CN117908247A - Mixed magnetic resistance direct-drive precise deflection mirror and method - Google Patents
Mixed magnetic resistance direct-drive precise deflection mirror and method Download PDFInfo
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- CN117908247A CN117908247A CN202410077037.8A CN202410077037A CN117908247A CN 117908247 A CN117908247 A CN 117908247A CN 202410077037 A CN202410077037 A CN 202410077037A CN 117908247 A CN117908247 A CN 117908247A
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Abstract
The invention provides a mixed magnetic resistance direct-drive precise deflection mirror and a method thereof, which relate to the field of precise light path modulation, aim at the problem that the coupling between shafts of the prior precise deflection mirror seriously affects the adjustment precision, arrange a nested structure of an inner frame and an outer frame, respectively connect armatures of a driving assembly through connecting arms, respectively drive the actions of the inner frame and the outer frame by the driving assembly, improve the driving stroke and the response efficiency by utilizing a mixed magnetic resistance driving piece, realize the series connection of deflection actions in different directions, weaken the coupling problem between shafts, improve the adjustment precision and meet the adjustment requirement of the precise deflection mirror.
Description
Technical Field
The invention relates to the field of precise light path modulation, in particular to a mixed magnetic resistance direct-drive precise deflection mirror and a method.
Background
The precise deflection mirror is a key execution component in the field of light path modulation, and has important application value in the aspects of controlling light beams by optical mechanical devices, stabilizing the posture of a spacecraft, measuring micro angles and the like. In the prior art, the deflection mirror designed by adopting the flexible mechanism mostly adopts a mode of combining a voice coil motor with a hooke hinge to realize precise deflection movement, and the problem of coupling between shafts is serious due to the parallel mechanism characteristics.
The mixed magnetic resistance driver has the advantages of large electrode constant, quick response and large stroke. Although Maxwell force provided by the magnetic circuit has a large nonlinear characteristic, the nonlinear output characteristic of the driver can be greatly reduced by forming a permanent magnet loop through matching with a permanent magnet. However, the hybrid magnetic driver is generally used in a plane multi-axis motion and a fast knife servo mechanism, but when the conventional device using the hybrid magnetic driver is applied to a precision deflection mirror, the problem that the coupling between axes is serious due to parallel connection still exists, so that the precision deflection mirror is difficult to realize the required precision control.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention provides a hybrid magnetic resistance direct-drive precision deflection mirror and a method, wherein a nested structure of an inner frame and an outer frame is arranged, armatures of a driving assembly are respectively connected through connecting arms, the driving assembly respectively drives the inner frame and the outer frame to act, a hybrid magnetic resistance driving piece is utilized to improve the driving stroke and the response efficiency, the serial connection of deflection actions in different directions is realized, the inter-shaft coupling problem is weakened, the adjustment precision is improved, and the adjustment requirement of the precision deflection mirror is met.
The first aim of the invention is to provide a hybrid magnetic resistance direct-drive precision deflection mirror, which adopts the following scheme:
Comprising the following steps:
the frame assembly comprises an inner frame and an outer frame sleeved outside the inner frame, the deflection lens is arranged on the inner frame, the inner frame is connected with the outer frame through a first rotating shaft, and the outer frame is connected with the fixing plate through a second rotating shaft with an axis perpendicular to the first rotating shaft;
The driving assembly is a mixed magnetic resistance driving piece and is provided with a plurality of driving parts for accommodating armatures, and the driving assembly respectively drives the armatures to move in the vertical direction of the plane where the first rotating shaft axis and the second rotating shaft axis are positioned;
the connecting arms comprise an inner connecting arm and an outer connecting arm, and the inner frame is respectively connected with the corresponding armatures through two inner connecting arms on the opposite sides of the first rotating shaft; the outer frame is respectively connected with the corresponding armatures through two outer connecting arms at the opposite sides of the second rotating shaft.
Further, the driving assembly comprises a permanent magnet ring, a magnet yoke and a coil winding, wherein the magnet yoke is C-shaped, a driving part is formed at an opening of the C-shaped, the permanent magnet ring is a rectangular ring, the four magnet yokes are respectively and correspondingly distributed at four angular positions of the permanent magnet ring, the coil winding is wound on the magnet yoke, and one end of the armature extends into the driving part.
Further, the permanent magnet ring penetrates through the inside of the C-shaped magnetic yoke, and two groups of coil windings on the same magnetic yoke are arranged on two sides of the permanent magnet ring.
Further, the first rotating shaft and the second rotating shaft are flexible pivots, the two sides of the axis of the first rotating shaft are respectively provided with the second rotating shaft, the two sides of the axis of the second rotating shaft are respectively provided with the first rotating shaft, and the axis of the first rotating shaft and the axis of the second rotating shaft are coplanar and orthogonal.
Further, the two outer connecting arms connected to the outer frame are symmetrically arranged with respect to the second rotation axis, and the two inner connecting arms connected to the inner frame are symmetrically arranged with respect to the first rotation axis.
Further, the inner connecting arm and the outer connecting arm are respectively connected with a displacement sensor, and the inner connecting arm spans the outer frame to connect with the armature in the driving part;
the inner frame is provided with a containing groove, and the deflection lens is arranged in the containing groove and enables the working surface of the deflection lens to be parallel to the plane where the first rotating shaft axis and the second rotating shaft axis are located.
Further, still include the base, fixed plate, drive assembly install respectively in the base, are equipped with the mounting panel that is located outside the frame on the base, and displacement sensor installs in the mounting panel.
Further, the armature connected with the inner connecting arm is a rod-shaped armature and penetrates into the driving part along the axial direction.
The second object of the present invention is to provide a working method of the hybrid detent force direct-drive precision deflection mirror according to the first object, comprising:
the driving assembly drives the armature to act as required, and the displacement is transmitted to the frame assembly through the inner connecting arm and the outer connecting arm;
The inner connecting arm is driven by the corresponding armature to drive the inner frame to rotate around the axis of the first rotating shaft to adjust the first inclination angle;
The outer connecting arm is driven by the corresponding armature to drive the outer frame to rotate around the axis of the second rotating shaft to adjust the second inclination angle;
The inner frame and the outer frame work together to change the inclination angle of the deflection lens.
Further, the driving part is a gap structure formed by the driving assembly, and keeps the armature separated from other components of the driving assembly.
Compared with the prior art, the invention has the advantages and positive effects that:
(1) The method aims at the problem that the coupling between shafts of the existing precise deflection mirror seriously affects the adjustment precision, a nested structure of an inner frame and an outer frame is arranged, armatures of a driving assembly are connected through connecting arms respectively, the driving assembly drives the inner frame and the outer frame to move respectively, the driving stroke and the response efficiency are improved by utilizing a mixed magnetic resistance driving piece, the series connection of deflection movements in different directions is realized, the coupling problem between shafts is weakened, the adjustment precision is improved, and the adjustment requirement of the precise deflection mirror is met.
(2) The series structure with the flexible pivot as the main part is adopted, the characteristics of large stroke and high motor constant of the hybrid magnetic resistance driving part are fully utilized, high-precision transmission with no friction and high resolution can be provided, and the adjustment requirement of a precision deflection mirror can be met by the large stroke of the hybrid magnetic resistance direct driving.
(3) The rod-shaped armature is used as a structure for driving the inner connecting arm, and when the outer frame rotates to drive the inner frame to deflect towards the second direction, the range of the driving force born by the rod-shaped armature is kept unchanged in the driving part, so that the precision error caused by the range change of the driving force born by the plate-shaped armature is reduced, the problem of coupling between shafts is solved, and the control precision is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention.
Fig. 1 is an external schematic view of a hybrid detent force direct drive precision deflection mirror according to embodiments 1 and 2 of the present invention.
Fig. 2 is an exploded schematic view of the hybrid detent force direct-drive precision deflection mirror according to embodiments 1 and 2 of the present invention.
Fig. 3 is a schematic diagram of a hybrid detent force direct-drive precision deflection mirror with cover plate removed in embodiments 1 and 2 of the present invention.
Fig. 4 is a schematic view of a driving assembly connecting frame assembly in embodiments 1 and 2 of the present invention.
Fig. 5 is a schematic diagram of a frame assembly using a plate armature for an inner frame in embodiments 1 and 2 of the present invention.
Fig. 6 is a schematic diagram of a frame assembly using a rod armature for the inner frame in embodiments 1 and 2 of the present invention.
Fig. 7 is a schematic view of a driving assembly in embodiments 1 and 2 of the present invention.
Fig. 8 is a schematic view showing the internal structure of the driving assembly in embodiments 1 and 2 of the present invention.
Fig. 9 is a schematic view of an inner frame and a deflection lens in embodiments 1 and 2 of the present invention.
Fig. 10 is a schematic view of the base and the fixing plate in embodiments 1 and 2 of the present invention.
Fig. 11 is a schematic view of the upper mounting base in embodiments 1 and 2 of the present invention.
Fig. 12 is a schematic view of the lower mounting base in embodiments 1 and 2 of the present invention.
Fig. 13 is a schematic view of the cover plate in examples 1 and 2 of the present invention.
The device comprises a driving assembly 1, a fastening piece 3, a deflection lens 4, an inner frame 5, an outer frame 6, a grating sensor 7, a flexible pivot 8, a permanent magnet ring 9, a base 10, a cover plate 11, a rubber plug 101, a coil winding 102, a magnetic yoke 103, an armature 104, an upper mounting seat 105, a lower mounting seat 401, an inner connecting arm 501, an outer connecting arm 901 and a mounting plate 902.
Detailed Description
Example 1
In an exemplary embodiment of the present invention, a hybrid detent force direct drive precision deflection mirror is provided as shown in FIGS. 1-13.
The mixed magnetic resistance direct-drive precision deflection mirror is described in detail with reference to the accompanying drawings.
As shown in fig. 1 and 2, the hybrid magnetic resistance direct-drive precision deflection mirror mainly comprises a frame assembly, a driving assembly 1 and a connecting arm, wherein the frame assembly comprises an inner frame 4 and an outer frame 5, the inner frame 4 is connected with the outer frame 5 through a first rotating shaft, and the outer frame 5 is connected with a fixing plate 902 through a second rotating shaft, so that the inner frame 4 and the outer frame 5 can drive a deflection lens 3 on the inner frame 4 to realize deflection action; the driving component 1 can drive the inner frame 4 and the outer frame 5 to act respectively through the connecting arms, so that the required adjusting angle is achieved.
Specifically, the frame assembly comprises an inner frame 4 and an outer frame 5 sleeved outside the inner frame 4, the deflection lenses 3 are arranged in the inner frame 4 and move along with the inner frame 4, the inner frame 4 is connected with the outer frame 5 through a first rotating shaft, so that the inner frame 4 can rotate around the axis of the first rotating shaft, and the inclination angle of the deflection lenses 3in the first deflection direction is adjusted; the outer frame 5 is connected with the fixing plate 902 through the second rotating shaft, and the axes of the first rotating shaft and the second rotating shaft are perpendicular, so that the outer frame 5 can drive the inner frame 4 and the deflection lens 3 to rotate around the axis of the second rotating shaft, and the inclination angle of the deflection lens 3in the second deflection direction is adjusted.
As shown in fig. 5 and 6, the inner frame 4 and the outer frame 5 are respectively provided with an opening for installing the rotating shaft, the first opposite side of the center position of the inner frame 4 is provided with an opening for installing one end of the first rotating shaft, and the first opposite side of the center position of the outer frame 5 is also provided with an opening for installing the other end of the first rotating shaft; the second opposite side of the central position of the outer frame 5 is provided with an opening for installing one end of a second rotating shaft, the outer side of the frame assembly is provided with a fixing plate 902, and the other end of the second rotating shaft is installed on the fixing plate 902 to support the frame assembly.
In this embodiment, the first rotating shaft and the second rotating shaft are flexible pivots 7, two sides of the axis of the first rotating shaft are respectively provided with the second rotating shafts, the axes of the two second rotating shafts are collinear, and two sides of the outer frame 5 are respectively connected with a fixing plate 902, as shown in fig. 10, so as to realize support; the two sides of the axis of the second rotating shaft are respectively provided with a first rotating shaft, the axes of the two first rotating shafts are collinear, the two sides of the inner frame 4 are respectively connected with the outer frame 5, and the axes of the first rotating shaft and the axis of the second rotating shaft are coplanar and orthogonal, so that the rotating shafts form a flexible cross pivot.
As shown in fig. 9 and 10, the inner frame 4 is provided with a receiving groove, and the deflection lens 3 is arranged in the receiving groove, so that the working surface of the deflection lens 3 is parallel to the plane where the first rotating shaft axis and the second rotating shaft axis are located. In addition, a rubber plug 11 can be inserted between the deflection lens 3 and the accommodating groove to keep the deflection lens 3 stable.
As shown in fig. 3, 4, 7 and 8, the driving assembly 1 is a hybrid reluctance driving member, and is provided with a plurality of driving parts for accommodating the armatures 103, and the driving assembly 1 respectively drives the armatures 103 to move in the vertical direction of the plane of the first rotating shaft axis and the second rotating shaft axis.
The driving assembly 1 comprises a permanent magnet ring 8, a magnet yoke 102 and a coil winding 101, wherein the magnet yoke 102 is of a C shape and forms a driving part at an opening of the C shape, the permanent magnet ring 8 is of a rectangular ring, the four magnet yokes 102 are respectively and correspondingly distributed at four corner positions of the permanent magnet ring 8, the coil winding 101 is wound on the magnet yoke 102, and one end of an armature 103 extends into the driving part. The permanent magnet ring 8 passes through the inside of the C-shaped magnet yoke 102, and two groups of coil windings 101 on the same magnet yoke 102 are arranged on two sides of the permanent magnet ring 8.
As shown in fig. 7 and 8, the magnetic yoke 102 is C-shaped with an opening, one end of the armature 103 is disposed at the opening of the magnetic yoke 102, and the other end is used as an output end for driving the inner frame 4 and the outer frame 5 to act, and a gap is left between the armature 103 and the magnetic yoke 102 to avoid the armature 103 from directly contacting the magnetic yoke 102.
In this embodiment, the permanent magnet ring 8 is a rectangular ring and is chamfered at its angular position to form a short side at the angular position, and the short side is placed inside the C-shape of the yoke 102 and perpendicular to the vertical direction of the yoke 102. As shown in fig. 11 and 12, the outside of the yoke 102 is covered with a mounting seat, the upper mounting seat 104 is covered above the corresponding permanent magnet ring 8, the lower mounting seat 105 is covered below the corresponding permanent magnet ring 8, the upper mounting seat 104 and the lower mounting seat 105 are matched, and meanwhile, the whole driving assembly 1 is arranged on the base 9 through the lower mounting seat 105 arranged on the base 9.
In this embodiment, the permanent magnet ring 8, the yoke 102, and the coil winding 101 cooperate to linearly drive the armature 103 positioned in the opening of the C-shaped yoke 102, and output a desired adjustment operation.
The outer frame 5 and the inner frame 4 are both square frame structures in a shape of a circle, and in order to match the structures, four driving parts arranged in the embodiment are uniformly distributed around the vertical axis of the inner frame 4 in the circumferential direction, so that the corresponding outer frame 5 and inner frame 4 can be driven to act from four positions.
As shown in fig. 5, the armature 103 may be an armature 103 of a plate structure. In this embodiment, as shown in fig. 6, the armatures 103 connected to the inner frame 4 correspondingly adopt rod armatures 103, and extend into the driving portion in the axial direction. The rod-shaped armature 103 is also adopted as a structure for driving the inner connecting arm 401, when the outer frame 5 rotates to drive the inner frame 4 to deflect in the second direction, the range of the driving force born by the rod-shaped armature 103 is kept unchanged in the driving part, and precision errors caused by the range change of the driving force born by the plate-shaped armature 103 are reduced, so that the problem of coupling between shafts is reduced, and the control precision is improved.
Since the inner frame 4 can be rotated independently of the outer frame 5, the outer frame 5 may be an armature 103 having a plate structure.
The series structure with the flexible pivot 7 as the main part is adopted, the characteristics of large stroke and high motor constant of the hybrid magnetic resistance driving part are fully utilized, high-precision transmission with no friction and high resolution can be provided, and the large stroke directly driven by the hybrid magnetic resistance can meet the adjustment requirement of the precision deflection mirror.
To establish the association of the frame assembly and the drive assembly 1, as shown in fig. 4, the connecting arms include an inner connecting arm 401 and an outer connecting arm 501, and the inner frame 4 is respectively connected to the corresponding armature 103 by two inner connecting arms 401 on opposite sides of the first rotation axis; the outer frame 5 is connected with the corresponding armature 103 through two outer connecting arms 501 at the opposite sides of the second rotating shaft.
The two outer connecting arms 501 connected to the outer frame 5 are symmetrically arranged with respect to the second rotation axis, and the two inner connecting arms 401 connected to the inner frame 4 are symmetrically arranged with respect to the first rotation axis, matching the inner frame 4 and the outer frame 5 of the loop structure so that both sides are symmetrically driven.
The inner connecting arm 401 and the outer connecting arm 501 are respectively connected with a displacement sensor, and the inner connecting arm 401 spans the outer frame 5 and is connected with the armature 103 in the driving part; the fixing plate 902 and the driving assembly 1 are respectively installed on the base 9, the base 9 is provided with an installation plate 901 positioned outside the outer frame 5, and the displacement sensor is installed on the installation plate 901.
The displacement sensor in this embodiment may adopt the grating sensor 6 to collect displacement information, and convert the displacement information into a yaw angle in a subsequent processing step, so as to meet the adjustment requirement.
As shown in fig. 1 and 13, the device further comprises a cover plate 10, the cover plate 10 is covered outside the driving assembly 1, the connecting arm and the frame assembly to protect the driving assembly, and the cover plate 10 is fixed on the base 9 through the fastener 2. Meanwhile, an opening is arranged at the central opening position of the cover plate 10 for transmitting the light rays of the deflection lens 3.
Example 2
In another exemplary embodiment of the present invention, as shown in fig. 1-13, a method for operating a hybrid detent force direct drive precision deflection mirror is provided.
The method for directly driving the precise deflection mirror by using the mixed detent force as in the embodiment 1 comprises the following steps:
The driving assembly 1 drives the armature 103 to act as required, and the displacement is transmitted to the frame assembly through the inner connecting arm 401 and the outer connecting arm 501;
The inner connecting arm 401 is driven by the corresponding armature 103 to drive the inner frame 4 to rotate around the first rotating shaft axis to adjust the first inclination angle;
the outer connecting arm 501 is driven by the corresponding armature 103 to drive the outer frame 5 to rotate around the axis of the second rotating shaft to adjust the second inclination angle;
The inner frame 4 and the outer frame 5 work together to change the inclination angle of the deflection lens 3.
The driving part is a gap structure formed by the driving assembly 1, and keeps the armature 103 separated from other components of the driving assembly 1.
The nested structure of the inner frame 4 and the outer frame 5 is arranged, the armature 103 of the driving assembly 1 is connected through the connecting arms, the driving assembly 1 drives the inner frame 4 and the outer frame 5 to move respectively, the driving stroke and the response efficiency are improved by utilizing the mixed magnetic resistance driving piece, the series connection of deflection movements in different directions is realized, the problem of coupling between shafts is weakened, the adjusting precision is improved, and the adjusting requirement of the precision deflection mirror is met.
The above description is only of the preferred embodiments of the present invention and is not intended to limit the present invention, but various modifications and variations can be made to the present invention by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The utility model provides a mix accurate beat mirror of detent force direct drive which characterized in that includes:
the frame assembly comprises an inner frame and an outer frame sleeved outside the inner frame, the deflection lens is arranged on the inner frame, the inner frame is connected with the outer frame through a first rotating shaft, and the outer frame is connected with the fixing plate through a second rotating shaft with an axis perpendicular to the first rotating shaft;
The driving assembly is a mixed magnetic resistance driving piece and is provided with a plurality of driving parts for accommodating armatures, and the driving assembly respectively drives the armatures to move in the vertical direction of the plane where the first rotating shaft axis and the second rotating shaft axis are positioned;
the connecting arms comprise an inner connecting arm and an outer connecting arm, and the inner frame is respectively connected with the corresponding armatures through two inner connecting arms on the opposite sides of the first rotating shaft; the outer frame is respectively connected with the corresponding armatures through two outer connecting arms at the opposite sides of the second rotating shaft.
2. The hybrid detent force direct drive precision deflection mirror according to claim 1, wherein the driving assembly comprises a permanent magnet ring, a magnet yoke and a coil winding, the magnet yoke is of a C shape and forms a driving part at an opening of the C shape, the permanent magnet ring is of a rectangular ring, the four magnet yokes are respectively and correspondingly distributed at four angular positions of the permanent magnet ring, the coil winding is wound on the magnet yoke, and one end of the armature extends into the driving part.
3. The hybrid detent force direct drive precision deflection mirror according to claim 2, wherein the permanent magnet ring passes through the inside of a C-shaped magnetic yoke, and two groups of coil windings on the same magnetic yoke are arranged on both sides of the permanent magnet ring.
4. The hybrid detent force direct drive precision deflection mirror according to claim 1, wherein the first rotating shaft and the second rotating shaft are flexible pivots, the second rotating shafts are respectively arranged on two sides of the axis of the first rotating shaft, the first rotating shafts are respectively arranged on two sides of the axis of the second rotating shaft, and the axes of the first rotating shaft and the second rotating shaft are coplanar and orthogonal.
5. The hybrid drag direct drive precision deflection mirror of claim 4, wherein two outer connecting arms connected to the outer frame are symmetrically disposed about the second axis of rotation and two inner connecting arms connected to the inner frame are symmetrically disposed about the first axis of rotation.
6. The hybrid detent force direct drive precision deflection mirror according to claim 1, wherein the inner and outer connecting arms are respectively connected with a displacement sensor, and the inner connecting arm spans the armature in the outer frame connection driving part; the inner frame is provided with a containing groove, and the deflection lens is arranged in the containing groove and enables the working surface of the deflection lens to be parallel to the plane where the first rotating shaft axis and the second rotating shaft axis are located.
7. The hybrid detent force direct drive precision deflection mirror according to claim 6, further comprising a base, wherein the fixed plate and the driving assembly are respectively mounted on the base, the base is provided with a mounting plate positioned outside the outer frame, and the displacement sensor is mounted on the mounting plate.
8. The hybrid detent force direct drive precision deflection mirror of claim 1, wherein the armature to which the inner connecting arm is connected is a rod-shaped armature extending axially into the drive section.
9. A method of operating a hybrid detent force direct drive precision deflection mirror as claimed in any one of claims 1 to 8, comprising:
The driving assembly drives the armature to act as required, and the displacement is transmitted to the frame assembly through the inner connecting arm and the outer connecting arm; the inner connecting arm is driven by the corresponding armature to drive the inner frame to rotate around the axis of the first rotating shaft to adjust the first inclination angle;
The outer connecting arm is driven by the corresponding armature to drive the outer frame to rotate around the axis of the second rotating shaft to adjust the second inclination angle;
The inner frame and the outer frame work together to change the inclination angle of the deflection lens.
10. The method of claim 9, wherein the driving portion is a gap structure formed by the driving assembly, and the armature is kept separate from other components of the driving assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410077037.8A CN117908247A (en) | 2024-01-18 | 2024-01-18 | Mixed magnetic resistance direct-drive precise deflection mirror and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410077037.8A CN117908247A (en) | 2024-01-18 | 2024-01-18 | Mixed magnetic resistance direct-drive precise deflection mirror and method |
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| Publication Number | Publication Date |
|---|---|
| CN117908247A true CN117908247A (en) | 2024-04-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410077037.8A Pending CN117908247A (en) | 2024-01-18 | 2024-01-18 | Mixed magnetic resistance direct-drive precise deflection mirror and method |
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| Country | Link |
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| CN (1) | CN117908247A (en) |
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- 2024-01-18 CN CN202410077037.8A patent/CN117908247A/en active Pending
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