CN112838736A - Quick deflection mirror based on four-Maxwell force linear actuator drive - Google Patents

Quick deflection mirror based on four-Maxwell force linear actuator drive Download PDF

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Publication number
CN112838736A
CN112838736A CN202110234813.7A CN202110234813A CN112838736A CN 112838736 A CN112838736 A CN 112838736A CN 202110234813 A CN202110234813 A CN 202110234813A CN 112838736 A CN112838736 A CN 112838736A
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sensor
reflector
iron core
force linear
maxwell force
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CN112838736B (en
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李伟鹏
张笑妍
黄海
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Beihang University
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Beihang University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Abstract

The invention discloses a fast deflection mirror driven by a four-Maxwell force linear actuator, which comprises a reflecting mirror, a Maxwell force linear actuator, a flexible supporting system, an angle detection system and a frame assembly, wherein the reflecting mirror is arranged on the frame assembly; the reflecting mirror is arranged on the reflecting mirror bracket, and forms a motion assembly together with the sensor induction plate and the flexible diaphragm, and the four Maxwell force linear actuators are positioned below the motion assembly and connected with the motion assembly through demagnetizing screws; four Maxwell force linear actuators are orthogonally arranged in pairs to generate torque to deflect the reflector; the flexible supporting system provides restoring torque aiming at the actuating torque to realize angle control; four non-contact capacitive displacement sensors in the angle detection system are uniformly distributed in four directions, the steering angle of the reflector is detected in real time and fed back to the control system, and angle feedback control and angle closed-loop control are realized. The invention has the advantages of high force density, compact structure, convenient processing and manufacturing, and the like.

Description

Quick deflection mirror based on four-Maxwell force linear actuator drive
Technical Field
The invention belongs to the field of precision tracking of precision optical platforms, and relates to four novel Maxwell force actuator structures, in particular to a fast deflection mirror driven by a four Maxwell force linear actuator.
Background
The fast control deflection mirror is used as a key device in an optical system, controls the light propagation direction by controlling the rotation of the reflector, realizes the fast and accurate pointing of a light beam in a required rotation angle range, has the advantages of fast response speed, high accuracy, high resolution and the like, and is widely applied to the fields of adaptive optics, laser communication, image stabilization, accurate tracking, light beam control, target pointing and the like. The fast control deflection mirror on the market is mainly divided into two categories of piezoelectric ceramic drive and voice coil motor drive according to different driving modes, but the stroke of the piezoelectric ceramic is very small, generally only dozens to dozens of micrometers, and the driving voltage needs hundreds of volts; the stroke of the voice coil motor is two orders of magnitude higher than that of piezoelectric ceramics, the driving voltage only needs dozens of volts, but the force density is smaller. Therefore, a method with higher precision and a more compact structure is required to drive the fast deflection mirror, so that the design of the fast deflection mirror based on Maxwell force drive has certain engineering and practical significance.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: the fast deflection mirror based on the four-Maxwell force linear actuator is used for controlling the direction of a light beam between a target and a receiver, has the characteristics of compact structure, higher force density, larger working range, easy realization in engineering and the like, can be applied to various occasions, and provides a new idea for the development of the fast reflection mirror.
The technical scheme adopted by the invention for solving the technical problems is as follows: a fast deflection mirror based on four-Maxwell force linear actuator drive comprises a reflecting mirror, four Maxwell force linear actuators, a flexible supporting system, an angle detection system and a frame assembly, wherein:
the reflector is fixed at the center of the upper surface of the reflector bracket;
each Maxwell force linear actuator comprises an armature, a permanent magnet, a stator core and a coil winding, wherein the permanent magnet comprises a round permanent magnet and a tile-shaped permanent magnet, and the stator core comprises a middle iron core and an outer iron core. The armature is positioned at the top of the Maxwell force linear actuator, the middle iron core is positioned at the middle position below the armature, and an air gap is formed between the middle iron core and the armature; a coil winding is wound on the upper half part of the middle iron core and used for generating alternating magnetic flux; the diameter of the round permanent magnet is the same as that of the middle iron core, the round permanent magnet is tightly attached to the lower surface of the middle iron core, a plurality of tile-shaped permanent magnets (12 tile-shaped permanent magnets are adopted in the invention) form an annular permanent magnet which surrounds and is distributed at the lower half part of the middle iron core, and the outer iron core is positioned at the outer sides of the coil winding and the tile-shaped permanent magnets and is used as a path of the magnetic flux of the Maxwell force;
the flexible supporting system comprises an axial flexible part and a flexible membrane, and is used for supporting a moving assembly and an armature which are composed of a reflector, a reflector bracket and a sensor induction plate, wherein the upper end of the axial flexible part is connected to the central position of the lower part of the reflector bracket, the lower end of the axial flexible part is fastened on an actuator bracket, the middle part of the flexible membrane is clamped between the reflector bracket and the sensor induction plate and is fixed on the moving assembly together, and the outer part of the circumference of the flexible membrane is fixed on a main frame body through screws;
the angle detection system comprises a sensor induction plate, sensors and a sensor support, wherein the sensor induction plate is fixedly connected into the motion assembly through screws and swings along with the motion assembly, the four sensors are uniformly distributed below the sensor induction plate and used for detecting the steering angle of the reflector in real time, the sensors are not in contact with the sensor induction plate, the main frame body has the function of the sensor support, and the sensors penetrate through the main frame body and are fixed into a sensor clamping structure at the bottom of the main frame body through screws;
the frame component is divided into four parts, and comprises an upper frame body, an actuator support, a main frame body and a lower frame body, wherein the actuator support wraps and supports the axial flexible part and the 4 Maxwell force linear actuators, the actuator support is connected and fastened with the lower frame body through screws, the main frame body supports the flexible membrane and the sensor, and the upper frame body, the main frame body and the lower frame body are connected through screws.
Wherein, the sensor is a non-contact displacement sensor with a cylindrical shape.
The moving assembly comprises a reflector, a reflector bracket, a flexible diaphragm and a sensor induction plate, wherein the reflector is adhered to the middle position of the upper surface of the reflector bracket through epoxy resin, the lower surface of the reflector bracket is tightly attached to the upper surface of the flexible diaphragm, the lower surface of the flexible diaphragm is tightly attached to the upper surface of the sensor induction plate, the lower surface of the sensor induction plate is tightly attached to the upper surfaces of 4 armatures of the Maxwell force linear actuator, a screw penetrates through the flexible diaphragm and the sensor induction plate from the reflector bracket and is finally fixed into threaded holes in the upper surfaces of the 4 armatures, and therefore all parts in the moving assembly and the armatures are fastened into a whole.
The annular permanent magnet is designed according to the idea that a plurality of tile-shaped permanent magnets form annular magnetic steel due to the fact that the whole piece of magnetizing cost is high, the angle of each tile-shaped permanent magnet is 30 degrees, 12 tile-shaped permanent magnets form the annular permanent magnet, the 12 tile-shaped permanent magnets are uniformly distributed on the outer side of the circumference of the middle iron core, and the circular permanent magnet is located on the lower side of the middle iron core and clings to the lower surface of the middle iron core. The circular permanent magnet and the annular permanent magnet jointly form a concentrated flux type Maxwell force linear actuator, and the magnetic induction line density can be increased, so that the strength of a magnetic field is greatly increased.
The sensor goes deep into the main frame body, is connected to an external controller through a wire, clamps the cylindrical sensor through a sensor clamping structure designed based on a split hoop method, is integrally integrated into the main frame body, and is provided with a through groove below the clamping structure, and the cylindrical sensor is fixed through elastic deformation of materials and screws. Because the sensor clamping mechanism designed based on the split hoop method is integrated on the main frame body, the installation error of the sensor can be reduced during assembly, and the installation and the positioning are convenient.
The reflector bracket is a structural member with a round blind hole with the diameter of phi 20mm at the upper end and a round blind hole with the diameter of phi 7mm at the lower end. The round blind hole at the upper end of the reflector bracket is used for fixing the reflector, and the blind hole at the lower end of the reflector bracket is used for being connected with an axial flexible part in the flexible supporting system, so that the structure is relatively compact;
the axial flexure is a structural member with a lower end comprising 4 countersinks with a small opening diameter of phi 1.8mm and a large opening diameter of phi 3 mm. The assembly position when the screw is installed in the countersunk hole is relatively compact, and the connection surface is not protruded, so that the appearance is neat and beautiful;
the flexible membrane and the sensor induction plate are structural members, wherein the middle of each structural member is provided with a through hole with the diameter of phi 12mm, and the periphery of each structural member is uniformly provided with 8 through holes with the diameter of phi 1.8 mm. The through hole between the flexible membrane and the sensor induction plate is used for avoiding an axial flexible part in the flexible supporting system in the mounting process, so that the axial flexible part can be connected with the reflector bracket; the through holes on the periphery are used for connecting the reflector bracket and an armature in the Maxwell force linear actuator together through screws. The design of the flexible membrane enhances the adaptability of the quick deflection mirror to severe working environments such as vibration, impact and the like. The design of the sensor induction plate enables the angle detection system to be simpler in composition and convenient to install;
the armature is a structural member with 2M 1.6 internally threaded through holes. The threaded hole is used for being connected with a moving assembly consisting of the reflector, the reflector bracket, the flexible diaphragm and the sensor induction plate. The armature in the Maxwell force linear actuator is directly connected with the motion assembly, so that the integral structure is simpler, and the loss of the motion of the actuator in the transmission process is less;
the actuator support is a structural member with 4 uniformly distributed M1.6 internal thread holes at the upper end and 4 uniformly distributed M2.5 internal thread holes at the lower end. The threaded hole at the upper end of the actuator bracket is used for fixing an axial flexible part in the flexible supporting system, and the threaded hole at the lower end of the actuator bracket is used for connecting and fastening with the lower frame body, so that the structure is relatively compact;
the first connecting screw is an M2.5 multiplied by 16 hexagon socket head cap screw and is used for connecting and fastening the upper frame body, the lower frame body and the main frame body;
the second connecting screw is an M1.6 multiplied by 4 hexagon socket head cap screw and is used for fixing the cylindrical sensor in the clamping structure;
the third connecting screw is an M2.5 multiplied by 4 hexagon socket head cap screw and is used for connecting and fastening the lower frame body and the actuator bracket;
the fourth connecting screw is an M1.6 multiplied by 8 hexagon socket head cap screw and is used for connecting and fastening a motion assembly consisting of the reflector, the reflector bracket, the flexible membrane and the sensor induction plate with an armature in the Maxwell force linear actuator;
and the fifth connecting screw is an M1.6 multiplied by 4 cross-shaped recessed countersunk head screw and is used for fixing the axial flexible part in the flexible supporting system and the actuator bracket.
The working process of the invention is as follows: permanent magnetic flux generated by the 12 tile-shaped permanent magnets and the circular permanent magnets circulates along a magnetic circuit of the middle iron core, jumps to an air gap on the upper side of the middle iron core, flows through the armature, jumps to the outer iron core at the circumferential position of the armature, reaches the bottom of the outer iron core, and returns to the tile-shaped permanent magnets and the circular permanent magnets to form a permanent magnetic flux loop. The length, the structural topology and the magnetic flux density of the air gap of a pair of Maxwell force linear actuators on the same shaft are equal. When no current is loaded on the 4 Maxwell force linear actuators, the reflecting mirror is in the balance position. When equal-magnitude and opposite-direction currents are input to coil windings in Maxwell force linear actuators positioned on two sides of an X axis, opposite-direction alternating current magnetic fluxes are respectively generated in a middle iron core, wherein the alternating current magnetic flux on one side (+ X) has the same direction with the permanent magnet magnetic flux, the magnetic flux at an air gap is increased, the alternating current magnetic flux on the other side (-X) has the opposite direction with the permanent magnet magnetic flux, the magnetic flux at the air gap is reduced, so that acting force enabling an armature to be close to the Maxwell force linear actuator is generated at the position + X, acting force enabling the armature to be far away from the Maxwell force linear actuator is generated at the position X, so that torque around the positive direction of the Y axis is generated by the armature, and a reflector in a motion assembly fixedly connected with the armature deflects around the positive. Similarly, the deflection of the mirror around the Y-axis negative direction, the X-axis positive direction and the X-axis negative direction can be realized by inputting currents in different directions to coil windings in the Maxwell force linear actuator.
The invention has the advantages that:
(1) the invention forms a fast deflection mirror which takes four Maxwell force linear actuators as the center and is driven by the four Maxwell force linear actuators, the fast deflection mirror can deflect around an X axis and a Y axis, and the fast deflection mirror has the advantages of high force density of Maxwell force while the precision of a rotating deflection angle is high;
(2) the invention has simple and compact structure and is convenient for processing and assembling;
(3) the stroke of the piezoelectric ceramic is small, generally only tens of microns to tens of microns, but a driving voltage of hundreds of volts is required. The invention is driven based on Maxwell force, and the actuator can realize larger working stroke than piezoelectric ceramics, so that the invention has larger working range compared with the prior fast deflection mirror driven by piezoelectric ceramics, and the driving voltage is far less than the voltage required by the piezoelectric ceramics;
(4) the circular permanent magnet and the annular permanent magnet are adopted to jointly form the concentrated flux type Maxwell force linear actuator, the strength of a magnetic field is increased, and compared with the existing fast deflection mirror driven by a voice coil motor, the fast deflection mirror has higher force density and a more compact structure.
Drawings
FIG. 1 is an exploded view of the present invention;
FIG. 2 is an isometric view of the present invention;
FIG. 3 is a bottom view of the present invention;
FIG. 4 is a schematic diagram of the arrangement of the Maxwell force linear actuator and the sensors according to the present invention;
FIG. 5 is an exploded view of a Maxwell force linear actuator of the present invention;
FIG. 6 is a schematic magnetic flux diagram of a Maxwell force linear actuator of the present invention;
FIG. 7 is a half-section assembly view of the present invention;
the reference numerals in fig. 1 to 7 mean:
1-mirror 2-upper frame 3-mirror support
4-axial flexure 5-flexible diaphragm 6-sensor plate
7-maxwell force linear actuator 8-actuator support 9-sensor
10-main frame 11-lower frame 12-armature
13-coil winding 14-intermediate core 15-tile-shaped permanent magnet
16-circular permanent magnet 17-plunger 18-first connecting screw
19-second connection screw 20-third connection screw 21-fourth connection screw
22-fifth connecting screw
Detailed Description
The following describes embodiments of the present invention in further detail with reference to the accompanying drawings.
The invention relates to a fast deflection mirror driven by a four-Maxwell force linear actuator, which comprises a reflecting mirror, a Maxwell force linear actuator, a flexible supporting system, an angle detection system and a frame assembly. The reflecting mirror is arranged on the reflecting mirror bracket, and forms a motion assembly together with the sensor induction plate and the flexible diaphragm, and the four Maxwell force linear actuators are positioned below the motion assembly and are connected with the motion assembly through eight demagnetizing screws; the Maxwell force linear actuators are composed of an armature, a coil winding, a stator core and a permanent magnet, and respectively generate alternating current magnetic flux and permanent magnet magnetic flux to enable the armature to perform linear motion; the flexible supporting system mainly comprises a flexible membrane and an axial flexible piece, and provides restoring torque aiming at actuating torque so as to realize angle control; four non-contact capacitive displacement sensors in the angle detection system are uniformly distributed in four directions, the steering angle of the reflector is detected in real time and fed back to the control system, and angle feedback control and angle closed-loop control are realized. The invention has the advantages of high force density, compact structure, convenient processing and manufacturing, and the like.
As shown in fig. 1-3, the fast deflection mirror based on the drive of the four maxwell force linear actuators of the present invention comprises a reflecting mirror 1, four maxwell force linear actuators 7, a flexible supporting system, an angle detection system and a frame assembly.
The reflector 1 is adhered to the center of the upper surface of the reflector support 3 through epoxy resin, the lower surface of the reflector support 3 is tightly attached to the upper surface of a flexible diaphragm 5 in a flexible supporting system, the lower surface of the flexible diaphragm 5 is attached to the upper surface of a sensor induction plate 6, the lower surface of the sensor induction plate 6 is attached to the upper surfaces of armatures 12 in 4 Maxwell force linear actuators, each armature 12 is provided with 2 threaded through holes, the reflector 1, the reflector support 3, the flexible diaphragm 5 and the sensor induction plate 6 are combined into an integral structure, the integral structure is called as a motion assembly, and the motion assembly is fixedly connected with the armatures 12 through a fourth connecting screw 21. The sensor sensing plate 6 provides a target surface for the sensor 9 in the angle detection system.
Maxwell force linear actuators 7 are uniformly distributed at the lower side of the motion assembly, are electromagnetic driving devices of the rapid deflection mirror and can generate linear motion in the Z-axis direction, a pair of Maxwell force linear actuators 7 are respectively arranged in the X, Y two-axis direction, and current signals in different directions are input to enable the actuators to generate linear motion in opposite directions on the Z-axis so as to deflect the reflector 1; the flexible support system provides a restoring torque relative to the operating torque, thereby realizing angle control; the frame assembly is used for supporting the Maxwell force actuator 7, the flexible supporting system and the angle detection system, and the angle detection system is fixed on the frame assembly and used for detecting the movement of the reflector 1.
As shown in fig. 4, the position relationship between the maxwell force linear actuator 7 and the sensors 9 is shown, 4 pairs of maxwell force linear actuators 7 with the same structure size are used as electromagnetic driving devices of the fast deflection mirror and are arranged at intervals of 90 degrees, 4 armatures 12 are fixed on a moving assembly capable of deflecting around two horizontal axes of the armatures, 4 sensors 9 are used as devices of an angle detection system and are also arranged at intervals of 90 degrees, the angle of the sensors is 45 degrees staggered with the maxwell force linear actuator 7, and the work of the sensors and the sensors are not interfered with each other.
Fig. 5-7 show the specific structure and operation principle of the maxwell force linear actuator 7.
Each maxwell force linear actuator 7 includes an armature 12, a permanent magnet including a circular permanent magnet 16 and a tile permanent magnet 15, a stator core including a middle core 14 and an outer core 17, and a coil winding 13. The armature 12 is positioned at the top of the Maxwell force linear actuator 7, the middle iron core 14 is positioned at the middle position of the lower side of the armature 12, and an air gap is formed between the middle iron core and the armature 12; a coil winding 13 wound around an upper half of the intermediate core 14 for generating an alternating magnetic flux; the diameter of the circular permanent magnet 16 is the same as that of the middle iron core 14, the circular permanent magnet 16 is tightly attached to the lower surface of the middle iron core 14, 12 tile-shaped permanent magnets 15 form an annular permanent magnet and are distributed on the lower half portion of the middle iron core 14 in a surrounding mode, and the outer iron core 17 wraps the outer side and the bottom of the coil winding 13 and the 12 tile-shaped permanent magnets 15.
The armature 12, the middle iron core 14, the tile-shaped permanent magnet 15, the circular permanent magnet 16 and the outer iron core 17 form a permanent magnetic circuit, which is shown as a solid line in fig. 6, the tile-shaped permanent magnet 15 and the circular permanent magnet 16 are selected from NeFeB with the model number N42H, the upward axial direction is set to be the positive direction of the z axis, the circular permanent magnet 16 is magnetized along the positive direction of the z axis, the tile-shaped permanent magnet 15 is magnetized along the radial direction of the inner ring, all magnetic flux is gathered in the middle iron core 14 through the tile-shaped permanent magnet 15 and the circular permanent magnet 16 and points to the circumferential direction from the center of the armature 12, then passes through the outer iron core 17 and finally returns to the tile-shaped permanent magnet 15 and the circular permanent magnet 16, and the materials selected from the armature 12.
The coil winding 13 is wound around the intermediate core 14 to generate an alternating current magnetic flux in the intermediate core 14, the alternating current magnetic path is the same as the permanent magnetic path and is represented by a dotted line as shown in fig. 6, and when currents in different directions are input, alternating current magnetic fluxes in different directions are generated in the intermediate core 14, and the coil winding 13 is made of a refined copper wire having a wire diameter of 260 turns selected to be 0.2 mm.
The cross-sectional schematic view of the fast-yaw mirror is shown in fig. 7, and comprises a flexible supporting system, an angle detection system and a specific assembly position of a frame assembly.
The flexible support system comprises an axial flexible part 4 and a flexible diaphragm 5 for supporting the moving assembly, wherein the flexible diaphragm 5 and a sensor sensing plate 6 in the moving assembly are provided with a circular through hole at the centers, so that the axial flexible part 4 in the flexible support system can be matched and bonded with the reflector bracket 3, the upper end of the axial flexible part 4 is bonded to the central position of the lower surface of the reflector bracket 3, and the lower end is fastened to the actuator bracket 8 through a fifth connecting screw 22, and the flexible support system provides small bending rigidity and high axial rigidity. The flexible diaphragm 5 is fixed between the mirror holder 3 and the sensor sensing plate 6 at the inner side by a fourth connecting screw 21, and fixed between the upper frame 2 and the main frame 10 at the outer side by a first connecting screw 18. By balancing the elasticity between the axial flexure 4 and the flexible diaphragm 5, the center of rotation is fixed, thereby making the optical path length constant. The flexible support system is relatively soft in the working direction and relatively stiff in the non-working direction. The flexible diaphragm 5 is made of stainless steel and is formed by sheet punching.
The angle detection system comprises a sensor induction plate 6 and sensors 9, the four sensors 9 are uniformly distributed on the lower portion of the sensor induction plate 6, the sensor induction plate 6 moves along with the deflection of the moving assembly, therefore, the sensors 9 can detect the steering angle of the reflector 1 in real time, and the sensors 9 are not in contact with the sensor induction plate 6. The main frame 10 has the function of a sensor support, and a sensor clamping structure designed based on a split hoop method is integrated at the bottom of the main frame and used for clamping and positioning the cylindrical sensor 9. When the sensor 9 passes through the main frame 10, the clamping positioning is performed by the second connecting screw 19. The sensor 9 is a non-contact displacement sensor with the model number of capa NCDT6110, is a commercial product and is designed according to the installation size requirement.
The frame assembly is divided into four parts including an upper frame body 2, an actuator bracket 8, a main frame body 10, and a lower frame body 11. The actuator bracket 8 wraps and supports the axial flexible part 4 and the 4 Maxwell force linear actuators 7, and the actuator bracket 8 is fastened with the lower frame body 11 through screws; the main frame 10 supports the flexible membrane 5 and the sensor 9; the upper frame 2, the main frame 10 and the lower frame 11 are connected by a first connecting screw 18, and the material of each component in the frame assembly is 304 stainless steel.
The upper end of the reflector bracket 3 is matched and bonded with the reflector 1, and the lower end is provided with a round blind hole with the diameter of phi 7 mm; the upper end of the axial flexible piece 4 is matched and bonded with the lower end of the reflector bracket 3, and 4 countersunk holes with the diameter of phi 1.8mm and the diameter of a large opening of 3mm are uniformly distributed at the lower end; a through hole with the diameter of phi 12mm is formed in the middle of the flexible diaphragm 5 and the sensor induction plate 6, and 8 through holes with the diameter of phi 1.8mm are distributed on the periphery; armature 12 has 2M 1.6 female threaded through holes; 8 through holes with the diameter of phi 2.7mm are distributed on the outer side of the circumference of the flexible membrane 5; the upper end of the actuator bracket 8 is provided with 4 uniformly distributed M1.6 internal thread holes, and the lower end is provided with 4 uniformly distributed M2.5 internal thread holes; 8 counter bores with the diameter of phi 2.5mm are axially distributed on the upper frame body 2; 8M 2.5 internal threaded holes are axially distributed on the upper side and the lower side of the main frame body 10 respectively; 8 counter bores with the diameter of phi 2.5mm are distributed on the outer side of the circumference of the lower frame body 6, and 4 counter bores with the diameter of phi 2.5mm are uniformly distributed on the inner side; the first connecting screw 18 is an M2.5 × 16 socket cap screw, the second connecting screw 19 is an M1.6 × 4 socket cap screw, the third connecting screw 20 is an M2.5 × 4 socket cap screw, the fourth connecting screw 21 is an M1.6 × 8 socket cap screw, and the fifth connecting screw 22 is an M1.6 × 4 cross recessed countersunk head screw, which are all commercially available products.
The assembly process of the invention is as follows: referring to fig. 5, the middle iron core 14 and the circular permanent magnet 16 are firstly bonded into a whole by epoxy resin, note that the magnetizing direction of the circular permanent magnet 16 needs to be vertically upward; then, the assembly composed of the middle iron core 14 and the round permanent magnet 16 is matched and bonded at the center of the bottom of the outer iron core 17; then, an annular permanent magnet consisting of 12 tile-shaped permanent magnets 15 is placed inside an outer iron core 17, wherein an inner hole of the annular permanent magnet penetrates through a middle iron core 14; finally, the coil winding 13 is placed into the outer iron core 17 through the middle iron core 14, so that the static module assembly of the Maxwell force linear actuator 7 is assembled and placed aside for use. Referring to fig. 7, the mirror support 3, the flexible diaphragm 5 and the sensor sensing plate 6 are sequentially attached and placed from top to bottom, then 1 armature 12 is placed at a corresponding position below the sensor sensing plate 6, after the position is determined, the connection is performed by using a fourth connecting screw 21, then the other 3 armatures 12 are sequentially connected and locked, finally the mirror 1 is bonded into a central circular hole in the upper surface of the mirror support 3 by epoxy resin in a matching manner, and therefore the assembly of the moving component and the armature 12 is completed and the mirror is placed aside for standby. Referring to fig. 3 and 7, the axial flexure 4 is connected and locked to the actuator bracket 8 by a fifth connecting screw 22, the maxwell force linear actuator 7 is bonded to the actuator bracket 8 by epoxy resin, and then the actuator bracket 8 is fixedly connected to the lower frame 11 by a third connecting screw 20; then, the lower end surface of a reflector bracket 3 in the motion assembly is matched and adhered to the upper end surface of an axial flexible part 4, wherein a flexible membrane 5 in the motion assembly needs to be attached to the upper surface of a main frame 10, and a round hole in the flexible membrane 5 needs to be concentric with a threaded hole of the main frame 10; the sensor 9 is then assembled, the sensor 9 is inserted from below up into the clamping structure in the main frame 10, the position of the sensor with the moving assembly is determined and locked with the second connecting screw 19. And finally, matching the upper frame body 2 on the flexible diaphragm 5, and fastening by using the first connecting screw 18 to finish the assembly of the quick deflection mirror.
The working process of the invention is as follows: referring to fig. 6, the tile-shaped permanent magnet 15 and the circular permanent magnet 16 generate a permanent magnetic flux, which circulates along the magnetic path of the middle iron core 14, and the magnetic flux jumps to the air gap on the upper side of the middle iron core 14, flows through the armature 12, then jumps into the outer iron core 17 at the circumferential position of the armature 12, reaches the bottom of the outer iron core 17, and returns to the tile-shaped permanent magnet 15 and the circular permanent magnet 16 to form a permanent magnetic flux loop. The length, the structural topology and the magnetic flux density of an air gap of a pair of Maxwell force linear actuators 7 on the same shaft are all equal. When no current is applied to the 4 maxwell force linear actuators 7, the mirror 1 is in an equilibrium position. When equal and opposite currents are input to the coil windings 13 of the maxwell force linear actuators 7 positioned on two sides of the X axis, alternating current magnetic fluxes in opposite directions are respectively generated in the middle iron core 14, wherein the alternating current magnetic flux on one side (+ X) has the same direction as the permanent magnetic flux, the magnetic flux at the air gap is increased, the alternating current magnetic flux on the other side (-X) has the opposite direction to the permanent magnetic flux, and the magnetic flux at the air gap is reduced, so that a force for enabling the armature 12 to be close to the maxwell force linear actuator 7 is generated at the position + X, and a force for enabling the armature 12 to be far away from the maxwell force linear actuator 7 is generated at the position X, so that the armature 12 generates torque around the positive direction of the y axis, and the reflector 1 in a moving assembly fixedly connected with the armature also deflects around. Similarly, the mirror 1 can be deflected in other directions by supplying currents in different directions to the coil windings 13 in the maxwell force linear actuator 7.
The invention integrates four Maxwell force linear actuators into one fast deflection mirror to obtain the electromagnetic torque for deflecting the reflector 1, has compact structure, high force density and simple and reasonable assembly, and effectively supplements the structural design of the fast deflection mirror based on Maxwell force drive.
The present invention is not disclosed in detail as belonging to the common general knowledge of the skilled person.
The above description is only an embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can understand that the substitutions or additions and deletions within the technical scope of the present invention are included in the scope of the present invention, therefore, the scope of the present invention should be subject to the protection scope of the claims.

Claims (5)

1. A quick deflection mirror based on four Maxwell force linear actuators is driven, and is characterized in that: the device comprises a reflector (1), four Maxwell force linear actuators (7), a flexible supporting system, an angle detection system and a frame assembly; wherein:
the reflector (1) is fixed at the central position of the upper surface of the reflector bracket (3);
each Maxwell force linear actuator (7) comprises an armature (12), a permanent magnet, a stator iron core and a coil winding (13), wherein the permanent magnet comprises a round permanent magnet (16) and a tile-shaped permanent magnet (15), and the stator iron core comprises a middle iron core (14) and an outer iron core (17); the armature (12) is positioned at the top of the Maxwell force linear actuator (7), the middle iron core (14) is positioned at the middle position of the lower side of the armature (12), and an air gap exists between the middle iron core and the armature (12); a coil winding (13) wound around an upper half of the intermediate core (14) for generating an alternating magnetic flux; the diameter of the round permanent magnet (16) is the same as that of the middle iron core (14), the round permanent magnet is tightly attached to the lower surface of the middle iron core (14), and a plurality of tile-shaped permanent magnets (15) form an annular permanent magnet and are distributed at the lower half part of the middle iron core (14) in a surrounding manner; the outer iron core (17) is positioned on the outer sides of the coil winding (13) and the tile-shaped permanent magnets (15) and is used as a magnetic flux passage of the Maxwell force linear actuator (7) together with the middle iron core (14);
the flexible support system includes: the axial flexible piece (4) and the flexible membrane (5) are used for supporting a motion assembly and an armature (12) which are composed of the reflector (1), the reflector bracket (3) and the sensor induction plate (6); the upper end of an axial flexible piece (4) is adhered to the central position of the lower part of a reflector bracket (3), the lower end of the axial flexible piece is fastened on an actuator bracket (8) by using a screw, the middle part of a flexible membrane (5) is clamped between the reflector bracket (3) and a sensor induction plate (6) and is fixed on a motion assembly together, and the circumferential outer part of the flexible membrane (5) is fixed on a main frame body (10) by using a screw;
the angle detection system includes: a sensor sensing plate (6) and a sensor (9); the sensor induction plate (6) is fixedly connected into the moving assembly through a screw to reflect the moving state of the moving assembly; the four sensors (9) are uniformly distributed around the four Maxwell force linear actuators (7) and used for detecting the steering angle of the reflector (1) in real time, the sensors (9) are not in contact with the sensor induction plate (6), the main frame body (10) has the function of a sensor support, the sensors (9) penetrate through and go deep into the main frame body (10) and are fixed in a sensor clamping structure at the bottom of the main frame body (10) through screws, and the sensors (9) are connected to an external controller through wires;
the frame assembly comprises an upper frame body (2), an actuator bracket (8), a main frame body (10) and a lower frame body (11); the actuator support (8) wraps and supports the axial flexible part (4) and the four Maxwell force linear actuators (7), the actuator support (8) is fixedly connected with the lower frame body (11) through screws, and the main frame body (10) supports the flexible membrane (5) and the sensor (9); the upper frame (2), the main frame (10) and the lower frame (11) are connected with each other.
2. The fast deflection mirror driven by a four maxwell force linear actuator as claimed in claim 1, wherein: the sensor (9) is a non-contact displacement sensor with a cylindrical shape.
3. The fast deflection mirror driven by a four maxwell force linear actuator as claimed in claim 1, wherein: the reflector (1), the reflector bracket (3), the flexible membrane (5) and the sensor induction plate (6) jointly form a motion assembly; the reflector (1) is adhered to the middle position of the upper surface of a reflector support (3) through epoxy resin matching, the lower surface of the reflector support (3) is tightly attached to the upper surface of a flexible diaphragm (5), the lower surface of the flexible diaphragm (5) is tightly attached to the upper surface of a sensor induction plate (6), the lower surface of the sensor induction plate (6) is tightly attached to the upper surfaces of 4 armatures (12) of a Maxwell force linear actuator, a screw penetrates through the flexible diaphragm (5) and the sensor induction plate (6) from the reflector support (3), is finally fixed into threaded holes in the upper surfaces of the 4 armatures (12), and is fixedly connected with the armatures (12) into a whole through a moving assembly.
4. The fast deflection mirror driven by a four maxwell force linear actuator as claimed in claim 1, wherein: the angle of each tile-shaped permanent magnet (15) is 30 degrees, 12 tile-shaped permanent magnets (15) form an annular permanent magnet, 12 tile-shaped permanent magnets (15) are uniformly distributed on the outer side of the circumference of the middle iron core (14), and the circular permanent magnet (16) is positioned on the lower side of the middle iron core (14) and clings to the lower surface of the middle iron core (14).
5. The fast deflection mirror driven by a four maxwell force linear actuator as claimed in claim 1, wherein: the sensor clamping structure is integrally integrated into the main frame body (10), a through groove is designed below the sensor clamping structure, and the cylindrical sensor (9) is fixed by utilizing elastic deformation of materials and screws; because the sensor clamping mechanism designed based on the split hoop method is integrated on the main frame body (10), the installation error of the sensor (9) is reduced during assembly, and the installation and the positioning are convenient.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115097593A (en) * 2022-08-26 2022-09-23 北京瑞控信科技股份有限公司 One-dimensional high-speed moving magnetic type flexible support quick reflector
CN116643371A (en) * 2023-07-27 2023-08-25 北京瑞控信科技股份有限公司 Limiting locking device for quick reflection mirror and quick reflection mirror

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102185461A (en) * 2011-05-05 2011-09-14 雅科贝思精密机电(上海)有限公司 Composite double-coil motor with axial and radial magnets
CN102834765A (en) * 2010-03-24 2012-12-19 日本电气株式会社 Magnetic force drive device, optical scanning device, and image display device
CN211089423U (en) * 2019-11-25 2020-07-24 北京瑞控信科技有限公司 Voice coil motor and two-dimensional fast reflecting mirror

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102834765A (en) * 2010-03-24 2012-12-19 日本电气株式会社 Magnetic force drive device, optical scanning device, and image display device
CN102185461A (en) * 2011-05-05 2011-09-14 雅科贝思精密机电(上海)有限公司 Composite double-coil motor with axial and radial magnets
CN211089423U (en) * 2019-11-25 2020-07-24 北京瑞控信科技有限公司 Voice coil motor and two-dimensional fast reflecting mirror

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
刘力双等: "音圈电机快速控制反射镜研究现状", 《激光杂志》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115097593A (en) * 2022-08-26 2022-09-23 北京瑞控信科技股份有限公司 One-dimensional high-speed moving magnetic type flexible support quick reflector
CN116643371A (en) * 2023-07-27 2023-08-25 北京瑞控信科技股份有限公司 Limiting locking device for quick reflection mirror and quick reflection mirror
CN116643371B (en) * 2023-07-27 2023-10-20 北京瑞控信科技股份有限公司 Limiting locking device for quick reflection mirror and quick reflection mirror

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