CN108983197A - 3-D scanning laser radar based on MEMS micromirror - Google Patents
3-D scanning laser radar based on MEMS micromirror Download PDFInfo
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- CN108983197A CN108983197A CN201810927949.4A CN201810927949A CN108983197A CN 108983197 A CN108983197 A CN 108983197A CN 201810927949 A CN201810927949 A CN 201810927949A CN 108983197 A CN108983197 A CN 108983197A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
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- Computer Networks & Wireless Communication (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Optical Radar Systems And Details Thereof (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention belongs to laser radar technique fields, disclose a kind of 3-D scanning laser radar based on MEMS micromirror, including emitting laser, collimation optics, MEMS micromirror array and detector；The exploring laser light signal that the emitting laser issues is collimated by collimation optics to the MEMS micromirror array, is emitted through the MEMS micromirror array to detection target；The exploring laser light signal of detection target reflection is received to the detector；MEMS micromirror array includes multiple small micro mirror units, and multiple small micro mirror units arrange that all small micro mirror units can be rotated in three-dimensional in two-dimensional array.The MEMS micromirror of single small size is replaced with to the design of large scale two dimension MEMS micromirror array, MEMS micromirror can be solved in the application restricted problem of large scale light spot laser radar, help to realize the long-range detection of laser radar.
Description
Technical field
The invention belongs to laser radar technique fields, and in particular to a kind of 3-D scanning laser thunder based on MEMS micromirror
It reaches.
Background technique
Laser radar is the equipment for being scanned to surrounding space by emitting laser signal and obtaining spatial parameter, extensively
Applied to geographical mapping, environment detection, industry scanning or the industries such as unmanned.Currently, the light beam scanning mode of laser radar
Mainly motor scan-type, but the obvious shortcomings such as scan module that there are sizes is big, power consumption is big, control circuit and algorithm complexity, limit
Laser radar has been made towards directions speed of development such as miniaturization, integrated and low power consumptions, also constrain laser radar into
The popularization and application of one step.
Microelectromechanical-systems (Micro-Electro Mechanical System, hereinafter referred to as MEMS) micro mirror is based on maturation
Semiconducter process, it can be achieved that miniaturization and integrated light beam scanning mode, and have low-power consumption and control simple
Significant advantage.
Patent announcement number is that the patent of invention of CN106772407A proposes one kind based on MEMS (as based on micro machine system
Unite Micro-Electro Mechanical System, hereinafter referred to as MEMS) micro mirror scanning laser radar system, the patent
The two-dimensional scanning characteristic of MEMS micromirror is mainly utilized, for single light source to be replaced the multi-thread light source of existing Two dimensional Distribution, realizes
Single light source simulate multi-thread light source scanning as a result, but fail to make full use of the 3-D scanning potentiality of MEMS micromirror in the patent,
Fail to replace scan module comprehensively in multi-thread scanning laser radar.The patent also has ignored the dimensional problem of MEMS micromirror, mesh
Before, the planar dimension of single MEMS micromirror is smaller, not can control large scale hot spot, it is difficult to realize long-range detection, this is also
MEMS micromirror, which is applied, must optimize the key Design of solution in laser radar industry.
Summary of the invention
In order to solve the above problems existing in the present technology, it is an object of that present invention to provide a kind of three based on MEMS micromirror
Scanning laser radar is tieed up, meanwhile, it is different from micro- with MEMS given by the patent of invention that patent announcement number is CN106772407A
The advantages of mirror replaces the scheme of the multi-thread laser light source of two dimension, and the present invention takes full advantage of MEMS micromirror scanning, can substitute comprehensively and sweep
Motor is retouched, realizes the 3-D scanning of laser radar, further, in order to overcome the problems, such as that existing single MEMS micromirror is undersized,
The invention proposes a kind of designs of two-dimentional MEMS micromirror, and single MEMS micromirror group is replaced with large scale two dimension MEMS micromirror battle array
Column, can efficiently solve the undersized problem of single MEMS micromirror, can be applicable to large scale laser spot detection scene, realize laser
The long-range detection of radar.
The technical scheme adopted by the invention is as follows:
A kind of 3-D scanning laser radar based on MEMS micromirror includes emitting laser, collimation optics, MEMS micro-
Lens array and detector；
The exploring laser light signal that the emitting laser issues is collimated micro- to the MEMS by the collimation optics
Lens array emits through the MEMS micromirror array to detection target；
The exploring laser light signal of detection target reflection is received to the detector；
The MEMS micromirror array includes multiple small micro mirror units, and multiple small micro mirror units arrange own in two-dimensional array
Small micro mirror unit can be rotated in three-dimensional.
Further, the emitting laser is semiconductor laser, optical fiber laser or solid state laser.
Further, further include multiple electrostatic drive formulas or heat driven declines motor, pass through electrostatic drive formula or heating
Drive-type micro machine drives corresponding small micro mirror unit to rotate in three-dimensional.
Further, the emitting laser replaces with emitting laser array.
Further, the detector is single point detector or 2-dimensional array detector.
Further, the exploring laser light signal of detection target reflection is received by receiving lens to the detector, described
Receiving lens are non-spherical lens.
Further, the collimation optics are non-spherical lens.
The invention has the benefit that
In order to overcome the problems, such as that existing single MEMS micromirror is undersized, the invention proposes a kind of two-dimentional MEMS micromirrors
The MEMS micromirror of single small size, is replaced with the design of large scale two dimension MEMS micromirror array, can solve MEMS micromirror by design
In the application restricted problem of large scale light spot laser radar, the long-range detection of laser radar is helped to realize；Base of the invention
Small size, the power consumption of the small micro mirror unit of MEMS micromirror array are taken full advantage of in the 3-D scanning laser radar of MEMS micromirror
Low, control circuit and the simple remarkable advantage of algorithm, and the manufacture craft of small micro mirror unit adds derived from the semiconductor of existing maturation
Work technique, reliable in quality are easily produced in batches, help that laser radar product is pushed further to be widely applied in each field.
Detailed description of the invention
Fig. 1 is the light path principle schematic diagram of the embodiment of the present invention 1.
Fig. 2 is the array schematic diagram (single light source scanning) of the MEMS micromirror array of embodiment 1.
Fig. 3 is the light path principle schematic diagram of implementation 2 of the invention.
Fig. 4 is the array schematic diagram (multiple light courcess scanning) of the MEMS micromirror array of implementation 2.
In figure: 1- emitting laser；2- collimation optics；3-MEMS micro mirror array；4- emitting laser array.
Specific embodiment
In the prior art, emitting laser issues exploring laser light signal, exports after collimated optical element collimation, transmission
To MEMS micromirror surface.Because MEMS micromirror needs rotate, need to reserve the sky of rotation to MEMS micromirror in thickness direction
Between, when MEMS structure is excessive, small rotational angle can also generate biggish displacement space.It is limited to current semiconductor industry
Level of processing, MEMS structure are limited in the removable space of thickness direction, this also just determines the mirror surface ruler of MEMS micromirror
The very little mutual restricting relation between corner.If increasing the corner of MEMS micromirror, the mirror surface of MEMS micromirror must be reduced
Size, vice versa.This restricting relation also becomes limitation MEMS technology in one of the bottleneck of laser radar industrial application.
With reference to the accompanying drawing and specific embodiment does further explaination to the present invention.
Embodiment 1:
To solve the above problems, the present embodiment proposes the scheme of the small mirror array design of two-dimentional MEMS, as shown in Figure 2.
MEMS micromirror is resolved into multiple small micro mirror units, big angle rotary may be implemented in each small micro mirror unit, and in thickness side
It is not take up too many space upwards, can be made based on existing semiconductor technology, is easy to produce in batches, multiple small micro mirror units are formed
Large scale MEMS micromirror array 3, for large scale hot spot, it can be achieved that long-range detection, solves MEMS micromirror in large scale hot spot
The application restricted problem of laser radar, helps to realize the long-range detection of laser radar.
As shown in Figure 1, the present embodiment provides a kind of, the 3-D scanning laser radar based on MEMS micromirror includes transmitting laser
Device 1, collimation optics 2, MEMS micromirror array 3 and detector；The exploring laser light signal that the emitting laser issues passes through
Collimation optics (collimation optics are specially collimation lens) are collimated to the MEMS micromirror array, through the MEMS micromirror
Array emitter is to detecting target；The exploring laser light signal of detection target reflection is received to the detector；Specifically, detector is used
In the reflection laser of target reverberation in the reception target area and it is converted into echo pulse signal；Again via signal processing mould
Block receives and processes the echo pulse signal to obtain the location information of the target reverberation.
The small micro mirror unit of the MEMS micromirror array can be rotated in three-dimensional, not only can two-dimensional directional rotation but also can be two
The mirror surface direction of dimension angle rotates.The small micro mirror unit of composition MEMS micromirror array 3 can be rotated in two-dimensional directional, can also be real
The mirror surface rotation of existing two dimension angular, so that incident light beam on it can realize the three-dimensional light beam scanning in space.Relative to existing
The 3-D scanning laser radar based on electric motor type, scheme proposed by the present invention is more compact, and smaller, power consumption is lower.Into
One step, because the small micro mirror unit of each of MEMS micromirror array 3 (can be completed each small with independent control by different motors
The independent control of micro mirror unit is rotated by the small micro mirror unit of the correspondence of MEMS micromirror array described in motor driven in two-dimensional directional
Or rotated in the mirror surface direction of two dimension angular), asynchronous scanning can be set into different small micro mirror units, carries out spatial information
It, can be high by one with scan frequency, it can be achieved that the space asynchronous scanning of different height, spatial information change fast region when scan rebuilding
A bit, more information are obtained；Spatial information changes slow region, can reduce scan frequency, only obtains crucial partial information,
Can effectively room for promotion information reconstruction efficiency, reduce the time of light beam scanning.
In the present embodiment, the emitting laser is preferably semiconductor laser, optical fiber laser or solid state laser.
The collimation optics are preferably non-spherical lens, can optimize the lens picture that the distribution of MEMS micromirror hot spot introduces
Difference.
Single point detector or 2-dimensional array detector can be selected in the detector, preferably selection 2-dimensional array detector, visits
Laser signal is surveyed to emit through the MEMS micromirror array to detection target；The exploring laser light signal of detection target reflection is received to institute
Detector is stated, 2-dimensional array detector is selected, can preferably receive and process received exploring laser light signal.
The exploring laser light signal of detection target reflection can be received by receiving lens to the detector, the receiving lens
Preferably select non-spherical lens.
In the present embodiment, the corresponding small micro mirror unit of motor driven that can be declined by electrostatic drive formula or heat driven exists
Three-dimensional rotation, convenient for controlling corresponding small micro mirror unit as needed, each small micro mirror unit can be different with independent control
Small micro mirror unit can be set into asynchronous scanning, it can be achieved that different height space is different when carrying out spatial information scan rebuilding
Step scanning.
Embodiment 2:
This implementation proposes the scheme of the small mirror array design of two-dimentional MEMS, and MEMS micromirror is resolved into multiple small micro mirror lists
Member, big angle rotary may be implemented in each small micro mirror unit, and is not take up too many space in a thickness direction, based on existing half
Semiconductor process can make, and be easy to produce in batches, and multiple small micro mirror units form MEMS micromirror array 3.
Fig. 3 is the light path principle schematic diagram of the embodiment 2 of the 3-D scanning laser radar of the invention based on MEMS micromirror.
As shown in figure 3, including emitting laser array 4, collimation the present embodiment provides the 3-D scanning laser radar based on MEMS micromirror
Optical element 2, MEMS micromirror array 3 and detector；The exploring laser light signal that the emitting laser issues passes through collimating optics
Element (collimation optics are specially collimation lens) is collimated to the MEMS micromirror array, is emitted through the MEMS micromirror array
To detection target；The exploring laser light signal of detection target reflection is received to the detector；Specifically, pick-up probe is for connecing
It receives the reflection laser of target reverberation in the target area and is converted into echo pulse signal；It is connect again via signal processing module
It receives and handles the echo pulse signal to obtain the location information of the target reverberation.
The MEMS micromirror of single small size is replaced with to the design of large scale two dimension MEMS micromirror array, it is micro- MEMS can be solved
Mirror helps to realize the long-range detection of laser radar in the application restricted problem of large scale light spot laser radar.
When using single light source, if hot spot cutting unit number is excessive, the transmission power mistake of each unit can be made
It is low, it will affect detection range and received signal to noise ratio.Therefore, it in remote, antiradar reflectivity target application scenarios, can use
Emitting laser array 4 replaces the design of emitting laser 1, other optical modules and its optical path corresponding relationship and 1 phase of embodiment
Together.As shown in figure 4, each emitting laser of emitting laser array 4 is transmitted to MEMS micromirror array 3, and single transmitting
Device corresponds to single hot spot.Herein, specifically, although Fig. 4 only gives the schematic diagram of three hot spots, but practical application
When, single laser emitter of different number can be used according to the actual situation, and Fig. 4 only provides schematic representation.Further, if you need to
Scanning greater angle range and when the scanning angle of MEMS micromirror 3 cannot be met the requirements, can carry out multiple MEMS micromirror arrays
Cascade, the light beam being emitted from first MEMS micromirror array, is transmitted to second MEMS micromirror array, can effectively promote MEMS and sweep
The whole angle retouched increases the effective range of individual module spacescan, also improves the farthest spy of individual module spacescan
Ranging from.
In short, the 3-D scanning laser radar of the invention based on MEMS micromirror takes full advantage of the small of MEMS micromirror array
The small size of micro mirror unit, low in energy consumption, control circuit and the simple remarkable advantage of algorithm, and the manufacture craft source of small micro mirror unit
In the semiconducter process of existing maturation, reliable in quality is easily produced in batches, helps to push laser radar product in each field
Further it is widely applied；Present invention also proposes the MEMS micromirror (small micro mirror unit) of single small size is combined into large scale two
The design for tieing up MEMS micromirror array, can solve MEMS micromirror in the application restricted problem of large scale light spot laser radar, facilitate
Realize the long-range detection of laser radar.
The present invention is not limited to above-mentioned optional embodiment, anyone can show that other are each under the inspiration of the present invention
The product of kind form.Above-mentioned specific embodiment should not be understood the limitation of pairs of protection scope of the present invention, protection of the invention
Range should be subject to be defined in claims, and specification can be used for interpreting the claims.
Claims (7)
1. a kind of 3-D scanning laser radar based on MEMS micromirror, it is characterised in that: including emitting laser, collimating optics member
Part, MEMS micromirror array and detector；
The exploring laser light signal that the emitting laser issues is collimated by the collimation optics to the MEMS micromirror battle array
Column emit through the MEMS micromirror array to detection target；
The exploring laser light signal of detection target reflection is received to the detector；
The MEMS micromirror array includes multiple small micro mirror units, and multiple small micro mirror units are arranged in two-dimensional array, all small micro-
Mirror unit can be rotated in three-dimensional.
2. the 3-D scanning laser radar according to claim 1 based on MEMS micromirror, it is characterised in that: the transmitting swashs
Light device is semiconductor laser, optical fiber laser or solid state laser.
3. the 3-D scanning laser radar according to claim 2 based on MEMS micromirror, it is characterised in that: further include multiple
Electrostatic drive formula or heat driven decline motor, are declined the corresponding small micro mirror of motor driven by electrostatic drive formula or heat driven
Unit is rotated in three-dimensional.
4. the 3-D scanning laser radar according to claim 3 based on MEMS micromirror, it is characterised in that: the transmitting swashs
Light device replaces with emitting laser array.
5. the 3-D scanning laser radar according to claim 1 based on MEMS micromirror, it is characterised in that: the detector
For single point detector or 2-dimensional array detector.
6. the 3-D scanning laser radar according to claim 5 based on MEMS micromirror, it is characterised in that: detection target is anti-
The exploring laser light signal penetrated is received by receiving lens to the detector, and the receiving lens are non-spherical lens.
7. the 3-D scanning laser radar based on MEMS micromirror described in any one of -6 claims according to claim 1, special
Sign is: the collimation optics are non-spherical lens.
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| CN201810927949.4A CN108983197B (en) | 2018-08-15 | 2018-08-15 | Three-dimensional scanning laser radar based on MEMS (micro-electromechanical systems) micro-mirror |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950793A (en) * | 2019-05-10 | 2019-06-28 | 苏州长光华芯半导体激光创新研究院有限公司 | VCSEL array light source system based on MEMS micromirror scanning |
| CN109980502A (en) * | 2019-05-10 | 2019-07-05 | 苏州长光华芯半导体激光创新研究院有限公司 | VCSEL single-shot luminous point light-source system based on MEMS micromirror scanning |
| CN111283335A (en) * | 2020-03-24 | 2020-06-16 | 宁波大学 | Laser microdissection device and method |
| CN112997095A (en) * | 2020-04-03 | 2021-06-18 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| CN114696193A (en) * | 2022-06-02 | 2022-07-01 | 杭州灵西机器人智能科技有限公司 | Multi-line laser system for 3D measurement, generation and scanning method |
| CN114994892A (en) * | 2022-05-09 | 2022-09-02 | 中国科学院化学研究所 | Laser confocal microscopic imaging system and method |
| CN116047469A (en) * | 2023-01-28 | 2023-05-02 | 深圳煜炜光学科技有限公司 | Laser radar and control method thereof |
| CN116047470A (en) * | 2023-01-28 | 2023-05-02 | 深圳煜炜光学科技有限公司 | Semi-solid laser radar and control method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101241189A (en) * | 2008-03-07 | 2008-08-13 | 邵泽德 | Two-dimensional scanning laser collision avoidance radar system |
| CN108196243A (en) * | 2018-03-14 | 2018-06-22 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
| CN207623628U (en) * | 2017-12-01 | 2018-07-17 | 北京万集科技股份有限公司 | A kind of colimated light system and laser radar based on MEMS galvanometers |
| CN207675944U (en) * | 2017-09-18 | 2018-07-31 | 彭雁齐 | A kind of optical scanner pendulum mirror, laser imaging radar |
-
2018
- 2018-08-15 CN CN201810927949.4A patent/CN108983197B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101241189A (en) * | 2008-03-07 | 2008-08-13 | 邵泽德 | Two-dimensional scanning laser collision avoidance radar system |
| CN207675944U (en) * | 2017-09-18 | 2018-07-31 | 彭雁齐 | A kind of optical scanner pendulum mirror, laser imaging radar |
| CN207623628U (en) * | 2017-12-01 | 2018-07-17 | 北京万集科技股份有限公司 | A kind of colimated light system and laser radar based on MEMS galvanometers |
| CN108196243A (en) * | 2018-03-14 | 2018-06-22 | 北京因泰立科技有限公司 | A kind of 3-D scanning laser radar based on MEMS micromirror |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950793A (en) * | 2019-05-10 | 2019-06-28 | 苏州长光华芯半导体激光创新研究院有限公司 | VCSEL array light source system based on MEMS micromirror scanning |
| CN109980502A (en) * | 2019-05-10 | 2019-07-05 | 苏州长光华芯半导体激光创新研究院有限公司 | VCSEL single-shot luminous point light-source system based on MEMS micromirror scanning |
| CN111283335A (en) * | 2020-03-24 | 2020-06-16 | 宁波大学 | Laser microdissection device and method |
| CN112997095A (en) * | 2020-04-03 | 2021-06-18 | 深圳市速腾聚创科技有限公司 | Laser radar and autopilot device |
| CN114994892A (en) * | 2022-05-09 | 2022-09-02 | 中国科学院化学研究所 | Laser confocal microscopic imaging system and method |
| CN114696193A (en) * | 2022-06-02 | 2022-07-01 | 杭州灵西机器人智能科技有限公司 | Multi-line laser system for 3D measurement, generation and scanning method |
| CN114696193B (en) * | 2022-06-02 | 2022-11-01 | 杭州灵西机器人智能科技有限公司 | Multi-line laser system for 3D measurement, generation and scanning method |
| CN116047469A (en) * | 2023-01-28 | 2023-05-02 | 深圳煜炜光学科技有限公司 | Laser radar and control method thereof |
| CN116047470A (en) * | 2023-01-28 | 2023-05-02 | 深圳煜炜光学科技有限公司 | Semi-solid laser radar and control method thereof |
| CN116047470B (en) * | 2023-01-28 | 2023-06-02 | 深圳煜炜光学科技有限公司 | Semi-solid laser radar and control method thereof |
| CN116047469B (en) * | 2023-01-28 | 2023-06-02 | 深圳煜炜光学科技有限公司 | Laser radar and control method thereof |
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