CN117878032A - 一种紧凑型晶圆传输设备机械手与上料端口互锁系统 - Google Patents

一种紧凑型晶圆传输设备机械手与上料端口互锁系统 Download PDF

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CN117878032A
CN117878032A CN202311291445.5A CN202311291445A CN117878032A CN 117878032 A CN117878032 A CN 117878032A CN 202311291445 A CN202311291445 A CN 202311291445A CN 117878032 A CN117878032 A CN 117878032A
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transmission equipment
loading
loadport
lifting door
port
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张贤龙
马刚
曹洁
桂浩
徐益辉
朱运东
吴继昌
雍友
董阳
董怀宝
李莹莹
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Shanghai Guangchuan Technology Co ltd
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Abstract

一种晶圆传输设备机械手与Loadport互锁系统，包括安全光栅、对射传感器以及控制模块；安全光栅安装在装卸端口Loadport安装面往后距离M的位置上，用于检测晶圆传输设备机械手是否在所述装卸端口Loadport启闭动作的位置上；对射传感器安装在装卸端口Loadport升降门的位置处并兼顾升降门落下的位置，用于检测装卸端口Loadport的升降门是否处在动作的过程中；控制模块用于接收安全光栅及所述对射传感器的信号并分析处理，给晶圆传输设备机械手及装卸端口Loadport下达互锁指令，以确保在装卸端口Loadport的升降门在启闭时，晶圆传输设备机械手停止执行装卸动作。因此，本发明有效的解决了因减小EFEM深度和机器人手指侵入到装卸端口Loadport升降门动作范围内造成的干涉问题，并且减少了EFEM占地面积。

Description

一种紧凑型晶圆传输设备机械手与上料端口互锁系统
技术领域
本发明涉及半导体晶圆传输技术领域，尤其涉及一种紧凑型晶圆传输设备机械手与上料端(Loadport)互锁系统。
背景技术
随着芯片产业的迅猛发展，半导体晶圆生产、高端封装、微机电系统(Micro-Electro-Mechanical System简称MEMS)和发光二极管(LightEmittingDiode简称LED)等领域应用的涂胶机、喷胶机去胶机以及清洗机等工艺处理设备提出了更高的要求。特别是，工艺设备的占地面积对于制造(Fab)厂来说也是很重要指标之一。
作为半导体工艺设备整套系统中的一个集成子系统的半导体设备前端模块(Equipment Front End Module，简称EFEM)，通常由上料装置、机器人、预对准装置、大气过滤单元和缓存冷却单元等部件组成。
EFEM主要应用于半导体晶圆载盒人工或自动上下料以及半导体晶圆校准，以实现半导体晶圆在大气环境与真空环境之间的相互转换。对于客户来说，EFEM的占地面积也是考虑的重要指标之一。
EFEM占地面积越小越有竞争力，对于晶圆制造(Fab)厂来说，设备占地面积越小，同样面积的洁净车间，就能容纳下更多的设备，相应的产能就越多，经济效益就会越好。
本领域技术人员清楚，EFEM占地面积主要受到机器人的手指长度、预对准装置和缓存冷却单元的安装位置及装卸端口(Loaport)开门位置的影响。机器人手指的长度取决于客户工位到EFEM内部机器人的距离，以及机器人手指可以进入客户设备腔体的距离。
一般的来说，Loadport安装面往后一定的距离M(例如，100mm)的范围需要永久保留，不能有物体侵入。但是，在实际情况下，只有在Loadport开门的时候，才会有影响。
因此，考虑保证机器人手指可正常取到客户工位的晶圆时的长度，入侵Loadport安装面往后100mm的空间，将EFEM的深度尽可能的做到最小，只是也业界急需解决的问题。
发明内容
本发明旨在至少在一定程度上解决相关上述技术中的问题之一。为此，本发明的目的在于提供一种紧凑型晶圆传输设备机械手与装卸端口互锁系统，用于解决装卸端口开门时会和机器人手指干涉的问题，避免碰撞造成机器人手指和装卸端口部件损坏，也就是说，在装卸端口开门的时候，机器人手指需避开处在该位置上
为了实现上述目的，本申请采用如下技术方案：
一种晶圆传输设备机械手与Loadport互锁系统，所述晶圆传输设备机械手用于从具有升降门的装卸端口Loadpor取放晶圆；所述装卸端口Loadport在开启所述升降门时，所述升降门需向所述晶圆传输设备机械手伸出的方向对冲距离M后，向下垂直缩进打开；所述装卸端口Loadport在关闭所述升降门时，需从所述晶圆传输设备机械手向下垂直缩进打开时的位置上升，到位后沿所述晶圆传输设备机械手伸出的方向前进距离M关闭；其特征在于，包括安全光栅、对射传感器以及控制模块；所述安全光栅安装在所述装卸端口Loadport安装面往后距离M的位置上，用于检测所述晶圆传输设备机械手是否在所述装卸端口Loadport启闭动作的位置上；所述对射传感器安装在所述装卸端口Loadport升降门的位置处并兼顾升降门落下的位置，用于检测所述装卸端口Loadport的升降门是否处在动作的过程中；所述控制模块用于接收所述安全光栅及所述对射传感器的信号并分析处理，给所述晶圆传输设备机械手及所述装卸端口Loadport下达互锁指令，以确保在所述装卸端口Loadport的升降门在启闭时，所述晶圆传输设备机械手停止执行装卸动作。
进一步地，所述距离M为100mm。
一种采用上述的晶圆传输设备机械手与Loadport互锁系统的控制方法，其包括如下步骤：
步骤S1：所述控制模块判断所述安全光栅的状态，当检测到所述晶圆传输设备机械手的手指没有遮挡所述安全光栅检测范围时，所述装卸端口Loadport的升降门正常动作；当所述晶圆传输设备机械手的手指遮挡所述安全光栅(3)检测遮挡范围时，终断所述装卸端口Loadport的升降门的动作许可信号，即锁止所述装卸端口Loadport的升降门动作；
步骤S2：将所述晶圆传输设备机械手的手指移出所述安全光栅检测范围后，所述装卸端口Loadport下达升降门动作信号，所述装卸端口Loadport升降门打开或者关闭；
步骤S3：所述装卸端口Loadport升降门在关闭或开启状态下，所述控制模块实时监测所述对射传感器输出的信号，当所述对射传感器没有检测到所述晶圆传输设备机械手，所述晶圆传输设备机械手正常进行动作；当所述对射传感器检测到所述晶圆传输设备机械手，所述晶圆传输设备机械手立即停止动作。
现有技术相比本发明具有如下有益效果：
本发明有效的解决了因减小EFEM深度和机器人手指侵入到装卸端口Loadport升降门动作范围内，造成的干涉问题，并且为减少EFEM占地面积，提供了有力的技术保障。此外，本发明适用行业范围广泛，半导体晶圆工艺生产及传输工艺设备、高端封装、MEMS、LED等其它泛半导体行业。
附图说明
此处的附图被并入说明书中并构成本说明书的一部分，示出了符合本发明的实施例，并与说明书一起用于解释本发明的原理。
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，对于本领域普通技术人员而言，在不付出创造性劳动性的前提下，还可以根据这些附图获得其它的附图。
图1为本发明晶圆传输设备机械手与装卸端口互锁系统的局部俯视图
图2为本发明实施例中安全光栅及光纤对射传感器位置示意图
图3为本发明实施例中对射传感器位置局部放大示意图
附图标记：
1、机器人手指；2、装卸端口Loadport；3、安全光栅；4、对射传感器
具体实施方式
为了对本发明的技术特征、目的和效果有更加清楚的理解，现对照附图详细说明本发明的具体实施方式。以下描述中，需要理解的是，“前”、“后”、“上”、“下”、“左”、“右”、“纵”、“横”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“头”、“尾”等指示的方位或位置关系为基于附图所示的方位或位置关系、以特定的方位构造和操作，仅是为了便于描述本技术方案，而不是指示所指的机构或元件必须具有特定的方位，因此不能理解为对本发明的限制。
还需要说明的是，除非另有明确的规定和限定，“安装”、“相连”、“连接”、“固定”、“设置”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。当一个元件被称为在另一元件“上”或“下”时，该元件能够“直接地”或“间接地”位于另一元件之上，或者也可能存在一个或更多个居间元件。术语“第一”、“第二”、“第三”等仅是为了便于描述本技术方案，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量，由此，限定有“第一”、“第二”、“第三”等的特征可以明示或者隐含地包括一个或者更多个该特征。对于本领域的普通技术人员而言，可以根据具体情况理解上述术语在本发明中的具体含义。
以下描述中，为了说明而不是为了限定，提出了诸如特定系统结构、技术之类的具体细节，以便透彻理解本发明实施例。然而，本领域的技术人员应当清楚，在没有这些具体细节的其它实施例中也可以实现本发明。在其它情况中，省略对众所周知的系统、机构、电路以及方法的详细说明，以免不必要的细节妨碍本发明的描述。
需要说明的是，本发明考虑保证机器人手指可正常取到客户工位的晶圆时的长度，入侵装卸端口Loadport安装面往后100mm的空间，将EFEM的深度尽可能的做到最小，因此，在装卸端口Loadport开门的时候，机器人手指避开不处在该位置上。
请参阅图1，图1为本发明晶圆传输设备机械手与装卸端口互锁系统的局部俯视图。如图1所示，所述晶圆传输设备机械手1用于从具有升降门的装卸端口Loadport2取放晶圆；所述装卸端口Loadport2在开启所述升降门时，所述升降门需向所述晶圆传输设备机械手1伸出的方向对冲距离M后，向下垂直缩进打开；所述装卸端口Loadport2在关闭所述升降门时，需从所述晶圆传输设备机械手1向下垂直缩进打开时的位置上升，到位后沿所述晶圆传输设备机械手1伸出的方向前进距离M关闭。
请参阅图2和图3，图2为本发明实施例中安全光栅及光纤对射传感器位置示意图；图3为本发明实施例中对射传感器位置局部放大示意图。
在本发明的实施例中，所述晶圆传输设备机械手与装卸端口互锁系统可以包括安全光栅3、对射传感器4以及控制模块；所述安全光栅3安装在所述装卸端口Loadport2安装面往后距离M的位置上，用于检测所述晶圆传输设备机械手1是否在所述装卸端口Loadport2启闭动作的位置上；所述对射传感器4安装在所述装卸端口Loadport2升降门的位置处并兼顾升降门落下的位置，用于检测所述装卸端口Loadport2的升降门是否处在动作的过程中；所述控制模块用于接收所述安全光栅3及所述对射传感器4的信号并分析处理，给所述晶圆传输设备机械手1及所述装卸端口Loadport2下达互锁指令，以确保在所述装卸端口Loadport2的升降门在启闭时，所述晶圆传输设备机械手1停止执行装卸动作。
通常，所述距离M可以为100mm。
在本发明的实施例中，控制模块可以位于EFEM上位机系统中的一个模块，用于接收所述安全光栅3及所述对射传感器4的信号并分析处理，给所述晶圆传输设备机械手1及所述装卸端口Loadport2的升降门下一步的动作指令。
该晶圆传输设备机械手与装卸端口互锁的控制方法，其可以包括如下步骤：
步骤S1：所述控制模块判断所述安全光栅3的状态，当检测到所述晶圆传输设备机械手1的手指没有遮挡所述安全光栅3检测范围时，所述装卸端口Loadport2的升降门正常动作；当所述晶圆传输设备机械手1的手指遮挡所述安全光栅3检测遮挡范围时，终断所述装卸端口Loadport2的升降门的动作许可信号，即锁止所述装卸端口Loadport2的升降门动作；
步骤S2：将所述晶圆传输设备机械手1的手指移出所述安全光栅3检测范围后，所述装卸端口Loadport2下达升降门动作信号，所述装卸端口Loadport2升降门打开或者关闭；
步骤S3：所述装卸端口Loadport2升降门在关闭或开启状态下，所述控制模块实时监测所述对射传感器4输出的信号，当所述对射传感器4没有检测到所述晶圆传输设备机械手1，所述晶圆传输设备机械手1正常进行动作；当所述对射传感器4检测到所述晶圆传输设备机械手1，所述晶圆传输设备机械手1立即停止动作。
需要说明的是，在本发明的实施例中用于机器人手指检测的传感器不局限于安全光栅，也可以是其他可实现该功能的传感器。用于装卸端口Loadport升降门检测的传感器不局限于对射传感器，也可以是其他可实现该功能的传感器，例如反射型传感器，激光传感器等。
本发明的互锁系统应用行业不局限于集成电路产业，也可以应用到泛半导体的其他产业，如平板显示、LED、太阳能电池等产业。
可以理解的，以上实施例仅表达了本发明的优选实施方式，其描述较为具体和详细，但并不能因此而理解为对本发明专利范围的限制；应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，可以对上述技术特点进行自由组合，还可以做出若干变形和改进，这些都属于本发明的保护范围；因此，凡跟本发明权利要求范围所做的等同变换与修饰，均应属于本发明权利要求的涵盖范围。

Claims (3)

1.一种晶圆传输设备机械手与装卸端口互锁系统，所述晶圆传输设备机械手(1)用于从具有升降门的装卸端口Loadport(2)取放晶圆；所述装卸端口Loadport(2)在开启所述升降门时，所述升降门需向所述晶圆传输设备机械手(1)伸出的方向对冲距离M后，向下垂直缩进打开；所述装卸端口Loadport(2)在关闭所述升降门时，需从所述晶圆传输设备机械手(1)向下垂直缩进打开时的位置上升，到位后沿所述晶圆传输设备机械手(1)伸出的方向前进距离M关闭；其特征在于，包括安全光栅(3)、对射传感器(4)以及控制模块；
所述安全光栅(3)安装在所述装卸端口Loadport(2)安装面往后距离M的位置上，用于检测所述晶圆传输设备机械手(1)是否在所述装卸端口Loadport(2)启闭动作的位置上；
所述对射传感器(4)安装在所述装卸端口Loadport(2)升降门的位置处并兼顾升降门落下的位置，用于检测所述装卸端口Loadport(2)的升降门是否处在动作的过程中；
所述控制模块用于接收所述安全光栅(3)及所述对射传感器(4)的信号并分析处理，给所述晶圆传输设备机械手(1)及所述装卸端口Loadport(2)下达互锁指令，以确保在所述装卸端口Loadport(2)的升降门在启闭时，所述晶圆传输设备机械手(1)停止执行装卸动作。
2.根据权利要求1所述的晶圆传输设备机械手与装卸端口互锁系统，其特征在于，所述距离M为100mm。
3.一种采用权利要求1、2或3所述晶圆传输设备机械手与装卸端口互锁系统的控制方法，其特征在于，包括如下步骤：
步骤S1：所述控制模块判断所述安全光栅(3)的状态，当检测到所述晶圆传输设备机械手(1)的手指没有遮挡所述安全光栅(3)检测范围时，所述装卸端口Loadport(2)的升降门正常动作；当所述晶圆传输设备机械手(1)的手指遮挡所述安全光栅(3)检测遮挡范围时，终断所述装卸端口Loadport(2)的升降门的动作许可信号，即锁止所述装卸端口Loadport(2)的升降门动作；
步骤S2：将所述晶圆传输设备机械手(1)的手指移出所述安全光栅(3)检测范围后，所述装卸端口Loadport(2)下达升降门动作信号，所述装卸端口Loadport(2)升降门打开或者关闭；
步骤S3：所述装卸端口Loadport(2)升降门在关闭或开启状态下，所述控制模块实时监测所述对射传感器(4)输出的信号，当所述对射传感器(4)没有检测到所述晶圆传输设备机械手(1)，所述晶圆传输设备机械手(1)正常进行动作；当所述对射传感器(4)检测到所述晶圆传输设备机械手(1)，所述晶圆传输设备机械手(1)立即停止动作。
CN202311291445.5A 2023-10-08 2023-10-08 一种紧凑型晶圆传输设备机械手与上料端口互锁系统 Pending CN117878032A (zh)

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