CN102928956A - Minitype rigid bearing type rapid reflecting mirror - Google Patents

Minitype rigid bearing type rapid reflecting mirror Download PDF

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Publication number
CN102928956A
CN102928956A CN2012104871144A CN201210487114A CN102928956A CN 102928956 A CN102928956 A CN 102928956A CN 2012104871144 A CN2012104871144 A CN 2012104871144A CN 201210487114 A CN201210487114 A CN 201210487114A CN 102928956 A CN102928956 A CN 102928956A
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CN
China
Prior art keywords
voice coil
reflecting mirror
bearing
pad
axis
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Pending
Application number
CN2012104871144A
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Chinese (zh)
Inventor
徐新行
王兵
韩旭东
庄昕宇
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Priority to CN2012104871144A priority Critical patent/CN102928956A/en
Publication of CN102928956A publication Critical patent/CN102928956A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a minitype rigid bearing type rapid reflecting mirror. The rapid reflecting mirror comprises a plane reflecting mirror, a lens pressing block, a reflecting mirror base, linear voice coil motors, a joint bearing, a bearing pressing ring, a round nut, a motor support plate, a compressed spring, a spherical support base, a spring base, an adjusting gasket, a ball bearing, a support base and capacitance sensors. By utilizing the minitype rigid bearing type rapid reflecting mirror, a reflecting mirror support plate is directly pushed by the voice coil motors, so that the size of the rapid reflecting mirror in the axis-Z direction is reduced; four minitype capacitance sensors and the four voice coil motors are crosswise distributed, so that the size of the rapid reflecting mirror in the axis-X and axis-Y directions; the compressed spring is adopted, the moving part of the rapid reflecting mirror is supported for twice by the spherical support base and the ball bearing to easily carry out system resetting and quality control; and differential measurement is carried out by the capacitance sensor, i.e., the feedback information from the system every time is acquired by the four sensors in a differential mode, so that the measurement accuracy of the control system is improved.

Description

A kind of miniaturization rigidity bearing-type fast mirror
Technical field
The present invention relates to a kind of fast mirror, particularly the center adopts oscillating bearing to adopt capacitive transducer to carry out the miniaturization rigidity bearing-type fast mirror of position feedback as auxiliary connection, measuring sensor.
Background technology
Chinese invention patent " application number is 201110261049.9 " discloses a kind of rigidity bearing-type fast mirror.Realize being rigidly connected by an oscillating bearing between its motion parts and the static part, increased considerably the load-bearing capacity of system.But voice coil motor swings by rocker Indirect driven catoptron, causes fast mirror Z-direction size larger.On the other hand, fast deinstall on X, Y-axis line, the outside of voice coil motor respectively adopts 1 large volume grating dial gauge to carry out measurement and the feedback of this direction positional information, directly increased the size of fast deinstall X, Y direction.Therefore, although the load-bearing capacity of this fast mirror is strong, anti-jamming effectiveness outstanding, the miniaturization difficulty, its application is very limited.
Summary of the invention
In order to overcome the deficiency of existing rigidity bearing-type fast mirror miniaturization difficulty, further expand rigidity bearing-type fast mirror in the application in the field such as vehicle-mounted, airborne, carrier-borne, the invention provides that a kind of voice coil motor directly promotes the catoptron back up pad, 4 the non-X of capacitive transducer, Y-axis lines are arranged and carried out the miniaturization rigidity bearing-type fast mirrors that positional information is measured.
The present invention addresses the above problem the technical scheme that adopts: a kind of miniaturization rigidity bearing-type fast mirror comprises: plane mirror, eyeglass briquetting, mirror unit, orthoscopic voice coil motor, oscillating bearing, bearing pressure ring, round nut, motor support plate, Compress Spring, spherical support seat, spring base, adjustment pad, ball, supporting base, capacitive transducer.Wherein, voice coil motor is comprised of coil and magnetic support two parts; Mirror unit comprises catoptron back up pad, central shaft, ball hole and 4 capacitive transducers measurement boss, central shaft and capacitive transducer are measured the homonymy that boss is positioned at the catoptron back up pad, and central shaft is positioned at the symcenter place of catoptron back up pad, and 4 capacitive transducers are measured boss and are evenly distributed on centered by central shaft on two line of symmetries of X, Y-axis.Plane mirror is connected in a side surface of catoptron back up pad by the eyeglass briquetting, the coil of 4 voice coil motors becomes " ten " word evenly to be connected in the opposite side surface of catoptron back up pad centered by true origin, on X, the Y-axis line each 2, and the distance of range coordinate initial point equates with the distance that 4 capacitive transducers are measured boss distance X or Y-axis.Round nut and central shaft are threaded connection, and the interior ring of oscillating bearing is fastened on the central shaft.Bearing pressure ring is connected mutually with supporting base, and the outer shroud of oscillating bearing is fastened on the supporting base.Motor support plate is connected on 4 pillars of supporting base, the magnetic support of 4 voice coil motors becomes " ten " word evenly to be connected in a side surface of motor support plate centered by true origin, on X, the Y-axis line each 2, and the distance of range coordinate initial point equates with the distance that 4 capacitive transducers are measured boss distance X or Y-axis.Spring base is connected in the opposite side surface of motor support plate by adjusting pad.The spherical support seat is arranged in the center pit of spring base, and Compress Spring is limited between spring base and the spherical support seat, the pretightning force that can regulate Compress Spring by the adjustment pad of changing different-thickness.Ball is arranged in the ball hole on the mirror unit, and its diameter is than the large 0.02mm of ball, and ball can freely rotate therein.The Internal Spherical Surface of spherical support seat is tangent with the outside surface of ball under the effect of Compress Spring, with the gap between ring and the outer shroud in the elimination oscillating bearing, motion parts for fast mirror provides secondary to support simultaneously, further improves the load-bearing capacity of fast mirror.After finishing assembling, the Internal Spherical Surface of spherical support seat and oscillating bearing be the centre of sphere altogether.4 capacitive transducers are connected on the motor support plate, respectively with mirror unit on 4 measurement boss over against, the angle so that indirect measurement mirror unit rotates around X, Y-axis realizes the closed-loop control to the plane mirror corner.Therefore, the coil of the interior ring of plane mirror, eyeglass briquetting, mirror unit, oscillating bearing, round nut, ball and 4 voice coil motors has formed the rotating part of fast mirror.The magnetic support of the outer shroud of supporting base, oscillating bearing, bearing pressure ring, motor support plate, spring base, adjustment pad, Compress Spring, spherical support seat, capacitive transducer and 4 voice coil motors has formed the static part of fast mirror.Because the magnetic support of voice coil motor weighs 3 ~ 5 times than coil, therefore, select the coil of voice coil motor to be connected mutually with the catoptron back up pad, to reduce the moment of inertia of fast deinstall motion parts.
The invention has the beneficial effects as follows:
Miniaturization rigidity bearing-type fast mirror of the present invention adopts voice coil motor directly to promote the catoptron back up pad, has reduced the size of fast mirror Z-direction; 4 small-sized capacitive transducers and 4 voice coil motors are interspersed, and have reduced the size of fast mirror X, Y direction.Guaranteed the miniaturization of rigidity bearing-type fast mirror from structural principle, be conducive to that rigidity bearing-type fast mirror is abominable at environment, the applications of limited space.
Miniaturization rigidity bearing-type fast mirror of the present invention is rigidly connected by oscillating bearing between motion parts and the supporting base, has inherited rigid support formula fast mirror load-bearing capacity large, the advantage that antijamming capability is strong.
Miniaturization rigidity bearing-type fast mirror of the present invention adopts Compress Spring realization spherical support seat and ball that the secondary of fast mirror motion parts is supported, and the system of being easier to is debug and quality control.
Miniaturization rigidity bearing-type fast mirror of the present invention adopts the capacitive transducer differential measurement, and namely system's feedback information each time obtains by 4 sensor difference, has improved the measuring accuracy of control system.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail.
Fig. 1 is the composition structural drawing of fast mirror of the present invention.
Fig. 2 is that the A-A of Fig. 1 is to cut-open view.
Fig. 3 is the composition structural drawing of mirror unit.
Fig. 4 is the composition structural drawing of supporting base.
Reference numeral among the figure is expressed as: the 1-plane mirror; 2-eyeglass briquetting; The 3-mirror unit; 4-orthoscopic voice coil motor; The 5-oscillating bearing; The 6-bearing pressure ring; The 7-round nut; The 8-motor support plate; The 9-Compress Spring; 10-spherical support seat; The 11-spring base; 12-adjusts pad; The 13-ball; The 14-supporting base; 15-the first capacitive transducer; 16-the second capacitive transducer; 17-the 3rd capacitive transducer; 18-the 4th capacitive transducer; 31-catoptron back up pad; The 32-central shaft; The 33-ball hole; The 34-capacitive transducer is measured boss; The coil of 41-voice coil motor; The magnetic support of 42-voice coil motor; Ring in the 51-oscillating bearing; 52-oscillating bearing outer shroud; 4a-the first voice coil motor; 4b-the second voice coil motor; 4c-the 3rd voice coil motor; 4d-the 4th voice coil motor; The 141-pillar; The first line of symmetry of mm-X, Y-axis; The second line of symmetry of nn-X, Y-axis.
Embodiment
Below in conjunction with accompanying drawing the present invention is done to describe in detail.
With reference to Fig. 1~4, miniaturization rigidity bearing-type fast mirror of the present invention comprises: plane mirror 1, eyeglass briquetting 2, mirror unit 3, the first voice coil motor 4a, the second voice coil motor 4b, the 3rd voice coil motor 4c, the 4th voice coil motor 4d, oscillating bearing 5, bearing pressure ring 6, round nut 7, motor support plate 8, Compress Spring 9, spherical support seat 10, spring base 11, adjustment pad 12, ball 13, supporting base 14, the first capacitive transducer 15, the second capacitive transducer 16, the 3rd capacitive transducer 17, the 4th capacitive transducer 18.Wherein, voice coil motor 4 is comprised of coil 41 and magnetic support 42 two parts; Mirror unit 3 comprises catoptron back up pad 31, central shaft 32, ball hole 33 and 4 capacitive transducers measurement boss 34, central shaft 32 is measured the homonymy that boss 34 is positioned at catoptron back up pad 31 with capacitive transducer, and central shaft 32 is positioned at the symcenter place of catoptron back up pad 31, and 4 capacitive transducers are measured boss 34 and are uniformly distributed in centered by central shaft 32 on the first line of symmetry mm and the second line of symmetry nn of X, Y-axis.Plane mirror 1 is connected in a side surface of catoptron back up pad 31 by eyeglass briquetting 2, the coil 41 of 4 voice coil motors 4 becomes " ten " word evenly to be connected in the opposite side surface of catoptron back up pad 31 centered by true origin O, on X, the Y-axis line each 2, and the distance of range coordinate initial point O equates with the distance that 4 capacitive transducers are measured boss 34 distance X or Y-axis.Round nut 7 is threaded connection with central shaft 32, and the interior ring 51 of oscillating bearing 5 is fastened on the central shaft 32.Bearing pressure ring 6 is connected mutually with supporting base 14, and the outer shroud 52 of oscillating bearing 5 is fastened on the supporting base 14.Motor support plate 8 is connected on 4 pillars 141 of supporting base 14, the magnetic support 42 of 4 voice coil motors becomes " ten " word evenly to be connected in a side surface of motor support plate 8 centered by true origin O, on X, the Y-axis line each 2, and the distance of range coordinate initial point O equates with the distance that 4 capacitive transducers are measured boss 34 distance X or Y-axis.Spring base 11 is connected in the opposite side surface of motor support plate 8 by adjusting pad 12.Spherical support seat 10 is arranged in the center pit of spring base 11, and Compress Spring 9 is limited between spring base 11 and the spherical support seat 10, the pretightning force that can regulate Compress Spring 9 by the adjustment pad 12 of changing different-thickness.Ball 13 is arranged in the ball hole 33 on the mirror unit 3, and its diameter is than ball 13 large 0.02mm, and ball 13 can freely rotate therein.The Internal Spherical Surface of spherical support seat 10 is tangent with the outside surface of ball 13 under the effect of Compress Spring 9, with the gap between ring 51 and the outer shroud 52 in the elimination oscillating bearing, motion parts for fast mirror provides secondary to support simultaneously, further improves the load-bearing capacity of fast mirror.After finishing assembling, the Internal Spherical Surface of spherical support seat 10 and oscillating bearing 5 be centre of sphere O altogether.4 capacitive transducers 15 ~ 18 are connected on the motor support plate 8, respectively with mirror unit 3 on 4 measurement boss 34 over against, the angle so that indirect measurement mirror unit 3 rotates around X, Y-axis realizes the closed-loop control to plane mirror 1 corner.Therefore, the coil 41 of the interior ring 51 of plane mirror 1, eyeglass briquetting 2, mirror unit 3, oscillating bearing, round nut 7, ball 13 and 4 voice coil motors has formed the rotating part of fast mirror.The magnetic support 42 of the outer shroud 52 of supporting base 14, oscillating bearing, bearing pressure ring 6, motor support plate 8, spring base 11, adjustment pad 12, Compress Spring 9, spherical support seat 10, capacitive transducer 15~18 and 4 voice coil motors has formed the static part of fast mirror.Because the magnetic support 42 of voice coil motor is heavy 3 ~ 5 times than coil 41, therefore, select the coil 41 of voice coil motor to be connected mutually with catoptron back up pad 31, to reduce the moment of inertia of fast deinstall motion parts.
During work, control the first voice coil motor 4a, the 3rd voice coil motor 4c that are positioned on the X-axis do the push-and-pull campaign, can realize that plane mirror 1 rotates around Y-axis.When Y-axis was rotated, the measured value of the first capacitive transducer 15 and the second capacitive transducer 16 averaged can obtain the displacement of the first voice coil motor 4a at plane mirror 1; The measured value of the 3rd capacitive transducer 17 and the 4th capacitive transducer 18 averaged to obtain the displacement of the 3rd voice coil motor 4c; Again the displacement of the first voice coil motor 4a and the displacement of the 3rd voice coil motor 4c are averaged, and feed back to servo-control system, can realize the accurate closed-loop control of plane mirror 1 around the Y-axis anglec of rotation.
During work, control the second voice coil motor 4b, the 4th voice coil motor 4d that are positioned on the Y-axis do the push-and-pull campaign, can realize that plane mirror 1 rotates around X-axis.At plane mirror 1 when X-axis is rotated, the first capacitive transducer 15 and the 4th capacitive transducer 18 measured values are averaged can obtain the displacement of the 4th voice coil motor 4d, and the measured value of the second capacitive transducer 16 and the 3rd capacitive transducer 17 is averaged can obtain the displacement of the second voice coil motor 4b; Again the displacement of the second voice coil motor 4b and the displacement of the 4th voice coil motor 4d are averaged, and feed back to servo-control system, can realize the accurate closed-loop control of plane mirror 1 around the X-axis anglec of rotation.
Obviously, above-described embodiment only is for example clearly is described, and is not the restriction to embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here need not also can't give all embodiments exhaustive.And the apparent variation of being extended out thus or change still are among the protection domain of the invention.

Claims (4)

1. miniaturization rigidity bearing-type fast mirror, it is characterized in that, comprising: plane mirror (1), eyeglass briquetting (2), mirror unit (3), 4 voice coil motors (4), oscillating bearing (5), bearing pressure ring (6), round nut (7), motor support plate (8), Compress Spring (9), spherical support seat (10), spring base (11), adjustment pad (12), ball (13), supporting base (14), 4 capacitive transducers;
Each voice coil motor (4) comprises respectively coil (41) and magnetic support (42); Motor support plate (8) is connected on 4 pillars (141) of supporting base (14), the magnetic support (42) of 4 voice coil motors (4) becomes " ten " word evenly to be connected in a side surface of motor support plate (8) centered by true origin O, on X, the Y-axis line each 2, and the distance of range coordinate initial point O equates with the distance that 4 capacitive transducers are measured boss (34) distance X or Y-axis; Spring base (11) is connected in the opposite side surface of motor support plate (8) by adjusting pad (12); Spherical support seat (10) is arranged in the center pit of spring base (11), and Compress Spring (9) is limited between spring base (11) and the spherical support seat (10);
Mirror unit (3) comprises catoptron back up pad (31), central shaft (32), ball hole (33) and 4 capacitive transducers measurement boss (34), central shaft (32) is measured the homonymy that boss (34) is positioned at catoptron back up pad (31) with capacitive transducer, and central shaft (32) is positioned at the symcenter place of catoptron back up pad (31); 4 capacitive transducers are measured boss (34) and are uniformly distributed in centered by central shaft (32) on the first line of symmetry mm and the second line of symmetry nn of X, Y-axis;
Plane mirror (1) is connected in a side surface of catoptron back up pad (31) by eyeglass briquetting (2), the coil (41) of 4 voice coil motors (4) becomes " ten " word evenly to be connected in the opposite side surface of catoptron back up pad (31) centered by true origin O, on X, the Y-axis line each 2, and the distance of range coordinate initial point O equates with the distance that 4 capacitive transducers are measured boss (34) distance X or Y-axis;
Round nut (7) is threaded connection with central shaft (32), and the interior ring (51) of oscillating bearing (5) is fastened on the central shaft (32); Bearing pressure ring (6) is connected mutually with supporting base (14), and the outer shroud (52) of oscillating bearing (5) is fastened on the supporting base (14).
2. rigidity bearing-type fast mirror according to claim 1 is characterized in that, 4 voice coil motors (4) comprising: the first voice coil motor (4a), the second voice coil motor (4b), the 3rd voice coil motor (4c) and the 4th voice coil motor (4d).
3. rigidity bearing-type fast mirror according to claim 1, it is characterized in that, 4 capacitive transducers comprise: the first capacitive transducer (15), the second capacitive transducer (16), the 3rd capacitive transducer (17) and the 4th capacitive transducer (18).
4. arbitrary described rigidity bearing-type fast mirror is characterized in that according to claim 1-3, and the diameter of ball hole (33) is than the large 0.02mm of ball (13).
CN2012104871144A 2012-11-26 2012-11-26 Minitype rigid bearing type rapid reflecting mirror Pending CN102928956A (en)

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103529537A (en) * 2013-10-21 2014-01-22 中国科学院光电技术研究所 Support structure for planar reflection mirror on movement platform
CN104267745A (en) * 2014-09-26 2015-01-07 杭州墨锐机电科技有限公司 Large-caliber ultra-thin self-adaptation secondary mirror control method
CN105929519A (en) * 2016-07-12 2016-09-07 中国科学院光电技术研究所 Serial-connected load carrying type rapid reflector structure
CN106989078A (en) * 2017-06-05 2017-07-28 中国矿业大学 Optical main mirror support hydraulic cylinder and its method that a kind of electromagnetism is oriented to
CN107942472A (en) * 2017-12-07 2018-04-20 西安工业大学 Sparse aperture imaging system beam phase compensatory reflex mirror
CN108242907A (en) * 2018-03-07 2018-07-03 信利光电股份有限公司 A kind of closed-loop feedback arrangement of voice coil motor, voice coil motor and camera module
CN108663770A (en) * 2018-05-04 2018-10-16 长春萨米特光电科技有限公司 Rapid control reflector large rotation angle mechanism based on cross-spring bearing
CN108873319A (en) * 2018-08-18 2018-11-23 重庆大学 One-dimensional rapid control reflector

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CN101840052A (en) * 2010-04-22 2010-09-22 中国科学院长春光学精密机械与物理研究所 Two-dimensional rapid control reflector
CN102313966A (en) * 2011-09-06 2012-01-11 中国科学院长春光学精密机械与物理研究所 Rigid load-bearing quick control reflector

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Publication number Priority date Publication date Assignee Title
CN101563638A (en) * 2006-06-22 2009-10-21 以色列商奥宝科技股份有限公司 Tilting device
CN101840053A (en) * 2010-04-22 2010-09-22 中国科学院长春光学精密机械与物理研究所 Two-dimensional high load-bearing large-caliber rapid control reflector
CN101840052A (en) * 2010-04-22 2010-09-22 中国科学院长春光学精密机械与物理研究所 Two-dimensional rapid control reflector
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Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103529537A (en) * 2013-10-21 2014-01-22 中国科学院光电技术研究所 Support structure for planar reflection mirror on movement platform
CN104267745A (en) * 2014-09-26 2015-01-07 杭州墨锐机电科技有限公司 Large-caliber ultra-thin self-adaptation secondary mirror control method
CN104267745B (en) * 2014-09-26 2017-02-15 杭州墨锐机电科技有限公司 Mirror plane control method
CN105929519A (en) * 2016-07-12 2016-09-07 中国科学院光电技术研究所 Serial-connected load carrying type rapid reflector structure
CN106989078B (en) * 2017-06-05 2018-05-08 中国矿业大学 The optical main mirror support hydraulic cylinder and its method that a kind of electromagnetism is oriented to
CN106989078A (en) * 2017-06-05 2017-07-28 中国矿业大学 Optical main mirror support hydraulic cylinder and its method that a kind of electromagnetism is oriented to
CN107942472A (en) * 2017-12-07 2018-04-20 西安工业大学 Sparse aperture imaging system beam phase compensatory reflex mirror
CN107942472B (en) * 2017-12-07 2023-05-23 西安工业大学 Light beam phase compensating reflector of sparse aperture imaging system
CN108242907A (en) * 2018-03-07 2018-07-03 信利光电股份有限公司 A kind of closed-loop feedback arrangement of voice coil motor, voice coil motor and camera module
CN108663770A (en) * 2018-05-04 2018-10-16 长春萨米特光电科技有限公司 Rapid control reflector large rotation angle mechanism based on cross-spring bearing
CN108663770B (en) * 2018-05-04 2020-09-08 长春萨米特光电科技有限公司 Rapid control reflector large-angle rotating mechanism based on cross spring bearing
CN108873319A (en) * 2018-08-18 2018-11-23 重庆大学 One-dimensional rapid control reflector
CN108873319B (en) * 2018-08-18 2020-06-16 重庆大学 One-dimensional fast control reflector

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Application publication date: 20130213