CN103197416B - Double-freedom-degree high-speed parallel scan platform and perpendicularity error calibrating method - Google Patents
Double-freedom-degree high-speed parallel scan platform and perpendicularity error calibrating method Download PDFInfo
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- CN103197416B CN103197416B CN201310092121.9A CN201310092121A CN103197416B CN 103197416 B CN103197416 B CN 103197416B CN 201310092121 A CN201310092121 A CN 201310092121A CN 103197416 B CN103197416 B CN 103197416B
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Abstract
The invention relates to a double-freedom-degree high-speed parallel scan platform and a perpendicularity error calibrating method. The double-freedom-degree high-speed parallel scan platform comprises a machine shell, a linear driving mechanism, a reflector shaft mechanism, a reflector movable frame and a PSD position sensor, wherein the linear driving mechanism, the reflector shaft mechanism, the reflector movable frame and the PSD position sensor are installed in the machine shell. The double-freedom-degree high-speed parallel scan platform adopts a single-reflector structure, the scanning work can be accomplished with one-shot reflection, and the error amplification effect caused by double reflector reflection is avoided. Meanwhile, due to the adoption of a double-input and double-output structure, control is easy to realize compared with the existing technology; due to the adoption of a trio X-Y frame type structure, larger rigidity and a bigger deflection angle are achievable; and due to the fact that the two-dimension PSD position sensor is adopted as a feedback device of the normal position of a reflector to achieve full closed-loop, high accuracy can be achieved. The double-freedom-degree high-speed parallel scan platform has the advantages of being high in accuracy, large in rigidity, and strong in bearing capacity.
Description
Technical field
The present invention relates to precision optics scanning instrument field, be specifically related to a kind of two-freedom high speed parallel scan platform and error of perpendicularity calibration steps.
Background technology
Optical scanning mechanism is the servo actuator of advanced field of laser processing, is one of critical component of laser projection.
In recent years, minority carrier generation lifetime, especially 3-freedom parallel mechanism, as 3RPS type parallel institution, be more and more subject to attention and the favor of researcher in optical scanning field.The existing adjustment of the optical scan angle based on parallel institution platform, driven three movement branched chain be connected between moving platform and pedestal by three drivers simultaneously, thus realize the motion of moving platform three rotational freedom directions, or two rotational freedoms and an additional translational degree of freedom motion.
But under normal circumstances, optical scanning mechanism only needs two rotational freedoms, and unnecessary degree of freedom can increase the difficulty of kinematics analysis, make system architecture and control more complicated.Secondly, if movement branched chain structure is too complicated, the links such as processing and assembling just may cause larger systematic error.The cascaded structure form (gimbal form) that current most of optical scanning mechanism all adopts, this technology is very ripe, but due to the design feature (all quality of pitch axis are placed on azimuth axis completely, make kinoplaszm amount relatively large) of self, high-velocity scanning campaign cannot be realized.Also has a kind of plateform system combined by two groups of single shafts, be mainly used in laser projection or increment manufacturing technology (3D printer), because its kinoplaszm amount almost only has catoptron, inertia is very little so dynamic property is fine, there is very high bandwidth, but owing to adopting bimirror reflection can bring certain deviation accumulation and the harmful effect of amplification, load-bearing capacity is very low simultaneously.Mostly be applied in fast mirror structure for two rotary freedom parallel institutions, very high sweep velocity can be had but sweep limit is very little.The major mechanical structure of fast mirror divides two kinds, and one is X-Y axle frame-type, and also referred to as there being axis structure, its internal and external frame around two mutually orthogonal axis rotation, realizes the two-dimensional deflection of plane mirror respectively; Another kind is flexible shaftless structure, mainly utilizes the flexibility work of flexible member.The advantage of the first structure is that the rigidity of structure is good, load-bearing capacity strong, and angle range is large; Its shortcoming is that the accuracy requirement of shaft is higher, and moment of inertia and the moment of friction of system are bigger than normal, are unfavorable for the raising of resonance frequency, and the volume of this structure is bigger than normal, serious by space constraint.The second structural advantage is: structure is simple, without frictional resistance moment, and fast response time; But its shortcoming is, high to the requirement of flexible member, namely require that flexible member has enough flexibilities on desired motion direction, and there is enough rigidity on the direction of constrained motion, when this causes system works, the forms of motion of plane mirror comparatively complicated (can produce the displacement of the lines of trace while producing rotating angle movement), is unsuitable for using under the condition of work that vibration, impact, revolution etc. are severe.In addition, above-mentioned two kinds of structures, in order to make structural design symmetrical, all have employed the motor of four groups of pairwise orthogonal distributions, namely have employed four input controls two output, and this just makes control more complicated, and cost is higher.
Summary of the invention
In view of this, being necessary the defect for existing in prior art, providing a kind of two-freedom high speed parallel connection with high-speed, high precision feature to clear off scanning platform, and designing a kind of error of perpendicularity calibration steps for the special construction of this scanning platform; Relative to fast mirror realize catoptron compared with large deflection angle while, reduce the complexity of scanning platform control gear, and continue to keep original reaction velocity and precision.
For achieving the above object, the present invention is by the following technical solutions:
A kind of two-freedom high speed parallel scan platform, comprises casing and the straight line driving mechanism be installed in casing, mirror axis mechanism, catoptron movable frame and PSD position transducer;
Described mirror axis mechanism comprises main shaft, catoptron, mirror support, levelling bolt and generating laser, described main shaft is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole of an axis, described catoptron is fixed on mirror support, mirror support is fixed on the end face of the large axle head of main shaft by multiple levelling bolt, described generating laser is fixed in the through hole at spindle axis place, through hole is passed along the axle center of main shaft in its Laser emission direction, points to the little axle head of main shaft;
Described catoptron movable frame comprises inside casing and housing, and the large axle head of described main shaft is rotatably connected in the middle part of inside casing around first axle, and described inside casing is rotatably connected in the middle part of housing around the second axis, and described housing is fixed on casing; Wherein, first axle and the second axis are positioned at same plane and mutually orthogonal;
Described PSD position transducer is fixed on bottom of shell, is oppositely arranged with the little axle head of main shaft;
Two straight line driving mechanisms are movably installed in casing, be respectively the first straight line driving mechanism and the second straight line driving mechanism, described first straight line driving mechanism is connected with main shaft along first axle with the second axis direction respectively with the movement output end of the second straight line driving mechanism, and drive shaft swings relative to casing on catoptron movable frame.
Described straight line driving mechanism comprises voice coil motor, movable frame and guide rail; Described movable frame is rotatably connected on casing, and described guide rail is rotatably connected on movable frame, and described voice coil motor is fixed in guide rail.
Described straight line driving mechanism also comprises the grating scale sensor, the photoelectric limit switch that are fixed in guide rail, and the movement output end of described grating scale sensor and photoelectric limit switch and voice coil motor is oppositely arranged.
The movement output end of described voice coil motor is connected by ball pivot with main shaft.
Rubber sheet gasket is provided with between described mirror support and main shaft.
The minute surface of described catoptron is perpendicular to the axle center of main shaft.
Described first axle and the second axis are all positioned on the minute surface of catoptron.
Described mirror support is fixed on the end face of the large axle head of main shaft by four levelling bolts, and described four screws are uniformly distributed in the edge of mirror support.
A calibration steps for the error of perpendicularity of two-freedom high speed parallel scan platform as above, comprises the following steps:
S1, set gradually projecting plane, adjusting pole and adjustment platform along a straight line, main shaft is fixed on adjusting pole, generating laser is fixed on adjustment platform, the end face of the large axle head of laser beam directive main shaft that laser transmitter projects is gone out;
S2, by adjusting pole and adjustment platform, the adjustment axial direction of main shaft and the position of generating laser, the laser beam that laser transmitter projects is gone out, through the through hole of spindle axis, projects on projecting plane;
S3, be arranged on main shaft by catoptron and mirror support by multiple levelling bolt, by screwing or loosening levelling bolt, finely tune the minute surface direction of catoptron, the laser beam that laser transmitter projects is gone out returns along former road.
Described S2 is also comprised and being finely tuned by the axial direction of adjusting pole to main shaft, makes laser beam projection brightness on the projection surface reach maximum.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides adopts simple reflector structure, only needs primary event to complete scanning work, avoids bimirror and reflect the error enlarge-effect brought.Meanwhile, the present invention adopts two input two export structures, and in control, comparatively prior art is easily a lot; Additionally use three groups of X-Y tower structures, larger rigidity and deflection angle can be had; Realize closed-loop owing to have employed Two-dimensional PSD position transducer as the feedback assembly of catoptron normal direction position again, very high precision can be reached.A kind of two-freedom high speed parallel scan platform provided by the invention has that precision is high, rigidity is large, the feature that load-bearing capacity is strong.
Accompanying drawing explanation
The structural representation of a kind of two-freedom high speed parallel scan platform that Fig. 1 provides for the embodiment of the present invention.
The inner structure schematic diagram of a kind of two-freedom high speed parallel scan platform that Fig. 2 provides for the embodiment of the present invention.
The structural representation of the mirror axis mechanism in a kind of two-freedom high speed parallel scan platform that Fig. 3 provides for the embodiment of the present invention.
Fig. 4 is the sectional view of the mirror axis mechanism shown in Fig. 3.
The structural representation of the catoptron movable frame in a kind of two-freedom high speed parallel scan platform that Fig. 5 provides for the embodiment of the present invention.
The structural representation of the straight line driving mechanism in a kind of two-freedom high speed parallel scan platform that Fig. 6 provides for the embodiment of the present invention.
A side structure schematic diagram in a kind of two-freedom high speed parallel scan platform that Fig. 7 provides for the embodiment of the present invention.
The another kind of connected mode schematic diagram of a kind of two-freedom high speed parallel scan platform that Fig. 8 provides for the embodiment of the present invention.
The error of perpendicularity calibration steps of a kind of two-freedom high speed parallel scan platform that Fig. 9 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in instructions of the present invention, clear, complete description is carried out to the technical scheme of the embodiment of the present invention.
Only reason for convenience, in the following description, employ specific direction term, such as " on ", D score, "left", "right" etc., be reference with the accompanying drawing of correspondence, can not think limitation of the present invention, when the definition direction of drawing changes, the direction that these words represent should be interpreted as corresponding different directions.
As depicted in figs. 1 and 2, a kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides comprises casing 1 and the straight line driving mechanism be installed in casing 1, mirror axis mechanism 3, catoptron movable frame 4 and PSD position transducer 5.
Particularly, as shown in Figure 3 and Figure 4, described mirror axis mechanism 3 comprises main shaft 31, catoptron 33, mirror support 32, levelling bolt 35 and generating laser 34.Described main shaft 31 is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole 310 of an axis, described catoptron 33 is fixed on mirror support 32, the edge of mirror support 32 has four circumferentially equally distributed fixed claws 320, and mirror support 32 is fixed on the end face of the large axle head of main shaft 31 by the levelling bolt of four on fixed claw 320 35.Described generating laser 34 is fixed in the through hole 310 at main shaft 31 axle center place, and it is inner to be encapsulated in main shaft 31 by mirror support 32, and through hole 310 is passed along the axle center of main shaft 31 in its Laser emission direction, points to the little axle head of main shaft 31.
As improvement, rubber sheet gasket 36 is also provided with between mirror support 32 and main shaft 31, for providing resiliency supported for mirror support 32, by adjusting the tightness of four levelling bolts 35 respectively, can to the minute surface of mirror support 32 upper reflector 33 towards carrying out meticulous fine setting and calibration, make the axis perpendicular of itself and main shaft 31, to meet the request for utilization of the two-freedom high speed parallel scan platform of the embodiment of the present invention.
As shown in Figure 2, described PSD position transducer 5 is fixed on casing 1 by a flange base 51, and is oppositely arranged with the little axle head of main shaft 31, for receiving the laser beam signal that generating laser 34 penetrates from little axle head through hole 310.
As shown in Figure 5, described catoptron movable frame 4 is XY framed structure, comprise inside casing 42 and housing 41, described housing 41 is fixed on the upper cover plate of casing 1 (for ease of understanding inner structure, upper cover plate in Fig. 1 is removed), described inside casing 42 is pivotally connected in the middle part of housing 41, can rotate around the second axis 420; The macro-axis end pivoting of described main shaft 31 is connected to the middle part of inside casing 42, can rotate around first axle 410.Wherein, first axle 410 and the second axis 420 are all positioned at the plane at the minute surface place of catoptron 33, and mutually orthogonal on the minute surface of catoptron 33.
As depicted in figs. 1 and 2, described straight line driving mechanism has two, be respectively the first straight line driving mechanism 21 and the second straight line driving mechanism 22, described first straight line driving mechanism 21 and the second straight line driving mechanism 22 are movably installed in casing 1 respectively by a pivot assembly 20, can rotate around the axis of a vertical direction respectively.
Particularly, as shown in Figure 6, each straight line driving mechanism comprises voice coil motor 23, movable frame 24, guide rail 25, grating scale sensor 26 and photoelectric limit switch 27, and described movable frame 24 is rotatably connected on casing 1 by pivot assembly 20, can rotate around the axis of a vertical direction.Described guide rail 25 is pivotally connected on movable frame 24, can rotate around the axis of a horizontal direction.Described voice coil motor 23, grating scale sensor 26 and photoelectric limit switch 27 are fixed on guide rail 25, and wherein, voice coil motor 23 is arranged along guide rail 25 bearing of trend, is fixed on bottom guide rail 25; Grating scale sensor 26 and photoelectric limit switch 27 are fixed on the sidewall of guide rail 25, are oppositely arranged with the movement output end (i.e. mover 230) of voice coil motor 23.Wherein, grating scale sensor 26, for feeding back the displacement of voice coil motor 23 movement output end and velocity information, is convenient to the elongation of control system to voice coil motor 23 movement output end and is controlled; Photoelectric limit switch 27 is for limiting the minimum and maximum movement travel of voice coil motor 23.
The movement output end of voice coil motor 23 is the movement output end of straight line driving mechanism.First straight line driving mechanism 21 is connected with the little axle head of main shaft 31 along first axle 410 with the second axis 420 direction respectively with the movement output end of the second straight line driving mechanism 22, and drive shaft 31 swings relative to casing 1 on catoptron movable frame 4.Particularly, the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 is flexibly connected with the little axle head of main shaft 31 by ball pivot.In actual applications, both can, by the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 respectively by a ball pivot joint, be connected on main shaft 31 one on the other, as shown in Figure 7; Also the movement output end of the first straight line driving mechanism 21 and the second straight line driving mechanism 22 can be connected to the same plane on main shaft 31, as shown in Figure 8.
When main shaft 31 is in equilibrium state, when namely main shaft 31 axle center is vertical direction, the movement output direction of two straight line driving mechanisms is orthogonal.The movement output end of the first straight line driving mechanism 21 produces the kinetic energy pushing away or draw along first axle 410 direction, and drive shaft 31 swings around the second axis 420 on catoptron movable frame 4; The movement output end of the second straight line driving mechanism 22 produces the kinetic energy pushing away or draw along the second axis 420 direction, and drive shaft 31 swings around first axle 410 on catoptron movable frame 4.
In the process that drive shaft 31 swings, it is restriction mutually between the movement output end of two straight line driving mechanisms, when the movement output end of one of them straight line driving mechanism extends or shrinks, because the movement output end being subject to another straight line driving mechanism extends quantitative limitation, the kinetic energy of sideshake can be produced, make self to swing around the vertical axis of movable frame 24, also make another straight line driving mechanism swing simultaneously.Therefore, in the swing process of main shaft 31, first straight line driving mechanism 21 and the second straight line driving mechanism 22 all can swing in the horizontal plane, its kinetic energy exported is not keep consistent with first axle 410 and the second axis 420 direction, and the movement output end of two straight line driving mechanisms is also not keep vertical.But, due to the restriction by catoptron movable frame 4, main shaft 31 can only swing around first axle 410 and the second axis 420, therefore, two straight line driving mechanism actings in conjunction, drive shaft 31 carries out three-dimensional rotation swing on catoptron movable frame 4 centered by the intersection point of first axle 410 and the second axis 420.
In motion process, each group elongation data of first straight line driving mechanism 21 and the second straight line driving mechanism 22, the equal correspondence three-dimensional oscillating position in main shaft 31 axle center, namely a corresponding normal angles of catoptron 33, correspondingly, the position of laser beam on PSD position transducer 5 that also corresponding generating laser 34 is launched.Therefore, the PSD position transducer 5 be positioned at below mirror axis mechanism 3 can directly feed back the three-dimensional normal orientation of catoptron 33.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides is two input two output systems, by controlling the elongation of two linear voice coil motors 23 respectively, and then controls the normal orientation of catoptron 33.Because voice coil motor 23 has very high acceleration, so the sweep velocity of catoptron 33 can be very fast.In some scanning platform systems in the prior art, because the motion of two motors and the motion of catoptron normal direction are not linear corresponding relation, there is coupling between the two simultaneously; Again due to the rotation center that catoptron is not fixed, rotation center cannot overlap with reflection spot, causes the equation of motion being difficult to be solved two motors by the equation of motion of given reflection ray.
But in embodiments of the present invention, rotation center is fixing, and reflection spot overlaps with rotation center, relevant mathematical model can be simple a lot.On motion control method, the information of discretize PSD position transducer 5, makes the elongation that corresponding two voice coil motors 23 of each discrete point on PSD position transducer 5 are unique, and sets up tables of data.In working control, find the often group extended length of two voice coil motors 23 corresponding with it by the equation of motion of the given reflection ray of discretize, the equation of motion of two voice coil motors 23 corresponding with the reflection ray equation of motion can be simulated by the discrete point of correspondence.In a kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides, scanning accuracy depends primarily on the verticality of through hole 310 of the precision of PSD position transducer 5 and grating scale sensor 26, the reflecting surface of catoptron 33 and main shaft 31 and the distance error between the reflecting surface of catoptron 33 and catoptron rotation center (i.e. the intersection point of first axle 410 and the second axis 420).
Because PSD position transducer 5 can realize improvement by selecting different product types with the precision of grating scale sensor 26, the reflecting surface of catoptron 33 and the distance error between rotation center can overcome by making first axle 410 and the second axis 420 place plane overlap with reflecting surface, therefore do not repeat them here.In prior art, the error of PSD position transducer 5 can reach several microns, and the precision of grating scale sensor 26 can reach Nano grade.
As shown in Figure 9, present invention also offers a kind of method of calibrating the error of perpendicularity of described two-freedom high speed parallel scan platform, particularly, described verticality refers to the verticality of the reflecting surface of catoptron 33 and the through hole 310 of main shaft 31.
Described error of perpendicularity calibration steps specifically comprises the following steps:
S1, along a straight line set gradually projecting plane 61, adjusting pole 62 and adjustment platform 63, main shaft 31 is fixed on adjusting pole 62, one generating laser 7 is fixed on adjustment platform 63, the end face of the large axle head of laser beam directive main shaft 31 that generating laser 7 is launched; Wherein, described adjusting pole 62 has the adjustment degree of freedom of two sense of rotation, is respectively used to the horizontal and vertical direction adjusting main shaft 31 axle center; Described adjustment platform 63 has the adjustment degree of freedom of three translation directions, is respectively used to adjust the displacement of generating laser 7 in X-axis, Y-axis and Z-direction.
S2, by adjusting pole 62 and adjustment platform 63, adjust the axial direction of main shaft 31 and the position of generating laser 7 respectively, the laser beam that generating laser 7 is launched, through the through hole 310 in main shaft 31 axle center, projects on projecting plane 61; By tentatively fixing for the position of main shaft 31 and generating laser 7; Further, finely tuned by the axial direction of adjusting pole 62 pairs of main shafts 31, make the subpoint P brightness of laser beam on projecting plane 61 reach maximum, now show that the through hole 310 direction registration in laser beam direction and main shaft 31 axle center is the highest; After adjustment, main shaft 31 is locked on adjusting pole 62.
S3, be arranged on main shaft 31 by catoptron 33 and mirror support 32 by described four levelling bolts 35, now laser beam can be reflected by catoptron 33; By screwing or loosening levelling bolt 35, finely tune the minute surface direction of catoptron 33, the laser beam that generating laser 7 is launched returns along former road.
Adopt said method to correct, the through hole 310 of the minute surface of catoptron 33 and main shaft 31 can be made to have very high verticality.Wherein, in trimming process, the distance L between the minute surface of catoptron 33 and laser reflector 7 is larger, and Adjustment precision is higher, and the verticality that correction of a final proof goes out is also higher.
A kind of two-freedom high speed parallel scan platform that the embodiment of the present invention provides adopts simple reflector structure, only needs primary event to complete scanning work, avoids bimirror and reflect the error enlarge-effect brought.Meanwhile, the present invention adopts two input two export structures, and in control, comparatively prior art is easily a lot; Additionally use three groups of X-Y tower structures, larger rigidity and deflection angle can be had; Realize closed-loop owing to have employed Two-dimensional PSD position transducer as the feedback assembly of catoptron normal direction position again, very high precision can be reached.A kind of two-freedom high speed parallel scan platform provided by the invention has that precision is high, rigidity is large, the feature that load-bearing capacity is strong.
The above embodiment only have expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (9)
1. a two-freedom high speed parallel scan platform, is characterized in that, comprises casing and the straight line driving mechanism be installed in casing, mirror axis mechanism, catoptron movable frame and PSD position transducer;
Described straight line driving mechanism comprises voice coil motor, movable frame and guide rail; Described movable frame is rotatably connected on casing, and described guide rail is rotatably connected on movable frame, and described voice coil motor is fixed in guide rail;
Described mirror axis mechanism comprises main shaft, catoptron, mirror support, levelling bolt and generating laser, described main shaft is the multidiameter that one end diameter larger one end diameter is less, its axle center place has the through hole of an axis, described catoptron is fixed on mirror support, mirror support is fixed on the end face of the large axle head of main shaft by multiple levelling bolt, described generating laser is fixed in the through hole at spindle axis place, through hole is passed along the axle center of main shaft in its Laser emission direction, points to the little axle head of main shaft;
Described catoptron movable frame comprises inside casing and housing, and the large axle head of described main shaft is rotatably connected in the middle part of inside casing around first axle, and described inside casing is rotatably connected in the middle part of housing around the second axis, and described housing is fixed on casing; Wherein, first axle and the second axis are positioned at same plane and mutually orthogonal;
Described PSD position transducer is fixed on casing, is oppositely arranged with the little axle head of main shaft;
Two straight line driving mechanisms are movably installed in casing, be respectively the first straight line driving mechanism and the second straight line driving mechanism, described first straight line driving mechanism is connected with main shaft along first axle with the second axis direction respectively with the movement output end of the second straight line driving mechanism, and drive shaft swings relative to casing on catoptron movable frame.
2. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, described straight line driving mechanism also comprises the grating scale sensor, the photoelectric limit switch that are fixed in guide rail, and the movement output end of described grating scale sensor and photoelectric limit switch and voice coil motor is oppositely arranged.
3. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, the movement output end of described voice coil motor is connected by ball pivot with main shaft.
4. two-freedom high speed parallel scan platform according to claim 1, is characterized in that, be provided with rubber sheet gasket between described mirror support and main shaft.
5. two-freedom high speed parallel scan platform according to claim 1, is characterized in that, the minute surface of described catoptron is perpendicular to the axle center of main shaft.
6. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, described first axle and the second axis are all positioned on the minute surface of catoptron.
7. two-freedom high speed parallel scan platform according to claim 1, it is characterized in that, described mirror support is fixed on the end face of the large axle head of main shaft by four levelling bolts, and described four screws are uniformly distributed in the edge of mirror support.
8. a calibration steps for the error of perpendicularity of two-freedom high speed parallel scan platform as claimed in claim 1, is characterized in that, comprise the following steps:
S1, set gradually projecting plane, adjusting pole and adjustment platform along a straight line, main shaft is fixed on adjusting pole, generating laser is fixed on adjustment platform, the end face of the large axle head of laser beam directive main shaft that laser transmitter projects is gone out;
S2, by adjusting pole and adjustment platform, the adjustment axial direction of main shaft and the position of generating laser, the laser beam that laser transmitter projects is gone out, through the through hole of spindle axis, projects on projecting plane;
S3, be arranged on main shaft by catoptron and mirror support by multiple levelling bolt, by screwing or loosening levelling bolt, finely tune the minute surface direction of catoptron, the laser beam that laser transmitter projects is gone out returns along former road.
9. method according to claim 8, is characterized in that, described S2 is also comprised and being finely tuned by the axial direction of adjusting pole to main shaft, makes laser beam projection brightness on the projection surface reach maximum.
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| CN109771065A (en) * | 2017-11-13 | 2019-05-21 | 上海申雕数控机械有限公司 | A kind of Novel five-axis artificial tooth processing machine AB axle construction |
| CN114346434A (en) * | 2022-01-14 | 2022-04-15 | 深圳市优控激光科技有限公司 | Light guide module and laser welding gun |
| CN115933162B (en) * | 2022-09-22 | 2024-03-12 | 中国科学院长春光学精密机械与物理研究所 | Bearing device and micro-scanning super-resolution system |
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| CN102935639A (en) * | 2012-10-17 | 2013-02-20 | 燕山大学 | Triple-claw 3 SPR+3RPS type series-parallel robot |
| CN203178569U (en) * | 2013-03-21 | 2013-09-04 | 广州中国科学院先进技术研究所 | Two-freedom-degree high speed parallel scanning platform |
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| EP2154558A1 (en) * | 2007-05-31 | 2010-02-17 | NHK Spring CO., LTD. | Optical scanning actuator |
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|---|---|---|---|---|
| CN102935639A (en) * | 2012-10-17 | 2013-02-20 | 燕山大学 | Triple-claw 3 SPR+3RPS type series-parallel robot |
| CN203178569U (en) * | 2013-03-21 | 2013-09-04 | 广州中国科学院先进技术研究所 | Two-freedom-degree high speed parallel scanning platform |
Non-Patent Citations (1)
| Title |
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| 《并联式四自由度定位平台误差分析》;李宁宁等;《机器人》;20080531;第37卷(第3期);223-230 * |
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