CN105371992A - Temperature sensor response consistency calibration test system and method - Google Patents
Temperature sensor response consistency calibration test system and method Download PDFInfo
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- CN105371992A CN105371992A CN201510929982.7A CN201510929982A CN105371992A CN 105371992 A CN105371992 A CN 105371992A CN 201510929982 A CN201510929982 A CN 201510929982A CN 105371992 A CN105371992 A CN 105371992A
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- temperature sensor
- response
- bowl
- carbon dioxide
- temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
Abstract
The invention relates to a temperature sensor response consistency calibration test system. The temperature sensor response consistency calibration test system includes a high-power carbon dioxide laser 1, a guide light tube 2, an optical reflective metal bowl 3, an optical plane mirror 4, a test platform mechanism 5, a vacuum chamber 6 and a temperature sensor to be calibrated 7; the vacuum chamber 6 is arranged on the test platform mechanism 5; the optical reflective metal bowl 3, the optical plane mirror 4 and the temperature sensor to be calibrated 7 are arranged in the vacuum chamber 6; and the high-power carbon dioxide laser 1 is connected with the guide light tube 2. With the temperature sensor response consistency calibration test system of the invention adopted, the input variables of the temperature response curve of the temperature sensor to be measured can be ensured constant, and therefore, a drawn temperature response curve is only affected by the features of temperature sensor itself, and influences of external environments on the temperature response curve are excluded.
Description
Technical field
The present invention relates to technical field of optical test, particularly relate to a kind of temperature sensor response consistency calibration test macro and method.
Background technology
In temperature sensor detection field, the scaling method of traditional thermocouple temperature sensor adopts dynamic calibration apparatus or static demarcating device, its principle is placed thermocouple temperature sensor cold junction to be calibrated and be equipped with in the thermos of mixture of ice and water, it is 0 DEG C to keep cold junction temperature, thermostat is put in hot junction, and cold and hot end and potential difference meter are linked to be loop, by the temperature of regulating constant incubator, read the potentiometric thermoelectrical potential value E1 of corresponding point, E2, E3, En, be recorded in table simultaneously, to obtain the respective value of a series of temperature and thermoelectrical potential, and calibration value.Final with thermoelectrical potential E for ordinate, temperature t is that horizontal ordinate makes a TC Characteristic Curves demarcated.
Summary of the invention
In view of above-mentioned analysis, the present invention aims to provide a kind of temperature sensor response consistency calibration method of testing, the environmental impact issues existed when the scaling method in order to solve traditional thermocouple temperature sensor adopts dynamic calibration apparatus or static demarcating device to test.
Object of the present invention is mainly achieved through the following technical solutions:
The invention provides a kind of temperature sensor response consistency calibration test macro, comprise: high-power carbon dioxide laser 1, light pipe 2, optical reflection metal bowl 3, optical flat catoptron 4, test platform mechanism 5, vacuum storehouse 6 and temperature sensor to be calibrated 7, described vacuum storehouse 6 is placed in described test platform mechanism 5, optical reflection metal bowl 3 is provided with in described vacuum storehouse 6, optical flat catoptron 4 and temperature sensor to be calibrated 7, described temperature sensor to be measured 7 is placed in the focal point F 1 of described optical reflection metal bowl 3, described optical flat catoptron 4 is placed in the focal point F 2 of described optical reflection metal bowl 3, described high-power carbon dioxide laser 1 is connected with light pipe 2, the laser beam that described high-power carbon dioxide laser 1 is launched is after reflection, focal point F 1 point of described optical reflection metal bowl 3 is exposed to after incident aperture through described optical metal reverberation bowl 3, then through multiple reflections uniform irradiation to described optical reflection metal bowl 3 focal point F 2 on.
Further, the rated power of described high-power carbon dioxide laser 1 is 3000W, and pulsed frequency is 0 ~ 1000Hz, power stability ≯ ± 2%.
Further, reflectivity ≮ 98% of the metal-coated membrane of described optical reflection metal bowl 3.
Further, described optical flat catoptron 4 diameter phi 5mm, surface precision index RMS ≯ λ/10, reflectivity ≮ 98% of metal-coated membrane.
Further, the position positioning precision tolerance ≯ 0.5mm of described test platform mechanism 5.
Further, described vacuum storehouse 6 vacuum tightnesss ≯ 0.7MPa, internal diameter is not less than 40mm.
Present invention also offers a kind of for the conforming scaling method of temperature sensor, utilize above-mentioned calibration system, high-power carbon dioxide laser Emission Lasers light beam is propagated through light pipe, laser beam is through focal point F 1 point exposing to optical reflection metal bowl after the incident aperture of optical metal reverberation bowl, then through multiple reflections uniform irradiation to the focal point F 2 of reflective metals bowl, described method comprises:
Controlling high-power carbon dioxide laser Emission Lasers power is steady state value, utilizes the temperature sensor of high-power carbon dioxide laser Emission Lasers to numbering i to heat respectively, wherein i=1,2 ..., laser instrument is started working as t
0in the moment, laser instrument heat time duration is t (s), and therefore laser instrument power cut-off is (t
0+ t) moment;
Gather the synchronous triggering signal of high-power carbon dioxide laser, when laser instrument is started working t
0in the moment, synchronous data sampling disposal system also starts to carry out data acquisition, a collection n temperature data per second, and data acquisition time is 2 × t, gathers { 2t (s) × n (individual/s) } individual data altogether;
For the data analysis gathered, its t of the temperature sensor of label i
0the temperature in moment is T
initially, at (t
0+ t) temperature in moment is T
middle, after laser instrument stops heating, temperature sensor, owing to having the response relaxation time, can continue to be warming up to maximum of T
maximumafter, then lower the temperature, set point of temperature sensor temperature maximum of T
maximumfor (t
0+ t+t
i) moment, therefore the speed of response p=(T of temperature sensor
middle-T
initially)/t; The temperature sensor response relaxation time is t
i, by threshold value diagnostic method, the temperature sensor speed of response of temperature sensor and temperature sensor response relaxation time not met the demands is rejected, and then realizes i temperature sensor response consistency calibration work in same group.
Further, described threshold value diagnostic method refer to for test one group of temperature sensor speed of response p and response the relaxation time be t
iaverage respectively, if the speed of response p of a certain temperature sensor or response relaxation time are t
iwith the difference of corresponding mean value, be greater than predetermined difference, then judge that this temperature sensor has problems, namely reject this temperature sensor.
Beneficial effect of the present invention is as follows:
This invention ensures that the input variable of the temperature response curve treating testing temperature sensor is consistent, and then the properties influence of the temperature response curve shrinkage temperature sensor drawn itself, eliminate the impact of external environment on it.
Other features and advantages of the present invention will be set forth in the following description, and, becoming apparent from instructions of part, or understand by implementing the present invention.Object of the present invention and other advantages realize by structure specifically noted in write instructions, claims and accompanying drawing and obtain.
Accompanying drawing explanation
Accompanying drawing only for illustrating the object of specific embodiment, and does not think limitation of the present invention, and in whole accompanying drawing, identical reference symbol represents identical parts.
Fig. 1 is the structural representation of calibration system described in the embodiment of the present invention;
Fig. 2 in system described in the embodiment of the present invention, the position relationship schematic diagram of optical reflection metal bowl and temperature sensor to be measured and optical flat catoptron.
Embodiment
Specifically describe the preferred embodiments of the present invention below in conjunction with accompanying drawing, wherein, accompanying drawing forms the application's part, and together with embodiments of the present invention for explaining principle of the present invention.
First by reference to the accompanying drawings system described in the embodiment of the present invention is described in detail.
As shown in Figure 1, Fig. 1 is the structural representation of calibration system described in the embodiment of the present invention, specifically can comprise: high-power carbon dioxide laser 1, light pipe 2, optical reflection metal bowl 3, optical flat catoptron 4, test platform mechanism 5, vacuum storehouse 6 and temperature sensor to be calibrated 7, vacuum storehouse 6 is placed in test platform mechanism 5, optical reflection metal bowl 3 is provided with in vacuum storehouse 6, optical flat catoptron 4 and temperature sensor to be calibrated 7, temperature sensor 7 to be measured is placed in the focal point F 1 of optical reflection metal bowl 3, optical flat catoptron 4 is placed in the focal point F 2 of optical reflection metal bowl 3, high-power carbon dioxide laser 1 is connected with light pipe 2, the laser beam that high-power carbon dioxide laser 1 is launched is after reflection, through focal point F 1 point exposing to optical reflection metal bowl 3 after the incident aperture of optical metal reverberation bowl 3, then through multiple reflections uniform irradiation in the focal point F 2 of optical reflection metal bowl 3.
Wherein, the rated power of high-power carbon dioxide laser 1 is 3000W, ensure the laser illumination energy requirement required for effective heating of temperature sensor, pulsed frequency is 0 ~ 1000Hz, realize stability contorting to laser output power, power stability ≯ ± 2%, ensure Laser output energy with the stability in this use procedure, light pipe laser optical path that laser instrument is exported change, make laser beam irradiation enter the logical light aperture of optical metal reverberation bowl, the Ellipsoidal Surface equation of optical reflection metal bowl 2, a logical light aperture is opened in special angle (being rule of thumb generally between 12 degree to 15 degree) direction, reflectivity ≮ 98% of metal-coated membrane, high reverse--bias rete ensures that laser can finally expose to the surface to be heated of temperature sensor to be calibrated by multiple reflections fully, optical flat catoptron 3 diameter phi 5mm, surface precision index RMS ≯ λ/10, reflectivity ≮ 98% of metal-coated membrane, the band area of heating surface of energy adequate illumination temperature sensor after high reverse--bias rete guarantee reflection, the position positioning precision tolerance ≯ 0.5mm of dedicated testing platform mechanism 4, can irradiate from the center of the incident aperture of optical reflection metal bowl after ensureing beam Propagation and enter optical metal reverberation bowl, small size vacuum pipe 5 vacuum tightnesss ≯ 0.7MPa, internal diameter is not less than 40mm.
As shown in Figure 2, Fig. 2 is the position relationship schematic diagram of optical reflection metal bowl and temperature sensor to be measured and optical flat catoptron, temperature sensor to be measured is placed on focal point F 1 point of optical reflection metal bowl, optical flat catoptron is placed on focal point F 2 point of optical reflection metal bowl, this kind of design avoids following phenomenon: the difference of temperature sensor absorptivity is caused by the difference of commaterial surface topography.The high-temperature alloy material absorptivity of current use is only between 0.2 to 0.3, and namely the major part of incidenting laser radiation energy is not absorbed by sensor, but is reflected and lost.The results showed, the absorptivity deviation of same batch of high temperature alloy is 0.06 to the maximum, the mean value of relative 0.24, and its relative deviation is 25%, and that is for same lasing source, the heating power that different sensor surfaces absorbs can differ 25%.The problem of obvious solution absorbed power difference has great importance for the calibration of temperature sensor response characteristic.Improve the endergonic consistance of sensor to set about from two aspects, namely improve effective absorbency level and improve effective endergonic consistance. metal hemispherical mirror a such as figure places, the metal bowl of a similar back-off, sensor heating surface is placed in circle centre position.The top of metal bowl has the aperture equal with lasing beam diameter, the inwall of metal bowl and its sensor frock part covered are coated with high-reflectivity metal film, effective reflectivity is greater than 0.99, metal the rim of a bowl covers with the bowl lid being coated with high-reflectivity metal film equally, bowl lid has the circular hole of fitting mutually with sensor frock, bowl lid inner face should be in same plane with sensor, to ensure that reflects laser is finally compiled in sensor.At the trial, laser beam incides on sensor heating surface by aperture, partial radiation energy is absorbed, and after inciding the inwall of metal bowl with irreflexive form, secondary reflection is back into being mapped on sensor heating surface again for other energy, and the dump energy after absorption incides on metal bowl inwall again.So repeatedly repeat this process, final incident laser energy is absorbed by sensor heating surface completely.Obviously, this form will significantly improve the effective absorptivity of sensor heating surface to laser emission.Emittance absorbing model is as follows:
E′＝ε·E+(1-ε)·E·ρ·ε+(1-ε)
2·E·ρ
2·ε+…
In formula, E is incident laser energy, and E ' is absorbing laser energy, and ε is heating surface material absorptivity, and ρ is the reflectivity of metal bowl.Can calculate, when heating surface material absorptivity is 0.2 to 0.3, when metal bowl reflectivity is 0.99, desirable equivalent absorptivity can reach 0.99.Consider the energy loss that laser incidence window causes, actual absorption rate can reach 0.95.The impact of sensor surface material absorptivity difference on actual absorption rate is less than 1%.
Next method described in the embodiment of the present invention is described in detail.
The present invention is used for thermocouple temperature sensor response consistency calibration system and scaling method, it is the innovation research carried out on the basis of traditional thermocouple temperature sensor TC Characteristic Curves scaling method, except to except the characteristic demarcation of temperature sensor thermocouple, further contemplate this parameter for the important in inhibiting of temperature sensor performance of time variable, when in the tested process of multiple thermocouple temperature sensor, will according to outside the demarcation of traditional thermocouple temperature sensor thermopair specific curves, also will by under controlling to be controlled condition to the heating power density of thermopair, measure multiple thermocouple temperature sensor N1, N2, N3 ...Laser instrument is started working as t
0in the moment, laser instrument heat time duration is t (s), and therefore laser instrument power cut-off is (t
0+ t) moment;
Gather the synchronous triggering signal of high-power carbon dioxide laser, when laser instrument is started working t
0in the moment, synchronous data sampling disposal system also starts to carry out data acquisition, a collection n temperature data per second, and data acquisition time is 2 × t, gathers { 2t (s) × n (individual/s) } individual data altogether;
For the data analysis gathered, its t of the temperature sensor of label i
0the temperature in moment is T
initially, at (t
0+ t) temperature in moment is T
middle, after laser instrument stops heating, temperature sensor, owing to having the response relaxation time, can continue to be warming up to maximum of T
maximumafter, then lower the temperature, set point of temperature sensor temperature maximum of T
maximumfor (t
0+ t+t
i) moment, therefore the speed of response p=(T of temperature sensor
middle-T
initially)/t; The temperature sensor response relaxation time is t
i, by threshold value diagnostic method, the temperature sensor speed of response of temperature sensor and temperature sensor response relaxation time not met the demands is rejected, and then realizes i temperature sensor response consistency calibration work in same group.
Above-mentioned threshold value diagnostic method refer to for test one group of temperature sensor speed of response p and response the relaxation time be t
iaverage respectively, if the speed of response p of a certain temperature sensor or response relaxation time are t
iwith the difference of corresponding mean value, be greater than predetermined difference (determining according to actual conditions), then judge that this temperature sensor has problems, namely reject this temperature sensor.
In sum, embodiments provide a kind of temperature sensor response consistency calibration test macro and method, The present invention gives under controlled constant LASER HEATING power condition, the intensification response curve of temperature sensor, and then obtain temperature sensor characteristic curve.The heater means of this invention for meeting controllable precise, adopts laser instrument exact heat, then adopts optical reflection metal bowl and plane mirror to ensure to be carried out fully consistent absorption by temperature sensor to be measured to heating laser irradiation energy.By above two aspects, ensure that the input variable of the temperature response curve treating testing temperature sensor is consistent, and then the properties influence of the temperature response curve shrinkage temperature sensor drawn itself, eliminate the impact of external environment on it.
Although described the present invention and advantage thereof in detail, be to be understood that and can have carried out various change when not exceeding the spirit and scope of the present invention limited by appended claim, substituting and conversion.And the scope of the application is not limited only to the specific embodiment of process, equipment, means, method and step described by instructions.One of ordinary skilled in the art will readily appreciate that from disclosure of the present invention, can use perform the function substantially identical with corresponding embodiment described herein or obtain and its substantially identical result, existing and that will be developed in the future process, equipment, means, method or step according to the present invention.Therefore, appended claim is intended to comprise such process, equipment, means, method or step in their scope.
The above; be only the present invention's preferably embodiment, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.
Claims (8)
1. a temperature sensor response consistency calibration test macro, it is characterized in that, comprise: high-power carbon dioxide laser (1), light pipe (2), optical reflection metal bowl (3), optical flat catoptron (4), test platform mechanism (5), vacuum storehouse (6) and temperature sensor to be calibrated (7), described vacuum storehouse (6) is placed on described test platform mechanism (5), optical reflection metal bowl (3) is provided with in described vacuum storehouse (6), optical flat catoptron (4) and temperature sensor to be calibrated (7), described temperature sensor to be measured (7) is placed in the focal point F 1 of described optical reflection metal bowl (3), described optical flat catoptron (4) is placed in the focal point F 2 of described optical reflection metal bowl (3), described high-power carbon dioxide laser (1) is connected with light pipe (2), the laser beam that described high-power carbon dioxide laser (1) is launched is after reflection, focal point F 1 point of described optical reflection metal bowl (3) is exposed to after incident aperture through described optical metal reverberation bowl (3), then through multiple reflections uniform irradiation to described optical reflection metal bowl (3) focal point F 2 on.
2. system according to claim 1, is characterized in that, the rated power of described high-power carbon dioxide laser (1) is 3000W, and pulsed frequency is 0 ~ 1000Hz, power stability ≯ ± 2%.
3. system according to claim 1, is characterized in that, reflectivity ≮ 98% of the metal-coated membrane of described optical reflection metal bowl (3).
4. system according to claim 1, is characterized in that, described optical flat catoptron (4) diameter phi 5mm, surface precision index RMS ≯ λ/10, reflectivity ≮ 98% of metal-coated membrane.
5. system according to claim 1, is characterized in that, the position positioning precision tolerance ≯ 0.5mm of described test platform mechanism (5).
6. system according to claim 1, is characterized in that, described vacuum storehouse (6) vacuum tightness ≯ 0.7MPa, internal diameter is not less than 40mm.
7. one kind for the conforming scaling method of temperature sensor, utilize above-mentioned calibration system, high-power carbon dioxide laser Emission Lasers light beam is propagated through light pipe, laser beam is through focal point F 1 point exposing to optical reflection metal bowl after the incident aperture of optical metal reverberation bowl, then through multiple reflections uniform irradiation to the focal point F 2 of reflective metals bowl, described method comprises:
Controlling high-power carbon dioxide laser Emission Lasers power is steady state value, utilizes the temperature sensor of high-power carbon dioxide laser Emission Lasers to numbering i to heat respectively, wherein i=1,2 ..., laser instrument is started working as t
0in the moment, laser instrument heat time duration is t (s), and therefore laser instrument power cut-off is (t
0+ t) moment;
Gather the synchronous triggering signal of high-power carbon dioxide laser, when laser instrument is started working t
0in the moment, synchronous data sampling disposal system also starts to carry out data acquisition, a collection n temperature data per second, and data acquisition time is 2 × t, gathers { 2t (s) × n (individual/s) } individual data altogether;
For the data analysis gathered, its t of the temperature sensor of label i
0the temperature in moment is T
initially, at (t
0+ t) temperature in moment is T
middle, after laser instrument stops heating, temperature sensor, owing to having the response relaxation time, can continue to be warming up to maximum of T
maximumafter, then lower the temperature, set point of temperature sensor temperature maximum of T
maximumfor (t
0+ t+t
i) moment, therefore the speed of response p=(T of temperature sensor
middle-T
initially)/t; The temperature sensor response relaxation time is t
i, by threshold value diagnostic method, the temperature sensor speed of response of temperature sensor and temperature sensor response relaxation time not met the demands is rejected, and then realizes i temperature sensor response consistency calibration work in same group.
8. method according to claim 7, is characterized in that, described threshold value diagnostic method refer to for test one group of temperature sensor speed of response p and response the relaxation time be t
iaverage respectively, if the speed of response p of a certain temperature sensor or response relaxation time are t
iwith the difference of corresponding mean value, be greater than predetermined difference, then judge that this temperature sensor has problems, namely reject this temperature sensor.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106644172A (en) * | 2017-01-23 | 2017-05-10 | 扬州大学 | Thermocouple cold-end thermostat device for portable field calibration and control method thereof |
| CN106885632A (en) * | 2017-03-03 | 2017-06-23 | 北京振兴计量测试研究所 | A kind of vacuum ultraviolet spectroscopy radiation meter calibrating method and device |
| CN107870049A (en) * | 2016-09-26 | 2018-04-03 | 北京振兴计量测试研究所 | A kind of high-temperature heat flux sensor calibration system |
| CN109211429A (en) * | 2017-07-03 | 2019-01-15 | 佛山市顺德区美的电热电器制造有限公司 | Temperature sampling method, apparatus and cooking appliance |
| CN109342984A (en) * | 2018-11-16 | 2019-02-15 | 南方电网科学研究院有限责任公司 | A kind of magnetoresistive chip temperature and humidity influences rectification building-out system and method |
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| CN109342984A (en) * | 2018-11-16 | 2019-02-15 | 南方电网科学研究院有限责任公司 | A kind of magnetoresistive chip temperature and humidity influences rectification building-out system and method |
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| CN105371992B (en) | 2017-12-15 |
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