CN101840052A - Two-dimensional rapid control reflector - Google Patents

Two-dimensional rapid control reflector Download PDF

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Publication number
CN101840052A
CN101840052A CN 201010152302 CN201010152302A CN101840052A CN 101840052 A CN101840052 A CN 101840052A CN 201010152302 CN201010152302 CN 201010152302 CN 201010152302 A CN201010152302 A CN 201010152302A CN 101840052 A CN101840052 A CN 101840052A
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CN
China
Prior art keywords
voice coil
coil motor
linear voice
bearing
axis
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Granted
Application number
CN 201010152302
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Chinese (zh)
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CN101840052B (en
Inventor
徐新行
时魁
刘长顺
王恒坤
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN2010101523022A priority Critical patent/CN101840052B/en
Publication of CN101840052A publication Critical patent/CN101840052A/en
Application granted granted Critical
Publication of CN101840052B publication Critical patent/CN101840052B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The invention relates to a two-dimensional rapid control reflector. A rotating body of the invention, which comprises a reflection lens is in rigid connection with a support base by a self-aligning ball bearing and bearing clearance is eliminated by a compression spring so that the rotating body can universally rotate relative to the support base in the range of 0 to 2 degrees. Therefore, under the driving of two pairs of orthogonally distributed linear voice coil motors, the invention can realize high-frequency rapid two-dimensional rotation of the rotating body and improves working stability and reliability of the rapid control reflector. On the other hand, the rigid supporting mode is beneficial for improving bearing capacity and environmental suitability of the rapid control reflector.

Description

A kind of two-dimensional rapid control reflector
Technical field
The present invention relates to a kind of rapid control reflector, particularly the center adopts self-aligning ball bearing to realize the rapid control reflector of its universal rotation as auxiliary connection.
Background technology
Chinese invention patent " publication number is CN101419330 " discloses a kind of rapid control reflector.It adopts the flexible connection mode load-bearing capacity quite limited, and the elasticity of elastic component is had relatively high expectations, and has fundamentally limited the development of rapid control reflector.When in the face of vibratory impulse, rotating operate outside environment, the functional reliability of this rapid control reflector and stability also can seriously descend.
Summary of the invention
In order to overcome the little deficiency of prior art rapid control reflector load-bearing capacity, improve its applicability to a certain extent, the invention provides a kind of center and adopt self-aligning ball bearing to realize the rapid control reflector of reflector body rigid support abominable relatively working environment such as vibratory impulse, revolution.
The present invention addresses the above problem the technical scheme that is adopted: a kind of two-dimensional rapid control reflector comprises: plane mirror, eyeglass briquetting, mirror unit, central shaft, self-aligning ball bearing, bearing pressure ring, bearing support block, round nut, rocker, compression spring, spring are adjusted seat, set nut, supporting base, linear voice coil motor, micrometric displacement position transducer.Wherein, linear voice coil motor is made up of coil and magnetic support two parts.Plane mirror is connected in a side surface of mirror unit by the eyeglass briquetting, and the opposite side surface of mirror unit is connected mutually with an end surfaces of central shaft.Round nut and central shaft be by being threaded, and the interior ring of self-aligning ball bearing is fixed on the central shaft.Bearing pressure ring is connected mutually with bearing support block, and the outer shroud of self-aligning ball bearing is fixed on the bearing support block.Rocker is connected in the other end of central shaft, with the interior ring of plane mirror, eyeglass briquetting, mirror unit, central shaft, self-aligning ball bearing, the rotating part that round nut is formed rapid control reflector.Bearing support block is connected on four pillars on the supporting base, forms the static part of rapid control reflector with bearing pressure ring, supporting base.The coil of linear voice coil motor is connected on the supporting base, and magnetic support is connected on the rocker, to drive the plane mirror rotation, two linear voice coil motors is arranged respectively on X-axis, Y-axis, is the center symmetric arrangement with the true origin.Four micrometric displacement position transducers become " ten " words to be connected on the bearing support block, and on X-axis, Y-axis each two is the outside that the center is symmetrically distributed in linear voice coil motor with the true origin, to realize the accurate closed-loop control to the plane mirror corner.One end of compression spring is arranged in the center pit of central shaft, and the other end is arranged in spring and adjusts seat, is used to eliminate the play of self-aligning ball bearing.Spring adjustment seat afterbody has fluting, by being threaded on the supporting base, and by set nut locking, the pretightning force that is used to regulate compression spring.
The invention has the beneficial effects as follows: owing to realized being rigidly connected by self-aligning ball bearing between rotary body and the supporting base, fundamentally overcome and flexibly connected deficiency, improve the load-bearing capacity of rapid control reflector to a certain extent, improved the job stability and the reliability of rapid control reflector; Simultaneously, this kind rapid control reflector is to the higher adaptability that has of abominable relatively working environment such as vibratory impulse, revolution; The present invention is simple in structure, economy and facility, and angle range is big, and load-bearing capacity is strong, can be used for the making of the bigger rapid control reflector of bore.
Description of drawings
Fig. 1 is the composition structural drawing of rapid control reflector of the present invention.
Fig. 2 is that the A-A of Fig. 1 is to cut-open view.
Among the figure: 1-eyeglass briquetting; The 2-plane mirror; The 3-self-aligning ball bearing; The 4-central shaft; The 5-bearing pressure ring; The 6-mirror unit; The 7-bearing support block; 8-micrometric displacement position transducer; 9a-first linear voice coil motor; 9b-second linear voice coil motor; 9c-the 3rd linear voice coil motor; 9d-the 4th linear voice coil motor; The 10-supporting base; The 11-compression spring; The 12-spring is adjusted seat; The 13-set nut; The 14-round nut; The 15-rocker; 91-linear voice coil motor magnetic support; 92-linear voice coil motor coil; The 101-pillar; The 121-fluting; Gap between m-rocker and the bearing support block; Gap between n-mirror unit and the bearing pressure ring.
Embodiment
With reference to Fig. 1~2, rapid control reflector of the present invention comprises: eyeglass briquetting 1, plane mirror 2, self-aligning ball bearing 3, central shaft 4, bearing pressure ring 5, mirror unit 6, bearing support block 7, micrometric displacement position transducer 8, the first linear voice coil motor 9a, the second linear voice coil motor 9b, the 3rd linear voice coil motor 9c, the 4th linear voice coil motor 9d, supporting base 10, compression spring 11, spring are adjusted seat 12, set nut 13, round nut 14, rocker 15 and pillar 101.Wherein, linear voice coil motor is made up of magnetic support 91 and coil 92 two parts.Plane mirror 2 is connected in a side surface of mirror unit 6 by eyeglass briquetting 1, and the opposite side surface of mirror unit 6 is connected mutually with an end surfaces of central shaft 4.Round nut 14 and central shaft 4 be by being threaded, and the interior ring of self-aligning ball bearing 3 is fixed on the central shaft 4.Bearing pressure ring 5 is connected mutually with bearing support block 7, and the outer shroud of self-aligning ball bearing 3 is fixed on the bearing support block 7.Rocker 15 is connected in the other end of central shaft 4, with the interior ring of plane mirror 2, eyeglass briquetting 1, mirror unit 6, central shaft 4, self-aligning ball bearing 3, the rotating part that round nut 14 is formed rapid control reflector.Bearing support block 7 is connected on four pillars 101 on the supporting base 10, forms the static part of rapid control reflectors with bearing pressure ring 5, supporting base 10.Wherein, gap m between rocker 15 and the bearing support block 7 is greater than the gap n between bearing pressure ring 5 and the mirror unit 6, therefore, gap n between bearing pressure ring 5 and the mirror unit 6 has determined the angle range of rapid control reflector, makes the rapid control reflector can be with respect to the universal rotation of supporting base in 0~2 ° of scope.Linear voice coil motor magnetic support 91 is connected on the side surface of rocker 15, drives plane mirror 2 rotations to drive rocker 15.Linear voice coil motor coil 92 is connected on the supporting base 10.Wherein, the first linear voice coil motor 9a, the 3rd linear voice coil motor 9c are that the center is in the X-axis symmetric arrangement with the true origin, the second linear voice coil motor 9b, the 4th linear voice coil motor 9d are that the center is in the Y-axis symmetric arrangement, to realize the two dimension rotation of plane mirror 2 with the true origin.8 one-tenth " ten " words of four micrometric displacement position transducers are connected on the bearing support block 7, on X-axis, the Y-axis each two, two micrometric displacement position transducers 8 on the X-axis are the outside that the center is symmetrically distributed in the first linear voice coil motor 9a and the 3rd linear voice coil motor 9c with the true origin, two micrometric displacement position transducers 8 on the Y-axis are the outside that the center is symmetrically distributed in the second linear voice coil motor 9b and the 4th linear voice coil motor 9d with the true origin, are used to realize the accurate closed-loop control to plane mirror 2 corners.One end of compression spring 11 is arranged in the center pit of central shaft 4, and the other end is arranged in spring and adjusts seat 12.Spring adjustment seat 12 is by being threaded on the supporting base 10, and by set nut 13 lockings.Spring adjustment seat 12 afterbodys have fluting 121, the pretightning force that is used to regulate compression spring 11.
During work, the control first linear voice coil motor 9a and the 3rd linear voice coil motor 9c that are positioned on the X-axis line do the push-and-pull campaign, can realize that plane mirror 2 rotates around Y-axis.Because system adopts the metering system of contact, therefore, at plane mirror 2 when Y-axis is rotated, be positioned at the relative displacement that two micrometric displacement position transducers 8 on the X-axis line will pop one's head in respectively separately and feed back to electric machine control system, can realize the closed-loop control of plane mirror 2 around the Y-axis anglec of rotation.On each axis, adopt two micrometric displacement position transducers to carry out displacement measurement, help reducing measuring error, improve the control accuracy of catoptron.
During work, the control second linear voice coil motor 9b and the 4th linear voice coil motor 9d that are positioned on the Y-axis line do the push-and-pull campaign, can realize that plane mirror 2 rotates around X-axis.Because system adopts the metering system of contact, therefore, at plane mirror 2 when X-axis is rotated, be positioned at the relative displacement that two micrometric displacement position transducers 8 on the Y-axis line will pop one's head in respectively separately and feed back to electric machine control system, can realize the closed-loop control of plane reflection 2 around the Y-axis anglec of rotation.

Claims (1)

1. a two-dimensional rapid control reflector comprises: plane mirror (2), mirror unit (6), supporting base (10), first linear voice coil motor (9a), second linear voice coil motor (9b), the 3rd linear voice coil motor (9c), the 4th linear voice coil motor (9d), described four linear voice coil motors comprise linear voice coil motor magnetic support (91) and linear voice coil motor coil (92) respectively, it is characterized in that, this catoptron also comprises: eyeglass briquetting (1), self-aligning ball bearing (3), central shaft (4), bearing pressure ring (5), bearing support block (7), four micrometric displacement position transducers (8), compression spring (11), spring is adjusted seat (12), set nut (13), round nut (14), rocker (15) and pillar (101), plane mirror (2) is connected in a side surface of mirror unit (6) by eyeglass briquetting (1), one end surfaces of central shaft (4) is connected mutually with the opposite side surface of mirror unit (6), round nut (14) and central shaft (4) are by being threaded, and the interior ring of self-aligning ball bearing (3) is fixed on the central shaft (4), bearing pressure ring (5) is connected mutually with bearing support block (7), and the outer shroud of self-aligning ball bearing (3) is fixed on the bearing support block (7), rocker (15) is connected in the other end of central shaft (4), bearing support block (7) is connected on four pillars (101) on the supporting base (10), gap m between rocker (15) and the bearing support block (7) is greater than the gap n between bearing pressure ring (5) and the mirror unit (6), linear voice coil motor magnetic support (91) is connected on the side surface of rocker (15), linear voice coil motor coil (92) is connected on the supporting base (10), first linear voice coil motor (9a), the 3rd linear voice coil motor (9c) is that the center is arranged symmetrically on the X-axis with the true origin, second linear voice coil motor (9b), the 4th linear voice coil motor (9d) is that the center is arranged symmetrically on the Y-axis with the true origin, four micrometric displacement position transducers (8) become " ten " word to be connected on the bearing support block (7), X-axis, on the Y-axis each two, two micrometric displacement position transducers (8) on the X-axis are the outside that the center is symmetrically distributed in first linear voice coil motor (9a) and the 3rd linear voice coil motor (9c) with the true origin, two micrometric displacement position transducers (8) on the Y-axis are the outside that the center is symmetrically distributed in second linear voice coil motor (9b) and the 4th linear voice coil motor (9d) with the true origin, one end of compression spring (11) is arranged in the center pit of central shaft (4), the other end is arranged in spring and adjusts seat (12), spring is adjusted seat (12) by being threaded on the supporting base (10), and the afterbody that spring is adjusted seat (12) is provided with fluting (121).
CN2010101523022A 2010-04-22 2010-04-22 Two-dimensional rapid control reflector Expired - Fee Related CN101840052B (en)

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102313966A (en) * 2011-09-06 2012-01-11 中国科学院长春光学精密机械与物理研究所 Rigid load-bearing quick control reflector
CN102520517A (en) * 2011-12-16 2012-06-27 中国科学院长春光学精密机械与物理研究所 Flexible anti-rotation mechanism for two-dimensional rapid reflector
CN102608727A (en) * 2012-03-23 2012-07-25 中国科学院西安光学精密机械研究所 Centering tool and method for determining reference of aspheric reflector by using same
CN102928956A (en) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 Minitype rigid bearing type rapid reflecting mirror
CN103293634A (en) * 2013-07-02 2013-09-11 中国工程物理研究院总体工程研究所 Adjustable support device used for vertically placed big-caliber reflecting mirror
CN105005133A (en) * 2015-06-19 2015-10-28 安徽大学 Cage-style spherical split reflector universal adjusting structure
CN105572862A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Optical-mechanical integrated rapid control reflector
CN106501912A (en) * 2016-12-09 2017-03-15 中国科学院长春光学精密机械与物理研究所 A kind of multi-faceted eyeglass automatic regulating apparatus
CN106773022A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 A kind of two dimension electricity adjusts lens device
CN108646379A (en) * 2018-04-10 2018-10-12 中国计量科学研究院 Plane mirror system
CN108663770A (en) * 2018-05-04 2018-10-16 长春萨米特光电科技有限公司 Rapid control reflector large rotation angle mechanism based on cross-spring bearing
CN108873320A (en) * 2018-08-18 2018-11-23 重庆巅慧科技有限公司 A kind of two-dimensional rapid control reflector
CN110262036A (en) * 2019-05-30 2019-09-20 中国科学院长春光学精密机械与物理研究所 A kind of two dimension wide-angle fast steering mirror
CN110955014A (en) * 2019-12-19 2020-04-03 上海无线电设备研究所 High-precision large-caliber quick reflecting mirror system
CN112014937A (en) * 2020-09-04 2020-12-01 上海电机学院 Quick reflector
CN113589470A (en) * 2021-08-11 2021-11-02 中国科学院国家天文台南京天文光学技术研究所 Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof
CN115933162A (en) * 2022-09-22 2023-04-07 中国科学院长春光学精密机械与物理研究所 Bearing device and micro-scanning super-resolution system
CN116719145A (en) * 2023-08-09 2023-09-08 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001033674A (en) * 1999-07-15 2001-02-09 Agency Of Ind Science & Technol Posture and position adjuster for optical element
US20030197910A1 (en) * 2002-02-01 2003-10-23 Witt John D. Fast steering mirror
CN201096954Y (en) * 2007-06-20 2008-08-06 中国科学院长春光学精密机械与物理研究所 Reflective 2-D adjusting machine
CN101419330A (en) * 2008-11-17 2009-04-29 华中科技大学 Split second control reflecting mirror

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001033674A (en) * 1999-07-15 2001-02-09 Agency Of Ind Science & Technol Posture and position adjuster for optical element
US20030197910A1 (en) * 2002-02-01 2003-10-23 Witt John D. Fast steering mirror
CN201096954Y (en) * 2007-06-20 2008-08-06 中国科学院长春光学精密机械与物理研究所 Reflective 2-D adjusting machine
CN101419330A (en) * 2008-11-17 2009-04-29 华中科技大学 Split second control reflecting mirror

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《中国科学院研究生院博士学位论文》 20041231 王永辉 快速控制反射镜结构及其动态特性的研究 1-55 , 2 *
《光机电信息》 20080229 陈娟 等 柔性轴FSM控制技术综述 43-48 1 , 2 *

Cited By (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102313966A (en) * 2011-09-06 2012-01-11 中国科学院长春光学精密机械与物理研究所 Rigid load-bearing quick control reflector
CN102313966B (en) * 2011-09-06 2013-04-17 中国科学院长春光学精密机械与物理研究所 Rigid load-bearing quick control reflector
CN102520517A (en) * 2011-12-16 2012-06-27 中国科学院长春光学精密机械与物理研究所 Flexible anti-rotation mechanism for two-dimensional rapid reflector
CN102608727B (en) * 2012-03-23 2014-03-26 中国科学院西安光学精密机械研究所 Centering tool and method for determining reference of aspheric reflector by using same
CN102608727A (en) * 2012-03-23 2012-07-25 中国科学院西安光学精密机械研究所 Centering tool and method for determining reference of aspheric reflector by using same
CN102928956A (en) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 Minitype rigid bearing type rapid reflecting mirror
CN103293634A (en) * 2013-07-02 2013-09-11 中国工程物理研究院总体工程研究所 Adjustable support device used for vertically placed big-caliber reflecting mirror
CN103293634B (en) * 2013-07-02 2015-03-04 中国工程物理研究院总体工程研究所 Adjustable support device used for vertically placed big-caliber reflecting mirror
CN105005133A (en) * 2015-06-19 2015-10-28 安徽大学 Cage-style spherical split reflector universal adjusting structure
CN105572862A (en) * 2015-12-22 2016-05-11 中国科学院长春光学精密机械与物理研究所 Optical-mechanical integrated rapid control reflector
CN105572862B (en) * 2015-12-22 2018-05-01 中国科学院长春光学精密机械与物理研究所 Ray machine integration rapid control reflector
CN106501912A (en) * 2016-12-09 2017-03-15 中国科学院长春光学精密机械与物理研究所 A kind of multi-faceted eyeglass automatic regulating apparatus
CN106501912B (en) * 2016-12-09 2018-10-09 中国科学院长春光学精密机械与物理研究所 A kind of multi-faceted eyeglass automatic regulating apparatus
CN106773022A (en) * 2016-12-28 2017-05-31 中国科学院长春光学精密机械与物理研究所 A kind of two dimension electricity adjusts lens device
CN106773022B (en) * 2016-12-28 2019-04-16 中国科学院长春光学精密机械与物理研究所 A kind of two dimension electricity tune lens device
CN108646379A (en) * 2018-04-10 2018-10-12 中国计量科学研究院 Plane mirror system
CN108646379B (en) * 2018-04-10 2021-03-19 中国计量科学研究院 Plane mirror system
CN108663770A (en) * 2018-05-04 2018-10-16 长春萨米特光电科技有限公司 Rapid control reflector large rotation angle mechanism based on cross-spring bearing
CN108663770B (en) * 2018-05-04 2020-09-08 长春萨米特光电科技有限公司 Rapid control reflector large-angle rotating mechanism based on cross spring bearing
CN108873320A (en) * 2018-08-18 2018-11-23 重庆巅慧科技有限公司 A kind of two-dimensional rapid control reflector
CN110262036A (en) * 2019-05-30 2019-09-20 中国科学院长春光学精密机械与物理研究所 A kind of two dimension wide-angle fast steering mirror
CN110262036B (en) * 2019-05-30 2020-11-24 中国科学院长春光学精密机械与物理研究所 Two-dimensional large-angle quick deflection reflector
CN110955014B (en) * 2019-12-19 2022-03-29 上海无线电设备研究所 High-precision large-caliber quick reflecting mirror system
CN110955014A (en) * 2019-12-19 2020-04-03 上海无线电设备研究所 High-precision large-caliber quick reflecting mirror system
CN112014937A (en) * 2020-09-04 2020-12-01 上海电机学院 Quick reflector
CN113589470A (en) * 2021-08-11 2021-11-02 中国科学院国家天文台南京天文光学技术研究所 Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof
CN113589470B (en) * 2021-08-11 2022-12-16 中国科学院国家天文台南京天文光学技术研究所 Low-frequency image-stabilizing controllable swing mirror mechanism and working method thereof
CN115933162A (en) * 2022-09-22 2023-04-07 中国科学院长春光学精密机械与物理研究所 Bearing device and micro-scanning super-resolution system
CN115933162B (en) * 2022-09-22 2024-03-12 中国科学院长春光学精密机械与物理研究所 Bearing device and micro-scanning super-resolution system
CN116719145A (en) * 2023-08-09 2023-09-08 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector
CN116719145B (en) * 2023-08-09 2023-12-29 北京瑞控信科技股份有限公司 Two-dimensional non-frame large-angle quick reflector

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