CN205120965U - Laser radar based on MEMS micro mirror - Google Patents
Laser radar based on MEMS micro mirror Download PDFInfo
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- CN205120965U CN205120965U CN201520905420.4U CN201520905420U CN205120965U CN 205120965 U CN205120965 U CN 205120965U CN 201520905420 U CN201520905420 U CN 201520905420U CN 205120965 U CN205120965 U CN 205120965U
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- micro mirror
- mems micro
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Abstract
The utility model discloses a laser radar based on MEMS micro mirror, including laser pulse emitter, the speculum, the MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving arrangement, MEMS micro mirror drive arrangement is connected with MEMS micro mirror mirror surface, mirror surface direction to the MEMS micro mirror is controlled, the laser pulse that laser pulse emitter jetted out jets into the speculum, jet into the MEMS micro mirror after the speculum reflection, laser pulse after the reflection of MEMS micro mirror jets out, reach the barrier surface to the target that awaits measuring, the diffuse reflection takes place for target barrier surface through awaiting measuring, reflected signal is received by laser pulse receiving arrangement. The utility model discloses laser radar is based on the scanning function of MEMS micro mirror, has reduced laser radar's volume and weight greatly, and simple structure, cost are lower moreover.
Description
Technical field
The utility model belongs to Laser Radar Scanning field, particularly relates to a kind of laser radar based on MEMS micro mirror.
Background technology
Unmanned plane, due to the advantage of himself, has been applied to a lot of field.On the one hand, unmanned plane has that volume is little, maneuverability is high, and self is advantage flexibly; On the other hand, unmanned plane can carry multiple sensors equipment, provides much information, and unmanned plane other aerial mobile equipments relatively, cheap.Owing to being unmanned systems, its application requires that security performance is also very high.The utility model mainly for the location of unmanned plane, map structuring, keep away a kind of laser radar of barrier and three-dimensional modeling design.
Traditional three-dimensional laser radar is on the basis of single-point range finding, realizes three-dimensional depth information measure by two-dimensional scan.The detectable distance of such radar, precision is high.But because this laser radar has huge 3-D scanning machinery device, so this laser radar has larger volume, weight and power consumption usually, have higher cost simultaneously.And the usual sweep velocity of standard machinery Scan Architecture is slow, also can there is mechanical loss in long-time use, is not too applicable on picture rotary wind type unmanned plane.
Compact Laser Radar three-dimensional mapping system is a kind of novel integrated application laser range finder, and the Fast measurement system of GPS can each three-dimensional coordinate of direct translocation ground object.Although the laser radar that Compact Laser Radar is more traditional, overall volume and weight are reduced a lot, and overall weight, still at about 20kg, for the rotary wind type unmanned plane of Portable small, is still difficult to carrying.So the utility model is for the deficiency of conventional three-dimensional laser radar, devise a kind of new pattern laser radar based on MEMS micro mirror.
In sum, existing laser radar is subject to the very large restriction of volume and weight, is difficult to be applied on rotary wind type unmanned plane.
Utility model content
The utility model, for the problems of the prior art, provides a kind of laser radar based on MEMS micro mirror, based on the scan function of MEMS micro mirror, substantially reduces the volume and weight of laser radar, and structure is simple, cost is lower.
The utility model solves the technical scheme that its technical matters adopts: provide a kind of based on MEMS (Micro-Electro-MechanicalSystem, microelectromechanical systems) laser radar of micro mirror, comprise laser pulse emitter, catoptron, MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving trap, MEMS micro mirror seat is connected with MEMS micro mirror, the minute surface direction of MEMS micro mirror is controlled, the laser pulse of laser pulse emitter injection injects catoptron, MEMS micro mirror is injected after catoptron reflection, laser pulse injection after MEMS micromirror reflects, blocking surfaces is reached to target to be measured, blocking surfaces generation diffuse reflection is reached through target to be measured, received by laser pulse receiving trap.
By technique scheme, also comprise shell, mirror unit, laser pulse emitter, catoptron, MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving trap are arranged on the inside of shell, catoptron is fixed on shell by mirror unit, and MEMS micro mirror is fixed on shell by MEMS micro mirror seat.
By technique scheme, MEMS micro mirror is two-dimentional MEMS scanning micro-mirror.
By technique scheme, MEMS micro mirror seat comprises semi-girder and MEMS micro mirror driving circuit, semi-girder is the symmetric double S type structure that bimorph cell is formed, MEMS micro mirror is fixed on the top of semi-girder, integrated heating resistance in bimorph cell, (MEMS micro mirror driving circuit is electrothermal driving circuit) MEMS micro mirror driving circuit is connected with heating resistor and changes the voltage of heating resistor.The different bi-material of coefficient of thermal expansion is used to be made into semi-girder.When the temperature varies, bimorph cell (bimorph) will produce Bending Deformation.Each bimorph semi-girder top connect a MEMS micro mirror and in bimorph an integrated heating resistor, when MEMS micro mirror driving circuit changes the voltage of heating resistor, the bimorph deformation that bends just can drive MEMS micro mirror to realize deflecting.
The beneficial effect that the utility model produces is: first, the utility model laser radar does not exist laser mechanical drives structure, and make whole laser radar structure simple, volume is little, lightweight, and light path is more simple, and anti-seismic performance is good; Secondly, compared with the laser radar driven with traditional mechanical rotation platform, MEMS micro mirror is easier to accurately drive and control, and also has less volume and weight, lower power consumption and cost.The utility model realizes laser radar microminaturization, compared with traditional laser radar, is more suitable for and uses on the mobile devices such as unmanned plane.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the utility model is described in further detail, in accompanying drawing:
Fig. 1 is the light path principle schematic diagram of the utility model embodiment based on the laser radar of MEMS micro mirror;
Fig. 2 is the one-piece construction schematic diagram of the utility model embodiment based on the laser radar of MEMS micro mirror;
Fig. 3 is the structural representation of mirror unit;
Fig. 4 is the front view of MEMS micro mirror seat;
Fig. 5 is the vertical view of MEMS micro mirror seat;
Fig. 6 is the perspective view of MEMS micro mirror seat.
Embodiment
In order to make the purpose of this utility model, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the utility model, and be not used in restriction the utility model.
In the utility model embodiment, as Fig. 1, shown in Fig. 2, a kind of laser radar based on MEMS micro mirror is provided, comprise laser pulse emitter 1, catoptron 2, MEMS micro mirror 3, MEMS micro mirror seat 7, laser pulse receiving trap 4, MEMS micro mirror seat is connected with MEMS micro mirror, the minute surface direction of MEMS micro mirror is controlled, the laser pulse of laser pulse emitter injection injects catoptron, MEMS micro mirror is injected after catoptron reflection, laser pulse injection after MEMS micromirror reflects, blocking surfaces 5 is reached to target to be measured, blocking surfaces generation diffuse reflection is reached through target to be measured, reflected signal is received by laser pulse receiving trap.
Wherein, shell, mirror unit 6 should be also comprised based on the laser radar of MEMS micro mirror, laser pulse emitter, catoptron, MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving trap are arranged on the inside of shell, catoptron is fixed on shell by mirror unit, and MEMS micro mirror is fixed on shell by MEMS micro mirror seat.In the utility model embodiment, laser pulse emitter comprises laser instrument, photoelectricity modulation circuit, and photoelectricity modulation circuit is connected with laser instrument, also comprises condenser, and condenser is arranged on photoelectricity modulation circuit rear.Photoelectricity modulation circuit carries out the modulation in time domain, and the continuous laser that laser instrument is launched is modulated into the laser pulse that the cycle can control.Laser pulse receiving trap comprises optical filtering, laser pick-off sensor, optical filtering is arranged on laser pick-off sensor front, its effect is that the reflects laser of wavelength complexity is carried out filtering, the only laser of the laser wavelength range of remaining laser instrument injection, by the light elimination of its commplementary wave length in environment.The pulse of laser pulse emitter Emission Lasers, laser pulse reflects through 45 ° of catoptrons, laser beam injects to MEMS micro mirror, MEMS micro mirror makes MEMS micro mirror twist by MEMS micro mirror seat, thus change optical path direction, the laser beam after MEMS micromirror reflects is mapped to target to be measured and reaches on blocking surfaces, and laser beam reaches blocking surfaces generation diffuse reflection in target to be measured, reflection ray is penetrated and is got back to the setting of laser pulse receiving trap, and laser signal changes electric signal into.Laser pulse emitter, laser pulse receiving trap are fixed on shell by stationary installation 8.
Further, MEMS micro mirror is two-dimentional MEMS scanning micro-mirror.
Further, MEMS micro mirror seat comprises semi-girder and MEMS micro mirror driving circuit, semi-girder is the symmetric double S type structure that bimorph cell is formed, MEMS micro mirror is fixed on the top of semi-girder, integrated heating resistance in bimorph cell, MEMS micro mirror driving circuit is electrothermal driving circuit, and MEMS micro mirror driving circuit is connected with heating resistor and changes the voltage of heating resistor.The different bi-material of coefficient of thermal expansion is used to be made into semi-girder.When the temperature varies, bimorph cell (bimorph) will produce Bending Deformation.Each bimorph semi-girder top connect a MEMS micro mirror and in bimorph an integrated heating resistor, when MEMS micro mirror driving circuit changes the voltage of heating resistor, the bimorph deformation that bends just can drive MEMS micro mirror to realize deflecting.As shown in Fig. 4, Fig. 5, Fig. 6, there is deformation in two S type bimorph cell, impel MEMS minute surface all to deflect in X, Y, Z axis under the change of temperature.Two diaphragm beam devises LSF-LVD (without lateral translation-large perpendicular displacement) electrothermal driver 11, below arranges feet 12, and two sections of two diaphragms have identical silica/platinum/aluminum coating, but the order up and down of coating is just contrary.Platinum well heater embeds in two diaphragm beam, is used for improving homogeneity and the efficiency of heating surface of heating.Can upsweep after two diaphragm beam adds Thermal release, form S type, MEMS micro mirror minute surface is risen to an elemental height.When the driver on cantilever has the temperature difference, at this moment the deformation degree of cantilever there has been difference, thus drives MEMS micro mirror minute surface can swing around X-axis.Thus realize the two-dimensional scan of micro mirror.
The windup-degree that existing MEMS micro mirror can reach is very little, be no more than ± 10 °.In the utility model laser radar, MEMS micro mirror adopts electrothermal drive mode, and driving voltage is low, and scan deflection angle is large, can reach ± 25 °.Existing laser radar power consumption is higher, and the utility model uses MEMS micro mirror to scan based on the laser radar of MEMS micro mirror, substantially reduces power consumption.
In the utility model embodiment, further, as shown in Figure 3, the structure of mirror unit comprises: catoptron holder, micrometer adjusting screw and fine setting spring 9, micrometer adjusting screw is separately fixed at the adjacent both sides of mirror surface, controls the displacement of mirror surface in X, Y-axis, and one of them direction has two micrometer adjusting screws 10, by the displacement difference of two micrometer adjusting screws, control minute surface and finely tune in the rotation of Z-direction.Mirror unit, under the control of three micrometer adjusting screws, realizes the fine setting of the translation of X and Y direction and the rotation around Z axis.Being provided with spring microscope base between mirror unit and catoptron, is 45 ° of inclined-planes.Laser, through catoptron, is injected from the top of this laser radar apparatus.And MEMS micro mirror driving circuit drives MEMS micromirror rotation, realize scanning, and penetrate light by square laser ejection hole.The magnitude range of laser ejection hole meets the angle of laser deflection after the scanning of MEMS micro mirror.
Catoptron plays the effect changing light path, in the utility model embodiment, further, the laser in laser pulse emitter occurred level direction, catoptron and surface level is at 45 ° puts, that its center is launched with laser pulse emitter, emitted after condenser laser overlaps, and makes light path realize 90 ° of deflections.Can be mapped to MEMS micro mirror from the laser of reflective mirror injection, MEMS micro mirror is connected with micro mirror driving circuit, drives micromirror rotation, realizes scanning.
The range of the utility model embodiment laser radar is at 1-200 rice.After working on power, export in the mode of UART.This laser radar is of a size of 78 × 62 × 40, unit cm
3.Whole Radar Design compact conformation, enclosure volume is less than 500cm
3, weight is no more than 500g.The one-piece construction of laser radar as shown in Figure 2, laser pulse emitter, laser pulse receiving trap and photoelectricity modulation circuit are all fixed in the laser instrument holder on the shell left side, laser instrument holder has a laser ejection hole and laser pick-off hole, penetrate laser respectively and receive laser signal, MEMS micro mirror microscope base and catoptron microscope base are all bolted on the limit wall of whole lidar housings.
Although existing laser radar precision is high, there is huge physical construction and complicated light path, be not suitable for the application on rotary wind type unmanned plane.The utility model is for the less feature of unmanned plane load-bearing, and utilizing the scan function of MEMS micro mirror, realize the scanning of range laser, minimized by the volume and weight of laser radar, can be that rotary wind type unmanned plane is used.
Should be understood that, for those of ordinary skills, can be improved according to the above description or convert, and all these improve and convert the protection domain that all should belong to the utility model claims.
Claims (4)
1. the laser radar based on MEMS micro mirror, it is characterized in that, comprise laser pulse emitter, catoptron, MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving trap, MEMS micro mirror seat is connected with MEMS micro mirror, the minute surface direction of MEMS micro mirror is controlled, the laser pulse of laser pulse emitter injection injects catoptron, MEMS micro mirror is injected after catoptron reflection, laser pulse injection after MEMS micromirror reflects, blocking surfaces is reached to target to be measured, blocking surfaces generation diffuse reflection is reached through target to be measured, received by laser pulse receiving trap.
2. the laser radar based on MEMS micro mirror according to claim 1, it is characterized in that, also comprise shell, mirror unit, laser pulse emitter, catoptron, MEMS micro mirror, MEMS micro mirror seat, laser pulse receiving trap are arranged on the inside of shell, catoptron is fixed on shell by mirror unit, and MEMS micro mirror is fixed on shell by MEMS micro mirror seat.
3. the laser radar based on MEMS micro mirror according to claim 1 and 2, is characterized in that, MEMS micro mirror is two-dimentional MEMS scanning micro-mirror.
4. the laser radar based on MEMS micro mirror according to claim 1 and 2, it is characterized in that, MEMS micro mirror seat comprises semi-girder and MEMS micro mirror driving circuit, semi-girder is the symmetric double S type structure that bimorph cell is formed, MEMS micro mirror is fixed on the top of semi-girder, integrated heating resistance in bimorph cell, MEMS micro mirror driving circuit is connected with heating resistor and changes the voltage of heating resistor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520905420.4U CN205120965U (en) | 2015-11-13 | 2015-11-13 | Laser radar based on MEMS micro mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520905420.4U CN205120965U (en) | 2015-11-13 | 2015-11-13 | Laser radar based on MEMS micro mirror |
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| CN205120965U true CN205120965U (en) | 2016-03-30 |
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| CN201520905420.4U Expired - Fee Related CN205120965U (en) | 2015-11-13 | 2015-11-13 | Laser radar based on MEMS micro mirror |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106569218A (en) * | 2016-10-31 | 2017-04-19 | 长春理工大学 | Laser radar optical system based on four-angle simultaneous detection |
| CN106707289A (en) * | 2016-11-08 | 2017-05-24 | 上海禾赛光电科技有限公司 | Quasi-solid-state single line laser radar based on MEMS-like galvanometer, and operating method thereof |
| CN106772407A (en) * | 2016-12-02 | 2017-05-31 | 深圳市镭神智能系统有限公司 | Laser radar system based on MEMS micromirror scanning |
| CN107153201A (en) * | 2017-05-25 | 2017-09-12 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| CN107526071A (en) * | 2017-02-24 | 2017-12-29 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| CN107643516A (en) * | 2017-09-27 | 2018-01-30 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
| WO2018171277A1 (en) * | 2017-03-21 | 2018-09-27 | 常州华达科捷光电仪器有限公司 | Cross line laser |
| CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
| CN110531368A (en) * | 2018-05-25 | 2019-12-03 | 深圳市速腾聚创科技有限公司 | A kind of solid-state laser radar |
| WO2020174905A1 (en) * | 2019-02-28 | 2020-09-03 | パナソニックＩｐマネジメント株式会社 | Optical element positioning mechanism and laser radar |
| CN112771406A (en) * | 2018-10-04 | 2021-05-07 | 创新科技有限公司 | Electro-optical system with heating element |
| CN113296105A (en) * | 2021-05-11 | 2021-08-24 | 北京控制工程研究所 | Non-coaxial laser scanning imaging system based on MEMS scanning mirror |
| CN114699045A (en) * | 2022-03-24 | 2022-07-05 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
| US11428788B2 (en) | 2018-12-29 | 2022-08-30 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
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2015
- 2015-11-13 CN CN201520905420.4U patent/CN205120965U/en not_active Expired - Fee Related
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106569218A (en) * | 2016-10-31 | 2017-04-19 | 长春理工大学 | Laser radar optical system based on four-angle simultaneous detection |
| CN106707289A (en) * | 2016-11-08 | 2017-05-24 | 上海禾赛光电科技有限公司 | Quasi-solid-state single line laser radar based on MEMS-like galvanometer, and operating method thereof |
| CN106707289B (en) * | 2016-11-08 | 2023-08-29 | 上海禾赛科技有限公司 | Quasi-solid single-line laser radar based on MEMS-like galvanometer and working method thereof |
| CN106772407A (en) * | 2016-12-02 | 2017-05-31 | 深圳市镭神智能系统有限公司 | Laser radar system based on MEMS micromirror scanning |
| CN107526071A (en) * | 2017-02-24 | 2017-12-29 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| WO2018171277A1 (en) * | 2017-03-21 | 2018-09-27 | 常州华达科捷光电仪器有限公司 | Cross line laser |
| WO2018214453A1 (en) * | 2017-05-25 | 2018-11-29 | 深圳市速腾聚创科技有限公司 | Laser radar and control method for laser radar |
| CN107153201A (en) * | 2017-05-25 | 2017-09-12 | 深圳市速腾聚创科技有限公司 | Laser radar and laser radar control method |
| CN107643516A (en) * | 2017-09-27 | 2018-01-30 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
| CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
| CN110531368A (en) * | 2018-05-25 | 2019-12-03 | 深圳市速腾聚创科技有限公司 | A kind of solid-state laser radar |
| CN112771406A (en) * | 2018-10-04 | 2021-05-07 | 创新科技有限公司 | Electro-optical system with heating element |
| US11428788B2 (en) | 2018-12-29 | 2022-08-30 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
| US11960031B2 (en) | 2018-12-29 | 2024-04-16 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
| WO2020174905A1 (en) * | 2019-02-28 | 2020-09-03 | パナソニックＩｐマネジメント株式会社 | Optical element positioning mechanism and laser radar |
| CN113296105A (en) * | 2021-05-11 | 2021-08-24 | 北京控制工程研究所 | Non-coaxial laser scanning imaging system based on MEMS scanning mirror |
| CN113296105B (en) * | 2021-05-11 | 2022-12-27 | 北京控制工程研究所 | Non-coaxial laser scanning imaging system based on MEMS scanning mirror |
| CN114699045A (en) * | 2022-03-24 | 2022-07-05 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
| CN114699045B (en) * | 2022-03-24 | 2023-09-01 | 四川大学 | Portable photoacoustic microscopic imaging system and method based on scanning galvanometer |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160330 Termination date: 20161113 |
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| CF01 | Termination of patent right due to non-payment of annual fee |