CN209215739U - Multiple surface rotating mirror scanning system - Google Patents

Multiple surface rotating mirror scanning system Download PDF

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Publication number
CN209215739U
CN209215739U CN201821931921.XU CN201821931921U CN209215739U CN 209215739 U CN209215739 U CN 209215739U CN 201821931921 U CN201821931921 U CN 201821931921U CN 209215739 U CN209215739 U CN 209215739U
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China
Prior art keywords
galvanometer
theta lens
scanning
mirror
shell
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CN201821931921.XU
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Chinese (zh)
Inventor
靳世伟
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Suzhou golden orange Laser Technology Co.,Ltd.
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Beijing Golden Orange Polytron Technologies Inc
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Priority to CN201821931921.XU priority Critical patent/CN209215739U/en
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Abstract

The utility model discloses a kind of multiple surface rotating mirror scanning systems, including shell, galvanometer mechanism, F-Theta lens, Scanning Detction card, tilting mirror mechanism, reflecting mirror and laser generator, and galvanometer mechanism, F-Theta lens, Scanning Detction card, tilting mirror mechanism, reflecting mirror and laser generator are built in the inner cavity of shell, the front side wall of shell is disposed with motor driving interface from top to bottom, power interface and scan data interface, the intracavity bottom of shell is provided with F-Theta lens, galvanometer mechanism is located at the top of F-Theta lens, galvanometer mechanism includes driving motor and galvanometer, the lower section power output end of driving motor is connected with galvanometer, tilting mirror mechanism is located at the upper left of F-Theta lens, tilting mirror mechanism includes operated motor and multifaceted prism, the front side of operated motor Power output end is connected with multifaceted prism, and reflecting mirror is provided on rear side of operated motor, and the structure design of the utility model is reasonable, provides high speed one-dimensional scanning (scanning speed reaches 300m/s), can meet the needs of high-rate laser scanning.

Description

Multiple surface rotating mirror scanning system
Technical field
The utility model relates to laser scanning system technical field more particularly to a kind of multiple surface rotating mirror scanning systems.
Background technique
Laser scanning system mainly has: galvanometer system scanning, the scanning of resonance scarnning mirror, galvanometer and holoscan.Wherein Vibration mirror scanning is in laser marking system using relatively broad.Laser scanning system is an important composition of laser marking system Part, external connection mark control card, laser realize laser marking function.
But in High-speed machining using upper, the problem of commonly used galvanometer system scanning speed is slow, poor radiation, is always Restrict the raising of processing efficiency.Therefore, scan rate of vibrating mirror is greatly improved as particularly important in laser marking application Demand, for this purpose, we have proposed a kind of multiple surface rotating mirror scanning systems.
Utility model content
The utility model provides a kind of multiple surface rotating mirror scanning system, and it is an object of the present invention to provide high speed one-dimensional scanning (scanning speed Degree reaches 300m/s), the needs of high-rate laser scanning can be met.
To realize above-mentioned technical purpose and the technique effect, the utility model is achieved through the following technical solutions:
A kind of multiple surface rotating mirror scanning system, including shell, galvanometer mechanism, F-Theta lens, Scanning Detction card, tilting mirror machine Structure, reflecting mirror and laser generator, and galvanometer mechanism, F-Theta lens, Scanning Detction card, tilting mirror mechanism, reflecting mirror and laser Generator is built in the inner cavity of shell, and the front side wall of the shell is disposed with motor driving interface, power supply from top to bottom Interface and scan data interface, the intracavity bottom of the shell is provided with F-Theta lens, and the bottom of F-Theta lens is passed through Wear the bottom of shell;
The galvanometer mechanism is located at the top of F-Theta lens, and the galvanometer mechanism includes driving motor and galvanometer, described The lower section power output end of driving motor is connected with galvanometer;
The Scanning Detction is positioned in the upper right of F-Theta lens, and the Scanning Detction card includes pcb board, power supply Processing module, voltage comparison module, photoelectric conversion module and reference voltage memory module are provided with electricity at the top of the pcb board Source processing module and voltage comparison module, electrically output is connected with reference voltage memory module to the power supply processing module, described Electrically output connection voltage comparison module, the power supply processing module electrically export connection photoelectric conversion to reference voltage memory module Module, electrically output connects voltage comparison module to the photoelectric conversion module;
The tilting mirror mechanism is located at the upper left of F-Theta lens, and the tilting mirror mechanism includes operated motor and multi-panel The front side power output end of prism, the operated motor is connected with multifaceted prism, is provided on rear side of the operated motor anti- Penetrate mirror;
The laser generator is located at the surface of multifaceted prism.
Preferably, in above-mentioned multiple surface rotating mirror scanning system, the driving motor is clockwise and anticlockwise motor.
Preferably, in above-mentioned multiple surface rotating mirror scanning system, the multifaceted prism is ten face prisms.
Preferably, in above-mentioned multiple surface rotating mirror scanning system, ten side walls of ten face prism are coated with laser reflective film.
Preferably, in above-mentioned multiple surface rotating mirror scanning system, polishing treatment is passed through on the surface of the multifaceted prism.
The beneficial effects of the utility model are:
The structure design of the utility model is reasonable, and for laser by X-axis motor (i.e. driving motor), the eyeglass by galvanometer part is anti- It is mapped on multifaceted prism, then is reflected on F-theta lens by multifaceted prism, then act on the surface of object to be processed, turn Mirror instead of traditional galvanometer Y axis scanning system, since tilting mirror linear velocity is very fast, up to 300 meter per seconds, so rotating mirror scanning The Y-direction scan efficiency of system is very high.
(1) high speed: high-speed rotating mirror built in the utility model provides high speed one-dimensional scanning (scanning speed reaches 300m/s), can Meet the needs of high-rate laser scanning.
(2) high-precision: X-axis galvanometer (i.e. driving motor) built in the utility model, real time correction scan trajectory error.
(3) interface is convenient: the compatible general galvanometer operating software of the utility model meets industrial design interface, from belt edge Feedback device is detected, synchronization signal control laser switch can be provided.
Detailed description of the invention
In order to illustrate more clearly of the technical solution of the utility model embodiment, make required for being described below to embodiment Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention, For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings Other attached drawings.
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is that the galvanometer mechanism, F-Theta lens, Scanning Detction card and tilting mirror Distribution of Institutions structure of the utility model are shown It is intended to;
Fig. 3 is the faceted prism structure schematic diagram of the utility model;
Fig. 4 is the Scanning Detction card working principle diagram of the utility model;
In attached drawing, parts list represented by the reference numerals are as follows:
1- shell, 2- motor driving interface, 3- power interface, 4- scan data interface, 5- galvanometer mechanism, 501- driving electricity Machine, 502- galvanometer, 6-F-Theta lens, 7- Scanning Detction card, 701-PCB plate, 702- power supply processing module, 703- voltage ratio Compared with module, 704- photoelectric conversion module, 705- reference voltage memory module, 8- tilting mirror mechanism, 801- operated motor, 802- multi-panel Prism, 9- reflecting mirror, 10- laser generator.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts All other embodiment obtained, fall within the protection scope of the utility model.
It please refers to shown in Fig. 1-4, the present embodiment is a kind of multiple surface rotating mirror scanning system, including shell 1, galvanometer mechanism 5, F- Theta lens 6, Scanning Detction card 7, tilting mirror mechanism 8, reflecting mirror 9 and laser generator 10, and galvanometer mechanism 5, F-Theta are saturating Mirror 6, Scanning Detction card 7, tilting mirror mechanism 8,9 laser generator 10 of reflecting mirror are built in the inner cavity of shell 1, the front side of shell 1 Wall is disposed with motor driving interface 2, power interface 3 and scan data interface 4 from top to bottom, and the intracavity bottom of shell 1 is set F-Theta lens 6 are equipped with, and the bottom of shell 1 is run through in the bottom of F-Theta lens 6;Galvanometer mechanism 5 is located at F-Theta lens 6 top, galvanometer mechanism 5 include driving motor 501 and galvanometer 502, the lower section power output end and galvanometer of driving motor 501 501 are connected, driving motor 501 be clockwise and anticlockwise motor, by the positive and negative rotation of driving motor 501 can drive galvanometer 502 into Row positive and negative rotation movement, to meet the use needs of the present apparatus;Scanning Detction card 7 is located at the upper right of F-Theta lens 6, Scanning Detction card 7 includes pcb board 701, power supply processing module 702, voltage comparison module 703, photoelectric conversion module 704 and reference Voltage memory module 705, the top of pcb board 701 are provided with power supply processing module 702 and voltage comparison module 703, power supply processing Electrically output is connected with reference voltage memory module 705 to module 701, and electrically output connects voltage to reference voltage memory module 705 Comparison module 703, electrically output connection photoelectric conversion module 704, photoelectric conversion module 704 are electrically defeated for power supply processing module 702 Voltage comparison module 703 is connected out;Tilting mirror mechanism 8 is located at the upper left of F-Theta lens 6, and tilting mirror mechanism 8 includes operating electricity The front side power output end of machine 801 and multifaceted prism 802, operated motor 801 is connected with multifaceted prism 802, operated motor 801 Rear side be provided with reflecting mirror 9, multifaceted prism 802 is ten face prisms, and ten side walls of ten face prisms are coated with laser reflective film, Polishing treatment is passed through on the surface of multifaceted prism 802;Laser generator 10 is located at the surface of multifaceted prism 802.
A kind of specific implementation of the utility model, when in use, laser is by galvanometer mechanism 5, by the galvanometer of galvanometer mechanism 5 502 are reflected on multifaceted prism 802,802 high-speed rotation of multifaceted prism, then are reflected into F-theta lens 6 by multifaceted prism 802 On, it is then focused into two-dimensional plane, while laser generator 10 is reflected into reflecting mirror 9 by multifaceted prism 802, then by Reflecting mirror 9 is reflected into Scanning Detction card 7, and Scanning Detction card 7 can export the location information in each face of multifaceted prism 802 in real time, Laser switch light is controlled for laser control system, laser is by driving motor 501, by the lens reflecting of 502 part of galvanometer It is reflected on F-theta lens 6 onto multifaceted prism 802, then by multifaceted prism 802, then acts on the table of object to be processed Face, tilting mirror instead of traditional galvanometer Y axis scanning system, since tilting mirror linear velocity is very fast, up to 300 meter per seconds, so tilting mirror The Y-direction scan efficiency of scanning system is very high;
Tilting mirror mechanism 8 be inherently a kind of optical transition component, it can make incident beam in a specific manner with the time Sequence is reflected, to realize the deflection of light beam.The essential characteristic of rotating mirror scanning is the reflected beams moving sweep in image planes At image;
Faint visible light can be converted into voltage signal by photoelectric conversion module 703 so that device may be implemented it is highly sensitive Degree and high reliability, power supply processing module 701 include 12V-5V level conversion, the stable constant pressure source of output as contrast signal, F-Theta lens 6 can be by the incident laser focal point of different angle in the same plane.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one of the utility model In embodiment or example.In the present specification, schematic expression of the above terms be not necessarily referring to identical embodiment or Example.Moreover, particular features, structures, materials, or characteristics described can be in any one or more embodiment or examples In can be combined in any suitable manner.
The preferred embodiment in the utility model disclosed above is only intended to help to illustrate the utility model.Preferred embodiment is simultaneously There is no the details that detailed descriptionthe is all, does not limit the specific embodiment that the utility model is only yet.Obviously, according to this specification Content, can make many modifications and variations.These embodiments are chosen and specifically described to this specification, be in order to preferably explain The principles of the present invention and practical application, so that skilled artisan be enable to better understand and utilize this practical It is novel.The utility model is limited only by the claims and their full scope and equivalents.

Claims (5)

1. a kind of multiple surface rotating mirror scanning system, it is characterised in that: including shell, galvanometer mechanism, F-Theta lens, Scanning Detction Card, tilting mirror mechanism, reflecting mirror and laser generator, and it is galvanometer mechanism, F-Theta lens, Scanning Detction card, tilting mirror mechanism, anti- The inner cavity that mirror and laser generator are built in shell is penetrated, the front side wall of the shell is disposed with motor driving from top to bottom Interface, power interface and scan data interface, the intracavity bottom of the shell are provided with F-Theta lens, and F-Theta lens Bottom run through shell bottom;
The galvanometer mechanism is located at the top of F-Theta lens, and the galvanometer mechanism includes driving motor and galvanometer, the driving The lower section power output end of motor is connected with galvanometer;
The Scanning Detction is positioned in the upper right of F-Theta lens, and the Scanning Detction card includes pcb board, power supply processing Module, voltage comparison module, photoelectric conversion module and reference voltage memory module are provided at power supply at the top of the pcb board Module and voltage comparison module are managed, electrically output is connected with reference voltage memory module, the reference to the power supply processing module Electrically output connection voltage comparison module, the power supply processing module electrically export connection photoelectric conversion mould to voltage memory module Block, electrically output connects voltage comparison module to the photoelectric conversion module;
The tilting mirror mechanism is located at the upper left of F-Theta lens, and the tilting mirror mechanism includes operated motor and multifaceted prism, The front side power output end of the operated motor is connected with multifaceted prism, is provided with reflecting mirror on rear side of the operated motor;
The laser generator is located at the surface of multifaceted prism.
2. multiple surface rotating mirror scanning system according to claim 1, it is characterised in that: the driving motor is positive and negative rotation electricity Machine.
3. multiple surface rotating mirror scanning system according to claim 1, it is characterised in that: the multifaceted prism is ten face prisms.
4. multiple surface rotating mirror scanning system according to claim 3, it is characterised in that: ten side walls of ten face prism are equal It is coated with laser reflective film.
5. multiple surface rotating mirror scanning system according to claim 1, it is characterised in that: the surface of the multifaceted prism is by throwing Light processing.
CN201821931921.XU 2018-11-22 2018-11-22 Multiple surface rotating mirror scanning system Active CN209215739U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821931921.XU CN209215739U (en) 2018-11-22 2018-11-22 Multiple surface rotating mirror scanning system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821931921.XU CN209215739U (en) 2018-11-22 2018-11-22 Multiple surface rotating mirror scanning system

Publications (1)

Publication Number Publication Date
CN209215739U true CN209215739U (en) 2019-08-06

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Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112817147A (en) * 2021-01-04 2021-05-18 上海镭天激光设备有限公司 Octahedral prism device for high-speed one-dimensional high-power laser scanning

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112817147A (en) * 2021-01-04 2021-05-18 上海镭天激光设备有限公司 Octahedral prism device for high-speed one-dimensional high-power laser scanning

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GR01 Patent grant
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TR01 Transfer of patent right

Effective date of registration: 20210415

Address after: 215000 m3-103-2, micro system Park, No.2, Peiyuan Road, science and Technology City, Suzhou high tech Zone, Suzhou City, Jiangsu Province

Patentee after: Suzhou golden orange Laser Technology Co.,Ltd.

Address before: 100015 East 1st floor, m3 building, No.1 Jiuxianqiao East Road, Chaoyang District, Beijing

Patentee before: BEIJING JCZ TECHNOLOGY Co.,Ltd.

TR01 Transfer of patent right