CN104793334B - A kind of coarse-fine coupling optical scanning means of cascade - Google Patents
A kind of coarse-fine coupling optical scanning means of cascade Download PDFInfo
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- CN104793334B CN104793334B CN201510152371.6A CN201510152371A CN104793334B CN 104793334 B CN104793334 B CN 104793334B CN 201510152371 A CN201510152371 A CN 201510152371A CN 104793334 B CN104793334 B CN 104793334B
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Abstract
The present invention relates to a kind of cascade coarse-fine coupling optical scanning means, along optical axis direction by rotating prism arrangement and orthogonal beat optical flat system forms, described rotation prism arrangement drives two prism wedges to rotate about the z axis respectively using two rotating stepper motors and realizes coarse scanning；Orthogonal beat optical flat system drives two optical flats around Y-axis with around X-axis beat using two rotating stepper motors respectively, realizes displacement translation in subrange for the light beam by the displacement bias of deflecting light beams, meets fine scanning and require；Two sets of prism systems of described rotation prism arrangement are formed by base, rotating stepper motor, encoder, prism wedge, picture frame, worm gear, worm screw and mirror holder, described orthogonal beat flat-panel systems are made up of second base, the 3rd mirror holder, the 3rd rotating stepper motor, the first plane mirror, the 3rd picture frame, the 3rd encoder, the 4th encoder, the 4th picture frame, the second plane mirror, the 4th rotating stepper motor and the 4th mirror holder, the easily controllable direction of beam propagation of the present invention, easy to control.
Description
Technical field
The present invention relates to optical scanning system is and in particular to a kind of rotation biprism and orthogonal beat optical flat are integrated
High-precision optical scanning means.
Background technology
Rotation biprism, as a kind of typical light-beam scanner, has compact conformation, rotary inertia is little, dynamic property
Good the features such as, can be widely applied to laser communication, micro structure processing, the field such as biomedicine, military weapon.Double by rotation
Prism can realize the hi-Fix of light beam.Formerly technology（The patents such as Yun Maojin, the patent No.：200310108487.7）Mention
When rotation biprism is used for laser communication field, precision can reach milliradian magnitude.Because prism can produce peace when mounted
Dress error, such as prisms tilted or bearing tilt, and have impact on scan tracing precision.Therefore when high accuracy scans, double ribs to rotation
In mirror system, the manufacture of prism and the installation of system propose higher requirement.
Formerly technology（Mechanical engineering journal, 01 phase in 2009, volume 45, page 200, Li Anhu《Heavy caliber Beam Scanner is swept
Imaging apparatus》）The scanning accuracy of sub-micro radian can be realized with orthogonal beat biprism, be mainly used in light beam and point to adjustment；Formerly
Technology（The patents such as Pan Yong, the patent No.：2012101172862）Orthogonal flat-bed scanning device is proposed, it is possible to achieve micron-sized position
Transposition is whole.It is sometimes desirable to being implemented around partial high-precision scanning in impact point and not changing in pencil tracing and scanning process
The sensing of light beam, this is a difficult problem for system design.For example when processing laser micropore, in order to ensure the centrad of laser hole, use
It is desirable to laser produces micro-displacement and keeps direction constant in laser processing procedure.
In order to solve the problems, such as laser coarse-fine coupling tracking and scanning, formerly technology（The patents such as Li Anhu, the patent No.：
201210439061.9）Mention cascade prism coarse-fine coupling scanning means, but this apparatus structure is complicated, and this device is all
It is used for adjusting light beam sensing it is impossible to the light beam translation meeting in subrange requires.And in actual applications, a lot of occasions need
Realize fine adjustment of displacement, orthogonal beat optical flat just can meet this requirement, as in laser micropore processing
Application etc..
Content of the invention
It is an object of the invention to proposing a kind of coarse-fine coupling optical scanning means of cascade, described device includes rotating double ribs
Mirror and orthogonal optical flat board two parts.When rotation biprism is used for coarse scanning in whole audience region, orthogonal optical flat board can be in office
Produce the displacement translation of higher precision near portion's impact point, and do not change light beam scanning and point to, be particularly well-suited to laser on a large scale
The occasions such as retrofit.
The present invention provide one kind cascade coarse-fine coupling optical scanning means, along optical axis direction by rotate prism arrangement and
Orthogonal beat optical flat system composition, described rotation prism arrangement drives two wedges respectively using two rotating stepper motors
Shape prism rotates about the z axis realizes coarse scanning；Orthogonal beat optical flat system drives two respectively using two rotating stepper motors
Individual optical flat, around Y-axis with around X-axis beat, realizes displacement in subrange for the light beam by the displacement bias of the reflected beams
Translation, meets fine scanning and requires；
Described rotation prism arrangement is by first base 1, the first rotating stepper motor 2, the first encoder 3, first wedge
Shape prism 4, the first picture frame 5, the first worm gear 6, the first worm screw 7, the first mirror holder 8, the second rotating stepper motor 9, second encoder
10th, the second prism wedge 11, the second picture frame 12, the second worm gear 13, the second worm screw 14 and the second mirror holder 15 form, the first mirror holder 8
It is provided with the first picture frame 5, the first prism wedge 4 is built on the first picture frame 5, the first picture frame 5 is pressed in inside the first worm gear 6,
First worm gear 6 engages formation worm and gear with the first worm screw 7 and is connected, and position distinguished by the first rotating stepper motor 2 and the first encoder 3
Worm shaft two ends in the first worm screw；Second mirror holder 15 is provided with the second picture frame 17, and the second prism wedge 11 is built in the second mirror
On frame 17, the second picture frame 12 is pressed in inside the second worm gear 13, and the second worm gear 13 engages formation worm and gear with the second worm screw 14
Connect, the second rotating stepper motor 9 and second encoder 10 are respectively positioned at the worm shaft two ends of the second worm screw 14；First mirror holder 8
It is respectively arranged in first base 1 with the second mirror holder 15, and can be along Z axis slide anteroposterior in first base 1, to adjust first
Prism wedge 4 and the distance of the second prism wedge 11；The rotary motion of the first rotating stepper motor 2 is passed through inside the first mirror holder 8
The first worm gear 6 and the first worm screw 7 is delivered to the first picture frame 5 so that the first picture frame 5 rotates about the z axis, and then drive the first wedge shape
Prism 4 rotates about the z axis；The second worm gear 13 and the within the second mirror holder 15 are passed through in the rotary motion of the second rotating stepper motor 9
Two worm screws 14 are delivered to the second picture frame 12 so that the second picture frame 12 rotates about the z axis, and then drive the second prism wedge 11 about the z axis
Rotation；
Described orthogonal beat optical flat system by second base 16, the 3rd mirror holder 17, the 3rd rotating stepper motor 18,
One plane mirror 19, the 3rd picture frame 20, the 3rd encoder 21, the 4th encoder 22, the 4th picture frame 23, the second plane mirror the 24, the 4th
Rotating stepper motor 25 and the 4th mirror holder 26 form, and described 3rd mirror holder 17 is provided with the first rotary shaft, and the 3rd picture frame 20 is fixing
In described first rotary shaft, the 3rd rotating stepper motor 18 and the 3rd encoder 21 are respectively arranged in the first rotating shaft terminal,
First plane mirror 19 is built on the 3rd picture frame 20；Described 4th mirror holder 26 is provided with the second rotary shaft, and the 4th picture frame 23 is fixing
Lie in described second rotary shaft, the 4th rotating stepper motor 25 and the 4th encoder 22 are respectively arranged in the second rotary shaft two
End, the second plane mirror 24 is built on the 4th picture frame 23；3rd mirror holder 17 and the 4th mirror holder 26 are respectively arranged in second base 16
On, and can be along Z axis slide anteroposterior in second base 16, the rotary motion of the 3rd rotating stepper motor 18 is passed through first and is rotated
Axle is delivered on the 3rd picture frame 20, makes the 3rd picture frame 20 around Y-axis beat, drives the first plane mirror 19 around Y-axis beat；4th
The rotary motion of rotating stepper motor 25 is delivered on the 4th picture frame 23 by the second rotary shaft, makes the 4th picture frame 23 around X-axis
Beat, drives the second plane mirror 24 around X-axis beat；
Described first rotating stepper motor 2, the second rotating stepper motor 9, the 3rd rotating stepper motor 18 and the 4th rotation
Motor 25 connects kinetic control system by data communication mouth respectively, and described kinetic control system connects PC.
The present invention cascade coarse-fine coupling optical scanning means ultimate principle be：
1. combine accompanying drawing 3, Fig. 4 explanation control system principle：Target trajectory point can be converted into seat by kinetic control system
Punctuate.Data transmission interface will move
Control system is connected on PC, realizes kinetic control system and PC communication.In conjunction with accompanying drawing 3, coarse scanning to be realized, exist first
In the case of known coarse scanning target trajectory point, target trajectory point is converted into by coordinate by kinetic control systemAnd pass
Defeated on PC.PC is according to scanning coordinate, calculate the first prism wedge 4 and the rotation of the second prism wedge 11 respectively
GyrationAnd rotary speed data, and it is transferred in kinetic control system by data transmission interface, motor control
System is according to receivingAnd rotating speed data, control the first rotating stepper motor 2 and the second rotating stepper motor 9
Rotation, realize coarse scanning.In essence scanning, in conjunction with accompanying drawing 4, first in the case of known essence scanning target trajectory point, lead to
Cross kinetic control system and target trajectory point is converted into coordinateAnd be transferred on PC.PC is according to scanning coordinate
Calculate the shift offset of light beam needs, further according to the pass of orthogonal beat double flat plate deflection angle and deflecting light beams translation
System, calculates the first plane mirror 19 and the deflection angle of the second plane mirror 24And beat speed data, and by number
It is transferred in kinetic control system according to coffret, kinetic control system is according to receivingWith beat velocity information,
Control the rotation of the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25, realize the translation of light beam micrometric displacement.
2., in coarse scanning, according to vector refraction theorem, when light beam is when rotating biprism center incident, can push away
Go out the direction of light beam emergent light after rotating biprism, during the anglec of rotation of regulation two prism wedges, thus it is possible to vary emergent light
Direction.The first prism wedge 4 is driven to rotate about the z axis by the first rotating stepper motor 2 in this device, the second rotation stepping electricity
Machine 9 drives the second prism wedge 11 to rotate around Z axis, and the anglec of rotation is respectively、, thus realizing the coarse scan in certain area
Retouch.
3. during essence scanning, as shown in Figure 2, when light beam passes through plane mirror, the direction of propagation will not change, but light beam can be partially
Move.（a）Figure represents when the first plane mirror 19 is around Y-axis beat, after incident beam passes through the first plane mirror 19, outgoing beam is propagated
Direction is constant, and has certain side-play amount in the X-axis direction；In the same manner,（b）Figure expression is inclined around Y-axis when the second plane mirror 24
Pendulum, after incident beam passes through the second plane mirror 24, the outgoing beam direction of propagation is constant, and has certain in the Y-axis direction
Side-play amount.In this device, the first plane mirror 19 is driven around Y-axis beat by the 3rd rotating stepper motor 18, light beam passes through
Along X-axis displacement bias after first plane mirror 19；4th rotating stepper motor 25 drives the second plane mirror 24 around X-axis beat, light beam pass through the second plane mirror 21 after along Y-axis displacement bias.Realize a small range essence scanning.
The beneficial effects of the present invention is：
1. the present invention can achieve coarse-fine scanning, and rotation prism arrangement can realize coarse scanning, orthogonal beat optical flat
Essence scanning can be realized, two parts can work it is also possible to work independently simultaneously, meet different coarse-fine scanning accuracies and require.
2. the easily controllable direction of beam propagation of the present invention.In the case of not changing direction of beam propagation, double by changing
The deflection angle of flat board, realizes light beam respectively along the micro-displacement of X-axis and Y directionWith.
3. the present invention is easy to control.This device adopts independent control mode, and coarse scanning mechanism and essence can be controlled respectively to sweep
Retouch mechanism, adopt open loop control mode, easy to control, control process is simple simultaneously.
Brief description
Fig. 1 is cascade of the present invention coarse-fine coupling scanning means schematic diagram, and front portion is rotation biprism, afterwards one
Part is orthogonal beat flat board.、It is the anglec of rotation of prism,、It is the deflection angle of flat board.
Fig. 2 is that light beam passes through produce corresponding side-play amount during beat flat boardWithPrinciple schematic.
Fig. 3 is cascade of the present invention coarse-fine coupling scanning means control section flow chart.Sketch the control of this device
Method processed.
Fig. 4 is cascade of the present invention coarse-fine coupling scanning means control section flow chart.Sketch the control of this device
Method processed.
In figure label：1- first base；2- first rotating stepper motor；3- first encoder；4- first prism wedge；5-
First picture frame；6- first worm gear；7- first worm screw；8- first mirror holder；9- second rotating stepper motor；10- second encoder；
11- second prism wedge；12- second picture frame；13- second worm gear；14- second worm screw；15- second mirror holder；16- second base；
17- the 3rd picture frame；18- the 3rd rotating stepper motor；19- first plane mirror；20- the 3rd picture frame；21- the 3rd encoder；22-
Four encoders；23- the 4th picture frame；24- second plane mirror；25- the 4th rotating stepper motor；26- the 4th mirror holder.
Specific embodiment
Below by each accompanying drawing, using the composition cascading coarse-fine coupling optical scanning means and coarse-fine sweeping is realized to the present invention
The process of retouching is described in further detail, but scope of patent protection not limited to this of the present invention.
Cascade shown in Fig. 1 coarse-fine coupling optical scanning means mainly includes two parts, and Part I is the double rib of rotation
Mirror system, Part II is orthogonal beat flat-panel systems.
Described rotation prism arrangement is by first base 1, the first rotating stepper motor 2, the first encoder 3, first wedge
Shape prism 4, the first picture frame 5, the first worm gear 6, the first worm screw 7, the first mirror holder 8, the second rotating stepper motor 9, second encoder
10th, the second prism wedge 11, the second picture frame 12, the second worm gear 13, the second worm screw 14 and the second mirror holder 15 form.First mirror holder 8
It is arranged in first base 1 with the second mirror holder 15, can slide in first base 1, to adjust the first prism wedge 4 and second
The distance of prism wedge 11.First rotating stepper motor 2 and the first encoder 3 are arranged on the worm shaft of the first worm screw 7, and first
Worm gear 6 engages formation worm and gear with the first worm screw 7 and is connected, and the first picture frame 5 is pressed on inside the first worm gear 6, the first wedge shape rib
Mirror 4 is built on the first picture frame 5.The first worm gear 6 within the first mirror holder 8 is passed through in the rotary motion of the first rotating stepper motor 2
It is delivered to the first picture frame 5 with the first worm screw 7 so that the first picture frame 5 rotates about the z axis, drive the first prism wedge 4 to rotate about the z axis.
Second rotating stepper motor 9 and second encoder 10 are arranged on the worm shaft of the second worm screw 14, the second worm gear 13 and the second snail
Bar 14 engages and forms worm and gear connection, and the second picture frame 12 is pressed on inside the second worm gear 14, and the second prism wedge 11 is built in
On second picture frame 12.The second worm gear 13 and second within the second mirror holder 15 is passed through in the rotary motion of the second rotating stepper motor 9
Worm screw 14 is delivered to the second picture frame 12 so that the second picture frame 12 rotates about the z axis, drives the second prism wedge 11 to rotate about the z axis.
Described orthogonal beat flat-panel systems are by second base 16, the 3rd mirror holder 17, the 3rd rotating stepper motor 18, first
Plane mirror 19, the 3rd picture frame 20, the 3rd encoder 21, the 4th encoder 22, the 4th picture frame 23, the second plane mirror the 24, the 4th rotation
Turn motor 25 and the 4th mirror holder 26 forms.3rd mirror holder 17 and the 4th mirror holder 26 are arranged in second base 16, Ke Yi
Slide in second base 16, to adjust the distance of the first plane mirror 19 and the second plane mirror 24.3rd rotating stepper motor 18 with
3rd encoder 21 is installed on the rotary shaft, and the 3rd picture frame 20 is fixing on the rotary shaft, and the first plane mirror 19 is built in the 3rd mirror
On frame 20.The rotary motion of the 3rd rotating stepper motor 18 is delivered on the 3rd picture frame 20 by rotary shaft, makes the 3rd picture frame 20
Around Y-axis beat, drive the first plane mirror 19 around Y-axis beat.4th rotating stepper motor 25 and the 4th encoder 22 are installed
On the rotary shaft, the 4th picture frame 23 is fixing on the rotary shaft, and the second plane mirror 24 is built on the 4th picture frame 23.4th rotation step
The rotary motion of stepper motor 25 is delivered on the 4th picture frame 23 by rotary shaft, makes the 4th picture frame 23 around X-axis beat, drives the
Two plane mirrors 24 are around X-axis beat.
The operation principle cascading coarse-fine coupling optical scanning means is as follows：
Controller collection point data to be scanned, and control is sent to rotation prism arrangement and orthogonal beat flat-panel systems
Signal, controls the rotation of the first rotating stepper motor 2 and the second rotating stepper motor 9, realizes coarse scanning.Meanwhile, controller control
Make the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25 rotates, realize essence scanning, reach coarse-fine coupling optical scanning
Purpose.
Coarse-fine coupling optical scanning is completed according to the following step：
1., according to coarse scanning target trajectory point, kinetic control system is by position coordinatesesPassed by data transmission interface
It is delivered on PC, PC is according to coordinate, calculate the first prism wedge 4 and the anglec of rotation of the second prism wedge 11And rotary speed data, it is transferred in kinetic control system by data transmission interface.Further according to essence scanning target
Target trajectory point is converted into coordinate by kinetic control system by tracing pointAnd be transferred on PC.PC is according to scanning
Coordinate, calculate the shift offset of light beam needs, further according to orthogonal beat double flat plate deflection angle and light beam
Translation relation, calculates the first plane mirror 19 and the deflection angle of the second plane mirror 24And beat speed data, and
It is transferred in kinetic control system by data transmission interface.
2. the first rotating stepper motor 2 and the second rotating stepper motor 9 transmit according to motor systemAnd rotation
Rotary speed information, drives the rotation of the first prism wedge 4 and the second prism wedge 11 respectively so that light beam moves in coarse scan domain
Dynamic, realize coarse scanning process.
3. judge scanning light beam whether in smart scanning area, in smart scanning field, then execute the 4th step, not in essence scanning
In domain, then execute the 2nd step.
4. the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25 transmit according to motor systemWith
And rotating speed data, drive the first plane mirror 19 around Y-axis beat and the second plane mirror 24 around X-axis beat respectively so that light beam
In the smart scanning field displacement bias in local, realize smart scanning process.
The coarse-fine coupling optical scanning means of this cascade can be while meeting large area scanning, in local small range
Interior, do not change direction of beam propagation and carry out high accuracy and scan.
The foregoing is only the example that the present invention applies in a scan, those skilled in the art are come
Say, the present invention can have various modifications and variations.All any modifications within the spirit and principles in the present invention, made, equivalent
Replace, improve etc., should be included within the scope of the present invention.
Claims (1)
1. a kind of cascade coarse-fine coupling optical scanning means it is characterised in that along optical axis direction by rotating prism arrangement and orthogonal
Beat optical flat system forms, and described rotation prism arrangement drives two wedge shape ribs respectively using two rotating stepper motors
Mirror rotates about the z axis realizes coarse scanning；Orthogonal beat optical flat system drives two light respectively using two rotating stepper motors
Learn flat board around Y-axis with around X-axis beat, realize displacement in subrange for the light beam by the displacement bias of the reflected beams and put down
Move, meet fine scanning and require；
Described rotation prism arrangement by first base (1), the first rotating stepper motor (2), the first encoder (3), first
Prism wedge (4), the first picture frame (5), the first worm gear (6), the first worm screw (7), the first mirror holder (8), the second rotating stepper motor
(9), second encoder (10), the second prism wedge (11), the second picture frame (12), the second worm gear (13), the second worm screw (14) and
Second mirror holder (15) forms, and the first mirror holder (8) is provided with the first picture frame (5), and the first prism wedge (4) is built in the first picture frame
(5) on, the first picture frame (5) is pressed in the first worm gear (6) inside, and the first worm gear (6) engages formation worm gear snail with the first worm screw (7)
Bar connects, and the first rotating stepper motor (2) and the first encoder (3) are respectively positioned at the worm shaft two ends of the first worm screw；Second mirror
Frame (15) is provided with the second picture frame (17), and the second prism wedge (11) is built on the second picture frame (17), and the second picture frame (12) is pressed
Tight internal in the second worm gear (13), the second worm gear (13) engages formation worm and gear with the second worm screw (14) and is connected, the second rotation
Motor (9) and second encoder (10) are respectively positioned at the worm shaft two ends of the second worm screw (14)；First mirror holder (8) and second
Mirror holder (15) is respectively arranged in first base (1), and can slidably reciprocate in first base (1), to adjust the first wedge shape
Prism (4) and the distance of the second prism wedge (11)；The first mirror holder (8) is passed through in the rotary motion of the first rotating stepper motor (2)
Internal the first worm gear (6) and the first worm screw (7) is delivered to the first picture frame (5) so that the first picture frame (5) rotates about the z axis, and then
The first prism wedge (4) is driven to rotate about the z axis；The rotary motion of the second rotating stepper motor (9) is passed through in the second mirror holder (15)
Second worm gear (13) in portion and the second worm screw (14) is delivered to the second picture frame (12) so that the second picture frame (12) rotates about the z axis, enters
And drive the second prism wedge (11) to rotate about the z axis；
Described orthogonal beat optical flat system by second base (16), the 3rd mirror holder (17), the 3rd rotating stepper motor (18),
First plane mirror (19), the 3rd picture frame (20), the 3rd encoder (21), the 4th encoder (22), the 4th picture frame (23), second flat
Face mirror (24), the 4th rotating stepper motor (25) and the 4th mirror holder (26) composition, described 3rd mirror holder (17) is provided with the first rotation
Rotating shaft, the 3rd picture frame (20) is fixed in described first rotary shaft, the 3rd rotating stepper motor (18) and the 3rd encoder (21)
It is respectively arranged in the first rotating shaft terminal, the first plane mirror (19) is built on the 3rd picture frame (20)；Described 4th mirror holder (26)
Be provided with the second rotary shaft, the 4th picture frame (23) fixation lies in described second rotary shaft, the 4th rotating stepper motor (25) with
4th encoder (22) is respectively arranged in the second rotating shaft terminal, and the second plane mirror (24) is built on the 4th picture frame (23)；The
Three mirror holders (17) and the 4th mirror holder (26) are respectively arranged in second base (16), and can slide back and forth in second base (16)
Dynamic, the rotary motion of the 3rd rotating stepper motor (18) is delivered on the 3rd picture frame (20) by the first rotary shaft, makes the 3rd mirror
Frame (20), around Y-axis beat, drives the first plane mirror (19) around Y-axis beat；The rotation fortune of the 4th rotating stepper motor (25)
Move and be delivered on the 4th picture frame (23) by the second rotary shaft, make the 4th picture frame (23) around X-axis beat, drive the second plane mirror
(24) around X-axis beat；
Described first rotating stepper motor (2), the second rotating stepper motor (9), the 3rd rotating stepper motor (18) and the 4th rotation
Turn motor (25) and respectively kinetic control system is connected by data communication mouth, described kinetic control system connects PC.
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| CN201510152371.6A CN104793334B (en) | 2015-04-02 | 2015-04-02 | A kind of coarse-fine coupling optical scanning means of cascade |
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| CN201510152371.6A CN104793334B (en) | 2015-04-02 | 2015-04-02 | A kind of coarse-fine coupling optical scanning means of cascade |
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