CN117772644A - Microelectronic component insulation performance testing equipment and testing method - Google Patents
Microelectronic component insulation performance testing equipment and testing method Download PDFInfo
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- CN117772644A CN117772644A CN202410217753.1A CN202410217753A CN117772644A CN 117772644 A CN117772644 A CN 117772644A CN 202410217753 A CN202410217753 A CN 202410217753A CN 117772644 A CN117772644 A CN 117772644A
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- 238000012360 testing method Methods 0.000 title claims abstract description 204
- 238000009413 insulation Methods 0.000 title claims abstract description 57
- 238000004377 microelectronic Methods 0.000 title claims abstract description 23
- 238000003860 storage Methods 0.000 claims abstract description 61
- 238000001514 detection method Methods 0.000 claims abstract description 30
- 230000002159 abnormal effect Effects 0.000 claims abstract description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 28
- 229910052802 copper Inorganic materials 0.000 claims description 28
- 239000010949 copper Substances 0.000 claims description 28
- 239000011261 inert gas Substances 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims description 3
- 238000011056 performance test Methods 0.000 abstract description 2
- 238000010998 test method Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005381 potential energy Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- Testing Relating To Insulation (AREA)
Abstract
The invention relates to the technical field of electronic component insulation test equipment, in particular to microelectronic component insulation performance test equipment and a test method. Be connected with a plurality of bracing pieces between base and the footstock, the ring body is located between base and the footstock, be connected with the support frame between base and the footstock, the support frame is located to the ring body on, this application utilizes rotatable ring body cooperation movable plate, power supply board and detection component, can carry out the detection of batch to a plurality of test pieces, the test piece that insulates abnormal can be released and drop to in the first box by first box carry out classified storage, the test piece that insulates normal can be released and drop to in the second box by second box carry out classified storage, classify storage to the test piece that insulates abnormal, insulates normal, carry out manual sorting according to testing result after the test piece test is accomplished among the prior art has been solved, the problem of the accuracy of test is easily influenced in artificial error.
Description
Technical Field
The invention relates to the technical field of electronic component insulation test equipment, in particular to microelectronic component insulation performance test equipment and a test method.
Background
The IC chip (Integrated Circuit Chip) is a chip formed by placing an integrated circuit formed by a plurality of microelectronic test pieces (transistors, resistors, capacitors, etc.) on a plastic substrate. The IC chip comprises a wafer chip and a packaging chip, and the corresponding IC chip production line consists of a wafer production line and a packaging production line, wherein the insulating property of the chip also needs to be tested before the chip is packaged.
The existing high-voltage insulation test mode of the chip is generally that the chip is manually placed in test equipment, then high-voltage electricity is applied to pins of a test piece, a test part detects whether a shell of the test piece has an electric leakage phenomenon, after the test is finished, the chip is manually sorted according to a detection result, and by adopting the mode, the accuracy of the test is easily affected by human errors.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a microelectronic element insulating property testing device and a testing method, which aim to relieve the problems at least to a certain extent.
The technical aim of the invention is realized by the following technical scheme:
a microelectronic component insulation performance testing apparatus comprising:
the base and the top seat are connected with a plurality of support rods;
The ring body is arranged between the base and the top seat, a supporting frame is connected between the base and the top seat, and the ring body is arranged on the supporting frame;
the device comprises a ring body, a plurality of storage ports, a plurality of detection ports, a top seat and a feeding pipe, wherein the storage ports are formed in the outer side wall of the ring body;
the movable plate is arranged at the top of the base and is positioned at the left side of the ring body, and a power supply plate matched with the storage opening is arranged on the movable plate;
the first box body and the second box body are arranged at the top of the base, the first box body is used for storing an insulation abnormal test piece, and the second box body is used for storing an insulation normal test piece;
the detection component is arranged in the ring body, connected with the support frame and used for testing the insulativity of the test piece, and can move into the detection port when the moving plate moves into the storage port;
the rotating part is arranged between the support frame and the ring body and used for rotating the ring body, and the rotating part can stop rotating the ring body and move the moving plate after rotating the ring body to a preset angle;
The clamping part is arranged in the storage opening and used for fixing the test piece;
the storage opening can cancel the fixing of the clamping part to the test piece when rotating to the first preset position and the third preset position along with the ring body, and the clamping part cancels the fixing of the test piece when rotating to the second preset position and being abnormal in insulation.
Preferably, the clamping part comprises a chute arranged on two sides inside the storage opening, a fixed plate is connected in the chute in a sliding manner, a first spring is connected between the fixed plate and the chute, a sliding opening is respectively arranged at the top and the bottom of the chute, the sliding opening penetrates through the ring body, a sliding plate is connected to the fixed plate in a sliding manner, one end of the sliding plate penetrates through the sliding opening and extends to the inside of the ring body, one end of the sliding plate, which is close to the outer side wall of the ring body, is connected with a first top block, the bottom of the top seat, the top of the first box body and the top of the second box body are respectively connected with a first top contact block matched with the first top block, and the first top contact block on the first box body is far away from the center of the ring body and is close to the center of the ring body.
Preferably, the detection part comprises a pipe body matched with the detection port, one end of the pipe body is slidably connected with a limiting sleeve, the other end of the pipe body is connected with a copper plate, one side, close to the limiting sleeve, of the copper plate is connected with a plurality of copper sheets, an air bag is arranged in the pipe body, the side wall of the air bag is connected with the side wall of the pipe body, a part of the air bag is sleeved on the limiting sleeve, inert gas is filled in the air bag, a second spring is connected between the limiting sleeve and the pipe body, a plurality of heat dissipation ports are formed in the outer side wall of the pipe body, two sides of the limiting sleeve are respectively connected with first racks, two sides of the pipe body are respectively connected with first gears meshed with the first racks in a rotating mode, and two sides of the ring body are respectively slidably connected with second racks meshed with the first gears.
Preferably, the inside both sides of fixed plate have seted up the spread groove respectively, sliding connection has the ejector pin in the spread groove, a plurality of with the roof groove of ejector pin adaptation has been seted up respectively to the both sides of slide, the roof groove is semicircle sphere, the ejector pin with be connected with the third spring between the spread groove.
Preferably, the rotating component comprises a first shaft connected to the support frame in a rotating mode, a second gear is connected to the first shaft, the second gear is an incomplete gear, a motor connected with the first shaft is connected to the support frame, a second shaft is connected to the support frame in a rotating mode, a third gear matched with the second gear is connected to the second shaft, a first chain wheel is connected to the second shaft, a tripod connected with the support frame in a rotating mode is fixedly sleeved on the inner side wall of the ring body, a second chain wheel is connected to one side of the tripod, and a chain is connected between the first chain wheel and the second chain wheel.
Preferably, the rotating component further comprises a third shaft rotatably connected to the supporting frame, the second shaft and the third shaft are respectively located at the top and the bottom of the first shaft, a fourth gear matched with the second gear is connected to the third shaft, two support blocks are connected to the top of the base, a first screw rod is rotatably connected to the support blocks, a sliding rod connected with the moving plate is connected to the first screw rod in a threaded mode, bevel gears meshed with each other are respectively connected to the first screw rod and the third shaft, a fixing ring is connected to the first screw rod, and a fourth spring is connected between the fixing ring and one of the support blocks.
Preferably, a limit groove is formed in one side of the support frame, a second screw rod is rotationally connected to the limit groove, two ends of the second screw rod respectively penetrate through the support frame and extend to two ends of the support frame, two ends of the second screw rod are respectively connected with a fifth gear, two sides of the moving plate are respectively connected with a third rack meshed with the fifth gear, the third rack is in sliding connection with the support frame, two moving rings are in threaded connection with the second screw rod, a connecting rod is rotationally connected to the outer side wall of the moving ring, one side of the pipe body is connected with a connecting frame, and one end of the connecting rod is rotationally connected with the connecting frame.
Preferably, the support frame is connected with a fixed shaft, two sliding rings are connected to the fixed shaft in a sliding manner, a connecting rod is connected to the sliding rings in a rotating manner, one end of the connecting rod is connected with the sliding rod in a rotating manner, a braking frame is arranged at the bottom of the ring body, a first rod is connected to the sliding rings in a rotating manner, a second rod is connected to one end of the first rod in a rotating manner, the second rod is connected with the braking frame in a rotating manner, and a fifth spring is connected between the first rod and the second rod.
Preferably, the fixed shaft is connected with a second top contact block, and the top of the first top contact block is connected with a second top contact block matched with the second top contact block.
The microelectronic element insulating property testing method of the microelectronic element insulating property testing equipment comprises the following specific steps:
step one: the manipulator grabs the test piece and puts the test piece into a storage opening opposite to the feeding pipe from the feeding pipe, and starts the rotating part, and the clamping part in the storage opening can fix the test piece in the storage opening;
step two: the rotating part rotates the ring body to rotate the test piece to one side of the moving plate, the ring body stops rotating and displaces the moving plate, the moving plate and the pipe body move close to each other, a power supply plate on the moving plate contacts pins of the test piece, a copper plate contacts a back shell of the test piece, and the power supply plate can transmit high-voltage power to the test piece;
Step three: the power supply board supplies power to pins of the test piece, after the copper plate contacts with the back shell of the test piece, the sliding plate is moved if the test piece has electric leakage, and the sliding plate is not moved if the test piece has no electric leakage;
step four: the insulation abnormal test piece rotates to correspond to the first box body along with the ring body, the first top contact block on the first box body extrudes the moved first top block, the sliding plate is far away from the insulation abnormal test piece with the fixing plate, and the insulation abnormal test piece is released and falls into the first box body;
step five: the insulating normal test piece rotates to the position of the first box body, the insulating normal test piece cannot be released into the first box body, when the insulating normal test piece rotates to the position of the second box body, the first top contact block on the second box body contacts with and extrudes the first top block which does not move, so that the sliding plate and the fixed plate can move away from the test piece, and the test piece falls into the second box body under the action of self gravity;
step six: the ring body rotates, the empty storage port returns to the lower part of the feeding pipe, and the step one is repeated.
In summary, the invention has the following advantages:
through setting up rotating part, but when using start rotating part, rotating part intermittent type nature's rotating ring body, can set up the manipulator that is used for snatching the test piece on the footstock, put in the mouth is deposited to the test piece from the inlet pipe, along with the rotation of ring body just to depositing mouthful displacement in the inlet pipe, hold the test piece in the mouth and fix, rotating part rotating ring body rotates the test piece to one side of movable plate, can stop rotating ring body and displacement movable plate, the movable plate is moved with the removal that the detection part is close to each other this moment, the stitch of power supply board contact test piece on the movable plate, detection part contact test piece back casing, can carry high-voltage electricity to the test piece by the power supply board, detection part carries out leakage detection to the test piece back.
When the test piece in the storage opening is abnormal in insulation, the fixing of the clamping part to the test piece can be canceled when the test piece rotates to the position of the first box body, the test piece can be separated from the storage opening and fall into the first box body, when the test piece is normal in insulation, the clamping part can continue to fix the test piece when rotating to the position of the first box body, until the test piece rotates to the position of the second box body, the clamping part cancels the fixing of the test piece, and the test piece which is normal in insulation can be separated from the storage opening and fall into the second box body.
According to the test piece sorting device, the rotatable ring body is utilized to match the movable plate, the power supply plate and the detection part, batch detection can be carried out on a plurality of test pieces, when the test pieces are stored in the storage opening and rotate along with the ring body, the clamping part is used for fixing the test pieces, after the test pieces are subjected to insulation test, the test pieces with abnormal insulation can be released to fall into the first box body to be sorted and stored by the first box body, the test pieces with normal insulation can be released to fall into the second box body to be sorted and stored by the second box body, the empty storage opening can be used for putting the test pieces to be detected into the storage opening again when the empty storage opening is reset to the lower part of the feeding pipe, so that the test pieces are reciprocated, the test pieces with abnormal insulation and normal insulation can be sequentially detected, the test pieces with normal insulation are sorted and stored, and the degree of automation is high, and the problem that the test accuracy of the test is easily influenced according to the detection result after the test of the test pieces is finished in the prior art is solved.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of the structure of the support rod of the present invention;
FIG. 3 is a schematic view of the ring structure of the present invention;
FIG. 4 is a schematic view of a support frame structure according to the present invention;
FIG. 5 is a schematic elevational view of the ring structure of the present invention;
FIG. 6 is a schematic view of a storage port structure of the present invention;
FIG. 7 is an enlarged schematic view of a partial structure at A in FIG. 6;
FIG. 8 is a schematic view of the first and second housings of the present invention;
FIG. 9 is a schematic diagram of a first top contact block structure according to the present invention;
FIG. 10 is a schematic view of a first shaft structure of the present invention;
FIG. 11 is a schematic illustration of the structure of the brake carriage of the present invention;
FIG. 12 is a schematic diagram of a second top contact block structure according to the present invention;
FIG. 13 is a schematic view of the structure of the tube body of the present invention;
fig. 14 is a schematic cross-sectional view of the tube structure of the present invention.
Reference numerals:
100. a base; 101. a top base; 102. a support rod; 103. a ring body; 104. a support frame; 105. a storage port; 106. a detection port; 107. a feed pipe; 108. a moving plate; 109. a power supply board; 110. a first case; 111. a second case; 112. a baffle;
200. a chute; 201. a fixing plate; 202. a first spring; 203. a sliding port; 204. a slide plate; 205. a first top block; 206. a first top contact block;
300. A tube body; 301. a limit sleeve; 302. copper plate; 303. copper sheets; 304. a second spring; 305. a heat radiation port; 306. a first rack; 307. a first gear; 308. a second rack; 309. an air bag;
400. a connecting groove; 401. a push rod; 402. a top groove; 403. a third spring;
500. a first shaft; 501. a second gear; 502. a motor; 503. a second shaft; 504. a third gear; 505. a first sprocket; 506. a tripod; 507. a second sprocket; 508. a chain;
600. a third shaft; 601. a fourth gear; 602. a support block; 603. a first screw rod; 604. a slide bar; 605. bevel gears; 606. a fixing ring; 607. a fourth spring; 608. a limit groove; 609. a second screw rod; 610. a fifth gear; 611. a third rack; 612. a connecting rod; 613. a connecting frame; 614. a moving ring;
700. a fixed shaft; 701. a slip ring; 702. a connecting rod; 703. a brake frame; 704. a first lever; 705. a second lever; 706. a fifth spring; 707. a second top contact block; 708. and a second top block.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 14, an insulation performance testing apparatus for microelectronic devices includes a base 100, a top chassis 101, a ring 103, a plurality of storage ports 105, a moving plate 108, a first case 110, a second case 111, a detecting member, a rotating member, and a clamping member. A plurality of support rods 102 are connected between the base 100 and the top seat 101, the ring body 103 is arranged between the base 100 and the top seat 101, a support frame 104 is connected between the base 100 and the top seat 101, the ring body 103 is arranged on the support frame 104, a plurality of storage ports 105 are formed in the outer side wall of the ring body 103, a plurality of detection ports 106 communicated with the storage ports 105 are formed in the inner side wall of the ring body 103, a feeding pipe 107 communicated with the storage ports 105 is connected to the top of the top seat 101, a moving plate 108 is arranged at the top of the base 100 and is positioned at the left side of the ring body 103, a power supply plate 109 matched with the storage ports 105 is arranged on the moving plate 108, a first box 110 and a second box 111 are arranged at the top of the base 100, the first box 110 is used for storing an insulation abnormal test piece, the second box 111 is used for storing an insulation normal test piece, a detection part is arranged in the ring body 103 and is connected with the support frame 104, the detection part is used for testing insulation of the test piece, when the moving plate 108 moves into the storage ports 105, the detection ports 106, the rotation part is arranged between the support frame 104 and the ring body 103, the ring body 103 is used for rotating the ring body 103, the rotation part 103 can stop rotating to a preset angle, and the rotation part 103 is fixed in the moving plate 105 after the rotation part is stopped, and the rotation part is clamped in the test piece 105.
The holding part can cancel the fixing of the test piece when the holding opening 105 rotates to the first preset position and the third preset position along with the ring body 103, and cancel the fixing of the test piece when the holding opening 105 rotates to the second preset position and the insulation is abnormal.
By arranging the rotating part, the rotating part can be started when the device is used, the rotating part intermittently rotates the ring body 103, a manipulator for grabbing a test piece can be arranged on the top seat 101, the test piece can be thrown into the storage opening 105 opposite to the feeding pipe 107 from the feeding pipe 107 according to the rotating frequency of the ring body 103, the clamping part is in a release state at the moment and can enter the storage opening 105, the clamping part in the storage opening 105 can be fixed with the rotation of the ring body 103 along with the displacement of the storage opening 105 opposite to the feeding pipe 107, when the rotating part rotates the ring body 103 to one side of the moving plate 108, the rotating ring body 103 can be stopped and the moving plate 108 is displaced, at the moment, the moving plate 108 and the detecting part move close to each other, the power supply plate 109 on the moving plate 108 contacts pins of the test piece, the detecting part contacts the back shell of the test piece, the power supply plate 109 can be used for conveying high-voltage power to the test piece, the detecting part can be used for detecting electric leakage on the back surface of the test piece, the rotating part can reset the moving plate 108 and the detecting part before the ring body 103 is rotated again, when the insulation of the test piece in the storage opening 105 is abnormal, the fixing of the test piece by the clamping part can be canceled when the test piece rotates to a second preset position, namely the position of the first box body 110, the test piece can be separated from the storage opening 105 and fall into the first box body 110, when the insulation of the test piece is normal, the clamping part can be used for continuously fixing the test piece when the clamping part rotates to the position of the first box body 110, when the test piece rotates to a third preset position, namely the position of the second box body 111, the clamping part can cancel the fixing of the test piece, and the test piece with normal insulation can be separated from the storage opening 105 and fall into the second box body 111, this application utilizes rotatable ring body 103 cooperation movable plate 108, power supply board 109 and detection part, can carry out the detection of batch to a plurality of test pieces, when the test piece is deposited in depositing mouthful 105 and rotate along with ring body 103, clamping part can fix the test piece, after the test piece detects the completion, the test piece that insulating is unusual can be released and drop to first box 110 in carry out the classified storage by first box 110, can be released and drop to second box 111 in carry out the classified storage by second box 111 at the test piece that insulating is normal, empty depositing mouthful 105 can put in the test piece that needs to detect once more to this depositing mouthful 105 when the below of inlet pipe 107 resets again, thereby reciprocal, can detect a plurality of test pieces in proper order, test insulating properties, and carry out classified storage to the test piece that insulating is unusual, insulating is normal, the problem of the test piece accuracy that the manual sorting is easily influenced according to the testing result after the test is accomplished in the prior art has been solved to the degree of automation.
As a further scheme of the invention, the clamping component comprises a sliding groove 200 arranged at two sides inside the storage opening 105, a fixed plate 201 is connected in the sliding groove 200 in a sliding way, a first spring 202 is connected between the fixed plate 201 and the sliding groove 200, a sliding opening 203 is respectively arranged at the top and the bottom of the sliding groove 200, the sliding opening 203 penetrates through the ring body 103, a sliding plate 204 is connected on the fixed plate 201 in a sliding way, one end of the sliding plate 204 extends to the inside of the ring body 103 through the sliding opening 203, one end, close to the outer side wall of the ring body 103, of the sliding plate 204 is connected with a first top block 205, the bottom of the top seat 101, the top of the first box 110 and the top of the second box 111 are respectively connected with a first top contact block 206 matched with the first top block 205, and the first top contact block 206 on the first box 110 is far from the center of the ring body 103, and the first top contact block 206 on the top seat 101 and the second box 111 is near the center of the ring body 103.
Through setting up first top contact piece 206, when depositing mouth 105 rotates to correspond with inlet pipe 107, the position of first top contact piece 205 is extruded to first top contact piece 206 of footstock 101 bottom, can let first top piece 205, slide 204 and fixed plate 201 remove, fixed plate 201 leaves and deposit mouthful 105 and shrink in spout 200, compress first spring 202 simultaneously, the test piece in the inlet pipe 107 can drop and deposit mouthful 105, rotate at ring body 103 and deposit mouthful 105 and leave the first top contact piece 206 on the footstock 101 after, first spring 202 releases potential energy, fixed plate 201 atress resets, fixed plate 201 can receive the power contact test piece of first spring 202 and carry out the centre gripping to the test piece and fix, so can realize the purpose of fixing the test piece.
As a further scheme of the invention, the detection part comprises a pipe body 300 which is matched with the detection port 106, one end of the pipe body 300 is connected with a limit sleeve 301 in a sliding manner, the other end of the pipe body 300 is connected with a copper plate 302, one side, close to the limit sleeve 301, of the copper plate 302 is connected with a plurality of copper sheets 303, an air bag 309 is arranged in the pipe body 300, the side wall of the air bag 309 is connected with the side wall of the pipe body 300, a part of the air bag 309 is sleeved on the limit sleeve 301, inert gas is filled in the air bag 309, a second spring 304 is connected between the limit sleeve 301 and the pipe body 300, a plurality of heat dissipation ports 305 are formed in the outer side wall of the pipe body 300, two sides of the limit sleeve 301 are respectively connected with a first rack 306, two sides of the pipe body 300 are respectively connected with a first gear 307 meshed with the first rack 306 in a rotating manner, and two sides of the ring body 103 are respectively connected with a second rack 308 meshed with the first gear 307 in a sliding manner.
By arranging the tube body 300, when the movable plate 108 moves into the storage opening 105, the position of the tube body 300 can be moved, the movable plate 108 enables the power supply plate 109 to contact with pins of a test piece, the copper plate 302 on one side of the tube body 300 contacts with a back shell of the test piece, the second rack 308 contacts with the sliding plate 204, an operator can transmit high-voltage power to the power supply plate 109, the power supply plate 109 supplies power to the pins of the test piece, after the copper plate 302 contacts with the back shell of the test piece, if the test piece has electric leakage, heat can be generated by the copper plate 302 and the copper plate 303, the heat can be emitted into the tube body 300 through the copper plate 302, inert gas in the air bag 309 can be nitrogen or helium and other gases which are expanded by heating, the inert gas in the air bag 309 is heated and expanded, the volume of the air bag 309 is increased, the air bag 309 can expand to squeeze the position of the limit sleeve 301, the limit sleeve 301 can move through the first rack 306 and the position of the second rack 308 reversely move, the second rack 308 can push and touch the sliding plate 204 and drive the sliding plate 204 to move, so that the sliding plate 204 and the first top block 205 move away from the center of the ring body 103, at this time, the sliding plate 204 and the first top block 205 in the storage opening 105 for insulation abnormal test pieces are moved a certain distance, corresponding to the first top block 206 on the first box body 110, when the subsequent ring body 103 rotates again, the insulation abnormal test pieces correspond to the first box body 110, the first top block 206 on the first box body 110 presses the moved first top block 205, the sliding plate 204 moves away from the insulation abnormal test pieces with the fixing plate 201, the insulation abnormal test pieces are released and can drop into the first box body 110, if the copper plate 302 does not contact current, the air bag 309 is in an initial state, the sliding plate 204 is in an initial state, and when the insulation normal test pieces rotate to the position of the first box body 110, because the sliding plate 204 does not move and the first top contact block 206 on the first box body 110 is far away from the ring body 103 relative to the second box body 111 and the first top contact block 206 on the top seat 101, the first top contact block 205 on the sliding plate 204 does not contact the first top contact block 206 on the first box body 110, the normally insulated test piece cannot be released into the first box body 110, when the normally insulated test piece rotates to the position of the second box body 111, the first top contact block 206 on the second box body 111 contacts and presses the first top contact block 205, the sliding plate 204 and the fixed plate 201 can move away from the test piece, the test piece can drop into the second box body 111 under the action of self gravity, so that the purposes of insulating test piece and classifying the normally insulated test piece and the abnormal insulating test piece after the test can be realized, meanwhile, after the pipe body 300 moves into the detection port 106, the detection port 106 can be sleeved with the pipe body 300, heat emitted by the copper plate 302 and the copper sheet 303 cannot be emitted through the heat dissipation port 305, the heat can be guaranteed to be conducted to the air bag 309, the set second spring 304 can be stretched to generate potential energy after the limit sleeve 301 moves, after the pipe body 300 moves out of the detection port 106, the copper plate 302 does not receive current any more, heat in the pipe body 300 can be emitted from the heat dissipation port 305, the copper plate 302 and the copper plate 302 can also guarantee timely emission of heat, when inert gas in the air bag 309 is recovered to normal temperature, the second spring 304 can enable the limit sleeve 301 to reset, and the next test piece can be conveniently detected.
As a further scheme of the invention, connecting grooves 400 are respectively formed on two sides of the inside of the fixed plate 201, ejector rods 401 are slidably connected in the connecting grooves 400, a plurality of ejector grooves 402 matched with the ejector rods 401 are respectively formed on two sides of the sliding plate 204, the ejector grooves 402 are in a semicircular sphere shape, and a third spring 403 is connected between the ejector rods 401 and the connecting grooves 400.
Through setting up third spring 403, the position of ejector pin 401 can be restricted to the third spring 403, let ejector pin 401 and a roof groove 402 cover that corresponds establish, can play the purpose to limit the slide 204 position, avoid producing the gliding problem because of the influence of gravity down of slide 204 when ring body 103 rotates, when second rack 308 extrudes slide 204 and lets slide 204 remove, roof groove 402 and ejector pin 401 break away from, ejector pin 401 shrink in connecting groove 400 and compress third spring 403, after slide 204 moves to the default position, ejector pin 401 receives the power of third spring 403 and establishes with next roof groove 402 cover, can limit the position of slide 204 again, in order to let follow-up first top contact block 206 on the first box 110 extrude first top block 205 and let slide 204 and fixed plate 201 remove.
As a further scheme of the invention, the rotating component comprises a first shaft 500 rotatably connected to the support frame 104, a second gear 501 is connected to the first shaft 500, the second gear 501 is an incomplete gear, a motor 502 connected with the first shaft 500 is connected to the support frame 104, a second shaft 503 is also rotatably connected to the support frame 104, a third gear 504 matched with the second gear 501 is connected to the second shaft 503, a first sprocket 505 is connected to the second shaft 503, a tripod 506 rotatably connected with the support frame 104 is fixedly sleeved on the inner side wall of the ring body 103, a second sprocket 507 is connected to one side of the tripod 506, and a chain 508 is connected between the first sprocket 505 and the second sprocket 507.
Through setting up motor 502, can start motor 502 when using, the drive shaft rotation of motor 502 can drive first axle 500 rotation, first axle 500 rotates a round and can drive second axle 503 through second gear 501 and rotate forty-five degrees, second axle 503 rotates forty-five degrees accessible chain 508 and lets ring body 103 rotate forty-five degrees, take one of corresponding inlet pipe 107 to deposit mouthful 105 as an example, ring body 103 rotates second forty-five degrees and deposits mouthful 105 and corresponds power supply plate 109 and body 300, ring body 103 rotates the position that the third forty-five degrees deposits mouthful 105 corresponds first box 110, ring body 103 rotates the position that the fifth forty-five degrees deposits mouthful 105 corresponds second box 111, because second gear 501 is incomplete gear, can stop rotatory ring body 103 after second gear 501 breaks away from with third gear 504, thereby can realize letting ring body 103 intermittently rotate.
As a further scheme of the invention, the rotating component further comprises a third shaft 600 rotatably connected to the supporting frame 104, the second shaft 503 and the third shaft 600 are respectively positioned at the top and the bottom of the first shaft 500, a fourth gear 601 matched with the second gear 501 is connected to the third shaft 600, two support blocks 602 are connected to the top of the base 100, a first screw rod 603 is rotatably connected to the support blocks 602, a sliding rod 604 connected with the moving plate 108 is in threaded connection with the first screw rod 603, bevel gears 605 meshed with each other are respectively connected to the first screw rod 603 and the third shaft 600, a fixed ring 606 is connected to the first screw rod 603, and a fourth spring 607 is connected between the fixed ring 606 and one of the support blocks 602.
Through setting up third axle 600, when first axle 500 rotates, can be with fourth gear 601 meshing after second gear 501 breaks away from with third gear 504, and drive third axle 600 rotation, third axle 600 rotates and can let first lead screw 603 rotate through bevel gear 605, first lead screw 603 rotates and can let slide bar 604 and movable plate 108 remove, so can realize stopping rotating after the ring body 103 let movable plate 108 be close to the purpose that ring body 103 moved, simultaneously, can let fourth spring 607 twist reverse when first lead screw 603 rotates and produce potential energy, after second gear 501 breaks away from with fourth gear 601, first lead screw 603 no longer atress, the power of accessible fourth spring 607 resets, thereby realize the purpose of resetting movable plate 108 before rotating ring body 103 again.
As a further scheme of the invention, a limit groove 608 is formed on one side of the support frame 104, a second screw rod 609 is rotationally connected to the limit groove 608, two ends of the second screw rod 609 respectively penetrate through the support frame 104 and extend to two ends of the support frame 104, two ends of the second screw rod 609 are respectively connected with a fifth gear 610, two sides of the moving plate 108 are respectively connected with a third rack 611 meshed with the fifth gear 610, the third rack 611 is slidingly connected with the support frame 104, two moving rings 614 are connected to the second screw rod 609 in a threaded mode, a connecting rod 612 is rotationally connected to the outer side wall of the moving ring 614, one side of the pipe body 300 is connected with a connecting frame 613, and one end of the connecting rod 612 is rotationally connected with the connecting frame 613.
By arranging the second screw rod 609, the fifth gear 610 and the second screw rod 609 can be rotated through the third rack 611 when the moving plate 108 is displaced, the second screw rod 609 can move the two moving rings 614 when rotated, the two moving rings 614 move close to each other, the two connecting rods 612 gradually tend to be parallel, and the purpose of enabling the pipe body 300 to synchronously move with the moving plate 108 can be achieved.
As a further scheme of the invention, a fixed shaft 700 is connected to the support frame 104, two sliding rings 701 are connected to the fixed shaft 700 in a sliding manner, a connecting rod 702 is connected to the sliding rings 701 in a rotating manner, one end of the connecting rod 702 is connected with the sliding rod 604 in a rotating manner, a braking frame 703 is arranged at the bottom of the ring body 103, a first rod 704 is connected to the sliding rings 701 in a rotating manner, a second rod 705 is connected to one end of the first rod 704 in a rotating manner, the second rod 705 is connected to the braking frame 703 in a rotating manner, and a fifth spring 706 is connected between the first rod 704 and the second rod 705.
Through setting up connecting rod 702, when slide bar 604 drives movable plate 108 displacement, can let the one end of connecting rod 702 push up and touch slip ring 701, the removal that two slip rings 701 kept away from each other can let first pole 704 pass through fifth spring 706 and oppress the position of second pole 705, first pole 704 and second pole 705 produce the rotation, the top of second pole 705 pushes up and touches braking frame 703, braking frame 703 contacts ring body 103, can utilize the power of fifth spring 706 to let braking frame 703 push up and touch ring body 103, can restrict the position of ring body 103 and avoid ring body 103 to produce the rotation, make things convenient for body 300 to remove to detect in the mouth 106, power supply plate 109 removes to in the storage port 105.
As a further aspect of the present invention, a second top contact block 707 is connected to the fixed shaft 700, and a second top block 708 adapted to the second top contact block 707 is connected to the top of the first top block 205.
By providing the second top contact block 707, the fixed shaft 700 is located between the first case 110 and the second case 111, and when the storage opening 105 rotates to correspond to the fixed shaft 700, the second top contact block 707 can press the position of the second top block 708 and displace the second top block 708, so that the moving slide plate 204 can be reset, and the subsequent storage opening 105 is convenient to receive the test piece dropped by the feeding pipe 107.
As a further aspect of the present invention, a baffle 112 is connected between every two adjacent support rods 102, and the first case 110 and the second case 111 are respectively slidably connected to the baffles 112 located at the left and right sides of the ring body 103.
By providing the baffle 112, the baffle 112 can shield the ring body 103 from components surrounding the ring body 103, and the safety of the device during operation can be ensured.
The method for testing the insulating property of the microelectronic element is suitable for the equipment for testing the insulating property of the microelectronic element, and comprises the following specific steps:
step one: the manipulator grabs the test piece and puts the test piece into a storage port 105 opposite to the feeding pipe 107 from the feeding pipe 107, and starts a rotating part, so that a clamping part in the storage port 105 can fix the test piece in the storage port;
Step two: the rotating part rotates the ring body 103 to rotate the test piece to one side of the moving plate 108, the ring body 103 stops rotating and displaces the moving plate 108, the moving plate 108 and the pipe body 300 move close to each other, the power supply plate 109 on the moving plate 108 contacts pins of the test piece, the copper plate 302 contacts a back shell of the test piece, and high-voltage power can be supplied to the test piece by the power supply plate 109;
step three: after the power supply board 109 supplies power to pins of the test piece and the copper plate 302 contacts with a back shell of the test piece, if the test piece has electric leakage, the sliding plate 204 is moved, and if the test piece has no electric leakage, the sliding plate 204 is not moved;
step four: the test piece with abnormal insulation rotates to one side of the first box body 110 along with the ring body 103, the first top contact block 206 on the first box body 110 extrudes the moved first top block 205, the sliding plate 204 is far away from the test piece with abnormal insulation with the fixing plate 201, and the test piece with abnormal insulation is released and falls into the first box body 110;
step five: when the insulating normal test piece rotates to the position of the first box body 110, the insulating normal test piece cannot be released into the first box body 110, and when the insulating normal test piece rotates to the position of the second box body 111, the first top contact block 206 on the second box body 111 contacts with and presses the first top block 205 which is not moved, so that the sliding plate 204 and the fixed plate 201 can move away from the test piece, and the test piece falls into the second box body 111 under the action of self gravity;
Step six: ring 103 rotates and empty storage port 105 returns to below feed tube 107, repeating step one.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (10)
1. A microelectronic component insulation performance testing apparatus, comprising:
a plurality of support rods (102) are connected between the base (100) and the top seat (101);
the ring body (103) is arranged between the base (100) and the top seat (101), a supporting frame (104) is connected between the base (100) and the top seat (101), and the ring body (103) is arranged on the supporting frame (104);
the device comprises a plurality of storage ports (105), a plurality of detection ports (106) communicated with the storage ports (105) are formed in the inner side wall of the ring body (103), and a feeding pipe (107) communicated with the storage ports (105) is connected to the top of a top seat (101);
The movable plate (108) is arranged at the top of the base (100) and is positioned at the left side of the ring body (103), and a power supply plate (109) matched with the storage opening (105) is arranged on the movable plate (108);
the first box body (110) and the second box body (111) are arranged at the top of the base (100), the first box body (110) is used for storing an insulation abnormal test piece, and the second box body (111) is used for storing an insulation normal test piece;
the detection component is arranged in the ring body (103), connected with the support frame (104) and used for testing the insulation property of a test piece, and can move into the detection port (106) when the moving plate (108) moves into the storage port (105);
the rotating part is arranged between the supporting frame (104) and the ring body (103) and is used for rotating the ring body (103), and the rotating part can stop rotating the ring body (103) and move the moving plate (108) after rotating the ring body (103) to a preset angle;
the clamping part is arranged in the storage opening (105) and is used for fixing the test piece;
the storage opening (105) can cancel the fixing of the clamping part to the test piece when rotating to a first preset position and a third preset position along with the ring body (103), and the clamping part cancels the fixing of the test piece when rotating to a second preset position and being abnormal in insulation.
2. The microelectronic component insulation performance testing device according to claim 1, characterized in that the clamping component comprises a chute (200) arranged on two sides inside the storage opening (105), a fixed plate (201) is connected in the chute (200) in a sliding manner, a first spring (202) is connected between the fixed plate (201) and the chute (200), sliding openings (203) are respectively arranged at the top and the bottom of the chute (200), the sliding opening (203) penetrates through the ring body (103), a sliding plate (204) is connected to the fixed plate (201) in a sliding manner, one end of the sliding plate (204) penetrates through the sliding opening (203) to extend into the inside of the ring body (103), one end of the sliding plate (204) close to the outer side wall of the ring body (103) is connected with a first top block (205), the bottom of the top seat (101), the top of the first box (110) and the top of the second box (111) are respectively connected with a first top block (206) which is matched with the first top block (205), and the first box (110) is closer to the center of the first top block (103) than the first top block (103) in a position of the first box (110).
3. The microelectronic component insulation performance testing device according to claim 1, wherein the detecting component comprises a tube body (300) adapted to the detecting port (106), one end of the tube body (300) is slidably connected with a limiting sleeve (301), the other end of the tube body is connected with a copper plate (302), one side, close to the limiting sleeve (301), of the copper plate (302) is connected with a plurality of copper sheets (303), an air bag (309) is arranged in the tube body (300), the side wall of the air bag (309) is connected with the side wall of the tube body (300), a part of the air bag (309) is sleeved on the limiting sleeve (301), inert gas is filled in the air bag (309), a plurality of ports (305) are formed in the outer side wall of the tube body (300), two sides of the limiting sleeve (301) are respectively connected with a first rack (306), two sides of the tube body (300) are respectively rotatably connected with a first ring body (307) and a second ring body (307) are respectively meshed with the first rack (307).
4. The microelectronic component insulation performance testing device according to claim 2, characterized in that connecting grooves (400) are respectively formed in two sides of the inside of the fixing plate (201), ejector rods (401) are slidably connected in the connecting grooves (400), a plurality of ejector grooves (402) adapted to the ejector rods (401) are respectively formed in two sides of the sliding plate (204), the ejector grooves (402) are semicircular, and third springs (403) are connected between the ejector rods (401) and the connecting grooves (400).
5. The microelectronic component insulation performance testing device according to claim 2, characterized in that the rotating component comprises a first shaft (500) rotatably connected to the support frame (104), a second gear (501) is connected to the first shaft (500), the second gear (501) is an incomplete gear, a motor (502) connected to the first shaft (500) is connected to the support frame (104), a second shaft (503) is further rotatably connected to the support frame (104), a third gear (504) adapted to the second gear (501) is connected to the second shaft (503), a first sprocket (505) is connected to the second shaft (503), a tripod (506) rotatably connected to the support frame (104) is fixedly sleeved on an inner side wall of the ring body (103), a second sprocket (507) is connected to one side of the tripod (506), and a chain (508) is connected between the first sprocket (505) and the second sprocket (507).
6. The microelectronic component insulation performance testing device according to claim 5, characterized in that the rotating component further comprises a third shaft (600) rotatably connected to the supporting frame (104), the second shaft (503) and the third shaft (600) are respectively located at the top and the bottom of the first shaft (500), a fourth gear (601) adapted to the second gear (501) is connected to the third shaft (600), two support blocks (602) are connected to the top of the base (100), a first screw (603) is rotatably connected to the support blocks (602), a sliding rod (604) connected to the moving plate (108) is connected to the first screw (603) in a threaded manner, mutually meshed bevel gears (605) are respectively connected to the first screw (603) and the third shaft (600), a fixing ring (606) is connected to the first screw (603), and a fourth spring (607) is connected between the fixing ring (606) and one of the support blocks (602).
7. A microelectronic component insulation performance testing device according to claim 3, characterized in that a limit groove (608) is provided on one side of the support frame (104), a second screw rod (609) is rotationally connected to the limit groove (608), two ends of the second screw rod (609) respectively penetrate through the support frame (104) and extend to two ends of the support frame (104), two ends of the second screw rod (609) are respectively connected with a fifth gear (610), two sides of the moving plate (108) are respectively connected with a third rack (611) meshed with the fifth gear (610), the third rack (611) is in sliding connection with the support frame (104), two moving rings (614) are connected to the second screw rod (609) in a threaded manner, a connecting rod (612) is rotationally connected to an outer side wall of the moving ring (614), one side of the pipe body (300) is connected with a connecting frame (613), and one end of the connecting rod (612) is rotationally connected with the connecting frame (613).
8. The microelectronic component insulation performance testing device according to claim 6, characterized in that the support frame (104) is connected with a fixed shaft (700), two sliding rings (701) are slidably connected on the fixed shaft (700), a connecting rod (702) is rotatably connected on the sliding rings (701), one end of the connecting rod (702) is rotatably connected with the sliding rod (604), a braking frame (703) is arranged at the bottom of the ring body (103), a first rod (704) is rotatably connected on the sliding rings (701), a second rod (705) is rotatably connected at one end of the first rod (704), the second rod (705) is rotatably connected with the braking frame (703), and a fifth spring (706) is connected between the first rod (704) and the second rod (705).
9. The microelectronic component insulation performance testing device according to claim 8, characterized in that a second top contact block (707) is connected to the stationary shaft (700), and a second top block (708) adapted to the second top contact block (707) is connected to the top of the first top block (205).
10. A microelectronic component insulation performance testing method of a microelectronic component insulation performance testing apparatus according to any one of claims 1 to 9, characterized by the specific steps of:
Step one: the manipulator grabs the test piece and puts the test piece into a storage port (105) opposite to the feeding pipe (107) from the feeding pipe (107), the rotating part is started, and the clamping part in the storage port (105) can fix the test piece in the storage port;
step two: the rotating part rotates the ring body (103) to rotate the test piece to one side of the moving plate (108), the ring body (103) stops rotating and displaces the moving plate (108), the moving plate (108) and the pipe body (300) move close to each other, a power supply plate (109) on the moving plate (108) contacts pins of the test piece, a copper plate (302) contacts a back shell of the test piece, and high-voltage electricity can be conveyed to the test piece by the power supply plate (109);
step three: the power supply board (109) supplies power to pins of the test piece, after the copper plate (302) contacts with a back shell of the test piece, the sliding plate (204) is moved if the test piece is leaked, and the sliding plate (204) is not moved if the test piece is not leaked;
step four: the test piece with abnormal insulation rotates to the first box body (110) along with the ring body (103), the first top contact block (206) on the first box body (110) extrudes the moved first top block (205), the sliding plate (204) is far away from the test piece with abnormal insulation along with the fixing plate (201), and the test piece with abnormal insulation is released and falls into the first box body (110);
Step five: when the insulating normal test piece rotates to the position of the first box body (110), the insulating normal test piece cannot be released into the first box body (110), and when the insulating normal test piece rotates to the position of the second box body (111), the first top contact block (206) on the second box body (111) contacts and presses the first top block (205) which does not move, so that the sliding plate (204) and the fixed plate (201) can move away from the test piece, and the test piece falls into the second box body (111) under the action of self gravity;
step six: the ring body (103) rotates, the empty storage port (105) returns to the lower part of the feeding pipe (107), and the step one is repeated.
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| CN117772644B (en) | 2024-05-10 |
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