein: each electrode press block is connected with two lanthanum hexaboride modules, the lanthanum hexaboride modules are connected end to form an S-shaped structure, and two ends of the S-shaped structure are led out from the electrode press block terminals.
4. The plasma source of claim 1, wherein: the heat reflection side plate is made of metal molybdenum; the heat-insulating side plate is made of graphite.
5. The plasma source of claim 1, wherein: the heat reflection and heat insulation backboard comprises five layers, wherein the first layer is an emitter support backboard, is made of graphite and is used for heat insulation and fixing of lanthanum hexaboride emitters, conductive electrodes and side plates; the second layer is a reflective backboard, and the material is molybdenum; the third layer and the fourth layer are heat-insulating backboard, and the materials are graphite; the fifth layer is a connecting backboard, is made of 304 stainless steel, and is used for heat reflection and is connected with the supporting frame.
6. The plasma source of claim 5, wherein: five layers of the back plate are square sheet structures, four corners are provided with through holes, bolts are used for penetrating and fixing, aluminum oxide ceramic flat gaskets are additionally arranged between the layers to separate the layers, and heat loss caused by heat conduction is reduced.
7. The plasma source of claim 5, wherein: the emitter supports the backboard, two rows of through holes for fixing the electrode insulation base are formed in the middle of the emitter support backboard, one row of through holes are round holes, and the other row of through holes are waist-shaped holes; when the cylindrical lanthanum hexaboride module works, the cylindrical lanthanum hexaboride module can drive the conductive electrode to slide and stretch in the length direction, so that damage to the lanthanum hexaboride module caused by thermal expansion due to rigid connection of two ends is avoided.
8. The plasma source of claim 1, wherein: the heat insulation support columns are made of 304 stainless steel and are provided with a plurality of holes so as to reduce heat loss caused by heat conduction, and the heat insulation support columns are connected with the backboard in an insulating way through aluminum oxide ceramic cushion blocks.
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