CN213497206U - 5DOF optical path control magnetic suspension driver - Google Patents
5DOF optical path control magnetic suspension driver Download PDFInfo
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- CN213497206U CN213497206U CN202021882326.9U CN202021882326U CN213497206U CN 213497206 U CN213497206 U CN 213497206U CN 202021882326 U CN202021882326 U CN 202021882326U CN 213497206 U CN213497206 U CN 213497206U
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Abstract
A5 DOF optical path control magnetic suspension driver comprises an upper end cover 1, a floater 4, a radial stator 5, a connecting ring 6 and a lower end cover 7; the floater 4 is positioned in the radial stator 5, an air gap is reserved between the floater 4 and the radial stator, the radial stator 5 is arranged in the connecting ring 6, and the upper end cover 1 and the lower end cover 7 are distributed on two sides of the connecting ring 6; the 5DOF optical path control magnetic suspension driver provided by the embodiment of the invention can realize the motion control of five degrees of freedom, has a compact structure and has the characteristics of high response speed and high precision.
Description
Technical Field
The utility model relates to a laser technical field especially relates to 5DOF optical path control magnetic suspension driver.
Background
And in the laser cutting process, the off-axis laser cutting processing method controls the position of the laser beam focus relative to the central axis of the auxiliary gas by controlling the position of a focusing lens in a laser light path. Under the same processing conditions, the processing efficiency of the laser cutting machine and the processing quality of the cutting seam can be effectively improved. In the processing process of the off-axis laser cutting method, the specific relation between the axis of the laser beam and the center of the nozzle in the feeding direction needs to be controlled in real time. Therefore, there is a need for a microactuator that can achieve high response speed, high accuracy, and easy control.
The multi-degree of freedom is difficult to realize by adopting the traditional hydraulic and mechanical structure. The traditional structure can increase the volume of the laser head, increase the weight, cause the laser cutting head to have large inertia in the moving process, slow response and can not meet the requirement of high-speed high-precision processing.
SUMMERY OF THE UTILITY MODEL
Utility model purpose:
the utility model provides a 5DOF optical path control magnetic suspension driver for the position of lens among the control laser cutting machine, guarantee specific relation in the direction of feed with the nozzle center in order to realize real time control laser beam axis, the purpose is solved the problem that exists in the past.
The technical scheme is as follows:
a5 DOF optical path control magnetic suspension driver comprises an upper end cover 1, a floater 4, a radial stator 5, a connecting ring 6 and a lower end cover 7; the floater 4 is positioned in the radial stator 5, an air gap is reserved between the floater 4 and the radial stator, the radial stator 5 is arranged in the connecting ring 6, and the upper end cover 1 and the lower end cover 7 are distributed on two sides of the connecting ring 6;
the radial stator 5 is provided with radial coils 10, the radial coils 10 are a plurality of groups with an even number of at least four groups, the radial coils 10 of the plurality of groups are uniformly and annularly arrayed on the radial stator 5, and two coils which are opposite to each other form a differential working mode (the two coils which are opposite to each other by taking the central axis of the radial stator as a reference, or the connecting line of the centers of the two coils passes through the central axis of the radial stator);
the part of the outer edge of the floater 4 corresponding to the radial coil 10 forms a coil corresponding part, the rest part is a non-corresponding part, the upper end face of the non-corresponding part of the floater 4 is right opposite to the axial stator 9, and the lower end face of the non-corresponding part of the floater 4 is right opposite to the axial stator 12;
the upper end cover 1, the floater 4, the radial stator 5, the connecting ring 6 and the lower end cover 7 are coaxially arranged.
The floater 4 is provided with an inner sector ring 4-1 and an outer sector ring 4-2 which have different diameters, the outer edge arc surface of the inner sector ring 4-1 corresponds to the radial coil 10 to be used as a coil corresponding part, the outer sector ring 4-2 is used as a non-corresponding part, the upper end surface of the outer sector ring 4-2 faces the axial upper stator 9, and the lower end surface of the outer sector ring 4-2 faces the axial lower stator 12.
The floater is also provided with an arc-shaped groove 4-3 for lightening the mass of the floater.
The connecting ring 6 is provided with a mounting position of a radial displacement sensor 11.
An axially upper stator 9 is mounted on the upper end cover 1 and an axially lower stator 12 is mounted on the lower end cover 7.
And the upper end cover 1 and the lower end cover 7 are provided with axial displacement sensor 8 mounting positions.
The upper end cover 1, the connecting ring 6 and the lower end cover 7 form a device shell, four countersunk holes 1-1 are distributed on the upper end cover, positioning through holes 6-2 are distributed on the connecting ring, threaded holes 7-1 are formed in the lower end cover, and the three parts are connected through the connecting countersunk holes, the through holes and the threaded holes by screws.
When the lens is used, the lens 2 is fixed in the mounting ring 3, the mounting ring 3 is installed in the floater 4, the mounting ring 3 and the floater 4 are coaxially installed, and the mounting ring is in interference fit with an inner hole of the floater 4.
The axial upper stator 9 is arranged in the mounting groove 1-2 of the upper end cover 1; the upper end cover bottom is also provided with an axial flange.
The lower axial stator 12 is mounted in a mounting groove 7-2 in the lower end cap 7, which also has an axial flange 7-3 at the top.
The connection ring 6 has a mounting groove 6-1 therein for fixing the radial stator 5.
The advantages and effects are as follows:
as a new high-precision electromechanical control system, magnetic levitation is a contactless levitation technology using magnetic force as supporting force, and has the advantages of fast response, contactless friction, no need of lubrication, compact structure, easy realization of multi-degree-of-freedom control and the like. The magnetic suspension technology is applied to realize the light path control, so that the response speed and the control precision of the off-axis laser cutting method can be effectively improved.
The embodiment of the utility model provides a 5DOF optical path control magnetic suspension driver includes: the device comprises an upper end cover, a lens, a mounting ring, a floater, a radial stator, a connecting ring, a lower end cover and the like. All parts are coaxially installed, wherein a radial stator is fixedly installed in a connecting ring, a radial coil is installed on the radial stator, and a floater is located inside the radial stator. Axial stators on two sides of the floater are symmetrically arranged at corresponding positions of the upper end cover and the lower end cover. The upper end cover, the connecting ring and the lower end cover form a shell of the device. Four countersunk holes are distributed on the upper end cover, through holes are distributed on the connecting ring, threaded holes are formed in the lower end cover, and the three parts are connected through screws. The lens is fixed in the mounting ring, and the mounting ring is in interference fit with the inner hole of the floater, so that the structure is simple.
The outer edge of the floater is provided with two fan rings with different diameters, the outer arc surface of the inner fan ring is over against the coil of the radial stator, the upper end surface of the outer fan ring is over against the axial upper stator coil, and the lower end surface is over against the axial lower stator coil. The floater is also provided with an arc-shaped groove, so that the weight of the floater is reduced. The upper end cap has a specially shaped slot for securing a plurality of axially oriented stators. The bottom of the upper end cover is also provided with an axial flange for ensuring that a certain air gap is formed between the axial stator and the floater. The upper end cover is also provided with an axial displacement sensor mounting position. The connecting ring is internally provided with a mounting groove for fixing the radial stator. The end face of the connecting ring is provided with a plurality of positioning holes, so that the axial upper stator and the axial lower stator are symmetrically distributed on two sides of the floater. The side wall of the connecting ring is provided with a plurality of through holes for mounting the radial displacement sensors.
The lower end cap has a specially shaped slot for securing a plurality of axially lower stators. The top of the upper end cover is also provided with an axial flange for ensuring that the axial stator and the floater have a certain air gap. The lower end cover is also provided with an axial displacement sensor mounting position.
The embodiment of the utility model provides a 5DOF optical path control magnetic suspension driver, upper end cover, lens, collar, float, radial stator, go-between, parts such as lower extreme cover. All parts are coaxially mounted, so that assembly errors can be reduced. The radial stator is arranged in the connecting ring, and the radial stator is provided with a radial coil. The floater is positioned inside the radial stator and ensures a certain air gap with the radial stator. The axial upper stator and the axial lower stator on both sides of the floater are symmetrically arranged at the corresponding positions of the upper end cover and the lower end cover. The radial stator and the connecting ring are directly assembled, the structure is simple, and the matching precision of the radial stator and the connecting ring can be improved through an integrated processing mode. The floater is provided with the arc-shaped groove with a special shape, so that the quality is optimized, and the response speed can be improved. The 5DOF optical path controls the magnetic suspension driver to radially realize translation along the two directions of an x axis and an axis through four coils of 90-degree annular arrays, wherein two opposite coils form a differential working mode. The axial direction of the device realizes translation along the direction of a z axis and rotation around the two directions of an x axis and a y axis through four pairs of annular array electromagnets. Each pair of electromagnets arranged on the upper end cover and the lower end cover adopts a differential working mode. The adoption of the differential electromagnet can reduce the size of the electromagnet, make the device more compact and improve the control precision. The embodiment of the utility model provides a 5DOF optical path control magnetic suspension driver can realize the motion control of five degrees of freedom, and compact structure, has high response speed, the characteristics of high accuracy.
Drawings
Fig. 1 is an exploded view of an axial view of the overall structure of the present invention.
Fig. 2 top view of the upper end cap.
Fig. 3 is a schematic view of the structure of the lower end cap.
Fig. 4 is a top view of the float.
Fig. 5 is a schematic view of the assembly of the radially outer stator with the connecting ring.
Fig. 6 is a cross-sectional view of the structure of fig. 5.
The reference numerals are represented as: 1. an upper end cover; 2. a lens; 3. a mounting ring; 4. a float; 5. a radial stator; 6. a connecting ring; 7. a lower end cover; 8. an axial displacement sensor; 9. an axially upper stator; 10. a radial coil; 11. a radial displacement sensor; 12. and a lower stator is axially arranged.
Detailed Description
A5 DOF optical path control magnetic suspension driver comprises an upper end cover 1, a floater 4, a radial stator 5, a connecting ring 6 and a lower end cover 7; the floater 4 is positioned in the radial stator 5, an air gap is reserved between the floater 4 and the radial stator (the air gap is the distance between the floater and the radial stator coil, and air gap allowance is reserved in the design process, so that the problem of out-of-control adsorption caused by over-small air gap when the floater moves in the x and y directions is avoided, the floater and the axial stator coil also have an air gap, the radial stator 5 is arranged in the connecting ring 6, and the upper end cover 1 and the lower end cover 7 are distributed on two sides of the connecting ring 6 (the connecting ring 6 is arranged between the upper end cover 1 and the lower end cover 7);
the radial stator 5 is provided with radial coils 10, the radial coils 10 are at least four groups of a plurality of groups with even numbers, the radial coils 10 of the plurality of groups are uniformly arrayed on the radial stator 5 in a ring shape, the radial coils 10 are uniformly distributed, namely, each group of radial coils 10 are connected with a connecting line to the center of the radial stator 5, and the included angles between two adjacent connecting lines are equal, and two coils which are opposite (the straight line which is opposite is used for connecting the two coils penetrates through the center of the radial stator 5) form a differential working mode;
the part of the outer edge of the floater 4 corresponding to the radial coil 10 forms a coil corresponding part, the rest part is a non-corresponding part, the upper end face of the non-corresponding part of the floater 4 is right opposite to the axial stator 9, and the lower end face of the non-corresponding part of the floater 4 is right opposite to the axial stator 12;
the upper end cover 1, the floater 4, the radial stator 5, the connecting ring 6 and the lower end cover 7 are coaxially arranged.
The floater 4 is provided with an inner fan ring 4-1 and an outer fan ring 4-2 (the inner fan ring 4-1 and the outer fan ring 4-2 are of two structures with different diameters), the outer edge arc surface of the inner fan ring 4-1 corresponds to the radial coil 10 to serve as a coil corresponding part, the outer fan ring 4-2 serves as a non-corresponding part, the upper end face of the outer fan ring 4-2 faces the axial stator 9, and the lower end face of the outer fan ring 4-2 faces the axial stator 12. (the shape of the inner circular surface of the radial stator 5 is adapted to the float 4, i.e. in a position corresponding to the outer sector ring 4-2, as shown in figure 1, a groove is made to accommodate the outer sector ring 4-2)
The floater is also provided with an arc-shaped groove 4-3 for lightening the mass of the floater.
The connecting ring 6 is provided with a mounting position of a radial displacement sensor 11.
An axially upper stator 9 is mounted on the upper end cover 1 and an axially lower stator 12 is mounted on the lower end cover 7.
And the upper end cover 1 and the lower end cover 7 are provided with axial displacement sensor 8 mounting positions.
The upper end cover 1, the connecting ring 6 and the lower end cover 7 form a device shell, four countersunk holes 1-1 are distributed on the upper end cover, positioning through holes 6-2 are distributed on the connecting ring, a threaded hole 7-1 is formed in the lower end cover, and the three parts are connected through the connecting countersunk holes, the through holes and the threaded holes by screws (namely, the bolts penetrate through the countersunk holes 1-1, the positioning through holes 6-2 and the threaded holes 7-1 and then are connected).
When the lens is used, the lens 2 is fixed in the mounting ring 3, the mounting ring 3 is installed in the floater 4, the mounting ring 3 and the floater 4 are coaxially installed, and the mounting ring is in interference fit with an inner hole of the floater 4.
The axial upper stator 9 is arranged in the mounting groove 1-2 of the upper end cover 1.
The bottom of the upper end cover 1 is also provided with an axial flange. The purpose of the flange designed at the bottom of the upper end cover is to make room for the installation of the stator 9 in the axial direction and to adjust the extension of the sensor probe during installation, so as to ensure the initial working air gap of the stator 9 in the axial direction.
Regarding the mounting hole of the axial displacement sensor: the displacement signals at the positions opposite to the floater and the stator coil cannot be directly detected in the axial direction, so that a displacement sensor is arranged between axial stators which are uniformly distributed in the circumferential direction (the displacement sensor arranged between the axial stators is arranged on an angular bisector of an adjacent stator), and the displacement at the position opposite to the coil can be obtained through numerical transformation (the numerical transformation mainly uses space coordinate transformation, and the coordinate of a target point in an original rectangular coordinate system is calculated by using data of a measuring position, so that the axial displacement detection of the center of the position opposite to the floater and the axial stators can be realized).
The axial flange of the lower end cap 7 is designed for the same purpose as the upper end cap 1 to ensure that the axial lower stator 12 has a certain air gap with the float 4. And the upper end cover 1 and the lower end cover 7 are also provided with mounting holes, and the axial displacement sensor 8 is mounted by adopting double nuts.
The axial lower stator 12 is mounted in a mounting groove 7-2 of the lower end cover 7, and the top of the lower end cover 7 is also provided with an axial flange 7-3 for ensuring that the axial lower stator has a certain air gap with the float 4. And the lower end cover is also provided with a mounting hole, and the axial displacement sensor is mounted by adopting double nuts.
The connecting ring 6 is internally provided with a mounting groove 6-1 for fixing the radial stator 5; the end face of the connecting ring is provided with a plurality of positioning through holes 6-2, so that the axial stator 9 is strictly opposite to the axial lower stator 12, and radial deviation is avoided.
The float is positioned on the middle plane of the upper stator and the lower stator in the axial direction through applying initial bias current. After the upper end cover and the lower end cover are fixed with the connecting ring through screws, the axial flanges of the upper end cover and the lower end cover tightly press the end face of the connecting ring and the radial stator. The axial upper stator and the axial lower stator are symmetrically distributed around the connecting ring. Given an initial bias current applied, the float will achieve an initial levitated state with the axially upper and lower stators being symmetrically distributed about the float. The side wall of the connecting ring is provided with a plurality of through holes for mounting the radial displacement sensors 11。
The present invention will be described in further detail with reference to the accompanying drawings:
as shown in fig. 1, the embodiment of the present invention provides a 5DOF optical path control magnetic suspension drive, including: the lens comprises an upper end cover 1, a lens 2, a mounting ring 3, a floater 4, a radial stator 5, a connecting ring 6, a lower end cover 7 and the like. All parts are coaxially mounted, wherein a radial stator 5 is fixedly mounted in a connecting ring 6, a radial coil 10 is mounted on the radial stator 5, and a float 4 is positioned inside the radial stator 5. The axial upper stator 9 and the axial lower stator 12 at two sides of the floater 4 are symmetrically arranged at the corresponding positions of the upper end cover 1 and the lower end cover 7.
As shown in fig. 2, the upper end cap has a specially shaped slot 1-2 for securing a plurality of axially oriented stators. The bottom of the upper end cover is also provided with an axial flange for ensuring that the axial stator and the floater have a certain air gap, and the end surface is also provided with an axial displacement sensor mounting position. The upper end cover is connected with the connecting ring through a screw 1-1, and a hole for mounting the screw on the upper end cover is a countersunk hole.
As shown in fig. 3, the lower end cap has a specially shaped slot 7-2 for fixing a plurality of axially lower stators. The top of the lower end cover is also provided with an axial flange 7-3 for ensuring the installation space of the axial stator. The lower end cover is also provided with an axial displacement sensor mounting position. The lower end cover is provided with a plurality of threaded holes 7-1 which are connected with the connecting ring and the upper end cover through screws.
As shown in figure 4, the outer edge of the floater has two fan rings with different diameters, the outer arc surface of the inner fan ring 4-1 is opposite to the radial stator coil 10, the upper end surface of the outer fan ring 4-2 is opposite to the axial stator 9, and the lower end surface is opposite to the axial stator 12. The floater is also provided with an arc-shaped groove 4-3, so that the weight of the floater is reduced.
As shown in fig. 5 and 6, the connection ring 6 is provided with a mounting groove 6-1 for the radial stator 5, and the radial stator is fixed in the mounting groove (the radial stator is mounted in the connection ring to ensure that there is no relative movement between the two in the radial direction, and the axial flanges of the upper and lower end covers can ensure that there is no axial movement of the radial stator). The radial stator is provided with radial coils. The connecting ring is provided with a positioning hole 6-2 for ensuring the installation accuracy of key components of the system. And the connecting ring is also provided with a radial displacement sensor mounting hole.
The axial upper stator 9 and the axial lower stator 12 are respectively installed on the upper end cover 1 and the lower end cover 7, and the coil of the axial stator adopts a U-shaped magnetic yoke.
The lens is used in a cutting head of the laser cutting machine.
The outer edge of the floater is provided with two fan rings with different diameters, the outer diameter of the inner fan ring is smaller than the minimum inner diameter of the radial stator 5, and a certain space is reserved for ensuring radial movement. The floater is also provided with an arc-shaped groove, so that the weight of the floater is reduced.
The radial stator and the connecting ring are high in matching precision, and an integrated processing method is adopted during processing.
The utility model discloses in, realize five degree of freedom motions through solenoid drive float, and then drive the lens motion and realize the control to the light path. The radial stator 5 can drive the floater to translate along the x axis and the y axis, and the axial upper stator 9 and the axial lower stator 12 can drive the floater to translate along the z axis and rotate around the x axis and the y axis. The control precision of the movement can be improved and the response speed can be improved through a differential control mode.
Claims (10)
1. A 5DOF optical path controlled magnetic levitation actuator, characterized by: the driver comprises an upper end cover (1), a floater (4), a radial stator (5), a connecting ring (6) and a lower end cover (7); the floater (4) is positioned in the radial stator (5), an air gap is reserved between the floater (4) and the radial stator, the radial stator (5) is arranged in the connecting ring (6), and the upper end cover (1) and the lower end cover (7) are distributed on two sides of the connecting ring (6);
the radial stator (5) is provided with radial coils (10), the radial coils (10) are at least four groups of even-numbered groups, the radial coils (10) of the groups are uniformly and annularly arrayed on the radial stator (5), and two opposite coils form a differential working mode;
the part of the outer edge of the floater (4) corresponding to the radial coil (10) forms a coil corresponding part, the rest part is a non-corresponding part, the upper end face of the non-corresponding part of the floater (4) faces the axial stator (9), and the lower end face of the non-corresponding part of the floater (4) faces the axial stator (12);
the upper end cover (1), the floater (4), the radial stator (5), the connecting ring (6) and the lower end cover (7) are coaxially arranged.
2. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein:
the floater (4) is provided with an inner fan ring (4-1) and an outer fan ring (4-2) which are different in diameter, the outer edge arc surface of the inner fan ring (4-1) corresponds to a radial coil (10) to serve as a coil corresponding portion, the outer fan ring (4-2) serves as a non-corresponding portion, the upper end face of the outer fan ring (4-2) faces an axial upward stator (9), and the lower end face of the outer fan ring (4-2) faces an axial downward stator (12).
3. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1 or 2, wherein: the floater is also provided with an arc-shaped groove (4-3) for lightening the mass of the floater.
4. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein:
the connecting ring (6) is provided with a mounting position of a radial displacement sensor (11).
5. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein: the axial upper stator (9) is arranged on the upper end cover (1), and the axial lower stator (12) is arranged on the lower end cover (7).
6. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein:
and the upper end cover (1) and the lower end cover (7) are provided with axial displacement sensor (8) mounting positions.
7. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein: the device comprises a device shell consisting of an upper end cover (1), a connecting ring (6) and a lower end cover (7), wherein the upper end cover is distributed with four countersunk holes (1-1), the connecting ring is distributed with positioning through holes (6-2), the lower end cover is provided with a threaded hole (7-1), and the three parts are connected by screws through the connecting countersunk holes, the through holes and the threaded hole.
8. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein: when the lens is used, the lens (2) is fixed in the mounting ring (3), the mounting ring (3) is installed in the floater (4), the mounting ring (3) and the floater (4) are coaxially installed, and the mounting ring is in interference fit with an inner hole of the floater (4).
9. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein: the axial upper stator (9) is arranged in the mounting groove (1-2) of the upper end cover (1);
the bottom of the upper end cover is also provided with an axial flange;
the axial lower stator (12) is arranged in a mounting groove (7-2) of the lower end cover (7), and the top of the lower end cover (7) is also provided with an axial flange (7-3).
10. A 5DOF optical path control magnetic levitation actuator as claimed in claim 1, wherein: the connecting ring (6) is internally provided with a mounting groove (6-1) for fixing the radial stator (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021882326.9U CN213497206U (en) | 2020-09-02 | 2020-09-02 | 5DOF optical path control magnetic suspension driver |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021882326.9U CN213497206U (en) | 2020-09-02 | 2020-09-02 | 5DOF optical path control magnetic suspension driver |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN213497206U true CN213497206U (en) | 2021-06-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021882326.9U Active CN213497206U (en) | 2020-09-02 | 2020-09-02 | 5DOF optical path control magnetic suspension driver |
Country Status (1)
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| CN (1) | CN213497206U (en) |
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2020
- 2020-09-02 CN CN202021882326.9U patent/CN213497206U/en active Active
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