CN104793334A - Cascading coarse-fine data coupling optical scanning device - Google Patents
Cascading coarse-fine data coupling optical scanning device Download PDFInfo
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- CN104793334A CN104793334A CN201510152371.6A CN201510152371A CN104793334A CN 104793334 A CN104793334 A CN 104793334A CN 201510152371 A CN201510152371 A CN 201510152371A CN 104793334 A CN104793334 A CN 104793334A
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Abstract
The invention relates to a cascading coarse-fine data coupling optical scanning device. The cascading coarse-fine data coupling optical scanning device is formed by a rotation double-prism system and an orthogonal deflection optical panel system in the direction of an optical axis; the rotation double-prism system adopts two rotation stepping motors to respectively drive two wedge-shaped prisms to rotate surrounding a Z axis to achieve coarse scanning; the orthogonal deflection optical panel system adopts the two rotation stepping motors to respectively drive two optical panels to deflect surrounding a Y axis and a Z axis; displacement translation of light beams within local ranges through the displacement translation of refraction light beams and an exquisite scanning requirement is satisfied; two sets of prim systems of the rotation double-prism system are both formed by a base, a rotation stepping motor, an encoder, a wedge-shaped prism, an optical frame, a worm gear, a worm and a mirror bracket; the orthogonal deflection optical panel system is formed by a second base, a third mirror bracket, a third rotation stepping motor, a first plane mirror, a third mirror frame, a third encoder, a fourth encoder, a fourth mirror frame, a second plane mirror, a fourth rotation stepping motor and a fourth mirror frame. According to the cascading coarse-fine data coupling optical scanning device, the light beam propagation direction is easy to control and control is convenient.
Description
Technical field
The present invention relates to optical scanning system, be specifically related to a kind ofly rotate biprism and the integrated high-precision optical scanister of orthogonal beat optical flat.
Background technology
Rotate biprism as the typical light-beam scanner of one, the features such as have compact conformation, moment of inertia is little, and dynamic property is good, can be widely used in the field such as laser communication, microstructure processing, biomedicine, military weapon.The hi-Fix of light beam can be realized by rotating biprism.In first technology (patent such as Yun Maojin, the patent No.: 200310108487.7) mention when rotating biprism for laser communication field, precision can reach milliradian magnitude.Because prism can produce alignment error when mounted, as prisms tilted or bearing tilt, have impact on scan tracing precision.Therefore, when high precision scans, higher requirement is proposed to the manufacture of prism and the installation of system in rotation prism arrangement.
The scanning accuracy of sub-micro radian can be realized in first technology (mechanical engineering journal, 01 phase in 2009,45 volumes, the 200th page, Li Anhu " heavy caliber Beam Scanner scanister ") with orthogonal beat biprism, be mainly used in beam-pointing adjustment; In first technology, (patent such as Pan Yong, the patent No.: 2012101172862) propose orthogonal flat-bed scanning device, can realize micron-sized adjustment of displacement.In pencil tracing and scanning process, sometimes need to realize partial high-precision scanning near impact point and do not change the sensing of light beam, this is a difficult problem for system.Such as, when processing laser micropore, in order to ensure the centrad of laser hole, using in laser processing procedure, requiring that laser produces micro-displacement and keeps direction constant.
Follow the tracks of and scanning problem to solve the thick essence coupling of laser, in the first technology (patent such as Li Anhu, the patent No.: 201210439061.9) mention cascade prism thick essence coupling scanister, but this apparatus structure is complicated, and this device is all used to adjust beam-pointing, cannot meet the light beam translation requirement in subrange.And in actual applications, a lot of occasion needs to realize meticulous adjustment of displacement, orthogonal beat optical flat just in time can meet this requirement, as the application etc. in laser micropore processing.
Summary of the invention
The object of the invention is to propose the thick smart coupling optical scanister of a kind of cascade, described device comprises rotation biprism and the dull and stereotyped two parts of orthogonal optical.Rotate biprism when being used for coarse scanning in whole audience region, orthogonal optical flat board can produce more high-precision displacement translation near localized target point, and does not change beam flying and point to, and is specially adapted to the occasion such as Laser focus on a large scale.
The thick smart coupling optical scanister of a kind of cascade provided by the invention, along optical axis direction by rotating prism arrangement and orthogonal beat optical flat system forms, described rotation prism arrangement adopts two rotating stepper motors to drive two prism wedges to rotate around Z axis respectively and realizes coarse scanning; Orthogonal beat optical flat system adopts two rotating stepper motors to drive two optical flats around Y-axis with around X-axis beat respectively, realizes the displacement translation of light beam in subrange, meet meticulous scanning requirement by the displacement bias of deflecting light beams;
Described rotation prism arrangement is by the first base 1, first rotating stepper motor 2, first scrambler 3, first prism wedge 4, first picture frame 5, first worm gear 6, first worm screw 7, first mirror holder 8, second rotating stepper motor 9, second scrambler 10, second prism wedge 11, second picture frame 12, second worm gear 13, second worm screw 14 and the second mirror holder 15 form, first mirror holder 8 is provided with the first picture frame 5, first prism wedge 4 is built on the first picture frame 5, it is inner that first picture frame 5 is pressed in the first worm gear 6, first worm gear 6 and the first worm screw 7 engage and form worm and gear and be connected, first rotating stepper motor 2 and the first scrambler 3 lay respectively at the worm shaft two ends of the first worm screw, second mirror holder 15 is provided with the second picture frame 17, second prism wedge 11 is built on the second picture frame 17, it is inner that second picture frame 12 is pressed in the second worm gear 13, second worm gear 13 and the second worm screw 14 engage and form worm and gear and be connected, and the second rotating stepper motor 9 and the second scrambler 10 lay respectively at the worm shaft two ends of the second worm screw 14, first mirror holder 8 and the second mirror holder 15 are arranged on the first base 1 respectively, and can along Z axis slide anteroposterior on the first base 1, to regulate the distance of the first prism wedge 4 and the second prism wedge 11, the rotary motion of the first rotating stepper motor 2 is delivered to the first picture frame 5 by the first worm gear 6 of the first mirror holder 8 inside and the first worm screw 7, the first picture frame 5 is rotated around Z axis, and then drives the first prism wedge 4 to rotate around Z axis, the rotary motion of the second rotating stepper motor 9 is delivered to the second picture frame 12 by the second worm gear 13 of the second mirror holder 15 inside and the second worm screw 14, the second picture frame 12 is rotated around Z axis, and then drives the second prism wedge 11 to rotate around Z axis,
Described orthogonal beat flat-panel systems is made up of the second base 16, the 3rd mirror holder 17, the 3rd rotating stepper motor 18, first level crossing 19, the 3rd picture frame 20, the 3rd scrambler 21, the 4th scrambler 22, the 4th picture frame 23, second level crossing 24, the 4th rotating stepper motor 25 and the 4th mirror holder 26, described 3rd mirror holder 17 is provided with the first turning axle, 3rd picture frame 20 is fixed on described first turning axle, 3rd rotating stepper motor 18 and the 3rd scrambler 21 are installed on the first rotating shaft terminal respectively, and the first level crossing 19 is built on the 3rd picture frame 20; Described 4th mirror holder 26 is provided with the second turning axle, and the 4th picture frame 23 fixedly lies on described second turning axle, and the 4th rotating stepper motor 25 and the 4th scrambler 22 are installed on the second rotating shaft terminal respectively, and the second level crossing 24 is built on the 4th picture frame 23; 3rd mirror holder 17 and the 4th mirror holder 26 are arranged on the second base 16 respectively, and can along Z axis slide anteroposterior on the second base 16, the rotary motion of the 3rd rotating stepper motor 18 is delivered on the 3rd picture frame 20 by the first turning axle, make the 3rd picture frame 20 around Y-axis beat, drive the first level crossing 19 around Y-axis beat; The rotary motion of the 4th rotating stepper motor 25 is delivered on the 4th picture frame 23 by the second turning axle, makes the 4th picture frame 23 around X-axis beat, drives the second level crossing 24 around X-axis beat;
Described first rotating stepper motor 2, second rotating stepper motor 9, the 3rd rotating stepper motor 18 are connected kinetic control system with the 4th rotating stepper motor 25 respectively by data communication mouth, and described kinetic control system connects PC.
The ultimate principle of the thick smart coupling optical scanister of cascade of the present invention is:
1. by reference to the accompanying drawings 3, Fig. 4 illustrates control system principle: target trajectory point can be converted into coordinate points by kinetic control system
.Kinetic control system is connected on PC by data transmission interface, realizes kinetic control system and communicates with PC.By reference to the accompanying drawings 3, coarse scanning be realized, first when known coarse scanning target trajectory point, by kinetic control system, target trajectory point is converted into coordinate
and be transferred on PC.PC is according to scanning coordinate
, calculate the anglec of rotation of the first prism wedge 4 and the second prism wedge 11 respectively
and rotary speed data, and be transferred in kinetic control system by data transmission interface, kinetic control system is according to receiving
and rotating speed data, control the rotation of the first rotating stepper motor 2 and the second rotating stepper motor 9, realize coarse scanning.When essence scans, by reference to the accompanying drawings 4, first when known essence scanning target trajectory point, by kinetic control system, target trajectory point is converted into coordinate
and be transferred on PC.PC is according to scanning coordinate
calculate the shift offset that light beam needs
, then according to the relation of the two dull and stereotyped deflection angle of orthogonal beat and deflecting light beams translation, calculate the deflection angle of the first level crossing 19 and the second level crossing 24
and beat speed data, and be transferred in kinetic control system by data transmission interface, kinetic control system is according to receiving
with beat velocity information, control the rotation of the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25, realize the translation of light beam micrometric displacement.
2., when coarse scanning, according to vector refraction theorem, when light beam is from rotation biprism center incident, the direction of light beam by emergent light after rotation biprism can be released, when regulating the anglec of rotation of two prism wedges, the direction of emergent light can be changed.Drive the first prism wedge 4 to rotate around Z axis by the first rotating stepper motor 2 in this device, the second rotating stepper motor 9 drives the second prism wedge 11 to rotate around Z axis, and the anglec of rotation is respectively
,
, thus realize the coarse scanning in certain area.
3. during essence scanning, as shown in Figure 2, when light beam is by level crossing, the direction of propagation can not change, but light beam can offset.A () figure represents when the first level crossing 19 is around Y-axis beat
, incident beam is by after the first level crossing 19, and the outgoing beam direction of propagation is constant, and has certain side-play amount in the X-axis direction
; In like manner, (b) figure represents when the second level crossing 24 is around Y-axis beat
, incident beam is by after the second level crossing 24, and the outgoing beam direction of propagation is constant, and has certain side-play amount in the Y-axis direction
.Drive the first level crossing 19 around Y-axis beat by the 3rd rotating stepper motor 18 in this device
, light beam by after the first level crossing 19 along X-axis displacement bias
; 4th rotating stepper motor 25 drives the second level crossing 24 around X-axis beat
, light beam by after the second level crossing 21 along Y-axis displacement bias
.Realize essence scanning among a small circle.
Beneficial effect of the present invention is:
1. the present invention can realize thick essence scanning, and rotating prism arrangement can realize coarse scanning, and orthogonal beat optical flat can realize essence scanning, and two parts can work simultaneously, also can work alone, and meets different thick smart scanning accuracy requirement.
2. the present invention is easy to control direction of beam propagation.When not changing direction of beam propagation, by changing two dull and stereotyped deflection angles, realize light beam respectively along the micro-displacement of X-axis and Y direction
with
.
3. the present invention controls conveniently.This device adopts independent control mode, can control coarse scanning mechanism and smart scanning mechanism respectively, adopt open loop control mode simultaneously, and it is convenient to control, and control procedure is simple.
Accompanying drawing explanation
Fig. 1 is cascade of the present invention thick essence coupling scanister schematic diagram, and front portion rotates biprism, and rear portion is that orthogonal beat is dull and stereotyped.
,
the anglec of rotation of prism,
,
it is dull and stereotyped deflection angle.
Fig. 2 is that light beam can produce corresponding side-play amount by during beat flat board
with
principle schematic.
Fig. 3 is cascade of the present invention thick essence coupling scanister control section process flow diagram.Sketch the control method of this device.
Fig. 4 is cascade of the present invention thick essence coupling scanister control section process flow diagram.Sketch the control method of this device.
Number in the figure: 1-first base; 2-first rotating stepper motor; 3-first scrambler; 4-first prism wedge; 5-first picture frame; 6-first worm gear; 7-first worm screw; 8-first mirror holder; 9-second rotating stepper motor; 10-second scrambler; 11-second prism wedge; 12-second picture frame; 13-second worm gear; 14-second worm screw; 15-second mirror holder; 16-second base; 17-the 3rd picture frame; 18-the 3rd rotating stepper motor; 19-first level crossing; 20-the 3rd picture frame; 21-the 3rd scrambler; 22-the 4th scrambler; 23-the 4th picture frame; 24-second level crossing; 25-the 4th rotating stepper motor; 26-the 4th mirror holder.
Embodiment
Below by each accompanying drawing the present invention adopted to the composition of the thick smart coupling optical scanister of cascade and realize thick smart scanning process and be described in further detail, but scope of patent protection of the present invention is not limited thereto.
The thick smart coupling optical scanister of cascade shown in Fig. 1 mainly comprises two parts, and Part I is for rotating prism arrangement, and Part II is orthogonal beat flat-panel systems.
Described rotation prism arrangement is made up of the first base 1, first rotating stepper motor 2, first scrambler 3, first prism wedge 4, first picture frame 5, first worm gear 6, first worm screw 7, first mirror holder 8, second rotating stepper motor 9, second scrambler 10, second prism wedge 11, second picture frame 12, second worm gear 13, second worm screw 14 and the second mirror holder 15.First mirror holder 8 and the second mirror holder 15 are arranged on the first base 1, can slide on the first base 1, to regulate the distance of the first prism wedge 4 and the second prism wedge 11.First rotating stepper motor 2 and the first scrambler 3 are arranged on the worm shaft of the first worm screw 7, and the first worm gear 6 and the first worm screw 7 engage and form worm and gear and be connected, and it is inner that the first picture frame 5 is pressed on the first worm gear 6, and the first prism wedge 4 is built on the first picture frame 5.The rotary motion of the first rotating stepper motor 2 is delivered to the first picture frame 5 by the first worm gear 6 of the first mirror holder 8 inside and the first worm screw 7, the first picture frame 5 is rotated around Z axis, drives the first prism wedge 4 to rotate around Z axis.Second rotating stepper motor 9 and the second scrambler 10 are arranged on the worm shaft of the second worm screw 14, second worm gear 13 and the second worm screw 14 engage and form worm and gear and be connected, it is inner that second picture frame 12 is pressed on the second worm gear 14, and the second prism wedge 11 is built on the second picture frame 12.The rotary motion of the second rotating stepper motor 9 is delivered to the second picture frame 12 by the second worm gear 13 of the second mirror holder 15 inside and the second worm screw 14, the second picture frame 12 is rotated around Z axis, drives the second prism wedge 11 to rotate around Z axis.
Described orthogonal beat flat-panel systems is made up of the second base 16, the 3rd mirror holder 17, the 3rd rotating stepper motor 18, first level crossing 19, the 3rd picture frame 20, the 3rd scrambler 21, the 4th scrambler 22, the 4th picture frame 23, second level crossing 24, the 4th rotating stepper motor 25 and the 4th mirror holder 26.3rd mirror holder 17 and the 4th mirror holder 26 are arranged on the second base 16, can slide on the second base 16, to regulate the distance of the first level crossing 19 and the second level crossing 24.3rd rotating stepper motor 18 and the 3rd scrambler 21 are installed on the rotary shaft, and the 3rd picture frame 20 is fixing on the rotary shaft, and the first level crossing 19 is built on the 3rd picture frame 20.The rotary motion of the 3rd rotating stepper motor 18 is delivered on the 3rd picture frame 20 by turning axle, makes the 3rd picture frame 20 around Y-axis beat, drives the first level crossing 19 around Y-axis beat.4th rotating stepper motor 25 and the 4th scrambler 22 are installed on the rotary shaft, and the 4th picture frame 23 is fixing on the rotary shaft, and the second level crossing 24 is built on the 4th picture frame 23.The rotary motion of the 4th rotating stepper motor 25 is delivered on the 4th picture frame 23 by turning axle, makes the 4th picture frame 23 around X-axis beat, drives the second level crossing 24 around X-axis beat.
The principle of work of the thick smart coupling optical scanister of cascade is as follows:
The point data that controller collection will scan, and control signal is sent to rotation prism arrangement and orthogonal beat flat-panel systems, control the rotation of the first rotating stepper motor 2 and the second rotating stepper motor 9, realize coarse scanning.Meanwhile, controller controls the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25 rotates, and realizes essence scanning, reaches the object of thick smart coupling optical scanning.
Thick smart coupling optical scanning is completed according to the following step:
1., according to coarse scanning target trajectory point, kinetic control system is by position coordinates
be delivered on PC by data transmission interface, PC is according to coordinate
, calculate the anglec of rotation of the first prism wedge 4 and the second prism wedge 11
and rotary speed data, be transferred in kinetic control system by data transmission interface.Again according to essence scanning target trajectory point, by kinetic control system, target trajectory point is converted into coordinate
and be transferred on PC.PC is according to scanning coordinate
, calculate the shift offset that light beam needs
, then according to the two dull and stereotyped deflection angle of orthogonal beat and light beam translation relation, calculate the deflection angle of the first level crossing 19 and the second level crossing 24
and beat speed data, and be transferred in kinetic control system by data transmission interface.
2. the first rotating stepper motor 2 and the second rotating stepper motor 9 transmit according to kinematic system
and rotating speed data, drive the rotation of the first prism wedge 4 and the second prism wedge 11 respectively, light beam is moved in coarse scan domain, realizes coarse scanning process.
3. judge scanning light beam whether in smart scanning area, in smart scanning field, then perform the 4th step, not in smart scanning field, then perform the 2nd step.
4. the 3rd rotating stepper motor 18 and the 4th rotating stepper motor 25 transmit according to kinematic system
and rotating speed data, drive the first level crossing 19 respectively around Y-axis beat and the second level crossing 24 around X-axis beat, make light beam in the smart scanning field displacement bias in local
, realize smart scanning process.
The thick smart coupling optical scanister of this cascade can while meeting large area scanning, local among a small circle in, do not change direction of beam propagation and carry out high precision scanning.
The foregoing is only the example that the present invention applies in a scan, for those skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (1)
1. the thick smart coupling optical scanister of cascade, it is characterized in that described rotation prism arrangement adopts two rotating stepper motors to drive two prism wedges to rotate around Z axis respectively and realizes coarse scanning along optical axis direction by rotating prism arrangement and orthogonal beat optical flat system forms; Orthogonal beat optical flat system adopts two rotating stepper motors to drive two optical flats around Y-axis with around X-axis beat respectively, realizes the displacement translation of light beam in subrange, meet meticulous scanning requirement by the displacement bias of deflecting light beams;
Described rotation prism arrangement is by the first base (1), first rotating stepper motor (2), first scrambler (3), first prism wedge (4), first picture frame (5), first worm gear (6), first worm screw (7), first mirror holder (8), second rotating stepper motor (9), second scrambler (10), second prism wedge (11), second picture frame (12), second worm gear (13), second worm screw (14) and the second mirror holder (15) composition, first mirror holder (8) is provided with the first picture frame (5), first prism wedge (4) is built on the first picture frame (5), it is inner that first picture frame (5) is pressed in the first worm gear (6), first worm gear (6) and the first worm screw (7) engage and form worm and gear and be connected, first rotating stepper motor (2) and the first scrambler (3) lay respectively at the worm shaft two ends of the first worm screw, second mirror holder (15) is provided with the second picture frame (17), second prism wedge (11) is built on the second picture frame (17), it is inner that second picture frame (12) is pressed in the second worm gear (13), second worm gear (13) and the second worm screw (14) engage and form worm and gear and be connected, and the second rotating stepper motor (9) and the second scrambler (10) lay respectively at the worm shaft two ends of the second worm screw (14), first mirror holder (8) and the second mirror holder (15) are arranged on the first base (1) respectively, and can slide on the first base (1), to regulate the distance of the first prism wedge (4) and the second prism wedge (11), inner the first worm gear (6) of the first mirror holder (8) is passed through in the rotary motion of the first rotating stepper motor (2) and the first worm screw (7) is delivered to the first picture frame (5), first picture frame (5) is rotated around Z axis, and then drives the first prism wedge (4) to rotate around Z axis, inner the second worm gear (13) of the second mirror holder (15) is passed through in the rotary motion of the second rotating stepper motor (9) and the second worm screw (14) is delivered to the second picture frame (12), second picture frame (12) is rotated around Z axis, and then drives the second prism wedge (11) to rotate around Z axis,
Described orthogonal beat flat-panel systems is by the second base (16), 3rd mirror holder (17), 3rd rotating stepper motor (18), first level crossing (19), 3rd picture frame (20), 3rd scrambler (21), 4th scrambler (22), 4th picture frame (23), second level crossing (24), 4th rotating stepper motor (25) and the 4th mirror holder (26) composition, described 3rd mirror holder (17) is provided with the first turning axle, 3rd picture frame (20) is fixed on described first turning axle, 3rd rotating stepper motor (18) and the 3rd scrambler (21) are installed on the first rotating shaft terminal respectively, first level crossing (19) is built on the 3rd picture frame (20), described 4th mirror holder (26) is provided with the second turning axle, 4th picture frame (23) fixedly lies on described second turning axle, 4th rotating stepper motor (25) and the 4th scrambler (22) are installed on the second rotating shaft terminal respectively, and the second level crossing (24) is built on the 4th picture frame (23), 3rd mirror holder (17) and the 4th mirror holder (26) are arranged on the second base (16) respectively, and can slide on the second base (16), the rotary motion of the 3rd rotating stepper motor (18) is delivered on the 3rd picture frame (20) by the first turning axle, make the 3rd picture frame (20) around Y-axis beat, drive the first level crossing (19) around Y-axis beat, the rotary motion of the 4th rotating stepper motor (25) is delivered on the 4th picture frame (23) by the second turning axle, makes the 4th picture frame (23) around X-axis beat, drives the second level crossing (24) around X-axis beat,
Described first rotating stepper motor (2), the second rotating stepper motor (9), the 3rd rotating stepper motor (18) are connected kinetic control system with the 4th rotating stepper motor (25) respectively by data communication mouth, and described kinetic control system connects PC.
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