CN117711997A - Quartz boat device for solar cell diffusion - Google Patents
Quartz boat device for solar cell diffusion Download PDFInfo
- Publication number
- CN117711997A CN117711997A CN202311609439.XA CN202311609439A CN117711997A CN 117711997 A CN117711997 A CN 117711997A CN 202311609439 A CN202311609439 A CN 202311609439A CN 117711997 A CN117711997 A CN 117711997A
- Authority
- CN
- China
- Prior art keywords
- socket pipe
- quartz boat
- clamping
- solar cell
- sliding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 55
- 239000010453 quartz Substances 0.000 title claims abstract description 54
- 238000009792 diffusion process Methods 0.000 title claims abstract description 19
- 229910021419 crystalline silicon Inorganic materials 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 55
- 229910052710 silicon Inorganic materials 0.000 description 55
- 239000010703 silicon Substances 0.000 description 55
- 235000012431 wafers Nutrition 0.000 description 41
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to the technical field of crystalline silicon solar cells, and discloses a quartz boat device for solar cell diffusion, wherein a sliding groove is formed in one side, which is close to the side between two quartz boat side plates, of the quartz boat device, a spring is arranged at the bottom end of the sliding groove, a supporting socket pipe is arranged at the upper end of the spring, a protection plate is arranged at the upper end of the supporting socket pipe, a clamping spring is arranged at the upper end of the supporting socket pipe, a limiting socket pipe is arranged at the other end of the clamping spring, a movable socket pipe is arranged at the lower end of one quartz boat side plate, a sliding track is formed at the side end of the quartz boat side plate, and a sliding block is arranged on the sliding track.
Description
Technical Field
The invention relates to the technical field of crystalline silicon solar cells, in particular to a quartz boat device for solar cell diffusion.
Background
Quartz glass articles are widely used in the microelectronic industry in integrated circuit chip manufacturing due to their excellent physicochemical properties. Quartz boats are a common tool for diffusion. Diffusion is a process link for manufacturing a photoelectric conversion core component-PN junction of a solar cell, is a key technology for manufacturing the solar cell, an existing quartz boat is usually grooved on a connecting rod to form a placement area for silicon wafers, and when the silicon wafers are placed, the existing quartz boat is put into a clamping groove due to different sizes of the silicon wafers, so that the silicon wafers can shake due to improper thickness, and under the condition that the existing quartz boat is subjected to high temperature, the silicon wafers are not easy to take out after the high temperature, and a lot of improvement places are needed for the existing quartz boat device, so that the quartz boat device for solar cell diffusion is provided.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides a quartz boat device for solar cell diffusion, which solves the problems.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a solar cell diffusion is with quartz boat device, includes the quartz boat curb plate, two one side that looks between the quartz boat curb plate is provided with the sliding tray, and the bottom of sliding tray is provided with the spring, and the upper end of spring is provided with the support socket pipe, and the upper end of support socket pipe is provided with the guard plate, and the upper end of support socket pipe is provided with clamping spring, and clamping spring's the other end is provided with spacing socket pipe, and the lower extreme that one of them quartz boat curb plate is located the support socket pipe is provided with movable socket pipe, and the slip track has been seted up to the side of quartz boat curb plate, and be provided with the sliding block on the slip track.
Preferably, the sliding groove is L-shaped, and the supporting socket pipe is positioned in the sliding groove and vertically slides, and the limiting socket pipe is positioned in the sliding groove and horizontally slides.
Preferably, the clamping spring is fixedly connected between the supporting socket pipe and the limiting socket pipe.
Preferably, the support socket pipe is provided with a plurality of clamping grooves at intervals, the inner walls of the two ends of each clamping groove are movably connected with clamping blocks, and the clamping blocks are connected with the inner walls of the clamping grooves through second springs.
Preferably, a chute is formed in the upper end of the side wall between the clamping grooves, the protection plates are obliquely movably inserted into the chute and extend through the chute to be fixedly connected with the clamping blocks, the protection plates are movably connected onto the inner wall of the chute through rotating shafts, and the clamping blocks are fixedly connected onto the inner wall between the two protection plates.
Preferably, a plurality of second clamping grooves are formed in the side ends of the limiting socket pipes at intervals, clamping blocks are movably connected to the inner walls of the two ends of the two second clamping grooves, the clamping blocks are connected with the inner walls of the second clamping grooves through third springs, and the clamping blocks on each limiting socket pipe are parallel to the gaps of the clamping blocks on each supporting socket pipe.
Preferably, the clamping piece at the periphery of the clamping block is flexible, and the five clamping pieces are fixedly connected to the outer side of the cylindrical seat in a petal shape.
Preferably, the movable socket pipe is located below the supporting socket pipe, and the sliding block penetrates through the sliding rail and extends to be fixedly connected with one end of the movable socket pipe.
Preferably, the sliding track is arranged at the periphery of the supporting socket pipe and the limiting socket pipe at the side ends of the two quartz boat side plates, and the sliding track is arranged at the middle position of the two quartz boat side plates.
The beneficial effects are that: compared with the prior art, the invention provides a quartz boat device for solar cell diffusion, which has the following beneficial effects:
through L-shaped sliding grooves on the quartz boat device, the silicon wafers are placed on the supporting socket pipes by the aid of the clamping springs, the limiting socket pipes at the side ends are driven to clamp the side ends of the silicon wafers, and the silicon wafers with different sizes are better fixed.
The silicon wafer is inserted between the clamping blocks through the clamping blocks on the quartz boat device, and the silicon wafer is not easy to damage when the silicon wafer is clamped stably by utilizing the flexibility of the clamping blocks.
Through the guard plate of quartz boat device, because the silicon chip is very thin, takes place deformation extremely easily, when making the silicon chip peg graft between the grip block, through the extrusion force of outside expansion, make the grip block on the guard plate fix the silicon chip, make the guard plate protect stable to the fragile position in silicon chip middle part, make the silicon chip be difficult to take place deformation.
Through the sliding track of quartz boat side, make movable socket pipe both can walk around the silicon chip, reach the upper end of silicon chip to reach the fixed of upper end to the silicon chip, can carry out the lift-up to the silicon chip after the high temperature with movable socket pipe through the sliding track, thereby make the silicon chip leave on the quartz boat.
Through the grip block of the quartz boat device, the silicon wafers with different specifications and sizes can not shake easily when being placed, and the silicon wafers are stably gripped in the clamping groove by the grip block.
Drawings
FIG. 1 is a perspective view of the present invention;
FIG. 2 is a schematic view of a side plate of the quartz boat of the present invention;
FIG. 3 is a schematic view of a support socket tube according to the present invention;
FIG. 4 is a plan view of a spacing outlet tube of the present invention;
FIG. 5 is a plan view showing the connection of the support socket tube and the shield plate according to the present invention;
FIG. 6 is a schematic view of a clamping block according to the present invention.
In the figure: 1. quartz boat side plates; 2. a sliding groove; 3. a spring; 4. supporting the socket pipe; 5. a clamping spring; 6. limiting the socket pipe; 7. a movable socket tube; 8. a sliding rail; 9. a sliding block; 10. a protection plate; 11. a clamping groove; 12. a clamping block; 13. a second spring; 14. a second clamping groove; 15. a third spring; 16. a clamping piece; 17. a cylinder seat.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-6, a quartz boat device for diffusing solar cells includes a quartz boat side plate 1, two sides between the quartz boat side plates 1 are provided with a sliding groove 2, the bottom end of the sliding groove 2 is provided with a spring 3, the upper end of the spring 3 is provided with a supporting socket 4, the upper end of the supporting socket 4 is provided with a protection plate 10, the upper end of the supporting socket 4 is provided with a clamping spring 5, the other end of the clamping spring 5 is provided with a limiting socket 6, the side end of one quartz boat side plate 1 is provided with a movable socket 7 at the lower end of the supporting socket 4, the side end of the quartz boat side plate 1 is provided with a sliding rail 8, the sliding rail 8 is provided with a sliding block 9, a silicon wafer is placed on the supporting socket 4 through the silicon wafer, the limiting socket 6 at the side end is clamped by the clamping spring 5, the movable socket 7 is driven to slide on the sliding rail 8 through the sliding block 9, and the silicon wafer is clamped to the left and right sides when the periphery is turned to the upper side.
The sliding groove 2 is L-shaped, the supporting socket pipe 4 is located in the sliding groove 2 and vertically slides, the limiting socket pipe 6 is located in the sliding groove 2 and horizontally slides, the sliding groove 2 is L-shaped, the supporting socket pipe 4 can conveniently slide downwards, and the limiting socket pipe 6 can slide inwards.
The clamping spring 5 is fixedly connected between the supporting socket pipe 4 and the limiting socket pipe 6, and is connected through the clamping spring 5, so that the limiting socket pipe 6 is driven to be clamped inwards when the supporting socket pipe 4 moves downwards.
The supporting socket pipe 4 is provided with a plurality of clamping grooves 11 at intervals, the inner walls of the two ends of each clamping groove 11 are movably connected with clamping blocks 12, the clamping blocks 12 are connected with the inner walls of the clamping grooves 11 through second springs 13, silicon wafers are inserted into the clamping grooves 11, the clamping blocks 12 are outwards stretched to two sides, and the clamping blocks 12 are clamped with the silicon wafers by the aid of the elasticity of the second springs 13.
The chute is offered to the lateral wall upper end between two draw-in groove 11, and guard plate 10 is the activity of slope form and peg graft in the chute and run through and extend to be in the same place with grip block 12 fixed connection, and guard plate 10 is on the spout inner wall through pivot swing joint, and fixedly connected with grip block 12 on the inner wall between two guard plates 10, because the silicon chip expands to both sides through grip block 12, makes guard plate 10 inwards extrudeed, makes grip block 12 on the guard plate 10 carry out the centre gripping to the silicon chip, supports the silicon chip, makes the difficult deformation damage of silicon chip.
The side ends of the limiting socket pipes 6 are provided with a plurality of second clamping grooves 14 at intervals, the inner walls of the two ends of the two second clamping grooves 14 are movably connected with clamping blocks 12, the clamping blocks 12 are connected with the inner walls of the second clamping grooves 14 through third springs 15, the clamping blocks 12 on each limiting socket pipe 6 are parallel to the gaps of the clamping blocks 12 on each supporting socket pipe 4, and the clamping blocks 12 on the limiting socket pipe 6 are parallel to the clamping blocks 12 on the supporting socket pipe 4, so that the clamping blocks 12 on the limiting socket pipe 6 limit silicon wafers.
The clamping piece 16 on the periphery of the clamping block 12 is flexible, and the five clamping pieces 16 are fixedly connected to the outer side of the cylindrical seat 17 in a petal shape, and the silicon wafer is not easy to scratch or damage by utilizing the flexibility of the clamping piece 16 to clamp the silicon wafer.
The movable socket pipe 7 is located below the supporting socket pipe 4, the sliding block 9 penetrates through the sliding rail 8 and extends to be fixedly connected with one end of the movable socket pipe 7, the movable socket pipe 7 can be used for downwards clamping silicon wafers, and the movable socket pipe 7 can also be used for upwards conveying the high-temperature silicon wafers, so that the silicon wafers can be taken away at a high temperature.
The sliding rails 8 are arranged at the side ends of the two quartz boat side plates 1 at the periphery of the supporting socket pipe 4 and the limiting socket pipe 6, the sliding rails 8 are arranged at the middle positions of the two quartz boat side plates 1, and the sliding rails 8 are arranged at the periphery, so that the sliding of the movable socket pipe 7 can be performed under the condition of not obstructing the supporting socket pipe 4 and the limiting socket pipe 6.
Working principle: according to the quartz boat device, silicon wafers are placed on the supporting socket pipe 4, then stored on the supporting socket pipe 4, the limiting socket pipe 6 at the side end is used for clamping the silicon wafers at the side end by the clamping springs 5 in the sliding grooves 2, the sliding grooves 2 are L-shaped, the supporting socket pipe 4 can conveniently slide downwards, the limiting socket pipe 6 can conveniently slide inwards, the limiting socket pipe 6 is driven to be clamped inwards when the supporting socket pipe 4 moves downwards through the connection of the clamping springs 5, the clamping blocks 12 are clamped outwards at two sides by inserting the silicon wafers into the clamping grooves 11, the clamping blocks 12 clamp the silicon wafers by utilizing the elasticity of the second springs 13, the silicon wafers are inwards extruded by the clamping blocks 12 on the protection plates 10 because the silicon wafers are expanded at two sides, the silicon wafers are clamped by the clamping blocks 12 on the protection plates 10, and are not easy to deform and damage, the clamping blocks 12 on the limiting socket pipe 6 are parallel to the clamping blocks 12 on the supporting socket pipe 4, the clamping blocks 12 on the limiting socket pipe 6 are used for limiting the silicon wafer, the clamping pieces 16 are used for clamping the silicon wafer by using the flexibility of the clamping pieces 16 on the clamping blocks 12, the silicon wafer is not easy to scratch or damage, then the sliding block 9 drives the movable socket pipe 7 to slide on the sliding track 8, when the silicon wafer is transferred from the periphery to the upper side, the silicon wafer is clamped downwards, the silicon wafer is clamped up, down, left and right, the silicon wafer is clamped on the periphery through the sliding track 8, the silicon wafer can be clamped downwards through the movable socket pipe 7 under the condition of not interfering the supporting socket pipe 4 and the limiting socket pipe 6, and the silicon wafer can be conveyed upwards through the movable socket pipe 7 after the high temperature, so that the silicon wafer is taken away at the high temperature.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The quartz boat device for solar cell diffusion comprises two quartz boat side plates (1), and is characterized in that: two one side that looks between quartz boat curb plate (1) is provided with sliding tray (2), and the bottom of sliding tray (2) is provided with spring (3), and the upper end of spring (3) is provided with support socket pipe (4), and the upper end of support socket pipe (4) is provided with guard plate (10), and the upper end of support socket pipe (4) is provided with clamping spring (5), and the other end of clamping spring (5) is provided with spacing socket pipe (6), and the lower extreme that the side of one of them quartz boat curb plate (1) is located support socket pipe (4) is provided with movable socket pipe (7), and slide rail (8) have been seted up to the side of quartz boat curb plate (1), and be provided with sliding block (9) on slide rail (8).
2. The quartz boat apparatus for solar cell diffusion according to claim 1, wherein: the sliding groove (2) is L-shaped, the supporting socket pipe (4) is located in the sliding groove (2) and slides vertically, and the limiting socket pipe (6) is located in the sliding groove (2) and slides transversely.
3. The quartz boat apparatus for solar cell diffusion according to claim 2, wherein: the clamping spring (5) is fixedly connected between the supporting socket pipe (4) and the limiting socket pipe (6).
4. A quartz boat apparatus for solar cell diffusion according to claim 3, wherein: the support socket pipe (4) is provided with a plurality of clamping grooves (11) at intervals, the inner walls of the two ends of each clamping groove (11) are movably connected with clamping blocks (12), and the clamping blocks (12) are connected with the inner walls of the clamping grooves (11) through second springs (13).
5. The quartz boat apparatus for solar cell diffusion according to claim 4, wherein: a chute is formed in the upper end of the side wall between the two clamping grooves (11), the protection plates (10) are obliquely movably inserted into the chute and extend through the chute to be fixedly connected with the clamping blocks (12), the protection plates (10) are movably connected onto the inner wall of the chute through rotating shafts, and the clamping blocks (12) are fixedly connected onto the inner wall between the two protection plates (10).
6. The quartz boat apparatus for solar cell diffusion according to claim 4, wherein: the side of spacing socket pipe (6) separates and has set up a plurality of second draw-in groove (14), and swing joint grip block (12) on the both ends inner wall of two second draw-in grooves (14), and link together through third spring (15) between grip block (12) and second draw-in groove (14) inner wall, and grip block (12) on every spacing socket pipe (6) are parallel with the clearance of grip block (12) on every support socket pipe (4).
7. The quartz boat apparatus for solar cell diffusion of claim 6, wherein: the clamping pieces (16) at the periphery of the clamping block (12) are flexible, and the five clamping pieces (16) are fixedly connected to the outer side of the cylindrical seat (17) in a petal shape.
8. The quartz boat apparatus for solar cell diffusion according to claim 1, wherein: the movable socket pipe (7) is positioned below the supporting socket pipe (4), and the sliding block (9) penetrates through the sliding track (8) and extends to be fixedly connected with one end of the movable socket pipe (7).
9. The quartz boat apparatus for solar cell diffusion of claim 8, wherein: the sliding rails (8) are arranged at the side ends of the two quartz boat side plates (1) at the periphery of the supporting socket pipe (4) and the limiting socket pipe (6), and the sliding rails (8) are arranged at the middle positions of the two quartz boat side plates (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311609439.XA CN117711997B (en) | 2023-11-29 | 2023-11-29 | Quartz boat device for solar cell diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311609439.XA CN117711997B (en) | 2023-11-29 | 2023-11-29 | Quartz boat device for solar cell diffusion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117711997A true CN117711997A (en) | 2024-03-15 |
| CN117711997B CN117711997B (en) | 2024-05-03 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311609439.XA Active CN117711997B (en) | 2023-11-29 | 2023-11-29 | Quartz boat device for solar cell diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117711997B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100828285B1 (en) * | 2006-12-08 | 2008-05-07 | 동부일렉트로닉스 주식회사 | Structure for preventing sliding of wafer in initial box |
| US20180033665A1 (en) * | 2016-07-28 | 2018-02-01 | Infineon Technologies Ag | Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer |
| CN208596666U (en) * | 2018-07-27 | 2019-03-12 | 盐城阿特斯阳光能源科技有限公司 | A kind of chip transmission device and silicon chip transmission system |
| CN217035602U (en) * | 2022-03-16 | 2022-07-22 | 苏州光协光电科技有限公司 | Quartz boat with insert limiting mechanism |
| CN219553589U (en) * | 2023-01-29 | 2023-08-18 | 浙江浩锐石英科技有限公司 | Automatic inserting quartz boat for bearing solar cell silicon wafer |
-
2023
- 2023-11-29 CN CN202311609439.XA patent/CN117711997B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100828285B1 (en) * | 2006-12-08 | 2008-05-07 | 동부일렉트로닉스 주식회사 | Structure for preventing sliding of wafer in initial box |
| US20180033665A1 (en) * | 2016-07-28 | 2018-02-01 | Infineon Technologies Ag | Wafer box, method for arranging wafers in a wafer box, wafer protection plate and method for protecting a wafer |
| CN208596666U (en) * | 2018-07-27 | 2019-03-12 | 盐城阿特斯阳光能源科技有限公司 | A kind of chip transmission device and silicon chip transmission system |
| CN217035602U (en) * | 2022-03-16 | 2022-07-22 | 苏州光协光电科技有限公司 | Quartz boat with insert limiting mechanism |
| CN219553589U (en) * | 2023-01-29 | 2023-08-18 | 浙江浩锐石英科技有限公司 | Automatic inserting quartz boat for bearing solar cell silicon wafer |
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| Publication number | Publication date |
|---|---|
| CN117711997B (en) | 2024-05-03 |
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