CN117697189A - Real-time feedback power detection device for high-power laser - Google Patents
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Abstract
The invention discloses a real-time feedback power detection device of high-power laser, which is arranged in laser processing equipment and comprises a first protection mirror detection device arranged at a laser incidence end of the laser processing equipment and a second protection mirror detection device arranged at a laser emergence end; a reflecting mirror is arranged in a laser path between the two, the laser beam reflected by the reflecting mirror enters a second protective mirror detection device, and the laser beam refracted by the reflecting mirror enters a power detection device; the power detection device is combined with the protective mirror detection device, can detect power of the front half path and the rear half path simultaneously, and can locate the problem of the laser processing equipment in the front half path or the rear half path. The invention realizes the whole process detection of the optical path in the high-power laser processing equipment in the laser processing process, can rapidly locate and diagnose the problems of the laser processing equipment in the laser processing process, and ensures the traceability of laser processing.
Description
Technical Field
The invention belongs to the technical field of laser processing, and particularly relates to a real-time feedback power detection device of high-power laser.
Background
The high-power laser is easily subjected to unstable power caused by various factors, for example, the temperature is increased, so that the output power of a laser pump source is reduced, thermal turnover occurs, and the output power is seriously influenced; stability of the optical components (e.g., aging, reflectivity, polarization, smudge, etc.) also affects power; external factors such as stability of the power supply, fouling of the device, etc. can also affect the power. And therefore its power needs to be detected.
Conventionally, a direct measurement method is generally adopted to perform power detection on a laser processing device, that is, the laser power detection device is directly irradiated by a laser beam in the detection process, and the processing power of laser is obtained by detecting the change of a corresponding physical quantity in an internal sensor thereof. However, the direct measurement is only suitable for laser processing equipment with extremely low laser power, and the detection device is easily damaged by the direct measurement mode, so that the long-time real-time monitoring is inconvenient. Therefore, the traditional direct measurement method is not suitable for high-power laser processing equipment because the high-power laser energy is larger, the problem that a detection device is damaged easily exists, and the requirement on the power detection device is improved.
In addition, the power laser detection device in the prior art is generally arranged outside the laser processing equipment, and the power is detected in a mode that the laser processing equipment continuously outputs laser to the power detection device, so that the power detection device can only detect the power of the equipment before processing, and the equipment can not process after abnormality, and cannot realize real-time detection, and has hysteresis, so that the power detected by the method is different from the power in the actual processing process. In addition, the existing power detection device can only detect the power simply, and cannot locate and check the problem of power abnormality rapidly. Therefore, it is highly desirable to provide a power detection technique suitable for high-power laser and at the same time, capable of performing a rapid fault location function.
Disclosure of Invention
Aiming at one or more of the defects or improvement demands of the prior art, the invention provides a real-time feedback power detection device of high-power laser, which realizes the whole process detection of an optical path in laser processing equipment in the high-power laser processing process, can rapidly locate and diagnose the problems of the laser processing equipment in the laser processing process, and ensures the traceability of laser processing.
In order to achieve the above-mentioned purpose, the present invention provides a real-time feedback power detection device for high-power laser, where the power detection device is disposed inside a laser processing device, and includes a first protection mirror detection device disposed at a laser incident end and a second protection mirror detection device disposed at a laser emitting end of the laser processing device;
a reflecting mirror is arranged in a laser light path between the first protective mirror detection device and the second protective mirror detection device, a first laser beam reflected by the reflecting mirror enters the second protective mirror detection device, and a second laser beam refracted by the reflecting mirror enters the power detection device;
the power detection device is combined with the protection mirror detection device, so that the power detection can be carried out on a first half path light path between the first protection mirror detection device and the power detection device, meanwhile, the power detection can be carried out on a second half path light path between the power detection device and the second protection mirror detection device, and the problem of laser processing equipment can be positioned in the first half path light path or the second half path light path.
As a further improvement of the invention, if the power detection device detects abnormal data and the first protection mirror detection device alarms, the problem of the laser processing equipment is positioned in the first half path light path;
if the power detection device detects abnormal data and the second protection mirror detection device alarms, the problem of the laser processing equipment is positioned in the second half path light path.
As a further improvement of the invention, the first protection mirror detection device comprises a first protection mirror body and a first photoelectric sensor arranged corresponding to the first protection mirror body, and the second protection mirror detection device comprises a first protection mirror body and a second photoelectric sensor arranged corresponding to the first protection mirror body, wherein the photoelectric sensor is used for detecting whether the corresponding protection mirror surface is stained or not.
As a further development of the invention, the first and second photoelectric sensors are connected to corresponding alarm systems.
As a further improvement of the invention, the power detection device collects the power data of the laser processing equipment in the processing process and feeds the data back to the control system, and the control system can diagnose the abnormal data and correspondingly adjust the laser power to form closed loop control.
As a further improvement of the invention, the control system can draw a corresponding power curve, and the power curve of corresponding time can be traced back for detection and fault diagnosis by analyzing the power data recorded by the power detection device.
As a further improvement of the invention, a spectroscope is further arranged in the light path between the reflecting mirror and the power detection device so as to divide the second laser beam transmitted through the reflecting mirror into a third laser beam and a fourth laser beam, wherein the power detection device is correspondingly arranged in the light path of one laser beam, and the light energy absorption module is correspondingly arranged in the light path of the other laser beam.
As a further improvement of the invention, a collimating mirror is also arranged in the light path between the first protection mirror detection device and the reflecting mirror; and/or the number of the groups of groups,
at least one reflecting mirror is arranged in the light path between the reflecting mirror and the second protective mirror detection device and used for changing the light path so that laser reflected by the reflecting mirror smoothly enters the second protective mirror detection device; and/or the number of the groups of groups,
and a focusing mirror is also arranged in the light path close to the second protection mirror detection device.
In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:
(1) The real-time feedback power detection device of the high-power laser is arranged in the laser processing equipment, and is used for detecting the laser with weak energy passing through a small part of the reflecting mirror, and the laser processing power is calculated through the control system, so that the accurate acquisition of the high-power laser processing power data can be realized. Meanwhile, the power detection device is combined with the protection mirror detection module, so that the power detection can be carried out on the light path between the first protection mirror detection device and the power detection device, and the power detection can also be carried out on the light path between the power detection device and the second protection mirror detection device, the whole process detection of the light path in the high-power laser processing equipment in the laser processing process is realized, the problems of the laser processing equipment in the laser processing process can be rapidly positioned and diagnosed, and the traceability of the laser processing is ensured.
(2) According to the real-time feedback power detection device for the high-power laser, the protection mirror detection module and the power detection device are two modules which can independently operate, when one module is damaged or needs to be adjusted, the other module can detect, so that a large accident is avoided in the laser processing process, the safety of laser processing can be greatly improved through double detection, and the economic loss is reduced.
(3) The real-time feedback power detection device of the high-power laser can form a closed loop system in the high-power laser processing process, the power detection device collects power data of laser processing equipment in the processing process and feeds abnormal data back to the control system, the control system diagnoses the abnormal data and correspondingly adjusts the laser power, the problem of the laser processing equipment is avoided, secondary damage is caused for a long time, and the safety of the laser processing equipment is improved. In addition, the control system can also draw a power curve, visualize the data and improve the efficiency of fault diagnosis.
(4) According to the real-time feedback power detection device for the high-power laser, provided by the invention, the light reflected by the spectroscope still has higher energy, and the light energy absorption module is added at the power detection device, so that the residual laser reflected or refracted by the spectroscope can be absorbed, and the influence of the residual laser on laser processing equipment is avoided. And the mounting positions of the light energy absorption module and the power detection device can be exchanged and adjusted according to actual use situations, and reflected and refracted laser is absorbed according to use requirements.
(5) The real-time feedback power detection device of the high-power laser is arranged in processing equipment capable of emitting laser, has wide applicability, and can effectively ensure the quality, the processing efficiency and the processing safety of laser processing.
Drawings
FIG. 1 is a schematic diagram of a real-time feedback power detection device for high-power laser according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of a problem positioning process related to a real-time feedback power detection device for high-power laser according to an embodiment of the present invention;
fig. 3 is a schematic diagram of closed-loop control related to a real-time feedback power detection device of high-power laser according to an embodiment of the present invention.
Like reference numerals denote like technical features throughout the drawings, in particular: 1-a first protection mirror detection device, a 2-collimating mirror, a 3-reflecting mirror, a 4-spectroscope, a 5-power detection device, a 6-light energy absorption module, a 7-first direction reflecting mirror, an 8-second direction reflecting mirror, a 9-second protection mirror detection device and a 10-focusing mirror;
11-a first photoelectric sensor and 12-a first protective mirror body; 91-second photoelectric sensor, 92-second protection mirror body.
Detailed Description
The present invention will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present invention more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. In addition, the technical features of the embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Fig. 1 is a schematic structural diagram of a real-time feedback power detection device for high-power laser according to an embodiment of the present invention, as shown in fig. 1, including a first protection mirror detection device 1 and a second protection mirror detection device 9 respectively disposed at a laser incident end and a laser emergent end inside a laser processing device, where a reflection mirror 3 is disposed in a laser light path between the first protection mirror detection device 1 and the second protection mirror detection device 9; the laser passes through the first protection mirror detection device 1 and then passes through the reflector 3, one part of the laser passing through the reflector 3 is reflected into a first laser beam, the other part of the laser is refracted into a second laser beam, the first laser beam reflected from the reflector 3 enters the second protection mirror detection device 9, the second laser beam refracted from the reflector 3 enters the power detection device 5, and the laser power in the laser processing process is detected in real time through the power detection device 5.
Due to the characteristics of the material of the reflecting mirror, when light is reflected, a small part of light (energy) still passes through the lens, and the laser transmitted by the part can be detected by using the laser power detection device suitable for low power, so that the detection of high power laser power is indirectly realized. When light passes through the reflector, most of the light is reflected to the protective mirror at the outgoing end of the laser processing equipment and then used for laser processing, and the rest light passes through the spectroscope and is detected by the power detection device, and the actual laser power is calculated through the control system. The measurable range of the power detection device 5 in the embodiment of the invention is preferably 0-10 KW.
Specifically, the first protection mirror detection device 1 includes a first protection mirror body 12 and a first photosensor 11 provided in correspondence therewith, and the second protection mirror detection device 9 includes a first protection mirror body 92 and a second photosensor 91 provided in correspondence therewith. The first photosensor 11 and the second photosensor 91 are used to detect whether contamination occurs on the corresponding protective mirror surfaces. The photoelectric sensor is preferably connected with a corresponding alarm system, and the photoelectric sensor and the alarm system are both connected with a control system.
When the laser processing equipment normally works, the surface of the protective mirror is in a clean state, if the laser processing equipment is damaged, when the sealing performance is affected, the surface of the protective mirror is covered by dust generated during working or metal scraps generated by sputtering, the laser rays can be diffusely reflected after irradiation, a photoelectric sensor near the protective mirror can alarm a control system after detecting the reflected rays, an operator is reminded to replace the protective lens, and the damage to internal components caused by splashing and dust is avoided, so that the problems are examined.
As shown in fig. 1 and 2, the optical path between the first protection mirror detection device 1 and the power detection device 5 is a first half path, the optical path between the power detection device 5 and the second protection mirror detection device 9 is a second half path, if the power detection device 5 detects abnormal data, and when the first protection mirror detection device 1 alarms, the protection mirror at the first protection mirror detection device 1 is stained, so that the problem of the laser processing equipment is positioned in the first half path; similarly, if the power detection device 5 detects abnormal data and the second protection mirror detection device 9 alarms, the protection mirror at the second protection mirror detection device 9 is stained, so that the problem of the laser processing equipment is positioned in the optical path of the second half.
The abnormal data detected by the power detection device 5 is data exceeding the normal threshold range of the laser power preset in the control system.
The invention adopts the power detection device to be combined with the first protective mirror detection device 1 and the second protective mirror detection device 9 at the head end and the tail end in the laser processing equipment, and when the protective mirrors are stained, a control system can give an alarm to remind a worker to replace the protective mirrors and check the problems. The power detection can be carried out on the light path (first half path light path) from the first protection mirror detection device to the power detection device, and the power detection can be carried out on the light path (second half path light path) from the power detection device to the second protection mirror detection device, so that the whole process detection of the light path in the high-power laser processing equipment is realized. Therefore, the invention not only can realize the detection of laser power, but also can perform preliminary positioning on the problems, reduce the investigation range and improve the efficiency of fault diagnosis.
The power detection device and the protection mirror detection device are two modules which independently operate, when one of the power detection device and the protection mirror detection device is damaged by a core component or the failure point cannot be locked in time and needs to be adjusted, the other module can be temporarily used as a detection module in laser processing, so that a large accident caused by laser processing is avoided, and detection in the laser processing is not affected. The dual detection can greatly improve the safety of laser processing and reduce economic loss. In addition, the power detection device and the protection mirror detection device are preferably arranged in a standardized way, namely a plurality of identical standby modules are arranged, when the situation that the device cannot be maintained on the production site and effectively and timely occurs, the corresponding modules can be quickly removed, the standby modules with completely consistent structural function appearance are replaced, the purpose of quickly recovering the device to be normal is achieved, and the interchangeability of equipment is improved.
As shown in fig. 3, in the process of performing high-power laser processing, the real-time feedback power detection device of the high-power laser forms a closed loop system, the power detection device collects power data of the laser processing equipment in the processing process and feeds the data back to the control system, the control system diagnoses abnormal data and adjusts the laser power correspondingly, the problem of the laser processing equipment is avoided from causing secondary damage for a long time, the safety of the laser processing equipment is improved, and further the processing quality is improved. And after the protective mirror is stained, the transmissivity of the protective mirror can be influenced, the energy of laser transmission is continuously reduced, the diffuse reflection laser energy irradiated on the stain is continuously increased, and the sensor can be damaged due to the fact that the diffuse reflection laser with overlarge energy is irradiated on the sensor, so that the protective mirror can also play a role in protecting the sensor through the closed-loop control.
The power detection device can monitor laser in the whole process, track the power of the laser in the internal light path of the laser processing equipment, is connected with the control system, can calculate the laser processing power, and can draw a corresponding power curve, and if the power curve is abnormal, the power curve indicates that the abnormal data are generated. Therefore, the invention can carry out detection and fault diagnosis by analyzing the power data recorded by the power detection device and tracing the power curve of the corresponding time, and in the process of processing a large number of lasers, the power curve can be analyzed by the existing analysis software, so that the whole process detection is carried out on the processing quality, and the unqualified products can be rapidly positioned by tracing the power curve of the corresponding time.
In the preferred embodiment, a beam splitter 4 is further disposed in the optical path between the reflecting mirror 3 and the power detecting device 5 to split the second laser beam transmitted through the reflecting mirror 3 into a third laser beam and a fourth laser beam, wherein the power detecting device 5 is correspondingly disposed in the optical path of one laser beam, and the optical energy absorbing module 6 is correspondingly disposed in the optical path of the other laser beam.
Illustratively, as shown in fig. 1, the beam splitter 4 reflects the second laser beam as a third laser beam while refracting the second laser beam as a fourth laser beam, the light energy absorbing module 6 is disposed corresponding to the third laser beam, and the power detecting device 5 is disposed corresponding to the fourth laser beam. It is understood that the light energy absorbing module 6 may be positioned in correspondence with the fourth laser beam while the fourth laser beam is positioned in correspondence with the light energy absorbing module 6. That is, the power of the laser beam may be detected, or the power of the reflected laser beam may be detected, and the remaining reflected or refracted laser beam may be absorbed by the light energy absorbing module.
The invention preferably adds the light energy absorbing module 6 at the power detection device 5, which can absorb the residual laser passing through the spectroscope 4, further avoid the influence of the residual laser on the laser processing equipment and improve the safety. The light energy absorption module can exchange positions with the power detection device, and absorbs reflected and refracted laser according to the use requirement. Of course, when the residual laser energy is weaker, the structure can be omitted, so that the integration level of the laser processing equipment is higher, and the applicability of the laser processing equipment is improved.
Further preferably, a collimating mirror 2 is further arranged in the optical path between the first protection mirror detection device 1 and the reflecting mirror 3, and is used for calibrating the laser passing through the reflecting mirror 3, so as to improve the accuracy of laser processing.
Further preferably, at least one mirror is further provided in the optical path between the mirror 3 and the second protection mirror detecting means 9 for changing the optical path so that the laser light reflected by the mirror 3 smoothly enters the second protection mirror detecting means 9. Illustratively, as shown in fig. 1, a first direction mirror 7 and a second direction mirror 8 are provided in the optical path between the mirror 3 and the second protection mirror detection device 9, and both sides are located in different planes, arranged in a three-dimensional form. It will be appreciated that the number and placement of the specific mirrors may be adjusted according to the actual circumstances.
It is further preferred that a focusing mirror 10 is further arranged in the optical path close to the second protection mirror detection means 9, facilitating focusing of the laser light before it exits from the exit opening of the laser processing device.
Taking the specific structure shown in fig. 1 as an example, the laser transmission process of the high-power laser real-time feedback power detection device of the invention is as follows: the laser emitted by the laser generator enters the first protective mirror body 12 and is detected in real time by the corresponding first photoelectric sensor 11, and then passes through the collimating mirror 2 below the first protective mirror detection device 1 to reach the reflecting mirror 3 below. Most of the laser is reflected to the first direction reflecting mirror 7 through the reflecting mirror 3 and then reflected to the second direction reflecting mirror 8 again, and the second direction reflecting mirror 8 transmits the laser to the focusing mirror 10 below, passes through the second photoelectric sensor 91 below the focusing mirror 10 and finally reaches the surface of the workpiece; a small part of laser passes through the reflecting mirror 3 to reach the spectroscope 4, the spectroscope 4 transmits the transmitted laser to the power detection device 5 below to perform power detection, and the reflected laser is transmitted to the light energy absorption module 6 at one side to perform absorption treatment.
The laser processing apparatus of the present invention includes, but is not limited to, scanning galvanometer, soldering head, laser cleaning head, swinging head, etc., and is widely applicable. The real-time feedback power detection device of the high-power laser is integrally arranged in the laser processing equipment, can monitor the laser processing power to rapidly locate and diagnose the problems of the laser processing equipment, indirectly detects the integral processing quality, and can effectively ensure the quality, the processing efficiency and the processing safety of laser processing.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The real-time feedback power detection device of the high-power laser is characterized in that the power detection device is arranged inside the laser processing equipment and comprises a first protection mirror detection device (1) arranged at a laser incidence end of the laser processing equipment and a second protection mirror detection device (9) arranged at a laser emergence end;
a reflecting mirror (3) is arranged in a laser light path between the first protective mirror detection device (1) and the second protective mirror detection device (9), a first laser beam reflected by the reflecting mirror (3) enters the second protective mirror detection device (9), and a second laser beam refracted by the reflecting mirror (3) enters the power detection device (5);
the power detection device (5) is combined with the protection mirror detection device, can detect power of a first half path between the first protection mirror detection device (1) and the power detection device (5), can detect power of a second half path between the power detection device (5) and the second protection mirror detection device (9), and can locate the problem of laser processing equipment in the first half path or the second half path.
2. The real-time feedback power detection apparatus of high power laser according to claim 1, wherein if the power detection apparatus (5) detects abnormal data while the first protection mirror detection apparatus (1) alarms, a problem of the laser processing device is located in the first half path light path;
if the power detection device (5) detects abnormal data and the second protection mirror detection device (9) alarms, the problem of the laser processing equipment is positioned in the second half path.
3. The real-time feedback power detection device of a high-power laser according to claim 1 or 2, wherein the first protection mirror detection device (1) comprises a first protection mirror body (12) and a first photoelectric sensor (11) arranged corresponding to the first protection mirror body, and the second protection mirror detection device (9) comprises a first protection mirror body (92) and a second photoelectric sensor (91) arranged corresponding to the first protection mirror body, and the photoelectric sensor is used for detecting whether the corresponding protection mirror surface is stained.
4. A real-time feedback power detection arrangement of a high power laser according to claim 3, characterized in that the first (11) and second (91) photosensors are connected with corresponding alarm systems.
5. The real-time feedback power detection device of high-power laser according to claim 1 or 2, wherein the power detection device (5) collects power data of the laser processing equipment in the processing process and feeds the data back to a control system, and the control system can diagnose abnormal data and correspondingly adjust the laser power to form closed-loop control.
6. The real-time feedback power detection device of high-power laser according to claim 5, wherein the control system can draw a corresponding power curve, and can trace back the power curve corresponding to time to perform detection and fault diagnosis by analyzing the power data recorded by the power detection device (5).
7. The real-time feedback power detection apparatus of high-power laser according to any one of claims 1, 2 or 6, wherein a beam splitter (4) is further provided in the optical path between the reflecting mirror (3) and the power detection apparatus (5) to split the second laser beam transmitted through the reflecting mirror (3) into a third laser beam and a fourth laser beam, wherein the power detection apparatus (5) is provided in the optical path of one of the laser beams and the optical energy absorption module (6) is provided in the optical path of the other laser beam.
8. The real-time feedback power detection device of a high power laser according to any of claims 1, 2 or 6, characterized in that in the optical path between the first protection mirror detection device (1) and the mirror (3) a collimator mirror (2) is further provided; and/or the number of the groups of groups,
at least one reflecting mirror is arranged in the light path between the reflecting mirror (3) and the second protective mirror detection device (9) and used for changing the light path so that the laser reflected by the reflecting mirror (3) smoothly enters the second protective mirror detection device (9); and/or a focusing mirror (10) is also arranged in the light path close to the second protective mirror detection device (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311792478.8A CN117697189A (en) | 2023-12-25 | 2023-12-25 | Real-time feedback power detection device for high-power laser |
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| CN202311792478.8A CN117697189A (en) | 2023-12-25 | 2023-12-25 | Real-time feedback power detection device for high-power laser |
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| CN117697189A true CN117697189A (en) | 2024-03-15 |
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| CN202311792478.8A Pending CN117697189A (en) | 2023-12-25 | 2023-12-25 | Real-time feedback power detection device for high-power laser |
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