CN101840052A - Two-dimensional rapid control reflector - Google Patents
Two-dimensional rapid control reflector Download PDFInfo
- Publication number
- CN101840052A CN101840052A CN 201010152302 CN201010152302A CN101840052A CN 101840052 A CN101840052 A CN 101840052A CN 201010152302 CN201010152302 CN 201010152302 CN 201010152302 A CN201010152302 A CN 201010152302A CN 101840052 A CN101840052 A CN 101840052A
- Authority
- CN
- China
- Prior art keywords
- voice coil
- coil motor
- linear voice
- bearing
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Telescopes (AREA)
Abstract
The invention relates to a two-dimensional rapid control reflector. A rotating body of the invention, which comprises a reflection lens is in rigid connection with a support base by a self-aligning ball bearing and bearing clearance is eliminated by a compression spring so that the rotating body can universally rotate relative to the support base in the range of 0 to 2 degrees. Therefore, under the driving of two pairs of orthogonally distributed linear voice coil motors, the invention can realize high-frequency rapid two-dimensional rotation of the rotating body and improves working stability and reliability of the rapid control reflector. On the other hand, the rigid supporting mode is beneficial for improving bearing capacity and environmental suitability of the rapid control reflector.
Description
Technical field
The present invention relates to a kind of rapid control reflector, particularly the center adopts self-aligning ball bearing to realize the rapid control reflector of its universal rotation as auxiliary connection.
Background technology
Chinese invention patent " publication number is CN101419330 " discloses a kind of rapid control reflector.It adopts the flexible connection mode load-bearing capacity quite limited, and the elasticity of elastic component is had relatively high expectations, and has fundamentally limited the development of rapid control reflector.When in the face of vibratory impulse, rotating operate outside environment, the functional reliability of this rapid control reflector and stability also can seriously descend.
Summary of the invention
In order to overcome the little deficiency of prior art rapid control reflector load-bearing capacity, improve its applicability to a certain extent, the invention provides a kind of center and adopt self-aligning ball bearing to realize the rapid control reflector of reflector body rigid support abominable relatively working environment such as vibratory impulse, revolution.
The present invention addresses the above problem the technical scheme that is adopted: a kind of two-dimensional rapid control reflector comprises: plane mirror, eyeglass briquetting, mirror unit, central shaft, self-aligning ball bearing, bearing pressure ring, bearing support block, round nut, rocker, compression spring, spring are adjusted seat, set nut, supporting base, linear voice coil motor, micrometric displacement position transducer.Wherein, linear voice coil motor is made up of coil and magnetic support two parts.Plane mirror is connected in a side surface of mirror unit by the eyeglass briquetting, and the opposite side surface of mirror unit is connected mutually with an end surfaces of central shaft.Round nut and central shaft be by being threaded, and the interior ring of self-aligning ball bearing is fixed on the central shaft.Bearing pressure ring is connected mutually with bearing support block, and the outer shroud of self-aligning ball bearing is fixed on the bearing support block.Rocker is connected in the other end of central shaft, with the interior ring of plane mirror, eyeglass briquetting, mirror unit, central shaft, self-aligning ball bearing, the rotating part that round nut is formed rapid control reflector.Bearing support block is connected on four pillars on the supporting base, forms the static part of rapid control reflector with bearing pressure ring, supporting base.The coil of linear voice coil motor is connected on the supporting base, and magnetic support is connected on the rocker, to drive the plane mirror rotation, two linear voice coil motors is arranged respectively on X-axis, Y-axis, is the center symmetric arrangement with the true origin.Four micrometric displacement position transducers become " ten " words to be connected on the bearing support block, and on X-axis, Y-axis each two is the outside that the center is symmetrically distributed in linear voice coil motor with the true origin, to realize the accurate closed-loop control to the plane mirror corner.One end of compression spring is arranged in the center pit of central shaft, and the other end is arranged in spring and adjusts seat, is used to eliminate the play of self-aligning ball bearing.Spring adjustment seat afterbody has fluting, by being threaded on the supporting base, and by set nut locking, the pretightning force that is used to regulate compression spring.
The invention has the beneficial effects as follows: owing to realized being rigidly connected by self-aligning ball bearing between rotary body and the supporting base, fundamentally overcome and flexibly connected deficiency, improve the load-bearing capacity of rapid control reflector to a certain extent, improved the job stability and the reliability of rapid control reflector; Simultaneously, this kind rapid control reflector is to the higher adaptability that has of abominable relatively working environment such as vibratory impulse, revolution; The present invention is simple in structure, economy and facility, and angle range is big, and load-bearing capacity is strong, can be used for the making of the bigger rapid control reflector of bore.
Description of drawings
Fig. 1 is the composition structural drawing of rapid control reflector of the present invention.
Fig. 2 is that the A-A of Fig. 1 is to cut-open view.
Among the figure: 1-eyeglass briquetting; The 2-plane mirror; The 3-self-aligning ball bearing; The 4-central shaft; The 5-bearing pressure ring; The 6-mirror unit; The 7-bearing support block; 8-micrometric displacement position transducer; 9a-first linear voice coil motor; 9b-second linear voice coil motor; 9c-the 3rd linear voice coil motor; 9d-the 4th linear voice coil motor; The 10-supporting base; The 11-compression spring; The 12-spring is adjusted seat; The 13-set nut; The 14-round nut; The 15-rocker; 91-linear voice coil motor magnetic support; 92-linear voice coil motor coil; The 101-pillar; The 121-fluting; Gap between m-rocker and the bearing support block; Gap between n-mirror unit and the bearing pressure ring.
Embodiment
With reference to Fig. 1~2, rapid control reflector of the present invention comprises: eyeglass briquetting 1, plane mirror 2, self-aligning ball bearing 3, central shaft 4, bearing pressure ring 5, mirror unit 6, bearing support block 7, micrometric displacement position transducer 8, the first linear voice coil motor 9a, the second linear voice coil motor 9b, the 3rd linear voice coil motor 9c, the 4th linear voice coil motor 9d, supporting base 10, compression spring 11, spring are adjusted seat 12, set nut 13, round nut 14, rocker 15 and pillar 101.Wherein, linear voice coil motor is made up of magnetic support 91 and coil 92 two parts.Plane mirror 2 is connected in a side surface of mirror unit 6 by eyeglass briquetting 1, and the opposite side surface of mirror unit 6 is connected mutually with an end surfaces of central shaft 4.Round nut 14 and central shaft 4 be by being threaded, and the interior ring of self-aligning ball bearing 3 is fixed on the central shaft 4.Bearing pressure ring 5 is connected mutually with bearing support block 7, and the outer shroud of self-aligning ball bearing 3 is fixed on the bearing support block 7.Rocker 15 is connected in the other end of central shaft 4, with the interior ring of plane mirror 2, eyeglass briquetting 1, mirror unit 6, central shaft 4, self-aligning ball bearing 3, the rotating part that round nut 14 is formed rapid control reflector.Bearing support block 7 is connected on four pillars 101 on the supporting base 10, forms the static part of rapid control reflectors with bearing pressure ring 5, supporting base 10.Wherein, gap m between rocker 15 and the bearing support block 7 is greater than the gap n between bearing pressure ring 5 and the mirror unit 6, therefore, gap n between bearing pressure ring 5 and the mirror unit 6 has determined the angle range of rapid control reflector, makes the rapid control reflector can be with respect to the universal rotation of supporting base in 0~2 ° of scope.Linear voice coil motor magnetic support 91 is connected on the side surface of rocker 15, drives plane mirror 2 rotations to drive rocker 15.Linear voice coil motor coil 92 is connected on the supporting base 10.Wherein, the first linear voice coil motor 9a, the 3rd linear voice coil motor 9c are that the center is in the X-axis symmetric arrangement with the true origin, the second linear voice coil motor 9b, the 4th linear voice coil motor 9d are that the center is in the Y-axis symmetric arrangement, to realize the two dimension rotation of plane mirror 2 with the true origin.8 one-tenth " ten " words of four micrometric displacement position transducers are connected on the bearing support block 7, on X-axis, the Y-axis each two, two micrometric displacement position transducers 8 on the X-axis are the outside that the center is symmetrically distributed in the first linear voice coil motor 9a and the 3rd linear voice coil motor 9c with the true origin, two micrometric displacement position transducers 8 on the Y-axis are the outside that the center is symmetrically distributed in the second linear voice coil motor 9b and the 4th linear voice coil motor 9d with the true origin, are used to realize the accurate closed-loop control to plane mirror 2 corners.One end of compression spring 11 is arranged in the center pit of central shaft 4, and the other end is arranged in spring and adjusts seat 12.Spring adjustment seat 12 is by being threaded on the supporting base 10, and by set nut 13 lockings.Spring adjustment seat 12 afterbodys have fluting 121, the pretightning force that is used to regulate compression spring 11.
During work, the control first linear voice coil motor 9a and the 3rd linear voice coil motor 9c that are positioned on the X-axis line do the push-and-pull campaign, can realize that plane mirror 2 rotates around Y-axis.Because system adopts the metering system of contact, therefore, at plane mirror 2 when Y-axis is rotated, be positioned at the relative displacement that two micrometric displacement position transducers 8 on the X-axis line will pop one's head in respectively separately and feed back to electric machine control system, can realize the closed-loop control of plane mirror 2 around the Y-axis anglec of rotation.On each axis, adopt two micrometric displacement position transducers to carry out displacement measurement, help reducing measuring error, improve the control accuracy of catoptron.
During work, the control second linear voice coil motor 9b and the 4th linear voice coil motor 9d that are positioned on the Y-axis line do the push-and-pull campaign, can realize that plane mirror 2 rotates around X-axis.Because system adopts the metering system of contact, therefore, at plane mirror 2 when X-axis is rotated, be positioned at the relative displacement that two micrometric displacement position transducers 8 on the Y-axis line will pop one's head in respectively separately and feed back to electric machine control system, can realize the closed-loop control of plane reflection 2 around the Y-axis anglec of rotation.
Claims (1)
1. a two-dimensional rapid control reflector comprises: plane mirror (2), mirror unit (6), supporting base (10), first linear voice coil motor (9a), second linear voice coil motor (9b), the 3rd linear voice coil motor (9c), the 4th linear voice coil motor (9d), described four linear voice coil motors comprise linear voice coil motor magnetic support (91) and linear voice coil motor coil (92) respectively, it is characterized in that, this catoptron also comprises: eyeglass briquetting (1), self-aligning ball bearing (3), central shaft (4), bearing pressure ring (5), bearing support block (7), four micrometric displacement position transducers (8), compression spring (11), spring is adjusted seat (12), set nut (13), round nut (14), rocker (15) and pillar (101), plane mirror (2) is connected in a side surface of mirror unit (6) by eyeglass briquetting (1), one end surfaces of central shaft (4) is connected mutually with the opposite side surface of mirror unit (6), round nut (14) and central shaft (4) are by being threaded, and the interior ring of self-aligning ball bearing (3) is fixed on the central shaft (4), bearing pressure ring (5) is connected mutually with bearing support block (7), and the outer shroud of self-aligning ball bearing (3) is fixed on the bearing support block (7), rocker (15) is connected in the other end of central shaft (4), bearing support block (7) is connected on four pillars (101) on the supporting base (10), gap m between rocker (15) and the bearing support block (7) is greater than the gap n between bearing pressure ring (5) and the mirror unit (6), linear voice coil motor magnetic support (91) is connected on the side surface of rocker (15), linear voice coil motor coil (92) is connected on the supporting base (10), first linear voice coil motor (9a), the 3rd linear voice coil motor (9c) is that the center is arranged symmetrically on the X-axis with the true origin, second linear voice coil motor (9b), the 4th linear voice coil motor (9d) is that the center is arranged symmetrically on the Y-axis with the true origin, four micrometric displacement position transducers (8) become " ten " word to be connected on the bearing support block (7), X-axis, on the Y-axis each two, two micrometric displacement position transducers (8) on the X-axis are the outside that the center is symmetrically distributed in first linear voice coil motor (9a) and the 3rd linear voice coil motor (9c) with the true origin, two micrometric displacement position transducers (8) on the Y-axis are the outside that the center is symmetrically distributed in second linear voice coil motor (9b) and the 4th linear voice coil motor (9d) with the true origin, one end of compression spring (11) is arranged in the center pit of central shaft (4), the other end is arranged in spring and adjusts seat (12), spring is adjusted seat (12) by being threaded on the supporting base (10), and the afterbody that spring is adjusted seat (12) is provided with fluting (121).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101523022A CN101840052B (en) | 2010-04-22 | 2010-04-22 | Two-dimensional rapid control reflector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2010101523022A CN101840052B (en) | 2010-04-22 | 2010-04-22 | Two-dimensional rapid control reflector |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101840052A true CN101840052A (en) | 2010-09-22 |
CN101840052B CN101840052B (en) | 2012-02-29 |
Family
ID=42743540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101523022A Expired - Fee Related CN101840052B (en) | 2010-04-22 | 2010-04-22 | Two-dimensional rapid control reflector |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN101840052B (en) |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102313966A (en) * | 2011-09-06 | 2012-01-11 | 中国科学院长春光学精密机械与物理研究所 | Rigid load-bearing quick control reflector |
CN102520517A (en) * | 2011-12-16 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Flexible anti-rotation mechanism for two-dimensional rapid reflector |
CN102608727A (en) * | 2012-03-23 | 2012-07-25 | 中国科学院西安光学精密机械研究所 | Centering tool and method for determining reference of aspheric reflector by using same |
CN102928956A (en) * | 2012-11-26 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Minitype rigid bearing type rapid reflecting mirror |
CN103293634A (en) * | 2013-07-02 | 2013-09-11 | 中国工程物理研究院总体工程研究所 | Adjustable support device used for vertically placed big-caliber reflecting mirror |
CN105005133A (en) * | 2015-06-19 | 2015-10-28 | 安徽大学 | Cage-style spherical split reflector universal adjusting structure |
CN105572862A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Optical-mechanical integrated rapid control reflector |
CN106501912A (en) * | 2016-12-09 | 2017-03-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of multi-faceted eyeglass automatic regulating apparatus |
CN106773022A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension electricity adjusts lens device |
CN108646379A (en) * | 2018-04-10 | 2018-10-12 | 中国计量科学研究院 | Plane mirror system |
CN108663770A (en) * | 2018-05-04 | 2018-10-16 | 长春萨米特光电科技有限公司 | Rapid control reflector large rotation angle mechanism based on cross-spring bearing |
CN108873320A (en) * | 2018-08-18 | 2018-11-23 | 重庆巅慧科技有限公司 | A kind of two-dimensional rapid control reflector |
CN110262036A (en) * | 2019-05-30 | 2019-09-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension wide-angle fast steering mirror |
CN110955014A (en) * | 2019-12-19 | 2020-04-03 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
CN112014937A (en) * | 2020-09-04 | 2020-12-01 | 上海电机学院 | Quick reflector |
CN113589470A (en) * | 2021-08-11 | 2021-11-02 | 中国科学院国家天文台南京天文光学技术研究所 | Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof |
CN115933162A (en) * | 2022-09-22 | 2023-04-07 | 中国科学院长春光学精密机械与物理研究所 | Bearing device and micro-scanning super-resolution system |
CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001033674A (en) * | 1999-07-15 | 2001-02-09 | Agency Of Ind Science & Technol | Posture and position adjuster for optical element |
US20030197910A1 (en) * | 2002-02-01 | 2003-10-23 | Witt John D. | Fast steering mirror |
CN201096954Y (en) * | 2007-06-20 | 2008-08-06 | 中国科学院长春光学精密机械与物理研究所 | Reflective 2-D adjusting machine |
CN101419330A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Split second control reflecting mirror |
-
2010
- 2010-04-22 CN CN2010101523022A patent/CN101840052B/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001033674A (en) * | 1999-07-15 | 2001-02-09 | Agency Of Ind Science & Technol | Posture and position adjuster for optical element |
US20030197910A1 (en) * | 2002-02-01 | 2003-10-23 | Witt John D. | Fast steering mirror |
CN201096954Y (en) * | 2007-06-20 | 2008-08-06 | 中国科学院长春光学精密机械与物理研究所 | Reflective 2-D adjusting machine |
CN101419330A (en) * | 2008-11-17 | 2009-04-29 | 华中科技大学 | Split second control reflecting mirror |
Non-Patent Citations (2)
Title |
---|
《中国科学院研究生院博士学位论文》 20041231 王永辉 快速控制反射镜结构及其动态特性的研究 1-55 , 2 * |
《光机电信息》 20080229 陈娟 等 柔性轴FSM控制技术综述 43-48 1 , 2 * |
Cited By (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102313966A (en) * | 2011-09-06 | 2012-01-11 | 中国科学院长春光学精密机械与物理研究所 | Rigid load-bearing quick control reflector |
CN102313966B (en) * | 2011-09-06 | 2013-04-17 | 中国科学院长春光学精密机械与物理研究所 | Rigid load-bearing quick control reflector |
CN102520517A (en) * | 2011-12-16 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Flexible anti-rotation mechanism for two-dimensional rapid reflector |
CN102608727B (en) * | 2012-03-23 | 2014-03-26 | 中国科学院西安光学精密机械研究所 | Centering tool and method for determining reference of aspheric reflector by using same |
CN102608727A (en) * | 2012-03-23 | 2012-07-25 | 中国科学院西安光学精密机械研究所 | Centering tool and method for determining reference of aspheric reflector by using same |
CN102928956A (en) * | 2012-11-26 | 2013-02-13 | 中国科学院长春光学精密机械与物理研究所 | Minitype rigid bearing type rapid reflecting mirror |
CN103293634A (en) * | 2013-07-02 | 2013-09-11 | 中国工程物理研究院总体工程研究所 | Adjustable support device used for vertically placed big-caliber reflecting mirror |
CN103293634B (en) * | 2013-07-02 | 2015-03-04 | 中国工程物理研究院总体工程研究所 | Adjustable support device used for vertically placed big-caliber reflecting mirror |
CN105005133A (en) * | 2015-06-19 | 2015-10-28 | 安徽大学 | Cage-style spherical split reflector universal adjusting structure |
CN105572862A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Optical-mechanical integrated rapid control reflector |
CN105572862B (en) * | 2015-12-22 | 2018-05-01 | 中国科学院长春光学精密机械与物理研究所 | Ray machine integration rapid control reflector |
CN106501912A (en) * | 2016-12-09 | 2017-03-15 | 中国科学院长春光学精密机械与物理研究所 | A kind of multi-faceted eyeglass automatic regulating apparatus |
CN106501912B (en) * | 2016-12-09 | 2018-10-09 | 中国科学院长春光学精密机械与物理研究所 | A kind of multi-faceted eyeglass automatic regulating apparatus |
CN106773022A (en) * | 2016-12-28 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension electricity adjusts lens device |
CN106773022B (en) * | 2016-12-28 | 2019-04-16 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension electricity tune lens device |
CN108646379A (en) * | 2018-04-10 | 2018-10-12 | 中国计量科学研究院 | Plane mirror system |
CN108646379B (en) * | 2018-04-10 | 2021-03-19 | 中国计量科学研究院 | Plane mirror system |
CN108663770A (en) * | 2018-05-04 | 2018-10-16 | 长春萨米特光电科技有限公司 | Rapid control reflector large rotation angle mechanism based on cross-spring bearing |
CN108663770B (en) * | 2018-05-04 | 2020-09-08 | 长春萨米特光电科技有限公司 | Rapid control reflector large-angle rotating mechanism based on cross spring bearing |
CN108873320A (en) * | 2018-08-18 | 2018-11-23 | 重庆巅慧科技有限公司 | A kind of two-dimensional rapid control reflector |
CN110262036A (en) * | 2019-05-30 | 2019-09-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of two dimension wide-angle fast steering mirror |
CN110262036B (en) * | 2019-05-30 | 2020-11-24 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional large-angle quick deflection reflector |
CN110955014B (en) * | 2019-12-19 | 2022-03-29 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
CN110955014A (en) * | 2019-12-19 | 2020-04-03 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
CN112014937A (en) * | 2020-09-04 | 2020-12-01 | 上海电机学院 | Quick reflector |
CN113589470A (en) * | 2021-08-11 | 2021-11-02 | 中国科学院国家天文台南京天文光学技术研究所 | Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof |
CN113589470B (en) * | 2021-08-11 | 2022-12-16 | 中国科学院国家天文台南京天文光学技术研究所 | Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof |
CN115933162A (en) * | 2022-09-22 | 2023-04-07 | 中国科学院长春光学精密机械与物理研究所 | Bearing device and micro-scanning super-resolution system |
CN115933162B (en) * | 2022-09-22 | 2024-03-12 | 中国科学院长春光学精密机械与物理研究所 | Bearing device and micro-scanning super-resolution system |
CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
CN116719145B (en) * | 2023-08-09 | 2023-12-29 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
Also Published As
Publication number | Publication date |
---|---|
CN101840052B (en) | 2012-02-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101840052B (en) | Two-dimensional rapid control reflector | |
CN101840053B (en) | Two-dimensional high load-bearing large-caliber rapid control reflector | |
CN102313966B (en) | Rigid load-bearing quick control reflector | |
CN110103115B (en) | Three-degree-of-freedom telecentric fixed-point flexible force-controlled grinding and polishing actuator with compliant curved surface | |
CN100414347C (en) | Precision optical adjusting rack | |
CN102520517B (en) | Flexible anti-rotation mechanism for two-dimensional rapid reflector | |
CN101155654A (en) | Hybrid orbiting spindle for shaping non-circular holes | |
CN110955012B (en) | Double-shaft stable and rapid reflecting mirror device based on flexible hinge | |
US20230023718A1 (en) | Multi-axis turntable | |
CN102928956A (en) | Minitype rigid bearing type rapid reflecting mirror | |
JP5404540B2 (en) | Galvanometer scanner | |
CN103511481B (en) | Rotation positioning device | |
CN100517941C (en) | Multi-degree of freedom spherical traveling wave-type ultrasonic motor | |
CN103252762B (en) | High-precision rotary table of gapless connecting rod mechanism and capable of moving slightly | |
CN201008130Y (en) | Multi-freedom degree spherical traveling wave type ultrasonic electric motor | |
CN104440833A (en) | Follow-up-error-free high-rigidity rotating two-dimensional adjusting and positioning device | |
CN112483832A (en) | Rigid-flexible coupling ultra-precise double-shaft turntable | |
CN105204159B (en) | Reduce stress deformation's high accuracy pendulum mirror structure | |
CN104690743A (en) | Robot wrist joint structure based on single-stator multi-degree-of-freedom ultrasonic motor | |
CN109333336B (en) | Ball pivot bearing grinding device | |
CN114576507B (en) | Two-dimensional precision rotary table driven by ultrasonic motor | |
CN202240472U (en) | High-precision plane displacement mechanism | |
CN214265593U (en) | Encoder assembly and joint | |
CN214095945U (en) | High-precision orthogonal rotating shaft measuring device | |
CN104400375A (en) | Declination adjusting device for aero-engine rotor/stator assembly and measurement based on spherical-surface guiding sliding supporting |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120229 Termination date: 20130422 |