CN104267745A - Large-caliber ultra-thin self-adaptation secondary mirror control method - Google Patents

Large-caliber ultra-thin self-adaptation secondary mirror control method Download PDF

Info

Publication number
CN104267745A
CN104267745A CN201410499332.9A CN201410499332A CN104267745A CN 104267745 A CN104267745 A CN 104267745A CN 201410499332 A CN201410499332 A CN 201410499332A CN 104267745 A CN104267745 A CN 104267745A
Authority
CN
China
Prior art keywords
mirror
voice coil
secondary mirror
coil motor
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410499332.9A
Other languages
Chinese (zh)
Other versions
CN104267745B (en
Inventor
马军
黄峰
何淑飞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY Co Ltd
Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
Original Assignee
HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY Co Ltd filed Critical HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY Co Ltd
Priority to CN201410499332.9A priority Critical patent/CN104267745B/en
Publication of CN104267745A publication Critical patent/CN104267745A/en
Application granted granted Critical
Publication of CN104267745B publication Critical patent/CN104267745B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
  • Telescopes (AREA)

Abstract

本发明实施例公开了一种大口径超薄自适应副镜控制方法,应用于设置有副镜的望远镜大口径超薄镜面系统,包括以下步骤:在副镜上设置多个涂电容和与其一一对应的音圈电机;按照一定的频率测量表征副镜形变量的副镜涂电容的电容量大小;根据表征副镜形变量的电容量大小对镜面形变信息进行分析产生控制电流大小并转换成数字控制信号;根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型。本发明用于利用音圈电机作为支撑促动器元件,采用设置涂电容的方式反应副镜形变,与传统的自适应光学控制方法比起来,采用非接触式的镜面支撑方式行程更大,频率更高,没有磁滞效应,能够用于更大口径的超薄镜面的支撑。

The embodiment of the present invention discloses a large-diameter ultra-thin self-adaptive sub-mirror control method, which is applied to a large-diameter ultra-thin mirror system of a telescope provided with a sub-mirror, including the following steps: setting a plurality of coated capacitors on the sub-mirror and A corresponding voice coil motor; measure the capacitance of the secondary mirror coating capacitor representing the secondary mirror deformation according to a certain frequency; analyze the mirror deformation information according to the capacitance representing the secondary mirror deformation to generate a control current and convert it into Digital control signal; according to the digital control signal, the conduction current on the voice coil motor is controlled to control the suction force of the voice coil motor to control the secondary mirror type. The invention is used to use the voice coil motor as the supporting actuator element, and adopts the way of setting the coated capacitor to respond to the deformation of the secondary mirror. Compared with the traditional adaptive optical control method, the stroke of the non-contact mirror surface support method is larger and the frequency is larger. Higher, no hysteresis effect, and can be used to support ultra-thin mirrors with larger diameters.

Description

一种大口径超薄自适应副镜控制方法A control method for large-aperture ultra-thin self-adaptive sub-mirror

技术领域technical field

本发明属于电子信息技术领域,特别地涉及一种大口径超薄自适应副镜控制方法。The invention belongs to the technical field of electronic information, and in particular relates to a method for controlling a large-diameter ultra-thin self-adaptive secondary mirror.

背景技术Background technique

为了探索更深的宇宙,现代望远镜发展要求望远镜口径越来越大,对望远镜的光学效率要求越来越高,大口径超薄镜面的研究也越来越得到人们的重视。随着自适应光学的发展,大口径超薄镜面正成为当今世界天文学家研究的重点,具有很高的研究和实用价值。传统的自适应光学系统需要搭建额外的光学元器件,用来形成一个望远镜入瞳的或者是一个大气扰动的共轭像。1989年J.M.Beckers在给美国国家光学天文台的一份申请中,首次提出了使用一个现有的望远镜副镜作为波前改正机构用来矫正大气散射。因为自适应副镜不需要额外引入光学元件,所以相比传统的自适应系统有明显的优势,首先大大减少了反射或者透射面的数量,提高了望远镜的效率;其次自适应副镜系统的红外散射很小,这对光学系统在红外波段的观测十分重要;另外自适应副镜系统没有额外的光学偏振,能明显改善光学系统像质;要建设大口径望远镜,自适应副镜系统是必不可少的一部分,但大口径望远镜的副镜口径一般较大,如何支撑和高频校正镜面面型是大口径超薄自适应副镜设计中面临的一个关键科学问题。In order to explore the deeper universe, the development of modern telescopes requires larger and larger apertures and higher optical efficiency of telescopes. The research on large-aperture ultra-thin mirrors has also attracted more and more attention. With the development of adaptive optics, large-aperture ultra-thin mirrors are becoming the research focus of astronomers in the world today, and have high research and practical value. Traditional adaptive optics systems require the construction of additional optical components to form a conjugate image of a telescope entrance pupil or an atmospheric disturbance. In 1989, in an application to the National Optical Astronomy Observatory of the United States, J.M. Beckers proposed for the first time to use an existing telescope secondary mirror as a wavefront correction mechanism to correct atmospheric scattering. Because the adaptive sub-mirror does not require the introduction of additional optical components, it has obvious advantages over the traditional adaptive system. First, the number of reflection or transmission surfaces is greatly reduced, and the efficiency of the telescope is improved; secondly, the infrared of the adaptive sub-mirror system The scattering is very small, which is very important for the observation of the optical system in the infrared band; in addition, the adaptive secondary mirror system has no additional optical polarization, which can significantly improve the image quality of the optical system; to build a large-aperture telescope, the adaptive secondary mirror system is essential However, the secondary mirrors of large-aperture telescopes are generally larger in diameter. How to support and high-frequency correct the mirror surface is a key scientific problem in the design of large-aperture ultra-thin adaptive secondary mirrors.

故,针对目前现有技术中存在的上述缺陷,实有必要进行研究,以提供一种方案,对大口径副镜面型进行高速检测,并利用控制方法对副镜进行实时矫正,使得副镜面型始终维持在一个适宜形变值。Therefore, in view of the above-mentioned defects in the current prior art, it is necessary to conduct research to provide a solution for high-speed detection of the large-diameter sub-mirror surface type, and to use the control method to correct the sub-mirror in real time, so that the sub-mirror surface type Always maintain an appropriate deformation value.

发明内容Contents of the invention

为解决上述问题,本发明的目的在于提供一种大口径超薄自适应副镜控制方法,用于利用音圈电机(Voice Coil)作为支撑促动器元件,采用设置涂电容的方式反应副镜形变,与传统的自适应光学控制方法比起来,采用非接触式的镜面支撑方式行程更大,频率更高,没有磁滞效应,能够用于更大口径的超薄镜面的支撑。In order to solve the above problems, the object of the present invention is to provide a large-diameter ultra-thin self-adaptive sub-mirror control method, which is used to use a voice coil motor (Voice Coil) as a supporting actuator element, and adopt the method of setting a capacitor to respond to the sub-mirror. Deformation, compared with the traditional adaptive optics control method, the non-contact mirror support method has a larger stroke, higher frequency, no hysteresis effect, and can be used to support ultra-thin mirrors with larger diameters.

为实现上述目的,本发明的技术方案为:To achieve the above object, the technical solution of the present invention is:

一种大口径超薄自适应副镜控制方法,应用于设置有副镜的望远镜大口径超薄镜面系统,包括以下步骤:A large-diameter ultra-thin self-adaptive sub-mirror control method, which is applied to a large-diameter ultra-thin mirror system of a telescope provided with a sub-mirror, comprising the following steps:

在副镜上设置多个涂电容和与其一一对应的音圈电机;Set multiple coating capacitors and voice coil motors corresponding to them one by one on the secondary mirror;

按照一定的频率测量表征副镜形变量的副镜涂电容的电容量大小;Measure the capacitance of the sub-mirror coating capacitor representing the deformation of the sub-mirror at a certain frequency;

根据表征副镜形变量的电容量大小对镜面形变信息进行分析产生控制电流大小并转换成数字控制信号;Analyze the mirror deformation information according to the capacitance representing the secondary mirror deformation to generate a control current and convert it into a digital control signal;

根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型。According to the digital control signal, the conduction current on the voice coil motor is controlled to control the suction force of the voice coil motor to control the secondary mirror type.

优选地,所述涂电容的具体设置方式为,在副镜的薄镜面背面镀一层金属膜作为电容的一极,在副镜的镜面后面的微晶玻璃参考基板上镀另一层金属膜作为电容的另一极,两个极之间的距离为0.05mm-0.15mm。Preferably, the specific arrangement of the capacitor coating is as follows: coating a layer of metal film on the back of the thin mirror surface of the secondary mirror as one pole of the capacitor, and coating another layer of metal film on the glass-ceramic reference substrate behind the mirror surface of the secondary mirror As the other pole of the capacitor, the distance between the two poles is 0.05mm-0.15mm.

优选地,所述音圈电机的具体设置方式为,一块磁铁黏合在副镜面上,音圈电机固定在其正上方的微晶玻璃参考基板上,磁铁和音圈电机中间隔空,距离为0.05mm-0.15mm。Preferably, the specific setting method of the voice coil motor is that a magnet is bonded to the secondary mirror surface, and the voice coil motor is fixed on the glass-ceramic reference substrate directly above it, and the distance between the magnet and the voice coil motor is 0.05 mm -0.15mm.

优选地,所述根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型具体为,Preferably, the method of controlling the conduction current on the voice coil motor according to the digital control signal to control the suction force of the voice coil motor so as to control the secondary mirror type is specifically:

将数字控制信号转换成第一电压信号;converting the digital control signal into a first voltage signal;

将第一电压信号经过电压跟随隔离输出第二电压;Outputting the first voltage signal through voltage follower isolation to output the second voltage;

将第二电压信号转换成电流信号输入至音圈电机两端;converting the second voltage signal into a current signal and inputting it to both ends of the voice coil motor;

采用精密电阻采样音圈电机的实际工作电流,进行采集从而得到真实的电流大小,和主控模块预期想要产生的控制电流大小比较进行进一步的精确控制。The actual working current of the voice coil motor is sampled by a precision resistor, and the real current is obtained by sampling, which is compared with the control current expected to be generated by the main control module for further precise control.

优选地,将数字控制信号转换成第一电压信号采用16位数模转换器AD5668为主芯片。Preferably, a 16-bit digital-to-analog converter AD5668 is used as the main chip to convert the digital control signal into the first voltage signal.

优选地,将第一电压信号经过电压跟随隔离输出第二电压采用高速运算放大器OPA890为主芯片。Preferably, the high-speed operational amplifier OPA890 is used as the main chip to output the second voltage through the voltage follower isolation of the first voltage signal.

优选地,将第二电压信号转换成电流信号输入至音圈电机两端采用低压贴片场效应管FDS9926为主芯片。Preferably, converting the second voltage signal into a current signal and inputting it to both ends of the voice coil motor adopts a low-voltage chip field effect transistor FDS9926 as the main chip.

优选地,采用精密电阻采样音圈电机的实际工作电流采用16位模数转换器AD7694为主芯片。Preferably, a 16-bit analog-to-digital converter AD7694 is used as the main chip to sample the actual working current of the voice coil motor with a precision resistor.

与现有技术相比,本发明的有益效果如下:Compared with the prior art, the beneficial effects of the present invention are as follows:

(1)通过设置多个涂电容进行副镜面型检测,涂电容的变化量精确的反应副镜的形变量;(1) By setting multiple coating capacitors for sub-mirror type detection, the variation of coating capacitors accurately reflects the deformation of the sub-mirror;

(2)每一涂电容的位置上设置一音圈电机对副镜面型进行调整,使得面型调整精确;(2) A voice coil motor is installed at each position of the coated capacitor to adjust the surface shape of the secondary mirror, so that the surface shape can be adjusted accurately;

(3)采用芯片集成方式进行副镜面型检测和副镜调整,使得控制的准确度高,极大的避免了引入测量和调整误差。(3) Adopt chip integration method to detect the surface type of the secondary mirror and adjust the secondary mirror, so that the control accuracy is high, and the introduction of measurement and adjustment errors is greatly avoided.

附图说明Description of drawings

图1为本发明实施例的大口径超薄自适应副镜控制方法的步骤流程图。FIG. 1 is a flow chart of the steps of the method for controlling the large-aperture ultra-thin adaptive secondary mirror according to the embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.

相反,本发明涵盖任何由权利要求定义的在本发明的精髓和范围上做的替代、修改、等效方法以及方案。进一步,为了使公众对本发明有更好的了解,在下文对本发明的细节描述中,详尽描述了一些特定的细节部分。对本领域技术人员来说没有这些细节部分的描述也可以完全理解本发明。On the contrary, the invention covers any alternatives, modifications, equivalent methods and schemes within the spirit and scope of the invention as defined by the claims. Further, in order to make the public have a better understanding of the present invention, some specific details are described in detail in the detailed description of the present invention below. The present invention can be fully understood by those skilled in the art without the description of these detailed parts.

参见图1,所示为本发明实施例的一种大口径超薄自适应副镜控制方法的步骤流程图,应用于设置有副镜的望远镜大口径超薄镜面系统,包括以下步骤:Referring to Fig. 1, it is a flow chart showing the steps of a large-diameter ultra-thin self-adaptive sub-mirror control method according to an embodiment of the present invention, which is applied to a telescope large-diameter ultra-thin mirror system provided with a sub-mirror, including the following steps:

S10,在副镜上设置多个涂电容和与其一一对应的音圈电机;S10, setting multiple coating capacitors and voice coil motors corresponding to them one by one on the secondary mirror;

S20,按照一定的频率测量表征副镜形变量的副镜涂电容的电容量大小;S20, measuring the capacitance of the sub-mirror coating capacitor representing the deformation of the sub-mirror according to a certain frequency;

S30,根据表征副镜形变量的电容量大小对镜面形变信息进行分析产生控制电流大小并转换成数字控制信号;S30, analyzing the deformation information of the mirror according to the capacitance representing the deformation of the secondary mirror to generate a control current and converting it into a digital control signal;

S40,根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型。S40, controlling the suction force of the voice coil motor by controlling the conduction current on the voice coil motor according to the digital control signal, so as to control the secondary mirror type.

自适应副镜(adaptive secondary)厚度一般为2mm,直径一般在500mm以上,副镜镜面为实时的校正大气对光路的影响,镜面需要以很高的频率(一般在1KHz以上)快速的改变面型,镜面使用了很多个音圈电机促动器(voice coilactuators)支撑,促动器需要提供的力很小,一般在1N以下,只是要力变化的频率要达到很高的频率。通过以上设置的本发明实施例的大口径超薄自适应副镜控制方法,当设置在副镜上的涂电容随副镜的形变产生形变时,副镜涂电容的电容量大小将发生变化,此时测量出电容量,并将电容量与标准电容量进行对比进而产生需要,测算出副镜的行变量并发送驱动控制信号至副镜调整电路,副镜调整电路输出电流驱动音圈电机补偿副镜涂电容的形变,使得副镜形状恢复至形变前。Adaptive secondary mirror (adaptive secondary) thickness is generally 2mm, diameter is generally more than 500mm, the mirror surface of the secondary mirror is to correct the influence of the atmosphere on the optical path in real time, and the mirror surface needs to change the surface shape quickly at a very high frequency (generally above 1KHz) , the mirror surface is supported by many voice coil actuators (voice coil actuators). The actuators need to provide a small force, generally below 1N, but the frequency of force change must reach a very high frequency. Through the large-diameter ultra-thin adaptive sub-mirror control method of the embodiment of the present invention set above, when the coating capacitance arranged on the sub-mirror deforms with the deformation of the sub-mirror, the capacitance of the coating capacitor of the sub-mirror will change. At this time, the capacitance is measured, and the capacitance is compared with the standard capacitance to generate the need. The row variable of the secondary mirror is calculated and the driving control signal is sent to the secondary mirror adjustment circuit. The output current of the secondary mirror adjustment circuit drives the voice coil motor for compensation. The deformation of the secondary mirror coating capacitor makes the shape of the secondary mirror return to before the deformation.

在具体实施例中,涂电容的具体设置方式为,在副镜的薄镜面背面镀一层金属膜作为电容的一极,在副镜的镜面后面的微晶玻璃参考基板上镀另一层环形金属膜作为电容的另一极,两个极之间的距离为0.05mm-0.15mm。例如一具体实例中,设基板与镜面之间间距d=0.1mm,基板一侧环形极板,内径12mm,外径18mm。则极板面积S=141.372mm2,考虑在空气中,相对介电常数εr=1.00058986,真空介电常数ε0=8.854187817620×10-12F·m-1,可以得到标准状态下单个电容传感器的电容量为:In a specific embodiment, the specific arrangement of coating capacitors is to coat a layer of metal film on the back of the thin mirror surface of the secondary mirror as a pole of the capacitor, and to coat another layer of annular ring on the glass-ceramic reference substrate behind the mirror surface of the secondary mirror. The metal film is used as the other pole of the capacitor, and the distance between the two poles is 0.05mm-0.15mm. For example, in a specific example, it is assumed that the distance between the substrate and the mirror surface is d=0.1mm, and the annular pole plate on one side of the substrate has an inner diameter of 12mm and an outer diameter of 18mm. Then the plate area S = 141.372mm 2 , considering that in the air, the relative permittivity ε r = 1.00058986, the vacuum permittivity ε 0 = 8.854187817620×10 -12 F·m -1 , a single capacitive sensor in the standard state can be obtained The capacitance is:

CC == ϵϵ 00 ϵϵ rr SS dd == 12.52512.525 pFpF

在基板与镜面之间距离变化10nm时,计算得到电容变化量约为0.001pF。When the distance between the substrate and the mirror changes by 10nm, the calculated capacitance change is about 0.001pF.

在具体实例中,音圈电机的具体设置方式为,一块磁铁黏合在副镜面上,音圈电机固定在其正上方的微晶玻璃参考基板上,磁铁和音圈电机中间隔空,距离为0.05mm-0.15mm。当上端电磁铁中有电流通过时,产生磁场吸合力,从而产生磁场吸合下端磁铁来控制镜面面型,电流越大,吸合力也越大。In a specific example, the specific setting method of the voice coil motor is that a magnet is bonded to the secondary mirror surface, and the voice coil motor is fixed on the glass-ceramic reference substrate directly above it, and the distance between the magnet and the voice coil motor is 0.05 mm. -0.15mm. When a current passes through the upper electromagnet, a magnetic field attraction force is generated, thereby generating a magnetic field to attract the lower magnet to control the surface shape of the mirror. The greater the current, the greater the attraction force.

具体应用实例中,根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型可为,In a specific application example, the method of controlling the conduction current on the voice coil motor according to the digital control signal to control the suction force of the voice coil motor to control the type of secondary mirror can be,

S401,将数字控制信号转换成第一电压信号,将数字控制信号转换成第一电压信号采用16位数模转换器AD5668为主芯片。S401, convert the digital control signal into a first voltage signal, and convert the digital control signal into the first voltage signal by using a 16-bit digital-to-analog converter AD5668 as the main chip.

S402,将第一电压信号经过电压跟随隔离输出第二电压,将第一电压信号经过电压跟随隔离输出第二电压采用高速运算放大器OPA890为主芯片。S402, output the first voltage signal through voltage follower isolation to output the second voltage, and output the first voltage signal through voltage follower isolation to output the second voltage using a high-speed operational amplifier OPA890 as the main chip.

S403,将第二电压信号转换成电流信号输入至音圈电机两端,将第二电压信号转换成电流信号输入至音圈电机两端采用低压贴片场效应管FDS9926为主芯片。S403, converting the second voltage signal into a current signal and inputting it to both ends of the voice coil motor, converting the second voltage signal into a current signal and inputting it to both ends of the voice coil motor, using a low-voltage chip field effect transistor FDS9926 as the main chip.

S404,采用精密电阻采样音圈电机的实际工作电流,进行采集从而得到真实的电流大小,和主控模块预期想要产生的控制电流大小比较进行进一步的精确控制。采用精密电阻采样音圈电机的实际工作电流采用16位模数转换器AD7694为主芯片。S404, use precision resistors to sample the actual working current of the voice coil motor, collect it to obtain the real current, and compare it with the control current expected to be generated by the main control module for further precise control. A 16-bit analog-to-digital converter AD7694 is used as the main chip to sample the actual working current of the voice coil motor with precision resistors.

当获取面型的形变数据后,与标准值进行对比,计算得到需要提供电磁铁的电流大小。通过控制DAC产生控制电压,经过隔离,加到电磁铁两端。因为电磁有固定阻抗,所以电压变化电流也相应变化。此电流由5V电压源经MOS提供。为了能够更精准控制,还特地加了一级ADC电压采集对音圈电机两端电压进行采集从而得到真实的电流大小,和预期想要产生的电流比较,进行进一步的控制,进而准确控制副镜形变状态。After obtaining the deformation data of the surface shape, compare it with the standard value, and calculate the current size that needs to be provided to the electromagnet. The control voltage is generated by controlling the DAC, which is isolated and applied to both ends of the electromagnet. Because electromagnetism has a fixed impedance, the voltage changes and the current changes accordingly. This current is provided by a 5V voltage source through the MOS. In order to be able to control more accurately, a first-level ADC voltage acquisition is specially added to collect the voltage at both ends of the voice coil motor to obtain the real current magnitude, and compare it with the expected current for further control, and then accurately control the secondary mirror deformation state.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. within range.

Claims (8)

1.一种大口径超薄自适应副镜控制方法,应用于设置有副镜的望远镜大口径超薄镜面系统,其特征在于,包括以下步骤:1. A large-diameter ultra-thin self-adaptive secondary mirror control method is applied to a telescope large-diameter ultra-thin mirror system with a secondary mirror, it is characterized in that, comprising the following steps: 在副镜上设置多个涂电容和与其一一对应的音圈电机;Set multiple coating capacitors and voice coil motors corresponding to them one by one on the secondary mirror; 按照一定的频率测量表征副镜形变量的副镜涂电容的电容量大小;Measure the capacitance of the sub-mirror coating capacitor representing the deformation of the sub-mirror at a certain frequency; 根据表征副镜形变量的电容量大小对镜面形变信息进行分析产生控制电流大小并转换成数字控制信号;Analyze the mirror deformation information according to the capacitance representing the secondary mirror deformation to generate a control current and convert it into a digital control signal; 根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型。According to the digital control signal, the conduction current on the voice coil motor is controlled to control the suction force of the voice coil motor to control the secondary mirror type. 2.根据权利要求1所述的大口径超薄自适应副镜控制方法,其特征在于,所述涂电容的具体设置方式为,在副镜的薄镜面背面镀一层金属膜作为电容的一极,在副镜的镜面后面的微晶玻璃参考基板上镀另一层金属膜作为电容的另一极,两个极之间的距离为0.05mm-0.15mm。2. The large-diameter ultra-thin self-adaptive secondary mirror control method according to claim 1, characterized in that, the specific setting method of the capacitor coating is to coat a metal film on the back of the thin mirror surface of the secondary mirror as a part of the capacitor. Pole, another layer of metal film is plated on the glass-ceramic reference substrate behind the mirror surface of the secondary mirror as the other pole of the capacitor, and the distance between the two poles is 0.05mm-0.15mm. 3.根据权利要求1或2所述的大口径超薄自适应副镜控制方法,其特征在于,所述音圈电机的具体设置方式为,一块磁铁黏合在副镜面上,音圈电机固定在其正上方的微晶玻璃参考基板上,磁铁和音圈电机中间隔空,距离为0.05mm-0.15mm。3. The large-diameter ultra-thin self-adaptive secondary mirror control method according to claim 1 or 2, characterized in that, the specific arrangement of the voice coil motor is that a magnet is bonded to the secondary mirror surface, and the voice coil motor is fixed on the surface of the secondary mirror. On the glass-ceramic reference substrate right above it, there is a gap between the magnet and the voice coil motor, and the distance is 0.05mm-0.15mm. 4.根据权利要求1或2所述的大口径超薄自适应副镜控制方法,其特征在于,所述根据数字控制信号控制音圈电机上导通电流大小方式来控制音圈电机的吸合力从而控制副镜面型具体为,4. The large-caliber ultra-thin self-adaptive secondary mirror control method according to claim 1 or 2, characterized in that, the method of controlling the conduction current on the voice coil motor according to the digital control signal is used to control the attraction force of the voice coil motor Thus, the type of sub-mirror is controlled specifically as, 将数字控制信号转换成第一电压信号;converting the digital control signal into a first voltage signal; 将第一电压信号经过电压跟随隔离输出第二电压;Outputting the first voltage signal through voltage follower isolation to output the second voltage; 将第二电压信号转换成电流信号输入至音圈电机两端;converting the second voltage signal into a current signal and inputting it to both ends of the voice coil motor; 采用精密电阻采样音圈电机的实际工作电流,进行采集从而得到真实的电流大小,和主控模块预期想要产生的控制电流大小比较进行进一步的精确控制。The actual working current of the voice coil motor is sampled by a precision resistor, and the real current is obtained by sampling, which is compared with the control current expected to be generated by the main control module for further precise control. 5.根据权利要求4所述的大口径超薄自适应副镜控制方法,其特征在于,将数字控制信号转换成第一电压信号采用16位数模转换器AD5668为主芯片。5. The large-diameter ultra-thin self-adaptive sub-mirror control method according to claim 4, characterized in that a 16-bit digital-to-analog converter AD5668 is used as the main chip to convert the digital control signal into the first voltage signal. 6.根据权利要求4所述的大口径超薄自适应副镜控制方法,其特征在于,将第一电压信号经过电压跟随隔离输出第二电压采用高速运算放大器OPA890为主芯片。6. The large-diameter ultra-thin adaptive secondary mirror control method according to claim 4, characterized in that the high-speed operational amplifier OPA890 is used as the main chip to output the first voltage signal through voltage follower isolation and output the second voltage. 7.根据权利要求4所述的大口径超薄自适应副镜控制方法,其特征在于,将第二电压信号转换成电流信号输入至音圈电机两端采用低压贴片场效应管FDS9926为主芯片。7. The large-diameter ultra-thin self-adaptive sub-mirror control method according to claim 4, characterized in that the second voltage signal is converted into a current signal and input to both ends of the voice coil motor using a low-voltage chip field effect transistor FDS9926 as the main chip. 8.根据权利要求4所述的大口径超薄自适应副镜控制方法,其特征在于,采用精密电阻采样音圈电机的实际工作电流采用16位模数转换器AD7694为主芯片。8. The large-diameter ultra-thin self-adaptive secondary mirror control method according to claim 4, characterized in that the actual working current of the voice coil motor is sampled by a precision resistor and a 16-bit analog-to-digital converter AD7694 is used as the main chip.
CN201410499332.9A 2014-09-26 2014-09-26 Mirror plane control method Expired - Fee Related CN104267745B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410499332.9A CN104267745B (en) 2014-09-26 2014-09-26 Mirror plane control method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410499332.9A CN104267745B (en) 2014-09-26 2014-09-26 Mirror plane control method

Publications (2)

Publication Number Publication Date
CN104267745A true CN104267745A (en) 2015-01-07
CN104267745B CN104267745B (en) 2017-02-15

Family

ID=52159273

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410499332.9A Expired - Fee Related CN104267745B (en) 2014-09-26 2014-09-26 Mirror plane control method

Country Status (1)

Country Link
CN (1) CN104267745B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108712055A (en) * 2018-04-26 2018-10-26 中国科学院国家天文台南京天文光学技术研究所 Voice coil motor for the adaptive distorting lens of heavy caliber
CN109239911A (en) * 2018-07-12 2019-01-18 中国科学院国家天文台南京天文光学技术研究所 Adaptive subaperture based on electric eddy current measurement controls equipment

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2783352Y (en) * 2005-03-04 2006-05-24 中国科学院国家天文台南京天文光学技术研究所 Sub-lens self-adaption positoing mechanism for astronmical telescope
US20090141347A1 (en) * 2007-11-29 2009-06-04 David Joseph Mehrl Apparatus and Method for Using Voice Coils as Screen Motion Sensors
CN102928956A (en) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 A Miniaturized Rigid Bearing Type Fast Mirror

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2783352Y (en) * 2005-03-04 2006-05-24 中国科学院国家天文台南京天文光学技术研究所 Sub-lens self-adaption positoing mechanism for astronmical telescope
US20090141347A1 (en) * 2007-11-29 2009-06-04 David Joseph Mehrl Apparatus and Method for Using Voice Coils as Screen Motion Sensors
CN102928956A (en) * 2012-11-26 2013-02-13 中国科学院长春光学精密机械与物理研究所 A Miniaturized Rigid Bearing Type Fast Mirror

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
R.ARSENAULT 等: ""A Deformable Secondary Mirror for the VLT"", 《PROC. OF SPIE》 *
张玉方 等: ""用于薄镜面主动光学的音圈力促动器设计"", 《光学精密工程》 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108712055A (en) * 2018-04-26 2018-10-26 中国科学院国家天文台南京天文光学技术研究所 Voice coil motor for the adaptive distorting lens of heavy caliber
CN109239911A (en) * 2018-07-12 2019-01-18 中国科学院国家天文台南京天文光学技术研究所 Adaptive subaperture based on electric eddy current measurement controls equipment

Also Published As

Publication number Publication date
CN104267745B (en) 2017-02-15

Similar Documents

Publication Publication Date Title
US20190058936A1 (en) Microelectromechanical microphone
CN100507612C (en) Phase diaphragm for 4f phase coherent imaging system
KR102769084B1 (en) Optical device for lithography system, and lithography system
CN212540843U (en) Portable large-view-field infrared temperature measurement lens
CN102607701B (en) Fourier transformation miniature spectrometer based on moving mirror of micro-electro-mechanical system
CN104267745B (en) Mirror plane control method
DeRoo et al. Deterministic figure correction of piezoelectrically adjustable slumped glass optics
US9097579B2 (en) Electrical calibrated radiometer
Bowens-Rubin et al. Performance of large-format deformable mirrors constructed with hybrid variable reluctance actuators II: initial lab results from FLASH
CN205664972U (en) High -temperature pressure sensor
US20180213334A1 (en) Microelectromechanical microphone
Bagolini et al. High frequency MEMS capacitive mirror for space applications
CN101852650B (en) Device and method for improving temperature measurement uniformity of thermal infrared imager
Knottnerus et al. Microscope objective for imaging atomic strontium with 0.63 micrometer resolution
CN104267746B (en) Mirror plane control system
Charton et al. Recent improvements of high density magnetic deformable mirrors: faster, larger and stronger
Cotroneo et al. Progress in development of adjustable optics for x-ray astronomy
CN202547779U (en) Fourier transformation micro-spectrometer based on micro-electro-mechanical system moving mirror
CN102654733B (en) Wave aberration correcting device and method
KR101482637B1 (en) Method for field of view deviation compensation according to temperature change of mult-band athermalization optic system
Ulmer et al. Controlling the shapes of coated silicon substrates via magnetic fields, a progress report
CN117891066B (en) A method for precise confocal adjustment of spliced sub-mirrors based on cross calibration
JP3289196B2 (en) Method for reducing total nonlinearity of a transducer and method for reducing nonlinearity of a transducer
Liu et al. A motion characteristics modeled angular position sensor by nonlinear transfer of differential capacitance for miniaturized scanning mirrors
Pan et al. High-performance eddy current displacement sensor for adaptive optical systems

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: NANJING INST OF ASTROMICAL PHOTOTECHNOLOGY, STATE

Effective date: 20150506

C41 Transfer of patent application or patent right or utility model
C53 Correction of patent of invention or patent application
CB03 Change of inventor or designer information

Inventor after: Zuo Heng

Inventor after: Yu Haibin

Inventor after: Huang Feng

Inventor after: He Shufei

Inventor after: Liu Jingbiao

Inventor before: Ma Jun

Inventor before: Huang Feng

Inventor before: He Shufei

COR Change of bibliographic data

Free format text: CORRECT: INVENTOR; FROM: MA JUN HUANG FENG HE SHUFEI TO: ZUO HENG YU HAIBIN HUANG FENG HE SHUFEI LIU JINGBIAO

TA01 Transfer of patent application right

Effective date of registration: 20150506

Address after: 6, No. 600, No. 21, No. 310000, Xiasha economic and Technological Development Zone, Zhejiang, Hangzhou Province, 323

Applicant after: HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY CO., LTD.

Applicant after: Nanjing Inst of Astromical Phototechnology, State Astraonomical Observatory, Chi

Address before: 6, No. 600, No. 21, No. 310000, Xiasha economic and Technological Development Zone, Zhejiang, Hangzhou Province, 323

Applicant before: HANGZHOU MORUI ELECTROMECHANICAL SCIENCE & TECHNOLOGY CO., LTD.

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170215

Termination date: 20180926