CN115933162B - Bearing device and micro-scanning super-resolution system - Google Patents
Bearing device and micro-scanning super-resolution system Download PDFInfo
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- CN115933162B CN115933162B CN202211154441.8A CN202211154441A CN115933162B CN 115933162 B CN115933162 B CN 115933162B CN 202211154441 A CN202211154441 A CN 202211154441A CN 115933162 B CN115933162 B CN 115933162B
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- 239000002184 metal Substances 0.000 claims description 7
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- 238000010168 coupling process Methods 0.000 abstract description 3
- 238000005859 coupling reaction Methods 0.000 abstract description 3
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Abstract
The bearing device provided by the embodiment of the invention comprises a base, a transition frame, a moving frame for mounting a load, a flexible connecting assembly, a voice coil motor, a distance detecting assembly and a limiting assembly, wherein the flexible supporting structure is adopted, so that the two-dimensional horizontal movement of the moving frame is effectively ensured, the coupling movement in other directions is reduced, and the parasitic movement of a Z axis is small. Because of adopting the flexible structure, the self deformation rigidity is small, the motor driving force is reduced by driving the motion of the motion frame, and the bandwidth of the system is increased. The voice coil motor is used for driving, so that the driving voltage is low, the power consumption is low, and the sensitivity is higher. The device has the advantages of simple form, compact structure, cost saving and high bearing capacity. The micro-scanning super-resolution system provided by the embodiment of the invention can work at high frequency under the condition of large stroke, adopts a flexible structure to realize two-degree-of-freedom translation, and has the advantages of low driving voltage, low power consumption, high sensitivity, simple form, compact structure, cost saving, large bearing capacity and the like.
Description
Technical Field
The invention relates to the field of optics, in particular to a bearing device and a micro-scanning super-resolution system.
Background
The super resolution of the image can realize a more imaging effect. For traditional super-resolution reconstruction, it is critical to obtain a stable phase difference. At present, two methods for realizing the micro-scanning super-resolution technology exist: imaging methods and optical methods. The image micro scanning super-resolution technology is to take the same target at different time points and sequentially obtain a plurality of pictures with half-pixel phase difference, so as to perform super-resolution processing. The optical micro-scanning super-resolution technology is different from an image method in which a multi-frame accumulation method is adopted, and super-resolution is realized only by scanning an optical element at high frequency. The specific principle is that an optical system internal lens/detector is fixed on a micro-scanning assembly, the optical lens is rapidly moved in the intermittent period of detector exposure, so that sub-pixel deviation exists between front and rear frame images output by the detector, and then a super-resolution reconstruction algorithm is used for processing a low-resolution image sequence into a high-resolution image. Therefore, the device has the advantages of small volume, light weight, easy realization and the like, and is more beneficial to miniaturization and cost reduction.
The micro-scanning super-resolution device is a key device for realizing an optical method and has been applied to aerospace optical loads. The existing micro-scanning super-resolution device generally adopts a piezoelectric stacking mode to realize displacement control. However, due to the limitation of the piezoelectric stack and the amplifying mechanism, the existing optical micro-scanning super-resolution mechanism mostly utilizes the piezoelectric stack to apply a pre-voltage to form pre-deformation, and realizes displacement control in the forward and reverse directions by adjusting the voltage to change the extension length of the stack, so that the movement stroke is small. Meanwhile, the support structure of the piezoelectric driving mode is a piezoelectric amplifying structure and is a rigid structure, the driving force is required to be large, the system bandwidth is limited, and the closed loop bandwidth is low.
Disclosure of Invention
In view of the above, embodiments of the present invention provide a carrier device and a micro-scanning super-resolution system.
In a first aspect, the present invention provides a load bearing apparatus comprising: the voice coil motor comprises a voice coil motor coil and a voice coil motor magnetic seat, the voice coil motor coil is arranged on the moving frame, the voice coil motor magnetic seat is arranged on the base, the voice coil motor magnetic seat is driven by the voice coil motor, the moving frame is provided with a light transmission hole, the flexible connection assembly comprises a first flexible connection piece and a second flexible connection piece, the transition frame is connected with the application frame through the first flexible connection piece, the transition frame is connected with the base through the second flexible connection piece, the voice coil motor comprises a voice coil motor coil and a voice coil motor magnetic seat, the voice coil motor coil is arranged on the moving frame, the voice coil motor magnetic seat is arranged on the base, the moving frame moves in the Y direction relative to the transition frame at a first moment, the moving frame and the transition frame move in the X direction relative to the base at a second moment, and the voice coil motor magnetic seat is arranged on the base.
As an alternative, the dimensions of the moving frame and the transition frame in the Y direction are identical.
As an alternative, the moving frame is square, and the light passing hole is round or square.
As an alternative scheme, still include being used for installing voice coil motor magnetic seat base, voice coil motor magnetic seat base installs on the base, voice coil motor magnetic seat base has hold spacing subassembly with distance detection subassembly's cavity, spacing subassembly with distance detection subassembly is located in the cavity.
As an alternative, the flexible connection unit is an elastic plate.
As an alternative, the flexible connection component is a metal spring.
Alternatively, the flexible connection assembly and the moving frame are connected by screws, bonded or welded.
As an alternative, the number of the voice coil motors is 2, 4 or 8, and when the number of the voice coil motors is 2, each voice coil motor pushes and pulls the motion frame to perform X-direction or Y-direction motion;
when the number of the voice coil motors is 4, pushing and pulling the motion frame by each 2 voice coil motors to perform X-direction or Y-direction motion;
when the number of the voice coil motors is 8, every 4 voice coil motors push and pull the motion frame to perform X-direction or Y-direction motion.
As an alternative, the flexible connection unit has a plurality of flexible connection units, and two adjacent flexible connection units are parallel to each other.
In a second aspect, the present invention also provides a micro-scanning super-resolution system comprising a load and a carrier device as described above, on which the optical element is mounted.
The bearing device provided by the embodiment of the invention comprises a base, a transition frame, a moving frame for mounting a load, a flexible connecting assembly, a voice coil motor, a distance detection assembly for detecting X-direction and Y-direction movement of the moving frame, and a limiting assembly for the moving frame, wherein the flexible supporting structure is adopted to well ensure two-dimensional horizontal movement of the moving frame, reduce coupling movement in other directions and reduce parasitic movement of a Z axis. Because of adopting the flexible structure, the self deformation rigidity is small, the motor driving force is reduced by driving the motion of the motion frame, and the bandwidth of the system is increased. The voice coil motor is used for driving, so that the driving voltage is low, the power consumption is low, and the sensitivity is higher. The device has the advantages of simple form, compact structure, cost saving and high bearing capacity. The micro-scanning super-resolution system provided by the embodiment of the invention can work at high frequency under the condition of large stroke, adopts a flexible structure to realize two-degree-of-freedom translation, and has the advantages of low driving voltage, low power consumption, high sensitivity, simple form, compact structure, cost saving, large bearing capacity and the like.
Drawings
Fig. 1 is a schematic structural diagram of a carrying device according to an embodiment of the present invention;
FIG. 2 is a front view of a carrying device according to an embodiment of the present invention;
FIG. 3 is a schematic top view of a carrier according to an embodiment of the present invention;
fig. 4 is a schematic cross-sectional view of a carrier according to an embodiment of the invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
The terms first, second, third, fourth and the like in the description and in the claims and in the above drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments described herein may be implemented in other sequences than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Referring to fig. 1, in an embodiment of the present invention, a carrying device is provided, including: the voice coil motor comprises a voice coil motor coil 5 and a voice coil motor magnet seat 6, the voice coil motor coil 5 is arranged on the moving frame 3, the voice coil motor magnet seat 6 is arranged on the base 1, the moving frame 3 is provided with a light passing hole, the flexible connection assembly 4 comprises a first flexible connection piece and a second flexible connection piece, the transition frame 2 and the moving frame 3 are connected through the first flexible connection piece, the transition frame 2 and the base 1 are connected through the second flexible connection piece, the voice coil motor coil 5 is arranged on the moving frame 3, the voice coil motor magnet seat 6 is arranged on the base 1, the moving frame 3 moves in the Y direction relative to the transition frame 2 at a first moment under the driving of the voice coil motor, the moving frame 3 and the transition frame 2 move in the X direction relative to the base 1 at a second moment, and the voice coil motor coil 5 and the voice coil motor magnet seat 6 are arranged on the base 1, and the voice coil motor is arranged on the base 1, and the voice coil motor is horizontally moved. The voice coil motor magnet holder 6 is mounted on the base, reducing the mass of the moving frame 3. The clearance between the voice coil motor coil 5 and the voice coil motor magnet holder 6 needs to satisfy the movement ranges in the X-direction and the Y-direction.
In some embodiments, the dimensions of the motion frame 3 and the transition frame 2 in the Y direction are the same.
In some embodiments, the moving frame 3 is square, the light-passing hole is circular or square, the load is mounted in the light-passing hole, and the load may be an optical element, a detector chip, or an optical detector circuit board, which is not limited.
In some embodiments, the device further comprises a voice coil motor magnet base 9 for mounting the voice coil motor magnet base 6, the voice coil motor magnet base 9 is mounted on the base 1, the voice coil motor magnet base 9 has a cavity for accommodating the limit component 8 and the distance detection component 7, and the limit component 8 and the distance detection component 7 are located in the cavity.
In some embodiments, the flexible connection component 4 is an elastic flat plate, which may be a metal elastic sheet, and the flexible connection component 4 is used for realizing the flexible support of the motion frame 3 in the Y-direction horizontal motion, and the flexible connection component is used for realizing the flexible support of the motion frame 3 and the transition frame 2 in the X-direction horizontal motion. The flexible connecting component 4 and the moving frame 3 can be connected by screws, bonded or welded, and the flexible connecting component has simple structure and high precision.
The flexible connection assembly 4 comprises a first flexible connection piece and a second flexible connection piece, the first flexible connection piece comprises two pairs of metal shrapnel which are placed in parallel, and the moving frame 3 is connected with the transition frame 2 through two pairs of metal shrapnels which are placed in parallel. The motion frame 3 can realize Y-direction horizontal motion relative to the transition frame 2. The second flexible connecting piece comprises two pairs of metal shrapnel which are placed in parallel, the transition frame 2 is connected with the base 1 through two pairs of metal shrapnels which are placed in parallel, and the transition frame 2 and the moving frame 3 can move horizontally relative to the base in the X direction. Eventually, two-dimensional horizontal movement of the moving frame 3 relative to the base 1 is achieved.
In some embodiments, the number of the voice coil motors is 2, 4 or 8, and when the number of the voice coil motors is 2, each voice coil motor pushes and pulls the moving frame 3 to perform X-direction or Y-direction movement;
when the number of the voice coil motors is 4, pushing and pulling the motion frame 3 by each 2 voice coil motors to perform X-direction or Y-direction motion;
when the number of the voice coil motors is 8, every 4 voice coil motors push and pull the motion frame 3 to perform X-direction or Y-direction motion.
In some embodiments, the flexible connection unit 4 has a plurality of flexible connection units, and two adjacent flexible connection units are parallel to each other.
The distance detecting component 7 can be a position proximity sensor, in this embodiment, 2 position proximity sensors are respectively installed on the base, the sensing area is a peripheral plane of the moving frame 3, and the X-direction and Y-direction movements of the moving frame 3 are sensed.
It should be noted that, the first-order resonance direction of the system resonance frequency is the X-direction and the Y-direction, and the compensation can be performed by the motor algorithm. The third-order resonance direction is torsion around the Z axis, which can be better than 1000Hz. Thus, the resonant frequency of the final system may be better than 1000Hz.
Referring to fig. 2, 3 and 4, the embodiment of the invention further provides a bearing device, which comprises a base 1, a transition frame 2, a moving frame 3, a flexible connecting piece 4, a voice coil motor coil 5, a voice coil motor magnetic seat 6, a distance detection assembly 7, a limit assembly 8 and a voice coil motor magnetic seat base 9. The transition frame 2 and the moving frame 3 have the same size in the Y direction, and the flexible connection assembly comprises a first flexible connection part and a second flexible connection part, wherein the first flexible connection part can be specifically divided into a first flexible sheet 41, a second flexible sheet 42, a fifth flexible sheet 45 and a sixth flexible sheet 46, the first flexible sheet 41 and the second flexible sheet 42 are placed in parallel on one side of the moving frame 3, one end of the first flexible sheet 41 and one end of the second flexible sheet 42 are connected with the transition frame 2, and the other end of the first flexible sheet 42 is connected with the moving frame 3. The fifth flexible sheet 45 and the sixth flexible sheet 46 are placed in parallel at corresponding positions on the other side of the moving frame 3, and one end of the fifth flexible sheet 45 and one end of the sixth flexible sheet 46 are connected with the transition frame 2, and the other end is connected with the moving frame 3. The motion frame 3 can realize Y-direction horizontal motion relative to the transition frame 2.
As shown in fig. 3, in particular, the base 1 and the transition frame 2 have the same size in the X direction, and the second flexible connector may be specifically divided into a third flexible sheet 43, a fourth flexible sheet 44, a seventh flexible sheet 47 and an eighth flexible sheet 48, where the third flexible sheet 43 and the fourth flexible sheet 44 are placed in parallel on one side of the transition frame 2, and one end of the third flexible sheet 43 and one end of the fourth flexible sheet 44 are connected to the transition frame 2, and the other end is connected to the base 1. The seventh flexible sheet 47 and the eighth flexible sheet 48 are placed in parallel at corresponding positions on the other side of the transition frame 2, and one end of the seventh flexible sheet 47 and one end of the eighth flexible sheet 48 are connected to the transition frame 2, and the other end is connected to the base 1. The transition frame 2 and the moving frame 3 can realize horizontal X-direction movement relative to the base 1. Eventually, two-dimensional horizontal movement of the moving frame 3 relative to the base 1 is achieved.
In this embodiment, 8 voice coil motors are adopted, wherein 8 voice coil motor coils 5 are installed on the moving frame 3, 8 voice coil motor magnetic seats 6 are installed on the base 1, and 4 voice coil motor coils 5 push and pull to realize horizontal movement in one direction.
In connection with the distance detection, as shown in fig. 2, 4 distance detection modules 7 are used to be mounted on the base 1, respectively. The group of 2 distance detection components 7 in the X direction is used for sensing the X direction of the moving frame 3, and the group of 2 distance detection components 7 in the Y direction is used for sensing the Y direction movement of the moving frame 3.
In the limiting aspect, 4 limiting components 8 are respectively arranged on the base 1, the maximum displacement of the limiting moving frame 3 in the X direction and the Y direction can reach 1mm, and the unilateral gap between the coil of the voice coil motor and the magnet seat of the voice coil motor is larger than 1mm.
The load is mounted on the moving frame 3, which in this embodiment is an optical detector circuit board.
The overall dimension of the bearing device provided in this embodiment may be 123mm×123mm, the aperture of light transmission may be 63mm×63mm, and those skilled in the art may flexibly select the bearing device, which is not limited.
The bearing device provided by the scheme is compact in size, large in light-transmitting aperture, and good in service performance, and the ratio of the light-transmitting aperture to the external envelope dimension of the device is better than 1:2.
The bearing device provided by the embodiment of the invention has the following beneficial effects:
1. the flexible support of the motion frame moving horizontally in the Y direction is realized through 4 sheet structures, and the flexible support of the motion frame and the transition frame moving horizontally in the X direction is realized through 4 sheet structures. The attachment of the sheet to the moving frame may be a screw attachment, an adhesive, or a weld.
2. The two-dimensional horizontal movement of the moving frame is realized through the horizontal push-pull of the voice coil motor. The magnetic seat of the voice coil motor is arranged on the base, so that the mass of the moving frame is reduced. The clearance between the voice coil motor coil and the magnetic seat needs to meet the movement range of X direction and Y direction.
3. And the displacement of the moving frame is monitored in real time through a position proximity sensor.
4. The output force of the motor needs to meet the deformation of the flexible support and the dynamic parameters of the moving frame and the load, and at least 2 times of allowance is reserved.
The bearing device provided by the embodiment of the invention comprises a base, a transition frame, a moving frame for mounting a load, a flexible connecting assembly, a voice coil motor, a distance detection assembly for detecting X-direction and Y-direction movement of the moving frame, and a limiting assembly for the moving frame, wherein the flexible supporting structure is adopted to well ensure two-dimensional horizontal movement of the moving frame, reduce coupling movement in other directions and reduce parasitic movement of a Z axis. Because of adopting the flexible structure, the self deformation rigidity is small, the motor driving force is reduced by driving the motion of the motion frame, and the bandwidth of the system is increased. The voice coil motor is used for driving, so that the driving voltage is low, the power consumption is low, and the sensitivity is higher. The device has the advantages of simple form, compact structure, cost saving and high bearing capacity.
Correspondingly, the invention also provides a micro-scanning super-resolution system which comprises a load and the bearing device, wherein the optical element is arranged on the bearing device.
The load may be an optical element, a detector chip, or an optical detector circuit board, which is not limited in this embodiment.
The micro-scanning super-resolution system provided by the embodiment of the invention can work at high frequency under the condition of large stroke, adopts a flexible structure to realize two-degree-of-freedom translation, and has the advantages of low driving voltage, low power consumption, high sensitivity, simple form, compact structure, cost saving, large bearing capacity and the like.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present disclosure may be performed in parallel, sequentially, or in a different order, so long as the desired result of the technical solution of the present disclosure is achieved, and the present disclosure is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (9)
1. A load carrying apparatus comprising: the voice coil motor comprises a voice coil motor coil and a voice coil motor magnetic seat, the voice coil motor coil is arranged on the moving frame, the voice coil motor magnetic seat is arranged on the base, the voice coil motor magnetic seat is driven by the voice coil motor, the moving frame moves in the Y direction relative to the transition frame at a first moment, the moving frame moves in the X direction relative to the base at a second moment, and the distance detection assembly and the voice coil motor magnetic seat are arranged on the base;
the bearing device further comprises a voice coil motor magnetic seat base used for installing the voice coil motor magnetic seat, the voice coil motor magnetic seat base is installed on the base, the voice coil motor magnetic seat base is provided with a cavity for accommodating the limiting assembly and the distance detection assembly, and the limiting assembly and the distance detection assembly are located in the cavity.
2. The carrier of claim 1, wherein the motion frame and the transition frame are the same size in the Y direction.
3. The carrier of claim 2, wherein the moving frame is square and the light passing holes are circular or square.
4. The carrier of claim 1, wherein the flexible connection unit is a flexible flat panel.
5. The carrier as claimed in claim 1 or 4, wherein the flexible connection unit is a metal spring.
6. The carrier of claim 1 or 4, wherein the flexible connection assembly is screwed, glued or welded to the moving frame.
7. The carrier of claim 1, wherein the number of voice coil motors is 2, 4 or 8, and when the number of voice coil motors is 2, each voice coil motor pushes and pulls the moving frame to move in X-direction or Y-direction;
when the number of the voice coil motors is 4, pushing and pulling the motion frame by each 2 voice coil motors to perform X-direction or Y-direction motion;
when the number of the voice coil motors is 8, every 4 voice coil motors push and pull the motion frame to perform X-direction or Y-direction motion.
8. The carrier of claim 1, wherein the flexible connection unit has a plurality of strips, adjacent ones of which are parallel to each other.
9. A micro-scanning super-resolution system comprising a load and a carrier as claimed in any one of claims 1 to 8, on which the optical element is mounted.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211154441.8A CN115933162B (en) | 2022-09-22 | 2022-09-22 | Bearing device and micro-scanning super-resolution system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202211154441.8A CN115933162B (en) | 2022-09-22 | 2022-09-22 | Bearing device and micro-scanning super-resolution system |
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| CN115933162A CN115933162A (en) | 2023-04-07 |
| CN115933162B true CN115933162B (en) | 2024-03-12 |
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