CN112229506A - Laser testing device for myriawatt-level high-power integrating sphere - Google Patents

Laser testing device for myriawatt-level high-power integrating sphere Download PDF

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Publication number
CN112229506A
CN112229506A CN202011001536.7A CN202011001536A CN112229506A CN 112229506 A CN112229506 A CN 112229506A CN 202011001536 A CN202011001536 A CN 202011001536A CN 112229506 A CN112229506 A CN 112229506A
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integrating sphere
laser
water
power
diffuse reflection
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CN112229506B (en
Inventor
王涛
张玉莹
麻云凤
满在刚
王哲
高和平
王帅
娄伟
樊仲维
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Aerospace Information Research Institute of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0411Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using focussing or collimating elements, i.e. lenses or mirrors; Aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0474Diffusers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00Measuring quantity of heat
    • G01K17/003Measuring quantity of heat for measuring the power of light beams, e.g. laser beams
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4247Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

The invention discloses a laser testing device for a myriawatt high-power integrating sphere, which comprises a water-cooling integrating sphere, a diffuse reflection coating, a concave lens, a laser detection module, a light blocking plate and a convex reflector, wherein laser to be tested enters the water-cooling integrating sphere through the concave lens, light beams are diffused in the water-cooling integrating sphere and irradiate the convex reflector, and then the light beams are reflected to the inner wall of the water-cooling integrating sphere through the convex reflector; the inner wall of the water-cooling integrating sphere is provided with a diffuse reflection coating; sampling and testing the light beam subjected to diffuse reflection by the diffuse reflection coating by the laser detection module; the laser detection module converts an incident optical signal into an electric signal, then obtains the laser power of the incident water-cooling integrating sphere according to the opening ratio, and reversely deduces the power of the laser to be detected according to the reflection loss of the concave lens. The device can directly test the laser power with high power and small divergence angle in a kilowatt level by using the integrating sphere, has shorter response time and improves the laser test efficiency.

Description

Laser testing device for myriawatt-level high-power integrating sphere
Technical Field
The invention relates to the technical field of laser power testing, in particular to a laser testing device for a myriawatt high-power integrating sphere.
Background
With the development of laser technology, the laser power is continuously improved, at present, lasers with the light emitting power of ten-kilowatt level are gradually moved out of laboratories, and high-performance laser cutting and processing equipment in the market is also assembled with the laser of ten-kilowatt level. In the process of developing and maintaining a myriawatt high-power laser and related equipment thereof, laser power needs to be tested, the test of the laser power can be divided into three types on the test principle, one type adopts a calorimetric mode for direct test, the other type adopts a pyroelectric and chopping mode for test, and the other type carries out sampling test.
For a myriawatt high-power laser, direct test by adopting a calorimetric method needs to absorb the high-power laser, the requirements on an absorption coating and a water cooling structure of a power test instrument are extremely high, the manufacturing process is complex, and the response speed of the whole power test instrument is very low in consideration of long time required by photo-thermal conversion and heat conduction, possibly needing tens of seconds or even longer time, so that inconvenience is brought to the test; the response speed of a power test instrument can be improved to a certain extent by adopting a pyroelectric mode, but because the pyroelectric transistor can only respond to a changed temperature signal, the pyroelectric transistor needs to be matched with a chopper for use, continuous laser is chopped into pulse laser, then the pulse laser is tested, but under the condition of high-power laser irradiation, the safety problem of the chopper needs to be considered, and errors introduced by the chopper need to be corrected; the sampling test generally has three types, namely light splitting sampling, rotating needle sampling and integrating sphere sampling, and specifically:
the light splitting sampling is to split a small part of the incident laser in a reflection or transmission mode, the splitting ratio of the light splitting device is fixed, the small part of the incident laser enters the optical detector through the light splitting device to test the optical power of the incident laser, and then the optical power of the incident laser is reversely deduced according to the splitting ratio. The mode requires that the splitting ratio of the splitting device is very stable, the splitting ratio is not changed under the irradiation of high-power laser, and the test result is not influenced when the incident angle needs to be adapted to change within a certain range; for the rotary needle sampling mode, the rotary needle needs to rotate quickly, and high stability in the rotating process is difficult to ensure, so that the test error is large, and the rotary needle sampling mode is generally used for monitoring laser power rather than direct test; the sampling mode of the integrating sphere is adopted, after laser is incident into the integrating sphere, the laser is subjected to diffuse reflection through the inner wall of the integrating sphere to form uniform distribution, and the wall of the integrating sphere is provided with a testing hole for sampling and testing light inside the integrating sphere. For the integrating sphere in the traditional form, incident laser directly irradiates on a diffuse reflection coating on the inner wall of the integrating sphere through a light inlet hole, the structure is suitable for low-power laser, but for high-power laser, particularly high-power laser with a small divergence angle, the laser power density is very high, when the power density exceeds the damage threshold of the diffuse reflection coating, the coating is damaged, the test result cannot be ensured to be accurate, and the whole integrating sphere is damaged under severe conditions.
Disclosure of Invention
The invention aims to provide a laser testing device of a myriawatt high-power integrating sphere, which can directly test the myriawatt high-power and small-divergence-angle laser power by using the integrating sphere, has shorter response time and improves the laser testing efficiency.
The purpose of the invention is realized by the following technical scheme:
the utility model provides a high-power integrating sphere laser test device of ten thousand watts, the device includes water-cooling integrating sphere, diffuse reflection coating, concave lens, laser detection module, shelves smooth board and convex speculum, wherein:
the laser to be measured enters the water-cooled integrating sphere through the concave lens, light beams are diffused in the water-cooled integrating sphere and irradiate the convex reflector, and the light beams are reflected to the inner wall of the water-cooled integrating sphere through the convex reflector;
the inner wall of the water-cooling integrating sphere is provided with the diffuse reflection coating, and the diffuse reflection coating is used for performing diffuse reflection on the light beam;
the surface of the water-cooling integrating sphere is also provided with a sampling hole, the laser detection module is arranged at the sampling hole, the light beam after diffuse reflection by the diffuse reflection coating is emitted from the sampling hole and enters the laser detection module, and the incident light beam is subjected to sampling test by the laser detection module;
the laser detection module converts an incident optical signal into an electric signal, then obtains the laser power incident to the water-cooling integrating sphere according to the aperture ratio, and reversely deduces the power of the laser to be detected according to the reflection loss of the concave lens;
the laser detection device comprises a water-cooling integrating sphere, a convex reflector, a light-blocking plate and laser detection modules, wherein the light-blocking plate is arranged at the position of an opening corresponding to the laser detection modules and is positioned inside the water-cooling integrating sphere, diffuse reflection coatings identical to the inner surface of the water-cooling integrating sphere are sprayed on the surface of the light-blocking plate, the number of the light-blocking plates corresponds to the number of the laser detection modules one by one, and the light-blocking plates are used for preventing light beams reflected by the convex reflector from directly entering a sampling hole and preventing once diffuse reflection light on the inner wall of the.
According to the technical scheme provided by the invention, the device can directly test the laser power with high power and small divergence angle in ten-thousand watt level by using the integrating sphere, has shorter response time and improves the laser test efficiency.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a laser testing device for a high-power integrating sphere of a kilowatt level according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a convex reflector according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the light path after being emitted by the convex mirror in the embodiment of the present invention;
FIG. 4 is a schematic structural view of a circulating cooling water channel disposed in the middle of a water-cooled integrating sphere with a double-layer structure according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a water-cooling integrating sphere with a single-layer structure, on the surface of which a circulating cooling water channel is disposed, according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the present invention will be further described in detail with reference to the accompanying drawings, and as shown in fig. 1, is a schematic structural diagram of a laser test apparatus for a high-power wanw integrating sphere according to the embodiment of the present invention, the apparatus mainly includes a water-cooled integrating sphere 2, a diffuse reflection coating 7, a concave lens 5, laser detection modules 31 and 32, light blocking plates 41 and 42, and a convex reflector 6, wherein a light path process specifically includes:
the laser 1 to be measured enters the water-cooled integrating sphere 2 through the concave lens 5, light beams are diffused in the water-cooled integrating sphere 2 and irradiate the convex reflector 6, and the light beams are reflected to the inner wall of the water-cooled integrating sphere 2 through the convex reflector 6; in the specific implementation process, light spots with different sizes can be generated on the convex reflector 6 according to different divergence angles of incident laser, and most of the incident laser can be irradiated on the convex reflector 6 by properly setting the focal length of the concave lens 5 and the size of the convex reflector 6 according to the size of the water-cooled integrating sphere 2, the beam diameter of the laser 1 to be measured and the range of the divergence angle;
the inner wall of the water-cooling integrating sphere 2 is provided with the diffuse reflection coating 7, and the light beam is subjected to diffuse reflection by the diffuse reflection coating 7;
a sampling hole is further formed in the surface of the water-cooled integrating sphere 2, the laser detection module is arranged at the sampling hole, light beams after diffuse reflection by the diffuse reflection coating are emitted from the sampling hole and enter the laser detection module, and the incident light beams are subjected to sampling test by the laser detection module; in a specific implementation, the water-cooled integrating sphere 2 may be provided with a plurality of laser detection modules, two of which are shown in fig. 1 and are respectively a laser detection module 31 and a laser detection module 32;
the laser detection module converts an incident optical signal into an electric signal, then obtains the laser power incident to the water-cooling integrating sphere 2 according to the aperture ratio, and reversely deduces the power of the laser 1 to be detected according to the reflection loss of the concave lens 5; in the concrete implementation, in order to ensure that the light formed after the diffuse reflection inside the water-cooled integrating sphere 2 is uniformly distributed, the corresponding areas of the openings of the concave lens 5, the convex reflector 6 and the laser detection module on the water-cooled integrating sphere 2 are smaller than 1/10 of the total area of the inner side of the water-cooled integrating sphere 2.
The hole corresponding to the laser detection module is also provided with the light blocking plate, the light blocking plate is positioned inside the water-cooling integrating sphere 2, diffuse reflection coatings identical to the inner surface of the water-cooling integrating sphere 2 are sprayed on the surface of the light blocking plate, the number of the light blocking plates corresponds to the laser detection modules one by one, for example, in fig. 1, the laser detection modules 31 and 32 correspond to the light blocking plates 41 and 42 respectively, and the light blocking plate is used for preventing light beams reflected by the convex reflector from directly entering the sampling hole and preventing once diffuse reflection light on the inner wall of the water-cooling integrating sphere from directly entering the laser detection module.
Fig. 2 is a schematic structural diagram of a convex reflector 6 according to an embodiment of the present invention, in which 61 is a spherical crown structure with a conical tip top, corresponding to a small radius; 62 is a conical surface; 63 is a spherical cap structure at the bottom of the convex reflector 6, corresponding to a larger radius. The design is that the space light intensity distribution of the laser 1 to be measured is generally Gaussian, the center power density is large, the edge power density is small, even after the laser is dispersed by the concave lens 5, the center power density is also large, the edge power density is small, in order to reduce the laser power density at the top end of the convex reflector 6 and reduce the laser which is directly emitted from the concave lens 5 after being reflected by the convex reflector 6, the top end of the convex reflector 6 is provided with a conical structure, the whole convex reflector 6 is formed by a conical and spherical crown, meanwhile, the top end of the conical is a conical tip, if the top end of the conical is too sharp, the conical tip is not easy to process, and the high-power-density laser is easy to damage when irradiating, the conical tip adopts a round shape, and the connection part of the conical tip bottom end and the spherical crown adopts a convex circular structure, thus, the light can be effectively reflected and dispersed, is not easy to damage under strong laser.
Fig. 3 is a schematic diagram of an optical path after being emitted from each area of the convex reflector according to the embodiment of the present invention, where an area 8 is a conical surface reflection area on the convex reflector 6, an area 9 is a spherical cap reflection area, and with reference to fig. 2 and 3: the conical structure can ensure that the light reflected by the conical surface 62 does not return to the concave lens 5 any more, the radius of the spherical crown part 61 at the conical tip is small, so that the light irradiated on the part can be reflected and scattered by a large angle, the laser returned to the concave lens 5 is ensured to be small, the light reflected by the spherical crown structure 63 at the bottom of the convex reflector 6 is blocked by the light blocking plate at the laser detection module, and the reflected light of the convex reflector 6 cannot directly enter the laser detection module.
In addition, the surface of the convex reflector 6 is polished and gold-plated to form a mirror reflection.
In a specific implementation, the water-cooled integrating sphere may have a structure of two hemispheres, each of the two hemispheres has a double-layer structure, and a circulating cooling water channel is disposed between the double-layer structures, as shown in fig. 4, a schematic structural diagram of the circulating cooling water channel disposed between the water-cooled integrating sphere of the double-layer structure according to the embodiment of the present invention is shown, where 13 is an inner layer of the water-cooled integrating sphere, 12 is an outer layer of the water-cooled integrating sphere, 10 is a circulating cooling water channel between the two layers, and 11 is a flange for connecting and fixing the two hemispheres.
Alternatively, the water-cooled integrating sphere may also adopt a single-layer structure, and a circulating cooling water channel is disposed on the surface of the single-layer structure, as shown in fig. 5, a schematic structural diagram of the water-cooled integrating sphere with a single-layer structure is shown, 14 is a circular circulating cooling water channel, and is welded on the surface of the single-layer integrating sphere, and the bottom of the circular circulating cooling water channel is in full and close contact with the integrating sphere, so as to ensure that heat on the integrating sphere can be rapidly taken away through cooling water in the water-cooled pipeline.
In addition, the concave lens 5 can be in the form of a plano-concave lens, and the plane faces the outside of the water-cooling integrating sphere; the concave lens 5 can be a single-chip plano-concave lens or a multi-chip combined plano-concave lens, and two optical surfaces of the single-chip plano-concave lens or the multi-chip combined plano-concave lens are both plated with antireflection films aiming at incident laser wavelengths.
In addition, the diffuse reflection coating 7 may be a diffuse reflection gold, alumina, titania, or zirconia coating, or other diffuse reflection coatings having a high reflectance.
In actual operation, the laser test device can be calibrated, a laser irradiation test device with known power is adopted, current signals output by a plurality of laser detection modules are recorded, the current signals are averaged and then compared with incident laser power, and a calibration coefficient is obtained.
It is noted that those skilled in the art will recognize that embodiments of the present invention are not described in detail herein.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (8)

1. The utility model provides a ten thousand watts high power integrating sphere laser testing arrangement which characterized in that, the device includes water-cooling integrating sphere, diffuse reflection coating, concave lens, laser detection module, shelves smooth board and convex speculum, wherein:
the laser to be measured enters the water-cooled integrating sphere through the concave lens, light beams are diffused in the water-cooled integrating sphere and irradiate the convex reflector, and the light beams are reflected to the inner wall of the water-cooled integrating sphere through the convex reflector;
the inner wall of the water-cooling integrating sphere is provided with the diffuse reflection coating, and the diffuse reflection coating is used for performing diffuse reflection on the light beam;
the surface of the water-cooling integrating sphere is also provided with a sampling hole, the laser detection module is arranged at the sampling hole, the light beam after diffuse reflection by the diffuse reflection coating is emitted from the sampling hole and enters the laser detection module, and the incident light beam is subjected to sampling test by the laser detection module;
the laser detection module converts an incident optical signal into an electric signal, then obtains the laser power incident to the water-cooling integrating sphere according to the aperture ratio, and reversely deduces the power of the laser to be detected according to the reflection loss of the concave lens;
the laser detection device comprises a water-cooling integrating sphere, a convex reflector, a light-blocking plate and laser detection modules, wherein the light-blocking plate is arranged at the position of an opening corresponding to the laser detection modules and is positioned inside the water-cooling integrating sphere, diffuse reflection coatings identical to the inner surface of the water-cooling integrating sphere are sprayed on the surface of the light-blocking plate, the number of the light-blocking plates corresponds to the number of the laser detection modules one by one, and the light-blocking plates are used for preventing light beams reflected by the convex reflector from directly entering a sampling hole and preventing once diffuse reflection light on the inner wall of the.
2. The laser testing device for the myriawatt-level high-power integrating sphere according to claim 1, wherein a conical structure is arranged at the top end of the convex reflector, and the whole convex reflector is formed by a conical and spherical crown; the conical tip is round, and the joint of the conical tip bottom end and the spherical crown is of a convex annular structure.
3. The laser testing device of a myriawatt-level high-power integrating sphere of claim 1, wherein the surface of the convex reflector is polished and gold-plated to form a mirror reflection.
4. The laser testing device for a myriawatt-level high-power integrating sphere according to claim 1,
the water-cooling integrating sphere is in a structure of a front hemisphere and a rear hemisphere, the two hemispheres are in a double-layer structure, and a circulating cooling water channel is arranged in the middle of the double-layer structure;
or a single-layer structure is adopted, and a circulating cooling water channel is arranged on the surface of the single-layer structure.
5. The laser testing device for the myriawatt-level high-power integrating sphere of claim 1, wherein the corresponding areas of the openings of the concave lens, the convex reflector and the laser detection module on the water-cooled integrating sphere are smaller than 1/10 of the total area of the inner side of the water-cooled integrating sphere.
6. The laser testing device for a myriawatt-level high-power integrating sphere according to claim 1,
the concave lens is in a plano-concave lens form, and the plane faces the outside of the water-cooling integrating sphere.
7. The laser testing device for a myriawatt-level high-power integrating sphere according to claim 1,
the concave lens is a single-piece plano-concave lens or a multi-piece combined plano-concave lens, and two optical surfaces of the single-piece or multi-piece combined plano-concave lens are both plated with antireflection films aiming at incident laser wavelengths.
8. The laser testing device for a myriawatt-level high-power integrating sphere according to claim 1,
the diffuse reflection coating adopts diffuse reflection gold, aluminum oxide, titanium oxide or zirconium oxide coating.
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Cited By (5)

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CN113203473A (en) * 2021-04-19 2021-08-03 上海飞博激光科技有限公司 Myriawatt-level laser power meter protection device and laser power test system
CN113884180A (en) * 2021-09-29 2022-01-04 歌尔光学科技有限公司 System, method and device for testing diffraction light waveguide
CN114252150A (en) * 2021-12-31 2022-03-29 武汉锐科光纤激光技术股份有限公司 Chip polarization test system
CN116659819A (en) * 2023-05-26 2023-08-29 长沙航空职业技术学院(空军航空维修技术学院) Multi-probe water-cooling laser collection device for high-power laser aging test equipment
CN117740736A (en) * 2023-11-30 2024-03-22 江苏北方湖光光电有限公司 Low-reflection light absorption layer surface diffuse reflection measurement method

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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN113203473A (en) * 2021-04-19 2021-08-03 上海飞博激光科技有限公司 Myriawatt-level laser power meter protection device and laser power test system
CN113884180A (en) * 2021-09-29 2022-01-04 歌尔光学科技有限公司 System, method and device for testing diffraction light waveguide
CN113884180B (en) * 2021-09-29 2024-03-12 歌尔光学科技有限公司 Testing system, method and device for diffraction optical waveguide
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