CN206178242U - Electric -heating type MEMS galvanometer scanning module - Google Patents
Electric -heating type MEMS galvanometer scanning module Download PDFInfo
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- CN206178242U CN206178242U CN201621267964.3U CN201621267964U CN206178242U CN 206178242 U CN206178242 U CN 206178242U CN 201621267964 U CN201621267964 U CN 201621267964U CN 206178242 U CN206178242 U CN 206178242U
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- electric heating
- scanning
- heating mems
- laser instrument
- pedestal
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Abstract
The utility model relates to a photoelectricity field, in particular to electric -heating type MEMS galvanometer scanning module, its technical scheme does, detaining the shell at the base including base and cover, setting up the laser instrument, collimation extender lens and the electric -heating type MEMS that arrange the in proper order mirror that shakes on the base, the shell is provided with out the optical window. The beneficial effects of the utility model are that: using electric -heating type MEMS galvanometer scanning to shake the mirror and replacing traditional static / electromagnetic type scanning galvanometer, the perfect function of laser scanning module has reduced circuit control system part for whole module structure possess littleer volume, make the module can more easy embedding in the mobile device, scan module's the range of application and the flexibility of use improve. Electric -heating type MEMS galvanometer scanning module accessible control system inputs specific drive signal, makes the scanning galvanometer have different mode, can realize the continuous full width of the mirror scanning of shaking of static / electromagnetic type, also can realize the fixed point scanning to three -dimensional body location.
Description
Technical field
This utility model belongs to photoelectric field, and in particular to a kind of encapsulation module of electric heating MEMS galvanometer scanning devices.
Background technology
Existing structure light scan module mostly obtains the three-dimensional knot of object by the way of electrostatic/electromagnetic type vibration mirror scanning
Structure information.Its scanning angle and scan position are relatively fixed, and are not easy to carry out fixed point location scanning to specific region.
Utility model content
In order to solve the problems, such as above-mentioned utility model, this utility model provides a kind of electric heating MEMS vibration mirror scanning modules,
While realizing existing scanning module silent frame scan function, also solve existing laser scanning module scanning area and fix, sweep
Retouch the less problem of angle.
Technical scheme shows as, a kind of electric heating MEMS vibration mirror scanning modules, including pedestal 112 and cover are buckled in pedestal 112
Shell 108, arranges laser instrument 102, collimator and extender lens 104 and the electric heating MEMS galvanometers 106 being arranged in order on pedestal 112,
The shell 108 is provided with out optical window 110.
Preferably, the laser instrument 102, collimator and extender lens 104 and electric heating MEMS galvanometers 106 constitute light path, described
The plane of incidence of collimator and extender lens 104 is collimation minute surface, and exit facet is to expand minute surface.
Preferably, the electric heating MEMS galvanometers 106 incline the exit facet side for being fixed on the collimator and extender mirror 104,
It is described go out optical window 110 be located at the surface of the electric heating MEMS galvanometers 106, electric heating MEMS galvanometers 106 remain static
When, by the light beam of the outgoing of collimator and extender mirror 104, vertical exit is to the optical window 110 Jing after electric heating MEMS galvanometers 106 reflect.
In advance collimation expands again that to obtain Energy distribution equal for light that the collimator and extender mirror 104 sends in the laser instrument 102
An even word hot spot, Jing control systems control the inflection point and deflection angle of the scanning galvanometer 106, and described in Jing optical window is gone out
The exterior three dimensional structure of 110 projections carries out specific region structural scan.
Preferably, the laser instrument 102, its wavelength covering visible light and infrared band.
Preferably, it is described go out optical window 110 be made up of optical material.
Preferably, it is described go out optical window 110 be coated with anti-reflection film.
Preferably, the integrated molding of the pedestal 112, arranges laser instrument location hole, collimator and extender lens on pedestal 112
Locating groove, galvanometer base station.
Preferably, the outside side of the shell 108 arranges and arrange in circuit room 114, circuit room 114 circuit board, circuit board with
Housing contacts circuit connection in the side wall of shell 108, the side of the pedestal 112 is provided with pedestal corresponding with the housing contacts
Contact, base contacts are electrically connected respectively with the electric heating MEMS galvanometers 106 and the laser instrument 102.
Preferably, the electric heating MEMS galvanometers 106 and the angle of the outgoing beam optical axis of the laser instrument 102 are 135 °.
A kind of method for packing of electric heating MEMS vibration mirror scanning modules, using laser instrument as light source, using extender lenses
Collimator and extender is carried out to LASER Light Source, using positioning scanning galvanometer, by control system input drive signal, galvanometer is made in design
Mechanical corner carries out optional position in interval, rotates at any angle, realizes the designated area given shape to three-dimensional body
Scanning.
Being made into one pedestal, the integrated base includes laser instrument location hole, collimator and extender lens locating groove, determines
Bit scan galvanometer base station.Laser instrument and beam expanding lens and structure light projection galvanometer are fixed on prefabricated pedestal, will be carried out
The shell of optical window assembles and is sealed the encapsulation that completes structure light projection scanning module with pedestal.
Preferably, the lens group has collimating optics surface and expanded beam optics surface, it is possible to provide the line style of uniform collimation
Hot spot incides scanning galvanometer, also dependent on needs, does not carry out expanding process, is only directly provided after collimation using collimating lens
Laser point light source.
Preferably, the scanning galvanometer can carry out optional position in mechanical corner region, the scanning of arbitrarily angled scope,
Scanning angle can be increased substantially, is adapted to wide-angle scanning.
Preferably, the control system can be input into the arbitrary signals such as square wave, sine wave, triangular wave, pulse and scanning is shaken
Mirror is driven, and obtains different structure light scan effects, and input and output have stable linear relationship.
Preferably, the frequency of vibration of scanning galvanometer is consistent with control system incoming frequency, and operating frequency scalable becomes
Change, and it is low in energy consumption.
Preferably, the scanning galvanometer of employing has two orthogonal rotary shafts and four actuating arms, and driving force is strong, is capable of achieving big angle
Multi-faceted deflection is spent, is that reflected light forms various structures optical mode, and can be offset by the symmetrical structure complementation of its actuating arm
Minute surface lateral shift scans the impact of unstable generation to module.
Using semiconductor laser as light source, collimator and extender lens, positioning scanning galvanometer are integrated on pedestal.According to
Use demand, makes positioning scanning galvanometer be operated in different states by using driving control system, by can be with upper type
The effect of a tractor serves several purposes is realized, the motility for using of laser scanning module is greatly extended, reduction type count amount is reduced out
Send out cost.
The beneficial effect that technical scheme provided in an embodiment of the present invention is brought is：Using electric heating MEMS vibration mirror scanning galvanometers
Replace conventional electrostatic/electromagnetic type scanning galvanometer, optimized the function of laser scanning module, reduce circuit control system portion
Point so that whole modular structure possesses less volume, module is embedded in a mobile device with easier, improves scanning
The range of application of module and the motility for using.Electric heating MEMS vibration mirror scannings module can drive by the way that control system input is specific
Dynamic signal, makes scanning galvanometer have different mode of operations, you can realizes electrostatic/continuous full-size scanning of electromagnetic type galvanometer, also may be used
Realize that the fixed point to three-dimensional body specific region is scanned.
Description of the drawings
Fig. 1 is the integrated base of the embodiment of the present invention.
Fig. 2 is the integrated casing of the embodiment of the present invention.
Fig. 3 is the light path schematic diagram of the embodiment of the present invention.
Fig. 4 scans effect diagram for the single line positioning of the embodiment of the present invention.
Fig. 5 is the optional position partial sweep effect diagram of the embodiment of the present invention.
Fig. 6 is the wide-angle whole scan effect diagram of the embodiment of the present invention.
Reference is：102nd, laser instrument；104th, collimator and extender lens；106th, scanning galvanometer；108th, shell；110th, light is gone out
Window；112nd, pedestal；114th, circuit room.
Specific embodiment
Embodiment 1
A kind of electric heating MEMS vibration mirror scanning modules, including pedestal 112 and cover are provided referring to Fig. 1 to Fig. 6 this utility model
The shell 108 of pedestal 112 is buckled in, laser instrument 102, collimator and extender lens 104 and the electric heating being arranged in order is set on pedestal 112
MEMS galvanometers 106, shell 108 is provided with out optical window 110.
Laser instrument 102, collimator and extender lens 104 and electric heating MEMS galvanometers 106 constitute light path, collimator and extender lens 104
The plane of incidence be collimation minute surface, exit facet is to expand minute surface.
Electric heating MEMS galvanometers 106 are inclined and are fixed on the exit facet side of collimator and extender mirror 104, it is described go out optical window 110
In the surface of the electric heating MEMS galvanometers 106, when electric heating MEMS galvanometers 106 remain static, by collimator and extender mirror
The light beam of 104 outgoing, vertical exit is to optical window 110 Jing after electric heating MEMS galvanometers 106 reflect.
The light that collimator and extender mirror 104 sends in laser instrument 102 is collimated to expand again and obtains the uniform word of Energy distribution in advance
Hot spot, the inflection point and deflection angle of Jing control systems control scanning galvanometer 106, Jing goes out the exterior three dimensional of the projection of optical window 110
Structure carries out specific region structural scan.
Laser instrument 102, its wavelength covering visible light and infrared band.
Go out optical window 110 to be made up of optical material.
Go out optical window 110 and be coated with anti-reflection film.
The integrated molding of pedestal 112, arranges laser instrument location hole, collimator and extender lens locating groove, shakes on pedestal 112
Mirror base station.
The outside side of shell 108 arranges and arrange in circuit room 114, circuit room 114 circuit board, circuit board and the side wall of shell 108
Interior housing contacts circuit connection, the side of pedestal 112 is provided with base contacts corresponding with housing contacts, base contacts respectively with
Electric heating MEMS galvanometers 106 and laser instrument 102 are electrically connected.
Electric heating MEMS galvanometers 106 are 135 ° with the angle of the outgoing beam optical axis of laser instrument 102.
A kind of method for packing of electric heating MEMS vibration mirror scanning modules, using laser instrument as light source, using extender lenses
Collimator and extender is carried out to LASER Light Source, using positioning scanning galvanometer, by control system input drive signal, galvanometer is made in design
Mechanical corner carries out optional position in interval, rotates at any angle, realizes the designated area given shape to three-dimensional body
Scanning.
Being made into one pedestal, integrated base includes that laser instrument location hole, collimator and extender lens locating groove, positioning are swept
Retouch galvanometer base station.Laser instrument and beam expanding lens and structure light projection galvanometer are fixed on prefabricated pedestal, optical window will be carried out
Shell and pedestal assemble and sealed the encapsulation that completes structure light projection scanning module.
Lens group has collimating optics surface and expanded beam optics surface, and the line style hot spot that can provide uniform collimation is incided and swept
Galvanometer is retouched, also dependent on needs, does not carry out expanding process, only directly provide the laser point light source after collimation using collimating lens.
Scanning galvanometer can carry out optional position in mechanical corner region, and the scanning of arbitrarily angled scope can be carried significantly
High scanning angle, is adapted to wide-angle scanning.
Control system can be input into the arbitrary signals such as square wave, sine wave, triangular wave, pulse and scanning galvanometer is driven,
Different structure light scan effects are obtained, input and output have stable linear relationship.
The frequency of vibration of scanning galvanometer is consistent with control system incoming frequency, the change of operating frequency scalable, and work(
Consumption is low.
Using scanning galvanometer have two orthogonal rotary shafts and four actuating arms, driving force is strong, is capable of achieving wide-angle multi-party
Position deflection, is that reflected light forms various structures optical mode, and it is horizontal to offset minute surface by the symmetrical structure complementation of its actuating arm
The impact of unstable generation is scanned to module to skew.
Using semiconductor laser as light source, collimator and extender lens, positioning scanning galvanometer are integrated on pedestal.According to
Use demand, makes positioning scanning galvanometer be operated in different states by using driving control system, by can be with upper type
The effect of a tractor serves several purposes is realized, the motility for using of laser scanning module is greatly extended, reduction type count amount is reduced out
Send out cost.
Preferred embodiment of the present utility model is the foregoing is only, it is all in this practicality not to limit this utility model
Within new spirit and principle, any modification, equivalent substitution and improvements made etc. should be included in guarantor of the present utility model
Within the scope of shield.
Claims (9)
1. a kind of electric heating MEMS vibration mirror scanning modules, including pedestal (112) and cover are buckled in the shell (108) of pedestal (112), its
It is characterised by, laser instrument (102), collimator and extender lens (104) and the electric heating MEMS being arranged in order is set on pedestal (112) and is shaken
Mirror (106), the shell (108) is provided with out optical window (110).
2. electric heating MEMS vibration mirror scanning modules as claimed in claim 1, it is characterised in that：The laser instrument (102), collimation
Extender lenses (104) and electric heating MEMS galvanometers (106) constitute light path, and the plane of incidence of the collimator and extender lens (104) is defined
Straight minute surface, exit facet is to expand minute surface.
3. electric heating MEMS vibration mirror scanning modules as claimed in claim 2, it is characterised in that：The electric heating MEMS galvanometers
(106) incline and be fixed on the exit facet side of the collimator and extender mirror (104), it is described go out optical window (110) positioned at the electric heating
The surface of MEMS galvanometers (106), when electric heating MEMS galvanometers (106) remains static, by the collimator and extender mirror (104)
The light beam of outgoing, vertical exit is to the optical window (110) Jing after electric heating MEMS galvanometers (106) reflection.
4. electric heating MEMS vibration mirror scanning modules according to claim 1, it is characterised in that the laser instrument (102), its
Wavelength covering visible light and infrared band.
5. electric heating MEMS vibration mirror scanning modules according to claim 1, it is characterised in that it is described go out optical window (110) by
Optical material is made.
6. electric heating MEMS vibration mirror scanning modules according to claim 1, it is characterised in that it is described go out optical window (110) plating
There is anti-reflection film.
7. electric heating MEMS vibration mirror scanning modules according to claim 1, it is characterised in that the pedestal (112) is
Body chemical conversion type, arranges laser instrument location hole, collimator and extender lens locating groove, galvanometer base station on pedestal (112).
8. electric heating MEMS vibration mirror scanning modules according to claim 1, it is characterised in that shell (108) outside
Side arranges and arrange in circuit room (114), circuit room (114) circuit board, and circuit board is electric with the housing contacts in the wall of shell (108) side
Road connects, and pedestal (112) side is provided with base contacts corresponding with the housing contacts, base contacts respectively with it is described
Electric heating MEMS galvanometers (106) and the laser instrument (102) are electrically connected.
9. electric heating MEMS vibration mirror scanning modules according to claim 2, it is characterised in that the electric heating MEMS galvanometers
(106) it is 135 ° with the angle of the laser instrument (102) outgoing beam optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621267964.3U CN206178242U (en) | 2016-11-23 | 2016-11-23 | Electric -heating type MEMS galvanometer scanning module |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621267964.3U CN206178242U (en) | 2016-11-23 | 2016-11-23 | Electric -heating type MEMS galvanometer scanning module |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206178242U true CN206178242U (en) | 2017-05-17 |
Family
ID=58687136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621267964.3U Active CN206178242U (en) | 2016-11-23 | 2016-11-23 | Electric -heating type MEMS galvanometer scanning module |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206178242U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107037681A (en) * | 2017-06-05 | 2017-08-11 | 青岛小优智能科技有限公司 | One kind miniaturization projection module and its micro- galvanometer encapsulation base |
-
2016
- 2016-11-23 CN CN201621267964.3U patent/CN206178242U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107037681A (en) * | 2017-06-05 | 2017-08-11 | 青岛小优智能科技有限公司 | One kind miniaturization projection module and its micro- galvanometer encapsulation base |
| CN107037681B (en) * | 2017-06-05 | 2018-12-21 | 青岛小优智能科技有限公司 | A kind of micromation projective module group and its micro- galvanometer encapsulation base |
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