CN105371992B - Temperature sensor response consistency calibration test system and method - Google Patents
Temperature sensor response consistency calibration test system and method Download PDFInfo
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- CN105371992B CN105371992B CN201510929982.7A CN201510929982A CN105371992B CN 105371992 B CN105371992 B CN 105371992B CN 201510929982 A CN201510929982 A CN 201510929982A CN 105371992 B CN105371992 B CN 105371992B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The present invention relates to a kind of temperature sensor response consistency calibration test system, including：High-power carbon dioxide laser 1, light pipe 2, optical reflection metal bowl 3, optical flat speculum 4, test platform mechanism 5, vacuum storehouse 6 and temperature sensor to be calibrated 7, the vacuum storehouse 6 is placed in the test platform mechanism 5, optical reflection metal bowl 3, optical flat speculum 4 and temperature sensor to be calibrated 7 are provided with the vacuum storehouse 6, the high-power carbon dioxide laser 1 is connected with light pipe 2.This invention ensures that the input variable for treating the temperature response curve of testing temperature sensor is consistent, and then the characteristic of the temperature response curve shrinkage temperature sensor drawn in itself influences, and eliminates influence of the external environment to it.
Description
Technical field
The present invention relates to technical field of optical test, more particularly to a kind of temperature sensor response consistency calibration test system
System and method.
Background technology
In temperature sensor detection field, the scaling method of traditional thermocouple temperature sensor is filled using dynamic calibration
Put or static demarcating device, its principle are to place thermocouple temperature sensor cold end to be calibrated and mixture of ice and water is housed
Vacuum flask in, to keep cold junction temperature, as 0 DEG C, hot junction is put into thermostat, and hot and cold side and potential difference meter are linked to be loop,
By the temperature of regulating thermostatic case, potentiometric thermoelectrical potential value E1, E2, E3 ... ... the En of corresponding points is read, while is recorded in table
In, to obtain the respective value of a series of temperature and thermoelectrical potential, and calibration value.Finally using thermoelectrical potential E as ordinate, temperature t is
Abscissa makes the TC Characteristic Curves of a demarcation.
The content of the invention
In view of above-mentioned analysis, the present invention is intended to provide a kind of temperature sensor response consistency calibration method of testing, is used
Surveyed with solving the scaling method of traditional thermocouple temperature sensor using dynamic calibration apparatus or static demarcating device
Existing environmental impact issues during examination.
The purpose of the present invention is mainly achieved through the following technical solutions：
The invention provides a kind of temperature sensor response consistency calibration test system, including：High-power carbon dioxide
Laser 1, light pipe 2, optical reflection metal bowl 3, optical flat speculum 4, test platform mechanism 5, vacuum storehouse 6 and to be calibrated
Temperature sensor 7, the vacuum storehouse 6 are placed in the test platform mechanism 5, and optical reflection gold is provided with the vacuum storehouse 6
Belong to bowl 3, optical flat speculum 4 and temperature sensor to be calibrated 7, it is anti-that the temperature sensor 7 to be measured is placed on the optics
Penetrate on the focus F1 points of metal bowl 3, the optical flat speculum 4 is placed on the focus F2 points of the optical reflection metal bowl 3
On, the high-power carbon dioxide laser 1 is connected with light pipe 2 so that what the high-power carbon dioxide laser 1 was launched
Laser beam is golden through the optical reflection is exposed to after the incident aperture of the optical metal reverberation bowl 3 after reflection
Belong to the focus F1 points of bowl 3, then on the focus F2 by multiple reflections uniform irradiation to the optical reflection metal bowl 3.
Further, the rated power of the high-power carbon dioxide laser 1 is 3000W, pulse frequency is 0~
1000Hz, power stability ≯ ± 2%.
Further, reflectivity ≮ 98% of the metal-coated membrane of the optical reflection metal bowl 3.
Further, the diameter phi 5mm of optical flat speculum 4, surface precision index RMS ≯ λ/10, metal-coated membrane
Reflectivity ≮ 98%.
Further, position positioning precision tolerance ≯ 0.5mm of the test platform mechanism 5.
Further, 6 vacuums of the vacuum storehouse ≯ 0.7MPa, internal diameter are not less than 40mm.
Present invention also offers a kind of scaling method for temperature sensor uniformity, using above-mentioned calibration system, greatly
Power carbon dioxide laser is launched laser beam and propagated by light pipe, and laser beam passes through the incidence of optical metal reverberation bowl
The focus F1 points of optical reflection metal bowl are exposed to after aperture, then by multiple reflections uniform irradiation to reflective metals bowl
Focus F2, methods described include：
It is steady state value to control high-power carbon dioxide laser transmitting laser power, utilizes high-power carbon dioxide laser
Transmitting laser is respectively heated to numbering i temperature sensor, wherein i=1, and 2 ..., it is t that laser, which is started working,0When
Carve, a length of t (s) during the laser heat time, therefore laser power cut-off is (t0+ t) moment；
The synchronous triggering signal of high-power carbon dioxide laser is gathered, as laser start-up operation t0Moment, data are same
Step acquisition processing system also begins to carry out data acquisition, and n temperature data of collection per second, data acquisition time is 2 × t, is adopted altogether
Collect { 2t (s) × n (individual/s) } individual data；
Analyzed for the data of collection, its t of label i temperature sensor0The temperature at moment is TInitially, in (t0+ t) when
The temperature at quarter is TIt is middle, after laser stops heating, temperature sensor is due to the response relaxation time, may proceed to be warming up to
Maximum of TIt is maximumAfterwards, then cool, it is specified that temperature sensor temperature maximum TIt is maximumFor (t0+t+ti) moment, therefore temperature sensor
Speed of response p=(TIt is middle-TInitially)/t；The temperature sensor response relaxation time is ti, by threshold value diagnostic method, by TEMP
The temperature sensor that the speed of response of device and temperature sensor response relaxation time are unsatisfactory for requiring is rejected, and then realizes same group
Middle i temperature sensor response consistency calibration work.
Further, the threshold value diagnostic method refers to the speed of response p and response relaxation for testing one group of temperature sensor
The Henan time is tiAverage respectively, if the speed of response p of a certain temperature sensor or response relaxation time are tiWith it is corresponding
The difference of average value, more than predetermined difference, then judge that the temperature sensor has problem, that is, reject the temperature sensor.
The present invention has the beneficial effect that：
This invention ensures that the input variable for treating the temperature response curve of testing temperature sensor is consistent, and then draw
Temperature response curve shrinkage temperature sensor characteristic in itself influence, eliminate influence of the external environment to it.
Other features and advantages of the present invention will illustrate in the following description, also, partial become from specification
Obtain it is clear that or being understood by implementing the present invention.The purpose of the present invention and other advantages can be by the explanations write
Specifically noted structure is realized and obtained in book, claims and accompanying drawing.
Brief description of the drawings
Accompanying drawing is only used for showing the purpose of specific embodiment, and is not considered as limitation of the present invention, in whole accompanying drawing
In, identical reference symbol represents identical part.
Fig. 1 is the structural representation of calibration system described in the embodiment of the present invention；
Fig. 2 is that optical reflection metal bowl and temperature sensor to be measured and optics are put down in system described in the embodiment of the present invention
The position relationship schematic diagram of face speculum.
Embodiment
The preferred embodiments of the present invention are specifically described below in conjunction with the accompanying drawings, wherein, accompanying drawing forms the application part, and
It is used for the principle for explaining the present invention together with embodiments of the present invention.
System described in the embodiment of the present invention is described in detail with reference to accompanying drawing first.
As shown in figure 1, Fig. 1 is the structural representation of calibration system described in the embodiment of the present invention, can specifically include：Big work(
Rate carbon dioxide laser 1, light pipe 2, optical reflection metal bowl 3, optical flat speculum 4, test platform mechanism 5, vacuum
Storehouse 6 and temperature sensor to be calibrated 7, vacuum storehouse 6 are placed in test platform mechanism 5, and optical reflection metal is provided with vacuum storehouse 6
Bowl 3, optical flat speculum 4 and temperature sensor to be calibrated 7, temperature sensor 7 to be measured are placed on optical reflection metal bowl 3
On focus F1 points, optical flat speculum 4 is placed on the focus F2 points of optical reflection metal bowl 3, and high-power carbon dioxide swashs
Light device 1 is connected with light pipe 2 so that the laser beam that high-power carbon dioxide laser 1 is launched is after reflection, through optics
The focus F1 points of optical reflection metal bowl 3 are exposed to after the incident aperture of metallic reflection bowl 3, it is then uniform by multiple reflections
Expose on the focus F2 of optical reflection metal bowl 3.
Wherein, the rated power of high-power carbon dioxide laser 1 is 3000W, ensures to add the effective of temperature sensor
Laser illumination energy requirement required for heat, pulse frequency is 0~1000Hz, realizes and the stable of laser output power is controlled
System, power stability ≯ ± 2%, ensure laser output energy with the stability during this use, light pipe by laser
The laser optical path of device output changes so that laser beam is irradiated into the thang-kng aperture of optical metal reverberation bowl；Optical reflection
The Ellipsoidal Surface equation of metal bowl 2, (rule of thumb it is generally between 12 degree to 15 degree) direction in special angle and opens a thang-kng
Aperture, reflectivity ≮ 98% of metal-coated membrane, high reflection film layer ensure that laser sufficiently multiple reflections can be exposed to finally
The hot surface to be added of temperature sensor to be calibrated, the diameter phi 5mm of optical flat speculum 3, surface precision index RMS ≯ λ/10,
Reflectivity ≮ 98% of metal-coated membrane, high reflection film layer ensure the band heating surface of energy adequate illumination temperature sensor after reflection,
Position positioning precision tolerance ≯ 0.5mm of dedicated testing platform mechanism 4, ensure beam Propagation after can be from optical reflection metal bowl
The center of incident aperture be irradiated into optical metal reverberation bowl, 5 vacuums of small size vacuum pipe ≯ 0.7MPa, internal diameter is not less than
40mm。
As shown in Figure 2, Fig. 2 is optical reflection metal bowl and the position of temperature sensor to be measured and optical flat speculum
Relation schematic diagram, temperature sensor to be measured is placed on to the focus F1 points of optical reflection metal bowl, optical flat speculum is put
The focus F2 points in optical reflection metal bowl are put, such a design avoids following phenomenon：The difference of temperature sensor absorptivity is
As caused by the difference of same material surface topography.The high-temperature alloy material absorptivity used at present be only 0.2 to 0.3 it
Between, i.e. the major part of incidenting laser radiation energy is not absorbed by sensor, but is reflected and lost.Through testing table
Bright, the absorptivity deviation of same batch high temperature alloy is up to 0.06, the average value with respect to 0.24, and its relative deviation is 25%,
That is for same lasing source, the heating power that different sensor surfaces is absorbed to can differ 25%.Obviously solution
Certainly calibration the problem of absorbed power difference for temperature sensor response characteristic has great importance.Sensor is improved to absorb
The uniformity of energy can set about in terms of two, that is, improve effective absorbency level and improve the uniformity mono- for effectively absorbing energy
Individual metal hemispherical mirror such as schemes to place, and the metal bowl of a similar back-off, sensor heating surface is placed in circle centre position.Metal bowl
Top be provided with the aperture equal with lasing beam diameter, the inwall of metal bowl is coated with height with its sensor frock part covered
Reflectivity metal film, effective reflectivity are more than 0.99, and metal the rim of a bowl is covered with being equally coated with the bowl cover of high-reflectivity metal film, bowl
Lid is provided with the circular hole mutually fitted with sensor frock, and bowl cover inner face should be in same plane with sensor, to ensure reflection laser most
Sensor is compiled in eventually.At the trial, laser beam is incided on sensor heating surface by aperture, and partial radiation energy is absorbed,
Other energy incide after the inwall of metal bowl that secondary reflection back into being mapped on sensor heating surface, is inhaled again in the form of irreflexive
Dump energy after receipts is again incident on metal bowl inwall.This process is so repeated several times, final incident laser energy is complete
Absorbed entirely by sensor heating surface.Obviously, this form will significantly improve effective absorption of the sensor heating surface to laser emission
Rate.Emittance absorbing model is as follows：
E '=ε E+ (1- ε) E ρ ε+(1- ε)2·E·ρ2·ε+…
In formula, E is incident laser energy, and E ' is absorbs laser energy, and ε is heating surface material absorptivity, and ρ is metal bowl
Reflectivity.It can calculate, when heating surface material absorptivity is 0.2 to 0.3, and metal bowl reflectivity is 0.99, preferable equivalent suction
Yield can reach 0.99.Energy loss caused by considering laser light incident window, actual absorption rate is up to 0.95.Sensor surface
Influence of the material absorptivity difference to actual absorption rate is less than 1%.
Next methods described of the embodiment of the present invention is described in detail.
The present invention is used for thermocouple temperature sensor response consistency calibration system and scaling method, is in traditional thermoelectricity
The innovation research carried out on the basis of even temperature sensor thermocouple characteristic curve scaling method, except to temperature sensor thermoelectricity
Outside even characteristic demarcation, further contemplate time variable this for temperature sensor performance important in inhibiting
Parameter, during multiple thermocouple temperature sensors are tested, special according to traditional thermocouple temperature sensor thermocouple
Determine outside the demarcation of curve, to be also under controlled condition by controlling the heating power density to thermocouple, measure multiple thermocouples
Temperature sensor N1, N2, N3 ....It is t that laser, which is started working,0Moment, a length of t (s) during the laser heat time, therefore swash
The power cut-off of light device is (t0+ t) moment；
The synchronous triggering signal of high-power carbon dioxide laser is gathered, as laser start-up operation t0Moment, data are same
Step acquisition processing system also begins to carry out data acquisition, and n temperature data of collection per second, data acquisition time is 2 × t, is adopted altogether
Collect { 2t (s) × n (individual/s) } individual data；
Analyzed for the data of collection, its t of label i temperature sensor0The temperature at moment is TInitially, in (t0+ t) when
The temperature at quarter is TIt is middle, after laser stops heating, temperature sensor is due to the response relaxation time, may proceed to be warming up to
Maximum of TIt is maximumAfterwards, then cool, it is specified that temperature sensor temperature maximum TIt is maximumFor (t0+t+ti) moment, therefore temperature sensor
Speed of response p=(TIt is middle-TInitially)/t；The temperature sensor response relaxation time is ti, by threshold value diagnostic method, by TEMP
The temperature sensor that the speed of response of device and temperature sensor response relaxation time are unsatisfactory for requiring is rejected, and then realizes same group
Middle i temperature sensor response consistency calibration work.
Above-mentioned threshold value diagnostic method refers to that for the speed of response p of one group of temperature sensor of test and response relaxation time be ti
Average respectively, if the speed of response p of a certain temperature sensor or response relaxation time are tiWith corresponding average value
Difference, more than predetermined difference (being determined according to actual conditions), then judge that the temperature sensor has problem, that is, reject the temperature
Sensor.
In summary, the embodiments of the invention provide a kind of temperature sensor response consistency calibration test system and side
Method, The present invention gives under the conditions of controlled constant laser heating power, the heating response curve of temperature sensor, and then obtain
Temperature sensor characteristic curve.This invention is to meet the heater meanses of controllable precise, is accurately heated using laser, then used
Optical reflection metal bowl ensures fully consistent to the progress of heating laser irradiation energy by temperature sensor to be measured with plane mirror
Absorption.Two aspects, ensure that the input variable for the temperature response curve for treating testing temperature sensor is consistent more than,
And then the characteristic of the temperature response curve shrinkage temperature sensor drawn in itself influences, and eliminates influence of the external environment to it.
Although the present invention and its advantage is described in detail it should be appreciated that without departing from by appended claim
Various changes, replacement and conversion can be carried out in the case of the spirit and scope of the present invention limited.Moreover, the model of the application
Enclose the process described by specification of being not limited only to, equipment, means, the specific embodiment of method and steps.In the art is common
Technical staff will readily appreciate that from the disclosure, can be used and performed and corresponding reality described herein according to the present invention
Apply the essentially identical function of example or obtain process essentially identical with it result, existing and that future is to be developed, equipment,
Means, method or step.Therefore, appended claim is intended to include such process, equipment, hand in the range of them
Section, method or step.
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should all be included within the scope of the present invention.
Claims (8)
- A kind of 1. temperature sensor response consistency calibration test system, it is characterised in that including：High-power carbon dioxide laser Device (1), light pipe (2), optical reflection metal bowl (3), optical flat speculum (4), test platform mechanism (5), vacuum storehouse (6) With temperature sensor to be calibrated (7), the vacuum storehouse (6) is placed on the test platform mechanism (5), in the vacuum storehouse (6) It is provided with optical reflection metal bowl (3), optical flat speculum (4) and temperature sensor to be calibrated (7), the temperature to be calibrated Sensor (7) is placed on the focus F1 points of the optical reflection metal bowl (3), and the optical flat speculum (4) is placed on On the focus F2 points of the optical reflection metal bowl (3), the high-power carbon dioxide laser (1) is connected with light pipe (2), So that the laser beam of the high-power carbon dioxide laser (1) transmitting is after reflection, through the optical reflection metal The focus F1 points of the optical reflection metal bowl (3) are exposed to after the incident aperture of bowl (3), it is then uniform by multiple reflections Expose on the focus F2 of the optical reflection metal bowl (3).
- 2. system according to claim 1, it is characterised in that the specified work(of the high-power carbon dioxide laser (1) Rate is 3000W, and pulse frequency is 0~1000Hz, power stability ≯ ± 2%.
- 3. system according to claim 1, it is characterised in that the metal-coated membrane of the optical reflection metal bowl (3) it is anti- Penetrate rate ≮ 98%.
- 4. system according to claim 1, it is characterised in that optical flat speculum (4) the diameter phi 5mm, face type Precision index RMS ≯ λ/10, reflectivity ≮ 98% of metal-coated membrane.
- 5. system according to claim 1, it is characterised in that the position positioning precision of the test platform mechanism (5) is public Difference ≯ 0.5mm.
- 6. system according to claim 1, it is characterised in that vacuum storehouse (6) vacuum ≯ 0.7MPa, internal diameter be not small In 40mm.
- 7. a kind of scaling method for temperature sensor uniformity, utilize any described temperature sensors of claim 1-6 Consistency calibration test system is responded, high-power carbon dioxide laser is launched laser beam and propagated by light pipe, laser light Beam is through the focus F1 points that optical reflection metal bowl is exposed to after the incident aperture of optical reflection metal bowl, then by multiple Reflective homogeneous exposes to the focus F2 of reflective metals bowl, and methods described includes：It is steady state value to control high-power carbon dioxide laser transmitting laser power, is launched using high-power carbon dioxide laser Laser is respectively heated to numbering i temperature sensor, and it is t that laser, which is started working,0Moment, laser heat time duration For t, unit s, therefore laser power cut-off is (t0+ t) moment；The synchronous triggering signal of high-power carbon dioxide laser is gathered, when laser is in t0Moment is started working, and data syn-chronization is adopted Collection processing system also begins to carry out data acquisition, and n temperature data of collection per second, data acquisition time is 2 × t, gathers { 2t altogether × n } individual data；Analyzed for the data of collection, its t of label i temperature sensor0The temperature at moment is TInitially, in (t0+ t) moment Temperature is TIt is middle, after laser stops heating, temperature sensor is due to the response relaxation time, may proceed to be warming up to maximum Value TIt is maximumAfterwards, then cool, it is specified that temperature sensor temperature maximum TIt is maximumFor (t0+t+ti) moment, therefore the sound of temperature sensor Answer speed p=(TIt is middle-TInitially)/t；The temperature sensor response relaxation time is ti, by threshold value diagnostic method, by temperature sensor The temperature sensor that the speed of response and temperature sensor response relaxation time are unsatisfactory for requiring is rejected, and then realizes i in same group Individual temperature sensor response consistency calibration work.
- 8. according to the method for claim 7, it is characterised in that the threshold value diagnostic method refers to pass for one group of temperature of test The speed of response p of sensor and response relaxation time are tiAverage respectively, if the speed of response p of a certain temperature sensor or The response relaxation time is tiWith the difference of corresponding average value, more than predetermined difference, then judge that the temperature sensor is present and ask Topic, that is, reject the temperature sensor.
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| CN107870049B (en) * | 2016-09-26 | 2019-08-27 | 北京振兴计量测试研究所 | A kind of high-temperature heat flux sensor calibration system |
| CN106644172A (en) * | 2017-01-23 | 2017-05-10 | 扬州大学 | Thermocouple cold-end thermostat device for portable field calibration and control method thereof |
| CN106885632B (en) * | 2017-03-03 | 2019-01-29 | 北京振兴计量测试研究所 | A kind of vacuum ultraviolet spectroscopy radiation meter calibrating method and device |
| CN109211429B (en) * | 2017-07-03 | 2020-12-22 | 佛山市顺德区美的电热电器制造有限公司 | Temperature sampling method and device and cooking appliance |
| CN109342984A (en) * | 2018-11-16 | 2019-02-15 | 南方电网科学研究院有限责任公司 | A kind of magnetoresistive chip temperature and humidity influences rectification building-out system and method |
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| CN100487399C (en) * | 2006-10-19 | 2009-05-13 | 沈阳东大传感技术有限公司 | Consumption-type thermal couple on-line calibration method |
| CN102539019B (en) * | 2012-01-05 | 2013-09-25 | 北京东方计量测试研究所 | Temperature measurement and calibration platform in space vacuum environment |
| CN102788767A (en) * | 2012-08-24 | 2012-11-21 | 中国科学院光电技术研究所 | Device for measuring material refractive index temperature coefficient under low temperature based on minimum deviation angle method |
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